JPH10199469A5 - - Google Patents

Info

Publication number
JPH10199469A5
JPH10199469A5 JP1997005440A JP544097A JPH10199469A5 JP H10199469 A5 JPH10199469 A5 JP H10199469A5 JP 1997005440 A JP1997005440 A JP 1997005440A JP 544097 A JP544097 A JP 544097A JP H10199469 A5 JPH10199469 A5 JP H10199469A5
Authority
JP
Japan
Prior art keywords
electron
electron beam
optical system
light source
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997005440A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10199469A (ja
JP3673608B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP00544097A priority Critical patent/JP3673608B2/ja
Priority claimed from JP00544097A external-priority patent/JP3673608B2/ja
Priority to US09/007,107 priority patent/US5981954A/en
Publication of JPH10199469A publication Critical patent/JPH10199469A/ja
Publication of JPH10199469A5 publication Critical patent/JPH10199469A5/ja
Application granted granted Critical
Publication of JP3673608B2 publication Critical patent/JP3673608B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP00544097A 1997-01-16 1997-01-16 電子ビーム照明装置及び該装置を備えた電子ビーム露光装置 Expired - Fee Related JP3673608B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP00544097A JP3673608B2 (ja) 1997-01-16 1997-01-16 電子ビーム照明装置及び該装置を備えた電子ビーム露光装置
US09/007,107 US5981954A (en) 1997-01-16 1998-01-14 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00544097A JP3673608B2 (ja) 1997-01-16 1997-01-16 電子ビーム照明装置及び該装置を備えた電子ビーム露光装置

Publications (3)

Publication Number Publication Date
JPH10199469A JPH10199469A (ja) 1998-07-31
JPH10199469A5 true JPH10199469A5 (OSRAM) 2004-11-11
JP3673608B2 JP3673608B2 (ja) 2005-07-20

Family

ID=11611266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00544097A Expired - Fee Related JP3673608B2 (ja) 1997-01-16 1997-01-16 電子ビーム照明装置及び該装置を備えた電子ビーム露光装置

Country Status (1)

Country Link
JP (1) JP3673608B2 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001267221A (ja) * 2000-03-17 2001-09-28 Canon Inc 荷電粒子線露光装置及びデバイス製造方法
EP2019415B1 (en) * 2007-07-24 2016-05-11 IMS Nanofabrication AG Multi-beam source
JP7198092B2 (ja) * 2018-05-18 2022-12-28 株式会社ニューフレアテクノロジー マルチ電子ビーム照射装置、マルチ電子ビーム検査装置及びマルチ電子ビーム照射方法
CN118841298B (zh) * 2024-09-23 2025-01-17 季华恒一(佛山)半导体科技有限公司 一种聚焦束流自动调整系统、方法及离子注入机

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