JPH11337464A - Mesh for recovering membrane sample, sample recovery device and three-dimensional image forming method and apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To grasp a whole image by continuously recovering a continuously obtained membrane sample without cutting the same on the way and holding the order of a cross section. SOLUTION: In a membrane sample recovering mesh used for holding the sample of an electron microscope and an optical microscope membrane sample recovery apparatus, a large number of meshes are continuously connected to form a mesh chain 100 wherein a predetermined cut-in shape (101, 102 or 103) is added to the connection part of meshes.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film sample collection mesh and a sample collection which facilitate the collection of a manufactured thin film sample, make it possible to observe a continuous cross-sectional image, and make a three-dimensional image. The present invention relates to a device, a three-dimensional image production method, and a three-dimensional image production device.

[0002]

2. Description of the Related Art Conventionally, a thin film sample for an electron microscope and an optical microscope is manufactured using a thin film section manufacturing apparatus called a microtome. FIG. 11 is an explanatory view showing the structure of a microtome and an example of a cross-sectional section obtained by the microtome. It is a sample. Here, when the wet type knife 2 is used, the thin film sample 5 is obtained in a chain-like manner on the water surface of the pool portion 3 of the knife.

A thin film sample 5 usually obtained is
As shown in the figure, using tweezers 6 and mesh 7,
It is collected using a scooping method as shown in (a) or a pressing method as shown in (b).

As reference technical documents relating to these techniques, those relating to an electron microscope and the like are disclosed in, for example, Japanese Patent Application Laid-Open Nos. 5-258704 and 6-275226.
Gazette, Japanese Patent Application Laid-Open No. 7-282763, Japanese Patent Publication No. 7-1
No. 23,294. Further, a microtome is disclosed in JP-A-5-26792, a sample embedding body capable of efficiently obtaining ultrathin sections is disclosed in JP-A-9-21735, and a device for displaying a three-dimensional image is disclosed in JP-A-8-2800.
No. 44 discloses this.

[0005]

However, in the prior art as described above, a continuous thin film sample must be cut in the middle, so that it may be damaged at that time. In addition, the order of the cross-sections may not be understood, for example, the collection may not be completed. Therefore, it is difficult to observe a continuous cross-sectional image, and there is a problem that it is almost impossible to grasp the entire image of the thin film sample.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and continuously collects thin film samples obtained continuously without cutting along the way, maintains the order of cross sections, and obtains an overall image. The purpose is to be able to grasp.

[0007]

In order to achieve the above object, a mesh for recovering a thin film sample according to claim 1 comprises a thin film sample used for holding a sample in an electron microscope and an optical microscope thin film sample recovery apparatus. In the collection mesh, a large number of meshes are continuously connected to form a chain mesh in which a predetermined cut shape is added to a connection portion between the meshes.

According to a second aspect of the present invention, there is provided a sample recovery apparatus for recovering a manufactured thin film sample, wherein the sample recovery apparatus has a loop shape, and a part of the tip portion is located in the pool water surface of the cutting knife. A mesh chain holding means which is buried and holds a mesh chain, and a rotating means for winding / holding and rotating the mesh chain holding means are provided.

The sample recovery apparatus according to a third aspect of the present invention further comprises a synchronizing means which is joined to the thin film sample manufacturing apparatus and rotates the mesh chain holding means at a predetermined synchronizing timing with respect to the apparatus. It is a thing.

According to a fourth aspect of the present invention, there is provided a sample recovery apparatus, further comprising: an input means for inputting a length of the mesh holding means, a timer setting time and the number of count pulse waves based on a value provided by the input means. And control means for controlling the rotation of the mesh holding means in accordance with the calculation result of the calculation means.

According to a fifth aspect of the present invention, in the sample recovery apparatus, the calculating means converts a cutting speed value set in the thin film sample preparation apparatus into a timer set time and the number of count pulse waves. , The control means controls the rotation of the mesh holding means according to the calculation result of the calculation means.

In the mesh for recovering a thin film sample according to a sixth aspect of the present invention, a cut is made so that a mesh thickness of a connecting portion between the meshes is at least 以下 or less, and the meshes are connected to each other. It is cut and separated at the connection part.

According to a seventh aspect of the present invention, the mesh chain holding means has a plurality of fine holes of a predetermined shape formed on a surface thereof.

Further, in the sample recovery apparatus according to the present invention, the mesh chain holding means has a surface on which a number of projections having a predetermined shape are formed.

According to a ninth aspect of the present invention, there is provided a three-dimensional image forming method, comprising the steps of: inputting a sample thickness and a cutting order set by a thin film sample forming apparatus; and calculating a Z coordinate of the image. And a second step of setting three-dimensional coordinates in accordance with the XY coordinates or rθ coordinates of the image acquired from the observation digital image, and a three-dimensional electronic device according to the coordinates obtained in the first and second steps. A third step of producing a microscope image and an optical microscope image.

According to a tenth aspect of the present invention, there is provided a three-dimensional image forming apparatus, comprising: storage means for storing a sample thickness and a cutting order set by the thin film sample forming apparatus; An image dividing means for adding XY coordinates or rθ coordinates to the divided pixels; and a Z coordinate value of the cross section of the thin film sample is calculated in accordance with the sample film thickness stored in the storage means. Calculation / setting means for setting three-dimensional coordinates in accordance with the XY coordinates or rθ coordinates; and three-dimensional image forming means for forming a three-dimensional image in accordance with the three-dimensional coordinates obtained by the calculation / setting means. It is.

Further, in the three-dimensional image producing apparatus according to the eleventh aspect, a mark perpendicular to the cut surface is previously set near the sample to be observed, and the mark is superimposed.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a mesh for thin film sample collection, a sample collection device, a three-dimensional image production method, and a three-dimensional image production device of the present invention will be described in detail with reference to the accompanying drawings.

[Embodiment 1] In this embodiment 1,
An example will be described in which a plurality of meshes are provided, and a predetermined cut shape is provided at a connection portion between the meshes so as to bend in at least one direction.

A plurality of meshes are connected to each other, and cut portions are provided at connecting portions of the chain-shaped meshes. FIG. 1 shows Embodiment 1
It is an explanatory view showing an example of a cut shape of the mesh chain 100 concerning (a), a V-shaped cut shape 101, (b) is U
The letter-shaped cut shape 102, (c) is a rectangular cut shape 1
03. This cut shape may be selected from any shape, and may be provided on either one side or both sides.

As shown in FIG. 2, the shape of the mesh may be a circular shape having a diameter of 3 mm used in an electron microscope, a partially cut shape, or a square shape. The size of the knives is not particularly limited, but is preferably 8 mm × 8 mm or less so as to enter the pool portion of the knife.

Therefore, according to the above-mentioned chain mesh, continuously obtained sample chains can be continuously collected without cutting along the way. In addition, an effect that the order of the cross sections becomes easy to understand is also exerted.

[Embodiment 2] In this embodiment 2,
This section describes an example of a sample collection device that consists of an annular mesh chain holding part and a rotating mechanism, and the mesh holding part is rotated by the rotating mechanism.

FIG. 3 is an explanatory diagram showing the configuration of the sample collection device according to the second embodiment. In the figure, the sample collecting apparatus includes a mesh chain holding portion 301 as chain-shaped mesh chain holding means, and a cylindrical rotating roller 302 composed of at least two for rotating the holding portion.
And a rotating roller support 303 for supporting the shaft on them,
Rotating shaft 304 as rotating means with a knob at the tip
And a support 305 for supporting the entire apparatus.

In the sample recovery apparatus, a part of the tip of the mesh chain holding portion 301 is located inside the pool water surface of the cutting knife, and the thin film sample floating on the water surface is held by the mesh knife holding the mesh chain by rotating. A mechanism for collecting the mesh chain attached to the portion 301 is provided.

As a material for forming the mesh chain holding portion 301, for example, natural rubber, synthetic rubber, cloth, plastic, or the like is used. As shown in FIG. An annular substance that can be bent with a certain degree of freedom by connecting cylindrical metals, rubber, plastics, and the like can be given.

The size is preferably 4 mm or more, which can hold a mesh having a diameter of 3 mm for a transmission electron microscope, and is not particularly limited as long as it can enter a pool portion of a cutting knife. Further, the length of one circumference is not particularly limited, but is preferably about 5 to 10 cm.

One of the two or more rotating rollers 302 is provided with a knob on a rotating shaft 304 of the rotating roller, and the knob is rotated to rotate the mesh chain holding portion 301.
Can be rotated. The rotation realizes a mechanism for scooping the thin-film section on the attached mesh chain.

Therefore, according to the sample recovery apparatus of the second embodiment, it is possible to avoid cutting the continuously obtained sample chain in the middle, and to prevent the sample chain from being damaged or being unable to be completely recovered, or the order of the cross sections. It is also possible to avoid a case where the user does not understand. For this reason, the cross-sectional image can be continuously observed, and the entire image of the sample can be grasped.

[Embodiment 3] In this embodiment 3,
In the sample recovery apparatus described in the second embodiment, an example of a mechanism in which both the sample recovery apparatus and the thin film sample preparation apparatus have a joint portion, and the mesh holding section is rotated while synchronizing with the thin film sample preparation apparatus State.

The sample collecting device is joined to the knife holder by fixing the joints to each other with screws or by providing a guide on the knife holder and inserting the knife holder into the guide. Thereby, the sample collecting device is sent integrally with the knife. In addition, a mechanism is provided for rotating the rotating roller shaft of the sample collection device at a fixed angle in synchronization with an electric signal generated in the thin film sample preparation device at the moment when the cutting sample is swung down.

In this control for rotating by a constant angle, the first method in which the timer is turned on in synchronization with the generated electric signal and the rotation is stopped after a set time, the pulse housing of the thin film sample preparation apparatus is used, There is a second method in which the rotation is stopped after counting.

Further, as a synchronizing means, as shown in FIG. 5, a gear 502 from which a part of the circumference has been removed is meshed with a small gear 501 attached to a rotating roller shaft, and when the cutting is started, The above gear 5
There is also a third method for controlling the rotation of the rotating roller by rotating the roller 02 continuously.

In the third method, cutting is stopped,
At the moment when the power is turned off, the rotation of the gears also ends. It is preferable that the rotation angle and the rotation time are set so that the length of the mesh chain supporting portion is 0.5 mm to 5 mm. The direction of rotation is the direction away from the blade in the portion above the water surface of the pool of the cutting knife.

Therefore, according to the sample collecting apparatus of the third embodiment, the same effects as those of the above-described sample collecting apparatus of the second embodiment can be obtained. More easily.

[Fourth Embodiment] In the fourth embodiment,
A description will be given of an example in which the length of advance of the mesh holding portion by one rotation is input and the input value is converted and set.

FIG. 6 is a block diagram showing a system configuration of the sample collecting apparatus according to the fourth embodiment. In the figure,
Reference numeral 601 denotes a sample collection device; 602, a terminal device such as a personal computer (PC), based on at least an input unit 603 as input means for inputting a length of the mesh holding portion and input data of the input unit 603; A calculation unit 604 is provided as a calculation unit for converting the time into a timer setting time and the number of count pulse waves, and a control unit 605 is provided as a control unit for controlling a rotation time according to a value calculated by the calculation unit 604.

In the system configured as described above, the length in the collection direction of the thin film sample measured by the user is substituted through the input unit 603 of the terminal device 602. Then, from the value input from the input unit 603, the calculation unit 6
The value is converted into a timer setting time and the number of count pulse waves by 04, and a control unit 605 obtains and controls a rotation time as in the following equation. Rotation time = length of mesh holding part / cutting speed

Accordingly, the same effects as those of the third embodiment can be obtained, and fine adjustment of the collection and feeding of the mesh chain can be performed, thereby preventing the sample from being cut or bent at the time of collection.

[Fifth Embodiment] In the fifth embodiment,
An example in which the mesh holding portion is rotated at the same speed as the cutting sample swing-down speed of the thin-film section preparing device in the sample recovery device of the fourth embodiment will be described.

That is, the cutting speed value set in the thin-film section manufacturing apparatus is used, and the cutting speed value is used in the fourth embodiment.
In the same manner as described above, the calculation unit 604 converts the value into the timer setting time and the number of count pulse waves, and rotates and controls the mesh holding part based on the calculation result.

Therefore, the same effects as those of the fourth embodiment can be obtained, and the collection and feeding speed is the same as that of the thin-film section manufacturing apparatus. Therefore, the bending or pulling phenomenon that occurs at the time of collection can be avoided, and the observation sample can be improved. It can be obtained in a state.

[Sixth Embodiment] In the sixth embodiment,
In the mesh chain according to the first embodiment, a cut is made so that the mesh thickness of the connection portion is at least １ ／ or less, and the meshes are easily cut and separated at the connection portion.

Therefore, by adopting the sixth embodiment, in addition to the effect of the first embodiment, the mesh can be easily separated, and the damage of the observation sample due to the bending of the mesh can be reduced.

[Seventh Embodiment] In the seventh embodiment,
An example in which a large number of holes are provided in the mesh holding portion in the second embodiment will be described.

FIGS. 7A and 7B are explanatory diagrams showing examples of the shape of the mesh holding portion according to the seventh embodiment. FIG. 7A shows a case of a circular hole, and FIG. 7B shows a case of a square hole. . Thus, by providing a large number of micropores, when a sample is collected from the water surface, a function of removing water through the holes is realized. The shape of the hole may be a circular shape, a square shape, a wedge shape, or the like, as long as it has a mechanism for passing water.

The size of the holes can be from about 2 mm smaller than the mesh to allow water to permeate, or long enough to leave a portion for holding the end of the mesh.

Therefore, in addition to the effect of the second embodiment, since a large number of holes are provided in the mesh holding portion, the mesh chain can be drained well, and the thin film sample can be fixed to the mesh better.

[Eighth Embodiment] In the eighth embodiment,
In the second embodiment, an example will be described in which a large number of small or predetermined projections are provided on the mesh holding portion.

FIGS. 8A and 8B are explanatory views showing examples of the shape of the mesh holding portion according to the eighth embodiment. FIG. 8A shows a case of a mountain-shaped pointed projection, and FIG. Are shown as protrusions.

As described above, by providing a predetermined projection shape on the surface of the mesh holding portion, it is possible to support a part of the mesh or to drain water to the flat portion to remove water from the mesh portion. The height of the projection is set to be about 0.5 mm larger than the size of the mesh, so that a function of preventing the mesh from slipping off can be added.

Therefore, similar to the effect of the seventh embodiment, since a large number of protrusions or protrusions having the same shape as a part of the outer shape of the mesh are provided on the mesh holding portion, the mesh chain can be drained satisfactorily. The sample can be better fixed to the mesh and the mesh chains can be prevented from slipping off.

[Embodiment 9] In this embodiment 9,
An example of a method for forming a three-dimensional image will be described. FIG.
33 is a flowchart showing a procedure for forming a three-dimensional image according to the ninth embodiment. In the figure, first, the sample thickness ΔZ and the cutting order set in the thin film sample preparation apparatus are input (S
901), the value of the Z coordinate of the image is calculated as follows based on the input value (S902). Zn = ΔZ (value of thin film sample cutting order)

Subsequently, an observation digital image is obtained (S
903), XY of the image obtained from the observed digital image
The three-dimensional coordinates are determined by combining the coordinates or the rθ coordinates (S904). That is, XY or rθ coordinates are obtained for each pixel, and three-dimensional coordinates are determined in combination with the Zn. Further, a stereoscopic electron microscope image and an optical microscope image are prepared from each coordinate (S905).

Therefore, according to the ninth embodiment,
Since a three-dimensional image can be obtained from a continuous sample, the entire image of the sample can be grasped.

[Tenth Embodiment] In a tenth embodiment, an example of an apparatus for forming a three-dimensional image will be described. FIG.
0 is a block diagram showing a configuration of a three-dimensional image producing apparatus according to Embodiment 10. In the figure, reference numeral 1001 denotes a storage device as storage means for inputting and storing a cutting order set in the thin film sample preparation apparatus, and 1002 divides an observation image for each pixel, and stores XY coordinates or rθ coordinates therein. An image dividing unit as an image dividing unit to be added, 100
Numeral 3 is a calculation / setting means for calculating the value of the Z coordinate of the cross section of the thin film sample based on the film thickness ΔZ set at the time of cutting, and setting the three-dimensional coordinates based on the Z coordinate value and the XY coordinate or rθ coordinate. Calculation / setting unit 1004, calculation / setting unit 1
A three-dimensional image creating unit as a three-dimensional image creating unit that creates a three-dimensional image based on the three-dimensional coordinates according to 003.

In the three-dimensional image forming apparatus configured as described above, similarly to the method of the ninth embodiment, the Z-value of the image is determined based on the sample thickness and the setting order set in the thin-film sample preparing apparatus. The coordinates are calculated, and three-dimensional coordinates are set by combining the Z coordinates with the Y coordinates or rθ coordinates of the image obtained from the observed digital image. Then, a stereoscopic electron microscope image and an optical microscope image are prepared according to the three-dimensional coordinates.

Therefore, according to the three-dimensional image forming apparatus of the tenth embodiment, similar to the ninth embodiment,
Since a three-dimensional image can be obtained from a continuous sample, the entire image of the sample can be grasped.

[Eleventh Embodiment] In the eleventh embodiment, in the tenth embodiment, a three-dimensional image is obtained by superimposing a mark which is set upright on the cutting surface in advance near the sample to be observed. Is prepared.

That is, in the tenth embodiment, when embedding an observation sample to be a target of forming a three-dimensional image in a resin or the like using a capsule and solidifying it, two or more specimens are set so as to be perpendicular to the cutting direction. A thin film sample is prepared by making a mark (not shown) of the elongated rod-shaped substance, and cutting the thin film sample together with the observation sample to produce a three-dimensional image by superimposing the mark in the observation image.

The type of the embedding resin used in this case is not limited as long as it is an ordinary resin such as an epoxy resin, a low-viscosity epoxy resin, a polyester resin, or a UV-curable resin. Examples of the rod-like substance to be used as a mark include resin, rubber, plastic, and the like. However, it is desirable that the rod-like substance is hardly soluble in the resin and has the same hardness as the resin.

The rod shape may be a columnar shape, a square prism shape,
The shape is not particularly limited as long as it has a length longer than the observation sample, such as a triangular prism, and may be, for example, a cone. At least two or more marks are made, but the shapes of the marks are preferably different from each other so as to be distinguishable.

Therefore, according to the eleventh embodiment, by superimposing the above-mentioned marks, formation of a three-dimensional image in the tenth embodiment is facilitated, and blurring of the image in the Y direction is minimized. Since it becomes possible to suppress, the whole picture can be grasped well.

[0064]

As described above, according to the thin film sample collecting mesh according to the present invention (claim 1), a cut portion having a predetermined shape is formed at a connection portion of the mesh, so that a continuously obtained sample is obtained. The chain can be continuously collected without cutting along the way, and the order of the cross section can be easily understood.

Further, according to the sample recovery apparatus of the present invention (claim 2), it is possible to avoid cutting the continuously obtained sample chain in the middle, and to prevent the sample chain from being broken, not completely recovered, It is also possible to avoid the case where the order of the characters becomes unclear. For this reason, the cross-sectional image can be continuously observed, and the entire image of the sample can be grasped.

Further, according to the sample recovery apparatus of the present invention (claim 3), in addition to having the same effect as the sample recovery apparatus of claim 2, since the sample recovery apparatus moves in conjunction with the cut sample, the recovery of the sample can be achieved. More easily.

According to the sample recovery apparatus of the present invention (claim 4), the same effects as those of claim 3 can be obtained,
By inputting the length of advance of the mesh holding part in one rotation, it is possible to finely adjust the collection and feeding of the mesh chain, so that it is possible to avoid cutting and bending of the sample during collection. .

According to the sample recovery apparatus of the present invention (claim 5), the same effects as those of claim 4 can be obtained,
Since the collection feed speed is the same as that of the thin-film section manufacturing apparatus, the bending or pulling phenomenon that occurs during collection is avoided, and the observation sample can be obtained in a better state.

According to the mesh for recovering a thin film sample according to the present invention (claim 6), in addition to the effect of claim 1, since the mesh is easily separated, damage to the observation sample due to bending of the mesh is reduced. You.

According to the sample recovery apparatus of the present invention (claim 7), in addition to the effect of claim 2, since a large number of holes are provided in the mesh holding portion, the mesh chain can be drained well. Thus, the fixation of the thin film sample to the mesh is improved.

According to the sample recovery apparatus of the present invention (claim 8), similarly to the effect of claim 7, the surface of the mesh holding portion has many protrusions or the same shape as a part of the mesh outer shape. Since the projections are provided, the mesh chain can be drained well, the thin film sample can be fixed to the mesh better, and the mesh chain can be prevented from slipping off.

Further, according to the three-dimensional image producing method according to the present invention (claim 9), since a three-dimensional image can be obtained from a continuous sample, a method for grasping the whole image of the sample can be provided. .

Further, according to the three-dimensional image producing apparatus according to the present invention (claim 10), since a three-dimensional image can be obtained from a continuous sample, an apparatus for grasping the whole image of the sample can be provided. .

According to the three-dimensional image producing apparatus of the present invention (claim 11), by superimposing the marks, the formation of the three-dimensional image according to claim 10 is facilitated, and the image is formed in the Y direction. Since blurring can be suppressed to a minimum, the entire image can be grasped well.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing an example of a cut shape of a mesh chain according to Embodiment 1 of the present invention, wherein (a) is a V-shaped cut shape, (b) is a U-shaped cut shape, and (c). ) Is a rectangular cut shape.

2A and 2B are examples of the shape of a mesh chain according to the first embodiment of the present invention, wherein FIG. 2A shows an oval shape, FIG. 2B shows a circular shape, and FIG.

FIG. 3 is an explanatory diagram illustrating a configuration of a sample collection device according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing an example of a shape of a mesh holding portion according to Embodiment 2 of the present invention.

FIG. 5 is an explanatory diagram showing a drive gear portion of a rotating roller shaft of a sample collection device according to Embodiment 3 of the present invention.

FIG. 6 is a block diagram illustrating a system configuration of a sample collection device according to a fourth embodiment of the present invention.

FIGS. 7A and 7B are explanatory diagrams showing examples of the shape of a mesh holding portion according to Embodiment 7 of the present invention, wherein FIG. 7A shows a case of a circular hole, and FIG. 7B shows a case of a square hole. .

8A and 8B are explanatory diagrams showing examples of the shape of a mesh holding portion according to Embodiment 8 of the present invention, wherein FIG. 8A is a case of a mountain-shaped pointed projection, and FIG. Are shown as protrusions.

FIG. 9 is a flowchart showing a procedure for forming a three-dimensional image according to Embodiment 9 of the present invention.

FIG. 10 is a block diagram showing a configuration of a three-dimensional image producing apparatus according to Embodiment 10 of the present invention.

FIG. 11 is an explanatory diagram showing an example of the configuration of a microtome and a cross-sectional section obtained by the microtome.

12A and 12B are explanatory diagrams showing a conventional method of collecting a thin film sample, wherein FIG. 12A shows a scooping method and FIG. 12B shows a pressing method.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 mesh chain 101 V-shaped cut shape 102 U-shaped cut shape 103 rectangular cut shape 301 mesh chain holding portion 302 rotating roller 304 rotating shaft 501 small gear 502 gear with partially missing teeth 601 sample recovery device 602 Terminal device 603 Input unit 604 Calculation unit 605 Control unit 1001 Storage device 1002 Image separation unit 1003 Calculation / setting unit 1004 3D image production unit

Claims (11)

[Claims] 1. A thin film sample recovery mesh used for holding a sample in an electron microscope and an optical microscope thin film sample recovery device, wherein a large number of meshes are continuously connected, and a predetermined cut shape is added to a connection portion between the meshes. A mesh for collecting a thin film sample, wherein the mesh is a chain mesh. 2. A sample collection device for collecting a produced thin film sample, wherein a mesh chain holding means for forming a loop, a part of a tip portion of which is buried in a pool water surface of a cutting knife and holds a mesh chain. And a rotating means for winding and holding the mesh chain holding means and rotating the mesh chain holding means. 3. The sample according to claim 2, further comprising a synchronizing means which is joined to the thin film sample manufacturing apparatus and rotates the mesh chain holding means at a predetermined synchronizing timing with respect to the apparatus. Collection device. 4. An input means for inputting a length of advance of the mesh holding means, a calculating means for converting a value set by the input means into a timer setting time and the number of count pulse waves, and a calculation result of the calculating means. 3. A sample collection device according to claim 2, further comprising control means for controlling rotation of said mesh holding means according to the following. 5. The calculation means converts a cutting speed value set in the thin film sample preparation apparatus into a timer set time and the number of count pulse waves, and the control means performs the calculation according to the calculation result of the calculation means. The sample collection device according to claim 4, wherein rotation of the mesh holding means is controlled. 6. The method according to claim 1, wherein a cut is made so that a mesh thickness of a connecting portion between the meshes is at least 以下 or less, and the meshes are cut and separated at the connecting portion. 2. The mesh for collecting a thin film sample according to item 1. 7. The sample collecting apparatus according to claim 2, wherein the mesh chain holding means has a large number of fine holes of a predetermined shape formed on a surface thereof. 8. The sample collecting apparatus according to claim 2, wherein the mesh chain holding means has a plurality of projections of a predetermined shape formed on a surface thereof. 9. A first method for calculating a Z coordinate of an image by inputting a sample film thickness and a cutting order set by a thin film sample manufacturing apparatus.
And XY of the image acquired from the observed digital image
A second step of setting three-dimensional coordinates together with the coordinates or the rθ coordinates, and a third step of producing a stereoscopic electron microscope image and an optical microscope image according to the coordinates obtained in the first and second steps. And a method for producing a three-dimensional image. 10. A storage means for storing a sample thickness and a cutting order set by a thin film sample preparation apparatus, an observation image is divided for each pixel, and XY coordinates or rθ
Calculating a Z coordinate value of the cross section of the thin film sample according to the image dividing means for adding coordinates and the sample thickness stored in the storage means, and calculating the Z coordinate value and the XY coordinate or rθ
Calculation / setting means for setting three-dimensional coordinates according to the coordinates,
A three-dimensional image producing means for producing a three-dimensional image in accordance with the three-dimensional coordinates obtained by the calculation / setting means. 11. The three-dimensional image producing apparatus according to claim 10, wherein a mark perpendicular to the cut surface is previously set near the sample to be observed, and the mark is superimposed.