JPH11274245A - Material for mounting semiconductor, method for using the same and semiconductor device using the same - Google Patents
Material for mounting semiconductor, method for using the same and semiconductor device using the sameInfo
- Publication number
- JPH11274245A JPH11274245A JP7160598A JP7160598A JPH11274245A JP H11274245 A JPH11274245 A JP H11274245A JP 7160598 A JP7160598 A JP 7160598A JP 7160598 A JP7160598 A JP 7160598A JP H11274245 A JPH11274245 A JP H11274245A
- Authority
- JP
- Japan
- Prior art keywords
- mounting
- semiconductor
- reinforcing plate
- package
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は半導体装置等の電子
デバイス用補強板、特に半導体チップやその他の電子部
品を搭載する基材として樹脂フィルム等を使用した半導
体パッケージに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reinforcing plate for an electronic device such as a semiconductor device, and more particularly to a semiconductor package using a resin film or the like as a substrate on which a semiconductor chip or other electronic components are mounted.
【0002】[0002]
【従来の技術】半導体装置等の電子デバイスにおいて
は、それらの電子デバイス自体、もしくはそれらを組み
付ける各種電子機器の小型化、薄型化を計るために、フ
レキシブル基板やTAB実装式薄型パッケージが用いら
れている。そして、これらの基材としてテープ状その他
適宜形状のポリイミド等よりなる樹脂フィルムに導体層
を設けた基板材料が使用されている。ところで、これら
の基板材料を構成する樹脂フィルムは一般的に軟質のも
のが用いられているため、基板材料を用いて得た基板に
半導体チップやその他の電子部品を搭載した場合にはそ
れらを支持するのに十分な強度が得られない。2. Description of the Related Art In an electronic device such as a semiconductor device, a flexible substrate or a TAB mounting type thin package is used in order to reduce the size and thickness of the electronic device itself or various kinds of electronic devices in which the electronic device is assembled. I have. As the base material, a substrate material in which a conductor layer is provided on a resin film made of a tape or other appropriately shaped polyimide or the like is used. By the way, since the resin film that constitutes these substrate materials is generally soft, when a semiconductor chip or other electronic components are mounted on a substrate obtained using the substrate material, they are supported. Not strong enough to do so.
【0003】また、近年の半導体パッケージの多ピン
化、高密度化に伴い、半導体パッケージの回路基板への
実装方法が従来のQFPを代表とする周辺リード型より
ボールグリッドアレイ(BGA)に代表される格子端子
配置型実装へと移行しつつある。このBGA用の基材と
しても上記樹脂フィルム基板材料が広く使用されるよう
になってきている。BGAでは、格子状に配列したハン
ダボールによりマザーボードとのコンタクトを取るため
に、パッケージ自体の平坦性が従来のQFP等に比べ良
い必要がある。Further, with the recent increase in the number of pins and the density of the semiconductor package, a method of mounting the semiconductor package on a circuit board is represented by a ball grid array (BGA) rather than a conventional peripheral lead type represented by a QFP. Are shifting to grid terminal arrangement type mounting. The resin film substrate material has been widely used as a base material for the BGA. In the BGA, the flatness of the package itself needs to be better than that of a conventional QFP or the like in order to make contact with the motherboard using solder balls arranged in a grid.
【0004】例えば、BGAに代表されるエリアアレイ
タイプの半導体パッケージの場合、上記で述べた様に、
実装時に実装基板となるプリント基板とのハンダボール
によるコンタクトが必要となる。その際、パッケージの
平坦性のレベルにより実装時の歩留まりが左右される。
すなわち、平坦性が悪い場合、一部のハンダボールがプ
リント基板に形成された電極パッドより浮き上がる現象
が見られ、オープン不良となる。For example, in the case of an area array type semiconductor package represented by BGA, as described above,
At the time of mounting, it is necessary to make contact with a printed board serving as a mounting board by solder balls. At this time, the yield at the time of mounting depends on the level of flatness of the package.
That is, when the flatness is poor, a phenomenon in which some solder balls are lifted from the electrode pads formed on the printed circuit board is observed, resulting in an open defect.
【0005】このような強度や平坦性を確保するため
に、樹脂フィルムの上に支持用の金属補強板を接着して
用いている。この支持用金属補強板はパッケージに用い
られる他の部材との熱膨張係数と近い材料が検討され用
いられている。[0005] In order to ensure such strength and flatness, a metal reinforcing plate for support is bonded and used on a resin film. For the metal reinforcing plate for support, a material having a coefficient of thermal expansion close to that of another member used for the package has been studied and used.
【0006】[0006]
【発明が解決しようとする課題】しかし、基板材料とし
てポリイミドなどの樹脂フィルムを用いているため、支
持用金属補強板の熱膨張係数を樹脂フィルムに一致させ
たとしても、あるいは実装されるマザーボードであるガ
ラスエポキシ板を用いたプリント基板に一致させたとし
ても、実装後の耐久試験において熱膨張係数差を原因と
するクラックがハンダボールに入るといった問題があっ
た。However, since a resin film such as polyimide is used as a substrate material, even if the coefficient of thermal expansion of the supporting metal reinforcing plate is made to match the resin film, or even if the motherboard is mounted on the metal reinforcing plate. Even when a printed circuit board using a glass epoxy plate is used, cracks due to a difference in thermal expansion coefficient enter a solder ball in a durability test after mounting.
【0007】この問題を解消するために、支持用金属補
強板の接着剤層に弾力性を持たせ、熱膨張差による応力
を逃がす構造なども検討されているが、まだ十分とは言
えない状況である。[0007] In order to solve this problem, a structure has been studied in which the adhesive layer of the supporting metal reinforcing plate has elasticity to relieve the stress due to the difference in thermal expansion, but it is still not enough. It is.
【0008】本発明はこのような課題に対してなされた
ものであり、実装後の熱膨張係数差を原因とするクラッ
クを半田ボールに発生させない半導体実装材料とその使
用方法、およびこれを用いて得た半導体パッケージの提
供を課題としている。SUMMARY OF THE INVENTION The present invention has been made to address such a problem, and a semiconductor mounting material which does not cause cracks in solder balls due to a difference in thermal expansion coefficient after mounting, a method of using the same, and a method of using the same. The task is to provide the obtained semiconductor package.
【0009】[0009]
【課題を解決するための手段】上記課題を解決するため
の本発明は、樹脂フィルム等を基材として使用し、組立
に必要な部分に接着剤層が形成された補強板を用い、マ
ザーボード等との接続用の二次元に配置された電極を有
する半導体実装材料において、該補強板が実装後に取り
外し可能であり、補強板としてガラスなどの紫外線を透
過する素材を用い、接着剤として紫外線硬化型の接着剤
を用いたものである。そして、半導体装置をプリント基
板などの実装用基板にハンダボールなどで実装するに際
して、実装後に紫外線を該パッケージに照射し、接着剤
を硬化させて接着力を無くし、補強板を取り外すことを
特徴とする半導体実装用材料の使用方法である。さら
に、この半導体実装材料に半導体素子を搭載した半導体
装置である。SUMMARY OF THE INVENTION The present invention for solving the above-mentioned problems uses a resin plate or the like as a base material, and uses a reinforcing plate having an adhesive layer formed at a portion required for assembly, and a motherboard or the like. In a semiconductor mounting material having two-dimensionally arranged electrodes for connection with the semiconductor device, the reinforcing plate is removable after mounting, using a material that transmits ultraviolet light such as glass as the reinforcing plate, and an ultraviolet curing type as an adhesive. Is used. Then, when mounting the semiconductor device on a mounting board such as a printed board with a solder ball or the like, after the mounting, the package is irradiated with ultraviolet rays, the adhesive is cured to eliminate the adhesive force, and the reinforcing plate is removed. This is how to use the semiconductor mounting material. Further, the present invention is a semiconductor device in which a semiconductor element is mounted on this semiconductor mounting material.
【0010】[0010]
【発明の実施の形態】フレキシビリティのある樹脂基板
をパッケージの基板として用いる場合、何らかの補強板
をパッケージに貼り付け、パッケージの平坦性を確保す
る必要がある。しかし、補強板を強固にパッケージに貼
り付けることにより、熱膨張係数差に起因する応力を逃
がすことができなくなり、実装後にハンダボール部に応
力集中による破壊(亀裂等の不良)が発生する。補強板
が無ければパッケージに用いた基板のフレキシビリティ
により、実装後の熱膨張差に起因する応力を逃がすこと
ができる。DESCRIPTION OF THE PREFERRED EMBODIMENTS In the case where a flexible resin substrate is used as a package substrate, it is necessary to attach a certain reinforcing plate to the package to secure the flatness of the package. However, by firmly attaching the reinforcing plate to the package, the stress caused by the difference in thermal expansion coefficient cannot be released, and the solder ball portion is broken (defect such as crack) due to stress concentration after mounting. Without the reinforcing plate, the stress caused by the difference in thermal expansion after mounting can be released due to the flexibility of the substrate used for the package.
【0011】よって、実装後の信頼性の高いパッケージ
を歩留まり良く得るためには、実装時に平坦性を確保す
る補強板があり、かつ実装後に補強板を取り外すことが
できればよい。本発明はこの観点より成されたものであ
る。Therefore, in order to obtain a highly reliable package after mounting with a good yield, it is only necessary that there is a reinforcing plate for securing flatness during mounting and that the reinforcing plate can be removed after mounting. The present invention has been made from this viewpoint.
【0012】本発明では取り外す方法として、接着剤と
して紫外線硬化タイプを用い、実装後に紫外線照射する
ことで接着剤層を硬化させ、接着力を無くすことで補強
板を取り外すことができるようにしたものである。よっ
て、補強板としては紫外線を透過させ、且つ一定以上の
剛性のあるものであることが必要であり、例えばガラス
などが用いうる。In the present invention, as a method for removing the adhesive, an ultraviolet curing type is used as the adhesive, the adhesive layer is cured by irradiating ultraviolet rays after mounting, and the reinforcing plate can be removed by eliminating the adhesive force. It is. Therefore, the reinforcing plate needs to transmit ultraviolet rays and have a certain rigidity or more. For example, glass can be used.
【0013】なお、本発明の更なるメリットとして、取
り外したガラス補強板を再度パッケージに用いることも
可能であり、経済性の向上が期待できる。As a further advantage of the present invention, the removed glass reinforcing plate can be used again for the package, and an improvement in economy can be expected.
【0014】[0014]
【実施例】次に実施例を用いて本発明をさらに説明す
る。Next, the present invention will be further described with reference to examples.
【0015】(実施例1)まず、厚さ38μmのPET
フィルムの片面に厚さ20μmに常温接着性のある紫外
線硬化性接着剤の付いたものを準備した。この接着剤
を、厚さ1mmのガラス板に、紫外線硬化性接着剤面が
表面になるように貼り付けてスティフナー(支持補強
板)を作製した。(Example 1) First, a PET having a thickness of 38 μm was used.
A film having a 20 μm-thick UV-curable adhesive having room-temperature adhesiveness on one side was prepared. This adhesive was adhered to a glass plate having a thickness of 1 mm so that the surface of the ultraviolet-curable adhesive became the surface, thereby producing a stiffener (supporting reinforcing plate).
【0016】次に、裏面に0.5mm径のランドが1m
mピッチ間隔で設けられたTABテープにスティフナー
を貼り付けた。次に、裏面のランド部にフラックスを介
して半田ボールを搭載した。Next, a land having a diameter of 0.5 mm and
A stiffener was attached to a TAB tape provided at intervals of m pitches. Next, solder balls were mounted on the lands on the back surface via a flux.
【0017】次に、半田ボールの表面にフラックスを塗
布し、プリント配線板の電極部に搭載した。これを、炉
内に入れてリフローして半田接合した。Next, a flux was applied to the surface of the solder ball and mounted on the electrode portion of the printed wiring board. This was placed in a furnace and reflowed for soldering.
【0018】次に、ガラス面より紫外線を照射して紫外
線硬化性接着剤を硬化させ、その後ガラス板を剥離し
た。Next, ultraviolet rays were irradiated from the glass surface to cure the ultraviolet curable adhesive, and then the glass plate was peeled off.
【0019】この方法で1000個の試料を作製し、温
度−65〜150℃の繰り返し試験を行った。1000
回の繰り返しを行ったが異常は一つも発生しなかった。With this method, 1000 samples were prepared and subjected to a repeated test at a temperature of -65 to 150 ° C. 1000
No repetitions were made, but no abnormality occurred.
【0020】(比較例)ガラス板の代わりに厚さ1mm
のステンレス板を用い、半田接合した後ステンレス板を
除去しなかった以外は実施例と同様にして試料を作製し
た。そして、実施例と同様にして繰り返し試験を行っ
た。その結果10個の試料の半田ボール部分に亀裂が入
っていた。Comparative Example 1 mm thick instead of a glass plate
A sample was prepared in the same manner as in the example except that the stainless steel plate was not removed after the solder bonding using the stainless steel plate. Then, a repeated test was performed in the same manner as in the example. As a result, cracks were found in the solder ball portions of the ten samples.
【0021】[0021]
【発明の効果】本発明によれば、取り外し可能なガラス
板等を補強板として使用し、平坦性良く実装することが
でき、実装後ガラス板等を取り外すためするため信頼性
の高い半導体パッケージを収率良く提供することができ
る。According to the present invention, a semiconductor package which can be mounted with good flatness by using a removable glass plate or the like as a reinforcing plate, and has a high reliability because the glass plate or the like is removed after mounting. It can be provided in good yield.
Claims (3)
組立に必要な部分に接着剤層が形成された補強板を用
い、マザーボード等との接続用の二次元に配置された電
極を有する半導体実装用材料において、該補強板が実装
後に取り外し可能であり、補強板としてガラスなどの紫
外線を透過する素材を用い、接着剤として紫外線硬化型
の接着剤を用いたことを特徴とする半導体実装用材料。1. A method using a resin film or the like as a base material,
Using a reinforcing plate having an adhesive layer formed at a part required for assembly, in a semiconductor mounting material having two-dimensionally arranged electrodes for connection to a motherboard or the like, the reinforcing plate is removable after mounting. A material for mounting semiconductors, wherein a material that transmits ultraviolet light such as glass is used as a reinforcing plate, and an ultraviolet-curable adhesive is used as an adhesive.
用基板にハンダボールなどで実装して半導体パッケージ
を得るに際して、請求項1記載の半導体実装用材料を用
いて半導体パッケージを作成し、次いで紫外線を該パッ
ケージに照射し、接着剤を硬化させて接着力を無くし、
補強板を取り外すことを特徴とする半導体実装用材料の
使用方法。2. When a semiconductor package is obtained by mounting a semiconductor device on a mounting board such as a printed board with solder balls or the like, a semiconductor package is prepared using the semiconductor mounting material according to claim 1, and then ultraviolet light is applied. Irradiate the package, cure the adhesive and lose the adhesive strength,
A method for using a semiconductor mounting material, wherein a reinforcing plate is removed.
したことを特徴とする半導体装置。3. A semiconductor device using the semiconductor packaging material according to claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7160598A JPH11274245A (en) | 1998-03-20 | 1998-03-20 | Material for mounting semiconductor, method for using the same and semiconductor device using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7160598A JPH11274245A (en) | 1998-03-20 | 1998-03-20 | Material for mounting semiconductor, method for using the same and semiconductor device using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11274245A true JPH11274245A (en) | 1999-10-08 |
Family
ID=13465464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7160598A Pending JPH11274245A (en) | 1998-03-20 | 1998-03-20 | Material for mounting semiconductor, method for using the same and semiconductor device using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH11274245A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7112467B2 (en) | 2000-02-10 | 2006-09-26 | Epic Technologies, Inc. | Structure and method for temporarily holding integrated circuit chips in accurate alignment |
-
1998
- 1998-03-20 JP JP7160598A patent/JPH11274245A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7112467B2 (en) | 2000-02-10 | 2006-09-26 | Epic Technologies, Inc. | Structure and method for temporarily holding integrated circuit chips in accurate alignment |
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