JPH10162763A - Sample holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample holder whose constitution is simple and which hardly runs into trouble by arranging a holder main body where lead wire housing grooves running along a holder shaft are formed on an outside surface and heater electric current supply lead wires whose inside end parts are connected to a relay terminal for a heater by passing through the lead wire housing grooves from the inside of a cylindrical outside end part of the holder main body. SOLUTION: In this sample holder, lead wire housing grooves 46 to 49 running along a holder shaft are formed on an outside surface of a holder main body 13. In heater electric current supply lead wires L1 to L4, inside end parts are connected to a relay terminal 41 for a heater or the like by passing through the lead wire housing grooves 46 to 49 from the inside of a cylindrical outside end part of the holder main body 13. In this way, since the heater electric current supply lead wires L1 to L4 are connected to the relay terminal 41 for a heater or the like on the inside of the holder main body 13 by passing through an outside surface of the holder main body 31, there is no need to secure a space to pass the heater electic current supply lead wires L1 to L4 on the inside of the holder main body 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an irradiation beam such as an electron beam or an ion beam in a charged particle beam apparatus (electron microscope apparatus, analysis apparatus using electrons, ions, etc.) for performing microscopic analysis on a sample. The present invention relates to a sample holder for supporting a sample irradiated from a source, and more particularly to a sample holder capable of heating the sample and supplying electricity to the sample. The present invention provides an irradiation beam such as an electron beam or an ion beam,
It is used in an apparatus that analyzes a sample by irradiating the sample in a heated state and an energized state.

[0002]

2. Description of the Related Art In a charged particle beam apparatus for performing microscopic analysis on a sample, an irradiation beam emitted from an irradiation beam source such as an electron beam or an ion beam irradiates the sample. The charged particle beam device includes a wall member (such as an electron microscope tube) for maintaining the inside of the device in a vacuum, and a gonio stage supported by the wall member. The gonio stage has a cylindrical holder support hole, and the cylindrical holder support hole is
The sample holder has its axis (hereinafter referred to as “holder axis”).
This member is slidable in the direction (ie, slidable inward and outward of the holder support hole) and rotatably supported around the holder axis.

[0003]

When performing a microscopic analysis operation using the charged particle beam apparatus, the sample is analyzed while applying a voltage to or heating the sample on which an electric circuit such as an IC chip is printed. When observation is performed, data that cannot be obtained by conventional ordinary microscopic analysis is obtained. In this case, it is necessary to support the sample at the inner end of the sample holder so as to be able to heat and supply power. As described above, a current (sample conduction current) flowing directly through the sample is supplied to the sample supported at the inner end of the sample holder, or a heating heater provided at the inner end of the sample holder adjacent to the sample. When a current (heater heating current) flowing through the sample holder is supplied, it is necessary to externally route a power supply cable to the inner end of the sample holder.

[0004] The present invention has been made in view of the above circumstances, and has as its object the following contents. (O01) To provide a sample holder capable of heating a sample and supplying an energizing current flowing directly to the sample, having a simple configuration and being difficult to break down.

[0005]

Next, the present invention devised to solve the above-mentioned problems will be described. The elements of the present invention are used to facilitate correspondence with the elements of the embodiments described later. , The reference numerals of the elements of the embodiment are enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(The present invention) In order to solve the above problems, a sample holder of the present invention is characterized by having the following requirements. (A01) a holder body (13) in which a cylindrical outer end is connected to a cylindrical inner end of a holder body support member (11) slidable along the holder axis; (A02) a holder body (13) (A03) An outer end side heat insulating member (2) supported by the holder body (13) at the outer end side of the sample storage hole (21) provided at the end.
6), (A04) an inner end side heat insulating member (2) supported by the holder body (13) on the inner end side of the sample accommodation hole (21).
8), (A05) a furnace body (31) fixedly supported by the outer end side heat insulating member (26) and the inner end side heat insulating member (28), (A06) a beam passage hole (32b) and the beam passage hole (A07) The furnace body (31) having a sample fixing portion (32) for fixing the sample (S) at a position crossing the (32b), (A07) The furnace body (31) supported by the furnace body (31)
(A08) Heater relay terminals (41, 41, 43, 43) supported by the outer end side heat insulating member (26), (A09) The heaters (38, 39) And heater connection lines (61, 61, 62, 62) for connecting between the heater relay terminals (41, 41, 43, 43), and (A010) energizing the sample supported by the outer end side heat insulating member (26). (A011) A sample energizing connection line (63, 42) connecting between the sample (S) supported by the sample fixing portion (32) and the sample energizing relay terminals (42, 42). 63), (A012) being introduced inside the cylindrical outer end of the holder main body (13) through the cylindrical inner end of the holder main body support member (11), and the inner end is connected to the sample energizing relay. Terminals (42,
42) connected to the lead wire (L
7, L8), (A013) is introduced into the inside of the cylindrical outer end of the holder body (13) through the cylindrical inner end of the holder body support member (11), and the inner end is used for the heater. Relay terminals (41, 4
1, 43, 43) connected to the heater current supply leads (L1 to L4).

(Operation of the Present Invention) In the sample holder of the present invention having the above-described structure, the holder main body (13) in which the cylindrical outer end is connected to the cylindrical inner end of the holder main body support member (11).
Is slidable along the holder axis. Therefore, the position of the sample (S) supported on the inner end of the holder in the holder axial direction can be adjusted. The holder main body (13) has an outer end side heat insulating member (2) at an outer end side of a vertically extending sample accommodation hole (21) provided at an inner end of the holder main body (13).
6), and an inner end side heat insulating member (28) on the inner end side.
I support. The furnace body (31) is supported by the outer end side heat insulating member (26) and the inner end side heat insulating member (28). The furnace body (31) having a beam passage hole (32b)
The sample fixing portion (32) is provided with the beam passage hole (32b).
The sample (S) is fixed at a position crossing.

The outer end side heat insulating member (26) supports the relay terminals (41, 41, 43, 43) for heaters and the relay terminals (42, 42) for energizing the sample. The holder body (1) passes through the cylindrical inner end of the holder body support member (11).
The heater current supply lead wires (L1 to L4) introduced inside the cylindrical outer end portion of 3) are connected at their inner end portions to the heater relay terminals (41, 41, 43, 43). . In addition, the lead wires (L7, L8) for supplying a current-carrying current to the sample, which are introduced into the inside of the cylindrical outer end of the holder main body (13) through the cylindrical inner end of the holder main body support member (11), The inner end is connected to the relay terminals (42, 42) for energizing the sample. Heater connection wires (61, 61, 62, 62)
Connects between the heaters (38, 39) and the relay terminals for heaters (41, 41, 43, 43). Further, the connection lines (63, 63) for energizing the sample are connected to the sample fixing portion (32).
(S) supported by the sample and the relay terminal (4
2, 42). Therefore, the current supplied by the lead wires (L7, L8) for supplying the current flowing through the sample passes through the relay terminals (41, 41, 43, 43) for the heater and the connection wires (61, 61, 62, 62) for the heater. Then, it flows through the heaters (38, 39) supported by the furnace body (31). At this time, since the heaters (38, 39) generate heat and heat the furnace body (31), the sample (S) supported on the sample fixing portion (32) of the furnace body (31) is also heated. As described above, the heater connection lines (61, 61, 62, 62) are connected to the heater relay terminals (41, 41, 43, 43) fixed to the outer end side heat insulating member (26) and the outer end side. A connection is made between heaters (38, 39) supported by a furnace body (31) fixedly supported by a heat insulating member (26). Since the positional relationship between the heater relay terminals (41, 41, 43, 43) and the heaters (38, 39) does not change, the heater connection wires (61, 61, 62, 62) are pulled and disconnected. Such a thing does not occur.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment 1) A sample holder according to Embodiment 1 of the present invention is characterized by satisfying the following requirements in the present invention. (A014) Lead wire along the holder axis on the outer surface (A015) The holder body (13) in which the accommodation grooves (46 to 49) are formed, (A015) through the lead wire accommodation grooves (46 to 49) from inside the cylindrical outer end of the holder body (13), The inner end is the relay terminal for the heater (41, 41, 43, 43)
Are connected to the heater current supply lead wires (L1 to L1).
Four).

(Operation of the First Embodiment of the Present Invention) In the sample holder of the first embodiment of the present invention, the holder body (1
The outer surface of 3) has a lead wire accommodating groove (4) along the holder axis.
6 to 49) are formed. The heater current supply lead wires (L1 to L4) pass through the lead wire accommodating grooves (46 to 49) from the inside of the cylindrical outer end portion of the holder body (13), and have an inner end portion for the heater. Relay terminals (41, 41, 4
3, 43). As described above, the heater current supply lead wires (L1 to L4) are connected to the heater relay terminals (41, 41, 43, 43) inside the holder body (13) through the outer surface of the holder body (13). Therefore, the lead wire (L1) for supplying the heater current is provided inside the holder body (13).
~ L4), it is not necessary to secure a space for passing. For this reason, the holder main body (13) can be configured to be small, or the inside of the holder main body (13) can be provided with another lead wire, for example, a lead wire (L) for supplying current to the sample.
7, L8), and can be used as a storage space for thermocouple lead wires and the like.

[0011]

Next, specific examples (embodiments) of the embodiment of the sample holder of the present invention will be described with reference to the drawings, but the present invention is not limited to the following examples. In order to facilitate understanding of the following description, coordinate axes X, Y, and Z that are orthogonal to each other are defined in the drawings, and the arrow X direction is forward, the arrow Y direction is left, and the arrow Z direction is upward. And In this case, the direction opposite to the X direction (−X direction) is backward,
The direction opposite to the direction (-Y direction) is rightward, and the direction opposite to the Z direction (-
(Z direction) is downward. Also referred to as the front-rear direction or the X-axis direction including the X direction and the -X direction, the left-right direction or the Y-axis direction including the Y direction and the -Y direction, the Z direction and the -Z direction.
The direction including the direction is referred to as the vertical direction or the Z-axis direction.
Furthermore, in the figure, those with “•” in “「 ”mean the arrow pointing from the back of the paper to the front, and those with“ x ”in“ ○ ”from the table on the paper It shall mean an arrow pointing to the back.

(Embodiment) FIG. 1 is a view showing a state in which an embodiment of a sample holder according to the present invention is mounted on an electron microscope (charged particle beam apparatus). FIG. 2 is an enlarged view of a portion indicated by an arrow II in FIG. FIG. 3 is an overall explanatory view of the sample holder and the holder main body supporting member shown in FIG. 1 and is a front sectional view. FIG. 4 is an enlarged view of a portion indicated by an arrow IV in FIG. FIG. 5 is a sectional view taken along line VV of FIG. FIG.
6 is an explanatory view of the sample holder shown in the embodiment 1 in FIG. 3, FIG. 6A is a partial cross-sectional plan view, FIG. 6B is a side view as viewed from the arrow VIB in FIG. 6A, and FIG. FIG. 6A
FIG. 7 is a sectional view taken along line VIC-VIC of FIG. 7 is an explanatory view of a main part of the sample holder of the first embodiment shown in FIG. 6, FIG. 7A is a partial cross-sectional plan view, and FIG. 7B is a side view of the main part, and is an arrow VII in FIG.
FIG. 7C is a longitudinal sectional view of a main part of FIG.
It is IIC-VIIC sectional drawing. 8 is a transverse sectional view of the sample holder, FIG. 8A is a sectional view taken along the line VIIIA-VIIIA of FIG. 7A, and FIG. 8B is a sectional view taken along the line VIIIB-VIIIB of FIG. 7A. FIG. 9 is a perspective view of a furnace body having a sample fixing part constituting the sample holder of the first embodiment. FIG. 10 is an explanatory diagram of the current supply circuit of the embodiment.

In FIG. 1 and FIG. 2, an electron microscope 1 as a charged particle beam device has a case 2 whose inside is kept in a vacuum.
And an electron gun 3 is provided at the upper end of the case 2. A fluorescent plate 4 for observation and an observation window 6 are provided at the lower end of the case 2. An electron lens 7 for acceleration is arranged below the electron gun 3, and an electron lens 8 for magnification is arranged above the fluorescent screen 4. A gonio stage GS as a sample mounting portion is provided between the acceleration electronic lens 7 and the magnifying electronic lens 8. The gonio stage GS has a cylindrical holder mounting member 9 having a holder mounting hole 9a. The cylindrical holder mounting member 9 is supported by a spherical bearing of the goniometer stage GS such that the direction of the shaft can be adjusted. 1 and 2, reference numeral 10 denotes a sample positioning member.

3 and 4, the sample holder H supported by the holder mounting member 9 has a cylindrical holder main body supporting member 11 (see FIG. 3) penetrating the holder mounting hole 9a. . An O-ring 1 shown in FIG. 4 is provided at an inner end portion of the holder main body supporting member 11 (an end portion of the portion arranged inside the case 2, that is, a left end portion in FIG. 3).
A ring-shaped O-ring accommodating groove for accommodating 2 is formed. The O-ring 12 is connected to the holder mounting hole 9a (FIG. 1).
(See FIG. 1), and is a member for pressure-tightly blocking the left side of the O-ring 12 from the right atmosphere with the inner surface of the O-ring 12. In FIG. 4, a large-diameter portion 11a is formed on the inner peripheral surface of the inner end portion of the holder body support member 11, and a small-diameter portion 11b is formed on the right side (−Y side portion) of the large-diameter portion 11a. A step 11c is formed at the connection between the large diameter portion 11a and the small diameter portion 11b.

An outer end (right end) of a metal (stainless or titanium) holder main body 13 is inserted into an inner end (left end in FIG. 3) of the holder main body support member 11. The outer end (right end) of the holder body 13 has a cylindrical shape, and a ring-shaped large-diameter portion 13a is formed on the outer periphery thereof. The ring-shaped large diameter portion 13a is provided with the step portion 11c.
Is inserted to the position where it abuts. The holder body 1
3 outside the ring-shaped large diameter portion 13a (-Y
Side portion) is a small diameter portion 11b of the holder main body support member 11.
A ring-shaped O-ring groove for accommodating the O-ring 14 is formed on the outer peripheral surface of the fitting portion of the holder main body 13. The O-ring 14 is a member that presses against the inner surface of the holder main body support member 11 and hermetically blocks the left side of the O-ring 14 from the right atmosphere. The ring-shaped large diameter portion 13a of the holder body 13 is
, And is fixed to the holder main body support member 11.

A large diameter portion 11a at the inner end of the holder body supporting member 11 and a small diameter portion on the left side of the ring-shaped large diameter portion 13a of the holder body 13 inserted into the large diameter portion. A cylindrical spacer member 17 is inserted. The cylindrical spacer member 17 is fixed to the holder body 13 by screws 18. The upper and lower surfaces of the holder main body 13 are flattened at the left side of the left end of the cylindrical spacer member 17 (see FIG. 4), and the front side surface (X side surface) and the rear side Only the side surface (−X side surface) is formed as a cylindrical surface (see FIG. 8).

6 and 7, the holder body 13
The ball to be positioned 19 is adhered to the inner end (left end) of the. The positioning ball 19 is a member for positioning the holder main body 13 in the left-right direction. In FIG. 1, when the holder main body 13 is inserted from the right side to the left side of the gonio stage GS, a sample positioning member is used. 10 are members that come into contact with the positioning member Sa. 6 and 7, a sample housing hole 21 penetrating vertically through the holder main body 13 and a wiring work hole 22 arranged on the outer end side thereof are formed at the inner end of the holder main body 13. In FIG. 8, the sample accommodation hole 21 has an upper portion (an interval in the front-rear direction) formed wider than the lower portion, and a connection line support surface 21a is formed at a boundary between the upper portion and the lower portion. 6 and 7
In (2), a portion between the sample accommodation hole 21 and the wiring work hole 22 (that is, an outer end side portion of the sample accommodation hole 21) is formed as an outer end side heat insulating member mounting portion 23 whose lower half is cut off. A lower half of the inner end (left end) side of the sample accommodation hole 21 is also cut off to form an inner end side heat insulating member mounting portion 24. A rectangular parallelepiped insulating (made of alumina) outer end heat insulating member 26 is fixed to the outer end heat insulating member mounting portion 23 by bolts 27, 27. The inner end portion of the outer end heat insulating member 26 is It extends into the sample receiving hole 21. Further, a rectangular parallelepiped insulating (made of alumina) inner end side heat insulating member 28 is fixed to the inner end side heat insulating member mounting portion 24 by bolts 29, 29, and an outer end side portion of the inner end side heat insulating member 28. Extends into the sample receiving hole 21.

The sample S supported in the sample receiving hole 21 is
As shown in FIG. 9, the furnace body 31 for supporting the sample is formed in a semi-cylindrical sample fixing part 32 with an upper half cut off at the center and at the outer end and the inner end of the sample fixing part 32. It has an outer end side protruding portion 33 and an inner end side protruding portion 34. The outer end side protruding portion 33 and the inner end side protruding member 34
Has cylindrical heater mounting portions 33a and 34a adjacent to the sample fixing portion 32, and semi-cylindrical connecting portions 33b and 34b whose lower surface remote from the sample fixing portion 32 is deleted. The connecting portions 33b and 34b have bolt through grooves 33.
c and 34c are formed. The furnace body 31 has a structure in which the semi-cylindrical connecting portions 33b and 34b have bolts 3 on the upper surfaces of the outer end side heat insulating member 26 and the inner end side heat insulating member 28, respectively.
5, 36 are fixedly supported through the bolt through grooves 33c and 34c. The sample S
There is formed a beam passage hole 32b extending from the upper flat sample mounting surface 32a on which the laser beam is mounted to the lower cylindrical surface.
Also, sample fixing screw holes 32c, 32c for fixing the sample S are formed on the sample mounting surface 32a, and the sample S is connected to the sample fixing screw holes 32c, 32c by a sample fixing screw 37. , 37.

An outer end heater 38 and an inner end heater 39 are mounted on the heater mounting portions 33a and 34a of the furnace body 31, respectively. A pair of heater relay terminals 41, 41 and sample energization relay terminals 42, 42 are attached to the outer end side heat insulating member 26. The bolts 3 for fixing the furnace body 31 to the heat insulating materials 26 and 28
Reference numerals 5 and 36 are used as relay terminals for thermocouples. The inner end side heat insulating member 28 has a pair of relay terminals 4 for heaters.
3, 43 are attached. The bolt 36 used as the thermocouple relay terminal is grounded to the holder body 13 via the bolt 29 by a ground wire 44.

7 and 8, the holder body 13
On the front side (outer side) of the lead wire receiving groove
6, 47 are formed, and lead wire accommodating grooves (see FIG. 8) 48, 49 substantially similar to the front side are formed on the rear side (outer side). The upper lead accommodating grooves 46, 48 are for accommodating the lead wires connected to the heater relay terminals 41, 41, and the lower lead wire accommodating grooves 47, 49 are for the heater relay terminals 43, 43. This is a groove for accommodating a lead wire connected to the terminal. Outer end side lead wire insertion holes 46a connected to the inside of the sample holder 13 are provided at the outer end and the inner end (that is, both ends in the Y-axis direction) of each of the lead wire accommodating grooves 46 to 49.
To 49a and inner end side lead wire insertion holes 46b to 49b are formed.

The lead wire receiving tubes 46 to 49 accommodate lead wire insertion tubes made of alumina (made of insulating material).
The heater current supply leads L1 to L4 introduced inside the cylindrical outer end of the holder main body 13 through the cylindrical inner end of the holder main body support member 11 are connected to the outer end side lead wire insertion holes. 46a-49a and the lead wire receiving grooves 46-4.
9 is led into the lead insertion tube. The heater current supply leads L1 to L4 led into the lead wire insertion pipes in the lead wire accommodating grooves 46 to 49 are disposed inside the holder main body 13 through the inner end side lead wire insertion holes 46b to 49b. The heater relay terminals 41, 41, 43, 43 are connected. The thermocouple lead wires L5 and L6 are shown in FIG.
A, As shown in FIG. 8B, the bolt 3 used as the thermocouple fixing member passes through the inside of the holder main body 13.
5 (see FIG. 7A). A thermocouple (not shown) between the thermocouple leads L5 and L6 is fixed on the furnace body 31. 8A and 8B, the lead wires L7 and L8 for energizing the sample introduced into the holder body 13 in the same manner as the heater current supply leads L1 to L4 pass through the inside of the holder body 13. Are connected to the relay terminals 42 for energizing the sample. A sample holder H (see FIG. 3) is constituted by the elements indicated by the reference numerals 11 to 49.

In FIG. 4, each of the lead wires L1 to L8
Penetrates the cylindrical outer end of the holder body 13 from the inner end (left end) to the outer end (right end). An outer end of the holder body 13 is connected to the lead wires L1 to L8.
A hermetic seal member 51 having the connecting wires D1, D3, D5 to D8 is fixed. As shown in FIG. 10, the lead wires L1, L2 are connected to the connection lead D1, and the lead wires L3, L4 are connected to the connection lead D3. Then, the lead wires L5 to L8 are connected to the connection lead wires D5 to D8. The hermetic seal member 51 hermetically shuts off the inside of the holder main body 13 on the left side of the hermetic seal member 51 and the inside of the holder main body support member 11 on the right side.
Is a component having a function of enabling electrical connection with the inside of the device. In FIG. 4, inside the holder main body support member 11 on the right side of the hermetic seal member 51, signal transmission lines T1, T3, T5 to T8 connected to the connection conductors D1, D3, D5 to D8 are accommodated. I have.

3 to 5, a circular plate 53 is connected to the outer end of the holder main body supporting member 11. On the right side of the circular plate 53, the signal transmission line T
A cable fixing member 54 and a terminal member 56 for fixing and supporting the outer ends of T1, T5 and T5 to T8 are fixed.
The signal transmission lines T1, T3, T5 to T8 are fixed at their outer ends using the cable fixing member 54, and their outer ends are connected to the terminals C1, C3, C5 to C8 of the terminal member 56 (FIG. 3). , FIG. 5). Further, a cylindrical case 57 that covers the outer ends of the cable fixing member 54 and the signal transmission lines T1 to T8 is fixed to the circular plate 51. The terminals C1, C3, C5 and C6 are connected to a heating power supply circuit 58 (see FIG. 10) by an external heater cable E1.
, And the terminals C7 and C8 are connected to a current detecting device 59 (see FIG. 10) by a communication cable E2.

In FIG. 10, the furnace body 3 supporting the sample S
Reference numeral 1 denotes an outer heater 38 and an inner heater 39 supported by a furnace body.
Heated by The outer heater 38 and the heater relay terminals 41 and 41 are connected by heater connection lines 61 and 61, and the inner heater 39 and the heater relay terminals 43 and 43 are connected by heater connection lines 62 and 62. The sample S and the relay terminals 42 for energizing the sample are connected by connection lines 63 for energizing the sample.

(Operation of the Embodiment) The holder main body support member 11 of the sample holder H of the embodiment having the above-described configuration is a gonio stage GS provided on an outer wall for forming a vacuum chamber such as a microscope tube.
It is mounted on the holder mounting hole 9a of the cylindrical holder mounting member 9 and used. In that case, the gonio stage GS
The sample holder H supported by the holder mounting hole 9a of
The position in the axial direction can be adjusted by sliding along the axis (holder axis) of the holder main body support member 11. Further, by rotating the cylindrical holder mounting member 9 supporting the sample holder H by the spherical bearing of the gonio stage GS, it is possible to adjust the direction of the holder axis of the sample holder H and the rotational position around the holder axis. it can.

The holder main body 13 having the cylindrical outer end connected to the cylindrical inner end of the holder main body support member 11 slides along the holder axis to thereby support the sample supported on the inner end of the sample holder H. The position of S in the holder axial direction can be adjusted.
The holder main body 13 supports the outer end side heat insulating member 26 on the outer end side of the vertically penetrating sample accommodation hole 21 provided at the inner end of the holder main body 13, and the inner end side heat insulating member 28 on the inner end side. I support. The outer end side heat insulating member 26 and the inner end side heat insulating member 28 fixedly support the furnace body 31.
The sample fixing portion 32 of the furnace body 31 having the beam passage hole 32b is positioned at a position crossing the beam passage hole 32b.
Is fixed. Therefore, the beam that has been irradiated and transmitted through the sample S passes through the beam passage hole 32b.

The outer end side heat insulating member 26 supports the relay terminals 41 and 41 for the heater, the bolt 35 used as a thermocouple fixing member, and the relay terminals 42 and 42 for supplying the sample. Further, the inner end side heat insulating member 28 supports the relay terminals 43 for the heater. The holder body support member 11
Lead wires L1 to L4 for supplying heater current which are introduced inside the cylindrical outer end of the holder body 13 through the cylindrical inner end of
The inner ends of the heater relay terminals 41, 41, 4
3, 43. The thermocouple lead wire L5,
L6 is the holder body 13 as shown in FIGS. 8A and 8B.
It passes through the inside and is fixed by the bolt 35 used as the thermocouple fixing member. Further, the lead wires L7 and L8 for supplying a current to the sample which are introduced into the inside of the cylindrical outer end of the holder main body 13 through the cylindrical inner end of the holder main body support member 11 have inner ends thereof. It is connected to the relay terminals 42 for supplying the sample.

Heater connection lines 61, 61, 62, 62
(Refer to FIG. 10) is an outer heater 38 or an inner heater 39 supported by the furnace body 31 and a heater supported by the outer end side and inner end side heat insulating members 26 and 28 for fixedly supporting the furnace body 31. The relay terminals 41, 41, 43, 43 are connected. In addition, the connection lines 63 for energizing the sample (see FIG. 10) connect the sample S supported by the sample fixing portion 32 of the furnace body 31 and the relay terminals 42 for energizing the sample.
Therefore, the current supplied through the lead wires L7, L8 for supplying the current to the sample is supplied to the relay terminals 41, 41, 4 for the heaters.
3, 43 and heater connection lines 61, 61, 62, 62
Flows through the outer heater 38 and the inner heater 39 supported by the furnace body 31 through the heater. At this time, the heaters 38 and 39
Generates heat and heats the furnace body 31, so that the sample S supported by the sample fixing portion 32 of the furnace body 31 is also heated. As described above, the heater connection lines 61, 61 are
Are connected between the heater relay terminals 41 and 41 fixed to the outer heater 38 supported by the furnace body 31 fixed and supported by the outer heat insulating member 26. Since the positional relationship between the heater relay terminals 41, 41 and the outer heater 38 does not change, the heater connection lines 61, 61 are not pulled and disconnected. Similarly, the relay terminals 43 for the heater supported by the inner heat insulating member 28,
Since the positional relationship between 43 and the inside heater 39 does not change, the heater connection lines 62, 62 are not pulled and disconnected.

The sample holder H is provided with a lead wire accommodating groove 4 along the holder axis on the outer surface of the holder body 13.
6 to 49 are formed. The heater current supply lead wires L1 to L4 pass through the lead wire accommodating grooves 46 to 49 from the inside of the cylindrical outer end of the holder main body 13, and the inner end has the heater relay terminals 41, 41, 41,. 43, 43. As described above, the heater current supply leads L1 to L4
Are connected to the heater relay terminals 41, 41, 43, 43 inside the holder body 13 through the outer surface of the holder body 13, so that the heater current supply lead wires L1 to L4 are passed inside the holder body 13. There is no need to secure space. For this reason, the holder main body 13 can be made small, or the inside of the holder main body 13 can be provided with other lead wires, for example, thermocouple lead wires L5 and L6, and sample conducting current supply lead wire L7. , L8 and the like.

(Modifications) Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below.

(H01) The lead wire L for supplying the heater current
1 to L4 can pass through the inside of the holder main body instead of passing through the outside of the holder main body 13. It is also possible to configure so that only the heater current supply leads L2 and L4 for supplying a current to the inner heater 39 pass through the lead wire accommodating grooves 47 and 49 on the outside of the holder body 13.

[0032]

The sample holder of the present invention described above has the following effects. (O01) It is possible to provide a sample holder which can heat a sample and supply an energizing current flowing directly to the sample, has a simple configuration and is hard to break down.

[Brief description of the drawings]

FIG. 1 is a diagram showing a state in which an embodiment of a sample holder of the present invention is mounted on an electron microscope (charged particle beam device).

FIG. 2 is an enlarged view of a portion indicated by an arrow II in FIG.

FIG. 3 is an overall explanatory view of the sample holder and the holder main body support member shown in FIG. 1 and is a front sectional view.

FIG. 4 is an enlarged view of a portion indicated by an arrow IV in FIG.

FIG. 5 is a sectional view taken along line VV of FIG. 3;

6 is an explanatory view of the sample holder shown in FIG. 3 according to the first embodiment, FIG. 6A is a partial cross-sectional plan view, and FIG. 6B is a side view as viewed from an arrow VIB in FIG. 6A. 6C is a longitudinal sectional view taken along the line VIC-VIC in FIG. 6A.

7 is an explanatory view of a main part of the sample holder of the embodiment 1 shown in FIG. 6; FIG. 7A is a partial cross-sectional plan view, and FIG. 7B is a main part side view seen from an arrow VIIB in FIG. 7A. FIG. 7C
FIG. 7B is a longitudinal sectional view of a main part, and is a sectional view taken along line VIIC-VIIC of FIG. 7A.

8 is a transverse sectional view of the sample holder, FIG. 8A is a sectional view taken along the line VIIIA-VIIIA of FIG. 7A, and FIG. 8B is a sectional view taken along the line VIIIB-VIIIB of FIG. 7A.

FIG. 9 is a perspective view of a furnace body having a sample fixing part constituting the sample holder of the first embodiment.

FIG. 10 is an explanatory diagram of a current supply circuit according to the same embodiment.

[Explanation of symbols]

L1 to L4: Lead wire for supplying heater current, L7, L8: Lead wire for supplying current to sample, S: Sample 11: Holder body support member, 13: Holder body, 21 ...
Sample accommodation hole, 26: outer end side heat insulating member, 28: inner end side heat insulating member, 31: furnace body, 32: sample fixing part, 32b: beam passage hole, 38, 39: heater, 41, 43: relay for heater Terminals, 42: relay terminals for conducting the sample, 46 to 49: grooves for accommodating lead wires, 61, 62: connecting wires for the heater, 63: connecting wires for conducting the sample

Claims (2)

[Claims] 1. A sample holder having the following requirements: (A01) a holder main body in which a cylindrical outer end is connected to a cylindrical inner end of a holder main body supporting member slidable along a holder axis; And (A03) an outer end side heat insulating member supported by the holder body at an outer end side of the sample storage hole, and (A04) the sample storage hole. (A05) a furnace body fixedly supported by the outer end heat insulating member and the inner end heat insulating member, which is supported by the holder main body at the inner end side of the hole; (A06) a beam passage hole; (A07) a heater that is supported by the furnace body and heats the furnace body, (A08) is supported by the outer end side heat insulating member, and has a sample fixing portion that fixes the sample at a position that crosses the beam passage hole. (A09) The relay terminal for the heater (A010) A relay terminal for energizing the sample supported by the outer end side heat insulating member, (A011) A sample supported by the sample fixing portion and energizing the sample (A012) a connection line for connecting the sample to the relay terminal, which is introduced into the cylindrical outer end of the holder main body through the cylindrical inner end of the holder main body support member, and the inner end is (A013) a lead wire for supplying a current to the sample connected to the relay terminal for supplying a sample, (A013) being introduced into the cylindrical outer end of the holder main body through the cylindrical inner end of the holder main body support member; A heater current supply lead wire having an end connected to the heater relay terminal. 2. The sample holder according to claim 1, which satisfies the following requirements: (A014) the holder main body having a lead wire accommodating groove formed on an outer surface along a holder axis; and (A015) a cylinder of the holder main body. A heater current supply lead wire having an inner end connected to the heater relay terminal from the inside of the outer end of the shape through the lead wire accommodating groove;