JPH0980475A - Liquid crystal display element and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To restore a short-circuited position by a simple method. SOLUTION: A display electrode 18 and a reference electrode 14 are formed on each pixel area on one side transparent substrate between the transparent substrates arranged oppositely to each other through a liquid crystal layer, and by generating electric field in parallel to the transparent substrate between these electrodes, light transmitting through the liquid crystal layer is modulated. Then, a video signal from a video signal line 3 is supplied to the display electrode 18 through a switching element turning on by supply of a scanning signal to a scanning signal line 2, and a reference signal from a reference signal line 4 is supplied to the reference electrode 14. In the manufacture of such a liquid crystal display element, when electric short circuit arises between the video signal line 3 and the reference electrode 14 adjacent to the video signal line, the reference electrode 14 is cut in the area of the reference signal line side between the reference electrodes 14 in the position where the electric short circuit arises.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device and a manufacturing method thereof, and more particularly to a so-called lateral electric field type liquid crystal display device and a manufacturing method thereof.

[0002]

2. Description of the Related Art A so-called lateral electric field type color liquid crystal display device is a region surface corresponding to a unit pixel on one liquid crystal layer side of a transparent substrate arranged to face each other with a liquid crystal layer interposed therebetween. Further, a display electrode and a reference electrode are provided, and light transmitted through the liquid crystal layer is modulated by an electric field generated between the display electrode and the reference electrode in parallel with the transparent substrate surface.

Such a color liquid crystal display substrate can recognize a clear image even when viewed from a large angle visual field with respect to its display surface, and has come to be known as a so-called wide angle visual field excellent.

In the liquid crystal display device of the so-called active matrix system, which employs such a lateral electric field system, a switching device is provided in each pixel region arranged in a matrix, and a scanning signal is provided. A video signal from a video signal line is supplied to the display electrode via a switching element that is turned on by a scanning signal from the line, and the reference electrode is configured to be supplied with a reference signal from the reference signal line. ing.

A liquid crystal display element having such a structure is disclosed in, for example, Japanese Patent Application Publication No. 5-505247.
JP-A No. 63-21907, and the like.

[0006]

However, in the liquid crystal display element having such a structure, the video signal lines must be arranged so as to intersect the scanning signal lines and the reference signal lines on one transparent substrate surface. In addition, in each pixel area, the reference electrodes are arranged on both sides of the display electrode with the display electrode interposed therebetween, which results in a geometrically complicated configuration.

Therefore, in the process of manufacturing such a liquid crystal display element, there is a possibility that an electrical short circuit may occur between various signal lines which should originally be insulated and formed, or between the signal line and the electrode. There is an undeniable increase in size, and there has been demand for a simple repair method.

The present invention has been made under such circumstances, and an object of the present invention is to provide a method of manufacturing a liquid crystal display device capable of repairing a short-circuited portion by a simple method.

Another object of the present invention is to provide a method of manufacturing a liquid crystal display device capable of repairing a broken portion by a simple method even if the signal line or the electrode is broken.

[0010]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

That is, a display electrode and a reference electrode are formed in each pixel region of one transparent substrate of the transparent substrates arranged to face each other with a liquid crystal layer in between, and the transparent substrate is provided between these electrodes. Light that passes through the liquid crystal layer is modulated by generating an electric field in parallel, and the display electrodes are switched from a video signal line through a switching element that is turned on by supplying a scan signal to the scan signal line. When the video signal is supplied, the reference electrode is
In a method for manufacturing a liquid crystal display element to which a reference signal from a reference signal line is supplied, when an electrical short circuit occurs between a video signal line and a reference electrode adjacent to the video signal line,
Among the reference electrodes on both sides of the location where the electrical short circuit occurs, the reference electrode on the reference signal line side is cut off.

[0012]

According to the method of manufacturing a liquid crystal display element having such a structure, by cutting the reference electrode as described above, the reference electrode from the cut portion to the tip loses its function, and the reference electrode is not connected to the display electrode. In the meantime, a region where an effective electric field that can contribute to display is formed is reduced, resulting in a slight point defect.

However, when viewed from the entire display surface, this point defect is not particularly conspicuous and can sufficiently function as a display element.

Therefore, it is possible to easily remove the defect of the pixel group having the common reference signal line, that is, the adverse effect due to the line defect by a simple operation.

[0015]

First, before explaining the embodiments of the present invention, one embodiment of the constitution of a so-called lateral electric field type liquid crystal display device to which the present invention is applied will be explained.

As shown in FIG. 2, there is a liquid crystal display element 1, and one of the transparent substrates 1A arranged opposite to each other through the liquid crystal of the liquid crystal display element 1 has a liquid crystal side surface x on its transparent side. A scanning signal line 2 and a reference signal line 4 which extend in the direction (row direction) and are arranged in parallel in the y direction (column direction) are formed.

In this case, in the figure, from the upper side of the transparent substrate 1A, a reference signal line 4, a scanning signal line 2 relatively separated from the reference signal line 2, and a reference signal line close to the scanning signal line 2 are provided. 4, scanning signal lines 2, which are relatively spaced apart from the reference signal line 4, and so on.

Video signal lines 3 are formed which are insulated from the scanning signal lines 2 and the reference signal lines 4 and extend in the y direction and are arranged in parallel in the x direction at equal intervals.

Here, a unit pixel is formed in each rectangular area having a relatively large area surrounded by the scanning signal line 2, the reference signal line 4, and the video signal line 3, and these unit pixels are formed. Are arranged in a matrix to form a display surface. The detailed configuration of each unit pixel will be described later.

The liquid crystal display element 1 is provided with a vertical scanning circuit 5 and a video signal drive circuit 6 as its external circuits.
The vertical scanning circuit 5 sequentially supplies a scanning signal (voltage) to each of the scanning signal lines 2, and the video signal drive circuit 6 supplies the video signal (voltage) to the video signal line 3 at the timing. It has become.

The vertical scanning circuit 5 and the video signal drive circuit 6 are supplied with power from the liquid crystal drive power supply circuit 7, and the image information from the CPU 8 is supplied to the controller 9 as well.
The display data and the control signal are separately input according to.

The voltage applied to the reference signal line 4 is also supplied from the liquid crystal drive power supply circuit 7.

Next, one embodiment of each unit pixel in the liquid crystal display element 1 having the above-mentioned structure will be described below.

FIG. 3 is a plan view showing an embodiment of the unit pixel in the liquid crystal display element 1. In addition, IV in FIG.
A sectional view taken along the line -IV is shown in FIG. 4, a sectional view taken along the line VV is shown in FIG. 5, and a sectional view taken along the line VI-VI is shown in FIG.

In FIG. 3, on the main surface of the transparent substrate 1A,
The reference signal line 4 extending in the x direction and the scanning signal line 4 are formed in parallel with and spaced from the reference signal line 4.

Here, two reference electrodes 14 are integrally formed on the reference signal line 4. That is, each reference electrode 14 is adjacent to each of the video signal lines 3 in the y direction of a pixel region formed by a pair of video signal lines 3 described later, that is, in the (-) y direction, in the vicinity of each of the video signal lines 3. It is formed so as to extend to the vicinity of 2.

The surface of the transparent substrate 1A on which the scanning signal lines 2, the reference signal lines 4, and the reference electrodes 14 are formed covers the scanning signal lines 2 and the like, and an insulating film 15 made of, for example, a silicon nitride film. (See FIGS. 4, 5, and 6) are formed. The insulating film 15 is provided for the scanning signal line 2 and the reference signal line 4 for the video signal line 3 described later.
It functions as an interlayer insulating film at the intersection with and as a gate insulating film for the formation region of the thin film transistor TFT, and as a dielectric film for the formation region of the storage capacitor Cstg.

On the surface of the insulating film 15, first, in the formation region of the thin film transistor TFT, the semiconductor layer 16 is formed.
Are formed. The semiconductor layer 16 is made of, for example, amorphous Si, and is formed on the scanning signal line 2 so as to overlap a portion close to the video signal line 3. As a result, a part of the scanning signal line 2 is
Is also configured as a gate electrode.

Then, on the surface of the insulating film 15 thus formed, as shown in FIG. 3, video signal lines 3 extending in the y direction and arranged in parallel in the x direction are formed. .

The video signal line 3 is integrally provided with a drain electrode 3A formed to extend to a part of the surface of the semiconductor layer 16 of the thin film transistor TFT.

Further, a display electrode 18 is formed on the surface of the insulating film 15 in the pixel area. This display electrode 1
8 is the reference electrode 1 so that one pixel region is divided into two.
The center of 8 is formed to extend in the y direction. That is, one end of the display electrode 18 has the thin film transistor TFT.
It also serves as the source electrode 18A and extends in the (+) y direction as it is, and the other end thereof is formed so as to overlap with the reference signal line 4.

In this case, the other end of the display electrode 18 superimposed on the reference signal line 4 has a relatively large area, and the insulating film 15 as a dielectric film is provided between the other end and the reference signal line 4. It constitutes a storage capacity Cstg. The storage capacitor Cstg has an effect of storing video information on the display electrode 18 for a long time when the thin film transistor TFT is turned off, for example.

The surface of the semiconductor layer 16 corresponding to the interface between the drain electrode 3A and the source electrode 18A of the thin film transistor TFT described above is doped with phosphorus (P) to form a high-concentration layer. Ohmic contact is attempted at each electrode. In this case, the high-concentration layer is formed on the entire surface of the semiconductor layer 16, and after forming the electrodes, the high-concentration layer other than the electrode formation region is etched using the electrodes as a mask. The above configuration can be adopted.

Then, in this way, the thin film transistor TF
T, video signal line 3, display electrode 18, and storage capacitor Cs
A protective film 19 made of, for example, a silicon nitride film is formed on the upper surface of the insulating film 15 on which tg is formed (see FIGS. 4, 5, and 6).
Is formed, and the alignment film 20 is formed on the upper surface of the protective film 19 to form a so-called lower substrate of the liquid crystal display element. A polarizing plate 21 is arranged on the surface of the lower substrate opposite to the liquid crystal layer side.

As shown in FIG. 4, a light-shielding film 22 is formed on the liquid crystal side of the transparent substrate 1B, which is the so-called upper substrate, at the portions corresponding to the boundaries between the pixel regions. The light-shielding film 22 has a function of preventing the thin film transistor TFT from being directly irradiated with light and a function of improving the display contrast. As a result, the light shielding film 22 has an opening portion, and the opening portion constitutes a substantial pixel region.

Further, a color filter 23 is formed so as to cover the opening of the light-shielding film 22, and the color filter 23 has a different color from that of the pixel region adjacent in the x direction and has a boundary on each light-shielding film 22. It has a part. A flat film 24 made of a resin film or the like is formed on the surface on which the color filter 23 is formed, and the alignment film 2 is formed on the surface of the flat film 24.
5 are formed. A polarizing plate 26 is arranged on the surface of the upper substrate opposite to the liquid crystal layer side.

The relationship between the alignment film 20 and the polarizing plate 21 formed on the transparent substrate 1A side and the alignment film 25 and the polarizing plate 26 formed on the transparent substrate 1B side will be described with reference to FIG.

Alignment films 20 and 2 with respect to the direction 207 of the electric field applied between the display electrode 18 and the reference electrode 14.
5, the angle of the rubbing direction 208 is φLC. The liquid crystal layer LC has a dielectric anisotropy Δε.
Is positive and its value is 7.3 (1 kHz), refractive index anisotropy Δn
Is 0.073 (589 nm, 20 ° C.), which is a nematic liquid crystal composition.

In this embodiment, for example, φLC = 85 °. At this time, the angle φP of the polarization transmission axis direction 209 of the one polarizing plate 21 is set to φP = φLC, and the polarization transmission axis direction of the other polarizing plate 26 is arranged so as to be orthogonal to φP.

Alignment films 20 and 25 having such a relationship
The configuration of the polarizing plates 21 and 26 and so on is what is called a normally black mode. Light that passes through the liquid crystal layer LC is generated by generating an electric field E parallel to the transparent substrate 1A in the liquid crystal layer LC. Is controlled, and in particular, so-called black display can be performed by shutting off when no electric field is applied between the reference electrode and the display electrode.

Embodiment 1 In the process of manufacturing the lower substrate of the liquid crystal display device having such a structure, for example, as shown in FIG. 1A corresponding to FIG. 3, when the video signal line 3 is formed, the video signal line 3 is formed. Reference electrode 14 adjacent to
Consider a case where an electrical short circuit (indicated by a dotted circle in the figure) occurs between and.

Such an electrical short circuit is formed in such a manner that the video signal line 3 is not formed according to the pattern, a part of the video signal line 3 protrudes toward the reference electrode 14 side, and at the same time as the reference electrode 14. This occurs when the insulation of the insulating film 15 between the two is incomplete.

In such a case, the reference signal line 4 and the video signal line 3 common to the pixels arranged in parallel in the x direction have the same potential, so that each pixel loses its display function. So-called line defects occur, and unless the line defects can be repaired, the entire lower substrate cannot be used as a product.

Therefore, in the present embodiment, as shown in FIG. 1B, among the reference electrodes 14 on both sides of the portion where the short-circuited portion has occurred, the reference electrode 14 on the reference signal line 4 side is, for example, a laser. A ray is used for cutting (shown by a dotted circle in the figure). The cutting by the laser beam can be performed easily because the beam diameter is small and the target portion can be scanned extremely accurately.

Although the reference electrode 14 thus cut off has a small area where an effective electric field that can contribute to display is formed between the reference electrode 14 and the display electrode 18, it becomes a slight point defect. Since it is not particularly conspicuous when viewed from the entire display surface, it is possible to eliminate the above-mentioned adverse effects due to the line defects.

When the above-mentioned electrical short circuit occurs, as shown in FIG. 8, the reference of the video signal line 3 should be taken with care so that the disconnection of the video signal line 3 can be surely avoided. It goes without saying that the protruding portion to the electrode side 14 may be cut along the running direction of the video signal line (shown by a dotted circle in the figure).

By doing so, even if the reference electrode 14 is largely depressed to cut off the protruding portion of the video signal line 3, the same effect as described above can be obtained.

Example 2. As shown in FIG. 9A corresponding to FIG. 3, when the reference electrode 14 and the reference signal line 4 are formed, an electrical short circuit occurs between the reference electrode 3 and the adjacent scanning signal line 2. Think about the case.

The reference signal line 4 integrally formed with the reference electrode 14 is formed in the same layer as the scanning signal line 2, and the tip portion of the reference electrode 14 extending from the reference signal line 4 has an aperture ratio of Considering improvement, it is positioned very close to the scanning signal line 2. Therefore, there is a high possibility that a residue of the material that constitutes the reference electrode 14 and the scanning signal line 2 will adhere between the tip portion of the reference electrode 14 and the scanning signal line 2 to cause an electrical short circuit (indicated by a dotted circle in the figure).

In such a case, the reference signal line 4 and the scanning signal line 2 common to the pixels arranged in parallel in the x direction have the same potential, so that a so-called line defect is generated. Unless it can be repaired, the entire lower substrate cannot be used as a product.

Therefore, in this embodiment, as shown in FIG. 9B, the reference electrode 14 in the vicinity of the portion where the short-circuited portion is generated is cut by, for example, a laser beam (indicated by a dotted circle in the figure). I have to. In this case, the same effect as that of the first embodiment can be obtained.

Example 3. In each of the first and second embodiments, the adverse effect due to the line defect is removed by cutting the reference electrode 14 adjacent to the video signal line 3 with a slight gap, for example, by laser light. It is what

FIG. 10A is a plan view showing an embodiment of the liquid crystal display element which can be easily operated in cutting the reference electrode.

This drawing corresponds to FIG. 3, and the materials having the same reference numerals as those in FIG. 3 both have the same function. The configuration different from that of FIG. 3 lies in the formation pattern of the reference electrode 14. That is, the reference electrode 14 which is adjacent to the video signal line 3 with a slight gap is largely separated from the video signal line 3 in the portion extending from the reference signal line 4 as compared with the other portions. It is composed.

As a result, a part of the reference electrode 14 is formed so as to slightly penetrate into the pixel region (shown by a dotted circle in the figure), but since this part is a corner of the pixel region, It does not have a great influence on the aperture ratio.

Then, in the liquid crystal display device having such a structure, as shown in FIG. 10B, the reference electrode 14 is cut at a position greatly separated from the video signal line 3. By doing so, it becomes possible to cut only the reference electrode (indicated by a dotted circle in the figure) without damaging the video signal line.

By thus previously specifying the cutting point of the reference electrode 14, there is an effect that a complicated signal processing system for determining the cutting point can be eliminated.

Example 4. As shown in FIG. 11A corresponding to FIG. 3, consider a case where an electrical short circuit occurs between the scanning signal line 2 and the reference signal line 4 in each pixel region adjacent to each other in the x direction. .

When the scanning signal line 2 and the reference signal line 4 are formed in the same layer and are formed so as to improve the aperture ratio,
They will be adjacent with a small gap. Therefore, there is a high possibility that an electric short circuit may occur between the scan signal line 2 and the reference signal line 4 due to the residue of the material constituting them adhering thereto.

Even in such a case, the reference signal line 4 and the scanning signal line 2 which are common to the pixel regions arranged in parallel in the x direction have the same potential, which causes a line defect.

Therefore, in this embodiment, as shown in FIG. 11B, the residue itself at the portion where the short-circuited portion is generated is cut by, for example, a laser beam.

In this case, the same effect as the second embodiment can be obtained.

Example 5. As shown in FIG. 12A corresponding to FIG. 3, consider a case where the reference signal line 4 is formed in a state in which a part of the reference signal line 4 is broken (shown by a dotted circle).

Since the reference signal line 4 in this case is common to the pixels arranged side by side in the x direction, it obviously becomes a line defect.

In such a case, as shown in FIG. 12 (b), each of the cut reference signals is formed by applying a film 20 made of a conductive material to the broken portion (indicated by a dotted circle in the figure). Make sure the wires are electrically connected.

The film formation in this case is so-called optical CV.
This can be easily achieved by forming an atmosphere containing the material to be film-formed at the disconnection point by using the D method and scanning the laser beam at the point to be film-formed through the atmosphere.

Embodiment 6 FIG . As shown in FIG. 13 corresponding to FIG. 3, consider a case where the display electrode 18 is formed in a state in which a part thereof is broken (shown by a dotted line in the drawing).

In this case, only the pixel having the broken display electrode 18 does not operate normally, resulting in a so-called point defect.

In such a case, as shown in FIG. 13B, the cut display electrode 18 is formed by applying the film formation 30 made of a conductive material to the disconnection point by using the above-mentioned photo CVD method. To be electrically connected (indicated by a dotted circle in the figure).

Needless to say, even if the reference electrode 14 is broken, it can be repaired by the same method.

[0071]

As is apparent from the above description, according to the liquid crystal display device of the present invention, it is possible to repair a short-circuited portion by a simple method.

Further, even if the signal line or the electrode is broken, the broken portion can be repaired by a simple method.

[Brief description of drawings]

FIG. 1 is an explanatory view showing an embodiment of a method for manufacturing a liquid crystal display element according to the present invention.

FIG. 2 is a configuration diagram showing an embodiment of a liquid crystal display element and a driving circuit thereof, which is a target of the manufacturing method according to the present invention.

FIG. 3 is a main part plan view showing an embodiment of a liquid crystal display element which is a target of the manufacturing method according to the present invention.

FIG. 4 is a sectional view taken along line IV-IV in FIG.

5 is a cross-sectional view taken along line VV of FIG.

FIG. 6 is a sectional view taken along line VI-VI in FIG.

FIG. 7 is an explanatory diagram showing a relationship between an alignment film and a polarizing film of a liquid crystal display element which is a target of the manufacturing method according to the present invention.

FIG. 8 is a plan view showing another embodiment of the method for manufacturing a liquid crystal display element according to the present invention.

FIG. 9 is a plan view showing another embodiment of the method for manufacturing a liquid crystal display element according to the present invention.

FIG. 10 is a plan view showing another embodiment of the method for manufacturing a liquid crystal display element according to the present invention.

FIG. 11 is a plan view showing another embodiment of the method for manufacturing a liquid crystal display element according to the present invention.

FIG. 12 is a plan view showing another embodiment of the method for manufacturing a liquid crystal display element according to the present invention.

FIG. 13 is a plan view showing another embodiment of the method for manufacturing a liquid crystal display element according to the present invention.

[Explanation of symbols]

2 ... Scanning signal line, 3 ... Video signal line, 4 ... Reference signal line, 14 ... Reference electrode, 18 ... Display electrode, TFT ...
Thin film transistor, Cstg ... Storage capacity.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Keiichiro Ashizawa 3300 Hayano, Mobara-shi, Chiba Hitachi, Ltd. Electronic Device Division

Claims (10)

[Claims] 1. A display electrode and a reference electrode are formed in each pixel region of one of the transparent substrates arranged to face each other with a liquid crystal layer in between, and the transparent substrate is provided between the electrodes. In order to modulate the light passing through the liquid crystal layer by generating an electric field in parallel, the display electrode, from the video signal line via the switching element turned on by the supply of the scanning signal to the scanning signal line. In the method of manufacturing a liquid crystal display device, in which the video signal is supplied and the reference electrode is supplied with the reference signal from the reference signal line, the reference electrode is electrically connected between the video signal line and the reference electrode adjacent to the video signal line. Of the reference electrode at the location where the electrical short circuit has occurred, the reference electrode is cut in a region on the side of the reference signal line. Method. 2. A display electrode and a reference electrode are formed in each pixel region of one transparent substrate of the transparent substrates arranged to face each other with a liquid crystal layer interposed therebetween, and the transparent substrate is provided between these electrodes. In order to modulate the light passing through the liquid crystal layer by generating an electric field in parallel, the display electrode, from the video signal line via the switching element turned on by the supply of the scanning signal to the scanning signal line. In the method of manufacturing a liquid crystal display element in which a video signal is supplied and the reference electrode is supplied with a reference signal from a reference signal line, the reference electrode is not formed according to a predetermined pattern to the adjacent reference electrode side of the video signal line. A method for manufacturing a liquid crystal display device, wherein the protruding portion is cut off when the protruding portion causes an electrical short circuit with the reference electrode. 3. A display electrode and a reference electrode are formed in each pixel area of one transparent substrate of the transparent substrates arranged to face each other with a liquid crystal layer interposed therebetween, and the transparent substrate is provided between these electrodes. In order to modulate the light passing through the liquid crystal layer by generating an electric field in parallel, the display electrode, from the video signal line via the switching element turned on by the supply of the scanning signal to the scanning signal line. In the method of manufacturing a liquid crystal display device, in which a video signal is supplied and the reference electrode is supplied with a reference signal from a reference signal line, the reference electrode is electrically connected between the reference electrode and a scanning signal line adjacent to the reference electrode. A method for manufacturing a liquid crystal display element, wherein the reference electrode is cut in the vicinity of a portion where the electrical short circuit occurs when the electrical short circuit occurs. 4. A display electrode and a reference electrode are formed in each pixel region of one of the transparent substrates arranged to face each other with a liquid crystal layer in between, and the transparent substrate is provided between these electrodes. In order to modulate the light passing through the liquid crystal layer by generating an electric field in parallel, the display electrode, from the video signal line via the switching element turned on by the supply of the scanning signal to the scanning signal line. In the liquid crystal display device in which the video signal is supplied and the reference electrode is supplied with the reference signal from the reference signal line, the reference electrode is formed to extend from the reference signal line adjacent to the video signal line. In addition, the liquid crystal display element is characterized in that the portion extending from the reference signal line is far away from the video signal line as compared with other portions. 5. When an electrical short circuit occurs between the reference electrode and another signal line adjacent to the reference electrode, a portion of the reference electrode that is largely separated from the video signal line is cut off. The liquid crystal display element according to claim 4. 6. A display electrode and a reference electrode are formed in each pixel region of one transparent substrate of the transparent substrates arranged to face each other with a liquid crystal layer interposed therebetween, and the transparent substrate is provided between these electrodes. In order to modulate the light passing through the liquid crystal layer by generating an electric field in parallel, the display electrode, from the video signal line via the switching element turned on by the supply of the scanning signal to the scanning signal line. In the method of manufacturing a liquid crystal display device, in which a video signal is supplied and the reference electrode is supplied with a reference signal from a reference signal line, a reference signal line and a scanning signal line arranged adjacent to the reference signal line. A method for manufacturing a liquid crystal display element, wherein the conductive deposit itself is cut when an electrical short circuit occurs between the conductive deposit and the conductive deposit. 7. The method for manufacturing a liquid crystal display device according to claim 1, wherein the cutting is performed by irradiating a laser beam. 8. A display electrode and a reference electrode are formed in each pixel region of one transparent substrate of the transparent substrates arranged to face each other with a liquid crystal layer interposed therebetween, and the transparent substrate is provided between the respective electrodes. In order to modulate the light passing through the liquid crystal layer by generating an electric field in parallel, the display electrode, from the video signal line via the switching element turned on by the supply of the scanning signal to the scanning signal line. In the method of manufacturing a liquid crystal display device in which a video signal is supplied and the reference signal is supplied from a reference signal line, the reference electrode is disconnected if a part of the reference signal line is disconnected. A method for manufacturing a liquid crystal display element, characterized in that a conductive material is used to form a film to connect each reference signal line. 9. A display electrode and a reference electrode are formed in each pixel region of one transparent substrate of the transparent substrates arranged to face each other with a liquid crystal layer interposed therebetween, and the transparent substrate is provided between these electrodes. In order to modulate the light passing through the liquid crystal layer by generating an electric field in parallel, the display electrode, from the video signal line via the switching element turned on by the supply of the scanning signal to the scanning signal line. Along with the supply of a video signal, the reference electrode is a liquid crystal display element manufacturing method in which a reference signal from a reference signal line is supplied, in the case where a part of the reference electrode or the display electrode is broken, A method for manufacturing a liquid crystal display element, characterized in that a conductive material is used to form a film to connect with a broken electrode. 10. The liquid crystal display element according to claim 8, wherein the film formation using the conductive material is performed by an optical CVD method in which a laser beam is irradiated through an atmosphere containing the conductive material. Manufacturing method.