JPH10123449A5 - - Google Patents

Info

Publication number
JPH10123449A5
JPH10123449A5 JP1996279340A JP27934096A JPH10123449A5 JP H10123449 A5 JPH10123449 A5 JP H10123449A5 JP 1996279340 A JP1996279340 A JP 1996279340A JP 27934096 A JP27934096 A JP 27934096A JP H10123449 A5 JPH10123449 A5 JP H10123449A5
Authority
JP
Japan
Prior art keywords
movable plate
optical scanner
coil
wiring
drive coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996279340A
Other languages
English (en)
Japanese (ja)
Other versions
JP3684003B2 (ja
JPH10123449A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP27934096A priority Critical patent/JP3684003B2/ja
Priority claimed from JP27934096A external-priority patent/JP3684003B2/ja
Publication of JPH10123449A publication Critical patent/JPH10123449A/ja
Priority to US09/213,062 priority patent/US6188504B1/en
Priority to US09/704,284 priority patent/US6392776B1/en
Publication of JPH10123449A5 publication Critical patent/JPH10123449A5/ja
Application granted granted Critical
Publication of JP3684003B2 publication Critical patent/JP3684003B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP27934096A 1996-06-28 1996-10-22 光スキャナ Expired - Fee Related JP3684003B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP27934096A JP3684003B2 (ja) 1996-10-22 1996-10-22 光スキャナ
US09/213,062 US6188504B1 (en) 1996-06-28 1998-12-16 Optical scanner
US09/704,284 US6392776B1 (en) 1996-06-28 2000-11-01 Optical scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27934096A JP3684003B2 (ja) 1996-10-22 1996-10-22 光スキャナ

Publications (3)

Publication Number Publication Date
JPH10123449A JPH10123449A (ja) 1998-05-15
JPH10123449A5 true JPH10123449A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2004-10-14
JP3684003B2 JP3684003B2 (ja) 2005-08-17

Family

ID=17609820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27934096A Expired - Fee Related JP3684003B2 (ja) 1996-06-28 1996-10-22 光スキャナ

Country Status (1)

Country Link
JP (1) JP3684003B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000330067A (ja) * 1999-05-20 2000-11-30 Olympus Optical Co Ltd ねじり揺動体
KR100450790B1 (ko) * 1999-05-28 2004-10-01 삼성전자주식회사 마이크로 미러 스캐너 및 그 제조방법
JP2001228434A (ja) * 1999-12-08 2001-08-24 Nippon Signal Co Ltd:The 電磁駆動型光走査装置
JP4149108B2 (ja) 2000-01-28 2008-09-10 オリンパス株式会社 バーコード走査装置
JP2002040354A (ja) 2000-07-27 2002-02-06 Olympus Optical Co Ltd 光スキャナ
JP4578001B2 (ja) * 2001-01-31 2010-11-10 シチズンファインテックミヨタ株式会社 ガルバノ装置の製造方法
JP4724308B2 (ja) * 2001-04-17 2011-07-13 オリンパス株式会社 ガルバノミラー
US6775039B2 (en) 2001-07-13 2004-08-10 Olympus Corporation Driving circuit for an optical scanner
JP4720699B2 (ja) * 2006-09-20 2011-07-13 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
DE102007030797A1 (de) * 2007-07-03 2009-01-08 Robert Bosch Gmbh Mikromechanisches Bauelement mit einem vergleichsweise dicken schwingfähigen Element gegenüber einem dünnen Aufhängungselement
FR2951713B1 (fr) 2009-10-27 2012-04-13 Centre Nat Rech Scient Micro-volet a actionnement electromagnetique
JP6260019B2 (ja) * 2012-11-09 2018-01-17 北陽電機株式会社 金属弾性部材、微小機械装置、微小機械装置の製造方法、揺動制御装置及び揺動制御方法

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