JPH10328954A - Positioining table device and estimation of initial position - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform the initializing operation of a table even when a sensor for switching a phase, which is separated from that for controlling the positioning, is temporarily excluded, by estimating an absolute position of a coil of a multiphase motor and a magnet, on the basis of an energized coil and the result of the judgement of the same. SOLUTION: A means for carrying the constant current to one coil 43 to judge whether a table 1 is stopped at a position where the magnetic field is balanced or not, is installed. The next coils 44 are successively energized when the table 1 is not stopped, to determine the position where a stage is to be stopped, and the positional relationship of a coil of a multiphase motor and a magnet is determined on the basis of the result thereof. That is, the rough initial position of the table 1 is estimated. Then the addition and subtraction of a signal from a linear scale 7 is performed to the coordinates, for properly switching the switch on the phase switching position. As the result, of the same, the initializing operation to an original switch 9, can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning table device and an initial position estimating method for use in a semiconductor exposure apparatus or a machine tool, and more particularly to a position detector for detecting a position of a table on which a tool or a workpiece is mounted. The present invention relates to a positioning table device provided with a polyphase type motor for selectively switching coils to be energized according to the position of a table, and a method for estimating an initial position of such a device.

[0002]

2. Description of the Related Art FIGS. 10 and 11 show a schematic configuration of a conventional positioning table device. FIG. 10 shows an example in which a preload magnet 17 is added to that of FIG. A conventional positioning table device as shown in these figures is a linear motor coil 4 in which four-phase coils 41 to 44 are arranged in a straight line.
It has. The linear motor coil 4 is supported by the coil support member 3, and a pair of guides 2 is provided in parallel with the direction in which the coils constituting the linear motor coil 4 are arranged. A table top 1 is attached to the guide 2 via a static pressure bearing 6, and the table top 1 is freely guided by the guide 2 in the direction in which the coils 4 are arranged. The preload magnet 17 shown in FIG. 10 is attached to the table top plate 1 and applies a preload by attracting a guide (magnetic material) in order to keep the gap between the hydrostatic bearings 6 at a predetermined value (several μm). A movable magnet 5 is attached to the table top 1, and the movable magnet 5
As shown in FIG. 9, four pairs of permanent magnets are alternately arranged in the direction in which the coils 4 are arranged with alternating polarities.

A table top 1 is provided beside the guide 2.
Is provided with a position detector 7 such as a linear scale for detecting the position. In particular, in a semiconductor exposure apparatus or the like that requires high positioning accuracy, a laser length measuring device is used as a position detector. An up / down (incremental) signal is output from the position detector 7 according to the moving direction of the table, and the position information of the table is obtained by counting this signal by the counter unit 11. However, in order to obtain the absolute position of the table, it is necessary to drive the table and initialize the counter unit 11 until the light shielding plate 8 attached to the table passes through the origin photoswitch 9 (this operation is performed when the table is initialized. ).

FIG. 9 shows an energizing pattern for the linear motor coil 4 in a positioning table device having such a polyphase linear motor. In the drawing, symbols A and B indicate the direction of the current flowing through each coil, symbol B indicates the current facing forward when viewed from the front of the drawing, and symbol A indicates the direction of the current flowing in the opposite direction. As shown in (Case 0) to (Case 9) of FIG. 9, the direction of the coil to be energized and the direction of the current flowing through the coil are switched according to the positional relationship with the movable magnet 5, and the thrust is generated in the same direction. The table is moved while the magnet 5 is moved in a predetermined direction.

For example, in Japanese Patent Application Laid-Open No. 06-165471, the polarity (N-pole, S-pole) of the movable magnet 5 is determined by a field detector (such as a Hall element) 10 disposed on the coil support member 3.
The phase switching controller 13 controls the switch 15 appropriately in accordance with the signal from the field detector 10 and the positional relationship between the movable magnet and the coil as shown in FIG. . A coil phase is connected to each switch 15 via a current amplifier 16, and the switch 15 is switched and controlled by a coil selection signal output from a phase switching controller 13 to energize each coil.

[0006] A servo controller 12 is connected to the counter unit 11, and the servo controller 12 obtains a control output by, for example, PID calculation of a difference between a target position of the table 1 and a current position obtained from the counter unit 11. This is output to the D / A converter 14 as a command value to perform positioning control. The output of the D / A converter 14 is supplied to each coil 4 via a switch 15 and a current amplifier 16, and the current is supplied to each coil 4.

[0007]

However, in the above-mentioned prior art, the position of the movable magnet is detected using the field detector to switch the phase of the multi-phase motor. There is. (1) It is necessary to manufacture an expensive coil unit incorporating a field detector. (2) It is troublesome and troublesome to route a large number of wires from the field detector, and there is a risk of disconnection or the like, and the reliability is lacking. (3) If even one field detector is damaged, the table does not operate properly.

Therefore, it is conceivable to perform the phase switching of the polyphase type motor using only the position detector (linear scale) for positioning control without the field detector. However, if the sensor (field detector) for phase switching is easily removed, the positional relationship between the coil and the movable magnet is unknown immediately after the positioning device is started, and which coil should be energized in which direction? As a result, it is impossible to perform the initialization operation up to the origin switch. In the above-mentioned incremental type position detector,
This is because the absolute position is not known until the table has passed the home switch.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned drawbacks of the prior art, and is directed to a positioning table apparatus provided with a position detector for detecting a position of a table, a polyphase motor, and a hydrostatic bearing. It is another object of the present invention to provide an inexpensive and highly reliable positioning device capable of performing a table initialization operation even if any phase switching sensor (field detector) other than the positioning control sensor is eliminated.

[0010]

According to a first aspect of the present invention, a magnetic pole for generating a plurality of magnetic fields having alternately different polarities, and a plurality of coils disposed opposite to the magnetic field are provided. By selectively switching the coil to be energized according to the positional relationship between the magnetic field and the coil,
In a positioning table apparatus including a linearly driven polyphase motor, a table moved and positioned by the motor, and position detecting means for detecting a position of the table, a predetermined order is applied to one or a plurality of coils. It is determined whether or not the table is stopped at a position where the magnetic field is balanced by the application of the constant current, and the positional relationship between the coil and the magnet of the polyphase type motor is determined based on the energized coil and the determination result. It is characterized in that the absolute position of the table is estimated.

According to a second aspect of the present invention, there is provided a magnetic pole for generating a plurality of magnetic fields having different polarities alternately, and a plurality of coils arranged opposite to the magnetic field. By selectively switching the coil to be energized according to the relationship, a polyphase motor that drives linearly,
A table moved and positioned by this motor,
Further, in a positioning table device provided with position detecting means for detecting the position of the table, a predetermined alternating current is sequentially applied to the respective coils to excite the table, and the displacement of the table when the respective coils are energized is measured. It is characterized in that the absolute position of the table is estimated as a positional relationship between a coil and a magnet of a polyphase motor based on the measurement result based on the output of the position detecting means.

These absolute position estimating methods estimate the initial position of the table which cannot be detected by the position detecting means when the apparatus is started up, particularly when the position detecting means is a relative position detecting means for detecting the amount of movement of the table. Therefore, it can be suitably used.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In a preferred embodiment of the present invention, a magnetic pole for generating a plurality of magnetic fields having alternately different polarities and a plurality of coils arranged opposite to the magnetic field are provided. A multi-phase motor driven linearly by selectively switching coils to be energized in accordance with the positional relationship with the table, a table moved and positioned by the motor, and position detection for detecting the position of the table In a positioning table device provided with means,
A means for determining whether or not the table stops at a position where the magnetic field is balanced by applying a constant current to one coil is provided.If the table does not stop, the next coil is sequentially energized to determine the position at which the stage stops. Means for obtaining the positional relationship between the coils and the magnets of the polyphase motor based on the result of (1).

Here, the position detecting means usually includes an origin detecting means for detecting that the table is located at a predetermined origin position, and an amount of movement of the table based on the detected position. It has a moving amount measuring means for measuring. Further, there is provided a means for driving the table in the direction of the origin so as to allow the origin detection means to detect the origin based on the obtained positional relationship, thereby performing an initialization operation.

According to another preferred embodiment of the present invention, a magnetic pole for generating a plurality of magnetic fields having polarities alternately different from each other and a plurality of coils arranged opposite to the magnetic field are provided. By selectively switching the coil to be energized according to the relationship, a polyphase motor driven linearly, a table moved and positioned by the motor, position detecting means for detecting the position of the table, and In a positioning table device having guide means for guiding a table through a static pressure bearing in a driving direction of the motor, a predetermined sine wave current is applied to each coil to excite the table, and the amplitude of table displacement is measured. And the phase relationship between the displacement direction and the conduction current is sequentially measured, and the positional relationship between the coil and the magnetic pole of the polyphase motor is obtained based on the measurement results. Having position estimation means.

Here, the position detecting means usually includes origin detecting means for detecting that the table is located at a predetermined origin position, and an amount of movement of the table based on the detected position. It has a moving amount measuring means for measuring. Further, there is provided a means for driving the table in the direction of the origin so as to allow the origin detection means to detect the origin based on the obtained positional relationship, thereby performing an initialization operation.

[0017]

According to the above arrangement, it is possible to determine whether or not the table is stopped at a position where the magnetic field is balanced by supplying a constant current to the coil, and based on these measurement results, the positional relationship between the coil and the magnetic pole of the polyphase motor is determined. can get. Alternatively, a predetermined sine wave current is applied to each coil to vibrate the table, and the amplitude of the table displacement is sequentially measured by the position detecting means,
From these measurement results, the positional relationship between the coil and the magnetic pole of the polyphase motor can be obtained. Therefore, even if any phase switching sensor different from the positioning control sensor is deleted, the initialization drive up to the origin switch is performed based on the obtained positional relationship. Therefore, an inexpensive and highly reliable positioning device is provided.

[0018]

Embodiments of the present invention will be described below with reference to the drawings. Embodiment 1 FIG. 1 is a schematic configuration diagram of a positioning table device according to an embodiment of the present invention. This positioning table device includes a linear motor coil 4 in which four-phase coils 41 to 44 are arranged in a straight line. The linear motor coil 4 is supported by the coil support member 3, and a pair of guides 2 is provided in parallel with the direction in which the coils constituting the linear motor coil 4 are arranged. A table top 1 is attached to the guide 2 via a static pressure bearing 6, and the table 2 is freely guided by the guide 2 in the direction in which the coils are arranged. In the positioning table using the static pressure bearings as described above, the preload magnet 17 is arranged to maintain the gap between the static pressure bearings at a predetermined value (several μm), and absorbs a guide (magnetic material) to apply a preload. A movable magnet 5 is attached to the table top 1, and the movable magnet 5 is configured by arranging four pairs of permanent magnets (see FIG. 9) with alternating polarities in the direction in which the coils are arranged.

A table top 1 is provided beside the guide 2.
Is provided with a position detector 7 such as a linear scale for detecting the position. In particular, in a semiconductor exposure apparatus or the like that requires high positioning accuracy, a laser length measuring device is used as a position detector. An up / down signal is output from the position detector 7 in accordance with the moving direction of the table. The up / down signal is taken into the counter unit 11 and counted to obtain table position information. However, in order to obtain the absolute position of the table, it is necessary to drive the table until the origin photo switch 9 detects the light shielding plate 8 attached to the table, and to initialize the counter unit 11 with the detection output. Coil 41 to 44 of linear motor coil 4
The energization pattern is the same as in FIG.

FIG. 2 shows a case where a constant current is applied to one coil (for example, the coil 43) of the polyphase type motor. When the magnetic field (generated thrust) is in a balanced positional relationship as shown in FIGS. 2A and 2B, the generated thrust is balanced and the table stops at that location.

FIG. 3 shows the thrust generated when a constant current is applied to each of the coils 41 to 44 in the respective positional relationships (cases 0 to 9) between the coils and the magnets in FIG. Here, for explanation, the phase switching pitch is 10 m.
m, the generated thrust is about 10N.

Next, the movable magnet 5 and the coil 4 (41 to 4)
The procedure for estimating the positional relationship 4), that is, the absolute position of the table, will be specifically described with reference to FIG. First, while applying a constant current to the coil 41, the position of the table is observed to determine whether or not the table has stopped. When the table is in the vicinity of 0 to 35 mm, the generated thrust acts to move the table to the position a, so that a
Stop nearby. It is known in advance that a has an absolute coordinate of 15 mm.

When the table is in the vicinity of 35 to 100 mm, the table cannot be stopped at a fixed position even if the coil 41 is energized. These can be determined by observing the position of the table while applying a constant current to the coil 41. In this case, the coil 43 is energized next. This time, unlike the case where the coil 41 is energized, the table is b
It is conceivable to stop at two points (the pattern in FIG. 2A) and c (the pattern in FIG. 2B). To determine the positions of b and c, a small current is applied to the next coil 44. It can be observed that the position of the table does not fluctuate in b (d) because no thrust is generated, whereas the position of the table is greatly displaced in c (e) because the thrust is large. Therefore, even if the coil 43 is energized and the table stops at two places, the table d is 33 mm and e is 7
It can be determined that the vehicle stops around 5 mm. The table initial position estimating unit 18 outputs a command for flowing a constant current to D
A / A converter 14 and a phase selection signal for phase switching at the time of measurement are output to phase switching controller 13 to determine whether the table has stopped and to estimate the absolute position.

However, the absolute coordinates of the table estimated here are approximate values including an error (± several mm) that does not hinder the switching of the phase of the polyphase motor. After that, it is necessary to drive the table to the origin switch to initialize the counter unit. If the approximate initial position of the table can be estimated, the switch 15 can be appropriately switched at the phase switching position by adding or subtracting the signal from the linear scale 7 to the estimated coordinates. As a result, the origin switch 9 It is possible to perform the initialization operation up to this point.

A coil phase is connected to each switch 15 via a current amplifier 16, and the switch 15 is switched by a coil selection signal output from a phase switching controller 13.
Are controlled to switch the current to each coil.
The servo controller 12 is connected to the counter unit 11, and calculates a difference between the target position of the table and the current position obtained from the counter unit 11, for example, PID calculation, and outputs it as a control output to the D / A converter 14 as a command value. Performs positioning control.

As described above, according to the present embodiment, means is provided for determining whether or not the table stops at a position where the magnetic field is balanced by supplying a constant current to one coil. The position at which the stage stops by sequentially energizing the coil is obtained, and the positional relationship between the coil and the magnet of the polyphase motor can be obtained from these results. Therefore, a phase switching sensor (field detection ), The table can be initialized. Therefore, an inexpensive and highly reliable positioning device can be provided.

Embodiment 2 FIG. 5 is a schematic structural view of a positioning table apparatus according to a second embodiment of the present invention. This positioning table device
A linear motor coil 4 in which four-phase coils 41 to 44 are arranged in a straight line is provided. The linear motor coil 4 is supported by the coil support member 3, and the linear motor coil 4
A pair of guides 2 parallel to the direction in which the coils constituting
Is provided. A table top 1 is attached to the guide 2 via a static pressure bearing 6, and the table 2 is freely guided by the guide 2 in the direction in which the coils are arranged. A movable magnet 5 is attached to the table top 1, and the movable magnet 5 is configured by arranging four pairs of permanent magnets in the direction in which the coils are arranged, with alternating polarities.

A table top 1 is provided beside the guide 2.
Is provided with a position detector 7 such as a linear scale for detecting the position. In particular, in a semiconductor exposure apparatus or the like that requires high positioning accuracy, a laser length measuring device is used as a position detector. An up / down signal is output from the position detector 7 in accordance with the moving direction of the table. The up / down signal is taken into the counter unit 11 and counted to obtain table position information. However, in order to obtain the absolute position of the table, it is necessary to drive the table until the origin photo switch 9 detects the light shielding plate 8 attached to the table, and to initialize the counter unit 11 with the detection output. Coil 41 to 44 of linear motor coil 4
The energization pattern is the same as in FIG.

FIG. 6 shows a positioning table device using this hydrostatic bearing 6 by applying a predetermined sine wave current to one of the coils 41 to 44 of a polyphase type motor to vibrate the table. It shows that the amplitude proportional to the generated thrust of the motor at the position is measured. The magnitude Vr and the cycle Fr of the current need to be determined so that the calorific value during measurement does not become too large.

In this figure, the command current is shown only for one cycle. However, the accuracy of estimation is improved when the command current for several cycles is passed and the measured displacement is averaged. Further, since the phase of the vibration waveform with respect to the command current changes depending on the positional relationship between the magnet 5 and the coils 41 to 44, the amplitude (max) is observed while observing these signs together. p)
Ask for.

FIG. 7 shows the amplitude measured when a constant sinusoidal current is applied to each of the coils 41 to 44 in the respective positional relationships (cases 0 to 9) between the coils and the magnets in FIG. Here, for explanation, the phase switching pitch is 10
mm, the table position is up to about 100 for the command current.
The displacement is about μm. Next, a procedure for estimating the positional relationship between the movable magnet and the coil, that is, the absolute position of the table, will be described based on specific numerical examples with reference to FIGS.

First, as shown in FIG.
4 is sequentially supplied with a predetermined sine wave current, and the displacement before and after the supply is sequentially measured. If the amplitude and phase are measured, for example, the following measurement values can be obtained.

[0033]

(Equation 1) Since there is no friction in a table device using a static pressure bearing, it is conceivable that the table may move from the measurement start point for some reason during measurement. However, the difference Δx between the position of the table when the initial position estimation is started and the center value of the amplitude of the table displacement when the respective coils are energized and vibrated.
Can be used to correct the measurement result.

Next, it is determined which case in FIG. 7 corresponds to the maximum value and the sign of the four measurement data. In the case of the above measurement values, the data of the coil 42 is the largest,
It can be seen from FIG. 7 that there are two cases (case ▼ in FIG. 7) that correspond to this. Further, by comparing the displacement (▽) of the coil 4, it can be seen that this case corresponds to case 1 of the above two cases.

Next, in the corresponding case number, a detailed coordinate p in the case using the coil used for the coordinate calculation, that is, the gradient of the displacement in the case. fi
A coil suitable for obtaining ne is uniquely determined. Suitable gradients in each case are indicated by ★. As can be seen from FIG. 3, p in the gradient portions a ★, b ★, c ★, d ★ The fine can be represented by the following four arithmetic expressions (a) to (d).

[0036]

(Equation 2)Here, the phase switching pitch pitch = 10 mm, the phase switching
Displacement max when changing p = 100 μm, d [n] is coordinate function
The displacement value measured for the arithmetic reference coil (★)
You.

In case 1 described above, the coil 41 becomes a coordinate calculation coil (★), and d [n] = d [1] = 5
0 μm, the arithmetic expression is (Expression a). If you specifically substitute a numerical value

[0038]

(Equation 3) Becomes

The final coordinates are: coordinate = pitch × case number + p It is determined by fine. In case 1 described above, coordinates = 10 × 1 + 7.5 = 17.5 (m
m), and the absolute coordinates of the table are obtained.

The above control and calculation are performed by the table initial position estimating unit 18.
Outputs a command for flowing a predetermined sine wave current to the D / A converter 14 and a phase selection signal for sequentially switching phases during measurement to the phase switching controller 13.

However, the absolute coordinates of the table estimated here are approximate values including an error (± several mm) that does not hinder the switching of the phase of the polyphase type motor. Then, it is necessary to drive the table to the origin switch to initialize the counter unit. If the approximate initial position of the table can be estimated, the switch 15 can be appropriately switched at the phase switching position by adding or subtracting the signal from the linear scale 7 to the estimated coordinates. As a result, the origin switch 9 It is possible to perform the initialization operation up to this point.

A coil phase is connected to each switch 15 via a current amplifier 16, and the switch 15 is switched by a coil selection signal output from a phase switching controller 13.
Are controlled to switch the current to each coil.
A servo controller 12 is connected to the counter unit 11, and calculates a difference between the target position of the table and the current position obtained from the counter unit 11, for example, PID calculation, and outputs it as a control output to the D / A converter 14 as a command value. And performs positioning control.

As described above, according to this embodiment, a predetermined sine wave current is sequentially applied to each coil to vibrate the table, and the amplitude of the table displacement is sequentially measured by the position detecting means. Since the positional relationship between the coil and magnetic pole of the multi-phase motor is obtained from the measurement results, even if any phase switching sensor (field detector) other than that for positioning control is eliminated, the table can be initialized. The operation can be performed. Therefore, an inexpensive and highly reliable positioning device can be provided.

[0044]

[Embodiment of Device Production Method] Next, an embodiment of an exposure apparatus using the above-described positioning table apparatus or the initial position estimation method or a device production method using the exposure method will be described. FIG. 12 shows a flow of manufacturing micro devices (semiconductor chips such as ICs and LSIs, liquid crystal panels, CCDs, thin-film magnetic heads, micromachines, etc.). In step 1 (circuit design), a device pattern is designed. Step 2 is a process for making a mask on the basis of the designed pattern. On the other hand, in step 3 (wafer manufacture), a wafer is manufactured using a material such as silicon or glass. Step 4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 5 (assembly) is called a post-process, and is a process of forming a semiconductor chip using the wafer produced in step 4, and includes processes such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). including. In step 6 (inspection), inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in step 5 are performed. Through these steps, a semiconductor device is completed and shipped (step 7).

FIG. 13 shows a detailed flow of the wafer process. Step 11 (oxidation) oxidizes the wafer's surface. Step 12 (CVD) forms an insulating film on the wafer surface. Step 13 (electrode formation) forms electrodes on the wafer by vapor deposition. In step 14 (ion implantation), ions are implanted into the wafer. Step 1
In 5 (resist processing), a photosensitive agent is applied to the wafer. Step 16 (exposure) uses the exposure apparatus having the above-described alignment apparatus to print and expose the circuit pattern of the mask onto the wafer. Step 17 (development) develops the exposed wafer. In step 18 (etching), portions other than the developed resist image are removed. Step 19
In (resist removal), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer.

By using the production method of this embodiment, a highly integrated device, which was conventionally difficult to produce, can be produced at low cost.

[0047]

As described above, according to the present invention, the initialization operation of the table can be performed without any phase switching sensor (field detector) other than the positioning control. Becomes Therefore, an inexpensive and highly reliable positioning device can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a positioning table device according to an embodiment of the present invention.

FIG. 2 is an operation explanatory view of the positioning table device of FIG. 1;

FIG. 3 is a diagram showing a generated thrust when a current is supplied to a polyphase linear motor coil of the apparatus of FIG. 1;

FIG. 4 is an explanatory diagram of an operation of position estimation in the apparatus of FIG. 1;

FIG. 5 is a schematic configuration diagram of a positioning table device according to another embodiment of the present invention.

6 is an operation explanatory view of the positioning table device of FIG. 5;

7 is a diagram showing a displacement amount when current is supplied to each phase of the polyphase linear motor coil of the device of FIG. 5;

FIG. 8 is a sequence diagram of displacement measurement in the apparatus of FIG.

FIG. 9 is a diagram showing an energization pattern of a polyphase linear motor coil.

FIG. 10 is a schematic configuration diagram of a conventional positioning table device.

FIG. 11 is a schematic configuration diagram of another conventional positioning table device.

FIG. 12 is a diagram showing a flow of manufacturing a micro device.

13 is a diagram showing a detailed flow of the wafer process in FIG.

[Explanation of symbols]

1: Table top plate, 2: Guide, 3: Coil support member,
4: linear motor coil, 5: movable magnet, 6: static pressure bearing, 7: position detector (linear scale), 8: light shielding plate,
9: origin photo switch, 11: counter unit, 1
2: servo controller, 13: phase switching controller, 14: D / A converter, 15: switch, 16:
Current amplifier, 17: preload magnet, 18: table initial position estimating unit.

Continued on the front page (51) Int.Cl. ⁶ Identification code FI B23Q 1/28

Claims (15)

[Claims] 1. A magnetic pole for generating a plurality of magnetic fields having alternately different polarities, and a plurality of coils arranged opposite to the magnetic field, and a coil to be energized is selected according to a positional relationship between the magnetic field and the coils. In a positioning table device including a multi-phase motor that is driven linearly, a table that is moved and positioned by the motor, and a position detection unit that detects the position of the table, one or more A constant current is sequentially supplied to the coils in a predetermined order, and it is determined whether or not the table stops at a position where the magnetic field is balanced by the supply of the current, and the coil of the polyphase motor is determined based on the supplied coil and the determination result. A positioning table device comprising an absolute position estimating means for estimating an absolute position of the table as a positional relationship between magnets. 2. The origin detecting means, wherein the position detecting means detects that the table is located at a predetermined origin position,
2. The positioning table apparatus according to claim 1, further comprising a moving amount measuring means for measuring a moving amount of the table based on the position at which the origin is detected. 3. The means for driving the table in the direction of the origin so that the origin detecting means can detect the origin based on the positional relationship obtained by the absolute position estimating means, and performing the initialization operation. The positioning table device according to claim 2, further comprising: 4. The apparatus according to claim 1, wherein said absolute position estimating means determines whether or not the table has stopped at the time of supplying said constant current based on an output of said position detecting means.
4. The positioning table device according to any one of 3. 5. The positioning table device according to claim 1, wherein said table is guided by a guide means in a driving direction of said motor via a static pressure bearing. 6. The positioning table apparatus according to claim 5, wherein said table has means for applying a preload to said hydrostatic bearing by sucking said guide means. 7. A coil having a magnetic pole for generating a plurality of magnetic fields having alternately different polarities, and a plurality of coils disposed opposite to the magnetic field, and selecting a coil to be energized according to a positional relationship between the magnetic field and the coil. In the positioning table device including a polyphase motor driven linearly by changing the position, a table moved and positioned by the motor, and a position detecting means for detecting the position of the table, each of the coils A predetermined alternating current is sequentially applied to the table to vibrate the table, and the displacement of the table when applying current to each coil is measured based on the output of the position detecting means. A positioning table device comprising an absolute position estimating means for estimating an absolute position of the table as a positional relationship between a coil and a magnet. 8. The positioning table device according to claim 7, wherein said table is guided by a guide means in a driving direction of said motor via a static pressure bearing. 9. The positioning table device according to claim 8, wherein said alternating current is a sine wave current. 10. An absolute position estimating means based on a deviation amount between a table position at the time of starting an absolute position estimation and a center value of an amplitude of a table displacement when each coil is energized and vibrated. 10. The positioning table device according to claim 9, wherein the measurement result is corrected. 11. The position detecting means for detecting that the table is located at a predetermined origin position, and measuring the amount of movement of the table with reference to the position at which the origin was detected. The positioning table device according to claim 10, further comprising a movement amount measuring unit. 12. The apparatus according to claim 1, wherein the position detecting means is configured to move the table in the direction of the origin so that the origin detecting means can detect the origin based on the positional relationship obtained by the absolute position estimating means when the positioning table device is started up. 12. The positioning table device according to claim 11, further comprising: means for performing an initialization operation. 13. A coil having a magnetic pole for generating a plurality of magnetic fields having alternately different polarities and a plurality of coils arranged opposite to the magnetic field, and selecting a coil to be energized according to a positional relationship between the magnetic field and the coil. In the positioning table device including a multi-phase motor driven linearly, a table moved and positioned by the motor, and a position detecting means for detecting the position of the table, the initial state of the table is changed. A method for estimating a position, in which a constant current is sequentially supplied to one or a plurality of coils in a predetermined order, and it is determined whether or not the table stops at a position where a magnetic field is balanced by the supply of current, and the supplied coils and the determination thereof are performed. Estimating an initial position of the table as a positional relationship between a coil and a magnet of the polyphase type motor based on the result. Estimation method. 14. A magnetic pole for generating a plurality of magnetic fields having alternately different polarities, and a plurality of coils arranged opposite to the magnetic field, and a coil to be energized is selected according to a positional relationship between the magnetic field and the coils. In the positioning table device including a multi-phase motor driven linearly, a table moved and positioned by the motor, and a position detecting means for detecting the position of the table, the initial state of the table is changed. A method for estimating a position, in which a predetermined alternating current is sequentially applied to each of the coils to excite the table, and the displacement of the table when the respective coils are energized is measured based on the output of the position detecting means. Estimating an initial position of the table as a positional relationship between a coil and a magnet of a polyphase motor based on the measurement result. Law. 15. A manufacturing method using a positioning table apparatus according to claim 1 or a semiconductor exposure apparatus to which the initial position estimating method according to claim 13 is applied. Semiconductor device.