JPH11178368A - Actuator, motor and aligner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an actuator capable of obtaining high power density. SOLUTION: A unidirectional movable part 58B having a magnetic distortion element 67 shifted in one direction by a magnetic field generated by a wound coil 69, and the other direction movable part 59B having a magnetic distortion element 76 shifted in the direction of a prescribed angle with respect to one direction by the magnetic field generated by a wound coil 78, are connected. When the end part of the unidirectional movable part 58B having the coil 69 and the magnetic distortion element 67 is fixed, the shift direction of the other direction movable part 59B having the coil 78 and the magnetic distortion element 76 shifts, in accordance with the shift of the unidirectional movable part 58B. When a moving object 55' is connected to the end part of the other direction movable part 59B, the moving object 55' can be shifted speedily and securely to a desired coordinate in a prescribed plane, according to the shift of the unidirectional movable part 58B and the other direction movable part 59B.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an actuator and a motor for moving a control object on a straight line or a plane, and an exposure apparatus using the motor.

[0002]

2. Description of the Related Art Conventionally, a device having a rotary motor and a conversion mechanism for converting a rotary motion into a linear motion has been used as a device for moving a control object on a straight line or a plane and positioning it at a target position. I have. On the other hand, a linear motor which is excellent in reliability and accuracy because there is no motion conversion mechanism and has few components is considered to be promising in the future. . As a planar motor in which a linear motor is developed on a two-axis plane, a so-called linear pulse motor having a structure in which two linear motors are coupled is mainly used. Here, a one-axis linear pulse motor will be described as an example. The linear pulse motor moves the mover stepwise relative to the stator by a pulse current supplied to an armature coil, and the magnetic circuit configuration is shown in FIG. In FIG. 16, the stator 21 is formed of a plate-shaped magnetic body. On the upper surface of the stator 21, uneven tooth portions 21 a are formed at regular intervals along the longitudinal direction (the left-right direction in the figure). The movable element 21 ′ is placed on the upper surface of the stator 21 via a predetermined gap while being supported by a support mechanism (not shown) so as to be movable in the longitudinal direction of the stator 21. The mover 21 ′ includes a U-shaped A-phase iron core 22 and a B-phase iron core 24.
+ A phase magnetic pole 22a and -A phase magnetic pole 2 of A phase iron core 22
2b and the B-phase core 24
The armature coil 26 is wound around the + B phase magnetic pole 24a and the −B phase magnetic pole 24b, respectively, and the permanent magnet 23 attached between the A phase core 22 and the B phase core 24.

The stator 2 is provided on the lower surface of the magnetic pole 22a.
Two pole teeth 32a having the same pitch as the pitch P of one tooth portion 21a are formed, and pole teeth 32b, 34a, and 34b are similarly formed on respective lower surfaces of the magnetic poles 22b, 24a, and 24b. In addition, these pole teeth 32b, 34a, 34b
Are arranged so as to be shifted by P / 4 from the pole teeth 32a in the order of the pole teeth 34a, 32b, and 34b.
A predetermined gap G is formed between each lower surface of 32b, 34a, 34b and the upper surface of the tooth portion 21a. By sequentially supplying a predetermined pulse current to the armature coils 25 and 26, the magnetic flux generated by the armature coils 25 and 26 and the magnetic flux generated by the permanent magnet 23
a, 22b, 24a, and 24b are sequentially adjusted and the magnetically stable position of the mover 21 'with respect to the stator 21 is sequentially moved, whereby the mover 21' moves on the stator 21 in the longitudinal direction.

Here, the operation of the mover 22 moving on the stator 21 by the two-phase excitation bipolar drive system which constantly supplies current to the armature coils 25 and 26 will be described with reference to FIG. FIGS. 17A to 17D show the same structure as the linear pulse motor shown in FIG.
The movable element 21 ′ is controlled by controlling the current flowing through the movable elements 5 and 26.
Shows a state of moving rightward in the figure.

FIG. 17A shows that the mover 21 ′ is fixed to the stator 2.
16, a predetermined current was applied from the terminal 25a of the armature coil 25 to the terminal 25b and a predetermined current was applied from the terminal 26b of the armature coil 26 to the terminal 26a in the state shown in FIG. The movement of the mover 21 'in the case is shown. By passing a current through the armature coil 25 as described above, the magnetic flux generated by the armature coil 25 and the magnetic flux generated by the permanent magnet 23 cancel each other out at the + A-phase magnetic pole 22a and overlap each other at the -A-phase magnetic pole 22b. Is done. On the other hand, by passing a current through the armature coil 26 as described above, the magnetic flux generated by the armature coil 26 and the magnetic flux generated by the permanent magnet 23 cancel each other out at the + B phase magnetic pole 24a, and at the −B phase magnetic pole 24b. Superimposed on each other. As a result, a main magnetic flux as shown by a solid line φ11 in FIG. 17A is generated, and the pole teeth 3 of the −A phase magnetic pole 22b are generated.
2b and the teeth 21a of the stator 21 and between the pole teeth 34b of the -B phase magnetic pole 24b and the teeth 21a of the stator 21, magnetic attraction is generated, and the pole teeth 34b of the -B phase magnetic pole 24b are generated. And the tooth portions 21a of the stator 21 are equally opposed, that is, the movable element 2 is moved by P / 4 from the state of FIG.
1 'moves to a magnetically stable position.

Next, a predetermined current flows from the terminal 25a of the armature coil 25 to the terminal 25b from the state of FIG. 17A, and a predetermined current flows from the terminal 26a of the armature coil 26 to the terminal 26b. , The magnetic flux generated by the armature coil 25 and the magnetic flux generated by the permanent magnet 23 cancel each other out at the + A-phase magnetic pole 22a, and −
The A-phase magnetic poles 22b overlap each other. On the other hand, the magnetic flux generated by the armature coil 26 and the magnetic flux generated by the permanent magnet 23 overlap each other at the + B phase magnetic pole 24a, and
The phase magnetic poles 24b cancel each other out. As a result, FIG.
7 (b), a main magnetic flux as shown by a solid line φ21 is generated,
-The pole teeth 32b of the A-phase magnetic pole 22b and the teeth 21 of the stator 21
a, and between the pole teeth 34a of the + B phase magnetic pole 24a and the teeth 21a of the stator 21, magnetic attraction is generated, and the pole teeth 32b of the -A phase magnetic pole 22b and the teeth 21a of the stator 21 17A move from the state of FIG. 17A to the right in FIG.
The magnetically stable position as shown in FIG.

Next, a predetermined current flows from the terminal 25b of the armature coil 25 to the terminal 25a from the state of FIG. 17B, and a predetermined current flows from the terminal 26a of the armature coil 26 to the terminal 26b. , The magnetic flux generated by the armature coil 25 and the magnetic flux generated by the permanent magnet 23 pass through the -A phase magnetic pole 22b and the + A phase magnetic pole 22a.
The magnetic flux generated by the armature coil 26 and the magnetic flux generated by the permanent magnet 23 overlap with each other at the + B phase magnetic pole 24a, and cancel each other at the -B phase magnetic pole 24b. As a result, a main magnetic flux as shown by a solid line φ31 in FIG. 17C is generated, and between the tooth 32a of the + A phase magnetic pole 22a and the tooth 21a of the stator 21, and the pole tooth of the −B phase magnetic pole 24a. A magnetic attraction force is generated between the teeth 34a of the stator 21 and the teeth 32a of the -A phase magnetic pole 22b and the stator 2a.
The position where the first tooth portion 21a is equally opposed, that is, FIG.
The mover 21 ′ is shifted by P / 4 rightward in the drawing from the state shown in FIG.
Moves to a magnetically stable position as shown in FIG.

Next, a predetermined current flows from the terminal 25b of the armature coil 25 to the terminal 25a from the state of FIG. 17C, and a predetermined current flows from the terminal 26b of the armature coil 26 to the terminal 26a. , The magnetic flux generated by the armature coil 25 and the magnetic flux generated by the permanent magnet 23 pass through the -A phase magnetic pole 22b and the + A phase magnetic pole 22a.
The magnetic flux generated by the armature coil 26 and the magnetic flux generated by the permanent magnet 23 cancel each other out at the + B-phase magnetic pole 24a and overlap each other at the -B-phase magnetic pole 24b. As a result, a main magnetic flux as shown by a solid line φ41 in FIG. 17D is generated, and between the tooth 32a of the + A phase magnetic pole 22a and the tooth 21a of the stator 21, and the pole tooth of the −B phase magnetic pole 24b. A magnetic attraction force is generated between the stator tooth 34a and the teeth 21a of the stator 21, and the pole teeth 32a of the + A phase magnetic pole 22a and the stator 2
The position where the first tooth portion 21a is equally opposed, that is, FIG.
From the state of (c), the mover 21 'is moved by P / 4 rightward in the drawing.
Moves to a magnetically stable position as shown in FIG. 17 (a) to 17 (d) as described above.
By repeating the pulse excitation in the order of the respective excitation modes shown in FIG. 1, the mover 21 'moves rightward in the drawing, and conversely, in FIG.
By repeating the pulse excitation in the order of the respective excitation modes shown in FIGS. 7 (d) to 17 (a), the mover 21 'moves leftward in the drawing. By developing such a linear pulse motor on a two-axis plane, it becomes a two-dimensionally movable planar motor.

[0009]

By the way, a higher force density can be obtained than Lorentz electromagnetic force drive or variable reluctance drive electromagnetic type applied as a conventional motor principle such as the linear pulse motor described above. The development of actuators and motors has been desired. Therefore, an object of the present invention is to provide an actuator and a motor capable of obtaining a higher force density, and an exposure apparatus using the motor.

[0010]

According to a first aspect of the present invention, there is provided an actuator according to the present invention, comprising: a one-way movable portion having a magnetostrictive element which is displaced in one direction by a magnetic field generated by a wound coil; And a movable part in another direction having a magnetostrictive element displaced in a predetermined angle direction with respect to the one direction by a magnetic field generated by the wound coil.

As described above, since the one-way movable portion and the other-direction movable portion are displaced in different directions, for example, as shown in FIG.
As shown in the figure, when fixing the end of the one-way movable portion 58B having the coil 69 and the magnetostrictive element 67, the coil 78
The displacement direction of the other direction movable portion 59B having the magnetostrictive element 76 shifts according to the displacement of the one direction movable portion 58B. Further, the other direction movable portion 59B is also displaced by the coil 78 and the magnetostrictive element 76. The moving object 55 'made of a magnetic material such as iron is magnetically connected to the end of the other direction movable portion 59B. In this case, the movement target 55 'has moved by the sum of the displacement of the one-way movable portion 58B and the displacement of the other-direction movable portion 59B. If the current of the coil 69 and the coil 78 is turned off from this state, the end of the other direction movable portion 59B returns to the original position. The moving object 55 'is magnetized and remains at that position. Therefore, according to the displacement of the one-way movable portion 58B and the other-direction movable portion 59B, the moving object 55 'can be quickly and reliably moved to desired coordinates in a predetermined plane. In addition, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with the conventional one, and the whole can be reduced in size and weight.

According to a second aspect of the present invention, there is provided the actuator according to the first aspect, wherein the magnetostrictive element is configured such that an element main body and a connecting member made of a non-magnetostrictive material are alternately arranged in a multilayer shape and connected in series. It is characterized by being let.

As described above, since the element main body is alternately connected to the connecting member made of a non-magnetostrictive material in a multilayered and serial manner, when the element main body is displaced by the magnetic field generated by the coil, each of the element main bodies is displaced. The sum of the displacements is the displacement of the entire magnetostrictive element. Therefore, the displacement of the entire magnetostrictive element can be increased.

According to a third aspect of the present invention, there is provided the actuator according to the first or second aspect, further comprising cooling means for cooling the magnetostrictive element and the coil.

Thus, since the magnetostrictive element and the coil that generate heat can be cooled, the influence of the temperature rise can be eliminated.

According to a fourth aspect of the present invention, there is provided a motor having a one-way movable portion having a magnetostrictive element which is displaced in one direction by a magnetic field generated by a wound coil; Another-direction movable portion having a magnetostrictive element displaced in a direction of a predetermined angle with respect to the one direction by a magnetic field generated by the turned coil, and support means connected to the one-way movable portion on the opposite side to the other-direction movable portion And a movable element supported by the other-direction movable section and the support means.

FIG. 2 shows the basic principle of the motor having such a structure.
This will be described with reference to (A) to (D). (A) First, as an initial state, the coils 69 and 78 of the one-way movable portion 58B and the other-direction movable portion 59B are demagnetized. Then, the magnetic member 55 is supported by the support means 57. (B) Next, by displacing the magnetostrictive element 76 of the other direction movable portion 59B by exciting the coil 78, the other direction movable portion 5B is displaced.
9B is extended and brought into contact with the mover 55 and magnetically connected to move the mover 55 away from the support means 57. The chain line represents the magnetic circuit. (C) The magnetostrictive element 67 of the one-way movable portion 58B is
And the one-way movable portion 58B is extended by the excitation of
The movable element 55 is moved by moving the movable section 59B in the other direction.
To move. (D) The displacement of the magnetostrictive element 76 of the other direction movable portion 59B is returned by the degaussing of the coil 78 to reduce the length of the other direction movable portion 59B. It is separated from the mover 55. At this time, the magnetic connection between the mover 55 and the other direction movable portion 59B is also disconnected. Then, the displacement of the magnetostrictive element 67 of the one-way movable portion 58B is returned by the demagnetization of the coil 69, the one-way movable portion 58B is contracted, and the other-direction movable portion 59B is moved to the opposite side to return to the state of FIG. . By repeating such operations (A) to (D), the mover 55 is moved on a straight line.
Moreover, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with a conventional electromagnetic motor or the like, and the whole can be reduced in size and weight.

According to a fifth aspect of the present invention, there is provided a motor in which a pair of one-way movable parts having a magnetostrictive element which is displaced in one direction by a magnetic field generated by a wound coil are connected in series with their displacement directions matched. A pair of other-direction movable portions having a magnetostrictive element that is displaced in a direction perpendicular to the one direction by a magnetic field generated by a wound coil is connected to both outer sides in the displacement direction of the pair of one-way movable portions. It is characterized by comprising a driving means and a mover supported by the other direction movable portion.

FIG. 3 shows the basic principle of the motor having such a structure.
This will be described with reference to (B) to (E) and FIGS. 4 (F) to (I). (B) The magnetostrictive element 76B of the one other direction movable portion 59B is displaced by exciting the coil 78B, and the one other direction movable portion 5B is displaced.
9B is extended and brought into contact with the mover 55 made of a magnetic material to be magnetically connected. (C) The magnetostrictive element 67A of the other one-way movable section 58A is displaced by the excitation of the coil 69A to extend the other one-way movable section 58A. (D) The magnetostrictive element 67B of the one-way movable portion 58B is displaced by the excitation of the coil 69B, and the one-way movable portion 58B is displaced.
The movable element 55 is moved by extending B and moving the one other direction movable portion 59B. (E) The magnetostrictive element 76A of the other directional movable portion 59A is displaced by the excitation of the coil 78A, and the other directional movable portion 59A is extended and brought into contact with the mover 55 to be magnetically connected. (F) The displacement of the magnetostrictive element 76B of the one other direction movable portion 59B is returned by the demagnetization of the coil 78B.
Is reduced and separated from the mover 55. At this time, the magnetic connection between the mover 55 and the other direction movable portion 59B is also disconnected. (G) The displacement of the magnetostrictive element 67A of the other one-way movable portion 58A is returned by degaussing the coil 69A.
The mover 55 is moved by reducing the length of 8A. (H) The displacement of the magnetostrictive element 67B of the one-way movable portion 58B is returned by the degaussing of the coil 69B.
Is reduced. (I) The magnetostrictive element 76B of one other-direction movable portion 59B is displaced by the excitation of the coil 78B so that the one other-direction movable portion 59B is extended and brought into contact with the mover 55 to be magnetically connected. Then, the displacement of the magnetostrictive element 76A of the other omnidirectional movable portion 59A is returned by the degaussing of the coil 78A, and the other omnidirectional movable portion 5A
9A is contracted and returned to the state of (B). Hereafter, (B) ~
The movable element 55 is moved on a straight line by repeating the operation of (I). Moreover, since the displacement of the magnetostrictive element is used, a higher force density can be obtained compared to a conventional electromagnetic motor or the like,
The whole can be reduced in size and weight.

According to a sixth aspect of the present invention, there is provided a motor, comprising: a plurality of pairs of one-way movable portions each having a magnetostrictive element which is displaced in one direction by a magnetic field generated by a wound coil; Are connected in series, and each pair of one-way movable parts is radially connected in the same plane, and outside of each of these one-way movable parts, a magnetic field generated by a coil wound on the plane causes On the other hand, it is characterized in that it comprises a driving means formed by connecting a plurality of pairs of other-direction movable portions each having a magnetostrictive element displaced in the vertical direction, and a mover supported by the other-direction movable portion.

According to the basic principle of the motor having the above-mentioned structure, a pair of one-way movable parts and a pair of other-direction movable parts connected to the outside of the pair of one-way movable parts are described in claim 5. The operations of (B) to (I) similar to those of the motor are repeated to move the mover on a straight line. The pair of one-way movable portions and a pair of other-direction movable portions connected to the outside of the pair of one-way movable portions are configured such that each pair of the one-way movable portions is in the same plane. Are provided radially, the movable element can be moved on a plane by repeating the operations (B) to (I) in each direction. Moreover, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with a conventional electromagnetic motor or the like, and the whole can be reduced in size and weight.

According to a seventh aspect of the present invention, in the motor according to any one of the fourth to sixth aspects, the other-direction movable portion generates a magnetic attraction force by a magnetic field generated by the coil. The movable element is formed of a magnetic material.

As described above, since the movable element is magnetically attracted to the other-direction movable portion by the magnetic field generated by the coil that displaces the magnetostrictive element, the movable element can be accurately moved and the movable element can be moved. It can be moved along walls and ceilings.

According to an eighth aspect of the present invention, there is provided the motor according to any one of the fourth to seventh aspects, wherein a plurality of the driving means are arranged, and an excitation phase of each coil of the plurality of driving means is provided. , The movable element is moved at a continuous constant speed.

As described above, since the movable element is moved at a continuous constant speed by shifting the excitation phase of each coil of the plurality of driving means, the movable element can be moved smoothly.

The exposure apparatus of the present invention exposes an image of a mask pattern on a substrate through a projection lens, and is arranged on a vibration isolating table and supports a column for supporting the projection lens. A planar motor separately disposed and supporting the substrate, wherein the planar motor utilizes a magnetostrictive element.

As described above, since the planar motor uses the magnetostrictive element, a high force density can be obtained as compared with the case where a conventional electromagnetic motor or the like is used, and the planar motor can be reduced in size and weight.
The whole can be reduced in size and weight.

[0028]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. In this embodiment, a planar motor (motor) 51 is used.
As shown in FIG. 5, a support plate 52 made of a magnetic material such as a substantially flat iron, a drive unit (drive means) 53 mounted on the support plate 52, and a part above the drive unit 53 And a movable element 55 made of a magnetic material such as a plate-like iron placed on the drive unit 53.

First, the drive unit 53 will be described. The drive unit 53 includes a support (support means) 57,
It has driving movable parts (one-way movable parts) 58A to 58D and suction movable parts (other-directional movable parts) 59A to 59D.

The support 57 is made of a magnetic material such as iron, and is provided at the center of the drive unit 53. The support body 57 has a base portion 61 and a head portion 62 smaller than the base portion 61, and both have a substantially quadrangular prism shape.
The support 57 is supported by the screw member 63 with the head 62 disposed on the opposite side of the support plate 52.
It is fixed to 2. The support body 57 is provided with a rectangular cylindrical body 64 in a state where the head 62 is inserted inside, and at a portion of the head 62 protruding from the rectangular cylindrical body 64 to the opposite side to the support plate 52. , A seal ring 65 is attached.

The movable movable portions 58A to 58D have the same configuration, and are provided so as to be radial with a support 57 as a center in the same plane parallel to the support plate 52. The driving movable portions 58A to 58D are respectively provided with a magnetostrictive element (magnetostrictive element) 67, a bobbin 68, and a coil 69.
, A driving moving body (one-way moving body) 70 and a screw member 7
1 and a spring member 72.

The magnetostrictive element portion 67 has a substantially quadrangular prism shape, and has four side surfaces 61A to 61D of a base 61 perpendicular to the support plate 52 and adjacent to each other.
It is attached to the corresponding one. In this attached state, the magnetostrictive element section 67 extends perpendicular to the corresponding one of the four side face sections 61A to 61D. Bobbin 68
Is a substantially rectangular cylindrical member made of a non-magnetic material, and the magnetostrictive element portion 67 is inserted through the inside thereof.

The coil 69 is wound around the bobbin 68, and generates a magnetic field when a current flows. The driving moving body 70 is made of a magnetic material such as iron, and is provided on the opposite side of the support 57 of the magnetostrictive element section 67.

One end of the screw member 71 is screwed to the support 57, and in this state, the other end of the screw member 71 supports the driving movable body 70 so as to be displaceable in the direction in which the magnetostrictive element 67 extends. doing. The spring member 72 is interposed between the screw member 71 and the driving moving body 70 and urges the driving moving body 70 in the direction of the support 57.

As shown in FIGS. 7 and 8, the magnetostrictive element section 67 has element main bodies 73a to 73a made of a substantially square cylindrical magnetostrictive material.
3f and a connection member 74 made of a substantially square cylindrical non-magnetostrictive material
a to 74e. Then, the element body 73a-
73f and the connecting members 74a to 74e are alternately arranged in a multilayer shape and overlapped in the extending direction and are connected in series.

Specifically, the outermost element body 73a
Is fixed to the support body 57 at one end thereof,
A connecting member 74a is provided inside the element main body 73a with one end thereof fixed to the other end of the element main body 73a. The next element body 73b is provided inside the connecting member 74a, with one end thereof being fixed to the other end of the connecting member 74a.

Similarly, a connecting member 74b is provided inside the element body 73b, an element body 73c is provided inside the connecting member 74b, and a connecting member 74c is provided inside the element body 73c.
The element body 73d is provided inside the connection member 74c so as to be connected to each other. The connection member 74d is provided inside the element body 73d, the element body 73e is provided inside the connection member 74d, and the element body 73d is provided. A connecting member 74 is provided inside 73e.
The element body 73f is provided inside the connecting member 74e so as to be connected. The driving moving body 70 is fixed to the end of the innermost element body 73f opposite to the support 57.

Here, the magnetostrictive material is, as shown in FIG.
Distortion is such that the greater the strength of the applied magnetic field, the greater the amount of distortion.

When a current is applied to the coil 69 to bring it into an excited state, the magnetostrictive element section 67 includes element bodies 73a to 73f.
Are respectively extended in the extending direction, while none of the connecting members 74a to 74e is extended. Therefore, all the elongations, that is, the displacements of the element main bodies 73a to 73f are added. Therefore, the magnetostrictive element section 67 moves the driving movable body 70 away from the support body 57 by the amount of the displacement added in this way, against the urging force of the spring member 72. At this time, the driving moving body 70 moves perpendicularly to one of the side surfaces 61A to 61D to which the mounting is performed.

On the other hand, when the current is stopped from flowing through the coil 69 and the coil 69 is demagnetized, the magnetostrictive element section 69 has all of the element bodies 73a to 73f contracted in the extending direction. All of the connecting members 74a to 74e do not contract. For this reason, the element main bodies 73a to 73f
Are added together.
Therefore, the driving moving body 70 is moved toward the support body 57 by the amount of the displacement added in this manner in accordance with the urging force of the spring member 72. Also at this time, the driving movable body 70 moves perpendicularly to one of the side surfaces 61A to 61D to which the mounting is performed.

The suction movable portions 59A to 59D have the same configuration, and are mounted on the opposite side of the support plate 52 of the corresponding one driving moving body 70. The suction movable parts 59A to 59D are respectively composed of a magnetostrictive element 76, a bobbin 77, a coil 78, a suction moving body (other direction moving body) 79, a screw member 80, a spring member 81, and a seal ring 82. And

The magnetostrictive element 76 has a substantially quadrangular prism shape and is mounted on the opposite side of the supporting plate 52 of the corresponding one of the driving moving bodies 70. In this mounted state, the magnetostrictive element 76 is perpendicular to the supporting plate 52. Extend. The bobbin 77 has a substantially rectangular cylindrical shape made of a nonmagnetic material, and has the magnetostrictive element 76 inserted therein.

The coil 78 is wound around the bobbin 77, and generates a magnetic field when a current flows. The attracting moving body 79 is made of a magnetic material such as iron, and
6 is provided on the opposite side to the driving moving body 70.

One end of the screw member 80 has the driving movable body 7.
0, and in this state, the other end side supports the attraction moving body 79 so as to be displaceable in the direction in which the magnetostrictive element 76 extends. The spring member 81 includes a screw member 80.
And the suction moving body 79, and urges the suction moving body 79 in the direction of the driving moving body 70. The seal ring 82 is attached to the suction moving body 79.

When a current is applied to the coil 78 to make it excited, the magnetostrictive element 76 is displaced so as to extend in the direction of extension.
To the opposite side against the urging force of the spring member 81. At this time, the moving body for suction 79 moves perpendicular to the support plate 52.

On the other hand, when the current is stopped from flowing through the coil 78 and the coil 78 is demagnetized, the magnetostrictive element 76 is displaced so as to be reduced in the extending direction, and the adsorbing moving body 79 is displaced by this displacement.
Is moved toward the support plate 52 together with the urging force of the spring member 81. At this time, the suction moving body 79 is also supported
Move perpendicular to 2.

Here, the movable portions for suction 59A to 59D are:
At least in the extended state, it is located on the opposite side of the support plate 52 from the upper end of the head 62 of the support 57.

As described above, the driving unit 53 includes a pair of driving movable portions 58A and 58 having the magnetostrictive element portion 67 which is displaced in one direction by the magnetic field generated by the wound coil 69.
B and a plurality of pairs of driving movable portions 58C and 58D are connected in series with the displacement direction of the magnetostrictive element portion 67 being matched for each pair. Moreover, the pair of driving movable portions 58A and 58B and the driving movable portions 58C and 58D are radially connected in the same plane, and the coil wound around each of the driving movable portions 58A to 58D. Movable part 59 for adsorption having a magnetostrictive element 76 which is displaced in a direction perpendicular to the plane by the magnetic field generated by 78
A, 59B and a plurality of pairs of suction movable parts 59C, 59D are connected.

As shown in FIG. 10, a large number of drive units 53 having the above configuration are mounted on the support plate 52. Here, in each of the drive units 53, the respective support members 57 are disposed at every other intersection point of a lattice which is orthogonal to each other and equally spaced. Also,
The directions of the respective drive units 53 are determined so that the directions in which the respective magnetostrictive element portions 67 extend correspond to the line segments of the lattice. The same control is basically performed on the plurality of drive units 53 by the control device 88.

The lid 54 is disposed above the drive unit 53 disposed as described above, and has a large number of holes 84 formed therein. The holes 84 allow the heads 62 of the supports 57 of all the drive units 53 and the suction moving body 79 to pass therethrough. In the state where the head 62 and the suction moving body 79 are inserted through the holes 84 in this way, the end surface 62 of the head 62 parallel to the support plate 52 is
a and an end surface 7 of the suction moving body 79 parallel to the support plate 52.
9a project.

The gap between the hole 84 and the head 62 is sealed by a seal ring 65, and the gap between the hole 84 and the suction moving body 79 is sealed by a seal ring 82. As a result, a space 86 closed between the support plate 52 and the lid 54 is formed between the support plate 52 and the lid 54.

A cooling medium introducing means (cooling means) 87 is provided on the side of the flat motor 51. The cooling medium introducing means 87 allows the cooling medium to flow into the space 86 from the side, and the magnetostrictive element 67, the magnetostrictive element 76, the coil 69,
Cool 78. The cooling medium introducing means 87 constantly supplies the cooling medium during the operation of the planar motor 51, for example, to the space 86.
Pour into

The support plate 52 of the suction movable parts 59A to 59D caused by the displacement of the drive movable parts 58A to 58D.
The displacement of the lid 54 in the direction along
2 is allowed by deformation.

The coils 69 of all the driving movable parts 58A to 58D and the coils 78 of all the suction movable parts 59A to 59D are electrically connected to a control unit 88. Thereby, all the coils 69 and the coils 78
, The excitation / demagnetization, the current value, etc. are controlled by the control device 88.

The mover 55 includes at least the drive unit 5
The surface portion 55a disposed on the third side is a flat surface, and is moved in parallel with the support plate 52 so as to always straddle the plurality of drive units 53 on the plurality of drive units 53 described above. Become.

In FIG. 10, a wafer (substrate) W as a moving object is fixed to the mover 55 via a suction mechanism (not shown) such as an electrostatic suction. The wafer W is moved by moving the mover 55.

Next, the planar motor 51 having the above configuration will be described.
3 and 4 for the operation control by the control device 88 of FIG.
This will be described with reference to FIG. First, one drive unit 53
Of the pair of driving movable portions 58A,
58B and a pair of suction movable parts 59A, 59B connected to the outside of the pair of drive movable parts 58A, 58B will be described. Here, it is assumed that the mover 55 is moved from the direction of the movable portion for suction 59A to the direction of the movable portion for suction 59B.

In this description and FIGS. 3 and 4, for convenience of explanation, the reference numeral “A” is used for the constituent parts of the driving movable part 58A, and the constituent parts of the suction movable part 59A are also used for the constituent parts. "A" is attached to each symbol. Similarly, a reference numeral “B” is given to a component constituting the driving movable portion 58B, and a reference symbol “B” is given to a component constituting the suction movable portion 59B. The dashed line indicates a magnetic circuit.

FIG. 3A shows all the coils 69A, 6A.
9B, 78A, and 78B are in the initial state in which they are demagnetized.

From this initial state, first, as shown in FIG. 3B, the coil 7 of the suction movable portion 59B on the front side in the moving direction of the mover 55 (hereinafter simply referred to as the moving direction).
8B is excited (step 1). As a result, the magnetostrictive element 76B of the movable portion for suction 59B extends, and the moving body for adsorption 79B comes into contact with the movable element 55. At the same time, the moving body for suction 79B causes the mover 55 to be attracted by magnetic attraction. At this time, the support plate 52 and the driving moving body 70
B, magnetostrictive element 76B, suction moving body 79B, mover 55
And a main magnetic flux φ90 flowing through the support 57 is generated.

At this time, the attraction moving body 79B of the driving unit 53 and the attraction moving body 7 on the front side in the traveling direction of the other driving unit 53 for which the same control is executed.
The mover 55 can be supported by a plurality of 9Bs.

Next, as shown in FIG. 3C, the coil 69A of the driving movable portion 58A on the rear side in the traveling direction is set to the excited state (step 2). Then, the magnetostrictive element portion 67A of the driving movable portion 58A extends to move the suction movable portion 59A on the rear side in the traveling direction to the rear side in the traveling direction. At this time, a main magnetic flux φ91 flowing through the support plate 52, the support 57, the magnetostrictive element section 67A, and the driving moving body 70A is generated.

Subsequently, as shown in FIG. 3 (D), the coil 69B of the driving movable portion 58B on the front side in the traveling direction is set to the excited state (step 3). Then, the magnetostrictive element portion 67B of the driving movable portion 58B extends, and moves the suction movable portion 59B on the front side in the traveling direction to the front side in the traveling direction. This allows
The mover 55 that has been sucked by the suction movable portion 59B moves forward. At this time, the support plate 52 and the driving moving body 70
B, a main magnetic flux φ92 flowing through the magnetostrictive element section 67B and the support body 57 is generated.

Next, as shown in FIG. 3E, the coil 78A of the suction movable portion 59A on the rear side in the traveling direction is set to the excited state (step 4). As a result, the movable portion for suction 59
The magnetostrictive element 76A of A expands, and the suction moving body 79A contacts the mover 55. At the same time, the moving body for adsorption 79A
Causes the mover 55 to be attracted by magnetic attraction. At this time,
A main magnetic flux φ93 flowing through the support plate 52, the support 57, the movable element 55, the suction moving body 79A, the magnetostrictive element 76A, and the driving moving body 70A is generated. At this time, the movable element 55 is supported by a plurality of suction moving bodies 79A of the driving unit 53 and a plurality of suction moving bodies 79A on the rear side in the traveling direction of another driving unit 53 for which the same control is performed. Can be.

Subsequently, as shown in FIG. 4F, the coil 78B of the suction movable portion 59B on the front side in the traveling direction is demagnetized (step 5). Thereby, the movable part 5 for suction
The 9B magnetostrictive element 76B is reduced in length, and
B releases the suction with the mover 55 and
Separated from 5.

Next, as shown in FIG. 4G, the coil 69A of the driving movable portion 58A on the rear side in the traveling direction is demagnetized (step 6). Then, the magnetostrictive element 67A of the driving movable portion 58A is contracted, and the attracting movable portion 5 on the rear side in the traveling direction is moved.
9A is moved forward in the traveling direction. As a result, the movable element 55 that has been sucked by the suction movable portion 59A on the rear side in the traveling direction moves forward.

Subsequently, as shown in FIG. 4H, the coil 69B of the driving movable portion 58B on the front side in the traveling direction is demagnetized (step 7). Then, the magnetostrictive element portion 67B of the driving movable portion 58B is contracted to move the suction movable portion 59B on the front side in the traveling direction to the rear side in the traveling direction.

Next, as shown in FIG. 4I, the coil 78B of the suction movable portion 59B on the front side in the traveling direction is set to the excited state (step 8). As a result, the magnetostrictive element 76B of the suction movable portion 59B on the front side in the traveling direction extends, and the suction moving body 79B abuts on the mover 55 to suck it.

Subsequently, the suction movable portion 59 on the rear side in the traveling direction.
A coil 78A is set in a demagnetized state,
The suction moving body 79A is separated from the movable element 55 by reducing the length of the magnetostrictive element 76A, and the state of step 1 is established. By repeating the above steps 1 to 8, the mover 55 is moved on a straight line.

In the above, the case where each operation is performed separately for convenience of explanation has been described as an example. However, by performing each operation simultaneously as much as possible, the moving speed of the mover 55 can be increased. For example, the operation of step 2 described above can be performed simultaneously with the operation of step 1 or the operation of step 3, or the operation of step 7 can be performed simultaneously with the operation of step 6.

On the other hand, a pair of driving movable parts 58C and 58D of the driving unit 53 having different displacement directions from the above and a pair of suction moving parts 59C connected to the outside of the pair of driving movable parts 58C and 58D. , 59D, the mover 55 is moved on a straight line in the same manner as described above. Thus, the mover 55 is moved on a plane parallel to the support plate 52.

Here, since a plurality of such drive units 53 are provided, the controller 88 shifts the excitation phase of each of the coils 69 and 78 by the plurality of drive units 53 so that the movable element 55 is continuously fixed. It can also be moved at speed.

For example, at the same time when the control device 88 finishes moving the movable element 55 with one driving movable portion 58B of one driving unit 53, the control device 88 moves the movable element 55 with one driving movable portion 58B of the other driving unit 53. 55 is started. Then, one drive movable portion 58B of the other drive unit 53
At the same time as the movement of the mover 55 is completed, the movement of the mover 55 is started by the other drive movable portion 58A of the one drive unit 53. Further, at the same time when the movement of the mover 55 in the other drive movable portion 58A of the one drive unit 53 ends, the movement of the mover 55 starts in the other drive movable portion 58A of the other drive unit 53. Let it. Then, at the same time when the movement of the mover 55 in the other drive movable portion 58A of the other drive unit 53 ends, the movement of the mover 55 starts in one drive movable portion 58B of the one drive unit 53. Let it. To realize the above operation, the coil 6
The 9,78 excitation phases are made different.

Here, since the amount of displacement of the magnetostrictive element section 67 can be changed and controlled in accordance with the strength of the magnetic field generated by the coil 69, for example, the strength of the magnetic field applied to the coil 69 of the movable driving sections 58A to 58D can be controlled. If the amount of movement of the mover 55 is made small by controlling the position, the positioning in the movement plane can be performed accurately.

Also, since the amount of displacement of the magnetostrictive element 76 can be changed and controlled in accordance with the strength of the magnetic field generated by the coil 78, if the strength of the magnetic field applied to the coil 78 of the suction driving sections 59A to 59D is controlled. The position of the mover 55 in the direction perpendicular to the support plate 52 can be adjusted. In addition, a plurality of suction movable parts 59A to 5A that simultaneously support the mover 55
By sequentially varying the heights of 9D, the movable element 55 can be given an inclination with respect to the support plate 52.

Next, a case where the control current flowing through each of the coils 69 and 78 is an alternating current will be described. Here, control currents for the coil 69 of the driving movable portion 58B on the front side in the traveling direction and the coil 78 of the suction movable portion 59B on the front side in the traveling direction will be described as an example with reference to FIGS. 5 and 11 to 14. I do.

An alternating current as shown in FIG. 11A is applied to the coil 69 of the driving movable portion 58B (FIG. 11A).
In (A), the horizontal axis represents time, and the vertical axis represents current value).

Then, a force having a waveform substantially similar to that of the alternating current on the positive side, as shown in FIG. 11B, is generated in the magnetostrictive element 67 of the movable portion for driving 58B, and the negative side. 11A, a force having a waveform substantially similar to that obtained by inverting the alternating current to the positive side is generated (in FIG. 11B, the horizontal axis represents time, and the vertical axis represents generated force). Further, a displacement having a waveform substantially similar to the generated force is generated in the magnetostrictive element portion 67 as shown in FIG. 11C (in FIG. 11C, the horizontal axis represents time, and the vertical axis represents displacement). However, as apparent from FIG. 11 (C), this displacement becomes substantially maximum at the central time point (time point c shown in FIG. 11) in the range where the absolute value of the alternating current reaches 0 from the maximum position.

On the other hand, an alternating current as shown in FIG. 11 (D) is applied to the coil 78 of the attracting movable portion 59B in such a manner that the waveform in the intermediate predetermined range is flattened (FIG. 11).
In (D), the horizontal axis represents time, and the vertical axis represents current value).

Then, the magnetostrictive element 7 of the suction movable portion 59B
In FIG. 6, a force having a waveform substantially similar to that of the positive current is generated as shown in FIG. 11E, and the force is inverted to the positive current for the negative current. 11 (E), the horizontal axis represents time, and the vertical axis represents generated force. Further, the magnetostrictive element 76 has the structure shown in FIG.
(FIG. 11F), a horizontal axis represents time, and a vertical axis represents displacement. Then, as apparent from FIG. 11 (F), this displacement is in a flat range where the absolute value of the current is maximum (FIG. 11 (F)).
(Range of time points b to c) shown in FIG.

For this reason, these currents are supplied to the driving movable section 5.
8B coil 69 and coil 7 of suction movable portion 59B
8, the movable portion 59B for suction moves as shown in FIG. That is, first, at the time point a, both the driving movable portion 58B (not shown in FIG. 12) and the suction movable portion 59B start extending. Then, at the time point b, the movable portion for suction 59B comes into contact with the movable element 55 to suck the movable element 55 to stop the extension. Subsequently, in this state, the movable portion for driving 58B further extends to move the movable portion for adsorption 59B and move the movable element 55.

Then, when reaching the time point c, the driving movable portion 58
Both B and the movable portion for suction 59B start reducing the length, so that the movable portion for suction 59B releases the suction to the mover 55 and separates from the mover 55. Further, the drive movable portion 58B is contracted, and the suction movable portion 59B returns to the same state as the time point a at the time point d.

This will be described with reference to the characteristic diagram of FIG. First, the movable element 55 is attracted to the attracting movable portion 59B in the range of the time point b to c where the absolute value of the current to the coil 78 of the attracting movable portion 59B is maximum. Then, only in this state, a thrust force is generated on the mover 55 by the drive movable portion 58B.

Therefore, only the generated force of the magnetostrictive element portion 67 shown in the range between the points b and c in FIG.
As shown in FIG. 13A, thrust is generated in the mover 55 (in FIG. 13A, the horizontal axis represents time, and the vertical axis represents thrust).
Then, only the displacement of the magnetostrictive element portion 67 shown in the range from the time point b to the time point c in FIG. 11C is given as a displacement to the mover 55 as shown in FIG. 13B (FIG. 13).
In (B), the horizontal axis is time, and the vertical axis is displacement).

Note that one drive unit 5 shown in FIG.
The displacement operation for displacing the drive movable portion 58B of another adjacent drive unit 53 is superimposed on the state where the displacement operation for displacing the drive movable portion 58B of Step 3 is interrupted.
This can be achieved by making the phase of the current flowing to the coils 69 and 78 of the adjacent drive unit 53 different from that of the one drive unit 53. Then, as shown in FIG. 14A, thrust is continuously generated on the mover 55,
The mover 55 can be continuously displaced as shown in FIG.

In the above, for convenience, the control current for the coil 69 of the driving movable section 58B on the front side in the traveling direction and the coil 78 of the suction movable section 59B on the front side in the traveling direction have been described as an example. For this reason, the control current of the driving movable portion 58A and the suction movable portion 59A on the rear side in the traveling direction is not considered, but by controlling these control currents together, the movable element 55 can be moved at a higher speed. It can be moved continuously.

According to the planar motor 51 described above, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with a conventional electromagnetic motor or the like, and the whole can be reduced in size and weight. In addition, since the mover 55 has only a thin magnetic body and a simple structure as a whole, the mover 55 has a higher force density than a conventional electromagnetic motor or the like. And the whole can be reduced in size and weight.

Further, since the mover 55 is attracted and moved by the attracting movable portions 59A to 59D by magnetic attraction, the mover 55 can be accurately moved and the mover 55 can be moved to the wall surface. Or it can be moved along the ceiling.

Further, the magnetostrictive element portion 67 of each of the driving movable portions 58A to 58D includes an element body 73a to 73m made of a magnetostrictive material.
3f and connecting members 74a to 74e made of a non-magnetostrictive material are alternately connected in a multilayer shape and in series. For this reason, the sum of the individual displacements of the element main bodies 73a to 73f is the total displacement of the magnetostrictive element section 67, and
The entire displacement of the magnetostrictive element 67 can be increased.

In addition, the cooling medium introducing means 87 causes the cooling medium to flow through the space 86 between the support plate 52 and the lid 54, and the magnetostrictive element 67, the magnetostrictive element 76, the coil 69,
The cooling of 78 can eliminate the effects of temperature rise.

The above-described flat motor 51 can be applied to, for example, an exposure apparatus. An example applied to this exposure apparatus will be described with reference to FIG. First, the exposure apparatus 95 includes an anti-vibration table 97, a first column 98, a projection lens PL, a second column 99, and a reticle stage 100.
, A reticle R, a third column 102, and the above-described flat motor 51.

The vibration isolation table 97 performs vibration isolation, and a plurality of vibration isolation tables are installed at predetermined positions on the floor as installation surfaces. In the first column 98, all the legs 96 are respectively mounted on the corresponding vibration isolation tables 97. Projection lens P
L is fixed to the center of the upper plate of the first column 98.

The second column 99 is planted on the upper plate of the first column 98 so as to surround the projection lens PL. The reticle stage 100 is mounted on the upper plate of the second column 99. The reticle R is a reticle stage 10
0 is placed as a mask.

The third column 102 is provided inside the first column 98, separately from the first column 98, on the floor. This is to prevent the reaction force generated in the drive unit 53 from escaping to the floor when the movable element 55 is moved, and to prevent the projection lens from vibrating due to the reaction force. The planar motor 51 is mounted on the upper surface of the third column 102, and a wafer W as a substrate is sucked on the movable element 55 of the planar motor 51.

When the movable element 55 of the plane motor 51 is moved as described above when performing projection exposure on the wafer W, the position of the wafer W with respect to the projection lens PL is controlled, and Reticle R
The image of the mask pattern is exposed on the wafer W.

Here, the plane motor 51 can of course control the change of the horizontal position of the wafer W as described above. In addition, this planar motor 51
Controls the position of the wafer W in the height direction by controlling the strength of the magnetic field applied to the magnetostrictive elements 76 of the suction movable portions 59A to 59D of the plurality of drive units 53 that support the mover 55. Position, or by changing and controlling the inclination angle with respect to the horizontal. Also in the exposure apparatus 95 as described above, since the flat motor 51 that can obtain high force density and can be reduced in size and weight as a whole is used, there is an advantage that the entirety can be reduced in size.

As a driving unit, a pair of driving movable parts 58A and 58B are connected in series with the displacement directions of the respective magnetostrictive element parts 67, and the displacement directions of the pair of driving movable parts 58A and 58B are changed. The main configuration in which a pair of movable movable parts for suction 59A, 59B are connected to both outer sides of (i.e., the movable movable parts 58C, 58D and the movable movable parts 59C, 59C,
59D).

In this case, the operation of the driving movable parts 58A and 58B and the suction movable parts 59A and 59B is the same as described above, and a linear motor for moving the movable element 55 in a straight line is provided. Also in this case, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with a conventional electromagnetic motor or the like, and the whole can be reduced in size and weight.

Further, as a driving unit, as shown in FIG. 2, one driving movable portion 58B and the driving
The main structure of the movable movable portion 59B connected to the movable movable portion 8B and the support 57 connected to the opposite side of the movable movable portion 59B of the movable drive portion 58B (that is, the movable movable portion of the drive unit 53 described above). The configuration excluding the portions 58A, 58C, 58D and the movable portions 59A, 59C, 59D for suction) may be used.

The operation in this case will be described. (A) First,
As an initial state, the coils 69 and 78 of the one-way movable portion 58B and the other-direction movable portion 59B are demagnetized. Then, the mover 55 is supported by the support means 57.
(B) Next, by displacing the magnetostrictive element 76 of the other direction movable portion 59B by exciting the coil 69, the other direction movable portion 5B is displaced.
9B is extended and brought into contact with the mover 55,
Are separated from the supporting means 57.

(C) Magnetostrictive element 67 of one-way movable portion 58B
Is displaced by the excitation of the coil 69 to extend the one-way movable portion 58B and move the other-direction movable portion 59B, thereby moving the mover 55. (D) Other direction movable part 59B
The displacement of the magnetostrictive element 76 is returned by the degaussing of the coil 78 to reduce the length of the other-direction movable portion 59B.
The other-direction movable portion 59B is separated from the mover 55 while supporting the movable member 55.

The magnetostrictive element 6 of the one-way movable portion 58B
7 is returned by the degaussing of the coil 69.
B is reduced in length, and the other direction movable portion 59B is moved to the opposite side to return to the state of (A).

By repeating such operations (A) to (D), the mover 55 is moved on a straight line. In this case, the angle between the driving movable portion 58B and the suction movable portion 59B is not necessarily a right angle, but may be a predetermined angle. Also in this case, since the displacement of the magnetostrictive element is used, a higher force density can be obtained compared to a conventional electromagnetic motor or the like,
The whole can be reduced in size and weight.

In the above description, the case where the movable part for suction attracts the movable element 55 has been described as an example. However, for example, the friction coefficient between the movable part for suction and the movable element 55 is high, When the child 55 can be moved accurately, it is not always necessary to adsorb.

As shown in FIG. 1, for example, one driving movable portion 58B and a suction movable portion 59B connected to the driving movable portion 58B have a main structure (that is, the driving unit 53 described above). The supporting body 57, the driving movable portion 58A,
58C, 58D and movable parts for suction 59A, 59C, 5
9D).

In this case, since the movable portion 58B for driving and the movable portion 59B for suction are displaced in different directions, for example, when the end portion of the one-way movable portion 58B is fixed as shown in FIG. The displacement direction of the movable part 59B shifts according to the displacement of the one-way movable part 58B. Accordingly, when the moving object 55 'is connected to the end of the other direction movable portion 59B, the one direction movable portion 58B and the other direction movable portion 59B are connected.
In accordance with the displacement of B, the moving object 55 'can be quickly and reliably moved to desired coordinates in a predetermined plane.

Also in this case, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with a conventional electromagnetic type or the like.
The whole can be reduced in size and weight. In this case, the angle between the driving movable portion 58A and the suction movable portion 59A is not necessarily a right angle, but may be a predetermined angle.

[0108]

As described in detail above, claim 1 of the present invention
According to the actuator described, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with the conventional actuator, and the whole can be reduced in size and weight.

According to the actuator of the second aspect of the present invention, since the element main body and the connecting member made of a non-magnetostrictive material are alternately connected in a multilayer and in series, the individual displacement of the element main body can be reduced. The sum is the displacement of the entire magnetostrictive element. Therefore, the displacement of the entire magnetostrictive element can be increased.

According to the actuator of the third aspect of the present invention, since the magnetostrictive element and the coil that generate heat can be cooled, the influence of the temperature rise can be eliminated.

According to the motor of the fourth to sixth aspects of the present invention, since the displacement of the magnetostrictive element is used, a higher force density can be obtained as compared with a conventional electromagnetic motor or the like, and the whole can be reduced in size and weight. .

According to the motor described in claim 7 of the present invention,
Since the mover is magnetically attracted to the other direction movable portion by the magnetic field generated by the coil that displaces the magnetostrictive element,
The mover can be moved accurately, and the mover can be moved along a wall surface or a ceiling surface.

According to the motor described in claim 8 of the present invention,
Since the mover is moved at a continuous and constant speed by shifting the excitation phase of each coil of the plurality of driving means, the mover can be moved smoothly.

According to the exposure apparatus of the present invention, since the planar motor uses the magnetostrictive element, a higher force density can be obtained than when a conventional electromagnetic motor or the like is used, and the entire planar motor can be reduced in size. It is possible to reduce the weight, so that the entire exposure apparatus can be reduced in size and weight.

[Brief description of the drawings]

FIG. 1 is a side sectional view showing an actuator of the present invention.

FIG. 2 is a side sectional view showing the operating principle of the motor of the present invention in each state.

FIG. 3 is a side sectional view showing an operation principle of the flat motor according to one embodiment of the present invention in each state.

FIG. 4 is a side sectional view showing the operating principle of the planar motor according to one embodiment of the present invention in each state.

FIG. 5 is a side sectional view showing a configuration of a part of the planar motor according to one embodiment of the present invention.

FIG. 6 is a plan view showing a drive unit of the planar motor according to one embodiment of the present invention.

FIG. 7 is a cross-sectional view showing one side of a magnetostrictive element of the planar motor according to one embodiment of the present invention.

FIG. 8 is a longitudinal sectional view of the magnetostrictive element of the flat motor according to one embodiment of the present invention.

FIG. 9 is a characteristic diagram of the magnetostrictive element, in which the horizontal axis represents the strength of a magnetic field and the vertical axis represents distortion.

FIG. 10 is a plan view showing the overall configuration of the planar motor according to one embodiment of the present invention, with a lid removed.

FIG. 11 shows a current (A) applied to a coil of a driving movable portion of a flat motor according to an embodiment of the present invention, a generated force (B) of the magnetostrictive element portion, and a displacement (C) of the magnetostrictive element portion caused by the current. And the current (D) applied to the coil of the movable portion for suction,
FIG. 9 is a characteristic diagram illustrating a generated force (E) of the magnetostrictive element and a displacement (F) of the magnetostrictive element caused by the force.

FIG. 12 is a diagram showing a movement path of a movable portion for suction of the planar motor according to one embodiment of the present invention.

13 shows a thrust (A) acting on the mover when the current shown in FIG. 11 is applied to the planar motor according to one embodiment of the present invention.
FIG. 4 is a characteristic diagram illustrating an example of displacement of a mover (B).

14 shows a thrust (A) acting on the mover when the current shown in FIG. 11 is applied to the planar motor according to one embodiment of the present invention.
FIG. 9 is a characteristic diagram illustrating another example of the displacement (B) of the mover.

FIG. 15 is a side view schematically showing an exposure apparatus according to one embodiment of the present invention.

FIG. 16 is a side view showing a linear pulse motor.

FIG. 17 is a side view showing the operating principle of the linear pulse motor for each state.

[Explanation of symbols]

 51 Planar motor (motor) 53 Drive unit (drive means) 55 Mover 55 'Control target 57 Support body (support means) 58A to 58D Drive movable section (one-way movable section) 59A to 59D Suction movable section (other direction) (Movable part) 67 Magnetostrictive element part (magnetostrictive element) 69 Coil 73a to 73f Element main body 74a to 74e Connecting member 76 Magnetostrictive element 78 Coil 87 Cooling medium introduction means (cooling means) 88 Control device 95 Exposure device 97 Vibration-proof table 98 Column R Reticle (mask) W Wafer (substrate)

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁶ Identification code FI H01L 21/30 515G

Claims (9)

[Claims] 1. A one-way movable portion having a magnetostrictive element that is displaced in one direction by a magnetic field generated by a wound coil, and a magnetostriction that is displaced by a magnetic field generated by the wound coil in a direction at a predetermined angle with respect to the one direction. An actuator characterized by being connected to a movable part in another direction having an element. 2. The actuator according to claim 1, wherein the magnetostrictive element is configured by alternately arranging an element body and a connecting member made of a non-magnetostrictive material in a multilayer shape and connecting them in series. 3. The actuator according to claim 1, further comprising cooling means for cooling the magnetostrictive element and the coil. 4. A one-way movable part having a magnetostrictive element that is displaced in one direction by a magnetic field generated by a wound coil, and is connected to the one-way movable part, and is provided with a magnetic field generated by the wound coil. A driving means having a magnetoresistive element displaced in a predetermined angle direction with respect to one direction, a driving means having a magnetostrictive element displaced in a predetermined angle direction with respect to one direction, and a supporting means coupled to the other direction moving part of the unidirectional moving part on a side opposite to the other direction moving part; A motor, comprising: a movable member including a magnetic body supported by a direction movable portion and the support means. 5. A pair of one-way movable parts having a magnetostrictive element that is displaced in one direction by a magnetic field generated by a wound coil is connected in series with matching displacement directions, and the pair of one-way movable parts is connected to each other. On both sides in the displacement direction,
A driving unit that connects a pair of other-direction movable units having a magnetostrictive element that is displaced in a direction perpendicular to the one direction by a magnetic field generated by the wound coil; and a magnetic body supported by the other-direction movable unit. Including mover,
A motor comprising: 6. A plurality of pairs of one-way movable portions each having a magnetostrictive element that is displaced in one direction by a magnetic field generated by a wound coil are connected in series by adjusting the displacement direction of the magnetostrictive element for each pair, and A pair of one-way movable parts are radially connected in the same plane, and a magnetostrictive element that is displaced in a direction perpendicular to the plane by a magnetic field generated by a wound coil is provided outside each of the one-way movable parts. Driving means formed by connecting a plurality of pairs of other-direction movable parts having: a mover including a magnetic body supported by the other-direction movable part;
A motor comprising: 7. The multi-directional movable part according to claim 4, wherein the magnetic attraction is generated by a magnetic field generated by the coil, and the movable element is formed of a magnetic material. A motor according to any one of the preceding claims. 8. The apparatus according to claim 4, wherein a plurality of said driving means are arranged, and said movable element is moved at a continuous constant speed by shifting an excitation phase of each coil of said plurality of driving means. 8. The motor according to claim 7. 9. An exposure apparatus for exposing an image of a mask pattern on a substrate via a projection lens, wherein the column is arranged on an anti-vibration table, supports the projection lens, and is arranged separately from the column, An exposure apparatus, comprising: a planar motor that supports the substrate; wherein the planar motor uses a magnetostrictive element.