JPH11316347A - Display element and driving method, and optical path change unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a display element and driving method, and a optical path change unit wherein optical paths for light incident on each of many movable mirrors are formed at the positions far away from optical paths of the light reflected from the movable mirrors and can contribute to reduction in size, weight, and cost of an optical device in which the display element is built in. SOLUTION: This display element is provided with a semiconductor substrate 1, plural 1st micro mirrors and optical path forming means 10[1]-10[k], and plural 2nd micro mirrors and optical path forming means 30[1]-30[m]. The plural 1st micro mirrors are movable keeping a state vertical to their forming plane 1a. The optical path forming means control the positions of the plural 1st micro mirrors individually to form optical paths 1a. The plural 2nd micro mirrors are arranged along the optical paths 10a, and movable between a reflecting position for changing the optical paths outwards and a passing position for unchanging the optical paths. The 2nd micro mirror driving means move the 2nd micro mirrors to the reflecting positions or the passing positions individually.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a display device having a large number of movable micromirrors, a driving method, and an optical path changing unit.

[0002]

2. Description of the Related Art In recent years, there has been proposed a DMD (Digital Micromirror Device) in which a large number of movable micromirrors (hereinafter referred to as "movable mirrors") are two-dimensionally arranged on a silicon substrate. As shown in FIG. 23, each movable mirror 81 constituting the DMD element is rotatably supported on a silicon substrate 83 by a pole.
Here, a reflective surface (not shown) is formed on the upper surface 81a of the movable mirror 81.

Further, a landing electrode 8 is provided on a silicon substrate 83.
4, 87 and drive electrodes 85, 86 are formed. Among the electrodes 84 to 87, the landing electrodes 84 and 87 are electrically connected to the movable mirror 81 by wiring (not shown), and are always kept at the same potential. The two drive electrodes 8
A voltage can be individually applied to 5, 86 from the outside.

Therefore, the driving electrode 85 and the movable mirror 8
When a potential difference is applied to the movable mirror 81, the movable mirror 81 tilts toward the drive electrode 85 due to the electrostatic attraction (the state shown by the solid line in FIG. 23). When a potential difference is applied between the drive electrode 86 and the movable mirror 81, the movable mirror 81 is inclined toward the drive electrode 86 (the state shown by a broken line in FIG. 23).

That is, by changing the voltage applied to the drive electrodes 85 and 86, the inclination direction of the reflecting surface of the movable mirror 81 can be changed in a binary manner. Here, a case will be described in which a DMD element having a large number of the movable mirrors 81 is used as, for example, a spatial light modulation element of a display device. In this case, light (illumination light L1) from the light source is incident along the normal line of the silicon substrate 83. The illumination light L1 causes a large number of movable mirrors 81, 81,
... is illuminated as a whole.

As described above, the illumination light L1 which is vertically incident on the DMD element and illuminates a large number of movable mirrors 81, 81,...
Is reflected in the direction of arrow L2 at the pixel position where the movable mirror 81 is inclined toward the drive electrode 85. At a pixel position where the movable mirror 81 is inclined toward the drive electrode 86, the illumination light L1 is reflected in the direction of the arrow L3.
Therefore, for example, only the light reflected by the movable mirror 81 tilted toward the drive electrode 85 is incident on the screen arranged on the extension in the direction of the arrow L2 via the projection lens (not shown). become. The drive electrode 8
The reflected light (in the direction of arrow L3) from the movable mirror 81 inclined to the 6 side is unnecessary light that does not enter the screen.

Therefore, in a display device having such a DMD element, the inclination of each of a large number of movable mirrors 81, 81,... Is individually controlled in accordance with an electric signal for displaying an image. A light pattern corresponding to the signal can be formed on the screen.

[0008]

However, the conventional DMD
, Each of the movable mirrors 81, 81,.
1 and θ2 are small (for example, ± 10 degrees), the illumination light L1
The optical path of the (incident light to the DMD element) and the optical path of the reflected light L2 from the DMD element approach each other.

Therefore, in a display device using a conventional DMD element, a projection lens (not shown) for projecting reflected light L2 from the DMD element onto a screen causes illumination light L1 from a light source to enter the DMD element. It was supposed to double as a lens. For this reason, a problem arises in that the projection lens becomes large, the weight increases, and the cost increases.
An object of the present invention is to provide a display element having a large number of movable mirrors, wherein an optical path of light incident on each of the movable mirrors is formed at a position far away from an optical path of light reflected from the movable mirror. An object of the present invention is to provide a display element, a driving method, and an optical path changing unit that can contribute to miniaturization, weight reduction, and cost reduction of an optical device incorporating the optical device.

[0010]

According to a first aspect of the present invention, there is provided a display device, comprising: a semiconductor substrate having a surface on which an electric circuit can be formed; and a plurality of first micromirrors provided on the semiconductor substrate. , Optical path forming means, a plurality of second micromirrors,
It is provided with second micro mirror driving means.

The plurality of first micromirrors have a reflecting surface capable of reflecting light supported movably between a plurality of different positions while maintaining a state perpendicular to the forming surface. The optical path forming means moves the reflecting surfaces of the plurality of first micro mirrors individually to any of a plurality of different positions, and forms an optical path according to the position of each of the reflecting surfaces of the plurality of first micro mirrors. It is. The plurality of second micromirrors are arranged along an optical path formed by the optical path forming means,
A reflection surface capable of reflecting light is movably supported between a reflection position for changing an optical path outward and a passing position for not changing an optical path. The second micromirror driving means moves the plurality of second micromirrors individually to the reflection position or the passing position.

That is, according to the first aspect of the present invention, for example, when one second micromirror is moved to the reflection position and the other second micromirrors are moved to the passing position, the first micromirror is moved to the reflection position. On the reflecting surfaces of the two second micro mirrors, the optical path formed by the plurality of first micro mirrors is changed outward. When one or more second micromirrors are moved to the reflection position, among the second micromirrors moved to the reflection position, the reflection surface of the second micromirror located closest to the start end of the optical path. , The optical path is changed outward.

In any case, when the second micromirror positioned at the reflection position is switched, the position of the reflected light path which is changed outward, that is, the display pixel position is switched. As described above, the optical paths of the light incident on the plurality of individually movable second micromirrors are parallel to the optical paths formed by the plurality of first micromirrors, that is, parallel to the formation surface of the semiconductor substrate. . On the other hand, the optical path of the light reflected from each of the second micromirrors goes outward (for example, in a direction perpendicular to the surface on which the semiconductor substrate is formed) far away from the optical path of the incident light.

Therefore, when the display element of claim 1 is incorporated in a display device, for example, the light path of the incident light does not pass through the projection lens for projecting the reflected light from the display element onto the screen. For this reason, the projection lens can be made smaller, which can contribute to miniaturization, weight reduction, and cost reduction of a device incorporating the above-described display element. (Claim 2) The invention described in claim 2 is based on claim 1
, The plurality of first micromirrors are arranged in a line, and the reflecting surface of each first micromirror is movably supported between two different positions. , The reflection surface is located at a position inclined by a predetermined angle with respect to the arrangement direction of the plurality of first micromirrors.

Therefore, according to the second aspect of the present invention, even when a plurality of second micromirrors are arranged in a two-dimensional matrix, by switching the second micromirrors positioned at the reflection position, the outward direction can be improved. , The position of the reflected light path, that is, the display pixel position can be switched. (Claim 3) The invention described in claim 3 is based on claim 2
Wherein the optical path forming means has a plurality of first micromirror driving units corresponding to the plurality of first micromirrors, respectively. Each of the plurality of first micromirror driving units includes a shaft, a first landing electrode, a second landing electrode, and a driving electrode. The shaft is connected to the corresponding first micromirror and rotatably supports the first micromirror. The first landing electrode is maintained at the same potential as the first micromirror, and determines the inclined position. The second landing electrode is maintained at the same potential as the first micromirror, and defines the other of the two different positions. The drive electrode is a member to which a predetermined voltage is applied, the first micromirror is rotated around the shaft, and is brought into contact with the first landing electrode or the second landing electrode.

Therefore, according to the third aspect of the present invention, by controlling the voltage applied to the drive electrode, the first micro mirror can be moved to the inclined position or the other of the two different positions. it can. (Claim 4) The invention described in claim 4 is based on claim 1
3. The display element according to item 1, further comprising a light source that emits laser light and is provided on the semiconductor substrate at a start end side of an optical path formed by the optical path forming unit.

Therefore, according to the fourth aspect of the present invention, the laser light from the light source is guided along the optical path formed by the optical path forming means, and among the second micro mirrors moved to the reflection position, The light can be reflected outward on the reflection surface of the second micromirror located at the start end side of the optical path. Further, since the light source is provided on the semiconductor substrate, handling becomes easy.

According to a fifth aspect of the present invention, in the display device according to the fourth aspect, the light source includes a plurality of laser diodes for emitting laser beams having different wavelengths, and a plurality of lasers. And a light combining means for combining the optical path of each laser beam emitted from the diode into one optical path.

Therefore, according to the invention of claim 5, by switching the laser diode of the light source,
The wavelength of light that contributes to image display can be switched. In addition, a color image can be displayed. Further, since the laser beams of any wavelengths are combined in one optical path, the arrival position of the laser beam reflected by the reflecting surface of the second micro mirror does not change even if the wavelength is switched.

According to a sixth aspect of the present invention, in the display device according to the first aspect, the reflection position of the second micromirror is reflected with respect to a normal to a formation surface and the optical path. The position is such that the surface is inclined at approximately 45 degrees. Therefore, according to the invention described in claim 6, the light reflected on the reflection surface of the second micromirror can be directed in a direction perpendicular to the formation surface. For this reason, an image without distortion can be formed on an outer surface parallel to the forming surface.

According to a seventh aspect of the present invention, in the display device according to the first aspect, a light absorbing member for absorbing light is provided on a semiconductor substrate at an end of an optical path. is there. Therefore, according to the invention described in claim 7,
When all the second micromirrors have been moved to the passage positions, the light from the light source reaches the light absorbing member. And
Light from the light source is absorbed by the light absorbing member. Thereby, generation of stray light can be prevented.

(Claim 8) The invention according to claim 8 is the method for driving a display element according to any one of claims 1 to 7, wherein a plurality of the display elements are driven according to image data. Are moved to the reflection position or the passage position in the order from the beginning to the end of the optical path formed by the optical path forming means.

That is, according to the eighth aspect of the present invention, the plurality of second micromirrors can be sequentially moved to the reflection position one by one in the order from the beginning to the end of the optical path. Therefore, the pixel position at which the light emitted from the light source is reflected outward is switched in the order from the beginning to the end of the optical path. (Claim 9) The invention according to claim 9 is the invention according to claim 8
In the driving method described in (1), the reflection time for stopping the second micro mirror at the reflection position is controlled according to the luminance information included in the image data.

Therefore, according to the ninth aspect of the present invention, only the time corresponding to the luminance information included in the image data,
The reflected light from the second micro mirror can be guided outward. According to a tenth aspect of the present invention, in the driving method of the display element according to the fourth or fifth aspect, the emission time of the laser light emitted from the light source is included in the image data. The control is performed according to the luminance information.

Therefore, according to the tenth aspect, the reflected light from the second micromirror can be guided outward for a time corresponding to the luminance information included in the image data. (11) An optical path changing unit according to (11), wherein the semiconductor substrate having a formation surface on which an electric circuit can be formed, a support member provided on the formation surface, a connecting member provided on the support member, It is provided with a driving member provided on the forming surface near the supporting member, and a reflecting member. Among these, the support member is a member extending in a direction substantially perpendicular to the forming surface. The reflection member is a member having a reflection surface capable of reflecting light and having conductivity. The connection member is a member having elasticity and movably supporting the reflection member while keeping the reflection surface substantially perpendicular to the formation surface. The driving member is a member provided with an electrode having a driving surface substantially perpendicular to the forming surface.

According to a twelfth aspect of the present invention, in the optical path changing unit according to the eleventh aspect, the driving member is provided at least partially in a space where the reflecting member moves. It is provided at the included position. The driving member regulates movement of the reflecting member in one direction.

According to a thirteenth aspect of the present invention, in the optical path changing unit according to the eleventh aspect, at least a space provided on the forming surface near the supporting member and in which the reflecting member moves is provided. The apparatus further includes a regulating member partially included. The regulating member regulates movement of the reflecting member in one direction.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described with reference to FIGS. In addition,
In the first embodiment, claim 1 to claim 8 and claim 10
To claim 13. Display element 10 of first embodiment
1, a silicon substrate 1 (corresponding to the “semiconductor substrate” in claim 1) and k row mirror units 10 [1] to 10 [k] (each in claim 11) ), M pixel mirror units 30 [1] to 30 [m], an element control unit 60,
The light source 50, the light absorbing plate 2, and the fixed mirror 3 are provided.

Among them, k row mirror units 10
[1] to [k], m pixel mirror units 30 [1] to
30 [m], the light source 50, the light absorbing plate 2, and the fixed mirror 3 are all provided on the silicon substrate 1. The element control section 60 is formed on the formation surface 1 a of the silicon substrate 1. First, the configuration of the display element 100 will be specifically described.

The light source 50 includes a red laser diode (hereinafter referred to as "LD") 51, a green LD 52, and a blue LD 53.
, Collimator lenses 54 to 56 and half mirror 5
7, 58 (corresponding to the "photosynthesis means" in claim 5). The laser light emitted from the red LD 51 is
After passing through the half mirror 57 via the collimator lens 54, the light is reflected by the half mirror 58. Green L
The laser light emitted from D52 is
The light is reflected by the half mirrors 57 and 58 through the light source 5. Further, the laser light emitted from the blue LD 53 passes through the half mirror 58 via the collimator lens 56.

As a result, the optical path of the laser light from the red LD 51, the optical path of the laser light from the green LD 52, and the blue LD 5
The optical path of the laser beam from the third mirror is a half mirror 57,
The light 58 is combined into one optical path 50a. Hereinafter, the direction of the optical path 50a is referred to as a Y-axis direction. As described above, the light source 50 emits the laser light of the red LD 51, the green LD 52, and the blue LD 53 along one optical path 50a.

Further, k row mirror units 10 [1] to 10
10 [k], the fixed mirror 3 is connected to the optical path 5 of the light source 50 described above.
They are arranged in a line along a direction (X-axis direction) orthogonal to 0a. These row mirror units 10 [1] to 10
[k] The fixed mirror 3 forms an optical path 10a (shown by a dashed line in FIGS. 1 to 3) along the formation surface 1a of the silicon substrate 1 (details will be described later).

Here, the configuration of the row mirror unit 10 [1] arranged on the extension of the optical path 50a (FIG. 1) of the light source 50 will be described. As shown in FIG. 4, the row mirror unit 10 [1] has a thin plate-shaped movable mirror 11 (claim 11).
) And the center pole 13 (claim 3)
, A plate-shaped drive pole 14 (corresponding to the "drive member" in claim 11), and a stop pole 15 (corresponding to the "control member" in claim 13). ").

The plate-like drive pole 14 is arranged on the formation surface 1a of the silicon substrate 1 along the Y-axis direction (FIG. 5B). Also, the center pole 13 (FIG. 5A),
The stop poles 15 (FIG. 5 (c)) are arranged on the forming surface 1a with their long axis directions aligned with the normal line (Z-axis direction) of the forming surface 1a. The arrangement of the center pole 13 in the XY plane (FIG. 4) is closer to the light source 50 than the drive pole 14 described above. The arrangement of the stop pole 15 in the XY plane is closer to the row mirror unit 10 [2] than the drive pole 14 is. If the optical path of the laser beam can be changed to approximately 90 ° in a plane substantially parallel to the forming surface 1a, the arrangement of the center pole 13, the stop pole 15, and the drive pole 14 is as follows.
The arrangement is not limited to the arrangement shown in FIG.

Incidentally, the optical path (incident optical path L1) of the laser light emitted from the light source 50 along the optical path 50a and directly incident on the row mirror unit 10 [1] is changed to the stop pole 15
It can pass through a space 16 formed between the driving pole 14 and the driving pole 14. On the other hand, the movable mirror 11 (FIGS. 4 and 5A)
The center pole 13 is provided via a hinge 12 (corresponding to the “connecting member” in claim 11) which is thin and bent.
It is connected to. That is, the movable mirror 11
It is rotatable around a center pole 13.

However, the movable mirror 11 is always located between the stop pole 15 and the drive pole 14. For this reason, the range of the rotation angle of the movable mirror 1 is limited to about 45 degrees by the arrangement of the stop pole 15 and the drive pole 14 in the XY plane. The movable mirror 11 is a conductor containing aluminum as a main component. The shape of the movable mirror 11 is a plate having a substantially uniform thickness along the reflection surface. The shape of the reflecting surface of the movable mirror 11 is substantially square. The dimensions of the movable mirror 11 are both 10 μm in width and length, and about 1 μm in thickness.

A reflecting surface (not shown) capable of reflecting white light is provided on the surface 11a of the movable mirror 11 (FIG. 4) on the stop pole 15 side. Here, stop pole 1
A landing electrode 23 (corresponding to the "first landing electrode" in claims 3) is formed on the surface 15a on the movable mirror 11 side in FIG. 5 (FIGS. 4 and 5C). As shown in FIG. 6, the landing electrode 23 and the movable mirror 11 are electrically connected via electrodes (all not shown) formed on the hinge 12, the center pole 13, and the stop pole 15, respectively. I have.

The driving pole 14 (FIGS. 4 and 5B)
A landing electrode 21 (corresponding to the “second landing electrode” in Claim 3) and a drive electrode 22 are formed on the surface 14a on the movable mirror 11 side. As shown in FIG. 6, the landing electrode 21 and the movable mirror 11 are electrically connected via electrodes (all not shown) formed on the hinge 12, the center pole 13, and the drive pole 14, respectively. I have.

As described above, the hinge 12 and the center pole 13
, Drive pole 14 and stop pole 15 are movable mirror 1
1 and the potential of the landing electrode 21 and the potential of the landing electrode 23 are maintained at the same potential. Further, the landing electrode 21 is connected to one output terminal of the row mirror unit drive circuit 61 [1] in the element control section 60. Since the landing electrode 21 is connected to the movable mirror 11, one output terminal of the row mirror unit drive circuit 61 [1] is connected to the movable mirror 11
It will be connected with.

On the other hand, the drive electrode 22 is connected to the other output terminal of the row mirror unit drive circuit 61 [1].
The row mirror unit drive circuit 61 [1] applies voltages of different polarities (for example, + 5V to the movable mirror 11 and -5V to the drive electrode 22) on the movable mirror 11 and the drive electrode 22 of the row mirror unit 10 [1]. Or a voltage of the same polarity (for example,
This is a circuit for applying +5 V to the movable mirror 11 and +5 V to the drive electrode 22 (details will be described later).

Here, the row mirror unit driving circuit 61
When [1] applies voltages of different polarities to the movable mirror 11 and the drive electrode 22, the drive electrode 22 and the movable mirror 11
And the polarity of the potential is different. Then, an electrostatic attraction force acts between the drive electrode 22 and the movable mirror 11. Accordingly, the rotatable movable mirror 11 is drawn toward the drive pole 14 and stops in a state of contact with the landing electrode 21 as shown by a solid line in FIG. At this time, the movable mirror 11 is in a state parallel to the Y axis.
Corresponding to the other of the three different positions).

The thickness d2 of the drive electrode 22 (for example,
The thickness d1 of the landing electrode 21 (for example, 5 μm)
(about μm), the movable mirror 11 does not contact the drive electrode 22. Thus, the movable mirror 1
When 1 is parallel to the Y axis, the direction of the incident light path L1 is not changed. Therefore, the laser light from the light source 50 is
After passing through the space 16, the pixel mirror unit 30
You will go to [1].

The row mirror unit drive circuit 61 [1]
However, when a voltage having the same polarity is applied to the movable mirror 11 and the drive electrode 22 (FIG. 6), the polarity of the potential of the drive electrode 22 and the polarity of the potential of the movable mirror 11 become the same. as a result,
An electrostatic repulsion is generated between the movable mirror 11 and the drive electrode 22. Accordingly, the movable mirror 11 rotates around the center pole 13 in a direction away from the drive electrode 22 while maintaining a state perpendicular to the formation surface 1a, as shown by a broken line in FIG. Stop when touched. At this time, the reflecting surface of the movable mirror 11 has an incident light path L
1 is inclined by about 45 degrees (corresponding to the "inclination position" in claim 2).

As described above, the reflection surface of the movable mirror 11 is 4
When tilted by 5 degrees, the direction of the incident light path L1 is a reflection surface, is changed by 90 degrees along the forming surface 1a, and becomes the X-axis direction (reflection light path L2). Therefore, the laser light from the light source 50 is reflected on the reflecting surface of the movable mirror 11 in the X-axis direction, and travels to the next row mirror unit 10 [2]. As described above, in the row mirror unit 10 [1], the polarity of the voltage applied to the movable mirror 11 and the polarity of the voltage applied to the drive electrode 22 are changed by the row mirror unit drive circuit 61.
By controlling in [1], the laser beam from the light source 50 can be passed toward the pixel mirror unit 30 [1] or reflected toward the next row mirror unit 10 [2]. .

The row mirror unit 10 [2] arranged adjacent to the row mirror unit 10 [1] configured as described above has a row mirror unit 10 [1] as shown in FIG. In the same manner as described above, it comprises a movable mirror 11, a center pole 13, a drive pole 14, and a stop pole 15.

However, the light path L3 incident on the row mirror unit 10 [2] is in the + X direction, unlike the light path L1 incident on the row mirror unit 10 [1] (+ Y direction). Are arranged along the X axis. Further, the center pole 13 is disposed closer to the row mirror unit 10 [1] than the driving pole 14. In order to make the reflected light path L4 from the row mirror unit 10 [2] in the + Y direction different from the reflected light path L2 (+ X direction) from the row mirror unit 10 [1], the stop pole 15 is driven. It is arranged closer to the pixel mirror unit 30 [i + 1] than the pole 14.

Therefore, in the row mirror unit 10 [2], when voltages of different polarities are applied to the movable mirror 11 and the drive electrode 22, the movable mirror 11 is brought into a state parallel to the X axis. Corresponding to the other of the three different positions). At this time, the laser beam from the row mirror unit 10 [1] passes through the space 16 and proceeds directly to the next row mirror unit 10 [3]. When a voltage of the same polarity is applied to the movable mirror 11 and the drive electrode 22, the movable mirror 11
Is inclined about 45 degrees with respect to the incident optical path L3 (corresponding to the "inclination position" in claim 2). At this time, the laser light from the row mirror unit 10 [1] is reflected by the reflection surface of the movable mirror 11 and is reflected by the pixel mirror unit 30.
Head to [i + 1].

The other row mirror units 10 [3] to 10 [1]
The configuration of 0 [m] (FIG. 1) is the same as that of the row mirror unit 10 [2] described above, and a description thereof will be omitted. Note that k
The movable mirror 11 provided in each of the row mirror units 10 [1] to 10 [k] corresponds to “a plurality of first micromirrors” in claim 1. k row mirror units 10
The hinge 12, the center pole 13, the driving pole 14, the stop pole 15, the landing electrodes 21, 23, and the driving electrode 22 provided in each of [1] to [k] are defined as "optical path forming means" in claim 1. Corresponding.

Here, the row mirror unit 10 described above is used.
The laser beam passing through the space 16 (FIG. 4) of [1] and traveling toward the pixel mirror unit 30 [1] is transmitted along the optical path 1 shown in FIG.
It proceeds in the + Y direction along 0a. Further, after being reflected by the movable mirror 11 (FIG. 4) of the row mirror unit 10 [1] described above, it is also reflected by the movable mirror 11 (FIG. 7) of the row mirror unit 10 [2], and becomes a pixel mirror unit 30 [i + 1]. ] Travels in the + Y direction along the optical path 10a shown in FIG.

Similarly, after being reflected by the movable mirror 11 of the row mirror unit 10 [1], the row mirror unit 10 [2] is reflected.
After that, the laser light reflected by the movable mirror 11 of the row mirror unit 10 [3] travels in the + Y direction along the optical path 10a shown in FIG. 2B.
Similarly, the movable mirror 1 of the row mirror unit 10 [1]
After being reflected by 1, the row mirror units 10 [2] to 10
The laser light passing through the space [k-1] 16 and then reflected by the movable mirror 11 of the row mirror unit 10 [k] travels in the + Y direction along the optical path 10a shown in FIG.

Further, after being reflected by the movable mirror 11 of the row mirror unit 10 [1], the row mirror unit 10 [2] is reflected.
After passing through a space 16 of 10 to 10 [k], the fixed mirror 3
The laser beam reflected by the optical path 10a shown in FIG.
Along the + Y direction. As described above, the optical path 10a formed by the k row mirror units 10 [1] to 10 [k] and the fixed mirror 3 has (k + 1) linear portions in the + Y direction (for example, 480, which are simple in FIG. 1). Therefore, the light path follows eight straight lines). The beginning of the optical path 10a is the position of the pixel mirror unit 30 [1] (FIG. 1), and the end is the position of the pixel mirror unit 30 [m] (FIG. 3B).

On the other hand, m pixel mirror units 30 [1]
1 to 30 [m], as shown in FIG.
It is arranged in (k + 1) linear portions along 0a. Each linear portion has i pixel mirror units 30
[1] to 30 [i], 30 [i + 1] to 30 [2i], ..., 30
[m−i + 1] to 30 [m] are arranged (for example, i = 64
0, and FIG. 1 shows a case where i = 10 for simplicity). In this case, m pixel mirror units 30 [1] to 30 [m]
Form a 480 × 640 two-dimensional matrix array. Incidentally, the number m of the pixel mirror units 30 [1] to 30 [m]
Corresponds to the number of pixels of the known video signal.

Each of the pixel mirror units 30 [1] to 30 [3]
Regarding the arrangement interval of 0 [m], the interval P1 adjacent in the Y-axis direction is equal to the interval P2 adjacent in the X-axis direction (for example, 15 μm). Here, the configuration of the pixel mirror unit 30 [1] disposed at the beginning of the optical path 10a will be described.

The pixel mirror unit 30 [1] corresponds to A in FIG.
As shown in the cross-sectional view taken along the line A (FIG. 8), the thin plate-shaped movable mirror 31 is connected to elongated rod-like hinges 32 and 33 at both ends in the X-axis direction, respectively.
2 and 33 are connected to poles 34 and 35, respectively. The poles 34 and 35 are supported on the silicon substrate 1.

As described above, the movable mirror 31 is
The space 36 is formed between the movable mirror 31 and the silicon substrate 1 since the silicon substrate 1 is supported at a position away from the formation surface 1a of the silicon substrate 1 by the substrates 4 and 35. Incidentally, the above-described optical path 10a (FIG. 1) passes through this space 36 as shown in a cross-sectional view taken along the line BB in FIG. 8 (FIG. 9). Note that the hinge 32 is thinner than the movable mirror 31 and the poles 34 and 35, as shown in a cutout portion in FIG. The same applies to the hinge 33. For this reason, the movable mirror 31 causes the hinges 32 and 33 to be twisted and deformed.
It is rotatable around 2, 33.

The rotatable movable mirror 31 has a reflection surface (not shown) on the upper surface 31a that can change the optical path 10a of the laser light. Movable mirror 31
Is a conductor containing aluminum as a main component. The shape of the movable mirror 31 is a plate having a substantially uniform thickness along the reflection surface. The shape of the reflection surface of the movable mirror 31 is substantially square. The dimension of the movable mirror 31 is 10 μm in both width and length (about 2.8 of the height of the poles 34 and 35).
Times) and the thickness is about 1 μm.

The hinges 32 and 33 are members having conductivity and elasticity. Further, landing electrodes 41 and 43 and drive electrodes 42 and 44 are formed on the formation surface 1a of the silicon substrate 1, as shown in FIG. Here, the movable mirror 31 and the landing electrode 41 are electrically connected via electrodes (not shown) formed on the hinge 32 and the pole 34 as shown in FIG. Similarly, the movable mirror 3
1 and the landing electrode 43 are electrically connected via an electrode (not shown) formed on the hinge 33 and the pole 35. Therefore, the landing electrode 43, the movable mirror 31,
The landing electrode 41 and the landing electrode 41 are maintained at the same potential.

The landing electrode 41 is connected to the output terminal of the pixel mirror unit drive circuit 63 [1] in the element control section 60, as shown in FIG. Drive electrode 42
Is connected to another output terminal of the pixel mirror unit drive circuit 63 [1]. The drive electrode 44 is connected to another output terminal of the pixel mirror unit drive circuit 63 [1].

The pixel mirror unit driving circuit 63 [1]
The landing electrode 41, the driving electrode 42, and the driving electrode 44, respectively,
This is a circuit for applying a voltage. As described above, since the landing electrode 41 and the movable mirror 31 are maintained at the same potential, when the pixel mirror unit drive circuit 63 [1] applies a voltage to the landing electrode 41, the voltage is applied to the movable mirror 31. You.

Here, the pixel mirror unit driving circuit 63
When [1] applies voltages of different polarities to the drive electrode 42 and the landing electrode 41 and voltages of the same polarity (for example, 10 V) to the drive electrode 44 and the landing electrode 41, respectively, the drive electrode 42
An electrostatic attractive force acts between the movable mirror 31 and the movable mirror 31, and an electrostatic repulsive force acts between the drive electrode 44 and the movable mirror 31.

Accordingly, the movable mirror 31 rotates around the hinges 32 and 33 as shown by the dotted lines in FIG. 9 and stops when the end in the Y-axis direction abuts on the landing electrode 41. At this time, the reflecting surface of the movable mirror 31 is inclined at about 45 degrees with respect to the normal line (Z-axis direction) of the forming surface 1a and the optical path 10a (corresponding to the "reflection position" of claim 1). ).

When the reflecting surface of the movable mirror 31 is inclined by 45 degrees, the direction of the optical path 10a in the + Y direction passing through the space 36 is changed by 90 degrees at the reflecting surface and becomes the Z direction. Therefore, the laser light from the row mirror unit 10 [1] is reflected by the reflecting surface of the movable mirror 31 and travels outward (Z direction). The pixel mirror unit driving circuit 63
[1] (FIG. 10) applies a voltage of the same polarity (for example, 10 V) to the drive electrode 42, the landing electrode 41, and the drive electrode 44, respectively.
In addition, an electrostatic repulsion acts between the drive electrode 44 and the movable mirror 31.

When the movable mirror 31 is at the position shown by the dotted line in FIG. 9, the distance between the drive electrode 42 and the movable mirror 31 is smaller than the distance between the drive electrode 44 and the movable mirror 31. The magnitude of the electrostatic repulsion acting between the electrode 42 and the movable mirror 31 is larger than the magnitude of the electrostatic repulsion acting between the drive electrode 44 and the movable mirror 31.

Therefore, the movable mirror 31 rotates again around the hinges 32 and 33 as shown by the solid line in FIG. 9 and returns to a horizontal state (corresponding to the "passing position" in claim 1). Stand still. At this time, the optical path 10 in the + Y direction
The direction of a is not changed. Therefore, the laser light from the row mirror unit 10 [1] passes through the space 36 and directly goes to the next pixel mirror unit 30 [2].

As described above, the pixel mirror unit 30 [1]
Thus, the laser light from the row mirror unit 10 [1] can be reflected outward (in the Z direction) or can be passed toward the next pixel mirror unit 30 [2]. Note that the pixel mirror unit 30 configured as described above is used.
The image mirror units 30 [2] to 30 [m] (FIG. 1) other than [1] have the same configuration as the pixel mirror unit 30 [1], and thus description thereof will be omitted.

The m pixel mirror units 30 [1]
The movable mirrors 31 provided for each of the distances from 30 to 30 [m] correspond to the “plurality of second micromirrors” in claim 1. The hinges 32, 33, the poles 34, 35, the landing electrodes 41, 43, and the drive electrodes 42, 44 provided in each of the m pixel mirror units 30 [1] to 30 [m] are described in the first embodiment. 2 micro-mirror driving means.

By the way, in the k row mirror units 10 [1] to 10 [k], the movable mirror 11, the hinge 12, the center pole 13, the driving pole 14, and the stop pole 15 are all in the same position as the silicon substrate 1. Similarly, silicon (S
i). The pixel mirror unit 30
In [1] to 30 [m], the movable mirror 31 and the hinge 3
2, 33 and poles 34, 35 are also formed of Si. Further, the landing electrodes 21, 23, 41, 43, the driving electrodes 22, 42, 44, and the mirror electrodes 17a, 17
Both b and 37 are formed of an aluminum film. Therefore, k row mirror units 10 [1] to 1 [1]
0 [k], m pixel mirror units 30 [1] to 30 [m]
Can be integrally formed on the silicon substrate 1 using the same manufacturing process as the manufacturing process of the micromachine.

Next, the above-described row mirror unit 10 [1]
10 to 10 [k] and pixel mirror units 30 [1] to 30 [m],
The element control unit 60 that individually controls the red LD 51, the green LD 52, and the blue LD 53 will be described. A well-known video signal is input to the element control unit 60 from the outside.

As shown in FIG. 11, the element control section 60 includes a synchronizing circuit 66, an inverting circuit 67, and a converting circuit 68.
, A timing control circuit 69, k row mirror unit drive circuits 61 [1] to 61 [k], m pixel mirror unit drive circuits 63 [1] to 63 [m], and a red LD drive circuit 65 [1], a green LD drive circuit 65 [2], and a blue LD drive circuit 65 [3].

The k row mirror unit drive circuits 61 [1] to 61 [k] among the k row mirror units 10
[1] to [k]. The m pixel mirror unit driving circuits 63 [1] to 63 [m] are connected to the m pixel mirror units 30 [1] to 30 [m], respectively. The red LD driving circuit 65 [1] and the green LD driving circuit 65
[2], the blue LD drive circuit 65 [3] are connected to the red LD51, the green LD52, and the blue LD53, respectively.

The synchronization circuit 66 receives a vertical synchronization signal and a horizontal synchronization signal included in the video signal. The inversion circuit 67 receives a red video signal, a green video signal, and a blue video signal included in the video signal. The inverting circuit 67 converts the pixel information of the red video signal into a digital signal and stores the digital signal in a memory as red image data. Here, the pixel information of the red image data is information representing the brightness of red for each pixel (hereinafter, referred to as “red luminance information”). Further, in the inverting circuit 67, the red luminance information of each pixel stored in the memory is arranged in the arrangement order of the pixel mirror units 30 [1] to 30 [m] (in FIGS. In the order corresponding to (toward), and output to the conversion circuit 68. In the conversion circuit 68,
The red luminance information of each pixel is converted into the emission time Tr of the red LD 51 and output to the timing control circuit 69.

Similarly, in the inversion circuit 67, green image data based on the green image signal and blue image data based on the blue image signal are stored in the memory. Further, the pixel information of the green image data (green luminance information of each pixel) and the pixel information of the blue image data (blue luminance information of each pixel) are also read in the arrangement order of the pixel mirror units 30 [1] to 30 [m]. And output to the conversion circuit 68. In the conversion circuit 68, green luminance information and blue luminance information of each pixel are converted into green LD 52,
The light is converted into emission times Tg and Tb of the blue LD 53 and output to the timing control circuit 69.

The timing control circuit 69 includes a synchronization circuit 66
Is supplied to the red LD driving circuit 65 [1] based on the vertical synchronization signal and the horizontal synchronization signal input through the
And outputs an LD lighting control signal for starting lighting. Further, the timing control circuit 69 counts the elapsed time T from the output of the LD lighting control signal (the start of lighting of the red LD 51).

The timing control circuit 69 sends an LD extinguishing control signal for extinguishing the red LD 51 based on the counted elapsed time T to the red LD driving circuit 65.
Output for [1]. Note that the output of the LD extinguishing control signal is such that the elapsed time T corresponds to the red L input from the conversion circuit 68.
This is performed when the injection time Tr of D51 has been reached. Also,
The turning on / off of the red LD 51 is performed sequentially for each pixel.

Similarly, the timing control circuit 69 causes the green LD drive circuit 65 [2] and the blue LD drive circuit 65 [3] to start lighting the green LD 52 and the blue LD 53.
D lighting control signal, or green LD52, blue LD53
An LD extinguishing control signal for extinguishing is output for each pixel. Further, the timing control circuit 69 generates m pixel mirror unit driving circuits 63 [1] based on the vertical synchronizing signal and the horizontal synchronizing signal input via the synchronizing circuit 66.
Pixel mirror units 30 [1] to 30 [30]
A mirror tilt control signal for tilting the [m] movable mirror 31 is individually output. The output of the mirror tilt control signal is performed one by one in an order corresponding to the arrangement order of the pixel mirror units 30 [1] to 30 [m].

Further, the timing control circuit 69 generates a mirror horizontal control signal for returning the movable mirror 31 of the pixel mirror unit 30 [1] to 30 [m] to horizontal based on the counted elapsed time T. To the pixel mirror unit drive circuits 63 [1] to 63 [m]. The output of the mirror horizontal control signal is always performed when the elapsed time T reaches a predetermined maximum time Tmax.

The maximum time Tmax is equal to the length of the red LD 51,
This corresponds to the maximum emission time per pixel common to the green LD 52 and the blue LD 53. Further, the timing control circuit 69 controls the k row mirror unit driving circuits 61 [1] to 61 [k] based on the vertical synchronizing signal and the horizontal synchronizing signal input through the synchronizing circuit 66, to the row mirrors. Mirror tilt control signals for tilting the movable mirrors 11 of the units 10 [1] to 10 [k] are individually output.

The timing control circuit 69 sends a mirror parallel control signal for making the movable mirror 11 of the row mirror unit 10 [1] parallel to the Y axis to the row mirror unit drive circuit 61 [1], A row mirror unit driving circuit 61 [2] to 61 [k] is supplied with a mirror parallel control signal for making the movable mirrors 11 of 10 [2] to 10 [k] parallel to the X axis.
Output individually.

When the mirror tilt control signal is input from the timing control circuit 69, the m pixel mirror unit driving circuits 63 [1] to 63 [m] receive the pixel mirror units 30 [1] to 30 [m]. ], And voltages of different polarities are applied to the drive electrode 42 and the landing electrode 41, and to the drive electrode 44 and the landing electrode 41. The pixel mirror unit drive circuits 63 [1] to 63 [m] include a timing control circuit 69.
When the mirror horizontal control signal is input from the pixel mirror unit 30 [1] to 30 [m], the drive electrode 42 and the landing electrode 4
1 and the drive electrode 44 are applied with voltages of the same polarity.

Further, when the mirror tilt control signal is input from the timing control circuit 69, the k row mirror unit drive circuits 61 [1] to 61 [k]
A voltage of the same polarity is applied to each of the movable mirror 11 and the drive electrode 22 of 0 [1] to 10 [k]. When the mirror horizontal control signal is input, the k row mirror unit driving circuits 61 [1] to 61 [k] receive the row mirror unit 10
Voltages of different polarities are applied to the movable mirrors 11 and the drive electrodes 22 of [1] to [k].

Next, a color image display operation of the display element 100 realized by the control of the element control section 60 will be described. This color image display operation is performed by displaying a red image (Steps S10 to S18 in FIG. 12A) → displaying a green image (Steps S20 to S28 in FIG. 13A) → displaying a blue image (FIG. 14A ) Steps S30 to S38)
Are sequentially performed.

Prior to the color image display operation, the display element 1
At 00, initialization is performed under the control of the timing control circuit 69. As a result of initialization, red LD51, green LD
52 and the blue LD 53 are all turned off. Further, the movable mirrors 11 of the row mirror unit 10 [1] are positioned in a state parallel to the Y axis, and all the movable mirrors 11 of the row mirror units 10 [2] to 10 [k] are positioned in a state parallel to the X axis. (FIG. 1). Further, the pixel mirror units 30 [1] to 30 [m]
All the movable mirrors 31 are positioned in a horizontal state (FIG. 15A).

The internal counters N and Q of the timing control circuit 69 are both set to the initial value (1). The internal counter N is for holding the value of the display pixel position. The internal counter Q is for holding the value of the display line position. When a predetermined display start instruction arrives for the display element 100 (FIGS. 1 and 15A) in the initialized state, the color image display processing shown in FIGS. 12 to 14 is executed.

The processing of each step in FIGS. 12 to 14 will be described below. In step S10, the Qth line of the red image associated with the value of the internal counter Q is displayed (steps S40 to S45 in FIG. 12B). In this control, since the value of the internal counter Q is 1, the first line display of the red image is performed.

Until the control in step S10 (FIG. 12A) is completed, the row mirror units 10 [1] to 10 [1] to 10
Since the movable mirror 11 of [k] is in the initialized state (FIG. 1), the laser beam from the red LD 51 passes through the row mirror unit 10 [1] and moves in the + Y direction along the optical path 10a of FIG. Will go on. Here, the first line display of the red image (steps S40 to S45 in FIG. 12B) will be described.

In step S40, the movable mirror 31 is tilted by 45 degrees for the pixel mirror unit 30 [N] associated with the value of the internal counter N. Since the value of the internal counter N is 1 in the first control, the pixel mirror unit 30
The movable mirror 31 of [1] is tilted (the state of FIG. 15B).
In the next step S41, the red L is determined according to the red luminance information of the N-th pixel associated with the value of the internal counter N.
D51 is turned on / off. That is, the red LD 51 is
Emission time Tr [N] of the red LD 51 for the Nth pixel
Only lit.

In the first control, the red LD 51 is turned on for the emission time Tr [1] of the red LD 51 for the first pixel (the state of FIG. 15C). At this time, the red LD5
The laser light emitted from the pixel mirror unit 30
The light is reflected outward by the movable mirror 31 of [1]. As a result, the reflected light of the red LD 51 is guided outward from the pixel mirror unit 30 [1] continuously for the emission time Tr [1].

In step S42, the elapsed time T from the start of the control in step S41 (lighting of the red LD 51) is started.
And the maximum time per pixel Tmax. When the elapsed time T reaches the maximum time Tmax, the process proceeds to the next step S43. In step S43, the movable mirror 31 of the pixel mirror unit 30 [N] is returned to the horizontal state. Therefore, the state returns to the state of FIG.

In the next step S44, the internal counter N
Is updated by one. As a result, the pixel mirror unit 30 [N] to be controlled is switched. In step S45, the value of the internal counter N is compared with the maximum value Nq. This maximum value Nq corresponds to (i: the number of pixel mirror units per line) × (Q: the value of the internal counter Q). As a result of the comparison, if the value of the internal counter N is equal to or less than the maximum value Nq,
Returning to step S40, the above processing is repeated. On the other hand, when the value of the internal counter N exceeds the maximum value Nq, FIG.
Go to step S11. In this control, since the value of the internal counter Q is 1, the maximum value Nq = i.

By the way, if the value of the internal counter N is 2, the state of FIG.
The state of FIG. 15E is obtained in step S41. At this time,
The laser light from the red LD 51 is transmitted to the pixel mirror unit 3
The light is reflected outward by the movable mirror 31 of 0 [2]. The red LD 51 is a red LD 5 related to the second pixel.
It is turned on for one injection time Tr [2]. As a result, the emission time Tr [2] moves outward from the pixel mirror unit 30 [2].
The reflected light of the red LD 51 is guided continuously.

Similarly, when the value of the internal counter N is the maximum value i, the state shown in FIG. 15F is obtained in step S40, and the state shown in FIG. 15G is obtained in step S41. At this time, the red L
The laser beam from D51 is transmitted to the pixel mirror unit 30 [i].
Is continuously reflected outward by the movable mirror 31 for the emission time Tr [i] of the red LD 51 for the i-th pixel.

As described above, step S40 in FIG.
By repeating the processing of S45 to S45, the reflected light of the red LD 51 is sequentially guided outward from each of the pixel mirror units 30 [1] to 30 [i] (FIG. 15), and the first line of the red image is The display ends. On the other hand, in step S11 in FIG. 12A, the movable mirror 11 of the row mirror unit 10 [1] is tilted by 45 degrees (broken line in FIG. 4). At this time, the laser light from the red LD 51 is supplied to the row mirror unit 10 [1].
Of the row mirror unit 10
Go to [2].

In the next step S12, the internal counter Q
Is updated by one. In step S13, the movable mirror 11 is tilted by 45 degrees for the row mirror unit 10 [Q] associated with the value of the internal counter Q. Since the value of the internal counter Q is 2 in the first control, the row mirror unit 1
The movable mirror 11 of 0 [2] is tilted (solid line in FIG. 7). Therefore, the laser light from the row mirror unit 10 [1]
The light is also reflected by the movable mirror 11 of the row mirror unit 10 [2], and travels in the + Y direction along the optical path 10a in FIG.

In step S14, the above-described step S
12, the Q-th line of the red image is displayed (FIG. 12).
(b) Steps S40 to S45). In the first control, since the value of the internal counter Q is 2, the second line display of the red image is performed. As a result, the pixel mirror unit 30
Red LD51 in order from [i + 1] to 30 [2i]
Reflected light is guided outward.

In the next step S15, the movable mirror 11 of the row mirror unit 10 [Q] is returned to a state parallel to the X axis. In step S16, the value of the internal counter Q is compared with the maximum value k (the number of row mirror units 10 [1] to 10 [k]). If the value of the internal counter Q is smaller than the maximum value k, the process returns to step S12 to repeat the above processing. On the other hand, if the value of the internal counter Q is equal to or greater than the maximum value k, the process proceeds to step S17.

If the value of the internal counter Q is 2, the value of the internal counter Q is updated to 3 in step S12, and the movable mirror 11 of the row mirror unit 10 [3] is tilted in step S13. Therefore, the row mirror unit 1
The laser light from 0 [1] is reflected by the movable mirror 11 of the row mirror unit 10 [3], and travels in the + Y direction along the optical path 10a in FIG. Then, step S1
At 4, the third line of the red image is displayed.

Similarly, when the value of the internal counter Q is (k-1), the value of the internal counter Q is updated to k in step S12, and the movable mirror 11 of the row mirror unit 10 [k] is updated in step S13. Tilt. Therefore, the laser beam from the row mirror unit 10 [1]
The light reflected by the movable mirror 11 shown in FIG.
Then, the object moves in the + Y direction along a. Then, in step S14, the k-th line display of the red image is performed.

As described above, by repeatedly executing the processing of steps S12 to S16 in FIG.
The display from the second line display to the k-th line display of the red image is sequentially performed. In the next step S17, the internal counter Q
Is updated by one more value. In step S18, the Q-th line of the red image is displayed as in steps S10 and S14 described above (steps S40 to S4 in FIG. 12B).
5). In this control, the value of the internal counter Q is (k + 1)
Therefore, the (k + 1) th line of the red image is displayed.

At this time, the laser light from the row mirror unit 10 [1] is reflected by the fixed mirror 3 and travels in the + Y direction along the optical path 10a in FIG. As a result, the reflected light of the red LD 51 is sequentially guided outward from each of the pixel mirror units 30 [mi + 1] to 30 [m]. Thus, steps S10 to S18 in FIG.
By executing the processing of (1), the pixel mirror unit 30 [1]
The reflected light of the red LD 51 is guided outward in order from each of [30 m], and the display of the red image ends.

Next, after performing the processing of step S19 in FIG. 13A, a green image is displayed (steps S20 to S28 in FIG. 13A). In step S19 of FIG. 13A, the movable mirror 1 of the row mirror unit 10 [1]
1 is returned to a state parallel to the Y axis. Further, the values of the internal counters N and Q are both updated to the initial value (1). Therefore, the display element 100 is again in the initialized state (FIG. 1, FIG. 15A).

Here, steps S20 to S in FIG.
FIG. 12A showing the display of the above-mentioned red image out of 28
Is different from the steps S10 to S18 of the step S2.
It is the Q-th line display of the green image in steps 0, S24, and S28 (steps S46 to S51 in FIG. 13B). Display of the Q-th line of this green image (step S4 in FIG. 13B)
6 to S51) will be briefly described.

In step S46, the movable mirror 31 of the pixel mirror unit 30 [N] is tilted by 45 degrees. In the next step S47, according to the green luminance information of the N-th pixel,
The green LD 52 is turned on / off. That is, green LD5
2 is the emission time T of the green LD 52 for the Nth pixel
Only g [N] is lit. At this time, the laser beam from the green LD 52 is continuously reflected outward by the movable mirror 31 of the pixel mirror unit 30 [N] for the emission time Tg [N].

In step S48, the elapsed time T from the start of the control in step S47 (lighting of the green LD 52) is started.
And the maximum time Tmax. When the elapsed time T reaches the maximum time Tmax, the process proceeds to the next step S49. In step S49, the movable mirror 31 of the pixel mirror unit 30 [N] is returned to the horizontal state.

In the next step S50, the internal counter N
Is updated by one. In step S51, the value of the internal counter N is compared with a maximum value Nq (= i × Q). If the value of the internal counter N is equal to or less than the maximum value Nq, the process returns to step S46 to repeat the above processing. This is performed until the value of the internal counter N exceeds the maximum value Nq. In this way, by repeating the processing of steps S46 to S51 in FIG. 13B, the reflected light of the green LD 52 is sequentially guided outward from each of the i pixel mirror units, and the Qth line display of the green image is performed. Ends.

Therefore, step S20 in FIG.
By executing the processing of (when Q = 1), the processing shown in FIG.
15 (a) → (b) → (c) → (a) → (d) → (e) →... → (a) →
(f) → (g) → (a), and the first line of the green image is displayed. Further, steps S21 to S21 in FIG.
By executing the processing of S26, the k-th to k-th lines of the green image are obtained in the same manner as in steps S11 to S16 of FIG.
Up to the line are sequentially displayed.

Further, steps S27 and S2 in FIG.
By executing the process of FIG. 8, step S1 of FIG.
7. As in S18, the (k + 1) th line of the green image is displayed. As described above, steps S20 to S20 in FIG.
By performing the process of 28, the pixel mirror unit 30
The reflected light of the green LD 52 is guided outward in order from each of [1] to 30 [m], and the display of the green image ends.

Next, after performing the processing of step S29 of FIG. 14A (similar to step S19 of FIG. 13A), a blue image is displayed (steps S30 to S of FIG. 14A).
38) is performed. Here, step S3 in FIG.
FIG. 1 showing the display of the above-described red image among 0 to S38
The difference from Steps S10 to S18 of 2 (a) is the display of the Q-th line of the blue image in Steps S30, S34, and S38 (Steps S52 to S57 in FIG. 14B).

The Q line display of this blue image (FIG. 14)
Steps (S52 to S57) of (b) will be briefly described. In step S52, the pixel mirror unit 30 [N]
Of the movable mirror 31 is tilted by 45 degrees.

In the next step S53, the blue LD 53 is turned on / off according to the blue luminance information of the Nth pixel. That is, the blue LD 53 is lit for the emission time Tb [N] of the blue LD 53 for the Nth pixel. At this time, the laser light from the blue LD 53 is emitted by the movable mirror 31 of the pixel mirror unit 30 [N] to the emission time Tb.
It is continuously reflected outward by [N].

In step S54, the elapsed time T from the start of the control in step S53 (the lighting of the blue LD 53) is started.
And the maximum time Tmax. When the elapsed time T reaches the maximum time Tmax, the process proceeds to the next step S55. In step S55, the movable mirror 31 of the pixel mirror unit 30 [N] is returned to the horizontal state.

In the next step S56, the internal counter N
Is updated by one. In step S57, the value of the internal counter N is compared with the maximum value Nq (= i × Q). If the value of the internal counter N is equal to or less than the maximum value Nq, the process returns to step S52 to repeat the above processing. This is performed until the value of the internal counter N exceeds the maximum value Nq. As described above, by repeating the processing of steps S52 to S57 in FIG. 14B, the reflected light of the blue LD 53 is sequentially guided outward from each of the i pixel mirror units, and the Q-line display of the blue image is performed. Ends.

Therefore, step S30 in FIG.
By executing the processing in step S10, the processing in step S10 in FIG.
As in the case of FIG.
(c) → (a) → (d) → (e) → ... → (a) → (f) → (g) → (a)
, And the first line of the blue image is displayed. Further, by executing the processing of steps S31 to S36 in FIG. 14A, the second to k-th lines of the blue image are sequentially displayed as in steps S11 to S16 of FIG.

Further, steps S37 and S3 in FIG.
By executing the process of FIG. 8, step S1 of FIG.
7. As in S18, the (k + 1) th line of the blue image is displayed. As described above, steps S30 to S30 in FIG.
38, the pixel mirror unit 30
The reflected light of the blue LD 53 is sequentially guided outward from each of [1] to 30 [m], and the display of the blue image is completed.
The one-screen display of the color image ends.

The time required for the one-screen display (the processing of steps S10 to S38 in FIGS. 12 to 14) is about 1/30 second. Therefore, red image → green image →
By displaying the blue images in order, the images can be visually recognized as color images. When displaying the color image of the next screen, the above-described processes of steps S10 to S38 may be executed again.

Note that the display element 1 of the first embodiment described above is used.
At 00, the display of the color image is changed to the display of the red image (FIG. 1).
2A) Steps S10 to S18) → Display of green image (Steps S20 to S28 in FIG. 13A) → Display of blue image (Steps S30 to S38 in FIG. 14A) in order. , But is not limited to this.
Modifications 1 and 2 of the color image display operation of the display element 100 will be described below.

(Modification 1 of Color Image Display Operation) The color image display operation of Modification 1 is a dot sequential operation. Also in this case, prior to the color image display operation, the display element 100
Are initialized (the state of FIGS. 1 and 15A), and the internal counters N and Q are set to the initial value (1). The color image display operation of the first modification includes the steps S10, S14, and S of displaying the red image (steps S10 to S18 in FIG. 12A) in the color image display operation of the first embodiment.
At 18, the Q-th line display of the red image (FIG. 12B)
Of the color image shown in FIG. 16 instead of steps S40 to S45) (steps S60 to S45).
69), and the process ends in step S18.

Here, the Q-line display of a color image (steps S60 to S69 in FIG. 16) will be briefly described. In step S60, the pixel mirror unit 30 [N]
Of the movable mirror 31 is tilted by 45 degrees. Step S61, S
In step 62, the same processing as steps S41 and S42 in FIG. 12B is performed. As a result, the laser light from the red LD 51 is continuously reflected outward by the movable mirror 31 of the pixel mirror unit 30 [N] for the emission time Tr [N].

In steps S63 and S64, FIG.
The same processing as in steps S47 and S48 is performed. As a result, the laser light from the green LD 52 is emitted by the movable mirror 31 of the pixel mirror unit 30 [N] to the emission time Tg.
It is continuously reflected outward by [N]. Step S65,
In S66, the same processing as in steps S53 and S54 in FIG. 14B is performed. As a result, the laser light from the blue LD 53 is continuously reflected outward by the movable mirror 31 of the pixel mirror unit 30 [N] for the emission time Tb [N].

In step S67, the movable mirror 31 of the pixel mirror unit 30 [N] is returned to the horizontal state. In the next step S68, the value of the internal counter N is updated by one. In step S69, the value of the internal counter N is compared with the maximum value Nq. If the value of the internal counter N is equal to or less than the maximum value Nq, the process returns to step S60 to repeat the above processing. This is performed until the value of the internal counter N exceeds the maximum value Nq.

As described above, steps S60 to S60 in FIG.
By repeating the process of step 69, the reflected light of the red LD 51, the green LD 52, and the blue LD 53 is sequentially directed outward from each of the i pixel mirror units, and the Qth of the color image is output.
The line display ends.

Therefore, step S1 in FIG.
By replacing the 0, S14, and S18 with the Q-th line display of the color image (steps S60 to S69 in FIG. 16) and executing the processing in steps S10 to S18 in FIG. From the line to the (k + 1) th line are sequentially displayed, and the one-screen display of the color image is completed.

According to the first modification, the movable mirror 1
Red LD51, green LD every time 1, 31 is inclined
52 and the blue LD 53 are sequentially turned on, so that the number of rotations of the movable mirrors 11 and 31, that is, the hinges 12 and 3
The number of twists of 2, 33 can be reduced. Therefore, breakage of the row mirror unit and the pixel mirror unit due to the elastic fatigue of the hinges 12, 32, 33 can be suppressed.

(Modification 2 of Color Image Display Operation) Also in the case of Modification 2, prior to the color image display operation, the display element 100 is initialized (the state of FIG. 1 and FIG. The counter N is set to an initial value (1). The color image display operation of the second modification is the same as the color image display operation of the first embodiment described above, except that the display of a red image (FIG. 12A)
Steps S10 and S1 of Steps S10 to S18)
In step S18, the Q-th line display of the red image (FIG. 1)
Instead of steps S40 to S45 of 2 (b), FIG.
Display of the Q-th line of the color image shown in FIG.
0 to S75), and the process ends in step S18.

Here, the Q-line display of a color image (steps S70 to S75 in FIG. 17) will be briefly described. In step S70, the pixel mirror unit 30 [N]
Of the movable mirror 31 is tilted by 45 degrees.

At the next step S71, the red LD 51,
Lighting of the green LD 52 and the blue LD 53 is started almost simultaneously. And red LD51, green LD52, blue LD5
3 is the emission time T of the red LD 51 for the Nth pixel.
r [N], emission time Tg [N] of green LD 52, blue LD 5
After the injection time Tb [N] of No. 3 has elapsed, each light is turned off. As a result, the laser light from the red LD 51, the green LD 52, and the blue LD 53 is emitted by the movable mirror 31 of the pixel mirror unit 30 [N] to the emission times Tr [N], Tg [N], Tb.
It is continuously reflected outward by [N].

In step S72, the elapsed time T from the start of the control in step S71 (the lighting of the red LD 51, the green LD 52, and the blue LD 53) is compared with the maximum time Tmax. When the elapsed time T reaches the maximum time Tmax, the process proceeds to the next step S73. In step S73,
The movable mirror 31 of the pixel mirror unit 30 [N] is returned to a horizontal state.

In the next step S74, the internal counter N
Is updated by one. In step S75, the value of the internal counter N is compared with the maximum value Nq. If the value of the internal counter N is equal to or less than the maximum value Nq, the process returns to step S70 to repeat the above processing. This is because the value of the internal counter N is the maximum value N
It is performed until q is exceeded. As described above, by repeatedly executing the processing of steps S70 to S75 in FIG. 17,
Red LD in order from each of the i pixel mirror units
The reflected light of the green LD 52, the blue LD 53, and the blue LD 53 is guided outward, and the display of the Q-th line of the color image ends.

Therefore, step S1 in FIG.
By replacing the 0, S14, and S18 with the Q-th line display of the color image (steps S70 to S75 in FIG. 17) and executing the processing of steps S10 to S18 in FIG. From the line to the (k + 1) th line are sequentially displayed, and the one-screen display of the color image is completed.

According to the second modification, the red LD5
Since the green LD 52 and the blue LD 53 are simultaneously turned on, a bright color image can be displayed. Further, the number of gradations can be increased, and many color colors can be expressed. (Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIGS. Note that the second embodiment corresponds to claims 1 to 9.

The display device 200 according to the second embodiment has the structure shown in FIG.
As shown in FIG. 7, the conversion circuits 78,
The configuration of the timing control circuit 79 is different from the conversion circuit 68 and the timing control circuit 69 of the display element 100 (FIG. 11) of the first embodiment. That is, in the display element 200 according to the second embodiment, the red luminance information, the green luminance information, and the blue luminance information of each pixel input from the inversion circuit 67 to the conversion circuit 78 are respectively included in the pixel mirror units 30 [1] to 30 [30].
[m] Tilt time Tr, Tg,
It is converted to Tb (corresponding to the "reflection time" of claim 9). These ramp times Tr, Tg, Tb are calculated by the conversion circuit 78.
To the timing control circuit 79.

The timing control circuit 79 includes the synchronization circuit 66
Pixel mirror unit driving circuits 63 [1] to 63 [m] based on a vertical synchronizing signal and a horizontal synchronizing signal input through
In contrast, m pixel mirror units 30 [1] to 30 [m]
Mirror tilt control signals for tilting the movable mirror 31 are individually output. The output of the mirror tilt control signal is performed one by one in an order corresponding to the arrangement order of the pixel mirror units 30 [1] to 30 [m].

Further, the timing control circuit 79 counts the elapsed time T from the output of the mirror tilt control signal. Further, the timing control circuit 79 determines the pixel mirror units 30 [1] to 30 [1] based on the counted elapsed time T.
The mirror horizontal control signal for returning the 30 [m] movable mirror 31 to the horizontal state is transmitted to the pixel mirror unit driving circuits 63 [1] to 63 [1].
Output for 63 [m]. The mirror horizontal control signal is output when the elapsed time T reaches the tilt times Tr, Tg, and Tb of the movable mirror 31 output from the conversion circuit 78.

Further, based on the vertical synchronizing signal and the horizontal synchronizing signal input via the synchronizing circuit 66, the timing control circuit 79 generates a red LD driving circuit 65 [1], a green LD driving circuit 65 [2], and a blue LD driving circuit 65 [2]. An LD lighting control signal for starting lighting of the red LD 51, the green LD 52, and the blue LD 53 is output to the LD driving circuit 65 [3]. Further, the timing control circuit 79 sends an LD extinguishing control signal for extinguishing the red LD 51, the green LD 52, and the blue LD 53 to the red LD driving circuit 65 [1] and the green LD based on the counted elapsed time T. The driving circuit 65 [2] outputs the signal to the blue LD driving circuit 65 [3].

Note that the control of the k row mirror unit drive circuits 61 [1] to 61 [k] by the timing control circuit 79 is the same as that of the above-described timing control circuit 69, and therefore the description is omitted. Next, a color image display operation of the display element 200 realized by the control of the element control unit 70 will be described.

This color image display operation is performed by displaying a red image (steps S80 to S90 in FIG. 19A) → displaying a green image (steps S92 to S102 in FIG. 20A) → displaying a blue image (FIG. Steps S104 to S11 of 21 (a)
4) is a field-sequential operation that is performed in order. Here, FIG.
Out of steps S80 to S90, the display of the red image in the above-described first embodiment (step S1 in FIG.
0 to S18), the lighting of the red LD 51 in the first step S80, the turning off of the red LD 51 in the last step S90, the steps S81, S85,
Display of the Q-th line of the red image in S89 (FIG. 19B)
Steps S120 to S123).

The steps S92 to S1 in FIG.
02, the display of the green image in the first embodiment described above (steps S20 to S28 in FIG. 13A) is different from the lighting of the green LD 52 in the first step S92 and the green LD 52 in the last step S102. Is turned off, and the green image Q-line display in steps S93, S97, and S101 (step S12 in FIG. 20B).
4 to S127).

Further, steps S104 to S104 in FIG.
The difference between S114 and the display of the blue image in the above-described first embodiment (steps S30 to S38 in FIG. 14A) is that the blue LD5 in the first step S104 is different.
3 and the blue LD in the last step S114
Turning off of 53 and steps S105, S109, S113
(Steps S128 to S131 in FIG. 21B).

Hereinafter, the processing of each step of FIGS. 19 to 21 will be described. However, steps S82 to S84,
S86 to S88, S91, S94 to S96, S98 to S
100, S103, S106 to S108, S110 to S
Regarding 112, steps S11 to S1 already described
3, S15 to S17, S19, S21 to S23, S25
To S27, S29, S31 to S33, and S35 to S37, and a description thereof will be omitted.

Prior to the color image display operation, the display elements are initialized (the state of FIGS. 1 and 15A), and the internal counters N and Q are set to the initial value (1). Step S80
Then, the red LD 51 is turned on. At this time, since the movable mirrors 31 of the pixel mirror units 30 [1] to 30 [m] are all positioned in a horizontal state, the laser light from the red LD 51 enters the light absorption plate 2 and is absorbed. (Figure 2
2 (a) state).

In the next step S81, the red image Qth
Line display (Steps S120 to S12 in FIG. 19B)
3) is performed. In the current control (Q = 1), the first line of the red image is displayed.

Here, the Q-line display of the red image (steps S120 to S123 in FIG. 19B) which is common to steps S85 and S89 will be described. Step S1
At 20, the movable mirror 3 of the pixel mirror unit 30 [N]
Tilt 1 45 degrees. And this pixel mirror unit 3
When the mirror tilt time Tr [N] for the N-th pixel elapses, the movable mirror 31 of 0 [N] is returned to the horizontal state.

In the first control, the pixel mirror unit 30
The movable mirror 31 of [1] is tilted by the mirror tilt time Tr [1] for the first pixel (the state of FIG. 22B). At this time, the laser beam from the red LD 51 is continuously reflected outward by the movable mirror 31 of the pixel mirror unit 30 [1] for the mirror tilt time Tr [1].
In step S121, the elapsed time T from the start of the control (inclination of the movable mirror 31) of step S120 and 1
The maximum inclination time Tx per pixel is compared. When the elapsed time T reaches the maximum inclination time Tx, the next step S12
Proceed to 2.

In the step S122, the value of the internal counter N is updated by one. In the next step S123, the value of the internal counter N is compared with the maximum value Nq (= i × Q). If the value of the internal counter N is equal to or less than the maximum value Nq, step S1
Returning to step 20, the above processing is repeated. This is performed until the value of the internal counter N exceeds the maximum value Nq. In the control (Q = 1) of this time (step S81), the maximum value N
q = i.

As described above, step S12 in FIG.
By repeatedly executing the processing of steps S0 to S123, the display element 200 sequentially displays (a) to (b) of FIG. 22 (a) to (c) of FIG.
(a) →... → (a) → (d) → (a). as a result,
The reflected light of the red LD 51 is sequentially guided outward from each of the pixel mirror units 30 [1] to 30 [i], and the first line display of the red image ends.

Next, steps S82 to S in FIG.
87 is executed. As a result, the second to k-th lines of the red image are sequentially displayed. Further, by executing the processing in steps S88 and S89, the (k + 1) th line of the red image is displayed. In step S90, the red LD 51 is turned off (the state of FIG. 15A).

As described above, step S80 in FIG.
By executing the processing of S90 to S90, the reflected light of the red LD 51 is sequentially guided outward from each of the pixel mirror units 30 [1] to 30 [m], and the display of the red image ends. Next, after performing the processing of step S91 in FIG. 20A, a green image is displayed (steps S92 to S92 in FIG. 20A).
102) is performed.

In step S92, the green LD 52 is turned on (the state shown in FIG. 22A). In the next step S93,
Display of the Qth line of the green image (step S1 in FIG. 20B)
24 to S127) are performed. In the current control (Q = 1), the first line of the green image is displayed. Here, the Q-th line display of the green image common to steps S97 and S101 (steps S124 to S127 in FIG. 20B) will be described.

In step S124, the movable mirror 31 of the pixel mirror unit 30 [N] is tilted by 45 degrees. And
The movable mirror 31 of the pixel mirror unit 30 [N] is
When the mirror tilt time Tg [N] for the N-th pixel elapses, the state returns to the horizontal state. As a result, the laser light from the green LD 52 is continuously reflected outward by the movable mirror 31 of the pixel mirror unit 30 [N] for the mirror tilt time Tg [N].

At step S125, step S124
(The tilt of the movable mirror 31) is compared with the maximum tilt time Tx. When the elapsed time T reaches the maximum inclination time Tx, the process proceeds to the next step S126. In step S126, the value of the internal counter N is set to 1
Update. In the next step S127, the value of the internal counter N is compared with the maximum value Nq (Nq = i when Q = 1). If the value of the internal counter N is equal to or less than the maximum value Nq, the process returns to step S124 to repeat the above processing.

As described above, step S12 in FIG.
By repeatedly executing the processing of steps S4 to S127, when the value of the internal counter Q is 1, FIG.
(b) → (a) → (c) → (a) →... → (a) → (d) → (a). As a result, the pixel mirror units 30 [1] to 30 [1] to 30
[i] The reflected light of the green LD 52 is sequentially guided outward from each of them, and the first line display of the green image ends.

Next, steps S94 to S of FIG.
The processing of 99 is executed. As a result, the second to k-th lines of the green image are sequentially displayed. Further, by executing the processing in steps S100 and S101, the (k + 1) th line of the green image is displayed. Step S1
In 02, the green LD 52 is turned off (the state of FIG. 15A).

As described above, step S92 in FIG.
To S102, the green LD 52 is sequentially output from each of the pixel mirror units 30 [1] to 30 [m].
Is reflected to the outside, and the display of the green image ends.
Next, after performing the processing of step S103 in FIG. 21A, a blue image is displayed (step S104 in FIG. 21A).
To S114) are performed.

In step S104, the blue LD 53 is turned on (the state shown in FIG. 22A). In the next step S105, the Q-th line display of the blue image (steps S128 to S131 in FIG. 21B) is performed. This control (Q =
In 1), the first line of the blue image is displayed. Here, the Q-th line display of the blue image which is common to steps S109 and S113 (steps S128 to S in FIG.
131) will be described.

In step S128, the movable mirror 31 of the pixel mirror unit 30 [N] is tilted by 45 degrees. And
The movable mirror 31 of the pixel mirror unit 30 [N] is
When the mirror tilt time Tb [N] for the N-th pixel elapses, the state returns to the horizontal state. As a result, the laser light from the blue LD 53 is continuously reflected outward by the movable mirror 31 of the pixel mirror unit 30 [N] for the mirror tilt time Tb [N].

In step S129, step S128
(The tilt of the movable mirror 31) is compared with the maximum tilt time Tx. When the elapsed time T reaches the maximum inclination time Tx, the process proceeds to the next step S130. In step S130, the value of the internal counter N is set to 1
Update. In the next step S131, the value of the internal counter N is compared with the maximum value Nq (Nq = i when Q = 1). If the value of the internal counter N is equal to or less than the maximum value Nq, the process returns to step S128 to repeat the above processing.

As described above, step S12 in FIG.
By repeatedly executing the processes of S8 to S131, when the value of the internal counter Q is 1, FIG.
(b) → (a) → (c) → (a) →... → (a) → (d) → (a). As a result, the pixel mirror units 30 [1] to 30 [1] to 30
[i] The reflected light of the blue LD 53 is sequentially guided outward from each of them, and the first line display of the blue image ends.

Next, steps S106 to S106 in FIG.
The processing of S111 is executed. As a result, the second to k-th lines of the blue image are sequentially displayed. Further, by executing the processing of steps S112 and S113, the (k + 1) th line of the blue image is displayed. In step S114, the blue LD 53 is turned off (FIG. 15A).
State).

As described above, step S10 in FIG.
By executing the processing of 4 to S114, the blue LD5 is sequentially output from each of the pixel mirror units 30 [1] to 30 [m].
The reflected light of No. 3 is guided outward, and the display of the blue image ends and the one-screen display of the color image ends.

As described above, according to the display element 200 of the second embodiment, the laser beam is continuously emitted from the red LD 51 during the red image display period (steps S80 to S90 in FIG. 19A). The display period of the green image (FIG. 20)
In steps S92 to S102 of FIG.
2 is continuously emitted from the blue LD 53 during the blue image display period (steps S104 to S114 in FIG. 21A), so that the display of the above-described first embodiment is performed. A color image with stable light intensity can be displayed as compared with the element 100.

In the above-described embodiment, since the mirror electrode 17b of the movable mirror 11 does not come into contact with the drive electrode 22, a short circuit between the mirror electrode 17b and the drive electrode 22 is prevented, and the element control units 60, 70 Can be prevented from being damaged.
Further, in the above-described embodiment, the movable mirrors 11 and 31
Is set to 45 degrees, but may be other than 45 degrees. However, when the inclination angle of the movable mirror 31 is not 45 degrees, the direction of the laser beam reflected by the movable mirror 31 is inclined with respect to the Z axis.

In the above embodiment, the landing electrode 2
1 and 23 are connected to each other, the landing electrodes 41 and 43 and the driving electrode 44 are connected to each other, or the landing electrodes 41 and 43 are connected to each other.
Although the example in which the drive electrode 43 and the drive electrode 42 are connected to each other has been described, the respective electrodes may be separated and the voltages applied to these electrodes may be controlled independently of each other. Furthermore, in the above-described embodiment, an example in which the element control units 60 and 70 are provided on the silicon substrate 1 has been described. In this case, in driving the display elements 100 and 200, an external circuit equivalent to the element control units 60 and 70 is required.

In the embodiment described above, the example in which the light source 50 is provided on the silicon substrate 1 has been described. In this case, the display elements 100 and 2
In order to display an image by 00, a light source for emitting laser light to an optical path 10a formed by k row mirror units 10 [1] to 10 [k] is required outside.

Further, in the above embodiment, the light source 50
A red LD 51, a green LD 52, and a blue LD 53 are arranged in the first embodiment, but if a monochrome image is displayed by the display elements 100 and 200, only one laser diode may be used.

[0164]

As described above, claims 1 to 13 are provided.
According to the invention described in (1), the optical path of the light incident on each of the plurality of second micromirrors is formed at a position far away from the optical path of the reflected light from each of the second micromirrors. Can contribute to miniaturization, weight reduction, and cost reduction of an optical device incorporating the device, which is convenient.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of a display element 100.

FIG. 2 is a diagram illustrating an optical path 10a.

FIG. 3 is a diagram illustrating an optical path 10a.

FIG. 4 is a top view of the row mirror unit 10 [1].

FIG. 5 is a side view of the row mirror unit 10 [1].

FIG. 6 is a block diagram showing an electrical configuration of the row mirror unit 10 [1].

FIG. 7 is a top view of the row mirror unit 10 [2].

FIG. 8 is a cross-sectional view of the pixel mirror unit 30 [1] taken along the line AA in FIG.

9 is a cross-sectional view of the pixel mirror unit 30 [1] taken along line BB in FIG.

FIG. 10 is a block diagram illustrating an electrical configuration of a pixel mirror unit 30 [1].

FIG. 11 is a block diagram showing an electrical configuration of an element control unit 60 of the display element 100.

FIG. 12 is a flowchart illustrating a color image display operation of the display element 100.

FIG. 13 is a flowchart illustrating a color image display operation of the display element 100.

FIG. 14 is a flowchart illustrating a color image display operation of the display element 100.

15 is a side view showing various states of the display element 100. FIG.

FIG. 16 is a flowchart illustrating another color image display operation of the display element 100.

FIG. 17 is a flowchart illustrating another color image display operation of the display element 100.

FIG. 18 is a block diagram illustrating an electrical configuration of an element control unit 70 of the display element 200.

FIG. 19 is a flowchart illustrating a color image display operation of the display element 200.

20 is a flowchart illustrating a color image display operation of the display element 200. FIG.

FIG. 21 is a flowchart illustrating a color image display operation of the display element 200.

FIG. 22 is a side view showing various states of the display element 200.

FIG. 23 shows a movable mirror 81 arranged in a conventional DMD element.
It is a side view which shows the structure of.

[Explanation of symbols]

 1,83 Silicon substrate 1a Forming surface 2 Light absorbing plate 3 Fixed mirror 10 [1] to 10 [k] Row mirror unit 10a, 50a Optical path 11,31,81 Movable mirror 12,32,33 Hinge 13 Center pole 14 Drive pole 15 Stop pole 16, 36 Space 17a, 17b, 37 Mirror electrode 21, 23, 41, 43, 84, 87 Landing electrode 22, 42, 44, 85, 86 Drive electrode 25, 45 Signal line 30 [1] to 30 [30] m] Pixel mirror unit 34, 35, 82 Pole 50 Light source 51 Red LD 52 Green LD 53 Blue LD 54, 55, 56 Collimator lens 57, 58 Half mirror 60, 70 Element controller 61 [1] to 61 [k] row Mirror unit drive circuit 63 [1] to 63 [m] Pixel mirror unit drive circuit 65 [1] Red LD drive circuit 65 [2] Green LD Dynamic circuit 65 [3] blue LD driving circuit 66 synchronizing circuit 67 inverting circuit 68, 78 conversion circuit 69, 79 a timing control circuit 100 and 200 display elements

Claims (13)

[Claims] A semiconductor substrate having a formation surface on which an electric circuit can be formed; and a reflection surface provided on the semiconductor substrate and capable of reflecting light,
A plurality of first micromirrors movably supported between a plurality of different positions while maintaining a state perpendicular to the formation surface; and a reflection surface of the plurality of first micromirrors provided on the semiconductor substrate, An optical path forming means for individually moving to any one of the plurality of different positions to form an optical path according to the position of each of the reflecting surfaces of the plurality of first micromirrors; provided on the semiconductor substrate and along the optical path; A plurality of second micromirrors, which are arranged so that a reflecting surface capable of reflecting light is movably supported between a reflection position that changes the optical path outward and a pass position that does not change the optical path; A display device, comprising: a second micromirror driving means provided on a semiconductor substrate for individually moving the plurality of second micromirrors to the reflection position or the passage position. 2. The display device according to claim 1, wherein the plurality of first micromirrors are arranged in a line, and the reflection surface is movably supported between two different positions. One of the two different positions is a position where the reflection surface is inclined by a predetermined angle with respect to the arrangement direction of the plurality of first micromirrors. 3. The display device according to claim 2, wherein the optical path forming unit has a plurality of first minute mirror driving units corresponding to the plurality of first minute mirrors, respectively, and the plurality of first minute mirrors. Each of the mirror driving units is connected to a corresponding first micromirror and rotatably supports the first micromirror. The mirror driving unit is maintained at the same potential as the first micromirror, and defines the inclined position. A first landing electrode, a second landing electrode that is maintained at the same potential as the first micromirror and determines the other of the two different positions, and a predetermined voltage is applied to move the first micromirror to the axis. A display element comprising: a driving electrode that is rotated around a portion and is brought into contact with the first landing electrode or the second landing electrode. 4. The display device according to claim 1, further comprising: a light source that emits laser light and is provided on the semiconductor substrate at a start end side of the optical path. 5. The display device according to claim 4, wherein the light source includes a plurality of laser diodes that emit laser beams having mutually different wavelengths, and an optical path of each laser beam emitted from the plurality of laser diodes. A light combining means for combining light into two light paths. 6. The display device according to claim 1, wherein the reflection position is a position where the reflection surface is inclined by approximately 45 degrees with respect to a normal to the formation surface and the optical path. element. 7. The display element according to claim 1, wherein a light-absorbing member for absorbing light is provided on the semiconductor substrate at the end of the optical path. 8. The method for driving a display element according to claim 1, wherein the plurality of second micromirrors are moved from a start end of the optical path to an end end according to image data. A driving method characterized by moving to the reflection position or the passage position in the order toward 9. The driving method according to claim 8, wherein a reflection time for stopping the second micro mirror at the reflection position is controlled according to luminance information included in the image data. . 10. The method for driving a display element according to claim 4, wherein an emission time of the laser light emitted from the light source is controlled according to luminance information included in image data. Drive method. 11. A semiconductor substrate having a formation surface on which an electric circuit can be formed, a support member provided on the formation surface and extending in a direction substantially perpendicular to the formation surface, and a reflecting surface capable of reflecting light. A reflecting member having conductivity; and a connecting member provided on the supporting member and having elasticity, the connecting member supporting the reflecting member movably while keeping the reflecting surface substantially perpendicular to the forming surface. An optical path changing unit, comprising: a driving member provided on the formation surface in the vicinity of the support member and provided with an electrode having a driving surface substantially perpendicular to the formation surface. 12. The optical path changing unit according to claim 11, wherein the driving member is provided at a position where at least a part of the driving member is included in a space in which the reflecting member moves, and the driving member includes one of the driving members. An optical path changing unit for regulating movement in a direction. 13. The optical path changing unit according to claim 11, wherein at least a part of a space provided on the formation surface near the support member and in which the reflection member moves is included, and An optical path changing unit, further comprising a regulating member that regulates movement in a direction.