JPH11264928A5 - - Google Patents

Info

Publication number
JPH11264928A5
JPH11264928A5 JP1998067410A JP6741098A JPH11264928A5 JP H11264928 A5 JPH11264928 A5 JP H11264928A5 JP 1998067410 A JP1998067410 A JP 1998067410A JP 6741098 A JP6741098 A JP 6741098A JP H11264928 A5 JPH11264928 A5 JP H11264928A5
Authority
JP
Japan
Prior art keywords
signal
light source
measurement light
turned
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998067410A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11264928A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP6741098A priority Critical patent/JPH11264928A/ja
Priority claimed from JP6741098A external-priority patent/JPH11264928A/ja
Publication of JPH11264928A publication Critical patent/JPH11264928A/ja
Publication of JPH11264928A5 publication Critical patent/JPH11264928A5/ja
Pending legal-status Critical Current

Links

JP6741098A 1998-03-17 1998-03-17 合焦装置 Pending JPH11264928A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6741098A JPH11264928A (ja) 1998-03-17 1998-03-17 合焦装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6741098A JPH11264928A (ja) 1998-03-17 1998-03-17 合焦装置

Publications (2)

Publication Number Publication Date
JPH11264928A JPH11264928A (ja) 1999-09-28
JPH11264928A5 true JPH11264928A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2005-09-08

Family

ID=13344131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6741098A Pending JPH11264928A (ja) 1998-03-17 1998-03-17 合焦装置

Country Status (1)

Country Link
JP (1) JPH11264928A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2003073127A1 (ja) 2002-02-21 2005-06-23 英弘精機株式会社 気象観測ライダーシステム
JP5498044B2 (ja) * 2009-03-26 2014-05-21 株式会社東芝 自動焦点調節機構及び光学画像取得装置
CN102096068A (zh) * 2010-11-29 2011-06-15 北方民族大学 基于光子晶体的转动拉曼测温激光雷达的分光系统

Similar Documents

Publication Publication Date Title
KR960039255A (ko) 이물검사장치
WO1998051993A1 (fr) Dispositif servant a mesurer une hauteur
JPH08211282A (ja) オートフォーカス式顕微鏡
WO2003069263A3 (en) System for detecting anomalies and/or features of a surface
JP2512878B2 (ja) 異物検査装置
EP1437719A3 (en) Optical pickup device, recording and reproducing apparatus and method for detecting near-field gap
JP2005166785A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH11264928A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH09319817A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0373831A (ja) 欠陥検査装置
JPS622588Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2000284908A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH11316195A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH10197212A (ja) 光式変位センサ、光式厚さセンサ、変位検出方法及び厚さ検出方法
DE58905684D1 (de) Optikanordnung zur dreidimensionalen Formerfassung.
JPH10302587A (ja) 光学式センサ
JPWO2020188386A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH03276005A (ja) 形状測定装置
JPH0648574Y2 (ja) 光ピックアップ検査装置
JP2005157146A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0384404A (ja) 非接触式路面凹凸検出装置
JP4611174B2 (ja) 撮像素子位置測定装置及び撮像素子位置測定方法
JP2007156304A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0216011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH11264928A (ja) 合焦装置