JPH10197210A - Interference objective lens - Google Patents

Interference objective lens

Info

Publication number
JPH10197210A
JPH10197210A JP9003654A JP365497A JPH10197210A JP H10197210 A JPH10197210 A JP H10197210A JP 9003654 A JP9003654 A JP 9003654A JP 365497 A JP365497 A JP 365497A JP H10197210 A JPH10197210 A JP H10197210A
Authority
JP
Japan
Prior art keywords
objective lens
lens system
optical path
object
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9003654A
Other languages
Japanese (ja)
Inventor
Noboru Amamiya
昇 雨宮
Original Assignee
Nikon Corp
株式会社ニコン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, 株式会社ニコン filed Critical Nikon Corp
Priority to JP9003654A priority Critical patent/JPH10197210A/en
Publication of JPH10197210A publication Critical patent/JPH10197210A/en
Pending legal-status Critical Current

Links

Abstract

(57) [Summary] [Problem] When the operating temperature of an interference objective lens changes,
Both the object and the interference fringe are out of focus at the same time. An objective lens system (10) composed of a plurality of optical materials, an optical path splitting member (11) disposed in an optical path between the objective lens system and an object (O), and an optical path A reference mirror (12a) disposed in one of the divided optical paths divided by the dividing member, and reflected light from the object disposed in the other divided optical path divided by the optical path dividing member; Position where the image of the object is formed by the objective lens system (Io) even when a temperature change occurs, based on a configuration in which interference fringes are formed by the reflected light from the mirror.
And a plurality of optical materials in the objective lens system are selected so as to match the position where the interference fringes (I12a) are formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to an interference objective lens.

[0002]

2. Description of the Related Art FIG. 2 shows an example of a conventional interference objective lens. In FIG. 2A, the objective lens system 20 includes a plurality of lens elements. This objective lens system 2
Half mirror 21 is arranged between 0 and object O. The half mirror 21 splits the light from the objective lens system 20 toward the object O into transmitted light and reflected light toward the object O. The reflected light reaches a reference mirror 22 a provided in a partial area on the substrate 22, is reflected by the reference mirror 22 a, is reflected by the half mirror 21, and travels to the objective lens system 20. On the other hand, the light transmitted through the half mirror 21 is reflected by the object O and then transmitted through the half mirror 21 to the objective lens system 20.

Here, the image space of the objective lens system 20 includes:
An image Io of the object O and an image I22a of the reference mirror 22a are formed, and interference occurs between the light forming the image Io and the light forming the image I22a. Although not shown in FIG. 2A, the half mirror 21 and the substrate 22 are not shown.
Is attached to the objective lens system 20 by a holding member.

[0004]

Now, when the temperature at which the interference objective lens is used changes, the objective lens system 20 will not work.
The hardware holding the lens element inside, the half mirror 2
Due to expansion and contraction of the holding member holding the substrate 1 and the substrate 22, the positional relationship among the lens elements, the half mirror 21, and the reference mirror 22a in the objective lens system 20 fluctuates.

In this case, as shown in FIG. 2 (b), for example, the image I22a of the reference mirror 22a and the object image Io are displaced, so that when the object O is focused, the interference fringes are defocused. There is a problem.

[0006]

In order to solve the above-mentioned problems, an interference objective lens according to the present invention comprises an objective lens system (10) composed of a plurality of optical materials, and an objective lens system (10) comprising An optical path dividing member (11) disposed in the optical path between the optical path dividing member and the reference mirror (12a) disposed in one of the divided optical paths divided by the optical path dividing member; Based on a configuration in which interference fringes are formed by the reflected light from the object and the reflected light from the reference mirror, which are arranged in the other divided optical path divided by A plurality of optical materials in the objective lens system are selected so that the position (Io) where the image of the object is formed by the lens system coincides with the position where the interference fringes (I12a) are formed.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described below with reference to FIG. FIG. 1 is a diagram showing a schematic configuration of an interference objective lens according to an embodiment,
(A) shows a reference temperature state, and (b) shows a state where the temperature changes by dT from the reference temperature state. In FIG. 1A, an objective lens system 10 includes a plurality of lens elements, and forms an image Io of an object O. A half mirror 11 held by a holding member 13 is disposed between the objective lens system 10 and the object O. The half mirror 11 divides light from the objective lens system 10 toward the object O into transmitted light and reflected light toward the object O. The reflected light reaches a reference mirror 12 a provided in a partial area on the substrate 12 held by the holding member 13, is reflected by the reference mirror 12 a, is reflected by the half mirror 11, and is reflected by the objective lens system 10. Head to. On the other hand, the half mirror 11
Is transmitted through the half mirror 11 and is directed toward the objective lens system 10 after being reflected by the object O.

Here, the objective lens system 10, the half mirror 11, the object O, the half mirror 11, and the objective lens system 1
An image Io of the object O is formed by the light passing in the order of 0,
Objective lens system 10, half mirror 11, reference mirror 12
a, an image I22a of the reference mirror 12a is formed by the light that has passed through the half mirror 11, and the objective lens system 10 in that order. Here, the light forming these images Io and the image I22
Interference occurs with the light forming a, and an interference fringe is formed at this position.

The reference mirror 12a is arranged at a distance L1 with respect to the torso surface 10a of the objective lens system 10, and the half mirror 11 is connected to the torso surface 1 of the objective lens system 10.
It is arranged at the position of distance L1 + L2 with reference to 0a. At this time, the distance from the half mirror 11 to the object O is the distance L2. In the present embodiment, the objective lens system 1
0 is constituted by a combination of a plurality of glass materials having different refractive index changes dN with respect to temperature change dT (dN / dT is different), so that an image of an object can be obtained even when there is a temperature change. The position of Io is matched with the position where the interference fringes are formed.

In the range of temperature change in actual use, the dN / dT and the expansion coefficient can be considered to change substantially linearly, so that the image Io of the object O is within this range. Does not deviate from the position where the interference fringes are formed. Therefore, even when there is a temperature change, both the object O and the interference fringes can be observed with good focus.

In the above-described embodiment, the example of the Millow type interference objective lens in which the reference mirror is provided on the front lens of the objective lens system has been described. However, the interference objective in which the reference mirror is provided separately from the objective lens system is shown. It can also be applied to lenses and the like.

[0012]

As described above, according to the present invention, even when there is a temperature change, the interference fringes do not defocus on the object image, and both can be observed with good focus.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of an interference objective lens according to the present invention.

FIG. 2 is a diagram showing a configuration of a conventional interference objective lens.

[Explanation of symbols]

 10: Objective lens system 11: Half mirror 12a: Reference mirror

Claims (1)

[Claims]
1. An objective lens system comprising a plurality of optical materials, an optical path dividing member disposed in an optical path between the objective lens system and an object, and one of the divisions divided by the optical path dividing member A reference mirror disposed in an optical path, and forming interference fringes by reflected light from the object disposed in the other divided optical path divided by the optical path dividing member and reflected light from the reference mirror. Even when a temperature change occurs, the position in the objective lens system is adjusted so that the position where the image of the object is formed by the objective lens system and the position where the interference fringes are formed coincide with each other. An interference objective lens, wherein the optical material is selected from the group consisting of:
JP9003654A 1997-01-13 1997-01-13 Interference objective lens Pending JPH10197210A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9003654A JPH10197210A (en) 1997-01-13 1997-01-13 Interference objective lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9003654A JPH10197210A (en) 1997-01-13 1997-01-13 Interference objective lens

Publications (1)

Publication Number Publication Date
JPH10197210A true JPH10197210A (en) 1998-07-31

Family

ID=11563466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9003654A Pending JPH10197210A (en) 1997-01-13 1997-01-13 Interference objective lens

Country Status (1)

Country Link
JP (1) JPH10197210A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011191118A (en) * 2010-03-12 2011-09-29 Mitsutoyo Corp Light interference measuring device
JP2012093166A (en) * 2010-10-26 2012-05-17 Mitsutoyo Corp Interference objective lens unit, and optical interference measuring apparatus including the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011191118A (en) * 2010-03-12 2011-09-29 Mitsutoyo Corp Light interference measuring device
US8891090B2 (en) 2010-03-12 2014-11-18 Mitutoyo Corporation Light-interference measuring apparatus
JP2012093166A (en) * 2010-10-26 2012-05-17 Mitsutoyo Corp Interference objective lens unit, and optical interference measuring apparatus including the same

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