JPH11200020A - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPH11200020A JPH11200020A JP1790898A JP1790898A JPH11200020A JP H11200020 A JPH11200020 A JP H11200020A JP 1790898 A JP1790898 A JP 1790898A JP 1790898 A JP1790898 A JP 1790898A JP H11200020 A JPH11200020 A JP H11200020A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- electron gun
- degassing
- vapor
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title claims description 4
- 238000007872 degassing Methods 0.000 claims abstract description 16
- 238000010894 electron beam technology Methods 0.000 claims abstract description 12
- 238000000151 deposition Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 230000007704 transition Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 11
- 238000007740 vapor deposition Methods 0.000 description 10
- 230000005291 magnetic effect Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790898A JPH11200020A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790898A JPH11200020A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11200020A true JPH11200020A (ja) | 1999-07-27 |
| JPH11200020A5 JPH11200020A5 (enrdf_load_stackoverflow) | 2005-08-18 |
Family
ID=11956860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790898A Pending JPH11200020A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11200020A (enrdf_load_stackoverflow) |
-
1998
- 1998-01-13 JP JP1790898A patent/JPH11200020A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20041217 Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041217 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041217 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20041217 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050204 |
|
| RD04 | Notification of resignation of power of attorney |
Effective date: 20050225 Free format text: JAPANESE INTERMEDIATE CODE: A7424 |
|
| A977 | Report on retrieval |
Effective date: 20070724 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070726 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20071115 |