JPH1157630A5 - - Google Patents

Info

Publication number
JPH1157630A5
JPH1157630A5 JP1997215120A JP21512097A JPH1157630A5 JP H1157630 A5 JPH1157630 A5 JP H1157630A5 JP 1997215120 A JP1997215120 A JP 1997215120A JP 21512097 A JP21512097 A JP 21512097A JP H1157630 A5 JPH1157630 A5 JP H1157630A5
Authority
JP
Japan
Prior art keywords
brush
foreign matter
substrate
cleaning
brushes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997215120A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1157630A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP21512097A priority Critical patent/JPH1157630A/ja
Priority claimed from JP21512097A external-priority patent/JPH1157630A/ja
Publication of JPH1157630A publication Critical patent/JPH1157630A/ja
Publication of JPH1157630A5 publication Critical patent/JPH1157630A5/ja
Pending legal-status Critical Current

Links

JP21512097A 1997-08-08 1997-08-08 自己洗浄ブラシおよび洗浄装置 Pending JPH1157630A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21512097A JPH1157630A (ja) 1997-08-08 1997-08-08 自己洗浄ブラシおよび洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21512097A JPH1157630A (ja) 1997-08-08 1997-08-08 自己洗浄ブラシおよび洗浄装置

Publications (2)

Publication Number Publication Date
JPH1157630A JPH1157630A (ja) 1999-03-02
JPH1157630A5 true JPH1157630A5 (https=) 2005-05-26

Family

ID=16667077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21512097A Pending JPH1157630A (ja) 1997-08-08 1997-08-08 自己洗浄ブラシおよび洗浄装置

Country Status (1)

Country Link
JP (1) JPH1157630A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60035079T2 (de) 1999-03-04 2008-02-07 Max Co. Ltd. Mechanismus des Magazins für eine Nagelmaschine
JP2005144298A (ja) * 2003-11-13 2005-06-09 Seiko Epson Corp 表面洗浄改質方法及び表面洗浄改質装置
JP2007289878A (ja) * 2006-04-26 2007-11-08 Hitachi High-Technologies Corp ディスク洗浄ブラシ、ディスク洗浄機構およびディスク洗浄装置
US7841035B2 (en) 2005-10-13 2010-11-30 Hitachi High-Technologies Corporation Disc cleaning machinery, disc cleaning device thereof and rotary brush thereof
JP6492473B2 (ja) * 2014-09-12 2019-04-03 大日本印刷株式会社 カード洗浄装置およびカード作成システム

Similar Documents

Publication Publication Date Title
JP4709346B2 (ja) ウェーハエッジの洗浄装置
KR100908361B1 (ko) 토출 노즐의 세정장치
JPH1157630A5 (https=)
JPH1157630A (ja) 自己洗浄ブラシおよび洗浄装置
JPH11179299A (ja) 洗浄装置
CN100431714C (zh) 喷嘴的洗净装置
CN115138656A (zh) 一种大尺寸玻璃自动打磨清洁工艺
JP2930580B1 (ja) 半導体ウエーハ等用洗浄装置
JPH05347287A (ja) 洗浄装置
CN218797602U (zh) 一种卡塞清洗机构
JP4042179B2 (ja) 薬液処理装置
JPH11333394A (ja) 基板の洗浄方法および洗浄装置
JPH11128852A (ja) 薬液処理装置
US6348100B1 (en) Resist bowl cleaning
CN113663956B (zh) 手机清洁装置
JP2006319279A (ja) 基板洗浄装置及び基板洗浄方法
CN101554624B (zh) 一种喷嘴的清洁方法
KR200271081Y1 (ko) 채널형 브러시롤
JPS6199336A (ja) 電子素子の製造方法
JP2005066507A (ja) 回転ブラシ式ガラス基板洗浄装置
JPH08215645A (ja) スクラブ洗浄装置
JP3551301B2 (ja) ウェーハ面取り面のエッチング装置
JPH0957218A (ja) プラスチックフィルムの表面清浄装置
CN223054970U (zh) 一种消防栓水带收卷装置
JP2002166529A (ja) 印刷機シリンダの洗浄方法および装置