JPH1029742A - Sheet member position aligning method and sheet member position aligning device using the thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten a series of working time required for placing a sheet member on a base table after position aligning the sheet member with the surface of the base table to which the sheet member is attached and miniaturize the device. SOLUTION: In positional aligning of the joint face 122s of a sheet member 122 with the mounting surface 121a of the element board, a finger section 139 is lowered to a predetermined position so that the joint face 122s of the sheet member 122 is made proximate to the mounting face 121a of the element board 121, and positioning adjustment is performed with a reference holding face 139GS abutting on a reference abutting face 121ks opposing to the reference holding face 139GS in the element board 121.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet member positioning method for positioning a joining surface of a sheet member with respect to a mounting surface of a base on which the sheet member is to be disposed, and
It relates to an alignment device in which it is used.

[0002]

2. Description of the Related Art An assembling robot apparatus for assembling a plurality of small parts with each other is arranged, for example, opposite to a base on which a sheet member as a small part is to be placed at an assembling work station. In the assembling robot device, the transfer jig holding the sheet member is moved along a predetermined operation path to the mounting surface of the base, and then the transfer jig is drive-controlled so that the sheet member is mounted on the base. It is placed in alignment with the mounting surface.

[0003] In such an apparatus, the conveying jig holds the front surface portion on the back surface side with respect to the joining surface of the sheet member by, for example, the air pressure supplied to the suction member.

When positioning and placing the sheet member with respect to the mounting surface of the base with high accuracy, the transport jig moves the sheet member between the joint surface and the mounting surface of the base. It is necessary to hold them so as to face each other and to be substantially parallel, and to arrange them above the mounting surface of the base. The joining surface of the sheet member held by the transport jig and the mounting surface of the base face each other, and whether or not the parallelism allowed is maintained or not, in advance, in the inspection work station, The parallelism of the mounting surface of the base to the joining surface of the sheet member and the thickness of the sheet member are inspected by the measuring instrument for each sheet member and each base. Thereafter, the sheet member and the base that have passed the inspection standards are held by the transport jig and transported to the assembling work station.

In positioning the sheet member with respect to the mounting surface of the base, the conveying jig is driven so that the position of the held sheet member with respect to the mounting surface of the base becomes a predetermined regular position. Controlled. In controlling the position of the conveying jig, an image pickup signal from an image pickup device such as a video camera for photographing the position of the sheet member with respect to the mounting surface of the base is used. That is, there is provided an image processing device that performs predetermined image processing based on an image pickup signal obtained by the image pickup device and sends out relative position data of the sheet member.

[0006]

However, the time required for the transfer jig to move between the assembly work station and the inspection work station and the above-described inspection time are required, so that the sheet member is not supported by the base. There is an inconvenience that a relatively long series of work time is required until the work is aligned and mounted on the mounting surface. In addition, in positioning the sheet member, it is necessary to perform position adjustment along each coordinate axis of a rectangular coordinate system provided in a virtual plane parallel to the mounting surface of the base. A plurality is provided corresponding to each coordinate axis of the rectangular coordinate system. Accordingly, there is a problem that the size of the assembling device is increased.

In view of the above problems, the present invention provides a sheet member positioning method for positioning a bonding surface of a sheet member with respect to a mounting surface of a base on which the sheet member is to be disposed, and a method of positioning the same. Is used, and it is possible to shorten a series of operation time until the sheet member is positioned and mounted on the mounting surface of the base, and furthermore, the size of the assembling device can be reduced. It is an object of the present invention to provide a method of aligning a sheet member which can be realized, and an alignment apparatus using the same.

[0008]

In order to achieve the above-mentioned object, a method of aligning a sheet member according to the present invention is a method for conveying a sheet member having a joining surface portion and holding a sheet member made of a magnetic material by a magnetic force. Disposing the jig at a position where the joining surface portion opposes the attachment surface of the base having the attachment surface to which the joining surface portion of the sheet member comes in contact; A step of adjusting the position of the sheet member held by the conveyance jig with respect to the predetermined position of the base in a state where the position in the direction is regulated, and moving the sheet member having been subjected to the position adjustment to the predetermined position of the base from the conveyance jig. And a separating step.

A sheet member positioning apparatus according to the present invention has a transport jig for selectively holding an end surface of a sheet member orthogonal to a joining surface portion, and has a base having a mounting surface on which the sheet member is disposed. A position adjustment mechanism disposed opposite to the position, a position detection unit for detecting a relative position of the sheet member held by the conveyance jig with respect to the mounting surface of the base, and a conveyance jig to the position adjustment mechanism. In a state in which the respective end surfaces facing the base are in contact with each other and the position of the conveyance jig in one direction with respect to the mounting surface of the base is regulated, the conveyance jig based on the detection output from the position detection unit. And a controller configured to perform an operation of adjusting the position of the sheet member held by the tool with respect to the mounting surface of the base.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) FIG. 4 is a perspective view schematically showing main components of an ink jet head including a sheet member to which an example of a sheet member positioning method according to the present invention is applied.

Referring to FIG.
Reference numeral 5 denotes an element substrate 121 in which heating resistors for applying heat to the ink are arranged in the plurality of second liquid flow paths, respectively, and a separation wall positioned and arranged on the mounting surface of the element substrate 121. A sheet member 122, a grooved top plate 123 that forms a plurality of first liquid flow paths by joining the sheet member 122 so as to cover the groove, an element substrate 121, the sheet member 122, and a grooved top plate 123 And a pressing spring 124 for integrating a component (not shown) with the support 120.
It is comprised including.

The element substrate 121 is made of a non-magnetic material, and is provided with a plurality of electrical functional elements for selectively driving the heating resistors, for example, a plurality of switching elements. The sheet member 122 having a substantially rectangular thin film shape is made of a metallic magnetic material, for example, a nickel material, and has a short side length, a long side length, and a thickness of, for example, 2 to 1, respectively.
0 (mm), 4 to 20 (mm), and 3 to 20 (μm). The sheet member 122 has a plurality of movable walls 122a that are arranged to face the respective heating resistors of the element substrate 121.

The grooved top plate 123 has a plurality of ink discharge ports 123a on its front surface for discharging ink supplied through a plurality of first liquid flow paths formed by the sheet member 122, respectively.

The support 120 is provided with a printed wiring board 120A connected to the element substrate 121 via wires 120a and supplying an electric signal to the element substrate 121. The printed wiring board 120A is provided with a contact pad group 120B that is electrically connected to a recording unit side on which the inkjet head 125 is selectively mounted.
The configuration and operation of the inkjet head 125 will be described later in detail.

FIG. 3 shows a schematic configuration of an assembling apparatus to which an example of a sheet member positioning method according to the present invention is applied.

The assembling apparatus shown in FIG. 3 includes a handling station BST on which the sheet member 122 to be mounted is placed, and the sheet member 122 which is mounted on the element substrate 12.
1 is disposed opposite to the assembly station AST to be assembled. The assembling device includes a first movable table member 127 slidably supported along a coordinate axis X shown in FIG. 3 on a pair of table base members 126 disposed opposite to each other, and a first table member 127. A second movable table member 128 slidably supported on a top surface along a coordinate axis Y orthogonal to the coordinate axis X shown in FIG. 3, and a second movable table member 1
Sheet member 122 provided on the upper surface of the sheet 28 as a work
Base 129 having a hand 130 for holding the
Are included as main components.

The first movable table member 127 has a female screw portion (not shown) fitted on a ball screw shaft 132 rotatably supported at both ends of the table base member 126 in the direction of the coordinate axis X. A stepping motor 133 as a drive unit is connected to one end of the ball screw shaft 132 extending in the coordinate axis X direction. The stepping motor 133 includes the first movable table member 1
An absolute type encoder unit 133E for detecting the movement amount of 27 is provided. Stepping motor 13
3 is driven and controlled by a drive control pulse signal from a drive circuit unit 162 described later. Also, the encoder unit 133E
Sends a detection output signal ST1 indicating the amount of movement of the first movable table member 127. Accordingly, when the stepping motor 133 is driven, the first movable table member 127 is reciprocated by a predetermined amount of movement between the handling station BST and the assembly station AST along the coordinate axis X direction. .

The second movable table member 128 has a female screw portion (not shown) fitted on a ball screw shaft 134 rotatably supported at an end of the table base member 126 in the coordinate axis Y direction. Ball screw shaft 1
A stepping motor 135 as a drive unit is connected to one end of the motor. The stepping motor 135 includes an absolute encoder unit 135 for detecting the amount of movement of the second movable table member 128 in the coordinate axis X direction.
E is provided. The stepping motor 135 is driven and controlled by a drive control pulse signal from a drive circuit unit 162 described later. In addition, the encoder unit 135E
A detection output signal ST2 indicating the amount of movement of the movable table member 128 in the coordinate axis Y direction is transmitted. Thus, when the stepping motor 135 is driven, the second movable table member 128 is reciprocated by a predetermined amount of movement along the coordinate axis Y direction.

At the end of the hand base 129 in the direction of the coordinate axis Y, there is a support receiver that extends along a coordinate axis Z orthogonal to the coordinate axes X and Y shown in FIG. A part 129A is provided. The support receiving portion 129A has a sliding contact portion 129a on which a curved sliding contact surface for supporting the hand portion 130 is formed. Inside the support receiving portion 129A, a ball screw shaft 137 that is rotatably supported at one end side and extends in the vertical direction is inserted. The other end of the ball screw shaft 137 has a hand 130
Female threads are fitted. Ball screw shaft 137
Is connected to a stepping motor 136 as a drive unit. The stepping motor 136 includes an absolute encoder 136E that detects the amount of movement of the hand unit 130 in the coordinate axis Z direction. The stepping motor 136 is drive-controlled by a drive control pulse signal from a drive circuit unit 162 described later. Also,
The encoder unit 136E sends out a detection output signal ST3 indicating the amount of movement of the hand unit 130 in the coordinate axis Z direction.
As a result, when the stepping motor 136 is driven, the hand unit 130 slides on the sliding contact portion 129 of the support receiving portion 129A.
and is reciprocated by a predetermined amount of movement along the coordinate axis Z direction.

At the end of the hand unit 130, the sheet member 1
Electromagnet unit 139 as a transfer jig for holding 22
A finger portion 139 having G extends in the coordinate axis Y direction and is connected. The electromagnet unit 139G has a reference holding surface 139GS for holding the sheet member 122. The electromagnet unit 139G includes a drive circuit unit 1 described later.
Drive control is performed by a drive control signal from 62, and a magnetized state or a non-magnetized state is selectively taken. FIG. 3 shows a case where the finger portion 139 is at the standby position.

The handling station BST is provided with a work support 138 having a reference flat surface 138a on which the sheet member 122 is placed.

In the assembly station AST, a table base member 140 extending substantially parallel to the table base member 126 is provided. Table base member 140
Is provided with a ball screw shaft 141 whose both ends are rotatably supported. On the upper surface of the table base member 140, there is provided a moving table 142 having a female screw portion fitted to the ball screw shaft 141 and slidably supported.

On the moving table 142, there is provided a work table 143 to which a support 120 as a work and a surface plate 143a on which the element substrate 121 is mounted are fixed. The surface of the surface plate 143a has a flat surface having a flatness that is relatively high precision. Support 1 on flat surface
A position regulating pin 143b for regulating the position of the pin 20 at a predetermined position on the flat surface is provided.

An image pickup device 14 for photographing the element substrate 121 and the sheet member 122 is provided above the surface plate 143a.
4 is provided. The imaging device 144 is, for example, a CCD as a photoelectric conversion element.
(Charge Coupled Device) is built in, and takes a positioning mark provided on the element substrate 121 and a positioning mark provided on the sheet member 122, and sends them as an image signal to the signal processing unit. It shall be sent. The signal processing unit performs predetermined signal processing based on the image signal, forms image data DG representing the shape of the mark, and supplies the image data DG to a control unit 160 described later.

The assembling apparatus thus constructed is of a teaching playback type, and the hand section 130 and the finger section 139 of the assembling apparatus are moved along a predetermined operation path in which the teaching points are continuous. Can be

The assembling apparatus further includes a control unit 160 for controlling the operation of the assembling apparatus.

The control unit 160 includes an encoder 1
33E, 135E, and 136E, and output signals ST1, ST2, and ST3, and the image processing apparatus 1.
The image data DG from 63 is supplied.

The control unit 160 includes, for example, operation program data supplied from a host computer, operation path data of the hand unit 130 and the finger unit 139, and position data and speed data of each teaching point preset on each coordinate axis. And a memory unit 160m for storing image data DG from the image processing device 163 and the like.

In controlling the operation of the assembling apparatus, the control unit 160 preliminarily controls one sheet member 122 at the handling station BST as shown in FIG.
Are supported by a work supporting table 138 by a transfer device (not shown).
Are arranged at the corners of the reference flat surface portion 138a. In the assembling station AST, the support 120 to which the element substrate 121 is fixed at a predetermined position by a transfer device (not shown) is regulated by the position regulating pins 143b, and is mounted on the surface plate 143a.

At this time, the long side of the sheet member 122 coincides with the peripheral edge in the longitudinal direction of the work support 138, and the joining surface 122 s of the sheet member 122 contacts the reference flat surface 138 a of the work support 138. I have. Further, the long side of the element substrate 121 is disposed substantially parallel to the long side of the sheet member 122 placed on the work support table 138, and the element substrate 1
The 21 mounting surfaces 146 a are arranged to face the imaging device 144.

Based on the read operation program data, the control unit 160 firstly controls the electromagnet unit 139G in the hand unit 130 and the finger unit 139.
Drive control signals Cx, Cy, and Cz corresponding to the operations of the stepping motors 133, 135, and 136, respectively, in order to move the reference holding surface 139GS from the initial position to abut on the side end surface of the work support 138. And supply it to the drive circuit portion 162.

The drive circuit section 162 receives each drive control signal C
Based on x, Cy, and Cz, drive pulse signals KPx, KPy, and KPz representing the amount of movement are formed and supplied to the stepping motors 133, 135, and 136. As a result, the reference holding surface 139GS of the electromagnet unit 139G is brought into contact with the side end surface of the work support 138, and the central portion of the reference holding surface 139GS is brought close to the side end surface of the sheet member 122.

Next, when the control unit 160 determines that the reference holding surface 139GS of the electromagnet unit 139G has come into contact with the side end surface of the work support 138 based on the detection output signals ST1, ST2, and ST3, The supply of the drive control signals Cx, Cy, and Cz is stopped, and the drive control signals C are set so that the electromagnet unit 139G is magnetized.
d is formed and supplied to the drive circuit unit 162. The drive circuit unit 162 generates a drive signal Kg based on the drive control signal Cd.
And supplies it to the electromagnet unit 139G.

As a result, as shown in FIG. 2, a magnetic field GA substantially parallel to the reference flat surface 138a of the work support 138 is formed on the reference holding surface 139GS.

As a result, the long side end face 122e of the sheet member 122 is held on the reference holding surface 139GS, and the sheet member 122 is supported by the magnetic force substantially perpendicular to the reference holding surface 139GS.

Subsequently, as shown in FIG. 1A and FIG. 2, the control unit 160
The finger portion 139 is moved to a predetermined setting position where the joining surface 122s of the sheet member 122 held by the GS faces the mounting surface AST of the work table 143 in the assembly station AST substantially parallel to the mounting surface 121a. Further, as shown in FIG. 1B, the control unit 160 moves the finger portion 139 to a predetermined position so that the bonding surface 122 s of the sheet member 122 approaches the mounting surface 121 a of the element substrate 121 from that position. Position and lower the reference holding surface 139GS to the element substrate 121.
Reference contact surface 1 facing reference holding surface 139GS at
The drive control signals Cx, Cy, and Cz are formed to make contact with 46 ks, and are supplied to the drive circuit unit 162.

Then, the control unit 160 performs positioning of the sheet member 122 with respect to the element substrate 121 as it is. In positioning the sheet member 122 with respect to the element substrate 121, for example, as shown in FIG. 2, respective cross-shaped marks are superimposed on the surface of the sheet member 122 and the mounting surface 121a of the element substrate 121. Cross marks 122ma and 122ma are provided so that the positions of the heat generating resistors of the element substrate 121 and the positions of the movable walls 122a have a regular positional relationship by making them coincide with each other. Mark 122m
a and 122ma have the same width as each other, and
It has a length. In addition, mark 122ma,
And 122 ma are provided at the same interval.

Thus, when the position of each heating resistor of the element substrate 121 and the position of each movable wall 122a have a regular positional relationship, that is, when the sheet member 122 is
Of the mark 122ma, which has been photographed in advance, and the image of the photographed mark 122ma are coincident with each other when they are positioned at the regular positions on the mounting surface 121a. On the other hand, the element substrate 121
When the position of each heating resistor and the position of each movable wall 122a are not in a regular positional relationship, the image of the mark 122ma obtained in advance and the image of the captured mark 122ma are superimposed. They will not match.

The control unit 160 includes the image processing device 16
The image data DG for the mark 122ma from No. 3 is stored in the memory unit 160m in advance, and the image data for the mark 122ma read from the memory unit 160m is compared with the obtained image data DG for the mark 122ma, The image data DG has a mark 122m with each other.
A drive control signal Cx is formed so as to adjust the position so as to coincide with the image data for a.
To supply.

Therefore, since the position is adjusted while the reference holding surface 139GS is in sliding contact with the reference contact surface 146ks, the position adjustment in the direction of the coordinate axis Y shown in FIG. Alignment on the coordinate axes X and Y planes can be easily performed.

The control unit 160 controls the image data D
When it is determined that the values G match each other, the sheet member 122
Is attached to the mounting surface 121a of the element substrate 121.
A drive control signal Cz is formed so that the finger portion 139 is further lowered from the position by a predetermined moving amount so as to approach and contact with the drive circuit portion 162.
To supply. As a result, as shown in FIG. 1C, the bonding surface 122s of the sheet member 122 is
It is mounted on the first mounting surface 121a.

At this time, the control unit 160 stops supplying the drive control signal Cd to the electromagnet unit 139G,
In addition, drive control signals Cx, Cy, and Cz are formed to return the finger portion 139 to the initial standby position,
It is supplied to the drive circuit unit 162. The element substrate 1
A liquid for temporary fixing is applied to the mounting surface 121a of the mounting member 21 in advance.

Therefore, the sheet member 122 is
The first attachment surface 146a is attached to the first attachment surface 146a. Thereafter, the sheet member 12 is transported by a transport device (not shown).
2 is transferred to another work station, and the new support 120 and the element substrate 121 are transferred to the work table 14.
3 is attached.

(Second Embodiment) In the above example, FIG.
(B), the position adjustment in the coordinate axis X direction is performed based on the mark 122ma and the image based on the mark 122ma. However, the present invention is not limited to this example. For example, as shown in FIG. A rectangular through hole 145H is previously provided at a predetermined position of the member 145, and positioning pins 146P are provided at the corners of the mounting surface 146a of the element substrate 146. Position adjustment in the coordinate axis X direction with respect to the surface 121a may be performed.

In the case of the example shown in FIG. 5, the positioning pin 146P has, for example, a diameter and a mounting surface 146a.
From the top to the tip, respectively, 20 to 1145μ
m, 10 to 30 μm. The area of the through hole 145H is set to be about twice or more the cross-sectional area of the positioning pin 146P. This is the handling station BST
, The sheet member 145 has the electromagnet unit 139G
Is held by the reference holding surface 139GS of the sheet member 145, an error of a relative position of the sheet member 145 with respect to the reference holding surface 139GS from a predetermined reference position is taken into consideration.
1 is in contact with the reference contact surface 146ks facing the reference holding surface 139GS in FIG.
This is because 6P can always be inserted into the through hole 145H.

Under these circumstances, the control unit 160
Similarly to (B), the positioning pin is inserted into the through hole 145H of the sheet member 145 in a state where the reference holding surface 139GS is in contact with the reference contact surface 146ks of the element substrate 121 which faces the reference holding surface 139GS. The drive control signal Cz for lowering the electromagnet unit 139G until the tip end of the 146P is inserted and the position shown by the one-dot chain line in FIG. 5, that is, the joining surface 145a of the sheet member 145 abuts on the mounting surface 146a. And supplies it to the drive circuit unit 162. After that, the control unit 160 forms a drive control signal Cx for moving the sheet member 145 by a predetermined movement amount in the direction indicated by the arrow Xa in FIG. 16
Feed to 2. The amount of movement is, for example, the positioning pin 146.
It is the maximum distance until the tip of P approaches one inner peripheral surface of the through hole 145H. Then, the control unit 160
Stops the supply of the drive control signal Cd to the electromagnet unit 139G, as in the example described above.

Further, in the example shown in FIG. 6, in the example shown in FIG. 5, a rectangular through-hole 145H is previously provided at a predetermined position of the sheet member 145, and the element substrate 14
6 is provided with a positioning pin 146P at a corner in the mounting surface 146a.
Is provided, but instead, the element substrate 146 is provided.
A similar positioning pin 146P is provided in the vicinity of the peripheral edge of the area 146a to be mounted, and the sheet member 122 is not provided with a through hole.

(Third Embodiment) In the example shown in FIG. 6, the control unit 160 makes the reference holding surface 139GS face the reference holding surface 139GS of the element substrate 121 in the same manner as shown in FIG. Reference contact surface 146ks
6, that is, the joining surface 122 a of the sheet member 122 is
A drive control signal Cz is formed to lower the electromagnet unit 139G until the electromagnet unit 139G comes into contact with the drive circuit unit 6a.
62. Thereafter, the control unit 160 forms a drive control signal Cx for moving the sheet member 122 by a predetermined movement amount in the direction indicated by the arrow Xb in FIG. 162. The movement amount is, for example, the maximum distance until the end face on the short side of the sheet member 122 approaches the positioning pin 146P. Then, the control unit 160 stops supplying the drive control signal Cd to the electromagnet unit 139G, as in the above-described example.

Therefore, according to the examples shown in FIGS. 5 and 6, since the position is adjusted while the reference holding surface 139GS is in sliding contact with the reference contact surface 146ks, the position adjustment in the direction of the coordinate axis Y is unnecessary, and Position adjustment on the coordinate axes X and Y planes is possible by adjusting the position only in the X direction.

(Fourth Embodiment) In the example shown in FIGS. 1 to 6 described above, as shown in FIG. 1A, the sheet member 122 held on the reference holding surface 139GS of the electromagnet unit 139G. Bonding surface 122a and the element substrate 121
Are kept parallel to each other, for example, when the thickness of the element substrate 121 fixed to the support 120 is not uniform due to variations in the thickness, or when the support When the thickness of the support 120 is not uniform due to the variation in the thickness of the support member 120, the joining surface 122 a of the sheet member 122 held on the reference holding surface 139 GS and the mounting surface 121 a of the element substrate 121.
May not be kept parallel to each other.

FIGS. 7A to 7E show an example of the sheet member positioning method according to the present invention in such a case.
Shown in In FIGS. 7A to 7E, FIG.
The same components in the example shown in FIG. 2 are denoted by the same reference numerals, and the description thereof will not be repeated.

The thickness of the element substrate 147 is not uniform throughout, and the mounting surface 147a of the element substrate 147 is
For example, the reference holding surface 139G of the electromagnet unit 139G
It is inclined to one side along the coordinate axis X with respect to the joint surface 122a of the sheet member 122 held at S.
Further, on the mounting surface 147a, the positions of the heating resistors of the element substrate 147 and the positions of the movable
A pair of cross-shaped marks 147ma is provided so that the position of 22a has a regular positional relationship.

Under such a configuration, the control unit 160
Is a reference holding surface 139, as shown in FIG.
The finger portion 139 is moved to a predetermined setting position where the bonding surface 122s of the sheet member 122 held by the GS faces the mounting surface 147a of the element substrate 147 on the work table 143 in the assembly station AST. Further, as shown in FIG. 7B, the control unit 160 further moves the finger portion 139 to a predetermined position so that the joining surface 122s of the sheet member 122 approaches the mounting surface 147a of the element substrate 147 from that position. Drive control signals Cx, Cy, and Cz to lower the reference holding surface 139GS to the reference contact surface 147ks of the element substrate 147 that faces the reference holding surface 139GS.
And supplies it to the drive circuit unit 162.

Subsequently, as shown in FIGS. 7 (B) and 7 (C), the control unit 160 leaves the bonding surface 122s of the sheet member 122 partially with the element substrate 147 as it is as shown in FIGS. Then, the sheet member 122 follows the attached surface 147a, and the entire surface of the joining surface 122s of the sheet member 122 contacts the attached surface 147a of the element substrate 147. A drive control signal Cz is formed to further lower the finger unit 139 from the position by a predetermined moving amount, and supplies the drive control signal Cz to the drive circuit unit 162. Thereby, as shown in FIG. 7C, the joining surface 1 of the sheet member 122 is formed.
22s is placed on the mounting surface 147a of the element substrate 147. The sheet member 122 is held by the reference holding surface 139GS with a predetermined coercive force. After a part of the joining surface 122s of the sheet member 122 abuts on the attachment surface 147a of the thickest part of the element substrate 147, the sheet The other portion of the joining surface 122s of the member 122 follows the downward movement of the reference holding surface 139GS and is brought into contact with the mounting surface 147a.

Subsequently, as shown in FIG. 7D, the control unit 160 temporarily stops the finger portion 139.
Is moved upward by a predetermined moving amount in a state where the reference holding surface 139GS is in sliding contact with the reference contact surface 147ks, and then the marks 122ma and 51 are moved in the same manner as in the above-described example.
Positioning is performed based on 22ma, and the finger portion 1 is again brought into contact with the entire surface of the bonding surface 122s of the sheet member 122 against the mounting surface 147a of the element substrate 147.
39 is further moved by an arrow U with a predetermined movement amount from that position.
A drive control signal Cz is formed to lower in the direction indicated by D, and is supplied to the drive circuit unit 162.

As a result, as shown in FIG. 7E, the bonding surface 122s of the sheet member 122 is
7 on the mounting surface 147a. At that time, the control unit 160 controls the electromagnet unit 13 similarly to the above-described example.
In order to stop the supply of the drive control signal Cd to 9G and to return the finger portion 139 to the initial standby position, drive control signals Cx, Cy, and Cz are formed and supplied to the drive circuit portion 162. .

Therefore, the joining surface 122a of the sheet member 122 held on the reference holding surface 139GS and the element substrate 147
In this case, even if the state in which the mounting surface 147a is not parallel to each other is not maintained, proper positioning is performed.

(Fifth Embodiment) Further, in the example shown in FIG. 7, as shown in FIG. 7D, the control unit 160 temporarily moves the finger portion 139 and the reference holding surface 139GS to the reference position. After moving upward by a predetermined moving amount while sliding on the contact surface 147 ks, alignment is performed based on the marks 122 ma and 5122 ma as in the above-described example. ,
FIG. 8 shows an example in which the operation of moving the finger portion 139 upward by a predetermined moving amount while the reference holding surface 139GS is in sliding contact with the reference contact surface 147ks is omitted.

In the example shown in FIG. 8, the control unit 160 operates as shown in FIGS.
(A) and (B), the joining surface 1 of the sheet member 122 held on the reference holding surface 139GS.
22s is the work table 14 in the assembly station AST
The finger portion 139 is moved to a predetermined set position facing the mounting surface 147a of the element substrate 147 in Step 3. The control unit 160 further moves the finger portion 13 so that the bonding surface 122 s of the sheet member 122 approaches the mounting surface 147 a of the element substrate 147 from that position.
9 to a predetermined position and the reference holding surface 139
The drive control signals Cx, Cy, and Cz are formed so that the GS abuts on a reference abutment surface 147 ks of the element substrate 147 that faces the reference holding surface 139 GS, and the drive control signals Cx, Cy, and Cz are supplied to the drive circuit unit 162.

Subsequently, the control unit 160 is left as it is, as shown in FIG.
2 follows the mounting surface 147a, and the entire bonding surface 122s of the sheet member 122 is attached to the mounting surface 147a of the element substrate 147.
A drive control signal Cz is formed to further lower the finger portion 139 from the position by a predetermined movement amount so that the finger portion 139 comes into contact with the finger portion 139, and supplies the drive control signal Cz to the drive circuit portion 162. As a result, as shown in FIG. 8C, the bonding surface 122s of the sheet member 122 is placed on the mounting surface 147a of the element substrate 147.

Subsequently, the control unit 160 determines that the bonding surface 122 s of the sheet member 122 is on the mounting surface 1 of the element substrate 147.
In the state of sliding contact with the mark 47a, the mark 12
Based on 2 ma and 147 ma, a drive control signal Cx is formed to perform alignment in the direction indicated by arrow Xc shown in FIG. 8C, and the drive control signal Cx is supplied to the drive circuit unit 162. As a result, as shown in FIG. 8D, the bonding surface 122s of the sheet member 122 is placed at a predetermined position on the mounting surface 147a of the element substrate 147.

Accordingly, the joining surface 122a of the sheet member 122 held on the reference holding surface 139GS and the element substrate 147
In this case, proper alignment is performed even when the mounting surfaces 147a are not parallel to each other, and the time required for a series of assembling operations is reduced as compared with the example shown in FIG. It will be.

In the fourth and fifth embodiments, the second and third embodiments described above may be applied.

According to the present invention, the following effects can be obtained.

(A) Since the contact portion between the sheet member and the conveying jig is small, the possibility of the sheet member being damaged or deformed by the conveying jig is reduced. (The sheet member is very thin and easily damaged or deformed.) (B) The sheet member is held by the transport jig using magnetic force. In this holding state, when an external force is applied to the sheet member, the holding state changes. By using this feature,
That is, by flattening the joint surface between the sheet member and the base, the joint surface between the sheet member and the base can be self-parallelized.

(C) Since the holding state of the sheet member changes, the sheet member is not deformed or damaged if an external force is applied by appropriate means. Further, since the sheet member can be abutted on the basis of the abutment without being damaged, an abutting method can be employed in the alignment.

(D) By (b) and (c), the apparatus can be simplified, the apparatus cost can be reduced, and the apparatus scale can be reduced.

(E) Steps such as image processing and inspection by a paralleling device (laser displacement meter) between the sheet member and the base are eliminated, so that the tact time can be increased.

First, in this embodiment, an example will be described in which the discharge force and the discharge efficiency are improved by controlling the direction of pressure propagation based on bubbles and the direction of growth of bubbles for discharging liquid.

FIG. 9 is a schematic cross-sectional view of the liquid discharge head of this embodiment cut along the liquid flow direction, and FIG. 10 is a partially cutaway perspective view of the liquid discharge head.

In the liquid discharge head of this embodiment, a heating element 2 (in this embodiment, a heating resistor having a shape of 40 μm × 105 μm) which applies thermal energy to the liquid is used as a discharge energy generating element for discharging the liquid. Is provided on the element substrate 1, and the heating element 2 is provided on the element substrate.
The liquid flow path 10 is arranged corresponding to the above. The liquid flow path 10 communicates with the discharge port 18 and also communicates with a common liquid chamber 13 for supplying the liquid to the plurality of liquid flow paths 10, and an amount of liquid corresponding to the liquid discharged from the discharge port. From the common liquid chamber 13.

A plate-shaped movable member 31 made of an elastic material such as metal and having a flat portion is provided on the element substrate of the liquid flow path 10 so as to face the heating element 2.
Are provided in a cantilever shape. One end of the movable member is fixed to a base (supporting member) 34 formed by patterning a photosensitive resin or the like on the wall of the liquid flow path 10 or the element substrate. Thus, the movable member is held and forms a fulcrum (fulcrum portion) 33.

The movable member 31 has a fulcrum (fulcrum portion; fixed end) 33 on the upstream side of a large flow flowing from the common liquid chamber 13 through the movable member 31 to the discharge port 18 by the liquid discharging operation. 33 is disposed at a position facing the heating element 2 at a distance of about 15 μm from the heating element so as to cover the heating element 2 so as to have a free end (free end portion) 32 on the downstream side with respect to 33. I have. A space between the heating element and the movable member is a bubble generation area. Note that the types, shapes, and arrangements of the heating element and the movable member are not limited thereto, and may be any shape and arrangement that can control the growth of bubbles and the propagation of pressure as described later. Note that the above-described liquid flow path 10
In order to explain the flow of the liquid to be discussed later, the movable member 31
The portion directly connected to the discharge port 18 with the boundary as the first liquid flow path 14 is divided into two areas of the bubble generation area 11 and the second liquid flow path 16 having the liquid supply path 12 for explanation. I do.

The movable member 31 is generated by causing the heating element 2 to generate heat.
Heat is applied to the liquid in the bubble generation region 11 between the heating element 2 and the heating element 2 to generate bubbles in the liquid based on the film boiling phenomenon as described in US Pat. No. 4,723,129. The pressure based on the generation of the bubbles and the bubbles act on the movable member preferentially, and the movable member 31 opens largely toward the discharge port around the fulcrum 33 as shown in FIG. 9B, FIG. 9C or FIG. To be displaced. Depending on the displacement or the displaced state of the movable member 31, the propagation of pressure based on the generation of bubbles and the growth of the bubbles themselves are guided to the ejection port side.

Here, one of the basic ejection principles of the present embodiment will be described. One of the most important principles in this embodiment is
The movable member disposed to face the bubble is displaced from the first position in the steady state to the second position after the displacement based on the pressure of the bubble or the bubble itself. This is to guide the pressure due to the generation of bubbles and the bubbles themselves to the downstream side where the discharge port 18 is arranged.

This principle is illustrated in FIG. 11 schematically showing a conventional liquid flow path structure without using a movable member, and FIG. 12 of the present embodiment.
This will be described in more detail by comparing with. Here, the propagation direction of the pressure toward the discharge port is indicated by VA, and the propagation direction of the pressure toward the upstream side is indicated by VB.

In the conventional head as shown in FIG. 11, there is no structure for regulating the direction of pressure propagation by the generated air bubbles 40. Therefore, the pressure propagation direction of the bubble 40 is V
As shown in 1 to V8, the direction was perpendicular to the surface of the bubble, and was oriented in various directions. Among them, those having a component in the pressure propagation direction in the VA direction which has the most influence on the liquid discharge are V1 to V1.
V4, which is a directional component of pressure propagation in a portion closer to the discharge port than a position approximately half of the bubble, is an important portion that directly contributes to liquid discharge efficiency, liquid discharge force, discharge speed, and the like. Further V1
Works efficiently because it is closest to the ejection direction VA, while V4 has relatively little direction component toward VA.

On the other hand, in the case of the present invention shown in FIG. 12, the movable member 31 shifts the pressure propagation directions V1 to V4 of the bubbles directed in various directions as in the case of FIG. (To the discharge port side) to convert the pressure into the VA pressure propagation direction, whereby the pressure of the bubbles 40 directly and efficiently contributes to the discharge. Then, the bubble growth direction itself is guided in the downstream direction in the same manner as the pressure propagation directions V1 to V4, and grows more downstream than upstream. As described above, by controlling the growth direction itself of the bubble by the movable member and controlling the pressure propagation direction of the bubble, it is possible to achieve a fundamental improvement in the discharge efficiency, the discharge force, the discharge speed, and the like.

Next, returning to FIG. 9, the discharge operation of the liquid discharge head of this embodiment will be described in detail.

FIG. 9A shows a state before energy such as electric energy is applied to the heating element 2 and before the heating element generates heat. What is important here is that the movable member 31 is provided at a position facing at least a downstream portion of the bubble generated by the heat generated by the heating element. In other words, on the liquid flow path structure, at least downstream of the area center 3 of the heating element (from a line passing through the area center 3 of the heating element and orthogonal to the length direction of the flow path, so that the downstream side of the bubble acts on the movable member. The movable member 31 is arranged to the position (downstream).

FIG. 9B shows that the heating element 2 generates heat by applying electric energy or the like to the heating element 2, and the generated heat heats a part of the liquid filling the bubble generation region 11 to cause film boiling. This is a state in which accompanying air bubbles are generated.

At this time, the movable member 31 is displaced from the first position to the second position by the pressure based on the generation of the bubble 40 so as to guide the pressure propagation direction of the bubble 40 toward the discharge port. What is important here is that, as described above, the free end 32 of the movable member 31 is arranged on the downstream side (discharge port side), and the fulcrum 33 is arranged on the upstream side (common liquid chamber side). That is, at least a part of the movable member faces a downstream portion of the heating element, that is, a downstream portion of the bubble.

FIG. 9C shows a state in which the bubbles 40 have further grown, but the movable member 31 is further displaced in accordance with the pressure generated by the generation of the bubbles 40. The generated bubble grows greatly downstream from the upstream and grows greatly beyond the first position (dotted line position) of the movable member. Thus, bubble 4
When the movable member 31 is gradually displaced in accordance with the growth of 0, the pressure propagation direction of the bubble 40 and the direction in which the deposition is easily moved, that is, the growth direction of the bubble to the free end side is uniformly directed to the discharge port. It can be considered that being able to change the height also enhances the discharge efficiency. The movable member rarely hinders the transmission of bubbles or foaming pressure toward the discharge port, and efficiently controls the direction of pressure propagation and the direction of bubble growth according to the magnitude of the propagating pressure. Can be.

FIG. 9D shows a state in which the bubble 40 contracts and disappears due to the decrease in the internal pressure of the bubble after the above-mentioned film boiling.

The movable member 31 displaced to the second position
FIG. 9A shows an initial position (first position) of FIG. 9A due to a negative pressure due to contraction of bubbles and a restoring force due to the spring property of the movable member itself.
Return to. Further, at the time of defoaming, VD1 and VD2 of the flow from the upstream side (B), that is, the common liquid chamber side, in order to supplement the contracted volume of the bubbles in the bubble generation region 11 and to supplement the volume of the discharged liquid. And the liquid flows in from the discharge port side like Vc of the flow.

The operation of the movable member and the discharge operation of the liquid accompanying the generation of bubbles have been described above. The refilling of the liquid in the liquid discharge head of this embodiment will be described in detail below.

The liquid supply mechanism in this embodiment will be described in more detail with reference to FIG.

After the bubble 40 has reached the maximum volume state and enters the defoaming process after the state shown in FIG. 9C, a volume of liquid that compensates for the defoamed volume is supplied to the bubble generation region in the first liquid flow path 14. The liquid flows from the discharge port 18 side and the common liquid chamber side 13 of the second liquid flow path 16. In the conventional liquid flow path structure without the movable member 31, the amount of the liquid flowing from the discharge port side to the defoaming position and the amount of the liquid flowing from the common liquid chamber are the same as the part closer to the discharge port than the bubble generation region and the common liquid. This is due to the magnitude of the flow resistance with the part close to the chamber (based on the flow path resistance and the inertia of the liquid).

For this reason, when the flow resistance on the side close to the discharge port is small, a lot of liquid flows from the discharge port side to the defoaming position, and the retreat amount of the meniscus becomes large. In particular, as the flow resistance on the side close to the discharge port is reduced to increase the discharge efficiency in order to increase the discharge efficiency, the meniscus M at the time of defoaming becomes larger, the refill time becomes longer, and the refill time becomes longer, and high-speed printing is performed. Was to hinder.

On the other hand, in the present embodiment, the movable member 31
In the case where the volume W of the bubble is W1 on the upper side of the first position of the movable member 31 and W2 is on the side of the bubble generation region 11 when the movable member returns to the original position at the time of defoaming, the meniscus is removed. The retreat stops, and the liquid supply for the remaining volume of W2 is mainly performed by the liquid supply from the flow VD2 in the second flow path 16. Thus, while the amount corresponding to about half of the volume of the bubble W has conventionally been the meniscus retraction amount, it has become possible to suppress the meniscus retreat amount to a smaller amount, which is about half of W1.

Further, the supply of the liquid for the volume of W2 is forcibly performed mainly from the upstream side (VD2) of the second liquid flow path along the surface of the movable member 31 on the side of the heating element using the pressure at the time of defoaming. Faster refilling was achieved.

The characteristic feature of this embodiment is that when refilling is performed using the pressure at the time of defoaming with the conventional head, the vibration of the meniscus is increased and the image quality is degraded. In the high-speed refill in the example, the flow of the liquid on the discharge port side between the region of the first liquid flow path 14 on the discharge port side and the bubble generation area 11 is suppressed by the movable member, so that the vibration of the meniscus is extremely reduced. Is what you can do.

As described above, in the present embodiment, the second flow path 16
When high-speed refilling is achieved by forcibly refilling the foaming area through the liquid supply path 12 and suppressing the meniscus retraction and vibration described above, the method is used in the field of stable ejection, high-speed repetitive ejection, and recording. As a result, it is possible to improve image quality and realize high-speed recording.

The configuration of this embodiment further has the following effective functions. That is, the propagation of the pressure to the upstream side (back wave) due to the generation of bubbles is suppressed. Of the bubbles generated on the heating element 2, most of the pressure caused by the bubbles on the common liquid chamber 13 side (upstream side) is a force (back wave) for pushing back the liquid toward the upstream side. This back wave caused the pressure on the upstream side, the amount of liquid movement due thereto, and the inertia force accompanying the liquid movement, which reduced the refill of the liquid into the liquid flow path and hindered high-speed driving. . In the present embodiment, the refillability is further improved by first suppressing these effects on the upstream side by the movable member 31.

Next, further characteristic structures and effects of this embodiment will be described below.

The second liquid flow path 16 of the present embodiment is provided with a liquid supply passage 12 having an inner wall which is connected to the heating element 2 substantially flat (the heating element surface is not greatly reduced) upstream of the heating element 2. Have. In such a case, the bubble generation region 11
The supply of the liquid to the surface of the heating element 2 is performed by the movable member 31.
VD2 is performed along the surface on the side closer to the bubble generation region 11 of FIG. Therefore, stagnation of the liquid on the surface of the heating element 2 is suppressed, and deposition of gas dissolved in the liquid and so-called residual air bubbles that cannot be defoamed are easily removed. The heat storage does not become too high.
Therefore, more stable generation of bubbles can be repeated at high speed. In the present embodiment, the liquid supply path 12 having a substantially flat inner wall has been described. However, the present invention is not limited to this. Any liquid supply path that has a gentle inner wall that is smoothly connected to the surface of the heating element. Any shape may be used as long as the shape does not cause stagnation of the liquid on the heating element or large turbulence in the supply of the liquid.

In some cases, the supply of the liquid to the bubble generation region is performed from the VD1 through the side (slit 35) of the movable member. However, in order to more effectively guide the pressure at the time of bubble generation to the discharge port, a large movable member is used so as to cover the entire bubble generation region (cover the heating element surface) as shown in FIG. By returning to the position of
In the case where the flow resistance of the liquid between the bubble generation region 11 and the region near the discharge port of the first liquid flow path 14 is large, the flow of the liquid from the VD1 to the bubble generation region 11 is prevented. . However, in the head structure of the present invention, the flow VD1 for supplying the liquid to the bubble generation region has a very high liquid supply performance, and the discharge efficiency is such that the movable member 31 covers the bubble generation region 11. Even if a structure requiring improvement is adopted, the liquid supply performance is not reduced.

Incidentally, the positions of the free end 32 and the fulcrum 33 of the movable member 31 are such that the free end is relatively downstream from the fulcrum as shown in FIG. With such a configuration, it is possible to efficiently realize functions and effects such as guiding the pressure propagation direction and growth direction of bubbles to the ejection port side during the above-described foaming. Further, this positional relationship achieves not only a function and an effect on discharge, but also an effect that the flow resistance to the liquid flowing through the liquid flow path 10 can be reduced and the refill can be performed at a high speed even when the liquid is supplied. As shown in FIG. 13, when the meniscus M retracted by the discharge returns to the discharge port 18 by capillary force or when liquid is supplied to the defoaming, the liquid flow path 10 (the first liquid Channel 14, second
This is because the free end and the fulcrum 33 are arranged so as not to go against the flows S1, S2, and S3 flowing through the liquid flow path 16 (including the liquid flow path 16).

Supplementally, in FIG. 9 of the present embodiment, as described above, the free end 32 of the movable member 31 has the area center 3 dividing the heating element 2 into an upstream area and a downstream area.
It extends with respect to the heating element 2 so as to face a position downstream of a line passing through the center (center) of the area of the heating element and perpendicular to the length direction of the liquid flow path. As a result, the movable member 31 receives a pressure or a bubble that greatly contributes to the discharge of the liquid generated downstream of the area center position 3 of the heating element, and the pressure and the bubble can be guided to the discharge port side, and the discharge efficiency and the like can be improved. Discharge force can be fundamentally improved.

In addition, many effects are obtained by utilizing the upstream side of the bubble.

In the configuration of the present embodiment, the fact that the free end of the movable member 31 is subjected to an instantaneous mechanical displacement is also considered to contribute effectively to the ejection of the liquid.

Embodiment 2 Hereinafter, another embodiment of the present invention will be described with reference to the drawings.

In this embodiment, the principle of the main liquid ejection is the same as that of the previous embodiment. However, in this embodiment, the liquid flow path has a multi-flow path structure so that additional heat is applied. The liquid to be foamed (foaming liquid) can be separated from the liquid to be mainly discharged (discharged liquid).

FIG. 14 is a schematic cross-sectional view of the liquid discharge head of this embodiment in the flow direction, and FIG. 15 is a partially cutaway perspective view of the liquid discharge head.

The liquid discharge head according to the present embodiment has a heating element 2 for applying thermal energy for generating bubbles in the liquid.
A second liquid flow path 16 for foaming is provided on the element substrate 1 provided with
The first liquid flow path 14 for the discharged liquid which is directly communicated with the discharge port 18 is disposed thereon.

The upstream side of the first liquid flow path communicates with the first common liquid chamber 15 for supplying the discharge liquid to the plurality of first liquid flow paths, and the upstream side of the second liquid flow path is The plurality of second liquid flow paths communicate with a second common liquid chamber for supplying a foaming liquid.

However, when the same liquid is used as the foaming liquid and the discharge liquid, the common liquid chamber may be made one and shared.

A separation wall 30 made of a material having elasticity such as metal is provided between the first and second liquid flow paths, and is provided between the first liquid flow path and the second liquid flow path. Are classified. In the case where the foaming liquid and the discharge liquid are liquids that should not be mixed as much as possible, the flow of the liquids in the first liquid flow path 14 and the second liquid flow path 16 can be separated as completely as possible by this separation wall. It is better to perform the separation, but if there is no problem even if the foaming liquid and the discharge liquid are mixed to some extent, the separation wall may not have the function of complete separation.

The separation wall of the portion located in the projection space above the heating element in the plane direction (hereinafter referred to as a discharge pressure generation area; the area A and the bubble generation area 11 in FIG. 14 in FIG.
5, the discharge port side (downstream side of the liquid flow) is a free end, and a cantilever-shaped movable member 31 having a fulcrum 33 located on the common liquid chamber (15, 17) side. This movable member 3
1 is arranged so as to face the bubble generation region 11 (B), so that it operates so as to open toward the discharge port side on the first liquid flow path side by foaming of the foaming liquid (in the direction of the arrow in the figure). FIG.
Also, in the element substrate 1 on which the heating resistor portion as the heating element 2 and the wiring electrode 5 for applying an electric signal to the heating resistor portion, a space constituting the second liquid flow path is formed. A separation wall 30 is disposed through the separation wall 30.

The relationship between the arrangement of the fulcrum 33 and the free end 32 of the movable member 31 and the arrangement with the heating element is the same as in the previous embodiment.

Although the structure relationship between the liquid supply path 12 and the heating element 2 has been described in the previous embodiment, the structure relationship between the second liquid flow path 16 and the heating element 2 in this embodiment also. The same is true.

Next, the operation of the liquid discharge head according to the present embodiment will be described with reference to FIG.

When the head was driven, the head was operated using the same water-based ink as the discharge liquid supplied to the first liquid flow path 14 and the foaming liquid supplied to the second liquid flow path 16.

The heat generated by the heating element 2 acts on the foaming liquid in the bubble generation area of the second liquid flow path, so that the foaming liquid is applied to the foaming liquid in the same manner as described in the previous embodiment. 1
Bubble 4 based on film boiling phenomenon as described in 29
Generates 0.

In this embodiment, since there is no escape of the foaming pressure from the three sides except for the upstream side of the bubble generation region, the pressure accompanying the bubble generation is applied to the movable member 6 disposed in the discharge pressure generating section. The movable member 6 is displaced from the state of FIG. 16A to the first liquid flow path side as shown in FIG. 16B with the growth of bubbles. Due to the operation of the movable member, the first liquid flow path 14 and the second liquid flow path 16 communicate with each other largely, and the pressure based on the generation of bubbles mainly occurs in the direction (A direction) on the discharge port side of the first liquid flow path. Convey. The liquid is discharged from the discharge port by the propagation of the pressure and the mechanical displacement of the movable member as described above.

Next, as the bubbles shrink, the movable member 3
1 returns to the position shown in FIG.
In 4, the amount of the discharged liquid corresponding to the amount of the discharged liquid is supplied from the upstream side. Also in the present embodiment, the supply of the discharge liquid is in the direction in which the movable member closes, similarly to the above-described embodiment, so that the refill of the discharge liquid is not hindered by the movable member.

The second embodiment is the same as the first embodiment in the operation and effects of the main parts relating to the propagation of the foaming pressure due to the displacement of the movable member, the growth direction of bubbles, the prevention of back waves, and the like. However, by adopting the two flow path configuration as in the present embodiment, there are further advantages as follows.

That is, according to the configuration of the above-described embodiment, the discharge liquid and the foaming liquid can be made different liquids, and the discharge liquid can be discharged by the pressure generated by the foaming of the foaming liquid. For this reason, conventionally, even if it is a high-viscosity liquid such as polyethylene glycol, which has been insufficiently foamed even when heat is applied and discharge power is insufficient, this liquid is supplied to the first liquid flow path,
Liquid that foams well in the foaming liquid (ethanol: water =
By supplying a liquid having a low boiling point and a liquid having a low boiling point to the second liquid flow path, a good discharge can be achieved.

Further, by selecting a liquid which does not generate deposits such as kogation on the surface of the heating element even when it receives heat as the foaming liquid, foaming can be stabilized and good ejection can be performed.

Further, in the structure of the head of the present invention, the effects as described in the above-described embodiment can be obtained.
Further, a liquid such as a highly viscous liquid can be discharged with high discharge efficiency and high discharge force.

Even in the case of a liquid weak to heating, this liquid is supplied to the first liquid flow path as a discharge liquid, and the liquid which is hardly thermally degraded and generates good foaming in the second liquid flow path is supplied. This makes it possible to discharge the liquid weak to heating without causing thermal harm, and with high discharge efficiency and high discharge force as described above.

<Other Embodiments> Although the embodiments of the liquid ejection head and the main part of the liquid ejection method applicable to the present invention have been described above, the invention can be preferably applied to these embodiments below. An embodiment will be described with reference to the drawings. However, in the following description, there is a case where either one of the above-described embodiment of the one-passage form and the embodiment of the two-passage form is described. However, unless otherwise specified, the present invention is applied to both embodiments. It is a good thing.

<Arrangement Relationship between Second Liquid Flow Path and Movable Member> FIG. 17 is a view for explaining the arrangement relation between the above-described movable member 31 and the second liquid flow path 16. FIG. 2A is a view of the vicinity of the separation wall 30 and the movable member 31 as viewed from above, and FIG. 2B is a view of the second liquid flow path 16 from which the separation wall 30 has been removed, as viewed from above. FIG. 3C is a diagram schematically showing the arrangement relationship between the movable member 6 and the second liquid flow path 16 by overlapping these elements. In each of the figures, the lower part of the drawing is the front side where the discharge ports are arranged.

The second liquid flow path 16 of this embodiment is located on the upstream side of the heating element 2 (the upstream side here is from the second common liquid chamber side to the heating element position, the movable member, and the first flow path). It has a constriction 19 at the upstream side in the large flow toward the discharge port, and suppresses the pressure at the time of bubbling from easily escaping to the upstream side of the second liquid flow path 16. It has a chamber (foaming chamber) structure.

As in the conventional head, the flow path for bubbling and the flow path for discharging the liquid are the same, and a constricted portion is formed so that the pressure generated on the liquid chamber side from the heating element does not escape to the common liquid chamber side. In the case of the head provided with the above, it is necessary to adopt a configuration in which the cross-sectional area of the flow path in the constricted portion does not become so small in consideration of liquid refilling.

However, in the case of this embodiment, most of the liquid to be discharged can be used as the discharge liquid in the first liquid flow path.
Since the foaming liquid in the second liquid flow path provided with the heating element can be prevented from being consumed so much, the amount of the foaming liquid filled in the bubble generation region 11 of the second liquid flow path may be small. Therefore, since the interval in the constricted portion 19 can be made very small, that is, several μm to several tens of μm, it is possible to further suppress the pressure at the time of foaming generated in the second liquid flow path from being released too much to the surroundings, and to concentrate and move. It can be turned to the member side. Since this pressure can be used as the discharge force via the movable member 31, higher discharge efficiency and discharge force can be achieved. However, the shape of the first liquid flow path 16 is not limited to the above-described structure, and may be any shape as long as the pressure accompanying the generation of bubbles can be effectively transmitted to the movable member side.

As shown in FIG. 17 (c), the side of the movable member 31 covers a part of the wall constituting the second liquid flow path. Dropping into the liquid flow path can be prevented. This can further enhance the separability between the ejection liquid and the foaming liquid described above. In addition, since the escape of bubbles from the slits can be suppressed, the discharge pressure and the discharge efficiency can be further increased. further,
The effect of the refill from the upstream side by the pressure at the time of the defoaming can be enhanced.

In FIG. 16B, some of the bubbles generated in the bubble generation region of the second liquid flow path 4 due to the displacement of the movable member 6 toward the first liquid flow path 14 are removed. Although it extends toward the first liquid flow path 14, by setting the height of the second flow path such that the bubbles extend in this manner, the ejection force can be further increased as compared with the case where the bubbles do not extend. Can be improved. In order for the bubbles to extend into the first liquid flow path 14 in this manner, it is desirable that the height of the second liquid flow path 16 be lower than the height of the maximum bubble. It is desirable that the thickness be in the range of μm to 30 μm. In this embodiment, the height is set to 15 μm.

<Movable Member and Separation Wall> FIG. 18 shows another shape of the movable member 31. Reference numeral 35 denotes a slit provided in the separation wall, and the slit forms the movable member 31. . (A) is a rectangular shape, (b) is a shape where the fulcrum side is narrower and the movable member is easy to operate, and (c) is a shape where the fulcrum side is wider and the movable member is wider. This is a shape that improves the durability of the device.
As a shape having good operability and durability, FIG.
As shown in (a), it is desirable that the width on the fulcrum side is narrowed in an arc shape, but the shape of the movable member is a shape that can easily operate without entering the second liquid flow path side. ,
Any shape having excellent durability may be used.

In the above embodiment, the plate-shaped movable member 31 and the separation wall 5 having this movable member have a thickness of 5 μm.
However, the material of the movable member and the separation wall is not limited to this, and has a solvent resistance to the foaming liquid and the discharge liquid, and has elasticity to operate well as the movable member. What is necessary is just to be able to form a fine slit.

As the material of the movable member, high durability
Metals such as silver, nickel, gold, iron, titanium, aluminum, platinum, tantalum, stainless steel, phosphor bronze, and alloys thereof, or resins having a nitrile group such as acrylonitrile, butadiene, styrene, and amide groups such as polyamide Resin, resin having a carboxyl group such as polycarbonate, resin having an aldehyde group such as polyacetal, resin having a sulfone group such as polysulfone,
In addition, resins and compounds such as liquid crystal polymers, highly ink-resistant metals such as gold, tungsten, tantalum, nickel, stainless steel, titanium, alloys of these and those with ink resistance coated on the surface or polyamide A resin having an amide group such as
Resins having an aldehyde group such as polyacetal, resins having a ketone group such as polyetheretherketone, resins having an imide group such as polyimide, resins having a hydroxyl group such as a phenol resin, resins having an ethyl group such as polyethylene, polypropylene, etc. A resin having an alkyl group, a resin having an epoxy group such as an epoxy resin, a resin having an amino group such as a melamine resin, a resin having a methylol group such as a xylene resin and its compound, and a ceramic such as silicon dioxide and its compound. desirable.

Examples of the material of the separation wall include polyethylene, polypropylene, polyamide, polyethylene terephthalate, melamine resin, phenol resin, epoxy resin, polybutadiene, polyurethane, polyetheretherketone, polyethersulfone, polyarylate, polyimide, polysulfone, and liquid crystal. A resin having good heat resistance, solvent resistance and moldability represented by recent engineering plastics such as polymer (LCP) and its compound, or silicon dioxide, silicon nitride, nickel,
Metals such as gold and stainless steel, alloys and their compounds, or those whose surfaces are coated with titanium or gold are desirable.

The thickness of the separation wall may be determined in consideration of its material and shape from the viewpoint that the strength as the separation wall can be achieved and the movable member operates well.
A thickness of about 0.5 to 10 μm is desirable.

Although the width of the slit 35 for forming the movable member 31 is 2 μm in this embodiment, if the foaming liquid and the discharge liquid are different liquids, and it is desired to prevent a mixture of the two liquids, The slit width may be set to an interval that forms a meniscus between the two liquids, and the flow of each liquid may be suppressed. For example, when a liquid of about 2 cP (centipoise) is used as the foaming liquid and a liquid of 100 cP or more is used as the discharge liquid, the liquid mixture can be prevented even with a slit of about 5 μm, but it is preferable that the slit be 3 μm or less. .

The movable member in the present invention has a thickness of the order of μm (t μm), and a movable member having a thickness of the order of cm is not intended. For a movable member having a thickness on the order of μm, a slit width (W
μm), it is desirable to consider the manufacturing variation to some extent.

When the thickness of the member facing the free end and / or the side end of the movable member forming the slit is equal to the thickness of the movable member (FIG. 16 and the like), the relationship between the slit width and the thickness is taken into consideration in consideration of manufacturing variations. By setting it in the following range, it is possible to stably suppress the mixture of the foaming liquid and the discharge liquid. Although this is a limited condition, when a high-viscosity ink (5 cp, 10 cp, etc.) is used for a foaming liquid having a viscosity of 3 cp or less, W / t ≦ 1 is satisfied from a design viewpoint. As a result, a configuration in which the mixing of the two liquids can be suppressed for a long period of time was obtained.

The slit which gives the “substantially sealed state” of the present invention is more reliable if it is on the order of several μm.

<Head Structure with Two Flow Channels> The liquid discharge which can satisfactorily separate and introduce different liquids into the first and second common liquid chambers, can reduce the number of parts, and can reduce the cost. An example of the structure of the head will be described.

FIG. 19 is a schematic diagram showing the structure of such a liquid discharge head. The same reference numerals are used for the same components as in the previous embodiment, and a detailed description thereof will be omitted here.

In this embodiment, the grooved member 50 is used.
Communicates in common with the orifice plate 51 having the discharge port 18, the plurality of grooves constituting the plurality of first liquid flow paths 14, and the plurality of liquid flow paths 14, and communicates with each of the first liquid flow paths 3. And a recess forming a first common liquid chamber 15 for supplying a liquid (ejection liquid).

The lower portion of the grooved member 50 is provided with a separation wall 30.
Can be formed to form a plurality of first liquid flow paths 14. Such a grooved member 50 has a first liquid supply path 20 that reaches the inside of the first common liquid chamber 15 from above. Further, the grooved member 50 penetrates the separation wall 30 from the upper part thereof and reaches the second common liquid chamber 17 in the second common liquid chamber 17.
The liquid supply path 21 of FIG.

The first liquid (discharge liquid) is indicated by an arrow C in FIG.
As shown in FIG. 19, the liquid is supplied to the first common liquid chamber 15 and then to the first liquid flow path 14 via the first liquid supply path 20, and the second liquid (foaming liquid) is indicated by an arrow D in FIG. As shown, the second
Through the liquid supply path 21, the second common liquid chamber 17, and then the second common liquid chamber 17,
The liquid is supplied to the liquid flow path 16.

In this embodiment, the second liquid supply path 21
Is arranged in parallel with the first liquid supply passage 20, but is not limited to this, penetrates the separation wall 30 arranged outside the first common liquid chamber 15, and 17 may be arranged in any way as long as it is formed so as to communicate with 17.

The thickness (diameter) of the second liquid supply path 21
Is determined in consideration of the supply amount of the second liquid.
The shape of the second liquid supply path 21 does not need to be round,
It may be rectangular or the like.

Further, the second common liquid chamber 17 is provided with a grooved member 50.
By the partition wall 30. As a forming method, as shown in an exploded perspective view of this embodiment shown in FIG. 20, a common liquid chamber frame and a second liquid path wall are formed on an element substrate with a dry film, and a groove with a fixed separation wall is provided. By bonding the combined body of the member 50 and the separation wall 30 to the element substrate 1, the second common liquid chamber 17 and the second liquid flow path 16 are bonded.
May be formed.

In the present embodiment, as described above, as a heating element that generates heat for generating bubbles due to film boiling in a foaming liquid, on a support 70 formed of a metal such as aluminum. An element substrate 1 provided with a plurality of electrothermal conversion elements is provided.

On the element substrate 1, a plurality of grooves forming the liquid flow path 16 formed by the second liquid path wall, and a plurality of the foaming liquid flow paths are communicated. Forming a second common liquid chamber (common bubbling liquid chamber) 17 for supplying water, and a separation wall 30 provided with the movable wall 31 described above.
And are arranged.

Reference numeral 50 denotes a grooved member. The grooved member is joined to the separation wall 30 to form a discharge liquid flow path (first
A first common liquid chamber (common discharge liquid chamber) 15 which communicates with the groove forming the liquid flow path) 14 and the discharge liquid flow path to supply the discharge liquid to each discharge liquid flow path; Of the recess,
A first supply path (discharge liquid supply path) 20 for supplying discharge liquid to the first common liquid chamber, and a second supply path (foam liquid supply) for supplying foaming liquid to the second common liquid chamber 17. (Road) 21. The second supply passage 21 penetrates the separation wall 30 disposed outside the first common liquid chamber 15 and
7, the foaming liquid is not mixed with the discharge liquid by the communication path, and the foamed liquid is mixed with the second common liquid chamber 1.
5 can be supplied.

The arrangement relationship between the element substrate 1, the separation wall 30, and the grooved top plate 50 is such that the movable member 31 is arranged corresponding to the heating element of the element substrate 1, and corresponds to the movable member 31. A discharge liquid channel 14 is provided. Further, in the present embodiment, an example is shown in which one second supply path is provided in the grooved member, but a plurality of second supply paths may be provided according to the supply amount. Furthermore, the flow path cross-sectional area of the discharge liquid supply path 20 and the foaming liquid supply path 21 may be determined in proportion to the supply amount.

By optimizing the cross-sectional area of the flow path, it is possible to further reduce the size of the components constituting the grooved member 50 and the like.

As described above, according to the present embodiment, the second supply path for supplying the second liquid to the second liquid flow path,
Since the first supply path for supplying the first liquid to the first liquid flow path is formed of the same grooved top plate as the grooved member, the number of parts can be reduced, and the process can be shortened and the cost can be reduced. Become.

The supply of the second liquid to the second common liquid chamber communicating with the second liquid flow path is performed by the second liquid flow path in a direction penetrating the separation wall separating the first liquid and the second liquid. Since the structure is performed, the bonding step of the separation wall, the grooved member, and the heating element forming substrate only needs to be performed once, thereby improving the ease of manufacturing, improving the bonding accuracy, and discharging well. Can be.

Since the second liquid penetrates through the separation wall and is supplied to the second liquid common liquid chamber, the supply of the second liquid to the second liquid flow path is ensured, and the supply amount can be sufficiently secured.
Stable discharge is possible.

<Manufacture of Liquid Discharge Head> Next, the process of manufacturing the liquid discharge head of the present embodiment will be described.

In the case of the liquid discharge head as shown in FIG. 10, a base 34 for providing the movable member 31 on the element substrate 1 is formed by patterning a dry film or the like. 31 was adhered or fixed by welding. Thereafter, a grooved member having a plurality of grooves forming each liquid flow path 10, a discharge port 18, and a concave part forming the common liquid chamber 13 is joined to the element substrate 1 in such a manner that the grooves correspond to the movable members. It was formed by doing.

Next, as shown in FIG. 14 and FIG.
The manufacturing process of the liquid discharge head having the flow path configuration will be described.

Generally, the second liquid flow path 1 is formed on the element substrate 1.
6, a separation wall 30 is mounted thereon, and a grooved member 50 provided with a groove or the like constituting the first liquid flow path 14 is further mounted thereon. Alternatively, the second liquid flow path 1
After forming the wall of No. 6, the head was manufactured by joining the grooved member 50 on which the separation wall 30 was attached to the wall.

Further, a method for forming the second liquid flow path will be described in detail.

FIGS. 21A to 21E are schematic cross-sectional views for explaining a first example of the method of manufacturing a liquid discharge head according to the present embodiment.

In this embodiment, as shown in (a), hafnium boride, tantalum nitride and the like are formed on an element substrate (silicon wafer) 1 by using the same manufacturing apparatus as used in the semiconductor manufacturing process. After the element for electrothermal conversion having the heating element 2 made of was formed, the surface of the element substrate 1 was washed for the purpose of improving the adhesion to the photosensitive resin in the next step. Furthermore, in order to improve the adhesion, after performing a surface modification on the surface of the element substrate with UV-ozone or the like,
For example, a silane coupling agent (manufactured by Nippon Yunika: A18
This is achieved by spin-coating a liquid obtained by diluting 9) to 1% by weight with ethyl alcohol on the modified surface.

Next, as shown in (b), an ultraviolet-sensitive resin film (a dry film made by Tokyo Ohka: Odile SY) was formed on the substrate 1 having been subjected to surface cleaning and having improved adhesion.
-318) The DF was laminated.

Next, as shown in (c), a photomask PM is arranged on the dry film DF, and ultraviolet rays are passed through the photomask PM to a portion of the dry film DF to be left as the second channel wall. Was irradiated. This exposure step
Manufactured by Canon Inc .: MPA-600, about 6
The exposure was performed at an exposure of 00 mJ / cm ² .

Next, as shown in (d), the dry film DF was developed with a developing solution (BMRC-3, manufactured by Tokyo Ohka Chemical Co., Ltd.) composed of a mixture of xylene and butyl cellosolve acetate, and the unexposed portion was developed. The portion that was dissolved, exposed and cured was formed as a wall portion of the second liquid flow path 16. Further, the residue remaining on the surface of the element substrate 1 is removed by treating it with an oxygen plasma ashing apparatus (MAS-800, manufactured by Alcantech) for about 90 seconds, and subsequently, at 150 ° C. for 2 hours, and further 100 mJ / cm ^{2 of} ultraviolet irradiation. The exposure was completely cured.

According to the above-described method, the second liquid flow path can be uniformly formed with high accuracy on a plurality of heater boards (element substrates) divided and manufactured from the silicon substrate. A dicing machine (manufactured by Tokyo Seimitsu:
(AWD-4000) to cut and separate each heater board 1. An adhesive (made by Toray:
(SE4400) on the aluminum base plate 70 (FIG. 27). Next, the aluminum base plate 70
An aluminum wire (not shown) having a diameter of 0.05 mm is formed by connecting the printed wiring board 71 bonded above and the heater board 1 to each other.
Connected with.

Next, as shown in FIG. 21 (e), the joined body of the grooved member 50 and the separation wall 30 was positioned and joined to the heater board 1 thus obtained, as shown in FIG. 21 (e).
That is, the grooved member having the separating wall 30 and the heater board 1 are positioned and engaged and fixed by the pressing spring 78, and then the ink / foaming liquid supply member 80 is joined and fixed on the aluminum base plate 70, and the aluminum wire is fixed. , Grooved member 50, heater board 1, and ink / foaming liquid supply member 80
The gap with the silicone sealant (made by Toshiba Silicone:
(TSE399) and completed.

By forming the second liquid flow path by the above-described manufacturing method, it is possible to obtain a high-precision flow path with no positional deviation with respect to the heater of each heater board. In particular, by joining the grooved member 50 and the separation wall 30 in the previous step in advance, the positional accuracy of the first liquid flow path 14 and the movable member 31 can be improved.

By these high-precision manufacturing techniques, the ejection is stabilized and the print quality is improved. In addition, since it can be formed on a wafer at a time, a large amount can be manufactured at low cost.

In this embodiment, an ultraviolet-curing dry film is used to form the second liquid flow path. However, a resin having an absorption band in the ultraviolet region, particularly around 248 nm, is used, and after lamination, It can also be obtained by curing and directly removing the resin in the portion that will become the second liquid flow path with an excimer laser.

FIGS. 22A to 22D are schematic cross-sectional views for explaining a second embodiment of the method of manufacturing a liquid discharge head according to the present embodiment.

In this embodiment, as shown in FIG. 18A, a 15 μm thick resist 1 is formed on a SUS substrate 100.
01 was patterned in the shape of the second liquid flow path.

Next, as shown in (b), the SUS substrate 1
00 was electroplated to grow a nickel layer 102 on the SUS substrate 100 by 15 μm. As the plating solution, a stress reducing agent (Zerool, manufactured by World Metal Co.), boric acid, a pit preventing agent (NP-APS, manufactured by World Metal Co.), and nickel chloride were used for nickel sulfamate. As for the method of applying an electric field at the time of electrodeposition, an electrode was attached to the anode side, the already patterned SUS substrate 100 was attached to the cathode side, and the temperature of the plating solution was set to 50 ° C.
And the current density was 5 A / cm ² .

Next, as shown in (c), ultrasonic vibration is applied to the SUS substrate 100 which has been plated as described above, and the nickel layer 102 is peeled off from the SUS substrate 100. A liquid flow path was obtained.

On the other hand, a heater board provided with an electrothermal conversion element was formed on a silicon wafer using the same manufacturing apparatus as that for semiconductors. This wafer was separated into respective heater boards by a dicing machine in the same manner as in the previous embodiment. The heater board 1 is joined to an aluminum base plate 70 to which a printed board 104 has been joined in advance, and the printed board 7
1 and an aluminum wire (not shown) to form an electrical wiring. On the heater board 1 in such a state, as shown in FIG. 22D, the second liquid flow path obtained in the previous step was positioned and fixed. At the time of this fixing, since the top plate on which the separation wall is fixed is engaged with and tightly attached to the top plate to which the separation wall is fixed in a later step as in the first embodiment, the fixing is performed to the extent that no positional displacement occurs at the time of joining the top plate. Is enough.

In the present embodiment, an ultraviolet-curing adhesive (manufactured by Grace Japan: Amicon UV) is used for the positioning and fixing.
-300) was applied, and the fixing was completed in about 3 seconds with an exposure amount of 100 mJ / cm ² using an ultraviolet irradiation device.

According to the manufacturing method of the present embodiment, the second liquid flow path can be obtained with high accuracy without any displacement with respect to the heating element, and the flow path wall is formed of nickel. It is possible to provide a highly reliable head that is resistant to alkaline liquids.

FIGS. 23A to 23D are schematic sectional views for explaining a third embodiment of the method of manufacturing the liquid discharge head according to the present embodiment.

In this embodiment, as shown in (a), a resist 31 is formed on both sides of a 15 μm thick SUS substrate 100 having alignment holes or marks 100a.
Was applied. Here, PMERP-AR900 manufactured by Tokyo Ohka was used as the resist.

After that, as shown in FIG.
Exposure was performed using an exposure apparatus (MPA-600, manufactured by Canon Inc.) in accordance with the alignment hole 100a of No. 00, and the resist 103 in the portion where the second liquid flow path was to be formed was removed. The exposure was performed at an exposure amount of 800 mJ / cm ² .

Next, as shown in (c), the SUS substrate 100 on which the resists 103 on both sides are patterned is immersed in an etching solution (an aqueous solution of ferric chloride or cupric chloride) and exposed from the resist 103. After etching the exposed portion, the resist was removed.

Next, as shown in (d), the etched SUS substrate 100 is positioned and fixed on the heater board 1 and the second liquid flow path 4 is formed in the same manner as in the above embodiment of the manufacturing method. Was assembled.

According to the manufacturing method of this embodiment, in addition to obtaining the second liquid flow path 4 with high accuracy without displacement of the heater, since the flow path is formed by SUS,
It is possible to provide a highly reliable liquid ejection head that is resistant to acid and alkaline liquids.

As described above, according to the manufacturing method of the present embodiment, the wall of the second liquid flow path is provided in advance on the element substrate, so that the electrothermal converter and the second liquid flow path can be separated. Can be positioned with high accuracy. In addition, since the second liquid flow path can be formed simultaneously on a large number of element substrates on the substrate before cutting and separation, a large amount of low-cost liquid discharge head can be provided.

In the liquid discharge head obtained by performing the method of manufacturing a liquid discharge head according to the manufacturing method of the present embodiment, the heating element and the second liquid flow path are positioned with high precision. In addition, the pressure of foaming due to the heat generated by the electrothermal transducer can be efficiently received, and the discharge efficiency is excellent.

<Liquid Discharge Head Cartridge> Next, a liquid discharge head cartridge equipped with the liquid discharge head according to the above embodiment will be schematically described.

FIG. 27 is a schematic exploded perspective view of a liquid discharge head cartridge including the above-described liquid discharge head. The liquid discharge head cartridge is schematically composed mainly of a liquid discharge head section 200 and a liquid container 90. I have.

The liquid discharge head unit 200 includes the element substrate 1,
It comprises a separation wall 30, a grooved member 50, a pressing spring 78, a liquid supply member 80, a support 70 and the like. As described above, the element substrate 1 is provided with a plurality of heating resistors for applying heat to the foaming liquid in a row, and a functional element for selectively driving the heating resistors. Are provided. This element substrate 1 and the aforementioned separation wall 3 having a movable wall
0, a foaming liquid passage is formed, and the foaming liquid flows. By joining the separation wall 30 and the grooved top plate 50, a discharge flow path (not shown) through which the discharged liquid to be discharged flows is formed.

The pressing spring 78 is a member for applying an urging force in the direction of the element substrate 1 to the grooved member 50, and the urging force causes the element substrate 1, the separation wall 30, the grooved member 50, and a support member to be described later. 70 and satisfactorily integrated.

The support 70 is for supporting the element substrate 1 and the like. On the support 70, a circuit board 71 for connecting to the element substrate 1 and supplying an electric signal,
A contact pad 72 for exchanging electrical signals with the device by connecting to the device is provided.

The liquid container 90 contains a discharge liquid such as ink supplied to the liquid discharge head and a foaming liquid for generating bubbles inside the liquid container 90 separately. Outside the liquid container 90, a positioning portion 94 for arranging a connection member for connecting the liquid ejection head and the liquid container and a fixed shaft 95 for fixing the connection portion are provided. The discharge liquid is supplied from the discharge liquid supply path 92 of the liquid container to the discharge liquid supply path 83 of the liquid supply member 80 via the supply path 81 of the connection member.
To the first through the discharge liquid supply path 20 of each member.
Are supplied to a common liquid chamber. Similarly, the foaming liquid is supplied from the supply path 93 of the liquid container to the foaming liquid supply path 84 of the liquid supply member 80 via the supply path 82 of the connection member, and the second liquid is supplied through the foaming liquid supply path 21 of each member. Supplied to the room.

In the above-described liquid discharge head cartridge, the supply form and the liquid container that can supply the liquid are also described when the foaming liquid and the discharge liquid are different liquids. The supply path and the container for the foaming liquid and the discharge liquid do not have to be separated.

It should be noted that the liquid container may be refilled and used after the consumption of each liquid. For this purpose, it is desirable to provide a liquid inlet in the liquid container. Further, the liquid discharge head and the liquid container may be integrated or may be separable.

<Liquid Discharge Apparatus> FIG. 24 shows a schematic configuration of a liquid discharge apparatus equipped with the above-described liquid ejecting head. In the present embodiment, a carriage HC of a liquid ejection apparatus, which will be described using an ink ejection recording apparatus using ink as an ejection liquid, is a head cartridge in which a liquid tank section 90 containing ink and a liquid ejection head section 200 are detachable. And reciprocate in the width direction of the recording medium 150 such as recording paper conveyed by the recording medium conveying means.

When a drive signal is supplied from a drive signal supply means (not shown) to the liquid discharge means on the carriage, the recording liquid is discharged from the liquid discharge head to the recording medium in accordance with this signal.

Further, in the liquid discharge apparatus of this embodiment, the motor 111 as a drive source for driving the recording medium transport means and the carriage, the gears 112 and 113 for transmitting the power from the drive source to the carriage. It has a shaft 85 and the like. With this recording apparatus and the liquid ejection method performed by this recording apparatus, a recorded matter of a good image could be obtained by ejecting liquid to various recording media.

FIG. 25 is a block diagram of an entire apparatus for operating ink discharge recording to which the liquid discharge method and liquid discharge head of the present invention are applied.

The printing apparatus receives print information from the host computer 300 as a control signal. The print information is temporarily stored in an input interface 301 inside the printing apparatus, and at the same time, is converted into data that can be processed in the printing apparatus, and is input to the CPU 302 also serving as a head drive signal supply unit. The CPU 302 processes data input to the CPU 302 using a peripheral unit such as the RAM 304 based on a control program stored in the ROM 303,
Convert to print data (image data).

In order to record the image data at an appropriate position on the recording sheet, the CPU 302 generates drive data for driving a driving motor for moving the recording sheet and the recording head in synchronization with the image data. The image data and the motor drive data are respectively
The image is transmitted to the head 200 and the drive motor 306 via the motor driver 305, and is driven at a controlled timing to form an image.

The recording medium which can be applied to the recording apparatus as described above and to which a liquid such as ink is applied includes plastics, cloth, aluminum, etc. used for various papers, OHP sheets, compact discs, decorative plates and the like. Metal materials such as copper and copper, leather materials such as cow skin, pig skin and artificial leather, wood such as wood and plywood, ceramic materials such as bamboo materials and tiles, and three-dimensional structures such as sponges can be targeted.

As the above-mentioned recording apparatus, various types of paper and O
A printer device for recording on an HP sheet or the like, a recording device for a plastic for recording on a plastic material such as a compact disc, a recording device for a metal for recording on a metal plate,
A recording device for leather for recording on leather, a recording device for wood for recording on wood, a recording device for ceramics for recording on ceramic materials, a recording device for recording on a three-dimensional network structure such as a sponge, and a cloth Also includes a textile printing device for performing recording on the paper.

As the discharge liquid used in these liquid discharge apparatuses, a liquid suitable for each recording medium and recording conditions may be used.

<Recording System> Next, an example of an ink jet recording system for performing recording on a recording medium using the liquid discharge head of the present invention as a recording head will be described.

FIG. 26 is a schematic diagram for explaining the configuration of an ink jet recording system using the above-described liquid discharge head 201 of the present invention. The liquid ejection head in this embodiment is a full line type head in which a plurality of ejection ports are arranged at intervals of 360 dpi in a length corresponding to the recordable width of the recording medium 150, and is yellow (Y), magenta (M). , Cyan (C), and black (Bk) are fixedly supported in parallel by a holder 202 at predetermined intervals in the X direction.

A signal is supplied to each of these heads from a head driver 307 constituting drive signal supply means, and each head is driven based on this signal.

Each head has Y, M, C,
Bk four color inks are supplied from ink containers 204a to 204d, respectively. Reference numeral 204e denotes a foaming liquid container in which a foaming liquid is stored, and the foaming liquid is supplied from the container to each head.

A head cap 203 having an ink absorbing member such as a sponge therein is provided below each head.
a to 203d are provided, and the maintenance of the head can be performed by covering the ejection openings of each head during non-printing.

Reference numeral 206 denotes a transport belt which constitutes transport means for transporting various types of non-recording media as described in the above embodiments. The transport belt 206 is drawn around a predetermined path by various rollers, and is driven by a driving roller connected to a motor driver 305.

In the ink jet recording system of this embodiment, a pre-processing device 251 and a post-processing device 252 for performing various processes on a recording medium before and after recording are respectively arranged upstream and downstream of the recording medium transport path. Provided.

The contents of the pre-processing and post-processing differ depending on the type of recording medium on which recording is performed and the type of ink. For example, for recording media such as metal, plastic, and ceramics, As a pretreatment, irradiation of ultraviolet rays and ozone is performed to activate the surface, thereby improving the adhesion of the ink. Further, in a recording medium such as plastic which easily generates static electricity, dust easily adheres to the surface due to the static electricity, and good recording may be hindered by the dust. For this reason, it is preferable to remove dust from the recording medium by removing static electricity from the recording medium using an ionizer device as a pretreatment.
When a cloth is used as a recording medium, an alkaline substance,
A treatment for providing a substance selected from a water-soluble substance, a synthetic polymer, a water-soluble metal salt, urea, and thiourea may be performed as pretreatment. The pre-processing is not limited to these, and may be a process of setting the temperature of the recording medium to a temperature suitable for recording.

On the other hand, the post-processing is a fixing process for promoting the fixing of the ink to the recording medium to which the ink has been applied by heat treatment, ultraviolet irradiation, or the like, and a cleaning agent applied in the pre-processing and remaining unreacted. And the like.

Although the present embodiment has been described using a full-line head as the head, the present invention is not limited to this. For example, a small-sized head as described above is conveyed in the width direction of the recording medium to perform recording. It may be something.

[0211]

As is apparent from the above description, according to the method for positioning a sheet member and the positioning apparatus using the same according to the present invention, the conveying jig can be moved in one direction with respect to the mounting surface of the base of the transport jig. In a state where the position is regulated, the position of the sheet member held by the conveyance jig with respect to the predetermined position of the base is adjusted, so that the relative position of the sheet member with respect to the base is detected, and one-way image processing for sending image data is performed. Since no system is required, the size of the assembling apparatus can be reduced.

Further, the transfer jig is arranged at a position where the joining surface portion abuts and follows the mounting surface of the base, and the position of the transfer jig in one direction with respect to the mounting surface of the base is regulated. In the case where the position adjustment of the sheet member held by the transport jig with respect to the predetermined position of the base is performed, the step of inspecting the parallelism of the joining surface of the sheet member to the mounting surface of the base becomes unnecessary, so that the sheet is not required. It is possible to reduce a series of operation time until the member is positioned and mounted on the mounting surface of the base. Therefore, there is no need to provide an inspection work station for inspecting the parallelism.

According to the present invention, the following effects can be obtained.

(A) Since the contact portion between the sheet member and the conveying jig is small, the possibility of the sheet member being damaged or deformed by the conveying jig is reduced. (The sheet member is very thin and easily damaged or deformed.) (B) The sheet member is held by the transport jig using magnetic force. In this holding state, when an external force is applied to the sheet member, the holding state changes. By using this feature,
That is, by flattening the joint surface between the sheet member and the base, the joint surface between the sheet member and the base can be self-parallelized.

(C) Since the holding state of the sheet member is changed, the sheet member is not deformed or damaged if an external force is applied by appropriate means. Further, since the sheet member can be abutted on the basis of the abutment without being damaged, an abutting method can be employed in the alignment.

(D) (b) and (c), the apparatus can be simplified, the apparatus cost can be reduced, and the apparatus scale can be reduced.

(E) There is no need for image processing or a step of aligning the sheet member with the base (laser displacement meter) and other steps, thereby improving tact time.

[Brief description of the drawings]

FIGS. 1A to 1C are views for explaining the operation of a first embodiment of a sheet member positioning method and a positioning apparatus using the sheet member according to the present invention.

FIG. 2 is a perspective view for explaining the operation of an example of a positioning method of a sheet member and a positioning apparatus using the same according to the present invention.

FIG. 3 is a perspective view showing a schematic configuration of a positioning apparatus to which an example of a method for positioning a sheet member according to the present invention is applied.

FIG. 4 is an exploded perspective view showing an ink jet head assembled by applying an example of a sheet member positioning method and a positioning device using the same according to the present invention.

FIG. 5 is a diagram for explaining the operation of a second embodiment of a sheet member positioning method and a positioning device using the sheet member according to the present invention.

FIG. 6 is a diagram provided to explain the operation of a third embodiment of a sheet member positioning method and a positioning device using the sheet member according to the present invention.

FIGS. 7A to 7E are views for explaining the operation of a fourth embodiment of a sheet member positioning method and a positioning apparatus using the sheet member according to the present invention.

FIGS. 8A to 8D are views for explaining the operation of a fifth embodiment of a sheet member positioning method and a positioning apparatus using the same according to the present invention.

FIG. 9 is a schematic sectional view showing an example of a liquid ejection head to which the present invention is applied.

FIG. 10 is a partially cutaway perspective view of a liquid ejection head to which the present invention is applied.

FIG. 11 is a schematic diagram showing pressure propagation from bubbles in a conventional head.

FIG. 12 is a schematic diagram showing pressure propagation from bubbles in a head to which the present invention is applied.

FIG. 13 is a schematic diagram for explaining a flow of a liquid inside a head to which the present invention is applied.

FIG. 14 is a cross-sectional view of a liquid ejection head (two flow paths) in an embodiment to which the present invention is applied.

FIG. 15 is a partially cutaway perspective view of a liquid ejection head in an embodiment to which the present invention is applied.

FIG. 16 is a view for explaining the operation of the movable member.

FIG. 17 is a view for explaining a structure of a movable member and a liquid flow path.

FIG. 18 is a diagram which is used for describing another shape of the movable member.

FIG. 19 is a cross-sectional view for explaining a supply path of a liquid ejection head to which the present invention is applied.

FIG. 20 is an exploded perspective view of a head to which the present invention is applied.

FIG. 21 is a process chart illustrating a method for manufacturing a liquid discharge head to which the present invention is applied.

FIG. 22 is a process diagram illustrating a method for manufacturing a liquid discharge head to which the present invention is applied.

FIG. 23 is a process chart for describing a method of manufacturing a liquid discharge head to which the present invention is applied.

FIG. 24 is a schematic configuration diagram of a liquid ejection device.

FIG. 25 is a device block diagram.

FIG. 26 is a diagram illustrating a liquid ejection recording system.

FIG. 27 is an exploded perspective view of a liquid ejection head cartridge to which an example of the sheet member alignment method according to the present invention can be applied.

[Explanation of symbols]

 120 Support 121, 146, 147 Element substrate 121a, 146a, 147a Attached surface 122, 145 Sheet member 122s, 145a Joining surface 139 Finger portion 139G Electromagnet unit 139GS Reference holding surface 144 Imaging device 160 Control unit 163 Image processing unit

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroyuki Kigami 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Kimiyuki Hayashizaki 3- 30-2 Shimomaruko, Ota-ku, Tokyo Within Canon Inc. (72) Inventor Hisashi Fukai 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Takayuki Ono 3- 30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Toshio Kashino 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Yoshie Nakata 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc.

Claims (12)

[Claims] 1. A transport jig having a joining surface portion and holding a sheet member made of a magnetic material by magnetic force, a base having an attachment surface with which the joining surface portion abuts on the joining surface portion of the sheet member. Arranging the table at a position facing the mounting surface of the table, and the sheet member held by the conveying jig in a state where the position of the base of the conveying jig with respect to the mounting surface in one direction is regulated. Adjusting the position of the base relative to the predetermined position; and separating the sheet member adjusted for position relative to the predetermined position of the base from the transport jig. Method. 2. A transfer jig having a joining surface portion and holding a sheet member made of a magnetic material by magnetic force, comprising: a base having an attached surface to which the joining surface portion of the sheet member comes in contact. Arranging the sheet member at a position in contact with the mounting surface of the base and following the mounting surface of the base; separating the joining surface of the sheet member held by the conveying jig from the mounting surface of the base; Adjusting the position of the sheet member held by the conveyance jig with respect to a predetermined position of the base under the condition that the position of the base in one direction with respect to the mounting surface is regulated; Separating the sheet member whose position has been adjusted from the position from the conveyance jig. 3. A transport jig having a joining surface portion and holding a sheet member made of a magnetic material by magnetic force, comprising: a base having an attachment surface to which the joining surface portion of the sheet member comes into contact. Arranging the sheet member at a position where it abuts and follows the mounting surface of the table, and slidably contacts a bonding surface of the sheet member held by the transport jig to the mounted surface of the base; A step of adjusting the position of the sheet member held by the transport jig with respect to a predetermined position of the base while the position of the base in one direction with respect to the mounting surface is regulated; and Separating the sheet member, the position of which has been adjusted with respect to the predetermined position, from the conveyance jig. 4. A transfer jig for holding, by magnetic force, an end surface of a sheet member made of a magnetic material, which is orthogonal to a joining surface portion, wherein the joining surface portion has a mounting surface with which the joining surface portion of the sheet member comes into contact. Arranging the base at a position opposed to the mounting surface, and the position of the base of the transfer jig in one direction with respect to the mounting surface of the base of the transfer jig is regulated; Adjusting the position of the sheet member held by the transport jig with respect to a predetermined position of the base along the other direction with respect to the mounting surface based on a position marker provided on the mounting surface; Separating the sheet member, the position of which has been adjusted with respect to the predetermined position of the table, from the conveying jig. 5. A conveyance jig having a first position marker and holding an end surface of a sheet member made of a magnetic material perpendicular to a joining surface portion by a magnetic force, wherein the joining surface portion has a joining surface portion of the sheet member. A step of arranging the base having a mounting surface to be contacted at a position facing the mounting surface, and in a state in which the position of the base of the transport jig in one direction with respect to the mounting surface is regulated. The position adjustment of the sheet member held by the conveyance jig with respect to a predetermined position of the base along the other direction with respect to the mounting surface of the base of the conveyance jig is provided on the mounting surface. A second location indicator and the first location indicator
And a step of separating the sheet member, the position of which has been adjusted with respect to the predetermined position of the base, from the transport jig. 6. The position of the transfer jig in one direction with respect to the mounting surface of the base is regulated by opposing surfaces between the transfer jig and the base abutting on each other. The method for positioning a sheet member according to any one of claims 1 to 5, characterized in that: 7. The sheet member positioning method according to claim 1, wherein said conveying jig selectively holds an end surface of said sheet member orthogonal to a joining surface portion by magnetic force. . 8. The method according to claim 1, wherein the sheet member is a thin film member having a movable portion. 9. When the joining surface of the sheet member is moved in one direction while being held by the magnetic force of the carrying jig and abuts on the mounting surface of the base, the carrying jig is further moved to the first position. 4. The sheet member positioning method according to claim 2, wherein a relative position of the sheet member with respect to the transport jig is displaceable when the sheet member is moved along the direction. 10. The holding portion of the transport jig has a flat surface, and the sheet member is moved along a magnetic field line of the magnetic field by the magnetic force generated by a magnetic field formed substantially perpendicular to the flat surface. 2. The method according to claim 1, wherein the sheet is held substantially perpendicular to the flat surface. 11. When the holding section of the transport jig holds the sheet member, an external force is applied to the sheet member, and the holding state of the holding section with respect to the sheet member changes. 2. The method for positioning a sheet member according to claim 1. 12. A position adjusting device having a conveying jig for selectively holding an end surface orthogonal to a joining surface portion of a sheet member, and being arranged to face a base having an attached surface on which the sheet member is arranged. A mechanism unit, a position detection unit that detects a relative position of the sheet member held by the conveyance jig with respect to the mounting surface of the base, and the conveyance jig and the base in the position adjustment mechanism unit. In the state where the respective end surfaces facing each other are in contact with each other and the position of the base of the transfer jig with respect to the mounting surface in one direction is regulated, the transfer is performed based on the detection output from the position detection unit. And a control unit configured to perform an operation of adjusting the position of the sheet member held by the jig with respect to the mounting surface of the base.