JPH1133951A5 - - Google Patents

Info

Publication number
JPH1133951A5
JPH1133951A5 JP1997208637A JP20863797A JPH1133951A5 JP H1133951 A5 JPH1133951 A5 JP H1133951A5 JP 1997208637 A JP1997208637 A JP 1997208637A JP 20863797 A JP20863797 A JP 20863797A JP H1133951 A5 JPH1133951 A5 JP H1133951A5
Authority
JP
Japan
Prior art keywords
fulcrum
link
rotation
rotation transmission
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997208637A
Other languages
English (en)
Japanese (ja)
Other versions
JP3806812B2 (ja
JPH1133951A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP20863797A priority Critical patent/JP3806812B2/ja
Priority claimed from JP20863797A external-priority patent/JP3806812B2/ja
Publication of JPH1133951A publication Critical patent/JPH1133951A/ja
Priority to US09/648,618 priority patent/USRE37731E1/en
Publication of JPH1133951A5 publication Critical patent/JPH1133951A5/ja
Application granted granted Critical
Publication of JP3806812B2 publication Critical patent/JP3806812B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP20863797A 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置 Expired - Lifetime JP3806812B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP20863797A JP3806812B2 (ja) 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置
US09/648,618 USRE37731E1 (en) 1997-07-16 2000-08-28 Two-armed transfer robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20863797A JP3806812B2 (ja) 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置

Publications (3)

Publication Number Publication Date
JPH1133951A JPH1133951A (ja) 1999-02-09
JPH1133951A5 true JPH1133951A5 (enrdf_load_stackoverflow) 2005-05-12
JP3806812B2 JP3806812B2 (ja) 2006-08-09

Family

ID=16559544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20863797A Expired - Lifetime JP3806812B2 (ja) 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置

Country Status (2)

Country Link
US (1) USRE37731E1 (enrdf_load_stackoverflow)
JP (1) JP3806812B2 (enrdf_load_stackoverflow)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW471084B (en) * 1999-12-22 2002-01-01 Jel Kk Transfer arm
ES2161184B1 (es) * 1999-12-28 2002-07-01 Consejo Superior Investigacion Un dispositivo de un elemento de trabajo con dos grados de movilidad.
KR100471088B1 (ko) * 2003-02-07 2005-03-10 삼성전자주식회사 이송장치
JP4411025B2 (ja) 2003-07-11 2010-02-10 株式会社ダイヘン ２アーム式搬送ロボット
US20070048073A1 (en) * 2005-08-31 2007-03-01 Cheng Hung Y Ring binder having a clip
USD639323S1 (en) * 2010-05-06 2011-06-07 Ulvac, Inc. Vacuum transfer robot
USD625748S1 (en) * 2010-05-06 2010-10-19 Ulvac, Inc. Vacuum transfer robot
USRE44567E1 (en) * 2009-11-17 2013-11-05 Ulvac, Inc. Vacuum transfer robot
USRE43781E1 (en) * 2009-11-17 2012-11-06 Ulvac, Inc. Vacuum transfer robot
KR101477366B1 (ko) * 2009-12-28 2015-01-06 가부시키가이샤 아루박 구동장치 및 반송 장치
JP5589790B2 (ja) * 2010-03-31 2014-09-17 株式会社安川電機 基板搬送用ハンドおよび基板搬送ロボット
KR102618895B1 (ko) * 2011-03-11 2023-12-28 브룩스 오토메이션 인코퍼레이티드 기판 처리 툴
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
CN105026115B (zh) * 2013-01-18 2018-11-16 柿子技术公司 带有具有不等连接部长度的臂的机器人
US10453725B2 (en) * 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
CZ2017653A3 (cs) * 2017-10-13 2019-04-17 VĂšTS, a.s. Rotační manipulátor
NL2020044B1 (en) * 2017-12-08 2019-06-19 Vdl Enabling Tech Group B V A planar multi-joint robot arm system
JP7177332B2 (ja) 2018-07-03 2022-11-24 シンフォニアテクノロジー株式会社 搬送装置
KR102431664B1 (ko) * 2022-02-15 2022-08-12 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
USD997223S1 (en) * 2023-06-07 2023-08-29 Primate Robot Hong Kong Co., Limited Robot

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
JP2808826B2 (ja) * 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
KR0162102B1 (ko) * 1991-05-29 1999-02-01 이노우에 아키라 반도체 제조장치
JP3030667B2 (ja) * 1991-07-29 2000-04-10 東京エレクトロン株式会社 搬送装置
JPH06132380A (ja) * 1992-09-04 1994-05-13 Fujitsu Ltd 搬送装置
KR100303018B1 (ko) * 1993-04-16 2001-11-22 스탠리 디. 피에코스 관절형아암이송장치
JP3181455B2 (ja) * 1993-11-20 2001-07-03 東京エレクトロン株式会社 搬送アーム装置及びこれを用いた処理室集合装置
JP3264076B2 (ja) * 1994-01-31 2002-03-11 松下電器産業株式会社 真空処理装置
JPH0871965A (ja) * 1994-08-31 1996-03-19 Sony Corp 移載装置
US5647724A (en) * 1995-10-27 1997-07-15 Brooks Automation Inc. Substrate transport apparatus with dual substrate holders

Similar Documents

Publication Publication Date Title
JPH1133950A5 (enrdf_load_stackoverflow)
JPH1133951A5 (enrdf_load_stackoverflow)
JP3722598B2 (ja) ２アーム方式の搬送用ロボット装置
US5333986A (en) Transfer apparatus
JP3806812B2 (ja) ２アーム方式の搬送用ロボット装置
US7056080B2 (en) Two-arm transfer robot
US6109860A (en) Two-armed transfer robot
EP1232838A1 (en) Frog-leg type transfer system
JP2000042954A (ja) 搬送用ロボット装置
JPH11333778A5 (enrdf_load_stackoverflow)
JPH11188671A (ja) ２アーム方式の搬送用ロボット装置
JPH11333778A (ja) 搬送用ロボット装置
US20110135437A1 (en) Horizontal multi-joint robot and transportation apparatus including the same
JP2005177976A (ja) ロボットアーム装置
JPH10329059A (ja) ２アーム方式の搬送用ロボット装置
KR101071606B1 (ko) 반송 장치
US6746196B1 (en) Vacuum treatment device
JP2002066966A (ja) 搬送ロボット
US7040852B2 (en) Robot arm mechanism and robot apparatus
JP3719354B2 (ja) 搬送装置
CN101652228B (zh) 搬送装置
JP4489999B2 (ja) 搬送装置及び真空処理装置
WO2013088548A1 (ja) ウエハ搬送ロボット
JPH04331090A (ja) 搬送装置
JP4467770B2 (ja) 搬送装置及び真空処理装置