JPH10274514A - Surface shape measurement method for flat plate having deflection - Google Patents

Surface shape measurement method for flat plate having deflection

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Publication number
JPH10274514A
JPH10274514A JP9521297A JP9521297A JPH10274514A JP H10274514 A JPH10274514 A JP H10274514A JP 9521297 A JP9521297 A JP 9521297A JP 9521297 A JP9521297 A JP 9521297A JP H10274514 A JPH10274514 A JP H10274514A
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surface
measured
diameter
shape
reference plate
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JP3821908B2 (en
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Nobuaki Ueki
伸明 植木
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Fuji Photo Optical Co Ltd
富士写真光機株式会社
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Abstract

PROBLEM TO BE SOLVED: To accurately measure the surface shape of the whole plane of a large-diameter flat plate including its deflection and attain cost reduction by obtaining the surface shape of a plurality of measuring areas for a surface to be measured by moving a small-diameter flat plate sequentially in parallel to the surface to be measured of a large-diameter flat plate, and making the surface shape connected integrally by means of an opening jointing method to obtain the surface shape of the whole surface to be measured.
SOLUTION: The surface 1a to be measured of a large-diameter reference plate 1 and the reference surface 2a of a small-diameter reference plate 2 are faced each other at a prescribed interval at which interference fringe is generated, the relative shapes of both the surfaces 1a, 2a are measured. Under this condition, the small-diameter reference plate 2 is moved in parallel, and the relative shape in the measuring area is measured for each completion of movement. The surface shapes of a plurality of measuring areas which are obtained by subtracting the known shape of the small-diameter reference plate from this results are connected integrally by means of an opening jointing method to measure the surface shape of the surface 1a to be measured. The small-diameter reference plate 2 is moved so as to be disposed at a position corresponding to the central part the large-diameter reference plate 1, and after that, it is moved so as to be disposed at a position corresponding to the periphery part of the large-diameter reference plate 1. In respective moving positions, a previously moving position and its part overlap each other.
COPYRIGHT: (C)1998,JPO

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明はたわみを有する平板の表面形状測定方法に関し、詳しくは、大径のサンプルが測定可能な干渉計の基準面等として用いられる、たわみを有する平面の表面形状を測定する方法に関するものである。 Relates the surface shape measuring method of the flat panel with the invention deflection BACKGROUND OF THE INVENTION, details, large sample is used as a reference surface such measurable interferometer the surface shape of the plane with a deflection it relates to a method for measurement.

【0002】 [0002]

【従来の技術】物体表面の平面度を測定する手法として、フィゾー型干渉計等の干渉計による測定が知られている。 As a method of measuring the flatness of the Related Art object surface is known interferometer measurements such as Fizeau interferometer. このような干渉計は高精度で被検面の平面度を測定できるものの、その測定は基準面に対する相対測定であって絶対測定ではない。 Although such interferometer can measure the flatness of the test surface with high accuracy, the measurement is not an absolute measure a relative measurement with respect to the reference plane. したがって基準面として極めて高精度な平面が必要とされ、そのためこのような高精度の平面を有する基準面の測定方法が求められている。 Thus the required very high accuracy plane as a reference plane, therefore the measurement method of the reference plane having a plane of such a high accuracy is required.

【0003】このような基準面を測定する手法として、 [0003] As a method for measuring such reference plane,
3枚の基準板を作成し、この3枚の中から選択された3 Create a three reference plate, which is selected from among the three 3
つの基準板ペアの組み合わせの各々について基準面相対変位を測定し、この測定結果に基づき連立方程式を解くことで、各基準面の形状を測定する3面合わせ方法が知られている。 One of the reference plane relative displacement for each of the combinations of the reference plate pair is measured, by solving the simultaneous equations based on the measured result, three planes alignment method for measuring the shape of each reference surface is known.

【0004】以下、この3面合わせ方法について説明する。 [0004] The following describes the three planes alignment method. 3枚の基準板ガラスをA,B,Cとする。 The three reference plate glass A, B, and C. 各基準板ガラスについて図6に示すような座標をとると、これらA,B,Cのガラス面の形状はx,yの関数で表すことができるので、それぞれをA(x,y),B(x,y),C(x,y)とする。 When each reference plate glass take coordinates as shown in FIG. 6, these A, B, since the shape of the glass surface of the C can be expressed x, as a function of y, respectively A (x, y), B ( x, y), and C (x, y). なお、図6に示すようなZ座標をとったのは、ガラス面が凸面のときプラスで表し、凹面のときマイナスで表すようにしたためである。 The reason took Z coordinates as shown in Figure 6, the glass surface is expressed by positive when convex, because you represent minus when concave.

【0005】ここで、例えば基準面をA(x,y)とし、被検面をB(x,y)とし、これら2つの面を対向させ、フィゾー型干渉計の所定位置にセットする。 [0005] Here, for example, a reference plane and A (x, y), and the test surface B (x, y) and, are opposed to these two surfaces, is set at a predetermined position of the Fizeau interferometer. 次に、この干渉計で測定された両面の相対的形状をφ AB (x,y)とすれば、 φ AB (x,y)=A(x,y)+B(x′,y′) となる。 Then, if both sides of the relative shape measured by this interferometer φ AB (x, y) and, φ AB (x, y) = A (x, y) + B (x ', y') and Become. また、被検面の座標を基準面の座標で表すと、 Also, when expressed by the coordinates of the reference plane coordinates of the test surface,
B(x′,y′)はB(x,-y)と置き換えられるので、 φ AB (x,y)=A(x,y)+B(x,−y) となる。 B (x ', y') so it is replaced by B (x, -y), φ AB (x, y) = A (x, y) + B (x, -y) become.

【0006】同様に、他の組み合わせについては、 φ CA (x,y)=C(x,y)+A(x,−y) φ BC (x,y)=B(x,y)+C(x,−y) となる。 [0006] Similarly, for the other combinations, φ CA (x, y) = C (x, y) + A (x, -y) φ BC (x, y) = B (x, y) + C (x , the -y). y=0のラインについては、 φ AB (x,0)=A(x,0)+B(x,0) φ CA (x,0)=C(x,0)+A(x,0) φ BC (x,0)=B(x,0)+C(x,0) となり、実際の測定によりφ AB (x,0)、φ CA (x,0)、φ BC For y = 0 line, φ AB (x, 0) = A (x, 0) + B (x, 0) φ CA (x, 0) = C (x, 0) + A (x, 0) φ BC (x, 0) = B ( x, 0) + C (x, 0) , and the by actual measurement φ AB (x, 0), φ CA (x, 0), φ BC
(x,0)が求まっているので、A(x,y),B(x,y),C(x,y) (X, 0) because is been obtained, A (x, y), B (x, y), C (x, y)
の各形状はこれら3つの関係式について連立方程式を解くことで求められる。 Each shape is determined by solving the simultaneous equations for these three relational expressions.

【0007】 [0007]

【発明が解決しようとする課題】ところで、大径の被検体を測定対象とするものでは基準板も大径となり、特に縦型の干渉計においては、基準板の自重によるたわみが無視できないものとなる。 [SUMMARY OF THE INVENTION Incidentally, intended to a subject having a large diameter and measured reference plate also becomes large diameter, particularly in the vertical interferometer, to that deflection due to the weight of the reference plate can not be ignored Become. したがって、上述したような従来からの3面合わせ方法を用いた場合には、この自重によるたわみのために正確に基準板の絶対形状を求めることが困難となる。 Therefore, in the case of using the three sides alignment conventional methods as described above, that the absolute configuration of accurately reference plate for deflection by the own weight becomes difficult.

【0008】すなわち、3面合わせ方法では3つの基準板の中から異なる3つのペアを順次選択し、これら3つのペアの相対変位を測定することとなるが、各基準板にたわみが生じていると、基準板の表面は一方が凸で他方が凹となり、このうち2つのペアは凸面と凹面が対向する組み合わせとしうるが、残りの1つのペアはどうしても凸凸か凹凹の組み合わせとなってしまう。 Namely, sequentially selects the three pairs different from three reference plate in three planes alignment method, it becomes possible to measure the relative displacement of the three pairs, are bending occurs in the reference plate If, one surface of the reference plate and the other is concave convex, of which but two pairs may a combination of convex and concave faces, the remaining one pair inevitably become a combination of convex projections or 凹凹. これでは正確な形状測定を行うことが困難である。 This is difficult to perform an accurate shape measurement. また、大径の基準板を3つも製作することはコスト高となり、また、基準板のたわみを減少させるためにその厚みを大とすると、それに比例して重量が大となるとともにコスト高となってしまう。 Further, it becomes a high cost to manufacture the reference plate of a diameter larger three, and if the thickness in order to reduce the deflection of the reference plate and large, a high cost with weight in proportion becomes larger therewith and will.

【0009】本発明は上記事情に鑑みなされたもので、 [0009] The present invention has been made in view of the above circumstances,
大径の平板においても平面全体の表面形状をたわみ形状も含めて正確に測定することができ、コスト的にも安価な、たわみを有する平板の表面形状測定方法を提供することを目的とするものである。 Intended to also shape bending the entire surface shape plane can be accurately measured, including cost and also inexpensive, it provides a surface shape measuring method of the flat panel having a deflection in flat large-diameter it is.

【0010】 [0010]

【課題を解決するための手段】本発明のたわみを有する平板の表面形状測定方法は、大径の平板の被測定面の表面形状を測定する方法であって、表面形状が既知の表面を有する、重力によるたわみを無視可能な厚みの小径の平板を、この表面が該大径の平板の被測定面の一部と対向するように設定してこれら2つの平面の相対変位を測定し、この後、前記小径の平板を前記被測定面と平行に順次移動させ、その都度これら対向する2つの平面の相対変位を、隣接する測定領域とその一部を重複するようにして測定し、この測定結果から前記既知の形状を差し引いて得られた複数の該測定領域の表面形状を、開口合成法により接続一体化させて前記被測定面の表面形状を測定することを特徴とするものである。 Surface shape measuring method of a flat plate having a deflection of the present invention In order to achieve the above object, according to a method of measuring the surface shape of the measurement surface of the large-diameter flat surface shape having a known surface the diameter of the flat plate of negligible thickness deflection due to gravity, the surface is configured to face the portion of the surface to be measured of the flat plate of the large diameter to determine the relative displacement of these two planes, the after, the diameter of the plate is parallel to sequentially move said measurement surface, each time the relative displacement of the two planes of these faces, measured as overlapping the adjacent measurement regions and a part of, this measure results plurality of the surface shape of the measurement region obtained by subtracting the known geometry from, and is characterized in that by integrally connected by aperture synthesis method for measuring the surface shape of the surface to be measured. また、前記予め表面形状が知られている表面の形状は、3面合わせ方法により測定するのが望ましい。 The shape of the pre-surface shape is known surfaces, it is desirable to measure the three planes alignment method.

【0011】 [0011]

【発明の実施の形態】以下、本発明の一実施形態について図面を参照しつつ説明する。 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, will be described with reference to the accompanying drawings, an embodiment of the present invention. 図1は、本実施形態の測定方法を模式的に示す図である。 Figure 1 is a diagram schematically showing a measuring method of this embodiment. すなわち、この測定方法は大径の基準板1の被測定面1aと小径の基準板2の基準面2aを、干渉縞が生じる所定間隔で対向させ、これら両面1a、2aの相対形状を測定し、次に、この状態で小径の基準板2を平行移動させ、移動終了毎にその測定領域の該相対形状の測定を行い、この測定結果から小径の基準板2の既知の形状を差し引いて得られた複数の該測定領域の表面形状を、開口合成法により接続一体化させて前記被測定面1aの表面形状を測定するものである。 That is, the reference plane 2a of the measurement method diameter of the reference plate 1 of the measurement surface 1a and the small diameter of the reference plate 2, is opposed at a predetermined interval during which interference fringes occur, both the faces 1a, the 2a corresponding shape measured , then, by translating the reference plate 2 of the small diameter in this state, subjected to measurement of said relative shape of the measurement area for each movement end, obtained by subtracting the known shape of the small diameter of the reference plate 2 from the measurement results a plurality of surface shape of the measurement region that is, in which by connecting integrated by the aperture synthesis method for measuring the surface shape of the measurement surface 1a.

【0012】図示するように、大径の基準板1は、その自重により、無視できない程度のたわみが生じており、 [0012] As shown, the reference plate 1 having a large diameter, by its own weight, which occurs deflection which can not be ignored,
一方、小径の基準板2は、そのたわみ量が無視できる程度のものとなっており、たわみを有する大径の基準板1 The reference plate 2 of the small diameter is adapted to that of the extent to which the deflection amount is negligible, the reference of large diameter having a deflection plate 1
の被測定面1aを複数の領域に分割して測定し、かつ、 Of the measurement surface 1a was measured by dividing into a plurality of regions, and,
この測定結果を開口合成法により接続一体化させることでたわみを含めた被測定面1aの表面形状を測定するものである。 The measurement result is to measure the surface shape of the measurement surface 1a including the deflection in be connected together by the aperture synthesis method. なお、上記大径の基準板1は保持具3により、また、小径の基準板2は保持具4により各々保持されている。 The reference plate 1 of the large diameter by the holder 3, The reference plate 2 of the small diameter are respectively held by the holder 4.

【0013】また、上記小径の基準板2は、前述した3 [0013] The reference plate 2 of the small-diameter, 3 described above
面合わせ方法により、その絶対形状がその方向も含めて予め測定されたものである。 The surface alignment method, the absolute configuration of which is what is measured in advance including its direction. また、上記小径の基準板2 Further, the small diameter of the reference plate 2
の移動は、例えば、まず大径の基準板1の中央部分と対応する位置に、次に、大径の基準板1の周囲部分と対応する各位置に各々配設されるように移動する。 Movement of, for example, first to a position corresponding to the central portion of the reference plate 1 having a large diameter, will be moved so as to be respectively arranged in respective positions corresponding to the peripheral portion of the reference plate 1 having a larger diameter. そして、 And,
各移動位置は、その前の移動位置とその一部が重複することになる。 Each movement position would and the previous moving position thereof partially overlap.

【0014】したがって、大径の基準板1の被測定面1 [0014] Thus, the surface to be measured first reference plate 1 having a larger diameter
aの各測定領域は、図2に示すように、第1の測定領域P1、第2の測定領域P1′、第3の測定領域P1″… Each measurement area a, as shown in FIG. 2, the first measurement region P1, a second measurement region P1 ', the third measurement region P1 "...
…というように該被測定面1aが分割されることになり、しかも各測定領域は隣接する測定領域同士が重複するように(例えば、第1の測定領域P1と第2の測定領域P1′との間では領域Qが重複するように)分割されることになる。 ... 該被 measurement surface 1a is to be divided such that, moreover with each measurement area so that the measured area between adjacent overlap (e.g., a first measurement region P1 second measurement region P1 ' region Q is to overlap) will be divided between the. このように、互いに重複するようにして設定された各測定領域における測定形状は、いわゆる開口合成法を用いて接続一体化され、最終的に被測定面1 Thus, the measured shape in each measurement region set so as to overlap each other, it is integrally connected with the so-called aperture synthesis, eventually measurement surface 1
a全体の表面形状P0をたわみも含めて求めることが可能である。 Deflection surface shape P0 overall a also can be obtained, including.

【0015】ここで、上記開口合成法とは、一般には、 [0015] Here, the above-mentioned aperture synthesis technique, in general,
被測定面を複数の被測定領域に分割し、その分割された測定領域毎に測定操作を行い、この測定操作によって得られた各領域毎のデータを合成して被測定面全体の形状を求める手法を意味するものであるが、本明細書においては、隣接する測定領域同士がその一部を互いに重複するようにして測定することまで含めたものとし、その具体的な演算操作などは、本出願人が既に開示している、 Dividing the measured surface to a plurality of the measurement area, perform the measurement operation for each the divided measurement area, obtains the synthesis to the entire surface to be measured shape data of each area obtained by the measurement operation but is intended to mean a technique in the present specification, it is assumed that adjacent measurement region with each other, including to be measured so as to overlap a part of each other, such as the specific computation operation, the the applicant has already disclosed,
特開平5−99637号公報や特開平4−290907 JP-5-99637 and JP 4-290907
号公報(いずれも特許付与済み)に詳述されているので、ここでは詳しく説明しない。 Since JP are described in detail in (either already grant), not described in detail here.

【0016】また、上記開口合成法を用いて演算を行う際に、各測定領域毎の重複領域はチルト補正により演算するようにしており、これにより隣接する各測定領域を連続的に、かつ滑らかに接続することが可能である。 Further, when performing a calculation using the above aperture synthesis, overlapping regions of each measurement region is to be calculated by the tilt correction, thereby continuously each measurement area adjacent, and smooth it is possible to connect to. なお、本発明の実施形態としては上記のものに限られるものではなく、種々の態様の変更が可能である。 Incidentally, as an embodiment of the present invention is not limited to the above, it can be modified in various manners. 例えば、 For example,
上述した実施形態では小径の基準板2の基準面2aを3 3 the reference plane 2a of the reference plate 2 of the small diameter in the embodiment described above
面合わせ方法を用いて求めているが、たわみのない表面の形状を高精度で測定し得るその他の表面形状測定手法を用いて求めることも可能である。 And determined using a surface alignment method, it is possible to determine with the other surface profiling techniques of can be measured with no surface shape with high accuracy deflection.

【0017】また、被測定面の測定領域の分割パターンとしても上記実施形態のものに限られず、例えば、格子状やラスタ状等に分割することも可能である。 [0017] Also, not limited to the above embodiments as a dividing pattern of the measurement region of the surface to be measured, for example, may be divided in a grid pattern or a raster-like shape. ただし、 However,
この場合においても隣接する測定領域同士がその一部を互いに重複するように設定する必要がある。 It is necessary to set the well adjacent measurement region with each other to overlap a part each other in this case.

【0018】 [0018]

【実施例】以下、具体的な実施例を用いて本発明方法をさらに詳細に説明する。 EXAMPLES The following further illustrate the present invention method using a concrete example. 縦置のフィゾー型干渉計の基準板として使用する大径の平面ガラス板(300φ)の表面形状を、このフィゾー型干渉計を用いて測定した。 Tate置 Fizeau interferometer large diameter flat glass plate to be used as a reference plate of the surface shape of the (300φ), was measured using the Fizeau interferometer. まず、このフィゾー型干渉計の基準板配設位置に、3面合わせ方法を用い、その形状の方向も含めて測定された小径の基準板(150φ)を配設し、また、このフィゾー型干渉計の被検体配設位置に上記大径の平面ガラス板を配設した。 First, the reference plate arrangement position of the Fizeau interferometer, using a three-plane alignment method, arranged its small diameter of the reference plate direction was also measured, including the shape (150φ), also the Fizeau interferometer the subject arrangement position of the meter is disposed a flat glass plate of the large diameter. その際、大径の平面ガラス板の被測定面と小径の基準板の基準面とを対向するように設定した。 At that time, it was set to face the reference plane of the surface to be measured and the small diameter of the reference plate of the flat glass plate having a large diameter.

【0019】次に、これら両面の相対形状を測定することにより、被測定面の一部測定領域(図2のP1)の形状を求めた。 Next, by measuring both the faces of corresponding shape to determine the shape of the part measurement region of the surface to be measured (P1 in FIG. 2). 次に、この状態で小径の基準板2を平行移動させ、移動終了毎にその測定領域(図2のP1′、P Then, by translating the reference plate 2 of the small diameter in this state, the measurement area for each movement end (P1 in FIG. 2 ', P
1″……)の該相対形状の測定を行った。次に、この測定結果から上記小径の基準板2の既知の形状を差し引いて得られた複数の該測定領域の表面形状を、開口合成法により接続一体化させて前記被測定面の表面形状を測定した。また、図3は、上記フィゾー型干渉計を用い3枚合わせ方法(3枚組測定)により求めた小径の基準板の基準面の絶対形状を示す等高線図である。 1 "was said relative measurement of the shape of ...). Next, the surface shape of the plurality of the measurement area obtained by subtracting the known shape of the small diameter of the reference plate 2 from the measurement result, aperture synthesis the surface shape of the measurement surface by connecting integrated measured by law. FIG. 3 is a reference of the reference plate of smaller diameter determined by the Fizeau interferometer three alignment method using (3-Disc measurement) is a contour plot showing the absolute configuration of the surface.

【0020】また、図4は、上記実施例方法を用いて得られた、大径の平面ガラス板の被測定面の絶対形状を示す等高線図である。 Further, FIG. 4, obtained using the above inventive method, a contour plot showing the absolute configuration of the surface to be measured of the flat glass plate having a large diameter. なお、図5は小径基準板形状の減算処理をしなかった場合の、大径の平面ガラス板の被測定面の絶対形状を示す等高線図である。 Incidentally, FIG. 5 is a contour diagram showing the case where not the subtraction processing of the small diameter reference plate shape, the absolute configuration of the surface to be measured of the flat glass plate having a large diameter.

【0021】 [0021]

【発明の効果】以上説明したように、本発明のたわみを有する平板の表面形状測定方法によれば、大径の平板の被測定面の表面形状を、3面合わせ方法を直接用いて測定するのではなく、表面形状が既知の表面を有する小径の平板を、この表面が上記大径の平板の被測定面の一部と対向するように設定してこれら2つの平面の相対変位を測定し、この小径の平板を上記被測定面と平行に順次移動させ、その都度これら対向する2つの平面の相対変位を、隣接する測定領域とその一部を重複するようにして測定し、この測定結果から上記既知の形状を差し引いて得られた複数の該測定領域の表面形状を、開口合成法により接続一体化させて上記被測定面の表面形状を測定するようにしているから、大径でたわみを生じている平板においても、平 As described in the foregoing, according to the surface shape measuring method of the flat panel having a flexure of the present invention, the surface shape of the measurement surface of the large-diameter flat, measured using a three-plane alignment method directly instead of the small diameter of the flat surface shape having a known surface, this surface to determine the relative displacement of the two planes set so as to face a part of the surface to be measured of the flat plate of the large diameter , a plate of smaller diameter is successively moved in parallel with the surface to be measured, each time the relative displacement of the two planes of these faces, measured as overlapping the adjacent measurement regions and a part of, the measurement result the above known a plurality of surface shape of the measurement region obtained by subtracting the shape, since by integrally connected by aperture synthesis method is to measure the surface shape of the surface to be measured from the deflection at the large diameter even in a flat plate which is produced, flat 全体の表面形状をたわみ形状も含めて正確に測定することができる。 It can be accurately measured, including the entire surface shape deformation shape. また、3枚の大径の平板を製作したり、たわみを減少させるために厚みを増加させたりするのに比べて、コスト的にも安価となる。 You can also fabricate three large diameter flat plate, bending as compared to or increasing the thickness to reduce, it becomes less expensive in cost.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の一実施形態に係る方法を模式的に示す図 Schematically shows a method according to an embodiment of the invention; FIG

【図2】図1に示す方法を説明するための概略図 2 is a schematic view for explaining the method shown in FIG. 1

【図3】図1に示す実施形態において用いられる、小径基準板の基準面の絶対形状を示す等高線図 [3] used in the embodiment shown in FIG. 1, contour diagram showing the absolute configuration of the reference surface of the small diameter reference plate

【図4】図1に示す実施形態により得られた大径ガラス平板の被測定面の絶対形状を示す等高線図 [4] contour plot showing the absolute configuration of the surface to be measured of the large-diameter glass plate obtained by the embodiment shown in FIG. 1

【図5】小径基準板形状の減算処理をしなかった場合の、大径ガラス平板の被測定面の絶対形状を示す等高線図 [Figure 5] in the case of not the subtraction processing of the small diameter reference plate shape, contour graph indicating the absolute configuration of the surface to be measured of the large-diameter glass plate

【符号の説明】 DESCRIPTION OF SYMBOLS

1 大径の基準板 1a 被測定面 2 小径の基準板 2a 基準面 3、4 保持具 1 large diameter of the reference plate 1a measured surface 2 small reference plate 2a reference surfaces 3 holder

───────────────────────────────────────────────────── ────────────────────────────────────────────────── ───

【手続補正書】 [Procedure amendment]

【提出日】平成9年5月14日 [Filing date] 1997 May 14

【手続補正1】 [Amendment 1]

【補正対象書類名】明細書 [Correction target document name] specification

【補正対象項目名】図面の簡単な説明 A brief description of the correction target item name] drawings

【補正方法】変更 [Correction method] change

【補正内容】 [Correction contents]

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の一実施形態に係る方法を模式的に示す図 Schematically shows a method according to an embodiment of the invention; FIG

【図2】図1に示す方法を説明するための概略図 2 is a schematic view for explaining the method shown in FIG. 1

【図3】図1に示す実施形態において用いられる、小径基準板の基準面の絶対形状を示す等高線図 [3] used in the embodiment shown in FIG. 1, contour diagram showing the absolute configuration of the reference surface of the small diameter reference plate

【図4】図1に示す実施形態により得られた大径ガラス平板の被測定面の絶対形状を示す等高線図 [4] contour plot showing the absolute configuration of the surface to be measured of the large-diameter glass plate obtained by the embodiment shown in FIG. 1

【図5】小径基準板形状の減算処理をしなかった場合の、大径ガラス平板の被測定面の絶対形状を示す等高線図 [Figure 5] in the case of not the subtraction processing of the small diameter reference plate shape, contour graph indicating the absolute configuration of the surface to be measured of the large-diameter glass plate

【図6】3面合わせ方法の説明を行うための概略図 Figure 6 is a schematic view for an explanation of the three sides alignment method

【符号の説明】 1 大径の基準板 1a 被測定面 2 小径の基準板 2a 基準面 3、4 保持具 [EXPLANATION OF SYMBOLS] 1 larger diameter of the reference plate 1a measured surface 2 small reference plate 2a reference surfaces 3 holder

Claims (2)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 大径の平板の被測定面の表面形状を測定する方法において、 表面形状が既知の表面を有する、重力によるたわみを無視可能な厚みの小径の平板を、この表面が該大径の平板の被測定面の一部と対向するように設定してこれら2つの平面の相対変位を測定し、 この後、前記小径の平板を前記被測定面と平行に順次移動させ、その都度これら対向する2つの平面の相対変位を、隣接する測定領域とその一部を重複するようにして測定し、 この測定結果から前記既知の形状を差し引いて得られた複数の該測定領域の表面形状を、開口合成法により接続一体化させて前記被測定面の表面形状を測定することを特徴とするたわみを有する平板の表面形状測定方法。 1. A method of measuring the surface shape of the measurement surface of the large-diameter flat surface shape having a known surface, the diameter of the flat plate of negligible deflection due to gravity thickness, this surface the large set so as to face a part of the surface to be measured in the diameter of the flat plate to determine the relative displacement of the two planes, thereafter, in parallel it is successively moved and the small-diameter flat the surface to be measured, each time the relative displacement of the two planes of these faces, measured as overlapping the adjacent measurement regions and a part of the surface shape of the plurality of the measurement area obtained by subtracting the known shape from the measurement results the surface shape measuring method of the flat panel having a deflection, characterized in that by integrally connected by aperture synthesis method for measuring the surface shape of the surface to be measured.
  2. 【請求項2】 前記表面形状が既知の表面の形状が、3 Shape according to claim 2, wherein the surface shape is known surface 3
    面合わせ方法により測定されることを特徴とする請求項1記載のたわみを有する平板の表面形状測定方法。 Surface shape measuring method of a flat plate having a deflection according to claim 1, characterized in that it is measured by the surface alignment method.
JP09521297A 1997-03-28 1997-03-28 Method for measuring surface shape of flat plate with deflection Expired - Lifetime JP3821908B2 (en)

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Application Number Priority Date Filing Date Title
JP09521297A JP3821908B2 (en) 1997-03-28 1997-03-28 Method for measuring surface shape of flat plate with deflection

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008151714A (en) * 2006-12-19 2008-07-03 Horiba Ltd Plate member inspection device
JP2008292438A (en) * 2007-05-23 2008-12-04 Institute Of Physical & Chemical Research Ultraprecisely shape measuring method and device
JP2014013226A (en) * 2012-06-07 2014-01-23 Satoshi Kiyono Calibration method of interference shape measurement mechanism
CN106247967A (en) * 2016-08-18 2016-12-21 京东方科技集团股份有限公司 The measurement apparatus of a kind of substrate warp amount and method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008151714A (en) * 2006-12-19 2008-07-03 Horiba Ltd Plate member inspection device
JP2008292438A (en) * 2007-05-23 2008-12-04 Institute Of Physical & Chemical Research Ultraprecisely shape measuring method and device
JP2014013226A (en) * 2012-06-07 2014-01-23 Satoshi Kiyono Calibration method of interference shape measurement mechanism
CN106247967A (en) * 2016-08-18 2016-12-21 京东方科技集团股份有限公司 The measurement apparatus of a kind of substrate warp amount and method
US10393511B2 (en) 2016-08-18 2019-08-27 Boe Technology Group Co., Ltd. Measuring device and method for substrate warping amount

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