JPH11159571A - Machine device, exposure device and its operating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize arm influence given to the inside and outside of a machine device and an exposure device through vibrations accompanying an earthquake by utilizing the output of a detecting means for detecting the earthquake to fix a main section to a foundation section. SOLUTION: An exposure device 1 has a foundation section 2 and a main section 4 attached to its upper part through a vibration control pad 3. A fixing arm 5 is attached to the surface plate 4F of the main section 4, and a fastening part 6 is fixed to the foundation section 2. The main section 4 can be fixed to the foundation section 2 by mutually engaging the fixing arm 5 and the fastening part 6. In addition, the exposure device 1 has a receiver to receive an earthquake warning signal. This signal is transmitted in the case of the occurrence of the earthquake detected to be above a fixed level where it is required to shut down the exposure device 1 and to actuate the fastening part 6, and the tip of a vertical part of the fixing arm 5 is sandwichedly fixed by the function of the fastening part 6. Thus the main section 4 can be prevented from falling from a machine device in the case of the occurrence of the earthquake.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mechanical device for fixing a main portion on a vibration isolating pad or a movable portion of the main portion during an earthquake, a substrate stage on the vibration isolating pad, or a movable device on the substrate stage. The present invention relates to an exposure apparatus for fixing a part.

[0002]

2. Description of the Related Art In the case of a mechanical device which does not want to be affected by external vibrations, a vibration isolating pad is mounted on the base of the mechanical device, the main portion is mounted thereon, and the main portion is connected to the basic portion. The main part is not affected by the vibration of an external machine or the vibration of an automobile or the like passing through a nearby road or the like.

In the case of an exposure apparatus used in the manufacturing process of a semiconductor device, the influence of external vibration must be similarly blocked. For this reason, the base part of the bottom surface, which is the base of the exposure apparatus, is fixed and installed on the floor surface on which the exposure apparatus is installed, and the substrate stage and substrate are held on the base part via the anti-vibration pad. The main part including the holder etc. is installed.

[0004] The conventional mechanical device will be described with reference to FIG. 9.
A, but with the main part 34 of the mechanical device 31 on a vibration-isolating pad 33 mounted on the base 31
(For example, illumination system 34A, reticle stage 34B, projection lens system 34C, wafer stage 34D, gantry 35E
And the surface plate 35F) are not fixed after the installation, and the mechanical limit is imposed on the completely free state or the movement range of the fixing arm 35 fixed to the surface plate 34F of the main part 34 of the mechanical device 31. And a fastening portion 36 for providing it.

In recent years, an exposure apparatus having a stepper employs a stage mechanism using an air guide as shown in FIG. 6 inside a main body, and comprises a support base 17 and guide covers 18 attached to both ends thereof. It comprises a movable part comprising a support part, a movable body 19 and a movable element 20 attached to both ends thereof and surrounding the guide bar 18.
A pressurized air layer is formed between the upper surface of the guide bar 18 and the lower surface of the movable element 20 opposite thereto, and between the side surface of the guide cover 18 and the side surface of the movable element 20 opposite thereto. The guide bar 18 can move smoothly.

[0006]

In a conventional mechanical device and exposure apparatus as described above, when a large vibration due to an earthquake is applied to the apparatus, if the main part on the vibration-isolating pad falls off, the apparatus is exposed to the inside and outside of the apparatus. It is expected to cause a dangerous situation. There is no particular mechanical limitation, and it must be taken into consideration that in a completely free state, the vibration of the main part of the device on the anti-vibration pad is accelerated, the amplitude increases, the device separates from the device, and the device is destroyed. We must consider that human injury can occur.

[0007] Since the vibration isolating pad is manufactured so as to cut off vibration having a relatively high frequency and a small amplitude, it cannot cut off vibration caused by an earthquake which may have a low frequency or a large amplitude. Also, if there is a mechanical restriction on the movement of the main part, the spread of the damage will be prevented to some extent, but it cannot be said that it is sufficient, and furthermore, the device will be impacted while being semi-fixed, causing some performance deterioration. You have to take into account the deafness.

Further, when the apparatus has a movable part, particularly a non-contact type movable part such as an air stage, there is a high possibility that the apparatus will be supported only in its own weight direction, that is, in the vertical direction within the stroke range in the moving direction. This is particularly problematic because the movable part may fall off and damage the device when it receives some external force.

SUMMARY OF THE INVENTION It is an object of the present invention to securely fix a main part and a movable part of an apparatus in the event of an earthquake, and to minimize the influence of the vibration caused by the earthquake on the inside and outside of a mechanical apparatus and an exposure apparatus.

[0010]

In order to achieve the above object,
2. A mechanical device according to claim 1, wherein the main part is separated from the base part, the vibration isolating pad for separating the main part from the base part, a detecting means for detecting an earthquake, and the detecting means. And a first fixing means for fixing the main part to the base part by using the output of (1).

The vibration-proof pad cannot prevent the vibration of the base part due to the earthquake from being transmitted to the main part, and since the main part is on the vibration pad, the vibration of the main part is accelerated and the amplitude increases. May be. For this reason, the earthquake is detected by the detecting means, the output is sent to the first fixing means, and the main part is fixed to the base part by the first fixing means. As a result, the influence of the earthquake can be minimized without further accelerating the vibration of the main part due to the earthquake or increasing the amplitude.

Further, the main part is installed on the vibration-isolating pad, and the main part is fixed to the base only when an earthquake is detected. The vibration part is isolated from the part, so that the influence of vibration from outside can be avoided. It is desirable to shut down machinery when an earthquake is detected. Here, the detecting means for detecting the earthquake may be, for example, the seismometer itself or a receiver for detecting the earthquake by receiving an alarm signal transmitted from an external seismometer.

According to a second aspect of the present invention, in the mechanical device according to the first aspect, the main portion uses a movable portion, a support portion supporting the movable portion, and an output of the detection means. And second fixing means for fixing the movable portion to the support portion. The detection means detects the earthquake, sends its output to the second fixing means, and fixes the movable portion to the support by the second fixing means. In the case of normal use in which no earthquake is detected, the second fixing means does not work, and the movable part is supported by the support part and is movable.

According to a third aspect of the present invention, in the mechanical device according to the second aspect, the supporting portion supports the movable portion via a fluid. In the case of normal use in which an earthquake is not detected, the second fixing means does not work, and the movable portion is smoothly moved because it is supported by the support portion via the fluid, and the vibration transmitted from the support portion to the movable portion is Will be shut off.

Here, the term "support via a fluid" means that a fluid such as air exists between the movable portion and the support portion, such as an air pad, and that the movable portion and the support portion do not make mechanical contact with each other. Means general support. That is, in addition to the structure in which the movable portion is supported by the fluid acting as a supporting fluid, the fluid merely exists between the support portion and the movable portion, and has another supporting force, for example, a magnetic bearing. As described above, a structure in which the supporting portion supports the main portion without mechanical contact using the repulsive action between the same poles of the N pole and the S pole and the suction action between different poles may be used.

According to a fourth aspect of the present invention, in the mechanical device according to the third aspect, the mechanical device is an exposure apparatus for manufacturing a semiconductor, and the supporting portion connects the movable portion via pressurized air. To support.

According to a fifth aspect of the present invention, there is provided an exposure apparatus for transferring a pattern formed on a mask onto a substrate, wherein the substrate stage is provided with a base portion and an anti-vibration pad on the base portion. Detecting means for detecting an earthquake, and fixing means for fixing the substrate stage base to the base portion using an output of the detecting means. Further, the substrate stage mounted on the substrate stage of the exposure apparatus may have another fixing means for fixing the substrate stage to the substrate stage using the output of the detecting means.

According to a sixth aspect of the present invention, in the exposure apparatus according to the fifth aspect, the fixing means for fixing the substrate stage table to the base portion is attached to the base portion. One component, a second component attached to the substrate stage, and a coupling mechanism for coupling the first component and the second component using an output of the detection means.

According to a seventh aspect of the present invention, in the exposure apparatus according to the fifth or sixth aspect, the detecting means includes a seismometer. An earthquake can be detected directly by a seismograph.

According to an eighth aspect of the present invention, in the exposure apparatus according to any one of the fifth to seventh aspects, the detecting means includes a receiver for receiving an earthquake warning signal. Since the detecting means includes the receiver for receiving the earthquake warning signal, it is possible to receive the earthquake signal detected at a remote place. The receiver can quickly receive, for example, a public earthquake warning signal detected near the epicenter. In addition, since it is possible to confirm that an earthquake has been detected at a distant point, it is possible to know that an earthquake that did not occur only near the seismometer, for example, an artificial vibration was detected, and that reliable earthquake detection is possible. Becomes

According to a ninth aspect of the present invention, there is provided a method for operating an exposure apparatus, comprising: a main portion provided on a base portion for transferring a pattern formed on a mask onto a substrate; The method includes a first step of detecting an earthquake, and a second step of fixing the main part to the base part when the earthquake is detected in the first step.

According to a tenth aspect of the present invention, in the operating method of the lithographic apparatus according to the ninth aspect, the first step is performed by using a seismometer provided in the exposure apparatus. The second step is characterized in that when the seismometer of the first step exceeds a predetermined threshold, the main part is fixed to the base part. When the seismometer exceeds a predetermined threshold value and an earthquake that adversely affects the main part occurs, the main part can be fixed to the base part.

[0023]

Embodiments of the present invention will be described below with reference to the drawings. In the drawings, the same or corresponding members are denoted by the same reference numerals, and redundant description will be omitted.

FIG. 1 shows an exposure apparatus 1 according to a first embodiment of the present invention. The exposure apparatus 1 has a base portion 2 and a main portion 4 attached to the upper portion of the base portion 2 via a vibration isolating pad 3. The main part 4 includes an illumination system 4A, a reticle stage 4B on which a reticle (not shown) on which a pattern is formed,
The projection lens system 4C includes a wafer stage 4D on which a wafer (not shown) on which a pattern is to be exposed is placed, a gantry 4E, and a surface plate 4F. Reticle is illumination system 4A
And the wafer is at a position conjugate with the reticle with respect to the projection lens system 4C. The gantry 4E supports an illumination system 4A, a reticle stage 4B, a projection lens system 4C, and a wafer stage 4D. The gantry 4E is placed on the surface plate 4F. The fixing of the exposure apparatus 1 to the floor 26 is performed by the metal fitting 2A.
Are installed around the required number of bases 2 and the metal fittings 2A are attached to the floor 2
6 and to the base 2 using bolts 22.

The bottom surface of the surface plate 4F is in contact with the upper part of the anti-vibration pad 3, and the main part 4 is placed on the anti-vibration pad 3. The fixing arm 5 as the second part of the present invention is a surface plate 4F of the main part 4.
Attached to. A first component of the present invention and a fastening component 6 as a coupling mechanism are fixed to the base portion 2. The main part 4 can be fixed to the base part 2 by engaging the fixing arm 5 and the fastening part 6 as described later. The fixing arm 5 includes a horizontal portion 5A and a vertical portion 5B, and one end of the horizontal portion 5A is fixed to a surface plate 4F of the main portion 4. The tip of the vertical portion 5B is U-shaped. The fixing arm 5 and the fastening part 6 constitute first fixing means.

Exposure apparatus 1 has a receiver (not shown) and receives an earthquake warning signal. The earthquake warning signal is transmitted when the occurrence of an earthquake of a predetermined level or more that needs to shut down the exposure apparatus 1 and operate the fastening unit 6 is detected. The anti-vibration pad 3 is made of an elastic material (rubber anti-vibration pad,
Coil springs, air springs, etc.). Further, a vibration damping device such as a dash pot may be included.

FIG. 2 is a partially enlarged view of the fastening part 6 of the present invention. The fastening part 6 has a U-shaped fixing block 7 whose upper part is opened. A fixing screw 8 disposed horizontally is fixed to the fixing block 7 at its wall portions 7A and 7B so as to be integrated, and fastening nuts 9 and 10 are disposed on the left and right of the fixing screw 8, respectively.

The U-shaped tip of the vertical portion 5B of the fixing arm 5 is disposed between the fastening nuts 9 and 10 so as to enclose the fixing screw 8. Usually, the U-shaped tip of the vertical portion 5B is connected to the fastening nut. 9 and 10, the fixing screw 8 has a gap L in the central axis direction. The gap L is determined so as not to exceed the amount of displacement of the fixing screw 8 at the tip of the vertical portion 5B in the direction of the central axis when the anti-vibration pad 3 is elastically deformed by an earthquake that does not need to operate the fastening portion 6. Can be

The fastening nuts 9 and 10 are connected to spur gears 13 and 14 via ball splines 11 and 12 that can move in the direction of the center axis of the fixing screw 8 and transmit only rotational torque. Since the spur gears 13 and 14 can only rotate around their axes from the fixed block 7 and are fixedly supported for other movements (not shown in detail),
When the spur gears 13 and 14 rotate in directions opposite to each other, the fastening nuts 9 and 10 receive torque, and move toward the vertical portion 5B of the fixing arm 5 in directions opposite to each other while rotating on the fixing screw 8.

Next, as means for rotating the spur gears 13, 14, DC motors 15, 16 driven by a battery (not shown) are connected to the spur gears 13, 14, respectively. The left and right fastening nuts 9, 10 are connected to the DC motors 15, 1
Each of the spur gears 1 attached to the tip of the rotating shaft 6
The gears 3 and 14 are rotated in opposite directions to each other, and by this rotation, they move on the fixing screw 8 toward the center as described above, and the vertical portion 5B of the fixing arm 5
Pinch the tip of.

The pressing surfaces 9A of the fastening nuts 9, 10
DC is set so that the fastening torque required for holding the vertical portion of the fixing arm 5 without slipping can be obtained.
The outputs of the motors 15 and 16 are determined.

Further, the required number of these fastening parts 6 are arranged in each direction (two horizontal directions perpendicular to each other and the vertical direction). In FIG. 1, only the fasteners 6 in one horizontal direction, which is the horizontal direction in the paper of FIG. 1, are illustrated, and only the fasteners 6 are described above. The fixing arm 5 has the same structure.

FIG. 3 shows a fastening part 6A for the vertical direction and a fixing arm 5C attached to the surface plate 4F of the main part 4.
The fixing arm 5C is horizontally attached to the surface plate 4F of the main part 4 and has only a horizontal part. The fastening part 6A has the same structure as that shown in FIG. 2, but stands up from the base part 2 by rotating the fixing screw 8 by 90 degrees so that the fixing screw 8 is vertically arranged corresponding to the fixing arm 5C. It differs from the fastening part 6 in that it is attached to the support 27.

Main Section 4 of Exposure Apparatus 1 at Shutdown
The spacing L in the central axis direction of the fixing arms 5, 5C and the fixing screws 8 of the fastening nuts 9, 10 is aligned in each part based on the position of the surface plate 4F, and the fastening of each part is completed almost simultaneously at the time of operation. It is good to be configured to do so.

As shown in FIG. 4, when the building structure is strong and the upper and lower floors oscillate in substantially the same phase, the upper surface of the exposure apparatus 1, for example, is fixed to the ceiling part, for example, to the apparatus part that oscillates more. The fixing means may be attached to the main body, thereby enabling safer fixing. In this case, the fastening component 6B is attached to the ceiling 25 of the building, and the fixing arm 5D is attached to the upper surface of the exposure apparatus 1 and has only a vertical portion.

The operation of the fastening parts 6, 6A, 6B is as follows.
It may be performed only when the measured value from the seismograph exceeds a predetermined threshold. This threshold is calculated based on the vibration that does not affect the exposure of the wafer. Therefore, even when an earthquake that is far from the epicenter and does not affect the exposure occurs, the exposure apparatus is shut down and the main part is not fixed to the base part, so that a decrease in throughput can be prevented.

FIG. 5 shows a second embodiment of the present invention, which is applied to a portion corresponding to a wafer stage as a movable portion and a wafer stage table as a supporting portion included in a stepper of an exposure apparatus. It is assumed that the main part of the exposure apparatus has the same fixing means as in the first embodiment, and the stage fixing means will be described below.

An air guide is often used for the stage of a recent stepper, and FIG. 6 shows an example of the structure, and shows only one axis. As shown in FIG. 6, the air guide includes a movable part and a support part. Guide bars 18 each having a rectangular cross section are attached to both ends of the support base 17 to form a support portion.

The upper surface of each guide bar 18
Are disposed above the upper surface of the. Each guide bar 18
A movable member 20 having a substantially U-shape is provided on the upper surface 1 of the guide bar 18.
8A, the lower surface 18B, and the side surface 18C. The movers 20 are attached to both ends of the movable body 19 and are arranged such that the upper surfaces thereof are substantially on a plane, and constitute a movable portion.

In a conventional example of an actual apparatus, a linear motor or the like is added as a mechanism for driving the movable body 19,
There is no fixing means for mechanically fixing the movable part when the device goes down.

In FIG. 6, the support 17 and the guide bar 1
8 is combined with a movable body 19 and a movable element 20 to form a stage. In the case of such an air guide, an upper surface 18 of the guide bar is provided between the guide bar 18 and the movable element 20 during use.
At A, it floats by air pressure while maintaining the gap G1 and the gap G2 at the side surface 18C of the guide bar.

FIG. 7 shows an air guide in a state where the apparatus is down, in a state where the gap G1 in the direction of gravity has become zero and the upper surface 18A of the guide bar 18 and the mover 20 are in contact. This state is a stable state of the air guide when the device is down. In this state, the lower surface of the movable body 19 is not in contact with the upper surface of the support base 17.

In the wafer stage shown in FIG. 5, a stopper mechanism 23 as a second fixing means for fixing the mover 20 of the stage is provided on the inner ceiling of the mount 21 surrounding the mover 19 and the mover 20. , At positions indicated by point P (three places) in FIG.

FIG. 8 is a view as seen from the direction of arrows EE in FIG. Two of the P points are set side by side in one longitudinal direction of two guide bars 18 provided on both sides of the support base 17.
One of the points P is set at the longitudinal center of the other guide bar 18. The stopper mechanism 23 is a DC (not shown).
This is a mechanism for vertically moving a pressing pin 24 provided vertically on the upper surface of the mover 20 using a motor.
As a result, the mover 20 of the stage is pressed against the upper surface 18A of the guide bar 18 from above. At this time, the stopper mechanism 23 is arranged in a plane. In the case where there are two stopper mechanisms, the center of gravity of the movable body 19 is interposed at two places. It is effective to arrange so as to surround it, and the pressing force required for fixing is optimized based on the weight of the entire movable part.

Since the reticle stage has the same structure as that of FIG. 6 for supporting the reticle stage on the reticle stage table, the stopper mechanism 23 as the second fixing means can be attached to the reticle stage. Similar effects can be obtained.

The operation of the fixing means (fixing arms 5, 5C and fastening parts 6, 6A) of the main part 4 described above when an earthquake occurs will be described below.

Exposure apparatus 1 having received a P-wave (longitudinal wave having a fast propagation velocity, ie, initial tremor wave) detection signal of an earthquake of a predetermined level or higher by a receiver starts a shutdown operation of exposure apparatus 1 and simultaneously performs image stabilization. The fastening parts 6 and 6A as fixing means of the main part 4 on the pad 3 operate, but the DC motors 15 and 16 of the fastening parts 6 and 6A are driven by a battery even when the power supply of the apparatus is turned off. Then, the DC motors 15 and 16 can start rotating.

The rotation of the DC motors 15 and 16 causes the fastening nuts 9 and 10 to rotate and move along the fixing screws 8 toward the fixing arms 5 and 5C. The main part 4 can be fixed to the base part 2 by pressing the fixing arms 5 and 5C against the tip of the base part 2.

The earthquake detection signal includes a P-wave detection signal from an exposure apparatus or a seismometer installed in the vicinity, earthquake information transmitted as an electric signal or the like from a seismometer installed in a remote place (for example, stopping a railway). (Earthquake warning signal), or two microtremor signals from seismometers installed at least at two points at a predetermined distance.

Next, the operation of the fixing means (stopper mechanism 23) of the movable portion (movable body 19 and movable element 20) of the air stage in the exposure apparatus will be described.

Similar to the fixing means of the main part 4, the following operation starts when the earthquake receiver receives the P-wave detection signal of the earthquake of a predetermined level or more. First, at the same time as detecting the earthquake warning signal, the movable body 19
When the supply of air to the air stage is also stopped at the same time, if the supply of air can be ensured even in a short time, the gap G1 becomes zero after moving to the fixed position, and the apparatus starts shutting down. Since the supply of the pressurized air to the air guide is stopped, the air guide is in the stable state shown in FIG. 7 in the fixed position. Subsequently, the stopper mechanism 23 operates. Even if the power of the apparatus is turned off, the power of the fixing means is a DC motor driven by a battery, so that a desired operation can be continued in conjunction with the shutdown of the apparatus.

A fixing means having a structure as shown in FIG. 10 can be used as the first fixing means for the horizontal direction of the mechanical device 1A. The inclined surface 42 is provided on two opposite side surfaces of the vertical portion 45B of the fixing arm attached to the main portion,
A box-shaped fastening part 4 in which the vertical part 45B is open at the top
1 and an inclined surface 43 having the same inclination angle is also provided on the inner side surface of the fastening component 41 facing the inclined surface 42 of the vertical portion 45B so that both inclined surfaces 42 and 43 become V-shaped. To When an earthquake occurs, the two inclined surfaces 4
A pair of wedges 44 having the same angle as 2 and 43 may be dropped on the inclined surface 42 of the vertical portion 45B of the fixing arm and the inclined surface 43 inside the fastening component 41. In order to drop, a gravity may be used, or an urging force by a spring, an electromagnetic force, or a fluid pressure may be used. When this structure is adopted, a simple and inexpensive fastening part can be obtained.

The apparatus having a structure obtained by rotating FIG. 10 by 90 degrees can be used for a stopper mechanism (fixing the vertical movement) as first and second fixing means for the vertical direction. Good. In this case, since the wedge moves in the horizontal direction, it is necessary to use a biasing force of a spring, an electromagnetic force, a fluid pressure, and the like.

Receiving an earthquake detection signal; and fixing a main part of the exposure apparatus to a base part supporting the main part via an anti-vibration pad in accordance with the received earthquake detection signal. According to the operation method of the exposure apparatus including the above, the main part of the exposure apparatus can be securely fixed to the base part in the event of an earthquake, and the influence of the vibration caused by the earthquake inside and outside the exposure apparatus can be minimized.

[0055]

As described above, according to the present invention, since the first fixing means for fixing the main portion on the vibration isolating pad to the base portion is provided, the main portion of the mechanical device is fixed to the base portion when an earthquake occurs. Since the main part can be fixed, the main part does not fall off from the mechanical device due to the earthquake or hit the device or the like, so that the safety effect is high. Furthermore, during normal use, the basic part and main part are vibrated, and there is no vibrating connection, so that the function of the vibration isolating pad is not hindered and the transmission of vibration is cut off. There is no.

When the main part has a movable part and a support part,
With the second fixing means for fixing the movable part to the support part, the movable part can be fixed to the support part when an earthquake occurs. There is no collision with other parts. When the movable part is supported by the support part via a fluid, there is no direct contact between the movable part and the support part at the time of normal use, so that functions such as vibration isolation of the fluid are not hindered, and There is no change in performance.

Since there is provided a fixing means for fixing the substrate stage on the vibration-proof pad to the base, the substrate stage of the exposure apparatus can be fixed to the base when an earthquake occurs. Does not fall off from the exposure apparatus due to an earthquake or hits the exposure apparatus or the like, and the safety effect is high. Furthermore, when a normal exposure apparatus is used, the substrate stage and the base are vibrated off, and there is no vibrating connection, so that the function of the anti-vibration pad is not hindered, and the transmission of vibration is interrupted, so that the performance of the exposure apparatus is reduced. There is no change.

Since the fixing means comprises a first component attached to the base, a second component attached to the substrate stage, and a coupling mechanism for coupling these components when an earthquake occurs, the substrate stage can be securely connected with a simple structure. It can be fixed to the base.

When a seismometer is included in the detection means for detecting an earthquake, the earthquake can be reliably detected, and when a receiver for receiving an earthquake warning signal is attached, the occurrence of the earthquake can be confirmed even at a distance. When the seismometer detects a vibration other than an earthquake, it is possible to prevent the fixing means from operating. In addition, upon receiving a public earthquake warning signal detected by the receiver near the epicenter, the fixing means can be activated simultaneously with the occurrence of an earthquake.

[Brief description of the drawings]

FIG. 1 is a front view of an exposure apparatus according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a fastening component of the exposure apparatus of FIG.

FIG. 3 is an enlarged view of a fastening part for a vertical direction in the front view of the exposure apparatus of FIG. 1;

FIG. 4 is a front view of an exposure apparatus according to another embodiment of the present invention.

FIG. 5 is a sectional view of a substrate stage table and its peripheral portion of an exposure apparatus according to a second embodiment of the present invention.

FIG. 6 is a sectional view of a substrate stage of the exposure apparatus of FIG.

FIG. 7 is a cross-sectional view of the substrate stage when the exposure apparatus of FIG. 5 is shut down.

FIG. 8 is a view of the substrate stage of the exposure apparatus of FIG.

FIG. 9 is a front view of a conventional exposure apparatus.

FIG. 10 is a partial conceptual diagram illustrating a fastening part using a wedge.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Exposure apparatus 2 Basic part 2A metal fitting 3 Vibration-proof pad 4 Main part 4A Illumination system 4B Reticle stage 4C Projection lens system 4D Wafer stage 4E Mounting base 4F Surface plate 5 Fixing arm 5A Horizontal part 5B Vertical part 5C Fixing arm 6 Fastening parts 6A fastening parts 6B fastening parts 7 fixing block 7A wall 7B wall 8 fixing screw 9 fastening nut 9A holding surface 10 fastening nut 10A holding surface 11,12 ball spline 13,14 spur gear 15,16 DC motor 17 support Table 18 Guide bar 18A Upper surface 18B Lower surface 18C Side surface 19 Movable body 20 Movable element 21 Mount 22 Bolt 23 Stopper mechanism 24 Pressing pin 25 Ceiling 26 Floor surface 27 Support 31 Mechanical device 32 Base 32A Metal fitting 33 Vibration-proof pad B 34 Main part 35 Fixing arm 36, 41 Fastening Article 42, 43 inclined surface 44 wedge 45B vertical portion

Claims (10)

[Claims] 1. A mechanical device in which a main part is isolated from a base part, a vibration isolating pad for isolating the main part from the base part, a detection unit for detecting an earthquake, and an output of the detection unit. First fixing means for fixing the main part to the base part. 2. The main part comprises: a movable part; a support part for supporting the movable part; and a second fixing means for fixing the movable part to the support part using an output of the detection means. 2. The method according to claim 1, wherein
The mechanical device according to claim 1. 3. The mechanical device according to claim 2, wherein the support section supports the movable section via a fluid. 4. The mechanical device according to claim 3, wherein the mechanical device is an exposure device for a semiconductor, and the support unit supports the movable unit via pressurized air. 5. An exposure apparatus for transferring a pattern formed on a mask onto a substrate, comprising: a base portion; a substrate stage table provided on the base portion via an anti-vibration pad; An exposure apparatus, comprising: fixing means for fixing the substrate stage base to the base portion using an output of the detecting means. 6. The detecting means according to claim 1, wherein said fixing means comprises a first component attached to said base portion, a second component attached to said substrate stage, and said first component and said second component. 6. The exposure apparatus according to claim 5, comprising a coupling mechanism that couples using an output. 7. An exposure apparatus according to claim 5, wherein said detecting means includes a seismometer. 8. An exposure apparatus according to claim 5, wherein said detecting means includes a receiver for receiving an earthquake warning signal. 9. A method for operating an exposure apparatus provided on a base part and having a main part for transferring a pattern formed on a mask onto a substrate, comprising: a first step of detecting an earthquake; A second step of fixing the main part to the base part when an earthquake is detected in the step. 10. The method according to claim 1, wherein the first step is performed by using a seismometer provided in the exposure apparatus. The second step is performed when the seismometer of the first step exceeds a predetermined threshold. The method according to claim 9, wherein the main part is fixed to the base part.