JPH1194158A - Grooved flange, grooved pipe flange and interposed body between flanges - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain excellent airtight holding even in the case of a vaccum area in use being ultra-high vacuum and make flanges frequently attachable/ detachable by forming first and second gasket fit-in grooves for fitting different kinds of first and second gaskets, at the side faces of the flanges. SOLUTION: In the case of welding a grooved flange 1 with circular holes to an upper end part of a branch pipe 8 fitted to the upper part of a vacuum container 7 and airtightly closing the branch pipe 8 with a blind type cone flat flange (grooved flange) 1 disposed above, two gasket fit-in grooves 4, 5 are concentrically formed at the opposed faces of the respective flanges 1, 1. A metal gasket is fitted into the first gasket fit-in groove 4, and an O-ring 11 is fitted to the second gasket fit-in groove 5. A ring shape interposed body 12 between flanges is interposed between two-O-rings 11, and the O-rings 11 can be pressed from both upper and lower faces at the time of fastening the flanges 1, 1 by bolts 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grooved flange, a grooved pipe flange, and an interposed body between flanges.
The present invention relates to a technique for improving a seal structure of a flange or a pipe flange.

[0002]

2. Description of the Related Art As is well known, as a flange used in manufacturing a vacuum apparatus or the like, a so-called JIS flange whose dimensions are determined based on JIS standards, and a JIS flange.
There is an S-flange that is called a conflat flange having a different required location size. Further, as the same kind of these flanges, there is also a pipe flange in which a tubular portion and a flange portion are integrally formed.

The above-mentioned JIS flange is used for manufacturing a vacuum device or the like whose use mode is set to a relatively low vacuum region. A gasket fitting groove formed on a side surface of the flange has a sectional shape. It is rectangular. An O-ring made of synthetic rubber or the like or a gasket similar to this is mounted in the gasket fitting groove. Also,
When the JIS flange is joined and fixed to other flanges in an airtight state, the other flanges press the O-ring or the like while the O-ring or the like is mounted in the gasket fitting groove. In this case, the pressing surface of the other flanges for pressing the O-ring or the like is generally flat.

On the other hand, the above-mentioned conflat flange is used when manufacturing a vacuum apparatus or the like whose use mode is a high vacuum region or an ultra-high vacuum region, and a gasket fitting formed on a side surface of the flange. Examples of the groove include a groove having an annular protrusion having a triangular cross section. A flat annular gasket made of metal is mounted in the gasket fitting groove. When the conflat flange is joined and fixed to other flanges in an airtight state, the metal gasket or the like is attached to the gasket fitting groove, and the metal gasket or the like is attached to another flange. In this case, a gasket fitting groove similar to that described above is generally formed on the pressing surface of another flange that presses the metal gasket or the like. Therefore, the annular projections of the two gasket fitting grooves bite into the metal gasket from both sides.

As exemplified above, since the type of gasket needs to be changed according to the difference in the degree of vacuum used, the shape of the gasket fitting groove formed in the flange is inevitably adjusted accordingly. I have to be different. Therefore, conventionally, a flange used only when the degree of vacuum used is high and a flange used only when the degree of vacuum used is low are actually manufactured as dedicated products.

[0006]

However, if dedicated flanges are used in accordance with the difference in the degree of vacuum used as described above, the following problems occur.

That is, for example, when the above-mentioned conflat flange is used, a low vacuum region to an ultra-high vacuum region (10 ^-10 T)
orr) can be dealt with, but in this case, when the metal gasket is installed in the gasket fitting groove of the conflat An annular groove or scratch due to the biting of the annular projection is formed on both surfaces of the substrate. For this reason, in the case where another flange is detached from the conflat flange and then the other flange is joined and fixed again, the metal gasket must be replaced with a undamaged metal gasket. Strictly speaking,
This metal gasket has a maximum number of uses of two to three times, that is, a number of times that removal and joining and fixing can be performed without impairing airtightness. In addition, when performing the joining and fixing work, it is necessary to use a tool such as a torque wrench to perform screw fastening with a predetermined torque that meets the regulations. Therefore, if other flanges must be frequently removed from the conflat flange, a large number of metal gaskets are required, which is extremely disadvantageous in terms of cost. Requires a troublesome and complicated operation each time using a torque wrench or the like, and the labor or burden imposed on the operator becomes great.

On the other hand, for example, an O-ring or the like mounted in the gasket fitting groove of the JIS flange is not damaged by joining and fixing with another flange. Even if it must be removed frequently, the same O-ring or the like can be used repeatedly to fix other flanges, and at the time of joining and fixing, there is no need for a torque wrench etc. so that work can be done easily. Has advantages. However, in this case, the used vacuum area is about 5 × 10
It will be limited to a relatively low vacuum region below ^-8 Torr. For this reason, there is a problem that once a vacuum device or the like is manufactured using the JIS flange, such a request cannot be met even if the used vacuum region is changed to, for example, an ultra-high vacuum region. ing.

In addition, for example, when conducting an experiment or the like in a vacuum atmosphere inside a vacuum device or the like, preliminary changes are made in a relatively low vacuum region while changing the internal state of the vacuum device or the like in an initial stage. It is sometimes necessary to perform a full-scale experiment or the like in an ultra-high vacuum region at the time when the internal state of the vacuum device or the like is determined by performing a simple experiment or the like. In such a case, when performing the above-mentioned preliminary experiment and the like, the flange must be fixed and fixed and removed many times in order to change the internal state of the vacuum device and the like. In this case, if the JIS flange is used, a full-scale experiment or the like in the ultra-high vacuum region cannot be performed, and if the conflat flange is used, the preliminary experiment cannot be performed. When performing such operations, a large number of metal gaskets are wasted, and frequent joining and fixing work becomes extremely complicated.

[0010] The above problems are caused by the fact that other types of flanges and pipe flanges having the same or similar gasket fitting groove as the JIS flange and the same or similar gasket fitting groove as the conflat flange are formed. A similar problem arises with other types of flanges and pipe flanges formed.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and can maintain good airtightness even when the operating vacuum region is an ultra-high vacuum. A flange, a pipe flange, and an inter-flange interposition body capable of simultaneously realizing both matters that the flange can be fixed and removed frequently without causing waste of the gasket and complicating the operation. Is to provide a technical problem.

[0012]

SUMMARY OF THE INVENTION A grooved flange, a grooved pipe flange and an inter-flange interposed member according to the present invention are characterized in that they are configured as described below in order to achieve the above technical object. .

That is, the invention according to the first aspect of the present invention relates to a grooved flange, wherein a first gasket fitting groove in which a first gasket is fitted on a side surface of the flange, and a type different from the first gasket. The second gasket of the second
A gasket fitting groove is formed.

According to a second aspect of the present invention, there is provided a pipe flange in which a tubular portion and a flange portion are integrally formed, wherein a side surface of the flange portion on a side opposite to the tubular portion is provided. A first gasket fitting groove in which one gasket is fitted and a second gasket fitting groove in which a second gasket of a type different from the first gasket is formed.

According to a third aspect of the present invention, the first gasket fitting groove into which the first gasket is fitted and the second gasket of a type different from the first gasket are fitted. An inter-flange arrangement used when two flanges or pipe flanges having the second gasket fitting groove formed on the same side surface are fixed in an airtight state by joining the side surfaces having the two grooves formed together. A body, one end face of which presses a gasket mounted in one of the fitting grooves of one of the flanges and the pipe flange, and the other end face of which is the same as that of the other flange or the pipe flange described above. The gasket mounted in the fitting groove is configured to be pressed.

[0016]

According to the first aspect of the present invention, the first gasket fitting groove into which the first gasket (for example, a metal gasket) is fitted, and the second gasket fitting groove are provided on the side surface of the flange. Two fitting grooves are formed with a second gasket fitting groove into which a gasket (for example, an O-ring) is fitted. Therefore, if this flange is attached to a vacuum device or the like, the operating vacuum range is relatively low (about 5 × 10 ⁻⁸ Torr).
In the case of the following), only the second gasket fitting groove has O
By joining and fixing to another flange while the ring is mounted, the same O-ring can be used even if the other flange is frequently removed and attached. In addition, at the time of attachment, there is no need to use a torque wrench or the like, and work can be performed easily.

On the other hand, when the working vacuum region is an ultra-high vacuum,
With the metal gasket mounted only in the first gasket fitting groove, it is joined and fixed to another flange. In this way, airtightness can be reliably maintained even in use in an ultra-high vacuum region (about 10 ⁻¹⁰ Torr).

As described above, according to the first aspect of the present invention, it is possible to reliably maintain airtightness even when the operating vacuum region is an ultra-high vacuum, and at the same time, when the operating vacuum region is a relatively low vacuum. The flange can be joined and fixed and removed frequently without wasting the gasket and without complicating the operation.

According to a second aspect of the present invention, the first and second gasket fitting grooves having the same function as described above are formed on the side surface of the flange portion of the pipe flange. The same operation and effect as in the case of the invention described in 1 are obtained.

Further, according to the invention described in claim 3, with reference to the above-mentioned example, the O-ring mounted in the second gasket fitting groove of the flange is crushed by a flat portion such as another flange. However, when the two flanges to be joined and fixed both have the first and second gasket fitting grooves, the state in which the O-rings are mounted in the second gasket fitting grooves respectively. Then, it is necessary to crush each of the two O-rings disposed opposite to each other with a flat portion. Therefore, one O-ring is pressed on one end face of the inter-flange interposed body, and the other O-ring is pressed on the other end face of the inter-flange interposed body. The flanges (or pipe flanges) are joined and fixed.

According to such a configuration, it is not necessary to separately manufacture a flange having a flat portion for crushing the O-ring, and it is possible to maintain the airtightness by the O-ring using the same two flanges. Will be possible. This allows
The common use of the flanges is extremely advantageous for mass production.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a grooved flange, a grooved pipe flange and an interposed body between flanges according to the present invention will be described below with reference to the drawings.

FIG. 1 is a front view showing a basic structure of a grooved flange according to a first embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing a basic structure of the grooved flange 1 similarly. As shown in the drawings, this grooved flange 1 is obtained by improving a commercially available conflat flange, and a plurality of disc-shaped main bodies 2 are provided on the outer peripheral portion thereof at equal angular intervals. A through hole (or screw hole) 3 is formed. A first gasket fitting groove 4 into which a metal gasket is fitted is formed on the inner peripheral side on one side surface, and a second gasket fitting groove into which an O-ring is fitted is further formed on the inner peripheral side. A mating groove 5 is formed.

The first gasket fitting groove 4 (see FIG. 2) has an annular projection 4a having a triangular cross section, and the apex of the annular projection 4a cuts into the plane of the metal gasket. Has become. On the other hand, the second gasket fitting groove 5 is an annular recess having a rectangular cross section, and the O-ring mounted in the fitting groove 5 is pressed from the open side of the groove 5. . In this case, the circular surface 6 on which the second gasket fitting groove 5 is formed is located at a position recessed inward by a predetermined dimension from the one side end surface 2a of the main body 2. In addition, what is shown in the figure is obtained by additionally processing a second gasket fitting groove 5 in a so-called mesh-type conflat flange. Second on the conflat flange
The gasket fitting groove 5 may be additionally processed.

FIGS. 3 and 4 are longitudinal sectional views showing the use state of the grooved flange 1 according to the first embodiment. As shown in each of the drawings, a branch pipe 8 is fixed by welding above the vacuum vessel 7, and an upper end of the branch pipe 8 is
The grooved flange 1 having the circular hole 9 is fixed by welding. The plurality of holes 3 formed in the outer peripheral portion of the grooved flange 1 are screw holes. Above the grooved flange 1, a second flat type flange is provided.
The grooved flange 1 obtained by additionally processing the gasket fitting groove 5 is joined and fixed, and the plurality of holes 3 formed on the outer peripheral portion of the grooved flange 1 on the upper side are stupid holes. These two grooved flanges 1 are connected to the screw holes 3.
With the stupid holes 3 aligned, they are fastened by a plurality of bolts 10 as shown.

In this case, in the state shown in FIG. 3, the O-rings 11, 11 are fitted in the second gasket fitting grooves 5, 5 of the two grooved flanges 1, 1, respectively. Between the two grooved flanges 1, 1, an inter-flange interposed body 12 for pressing the two O-rings 11, 11 is interposed. More specifically, the inter-flange interposed body 12 is a ring-shaped member having both upper and lower end surfaces formed as flat portions, the upper end surface of which presses the upper O-ring 11 and the lower end surface thereof. The lower O-ring 11 is pressed. The upper end surface and the lower end surface of the inter-flange interposed body 12 are respectively located at the concave positions of the upper and lower two flanges 1, 1.
Abut or almost abut. In addition, since it is preferable that this inter-flange interposed body 12 is fitted in a state where it is appropriately positioned with respect to the two flanges 1 and 1, for example, the outer peripheral portion of the inter-flange interposed body 12 is used. However, the outer diameter of the first gasket fitting groove 4 may be set so as to be fitted on the inner circumferential side of the annular projection 4a, and the outer peripheral portion of the inter-flange interposed body 12 is extended outward. The outer diameter of the extended portion may be set so that the outermost peripheral surface of the extended portion is fitted to the inner peripheral surface of the outermost peripheral portion of the first gasket fitting groove 4.

With such a structure, by removing the upper grooved flange 1 and inserting a hand into the inside of the vacuum vessel 7, the set state of the components inside the vacuum vessel 7 is changed, and then the upper groove is again formed. The work of attaching the attached flange 1 to the state shown in the drawing, making the inside of the vacuum vessel 7 a vacuum state (5 × 10 ⁻⁸ Torr or less), and performing a preliminary experiment is performed by using the same two O-rings 11. 11 can be performed frequently and repeatedly. That is, the O-ring 1
Even when the pressed state (crushed state) and the non-pressed state are frequently repeated, 1, 1 and 11 can be used over and over because their restoring force is exerted. As for the inter-flange interposed body 12, the same one can be used many times as a matter of course. Therefore,
According to the configuration shown in FIG. 3, the upper grooved flange 1 can be frequently attached and detached without replacing any part with a new one. Therefore, it is not necessary to use such a method, and the workability is improved.

On the other hand, in the state shown in FIG.
A flat ring-shaped metal gasket 1 is inserted between the first gasket fitting grooves 4, 4 of the grooved flanges 1, 1.
3 are fitted in a state of being interposed. Then, the annular projections 4a, 4a of the first gasket fitting grooves 4, 4, respectively.
Are indented on both sides of the metal gasket 13. In this case, the degree of bite must be appropriate. Therefore, when fastening the bolt 10, it is necessary to carefully join and fix the bolt 10 using a torque wrench so that the fastening force of the bolt 10 becomes an optimum value. .
In addition, the O-ring 1
1 and 11 are removed, and the inter-flange interposed body 12 is not used.

With the structure using the metal gasket 13 as described above, the working vacuum degree can be increased as compared with the case where the O-ring is used, and the specific working vacuum degree is 10 ^−. It becomes an ultra-high vacuum area of about ¹⁰ Torr. In this case, once the two flanges 1 and 1 are joined and fixed once, both sides of the metal gasket 13 are annularly scratched. Therefore, after removing the upper grooved flange 1 from the state shown in the figure, Then, the same metal gasket 13 cannot be used again (strictly, it can be reused two to three times). Therefore, when performing a preliminary experiment in which frequent attachment and detachment of the upper grooved flange 1 is necessary, the state shown in FIG. When it is no longer necessary to change the internal state of the vacuum vessel 7 as a result of the experiment, the metal gasket 13 is used to make the state shown in FIG. By doing so, wasteful consumption of the metal gasket 13 is eliminated, and the mounting work of the upper grooved flange 1 is not unnecessarily complicated and troublesome.

Further, according to the structure shown in FIGS. 3 and 4, the first and second gasket fitting grooves 4, 5 of the grooved flange are provided.
1 and FIG. 2 can be used for both of the grooved flanges.
Can be used, so that parts can be shared, which is advantageous for mass production.

FIGS. 5 and 6 are longitudinal sectional views showing the use of the grooved flange according to the second embodiment of the present invention. As shown in the figures, a branch pipe 28 is fixed above the vacuum vessel 27 by welding, and a grooved flange 21 according to the second embodiment is provided at the upper end of the branch pipe 28. It is fixed by welding. The grooved flange 21 is formed with a first gasket fitting groove 24 and a second gasket fitting groove 25, a circular hole 29 in an axial center portion, and a plurality of screw holes 23 in an outer peripheral portion. This is the same as in the first embodiment. The second embodiment differs from the first embodiment in that the formation surface 26 of the second gasket fitting groove 25 is flush or substantially flush with the side end face 22a of the disc-shaped body 22. It is a point that has become.
An annular recess 34 is formed on the inner peripheral side of the annular projection 24a of the first gasket fitting groove 24 to avoid interference with the metal gasket.

The first gasket fitting groove 24 is formed in the cover flange 35 of the metal type which is joined and fixed above the grooved flange 21, whereas the second gasket fitting groove 24 is formed in the cover flange 35.
The gasket fitting groove 25 is not formed. The side end surface 35a of the lid flange 35 is flush or substantially flush over the entire surface, and an annular recess 36 similar to the above is formed in the side end surface 35a. A plurality of stupid holes 37 are formed in the outer peripheral portion of the lid flange 35, and the lid flange 35 and the grooved flange 21 are formed.
Is fastened by a plurality of bolts 30.

FIG. 5 shows the second example of the grooved flange 21.
FIG. 6 shows a state in which the O-ring 31 is attached only to the gasket fitting groove 25 and the flanges 21 and 35 are joined and fixed.
Shows a state in which the metal gasket 33 is mounted only in the first gasket fitting groove 24 and the flanges 21 and 35 are joined and fixed. As is clear from each of these figures,
In the second embodiment, not only the same operation and effect as in the first embodiment can be obtained, but also the inter-flange interposition body 12 in the first embodiment becomes unnecessary, and the number of parts can be reduced. It is planned. However, the grooved flange 21 and the lid flange 35 cannot be shared.

FIGS. 7 and 8 are longitudinal sectional views showing the use of the grooved flange according to the third embodiment of the present invention. As shown in the figures, a branch pipe 48 is fixed by welding above the vacuum vessel 47, and a grooved flange 41 according to the third embodiment is provided at the upper end of the branch pipe 48. It is fixed by welding. The grooved flange 41 has a first gasket fitting groove 44 and a second gasket fitting groove 45 formed therein, a circular hole 49 in an axial center portion, and a plurality of screw holes 43 in an outer peripheral portion. This is the same as in the first and second embodiments. The third embodiment is different from the first and second embodiments in that:
As shown in FIG. 7, a fitting recess 46 is formed on the inner peripheral side of the second gasket fitting groove 45, and the second gasket fitting groove 45 is formed on the bottom surface 46 a of the fitting recess 46. Is a point.

The fitting recess 4 of the grooved flange 41
6 is fitted with a fitting convex portion 56 of a cover-type lid flange 55 that is joined and fixed thereabove. A plurality of stupid holes 57 are formed in the outer peripheral portion of the lid flange 55, and the lid flange 55 and the grooved flange 41 are fastened by a plurality of bolts 50. In this case, the lid flange 55 shown in FIG.
Is a flange used as a dedicated product when pressing the O-ring 51 mounted in the second gasket fitting groove 45 of the grooved flange 41 according to the third embodiment.

On the other hand, as shown in FIG. 8, when a metal gasket 53 is used, the lid flange 65 joined and fixed to the grooved flange 41 is a commercially available conflat flange, that is, FIG. A flange in which the second gasket fitting groove 5 is not formed is used for the grooved flange 1 shown in FIGS. Therefore,
A detailed description of the lid flange 65 used in this case is omitted.

As is apparent from the states shown in FIGS. 7 and 8, according to the third embodiment, in addition to the main functions and effects similar to those of the first embodiment described above, the main effects are obtained. Since the two flanges are properly fitted, there is an advantage that their positioning is made accurate. However, the grooved flange 41 and the lid flanges 55, 65
The second embodiment is different from the first embodiment in that the two types of lid flanges 55 and 65 cannot be shared in addition to the common configuration described above.

FIG. 9 is a longitudinal sectional view of a single flange showing a fourth embodiment of the present invention. As shown in FIG.
In the embodiment, the present invention is applied to a pipe flange 70 in which a tubular portion 70a and a flange portion 70b are integrally formed. The flange portion 70 of the grooved pipe flange 70
Since the structure of each part in b is the same as that of the grooved flange 1 of the first embodiment, the structure of each part shown in FIG. 9 is the same as that shown in FIG.
The same reference numerals are given and the description is omitted. Therefore, in the fourth embodiment, the same operation and effect as those of the first embodiment can be obtained. Further, it goes without saying that the structure of the grooved flanges 21 and 41 of the second and third embodiments can be applied to the pipe flange 70 according to the fourth embodiment.
Therefore, the same effects as those of the second and third embodiments can be obtained for the pipe flange.

In the above embodiment, the second gasket fitting groove is a groove for an O-ring. The second gasket fitting groove is formed of a gasket other than the O-ring, for example, a square gasket or a shell. It may be a groove for a shaped gasket,
Similarly, the first gasket fitting groove is not limited to the metal gasket groove. In short, the first gasket fitting groove and the second gasket fitting groove are not limited to the first gasket fitting groove. It is only necessary that the gasket to be fitted be of a different type.

[Brief description of the drawings]

FIG. 1 is a front view showing a single structure of a grooved flange according to a first embodiment of the present invention.

FIG. 2 is a longitudinal sectional view showing a single structure of a grooved flange according to the first embodiment of the present invention.

FIG. 3 is a longitudinal sectional view of a main part showing a use state of a grooved flange and a structure of an inter-flange interposed body according to a first embodiment of the present invention.

FIG. 4 is a longitudinal sectional view of a main part showing a use state of the grooved flange according to the first embodiment of the present invention.

FIG. 5 is a longitudinal sectional view of a main part showing a use state of a grooved flange according to a second embodiment of the present invention.

FIG. 6 is a longitudinal sectional view of a main part showing a use state of a grooved flange according to a second embodiment of the present invention.

FIG. 7 is a longitudinal sectional view of a main part showing a use state of a grooved flange according to a third embodiment of the present invention.

FIG. 8 is a longitudinal sectional view of a main part showing a use state of a grooved flange according to a third embodiment of the present invention.

FIG. 9 is a longitudinal sectional view showing a single structure of a grooved pipe flange according to a fourth embodiment of the present invention.

[Explanation of symbols]

1, 21, 41 Grooved flange 4, 24, 44 First gasket fitting groove 5, 25, 45 Second gasket fitting groove 11, 31, 51 Second gasket (O-ring) 12 Intermediate body between flanges 13 , 33, 53 First gasket (metal gasket) 70 Groove pipe flange 70a Tubular part 70b Flange part

Claims (3)

[Claims] 1. A first gasket fitting groove into which a first gasket is fitted, and a second gasket fitting into which a second gasket of a type different from the first gasket is fitted on a side surface of the flange. A grooved flange formed with a mating groove. A first gasket fitting groove into which a first gasket is fitted on a side surface of the flange portion integrally formed with the flange portion on a side opposite to the tubular portion of the flange portion; And a second gasket fitting groove in which a second gasket of a different type from the first gasket is fitted. 3. A first gasket fitting groove into which a first gasket is fitted, and a second gasket fitting groove into which a second gasket of a type different from the first gasket is fitted. A flange-to-flange interposed body used when two sides of a flange or a pipe flange formed on a side face are joined together with the side faces formed with the above-mentioned grooves to be airtight, and one end face thereof is provided. , Pressing a gasket mounted in one of the fitting grooves of one flange or pipe flange,
In addition, an inter-flange interposition body characterized in that the other end face is configured to press a gasket mounted in the same kind of fitting groove of the other flange or pipe flange.