JPH1138164A - Three-dimensional fine movement table - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable maintenance of the independence of mutual straight fine movements and to make it possible to cross driving forces given to individual axes one another at right angles and cross one another at one point in a space, regarding a three-dimensional fine movement table being displaceable in each of directions of the three axes of X-Y-Z intersecting one another perpendicularly. SOLUTION: This three-dimensional fine movement table 100 has a first displacement body 6, which is formed as a section concentrically and cubically inside a cubic block 1 as a basic body and supported by the shell-like cubic block 1 in the direction of the axis Z, with leaf springs 3a interposed, so that it can be displaced in the direction of the axis Z, a second displacement body 5 which is formed as a section concentrically and cubically inside the first displacement body 6 as the basic body and supported by the first shell-like displacement body 6 in the direction of the axis Y, with leaf springs 3b interposed, so that it can be displaced in the direction of the axis Y and a third displacement body 4 which is formed as a section concentrically and cubically inside the second displacement body 5 as the basic body and supported by the second shell-like displacement body 5 in the direction of the axis X, with leaf springs 3c interposed, so that it can be displaced in the direction of the axis X.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an orthogonal XY
The present invention relates to a three-dimensional fine table that can be displaced in each of the -Z3 axis directions.

[0002]

2. Description of the Related Art The most general configuration method for realizing a conventional three-dimensional fine moving table is (a) a method of simply stacking fine moving tables displaced for each axis in X / Y / Z. Further, there are the following two methods (b) and (c) as a configuration method for realizing a three-dimensional fine movement table using a spring function by elastic deformation of a material. (B) A method in which the fine movement function of each axis is simply stacked in X / Y / Z and made into an integrated structure (literature name: Osaka, Tsuda, "Nanometer accuracy straightness characteristics of precision moving table", Journal of Precision Engineering Society) Vol.61, No.2 (1995)). (C) A method of assembling by adding a Z-axis fine table on an X / Y two-dimensional fine table made of one substrate (literature name:
Nishimura, "Development of a Small XY Stage", Proc. Of the Spring Meeting of the Japan Society of Precision Engineering, 1986 (lecture number 21)
0), 63/64 (1986). Nishimura, "Development of a small XY stage (for three axes)", Proc. Of the Spring Meeting of the Japan Society of Precision Engineering, 1987 (lecture number F31), 491/492 (198)
7). Hatamura, Ono, Nagasawa, Murayama, "Multi-axis fine positioning mechanism using parallel-plate / radial-plate structure", Proc. Of the 1987 JSPE Spring Conference (lecture number F3)
3), 495/496 (1987). Hatsuzawa, Toyota, Tanimura, "Development of Absolute Micropattern Measurement System", Transactions of the Society of Instrument and Control Engineers, Vol.26, No.9, 983/988 (1990)).

[0003]

However, among the above-described conventional three-dimensional fine movement tables, if the three-dimensional fine movement table is formed by the method (a) or (b), the fine movement table necessarily has a tall structure. However, there is a disadvantage that a delicate movement must be performed in an unstable state. Further, in the case of fine movement, since the drive shafts are arranged at positions separated from each other in space, an unexpected moment acts on the structure, and there is a disadvantage that the movement of the fine movement table easily interferes with each other.

On the other hand, in the configuration method (c), a two-dimensional X / Y fine moving table that is orthogonal to the plane is manufactured on a single substrate, so that the height can be kept low. However, there is a drawback that the structure cannot easily be integrated into a compact fine movement table. The directions of displacement of the leaf springs of the X / Y two-dimensional fine moving table are orthogonal, but the displacement surfaces are not arranged so as to be orthogonal to each other.

[0005] The present invention is a disadvantage of the above-mentioned conventional three-dimensional fine table, a) the entire structure is not perfectly symmetrical,
B) the drive shafts are separated in space; c) the overall structure is not compact; d) the displacement direction of the leaf springs of each shaft is orthogonal, but the displacement surfaces are orthogonal to each other, symmetrical arrangement structure It is an object of the present invention to provide a three-dimensional fine moving table having a completely symmetrical shape and an integral structure, which solves all the drawbacks such as the following.

[0006]

In order to achieve the above-mentioned object, a three-dimensional fine moving table according to the present invention comprises an orthogonal XYZ-3
In a three-dimensional fine table that can be displaced in each of the axial directions,
The cubic block is defined as a matrix and concentrically and cubically defined inside the cubic block. The cubic block has an outer shell through an elastic member whose surface is orthogonal to the Z axis direction while maintaining a gap with the outer cubic block. A first displacement body supported by the cubic block and capable of being displaced in the Z-axis direction; and a first displacement in an outer shell shape defined concentrically and cubically inside the first displacement body as a base body. A second displacement body that holds a gap with the body, is supported by the outer shell-shaped first displacement body via an elastic member having a surface orthogonal to the Y-axis direction, and is displaceable in the Y-axis direction; An elastic member which is concentrically and cubically defined inside the second displacement body as a mother body, maintains a gap with the outer shell-shaped second displacement body, and has a surface orthogonal to the X-axis direction. A third displacement which is displaceable in the X-axis direction by being supported by the outer shell-shaped second displacement body through Has a body, the.

[0007]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a perspective view showing the appearance of a three-dimensional fine moving table according to the present invention, FIG. 2 is a view showing a cut surface when a cross-sectional view is created, and FIG. 3 is a view when cut along cut surfaces A, B, and C in FIG. FIG. 4 is an exploded perspective view of a three-dimensional fine movement table, showing a structure appearing at each cut. In these figures,
The three-dimensional fine movement table 100 of the present invention is formed by sequentially forming a first displacement body 6, a second displacement body 5, and a third displacement body 4 toward the inside of the cubic block 1.

The cubic block 1 is made of, for example, a conductive elastic material, and has three orthogonal surfaces a, b, and c.
First, a drill hole is formed by drilling to attach another component, and a total of twelve through holes 2 are formed at four locations for wire cutting. Through hole 2
.. Are, for example, a position at 10 mm from the center of each periphery on the c-plane, a position at 20 mm from the center of the periphery on the b-plane, and a position 30 mm from the center of the periphery on the a-plane, respectively. By digging perpendicular to each surface, it can be penetrated and opened to the opposite surface as it is.

The a, b, and c surfaces and their opposing surfaces are carved into a predetermined shape by shaping, and unnecessary portions are removed. For example, the c-plane and its opposing surface are provided with a 20 mm-depth recess at a position 20 mm from each periphery thereof, and the b-surface and its opposing surface are provided at a position 20 mm from each periphery thereof. A concave portion having a depth of 10 mm and a concave portion having a depth of 30 mm are provided stepwise at a position 30 mm from each periphery. Further, the surface a and the opposing surface are provided with a stepped recess having a depth of 10 mm at a position 10 mm from each periphery and a recess 20 mm at a position 30 mm from each periphery.

[0010] Then, a wire is passed through the above-mentioned through holes 2, and a discharge wire cutting process is performed. That is, by cutting from the through hole 2 so as to be parallel to the periphery corresponding to the through hole 2, two straight grooves 7, 7 and a U-shaped groove 8 are provided for each of the a, b, and c surfaces. , 8 are provided so as to face each other and penetrate the cubic block 1.

The straight grooves 7, 7 and the U-shaped grooves 8, 8 on each of the surfaces a, b, c form a substantially square shape when viewed from the front, but the U-shaped grooves 8, 8 have bent portions 8a, 8a is located inside the pair of straight grooves 7,7. Therefore, one end portion 7a of the linear groove 7 and the bent portion 8a of the U-shaped groove 8
, The material of the cubic block 1 remains in a thin plate shape, and the thin plates 3a, 3b, 3c are fixed at both ends in the length direction, and at least the wire diameter in the thickness direction. , 3b... Are formed by the elasticity.

As a result of the discharge wire cutting in the above procedure, the cubic block 1 has a first displacement body 6 as shown in FIG. Is done. Due to the definition of the first displacement body 6, the cubic block 1 has an outer shell shape. The first displacement body 6 maintains a gap with the outer shell cubic block 1 and at the same time through a leaf spring 3a. It is supported by a shell-shaped cubic block 1. The leaf surfaces of the leaf springs 3a are orthogonal to the Z-axis direction (direction parallel to the c-plane), and the first displacement body 6 can be displaced only in the Z-axis direction.

The first displacement member 6 has a second displacement member 5 defined concentrically and cubically inside the first displacement member 6 as a mother body. Due to the definition of the second displacement body 5, the first displacement body 6 has an outer shell shape, and the second displacement body 5 maintains a gap with the outer shell-shaped first displacement body 6 and has a leaf spring 3
b are supported by the outer shell-shaped first displacement body 6. The plate surfaces of the leaf springs 3b are orthogonal to the Y-axis direction (direction parallel to the b-plane), and the second displacement body 5 can be displaced only in the Y-axis direction.

Further, the third displacement body 4 is formed concentrically and cubically inside the second displacement body 5 using the second displacement body 5 as a mother body. By the definition of the third displacement body 4,
The second displacement body 5 has an outer shell shape, and the third displacement body 4 maintains a gap with the outer shell second displacement body 5 and has the outer shell second displacement through leaf springs 3c. It is supported by the body 5.
The leaf surfaces of the leaf springs 3c are orthogonal to the X-axis direction (a direction parallel to the a-plane).
It can be displaced only in the axial direction.

As shown in FIG. 4, the leaf springs 3a.
It is provided at each corner of the two opposing surfaces 61 and 62 of the displacement body 6, and the plate surfaces on the opposing surface side are parallel to each other to form a set, and a total of four sets of parallel leaf spring mechanisms are provided. Is composed.
Similarly, each of the leaf springs 3b..., 3c.

As a result of the above construction, the third displacement body 4 located at the center of the cubic block 1 is provided via eight leaf springs 3c as shown in FIG.
When an external force Fx in the X-axis direction is applied, the eight leaf springs 3c... Respectively deform the inflection points M symmetrically as shown in FIG. Deflected, X
It finely moves straight in the axial direction by a distance δ and functions as an X-axis fine moving body.

Similarly, the second displacement member 5 includes eight leaf springs 3.
b, supported by the first displacement body 6 enclosing the second displacement body 5, and when an external force Fy in the Y-axis direction is applied, the eight leaf springs 3b are bent, and Finely moves straight in the axial direction and functions as a Y-axis fine moving body.

The first displacement body 6 includes eight leaf springs 3a.
Are supported by the cubic block 1 surrounding the first displacement body 6 via... And an external force Fz in the Z-axis direction is applied.
Each of the eight leaf springs 3a bends and slightly moves straight in the Z-axis direction to function as a Z-axis fine moving body. Then, when viewed from the cubic block 1 as a fixed body, the central third displacement body 4 can be finely moved in the X, Y and Z axes.

The range of fine movement of each of the displacement members 6, 5, and 4 is greatly affected by the thickness of the leaf springs 3a, 3b, 3c, but it depends on the elastic coefficient of the material used and the machining ability of the discharge wire cutting. , 3b ..., 3c
Are manufactured with a thickness of several tens μm to 1 mm as a guide. The width and length of each of the leaf springs 3a, 3b, 3c are designed and manufactured to be substantially square.

Here, a comparison will be made between the three-dimensional fine moving table 100 having the above configuration and a conventional three-dimensional fine moving table.

In the conventional three-dimensional fine movement table, since the remaining one axis is simply added to the two-dimensional fine movement table to form a three-dimensional fine movement table,
A balanced motor function cannot be exhibited as a whole function. That is, regardless of whether the fine motion tables are stacked for each axis as shown in FIG. 11 or the plane configuration is orthogonal as shown in FIG. 12, the displacement surfaces of the leaf springs of the X / Y two-dimensional fine motion table are in the same direction. It is a structure that faces. Therefore,
When a slight motion is applied by applying a force to the X-axis, the other leaf springs of the Y-axis are easily deformed by the propagation of the stress. Therefore, there is a limit to the independence of the X-axis and Y-axis motions that are orthogonal to each other.

On the other hand, in the case of the present invention, as shown in FIG. 1, since the leaf spring mechanism is realized on three orthogonal surfaces a, b, c of the cubic block 1 which is compact as a whole, , 5 and 6 can be drawn as shown in FIG. 7 in which only the arrangement direction of the leaf springs is emphasized. In other words, the leaf springs of each of the displacement bodies 4, 5, and 6 are necessarily manufactured so that not only the displacement direction 16 but also the displacement surface 17 are orthogonal to each other. In this arrangement, for example, even if an external force is applied in the X-axis direction to deform the leaf spring, the X-axis linear fine movement has almost no effect on the Y-axis or Z-axis fine movement, and the movements are independent of each other. Can be kept. The similar independence of the fine movement can be maintained even in the linear fine movement in the Y-axis direction or the Z-axis direction because of the completely symmetrical structure.

Further, as shown in FIG. 1, the three-dimensional fine moving table 100 of the present invention is a perfect symmetrical shape based on the cubic block 1, so that the driving forces applied to the respective axes are made orthogonal to each other, so that one point in space can be obtained. The feature is that they can cross. Therefore, a moment is generated by a driving force for finely moving each axis, and the three-dimensional fine
The adverse effect of rotation / deformation is minimized. This feature is impossible with a conventional three-dimensional fine moving table of a stacked type as shown in FIG.

The main examples of the specific application examples of the three-dimensional fine moving table 100 can be roughly divided into the following FIGS. 8, 9, and 1.
There are three shown as 0.

FIG. 8 is a view showing a case where the apparatus is used as a fine movement table for an object to be measured. In this application example, various microscopes 12
It is used as a three-dimensional fine table 11 when it is desired to operate or measure the measurement object 10 with a sub-nanometer stability under. A measurement object 10, for example, a sample of a three-dimensional pattern having a fine shape on a surface processed by lithography technology is placed on a three-dimensional fine moving table 101 according to the present invention, and a microscope 12 such as an SEM or STM is used as a positioning sensor. The dimension of the measurement object 10 in the X / Y / Z-axis directions can be measured. That is, the piezo actuators Xa, Ya, and Za are mounted as driving devices on one side surface of each of the X / Y / Z axes of the three-dimensional fine moving table 101, and the amount of fine movement of each axis is measured with a high-resolution laser interferometer. Vessel X
d, Yd, Zd and the reflecting mirrors Xm, Ym, Zm are X / Y /
They are arranged in directions that match the movement of the Z axis. Since each displacement body moves finely in response to the driving of the piezo actuators Xa, Ya, and Za, and the measuring object 10 also finely moves in response thereto, the amount of fine movement of the measuring object 10 in each axial direction is high-resolution laser interferometer. It becomes possible to measure with the devices Xd, Yd, Zd.

FIG. 9 is a view showing a case where the apparatus is used as a three-axis fine moving tool rest. X / of three-dimensional fine moving table 102 according to the present invention.
A computer-controlled pulse motor with a reduction gear and a driving device for piezo actuators Xp, Yp, and Zp are attached to one side surface of each of the Y / Z-axis displacement bodies.
A cutting tool 13 such as a diamond cutting tool is mounted in accordance with the driving direction of the shaft. The sample surface 140 of the sample 14 set on one side surface of the coarse moving table 15 in the Y / Z direction faces the blade 13. When each displacement body moves slightly in response to the drive of the pulse motor with reduction gear and the piezo actuators Xp, Yp, and Zp, the blade 13 also moves slightly in response to the movement, so that a three-dimensional fine shape can be machined on the sample surface 140.

FIG. 10 is a diagram showing a case where the present invention is used as a main body mechanism of a three-dimensional sensor for detecting vibration and acceleration. If the three-dimensional fine movement table 103 of the present invention is used, X / Y
The vibration and acceleration at one point in the space that is the intersection of the three axes
The feature of being able to detect in the direction can be exhibited. X / Y / Z
For detecting the vibration and acceleration in the axial direction, for example, condenser type detectors Xc, Yc, and Zc are used as the measurement target. If used as a differential capacitor, the sensitivity can be doubled and the stability can be increased. For example, when detecting the vibration or acceleration of the X-axis displacement body, it is attached as fixed poles to two opposing surfaces of the Y-axis displacement body, and the change in the capacitance of the capacitor when the X-axis displacement body moves slightly. Detect and detect vibration and acceleration from the detection result. In addition, independent differential laser interferometers may be arranged in the respective axial directions as detecting means to detect vibration and acceleration.

[0028]

As described above, according to the three-dimensional fine movement table of the present invention, a completely symmetrical displacement body is constructed inside a cubic block as a base, so that the whole can be made compact.

Further, since each displacement body is supported via an elastic member whose surface is orthogonal to each axis direction, for example, even if an external force is applied in the X-axis direction to deform the elastic member,
The X-axis linear fine movement has almost no effect on the Y-axis or Z-axis fine movement, and can maintain the mutual linear fine movement. Therefore, when used as a stage in SEM, STM, stylus type surface roughness measuring instrument, various optical microscopes, etc., the measuring object can be adjusted and operated in the range of several μm to 100 μm with sub-nanometer resolution and stability. Or can be measured. Further, when used as a three-dimensional fine moving tool post, it becomes possible to process a fine geometric three-dimensional shape on the surface.

Further, since the driving forces applied to the respective axes can be made orthogonal to each other and intersect at one point in space, a moment is generated by the driving force for slightly moving each axis,
Thereby, the adverse effect of rotation / deformation can be minimized. Further, it can be widely used and applied as a three-dimensional sensing main body mechanism for detecting vibration or acceleration at one point in space.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the appearance of a three-dimensional fine movement table according to the present invention.

FIG. 2 is a diagram showing a cut surface when a cross-sectional view is created.

FIG. 3 is a view showing a structure that appears at each of the cut edges when cut along cutting planes A, B, and C in FIG. 2;

FIG. 4 is an exploded perspective view of the three-dimensional fine movement table.

FIG. 5 is a cross-sectional view of the three-dimensional fine table of the present invention shown in FIG. 1;
It is a figure modeling and showing the position and structure of eight leaf springs which support a shaft fine adjustment stand.

FIG. 6 is a view showing a state in which one leaf spring symmetrically deforms an inflection point M and finely moves when an external force Fx is applied to the X-axis fine movement table shown in FIG. 5;

FIG. 7 is a schematic diagram in which the displacement direction of the leaf spring and the positional relationship between the displacement surfaces of the three-dimensional fine moving table of the present invention shown in FIG. 1 are emphasized.

FIG. 8 is a view showing a specific application example of a three-dimensional fine movement table when used as a fine movement table for a measurement object.

FIG. 9 is a view showing a specific application example of the three-dimensional fine moving table, which is used as a three-axis fine moving tool post.

FIG. 10 is a view showing a specific application example of the three-dimensional fine moving table, which is used as a main body mechanism of a three-dimensional sensor for detecting vibration and acceleration.

FIG. 11 is a view showing a conventional three-dimensional fine moving table having a stacked type configuration.

FIG. 12 is a view showing a conventional three-dimensional fine moving table having a planar configuration.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Cube block 2 Through-hole 3a, 3b, 3c Leaf spring 4 1st displacement body (Z-axis fine moving body) 5 2nd displacement body (Y-axis fine moving body) 6 3rd displacement body (X-axis fine moving body) 7 Linear groove 7a One end of straight groove 8 U-shaped groove 8a Bent part of U-shaped groove 10 Measurement object 12 Microscope 13 Cutting tool 14 Sample 15 Coarse table 100, 101, 102, 103 Three-dimensional fine table 140 Sample surface Xa, Xb, Xc Piezo actuator Xd, Yd, Zd High resolution laser interferometer Xm, Ym, Zm Reflector Xp, Yp, Zp Pulse motor with reduction gear and piezo actuator Xc, Yc, Zc Capacitor type detector

Claims (4)

[Claims] 1. A three-dimensional fine movement table which can be displaced in each of three orthogonal X, Y, and Z axes, wherein a cubic block is defined as a base and concentrically and cubically defined inside the cubic block, and a shell-shaped cubic is provided. A first displacement body that holds a gap with the block, is supported by the outer shell-shaped cubic block via an elastic member whose surface is orthogonal to the Z-axis direction, and is displaceable in the Z-axis direction; The displacement body is defined as a mother body and concentrically and cubically defined therein, while maintaining a gap with the outer shell-shaped first displacement body, and through an elastic member whose surface is orthogonal to the Y-axis direction. A second displacement body supported by the first outer displacement body and capable of being displaced in the Y-axis direction; and the second displacement body being defined as a mother and concentrically and cubically formed therein. While maintaining a gap with the second displacement body, the surface is in the X-axis direction. And a third displacement body which is supported by the outer shell-shaped second displacement body via an orthogonal elastic member and is capable of being displaced in the X-axis direction. 2. The elastic member is a leaf spring, which is provided at each corner of two surfaces of the displaceable body which are orthogonal to the displaceable direction of each displaceable body and oppose each other. 3. The three-dimensional fine moving table according to claim 1, wherein the plate surfaces are parallel to each other to constitute a total of four sets of parallel leaf spring mechanisms. 4. 3. A through hole is formed at a predetermined position on three orthogonal surfaces of the cubic block, and a wire is cut through the through hole to perform a discharge wire cutting process. An opposing linear groove and a pair of opposing U-shaped grooves are formed so as to penetrate each other, and the U-shaped groove is located inside the linear grooves whose bent portions oppose each other. The elastic member is constituted by an intervening body between one end portion of the linear groove and a bent portion of the U-shaped groove. Three-dimensional tremor table. 4. The three-dimensional fine moving table according to claim 1, wherein the cubic block is made of a conductive elastic material.