JPH10279073A - Mask carrying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve a trouble in reading the information by a worker. SOLUTION: When a reticule delivery arm 34 is moved in the direction of the arrow C or the arrow C' in a condition where reticule cassettes 141 -145 to individually store a reticule R in a reticule library 12 are stored, the information of the bar code attached to the outer surface of an opening/closing lid 14a provided on the reticule cassettes 141 -145 are read by a bar code reader 42 provided on the tip of the arm 34. Because a worker need not read the bar code, manually in storing the reticule cassettes in the reticule library 12, the trouble to read the information by the worker can be solved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mask transfer apparatus, and more particularly to a mask transfer apparatus suitable for use in a reticle loader system of an exposure apparatus used for manufacturing, for example, a semiconductor element or a liquid crystal display element. About.

[0002]

2. Description of the Related Art Conventionally, when a semiconductor device or a liquid crystal display device is manufactured by a lithography process, an image of a pattern formed on a reticle or a photomask (hereinafter, collectively referred to as “reticle”) is coated with a resist on the surface. An exposure apparatus that exposes a substrate such as a coated wafer or a glass plate is used. Usually, a liquid crystal display element or the like is formed by stacking a large number of circuit patterns, so that it is necessary to sequentially expose a plurality of types of reticle patterns on a single glass plate. Therefore, it is necessary to provide a reticle loader system for efficiently switching different reticles and loading the reticles on the reticle table of the exposure apparatus, and unloading from the reticle table, and it is necessary to efficiently manage those reticles. Become.

Conventionally, a method using a barcode has been known as one of the reticle management methods, which is roughly classified into the following two methods. In the first method, a part of the reticle information is recorded in advance in a reticle case (also referred to as a reticle cassette) for storing a reticle by a bar code, and when the reticle case is stored in a reticle library, the operator manually hands the reticle case. The bar code reader reads the information of the bar code. Second
In the method, information is recorded in advance on the reticle itself with a barcode, and when passing through the barcode reader during the transfer of the reticle from the reticle case to the reticle table, the information is automatically read by the barcode reader. It is to read.

[0004]

However, in the above-mentioned first method, in order to obtain the reticle information, the operator has to read the reticle information with a bar code reader, which is troublesome and troublesome. There was an inconvenience of hanging. Further, in the second method, since the reticle information cannot be obtained unless the reticle passes through the bar code reader section, all those who want to know the reticle information have the bar code provided in the middle of the transport system. It is necessary to carry the reticle to the reader unit, and the operator must instruct the apparatus to carry such a reticle, and there is a disadvantage that it takes more time than necessary. In addition,
If you set the reticle in the reticle case incorrectly,
Since the reticle is conveyed to the point where the barcode reader is installed and an error is found and a return operation is performed, there is a possibility that the reticle may have a significant effect on the manufacturing tact. For these reasons, it has not been easy to collectively manage the reticles stored in the reticle library.

SUMMARY OF THE INVENTION The present invention has been made under such circumstances, and an object of the present invention is to provide a mask conveying apparatus which can eliminate troublesomeness for reading information by an operator. Is to do.

Another object of the present invention is to provide, in addition to the above-mentioned object, a mask transport apparatus which facilitates collective management of masks by enabling immediate detection of a mistake in inserting a mask into a mask case. Is to do.

Another object of the present invention is to obtain information on a mask in a mask case in a state where the mask is stored in a library (storage section) without transporting the mask to a mask stage. It is an object of the present invention to provide a mask transfer device capable of performing the above.

It is another object of the present invention to provide a mask transporting apparatus capable of easily recording information, in addition to the effects of the above inventions.

[0009]

According to the first aspect of the present invention, the masks (R) can be individually stored in any of a plurality of mask case storage spaces provided in the mask storage section (12). And a transfer arm (34) for holding and removing the mask (R) in and out of the mask case (14) via an opening / closing lid (14a) provided on the mask case (14). A predetermined information is recorded on an outer surface of the opening / closing lid (14a) provided in each of the mask cases (14), and the transport arm (34) and the mask storage section (1) are recorded.
And 2) are configured to be relatively movable in a direction perpendicular to the mask loading / unloading direction, and the transfer arm (34).
First information reading means (4) capable of reading information recorded on the opening / closing lid (14a) during the relative movement.
2) is provided.

According to this, one or more mask cases for individually storing masks are stored in a plurality of mask case storage spaces provided in the mask storage section.
When the transfer arm and the mask storage section are relatively moved in a direction perpendicular to the mask loading / unloading direction, during this relative movement, the opening / closing lid provided on each mask case by the first information reading means provided on the transfer arm. The predetermined information (for example, information on the mask housed in the mask case) recorded on the outer surface of is read. For this reason, when storing the mask case in the mask storage section (library), it is not necessary for the operator to manually read the information such as the barcode, so that the trouble of reading the information by the operator is eliminated. Here, reading predetermined information during relative movement does not mean that reading in a stationary state is excluded, but it is sufficient that information is read during relative movement of a certain distance.

In this case, predetermined information is recorded on each of the masks (R) individually stored in the mask case (14), and the information is recorded on the transfer arm (34). When the transfer arm (34) is taken in and out of the mask case (14), second information reading means (44) capable of reading predetermined information recorded on the mask (R) may be further provided. More desirable.
In this case, in a state where one or more mask cases for individually storing masks are stored in a plurality of mask case storage spaces provided in the mask storage unit, the transfer arm and the mask storage unit Is relatively moved in a direction orthogonal to the mask loading / unloading direction, during this relative movement, a predetermined information recorded on the outer surface of the opening / closing lid provided on each mask case by the first information reading means provided on the transport arm. (For example, information on the mask stored in the mask case) is read. Further, when the transfer arm is taken in and out of the mask case, predetermined information recorded on the mask is read by the second information reading means provided on the transfer arm. Therefore, while the mask case in which the masks are individually stored is stored in the mask storage section, the transfer arm is relatively moved in a direction orthogonal to the mask insertion / removal direction, and the transfer arm is inserted / removed into / from each mask case. As a result, it is possible to immediately detect a mistake in putting the mask in the mask case and the like, thereby facilitating batch management of the mask.

Here, reading the information when the transfer arm is moved in and out of the mask case is not intended to exclude reading in a stationary state, but the information is read while the transfer arm is moved in and out of the mask case. Is sufficient (the same applies to claim 3).

According to a third aspect of the present invention, there is provided a mask case (14) which is stored in one of a plurality of mask case storage spaces provided in a mask storage portion (12) and individually stores masks (R). And a transfer arm (34) for holding the mask (R) in and out of the mask case (14) through an opening / closing lid (14a) provided in the mask case (14). In the apparatus, the transfer case (34) is attached to the mask case (1).
4) When putting in and out, the mask case (14)
Information reading means (44) capable of reading predetermined information recorded on each of the masks (R) individually housed therein.

According to this, when the transfer arm is taken in and out of the mask case, predetermined information recorded on the mask is read by the information reading means provided on the transfer arm. For this reason, it is possible to obtain information on the mask in the mask case in a state where the mask is stored in the library (storage unit) without transporting the mask to the mask stage.

In each of the above-mentioned inventions, the information recorded on the mask case or the mask is not particularly limited as long as it can be read by the reading means after the recording. For example, magnetic recording, magneto-optical recording, or matrix black and white 2 The information may be print information capable of recording a large amount of information based on the value information. Correspondingly, the reading means may be a magnetic head, a magneto-optical head, a CCD camera, or the like. As in the invention described in Item 4, it is preferable that the information is a barcode (22, 46) and the information reading means is a barcode reader (42, 44). In this case, information can be easily recorded.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG.
A description will be given with reference to FIG.

FIG. 1 shows a reticle cassette 1 as a mask case for individually storing a reticle R as a mask.
A reticle library 12 as a mask storage unit in which a plurality of the reticle 4 are stored, and a reticle loader unit 18 as a mask transport device for transporting a reticle R between the reticle library 12 and the exposure device main body 16.
And is schematically shown.

The reticle library 12 is formed of a box-shaped case that is open on both sides in the X-axis direction (the left-right direction in FIG. 1). The internal space of the reticle library 12 is orthogonal to the paper plane in FIG. Are divided into a plurality of regions 12A, 12B,... By partition members 20 (see FIG. 2) arranged at predetermined intervals along
In each area, a plurality of cassette housing spaces as mask case housing spaces are formed at predetermined intervals in the Z-axis direction. That is, cassette support members (not shown) capable of individually supporting the reticle cassettes 14 are provided at predetermined intervals in the Z-axis direction (the vertical direction in FIG. 1) on both side walls of each of the regions 12A, 12B,. Cassette storage spaces are respectively formed above and below the cassette support member, and one reticle cassette 14 can be stored in each cassette storage space.

On one side of the reticle cassette 14 in the X-axis direction (the right side in FIG. 1), arrows A,
An opening / closing lid 14a rotatable in the A 'direction is provided,
The opening / closing lid 14a is configured such that the reticle R is
It can be opened only when it is taken in and out of 4, so that dust and the like do not enter. In the present embodiment, a bar code 22 on which information on the internal reticle R (for example, reticle type and other information) is recorded on the outer surface of the opening / closing lid 14a as shown in FIG.

Referring back to FIG. 1, the exposure apparatus main body 16 includes:
Here, a light source 24 composed of a mercury lamp or the like, an elliptical mirror 2
6. An illumination optical system 28, a reticle table 30, a projection optical system PL, a stage 32 that holds the glass plate P and moves in the XY plane, and the like. The reticle R held on the reticle table 30 in a step-and-repeat manner. A liquid crystal stepper that sequentially exposes a reduced image of the pattern to a plurality of shot areas on the glass plate P via the projection optical system PL is used.

The reticle loader 18 is a reticle loading / unloading arm (hereinafter, referred to as a "loading / unloading arm") as a transfer arm for loading / unloading the reticle R with respect to the reticle cassette 14 stored in the reticle library 12.
34, a slider 36 for transferring the reticle R to and from the loading / unloading arm 34, and a reticle R for transferring the reticle R to and from the slider 36.
Is loaded on the reticle table 30 and the loading / unloading arm 38 for unloading the reticle R on the reticle table 30 is provided.

Here, as shown in FIGS. 2 and 3B, the arm 34 has a pair of arm portions 34a,
The U-shaped member is provided with a U-shaped member 34 b, and the tip of the U-shaped member is arranged to face the reticle library 12. The insertion / removal arm 34 reciprocates in the X-axis direction (approaching / separating direction with respect to the reticle library 12) along an X-guide (not shown) which can reciprocate in the Z-axis direction (vertical direction) along a Z-guide (not shown). It is configured to be possible. That is, here, the insertion / removal arm 34 is movable in the directions of arrows B and B 'and in the directions of arrows C and C'. Further, as shown in FIG. 3B, the upper surface of the pair of arm portions 34a and 34b at the tip of the insertion / removal arm 34 has a suction for sucking the reticle R by a vacuum suction force such as a vacuum pump (not shown). Two parts 40 are provided respectively.

Further, in the present embodiment, as shown in FIGS. 2 and 3B, a bar code as a first information reading means is provided on the distal end surface of one arm portion 34b of the access arm 34. A reader 42 is fixed, and a bar code reader 44 as second information reading means is fixed inside the arm 34b. The barcode reader 42 is for reading information of the barcode 22 attached to the opening / closing lid 14a of the reticle cassette 14 as described later.
Is for reading the information of the barcode 46 attached outside the pattern area of the pattern formation surface of the reticle R as shown in FIG.

The slider 36 is configured to be able to reciprocate in a Y-axis direction (a direction perpendicular to the plane of FIG. 1) along a Y guide (not shown). The loading / unloading arm 38 is configured substantially in the same manner as the loading / unloading arm 34. Actually, the loading / unloading arm 38 is located in the X-axis direction and the Z-axis direction at a position farther from the movement space of the loading / unloading arm 34 in FIG. It is configured to be able to reciprocate.

The operation of each component of the reticle loader 18 when the reticle is transported from the reticle library 12 to the reticle table 30 will be briefly described.

Firstly, out arm 34, for example, come to the front of the top of the reticle cassette 14 _1, by the opening and closing pin (not shown) whose height position in conjunction with loading and unloading arm 34 is controlled, the reticle cassette 14 ₁ The opening / closing lid 14a is rotated in the direction of arrow A, and the opening / closing lid 14a is opened (see the solid line position in FIG. 1). The mechanism for opening and closing the opening / closing lid 14a is well-known.
Since it is disclosed in detail in, for example, Japanese Patent Publication No. 39537, a further description is omitted here.

Next, out arm 34 enters the reticle cassette 14 in _one proceeds in the direction of arrow B at a height that does not interfere with the reticle R of the reticle cassette 14 ₁ (FIG. 5
reference). Then, out arm 34 lifts the reticle R with a reticle cassette 14 within ₁ to move a small amount upwardly (arrow C), was adsorbed and fixed by the suction unit 40 for fall prevention, the direction of the arrow B ' Go and pull out the reticle R from the reticle cassette 14 _1. In this series of operations, when to enter the reticle cassette 14 in ₁ at a height that does not interfere with loading and unloading arm 34 to the reticle R,
The information of the barcode 46 attached to the reticle R can be read by the barcode reader 44 (this reading will be further described later).

Next, the taking-in / out arm 34 is moved by a predetermined amount of arrow C.
Then, the reticle R is transferred to the slider 36. The slider 36 that has received the reticle R moves to the far side in FIG. 1 and waits at a predetermined position. Then, loading /
When the unloading arm 38 moves by a predetermined amount in the direction of arrow D and receives the reticle R from the slider 36, moves once in the direction of arrow D ', and then the slider 36 retracts,
Proceed in the direction of arrow D to place reticle R on reticle table 30.
Is loaded. Note that the method of transporting the reticle R described here is the same as the method of reading the barcode except for the above-described barcode reading.
This is the same as a normal reticle loader, and details are disclosed in, for example, FIG.

Next, a method of reading a barcode, which is a feature of the present embodiment, will be described with reference to FIGS.

First, as shown in FIG. 4, with the access arm 34 approaching the reticle library 12, the access arm 34 is moved up and down as shown by the arrow C or C ', so that one after another. the bar code 22 attached to the reticle cassette 14 _{1-14 5} door 14a and read by a bar code reader 42.
By sending the information read by the barcode reader 42 to a computer (not shown), for example, a main controller that controls the exposure apparatus main body 16, the target reticle R can be stored without the hand of an operator. It is possible to quickly and easily find out in which position of the reticle library 12 the stored reticle cassette 14 is stored. This is more effective when the reticle library 12 contains more reticle cassettes 14.

Further, as shown in FIG. 5, as in the case of transport of the reticle R as described above, the reticle cassette, for example, the uppermost of the reticle cassette 14 _first door 14a is opened, the loading and unloading arm 34 to the reticle R when to enter the cassette 14 in ₁ at a height that does not interfere, the bar code 46 attached to the reticle R (the see FIG. 3 (a)) is read by the bar code reader 44. At this time, the access arm 34
Only the approach operation of, and return to the evacuation position again,
While sequentially entering the reticle cassettes 14 ₂ , 14 ₃ , 14 ₄ , and 14 ₅ , the bar code 46 attached to the reticle R is read by the bar code reader 44, and the read information is sent to a main controller (not shown) or the like. If it is sent, much reticle information can be obtained in a short time without transporting the reticle R to the reticle table 30. In this case, the bar code 46 attached to the reticle R may be read by the bar code reader 44 when pulling out the arm from the reticle cassette 14.

If the reticle R is erroneously set in the reticle cassette 14, the bar code 22 attached to the opening / closing lid 14a of the reticle cassette 14 and the bar code 46 attached to the reticle R are read. By doing so, it is possible to determine the misplacement of the reticle R at an early stage when the reticle R exists in the reticle library 12, and therefore, a bar code reader part is provided in the middle of the transport system as in the related art. Unlike a case in which an error is found only after the reticle R is transported to the point, the influence on the manufacturing tact can be minimized, and faster and safer reticle management can be performed.

As described above, according to this embodiment, the bar code 22 of the reticle cassette 14 and the bar code 46 of the reticle R itself are moved while the arm 34 having the bar code readers 42 and 44 is moving. The reading of the reticle library eliminates the need for the operator to manually read the barcode, and eliminates the need to transport the reticle R to the barcode reader section in the transport system and read the information. All the reticles R stored in the reticle 12 can be accessed easily and at high speed, and efficient reticle management becomes possible.

In the above embodiment, the case where the necessary information on the reticle R is recorded in advance by a bar code on the opening / closing lid 14a of the reticle cassette 14 and the reticle R itself has been described. There is no limitation, and either or both of the information may be recorded using another information recording medium such as a magnetic recording medium or a magneto-optical recording medium. Alternatively, the information may be print information capable of recording a large amount of information using binary black and white information in a matrix. In these cases, the reading means is a magnetic head, a magneto-optical head, or a CCD capable of reading the matrix-like monochrome binary information in a stationary state.
What is necessary is just to comprise a camera etc.

However, when information is recorded by a bar code as in the above embodiment, there is an advantage that the information can be easily recorded, and the bar code to be recorded on the reticle itself can be recorded on the reticle. There is also an advantage that it can be formed by a lithography process simultaneously with a circuit pattern and the like. There is also an advantage that a barcode can be read from any direction.

In the above embodiment, the case where the loading / unloading arm 34 moves up and down when reading the bar code attached to the open / close lid of the cassette has been described.
However, the present invention is not limited to this, and the reticle library 12 may be configured to move up and down while the loading / unloading arm 34 is fixed in the vertical direction, or to read the barcode when the loading / unloading arm 34 moves in the direction perpendicular to the plane of FIG. It is of course possible to do so.

[0037]

As described above, according to the first aspect of the present invention, there is an effect that the trouble of reading information by a worker can be eliminated.

According to the second aspect of the present invention, in addition to the above-described effects, it is possible to immediately detect a mistake in inserting the mask into the mask case, thereby facilitating the collective management of the mask. There is.

According to the third aspect of the present invention, it is possible to obtain information on a mask in a mask case in a state in which the mask is stored in a library (storage section) without transporting the mask to a mask stage. There is an effect that can be.

According to the fourth aspect of the invention, in addition to the effects of the above-mentioned inventions, there is also an advantage that information can be easily recorded.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a reticle loader unit according to one embodiment together with a reticle library and an exposure apparatus main body.

FIG. 2 is a schematic perspective view showing a reticle cassette stored in a reticle library of FIG. 1 together with a loading / unloading arm.

FIG. 3A is a plan view of a reticle, and FIG. 3B is a plan view of an access arm in which a barcode reader is provided at a portion corresponding to a barcode attached to the reticle.

FIG. 4 is a diagram for explaining a method of reading a bar code attached to an opening / closing door of a reticle cassette.

FIG. 5 is a diagram for explaining a method of reading a barcode attached to a reticle.

[Explanation of symbols]

12 Reticle Library (Mask Storage Unit) 14 Reticle Cassette (Mask Case) 14a Opening / Closing Cover 18 Reticle Loader Unit (Mask Transporting Device) 22 Barcode 34 Transfer Arm (Transporting Arm) 42 Barcode Reader (First Information Reading Means) 44 Barcode reader (second information reading means, information reading means) 46 barcode R reticle (mask)

Claims (4)

[Claims] 1. A mask case which can be stored in any of a plurality of mask case storage spaces provided in a mask storage portion and individually stores masks, and the mask via an opening / closing lid provided in the mask case. A mask transfer device having a transfer arm for holding and taking in and out the mask in a case, wherein predetermined information is recorded on an outer surface of the open / close lid provided in each of the mask cases, and the transfer arm and the mask storage And a first information reading means capable of reading information recorded on the opening / closing lid during the relative movement on the transport arm. A mask transport device. 2. A method according to claim 1, wherein predetermined information is recorded on each mask individually housed in said mask case, and said predetermined information recorded on said mask when said transport arm is taken in and out of said mask case. 2. The mask transport apparatus according to claim 1, further comprising a second information reading unit capable of reading the information. 3. A mask case which is housed in one of a plurality of mask case housing spaces provided in a mask housing portion and individually houses masks, and said mask via an opening / closing lid provided in said mask case. A transfer arm for holding and removing the mask in and out of the case, wherein each of the masks individually housed in the mask case when the transfer arm is moved in and out of the mask case. A mask reading device provided with information reading means capable of reading predetermined information recorded in the mask conveying device. 4. The mask transport apparatus according to claim 1, wherein the information is a bar code, and the information reading unit is a bar code reader.