JPH0957009A - Degassing device - Google Patents

Degassing device

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Publication number
JPH0957009A
JPH0957009A JP24666995A JP24666995A JPH0957009A JP H0957009 A JPH0957009 A JP H0957009A JP 24666995 A JP24666995 A JP 24666995A JP 24666995 A JP24666995 A JP 24666995A JP H0957009 A JPH0957009 A JP H0957009A
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Japan
Prior art keywords
gas permeable
vacuum chamber
connecting member
degassing
member
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JP24666995A
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JP3521368B2 (en
Inventor
Kenzo Okada
Hajime Otani
肇 大谷
健三 岡田
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Nitto Denko Corp
日東電工株式会社
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Priority to JP24666995A priority Critical patent/JP3521368B2/en
Publication of JPH0957009A publication Critical patent/JPH0957009A/en
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Publication of JP3521368B2 publication Critical patent/JP3521368B2/en
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Abstract

PROBLEM TO BE SOLVED: To prevent metal ions from being eluted into a liquid to be treated by arranging a deaeration element which gas permeable tubes made of a fluororesin are tied into a bundle to form in a vacuum chamber and connecting both the ends of the deaeration element to the start ends of connecting members fixed to the vacuum chamber through joining members. SOLUTION: In a deaerator 1, a deaeration element 3 is arranged in a vacuum chamber 2, and the ends of the deaeration element 2 are fixed to the vacuum chamber 2 by connecting members 4. The deaeration element 3 consists of a gas permeable tube made of fluororesin or a gas permeable tube bundle 23 which two or more gas permeable tubes are tied into a bundle to form and joining parts 21 made of fluororesin provided on both the ends of the gas permeable tube or the gas permeable tube bundle 23. The connecting members 4 are fixed to the vacuum chamber 2 through fixing means 10, and the joining members 21 are fitted in start ends 7 of the connecting members 4, which are fixed by the fixing means 14 through ferrules 13.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】この発明は液体中の溶存ガスを除去する脱気作業において、脱気処理中に金属イオンを溶出させることのない脱気装置に関するものである。 TECHNICAL FIELD OF THE INVENTION This invention is in the degassing operation for removing dissolved gases in the liquid, to degasser without eluting the metal ion in the degassing process.

【0002】 [0002]

【従来の技術】液体クロマトグラフィー等各種分析機器において、高感度の検出器が創出されてくるに従って、 BACKGROUND OF THE INVENTION Liquid chromatography and various analytical instruments, according to the high sensitivity of the detector coming been created,
分析用試薬も高純度のものが要求されている。 The reagent also has a high purity is required. このような高純度の薬品に空気などが溶解すると、変色や劣化、 When such air is dissolved in such high purity chemicals, discoloration and degradation,
或いは不純物の増加等が生じ、精度の高い分析結果が得られないことがある。 Alternatively resulting increase in impurities, may not accurate analytical results. 一般にこのような高純度の薬品は純度を上げるために様々な工程を経て製造されるが、特に金属イオンの混入を避ける必要がある薬品を製造する工程では、耐熱性及び耐溶剤性等に優れたフッ素樹脂製の装置を用いることにより金属イオン等の混入を防止している。 In general, such the high purity chemicals are manufactured through various steps in order to increase the purity, in a step particular to produce chemicals that need to avoid contamination of the metal ions, excellent in heat resistance and solvent resistance, etc. thereby preventing contamination of the metal ions and the like by using a fluororesin apparatus.

【0003】また液体中に溶解している空気等の溶存ガスを脱気する脱気方法としては、液体中のガスを選択的に透過する分離膜を用いた脱気装置が使用されている。 [0003] As degassing method for degassing a dissolved gas such as air dissolved in the liquid, deaeration apparatus using a separation membrane which selectively permeates gas in the liquid is used.
このような脱気装置に使用される脱気エレメントとしては、例えば図6に示すような長尺の合成樹脂製の気体透過性チューブ(34)を多数本束ねた気体透過性チューブ束(35)と、この気体透過性チューブ束(35)の端部に嵌合、接着された筒状のポリテトラフルオロエチレン製の嵌合片(36)とから構成されるものが例示できる。 As such a degassing element for use in degassing device, e.g., a gas permeable tube bundle made of synthetic resin gas permeable tubes (34) have large number bundled long as shown in FIG. 6 (35) When fitting to the ends of the gas permeable tube bundle (35), those which are constituted from the glued tubular polytetrafluoroethylene fitting pieces (36) can be exemplified. このような脱気エレメント(33)は、図7に示すように真空ポンプ(45)と接続された真空チャンバー(32)内部に配設される。 Such degassing element (33), a vacuum chamber (32) which is connected to a vacuum pump (45) as shown in FIG. 7 are arranged therein. この真空チャンバー(3 The vacuum chamber (3
2)内が減圧されているから、気体透過性チューブ(3 Since 2) the is depressurized, the gas permeable tubes (3
4)の中に脱気すべき液体を通過させると、この気体透過性チューブ(34)の壁から液体中の溶存ガスが系内に脱気して除去される、という構造であり分析用試薬の処理以外にも各種産業分野に利用されつつある。 4) passing the liquid to be degassed into the dissolved gas is removed by degassing in the system, that the structure at and analytical reagents in the liquid from the walls of the gas permeable tubes (34) in addition to the processing it is also being used in various industrial fields.

【0004】従来は脱気エレメント(33)を真空チャンバー(32)内に取り付けるには、例えば図8及び図9に示すように金属製の接続部材(37)を介して取り付けられていた。 [0004] Conventionally, attachment of the degassing element (33) in a vacuum chamber (32) in, for example, was attached via a metal connecting member (37) as shown in FIGS. この接続部材(37)は、外端部に送液パイプが接続されるパイプコネクター部(40)が形成され、且つ内端部の内壁には脱気エレメント(33) The connecting member (37) a pipe connector part liquid transfer pipe is connected (40) is formed on the outer end, and the inner wall of the inner end portion degassing element (33)
の嵌合片(36)を嵌着させる嵌着部(39)が成形されており、かつ略中央部にフランジ部(41)及びナット(43)を螺合させるためのネジ部(42)が形成されていた。 Fitting portion for fitting the fitting piece (36) of (39) is formed, and a flange portion in a substantially central portion (41) and the threaded portion for screwing the nut (43) (42) It was formed. この接続部材(37)の嵌着部(39)に脱気エレメント(33)の嵌合片(36)を嵌入させ、これをナット(43)で固定して、真空チャンバー(3 It is fitted a fitting piece (36) of the degassing element in the loading section (39) of the connecting member (37) (33), which was fixed with a nut (43), a vacuum chamber (3
2)内に配置していた。 2) it had been placed in the.

【0005】 [0005]

【発明が解決しようとする課題】ところが、前記の接続部材(37)の材質として金属が用いられているため、 [SUMMARY OF THE INVENTION However, since the metal is used as the material of the connecting member (37),
処理液中に金属イオンが溶出してしまうことが多々あり、純度の高い試薬等の処理には適さないという課題が存在した。 Plentifully that metal ions will eluted into a processing solution, a problem that is not suitable for processing such high purity reagent was present. この発明の解決課題は、溶液中の溶存ガスを脱気する脱気装置において、その処理液中に金属イオンを溶出させたり錆を生じさせることがない脱気装置を提供することにある。 Solving problems of the present invention is a deaerator for deaerating the dissolved gas in the solution is to provide a degassing device is not to cause rust or eluted metal ions in the process solution.

【0006】 [0006]

【課題を解決するための手段】この発明は、1本のフッ素樹脂製の気体透過性チューブの両端部、または2本以上のフッ素樹脂製の気体透過性チューブを束ねた気体透過性チューブ束の両端部、に非金属製の接合部材を設けた脱気エレメントが真空チャンバー内に配置された脱気装置であって、この脱気エレメントはその両端の接合部材を介して真空チャンバーに固定されている接合部材の始端部に連通連結され、この接続部材はフッ素樹脂製とされるとともに、接続部材の略中央部は真空チャンバーと接続されており且つ終端部は送液用のパイプと連通連結可能であることを特徴とする脱気装置、及び前記接続部材の略中央部の終端部側に固定ネジ部を有し且つ始端部側に気密手段の挿入空間を有するとともにこの空間に気密手段を介在さ SUMMARY OF THE INVENTION The present invention is one made of fluororesin gas permeable tube end portions, or gas permeable tube bundle obtained by bundling two or more fluororesin gas permeable tubes both end portions, degassing element having a non-metallic joining member is a deaerator placed in a vacuum chamber, this degassing element is fixed to the vacuum chamber via a joint member at both ends is communicatively connected to the starting end of the joint member are, together with the connecting member is made of fluorine resin, a substantially central portion of the connecting member is a pipe communicated with connectable for transmission is and end portion is connected to the vacuum chamber the liquid interposing an airtight unit in this space and having an insertion space of the deaerator, and airtight means and the start end side has a fixing screw portion to the end portion side of the substantially central portion of said connecting member, characterized in that it is 、前記固定ネジ部の外周に螺合する固定手段が設けられていることを特徴とする請求項1に記載の脱気装置、及び前記接続部材の始端部の外面に脱気エレメント固定ネジ部を有し、内面にフェルール受け部を有し、脱気エレメントはフェルールを介して脱気エレメント固定手段により固定されることを特徴とする請求項1又は請求項2に記載の脱気装置、及び気体透過性チューブの両端部外面と接合部材の内面とに熱融着性フッ素樹脂粉末が面状に介在され、気体透過性チューブは両端部を揃えられて束ねられその両端が接合部材に嵌入されているとともに気体透過性チューブの端部と接合部材が加熱加圧手段により接合一体化されてなることを特徴とする請求項1乃至請求項3に記載の脱気装置、及び真空チャンバーの接続口と接続部材 Degassing device according to claim 1, characterized in that fixing means screwed on the outer periphery of the fixing screw portion is provided, and a degassing element fixing screw portion on an outer surface of the starting end of said connecting member a, has a ferrule receiving portion on the inner surface, degassing device according to claim 1 or claim 2 degassing element is characterized in that it is fixed by degassing element fixing means through the ferrule, and a gas heat-fusible fluororesin powder is interposed planar across external surface of the transparent tube and the inner surface of the joint member, the gas permeable tube whose both ends are bundled and aligned at both ends is fitted to the joint member a degasser, and vacuum chamber of the connection port of claim 1 to claim 3 ends and the joining member of the gas permeable tubes is characterized by comprising integrally joined by heating and pressing means with am the connecting member 略中央部は回転防止手段を2箇所以上有することを特徴とする請求項1乃至請求項4に記載の脱気装置、及び接続部材の終端部の内面にメネジ部を有し且つこの外面にカバーを設けたことを特徴とする請求項1乃至請求項5に記載の脱気装置である。 Substantially central portion degassing device according to claim 1 to claim 4, characterized in that it has a rotation prevention means two or more positions, and and a cover to the outer surface has a female screw portion on the inner surface of the end portion of the connecting member We were provided a degassing apparatus according to claims 1 to 5, characterized in.

【0007】 [0007]

【発明の実施の形態】以下にこの発明に係る脱気装置を、図面に基づいて説明する。 The deaerator according to the present invention in the following DETAILED DESCRIPTION OF THE INVENTION will be described with reference to the drawings. 図1はこの発明に係る脱気装置の一実施例を示す断面図であり、図2はこの発明に係る脱気装置の一実施例における脱気エレメントと真空チャンバーの接合部分を示す部分拡大断面図であり、 Figure 1 is a sectional view showing an embodiment of a degassing device according to the present invention, FIG. 2 is a partially enlarged cross section showing a joint portion of the degassing element and the vacuum chamber in an embodiment of the degassing device according to the present invention It is a view,
図3はこの発明に係る脱気装置の一実施例を接続部材の終端部側からみた平面図であり、図4はこの発明に係る脱気装置の接続部材の一例を示す断面図であり、図5はこの発明で使用する脱気エレメントの一例を示す模式図である。 Figure 3 is a plan view of the embodiment from the terminal end side of the connecting member of the deaerator according to the present invention, FIG. 4 is a sectional view showing an example of a connection member of the deaerator according to the present invention, Figure 5 is a schematic diagram showing an example of a degassing element used in this invention. 図において、(1)は脱気装置、(2)は脱気装置(1)の真空チャンバー、(3)は脱気エレメントである。 In the figure, (1) it is degasser, (2) the vacuum chamber of the degassing device (1), (3) is a degassing element. (4)は脱気エレメント(3)と真空チャンバー(2)を接続する接続部材である。 (4) is a connecting member for connecting the degassing element (3) of the vacuum chamber (2). (5)は接続部材(4)の終端部、(6)は略中央部、(7)は始端部である。 (5) the end portion of the connecting member (4), (6) a substantially central portion (7) is beginning. (8)は略中央部(6)の固定ネジ部、(9)はフランジ、(10)は接続部材(4)の固定手段である。 (8) fixed screw portion of the substantially central portion (6), (9) the flange (10) is a fixing means of the connecting member (4). (11)は始端部(7)の脱気エレメント固定ネジ部、(12)はフェルール受け部、(13)はフェルール、(14)は脱気エレメント固定手段である。 (11) is degassed element fixing screw portion of the starting end (7), (12) the ferrule receiving portion (13) is a ferrule (14) is a degassing element fixing means. (1 (1
5)は終端部(5)のメネジ部、(16)はカバーである。 5) the female screw portion of the terminal portion (5), (16) is covered. (18)は気密手段、(17)は気密手段(18) (18) airtight means, (17) gas-tight means (18)
の挿入空間である。 Which is the insertion space. (19)は真空チャンバーの接続口、(20)は接続口(19)の回転防止手段である。 (19) is a vacuum chamber connection port (20) is a rotation prevention means connecting port (19).
(22)は脱気エレメント(3)に使用される気体透過性チューブ、(23)は気体透過性チューブ(22)が集まった気体透過性チューブ束である。 (22) a gas permeable tubes (23) for use in degassing element (3) is a gas-permeable tube bundle gathered gas permeable tubes (22). (21)は気体透過性チューブ束(23)の端部に嵌合された接合部材である。 (21) is a bonding member fitted in the end portion of the gas permeable tube bundle (23). (24)は真空チャンバー(2)の減圧手段との接続部である。 (24) is a connecting portion between the pressure reducing means of the vacuum chamber (2).

【0008】脱気装置(1)は真空チャンバー(2)の内部に脱気エレメント(3)を配置し、かつ脱気エレメント(3)の端部を接続部材(4)で真空チャンバー(2)に固定することによって形成される。 [0008] deaerator (1) vacuum chamber (2) inside the degassing element (3) arranged, and the end connection member of the degassing element (3) (4) in a vacuum chamber (2) It is formed by fixing the. 接続部材(4)は、終端部(5)、略中央部(6)、始端部(7)を有している。 Connecting member (4) is, terminal portion (5), a substantially central portion (6) has a starting end (7). この例において真空チャンバー(2)は金属製であり、接続部材(4)はフッ素樹脂製である。 Vacuum chamber (2) in this example is made of metal, the connecting member (4) is made of fluororesin. 脱気エレメント(3)は気体透過性チューブ束(23)の端部に接合部材(21)を嵌合して形成されている。 Degassing element (3) is formed by fitting the joint member (21) to the ends of the gas permeable tube bundle (23). 接続部材(4)の略中央部(6)の終端部(5)側には固定ネジ部(8)が設けられ、始端部(7)側にはフランジ(9)が設けられ、この接続部材(4)は真空チャンバー(2)に固定手段(10)を介して固定されている。 Substantially central portion terminating unit (6) (5) side fixing screw portion (8) is provided in the flange (9) is provided in the starting end portion (7) side, the connecting member of the connecting member (4) (4) it is fixed via a fixing means (10) in a vacuum chamber (2). また挿入空間(17)には気密手段(18)としてOリングが設けられている。 The O-ring is provided as the airtight means (18) into the insertion space (17). 始端部(7)には、脱気エレメント(3)の接合部材(21) Beginning (7), the joining member of degassing element (3) (21)
を差し込み、フェルール(13)を介して脱気エレメント固定手段(14)によりしめ込んで固定している。 The insertion, is fixed by tightening the degassing element fixing means via a ferrule (13) (14). 接続部材(4)の終端部(5)の内面にはメネジ部が設けられており、外面にはカバー(16)が設けられている。 The inner surface of the end portion of the connecting member (4) (5) is provided with internal thread portion, the outer surface is provided cover (16). 真空チャンバー(2)の接続口と、接続部材(4) A connection port of the vacuum chamber (2), connecting members (4)
の略中央部(6)の断面形状は同一であり、回転防止手段(20)が2箇所に設けられている。 Cross-sectional shape of the substantially central portion (6) of the same anti-rotation means (20) are provided in two places.

【0009】この発明で使用される脱気エレメント(3)は、1本のフッ素樹脂製の気体透過性チューブ(22)または2本以上のフッ素樹脂製の気体透過性チューブ(22)を束ねてなる気体透過性チューブ束(2 [0009] degassing element (3) used in this invention, by bundling one fluororesin gas permeable tubes (22) or two or more fluororesin gas permeable tubes (22) comprising a gas permeable tube bundle (2
3)と、気体透過性チューブ(22)または気体透過性チューブ束(23)の両端部に設けられたフッ素樹脂製の接合部材(21)からなる。 And 3) a fluorine resin bonding member provided at both ends of the gas permeable tubes (22) or gas permeable tube bundle (23) (21). この発明で使用する気体透過性チューブ(22)及び接合部材(21)の材質の具体例としては、ポリテトラフルオロエチレン(PTF Specific examples of the material of the gas permeable tubes to be used (22) and the joining member (21) in the present invention, polytetrafluoroethylene (PTF
E)、テトラフルオロエチレン−パ−フルオロアルキルビニルエーテル共重合体(PFA)、テトラフルオロエチレン−ヘキサフルオロプロピレン共重合体(FE E), tetrafluoroethylene - Pa - perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene - hexafluoropropylene copolymer (FE
P)、エチレン−テトラフルオロエチレン共重合体(E P), ethylene - tetrafluoroethylene copolymer (E
TFE)、ポリクロロトリフルオロエチレン(PCTF TFE), polychlorotrifluoroethylene (PCTF
E)等が例示できるが、この発明においてはこれらに限定されない。 Although E) or the like can be exemplified, without limitation in the present invention. さらに、この発明においてフッ素樹脂製気体透過性チューブ(22)の本数、及び長さは特に限定されず、使用目的に応じて適宜選択することができる。 Furthermore, the number of fluororesin gas permeable tubes in the present invention (22), and is not particularly limited in length, it may be appropriately selected depending on the intended use.
接合部材(21)の長さも特に限定されない。 The length of the joining member (21) is not particularly limited.

【0010】この発明においては、気体透過性チューブ(22)を束ねて気体透過性チューブ束(23)とする際、気体透過性チューブ(22)の両端部に熱融着性を有するフッ素樹脂粉末を介在させて融着させ接合一体化するのが好ましい。 [0010] In the present invention, when a bundle of gas permeable tubes (22) and a gas permeable tube bundle (23), a fluororesin powder having a heat fusible at both ends of the gas permeable tubes (22) preferably integrally bonded fused with intervening. ここで熱融着性を有するフッ素樹脂としては、FEP、PTFE、PFA、ETFE等の粉末が好適に使用できるが、これらに限定されない。 Here, as the fluorine resin having a heat fusible, FEP, PTFE, PFA, although powder ETFE or the like can be suitably used, without limitation. 前記気体透過性チューブ束(23)を一体化する際、金属線、金属棒等の耐圧芯材を挿入したり、あるいは端部に金型を外挿してもよい。 When integrating the gas permeable tube bundle (23), metal wire, insert breakdown voltage core material such as a metal rod, or a mold end portion may be extrapolated. 気体透過性チューブ(22)の変形が防止できる。 Deformation of the gas permeable tubes (22) can be prevented. また気体透過性チューブ束(23) The gas-permeable tube bundle (23)
を接合部材(21)に挿入する際にも、気体透過性チューブ束(23)の端部と接合部材(21)は熱融着性を有するフッ素樹脂粉末を介在させて融着することより接合一体化されると好ましい。 Even when inserting into the joint member (21), the ends and the joint member of a gas permeable tube bundle (23) (21) is joined than that fused with intervening fluororesin powder having a thermally fusible preferably it is integrated. また気体透過性チューブ(22)の本数にかかわらずフッ素樹脂粉末を介在した融着により接合部材(21)と接合一体化されるのが好ましい。 Also preferably it is integrally joined with the joining member (21) by fusion interposed fluororesin powder regardless of the number of gas permeable tubes (22). このように熱融着性を有するフッ素樹脂粉末を用いて融着することにより、接続部材(4)への挿入が容易になるとともに、この挿入を気体透過性チューブ(22)同士、または気体透過性チューブ束(23)と接合部材(21)のズレを起こすことなく正確に行うことができる。 By fusing this way using a fluorine resin powder having a heat fusible, the insertion of the connecting member (4) is facilitated, the gas permeable tubes (22) with the insertion between or gas permeable, it can be carried out accurately without causing deviation of the sex tube bundle (23) and the bonding member (21).

【0011】真空チャンバー(2)の材質としては所定の強度を有していれば特に限定されないが、具体的には炭素鋼、ステンレス鋼、鋳鉄、銅、黄銅、アルミニウム等の金属、ポリ塩化ビニル、ポリエチレン、ポリプロピレン、アクリル等の熱可塑性プラスチック、フェノール樹脂、メラミン樹脂、エポキシ樹脂等の熱硬化性プラスチック等を挙げることができる。 [0011] As the material of the vacuum chamber (2) is not particularly limited as long as it has a predetermined strength, particularly carbon steel, stainless steel, cast iron, copper, brass, aluminum or the like metal, polyvinyl chloride , polyethylene, polypropylene, thermoplastic such as acrylic, phenolic resins, melamine resins, thermosetting plastics such as epoxy resin. また真空チャンバー(2)の形状及び大きさも真空ポンプ等の減圧手段と接続可能な減圧経路と、接続部材(4)及び接合部材(2 Also the shape and size also pressure reduction means and connectable to vacuum path such as a vacuum pump in the vacuum chamber (2), connecting members (4) and the joining member (2
1)の端部と気密に接合可能な接続口(19)を有し、 A 1) end and sealingly bondable connection port (19),
且つ脱気エレメント(3)をその内部に収めることが可能な大きさであれば特に限定されない。 It not particularly limited as long as and degassing element (3) that is large enough to fit therein.

【0012】接続部材(4)の材質は所定の強度を有している非金属材料であれば特に限定されないが、具体的にはポリ塩化ビニル、ポリエチレン、ポリプロピレン、 [0012] Although the material of the connecting member (4) is not particularly limited as long as non-metallic material having a predetermined strength, particularly polyvinyl chloride, polyethylene, polypropylene,
アクリル等の熱可塑性プラスチック、フェノール樹脂、 Thermoplastics such as acrylic, phenolic resins,
メラミン樹脂、エポキシ樹脂等の熱硬化性プラスチック等を挙げることができる。 Melamine resins, thermosetting plastics such as epoxy resins and the like. またFEP、PTFE、PF The FEP, PTFE, PF
A、ETFE、PCTFE等のフッ素樹脂がこの発明においては特に好適に使用できる。 A, ETFE, fluorocarbon resin such as PCTFE can be particularly preferably used in this invention. この発明の接続部材(4)は非金属製であるから処理液中に金属イオンが溶出せず、また錆も発生しない。 The connecting member of the invention (4) is not a metal ion is eluted into the treatment liquid from a non-metallic, and also does not rust. その形状も接合部材(2 Its shape joint member (2
1)の端部、真空チャンバー(2)の接続口(19)、 End of the 1), connection port of the vacuum chamber (2) (19),
送液用のパイプとそれぞれ気密に接続可能な形状であれば特に限定されないが、脱気エレメント(3)の端部と気密に接続可能な形状としては接続部材(4)の始端部(7)の外面に脱気エレメント固定ネジ部(11)を有し且つ内面にフェルール受け部(12)を有する形状が例示でき、図4参照、真空チャンバー(2)の接続口(19)と気密に接続可能な形状としては接続部材(4)の略中央部(6)の終端部(5)側に固定ネジ部(8)を有し且つ始端部(7)側に気密手段(18)の挿入空間(17)を有する形状が例示でき、図2参照、 Is not particularly limited as long pipe and a shape which can be connected to a respective hermetically for feeding, the shape can be connected to an end and airtightly degassed element (3) starting end of the connecting member (4) (7) the degassing element fixing screw portion on the outer surface (11) can and illustrated shape having a ferrule receiving portion (12) on the inner surface has, see Figure 4, connected to the connection port (19) gas-tight vacuum chamber (2) insertion space of the terminal portion of the substantially central portion (6) (5) hermetically means and beginning (7) side has a fixing screw portion (8) on the side (18) of possible as the shape connecting member (4) (17) can be exemplified shape with, see Figure 2,
送液用のパイプと気密に接続可能な形状としては接続部材(4)の終端部(5)の内面にメネジ部(15)を有している形状が例示できる(図4参照)。 The shape can be connected to the pipe air-tightly for feeding may be exemplified shape having an internal thread portion on the inner surface of the end portion of the connecting member (4) (5) (15) (see FIG. 4). なお接続部材(4)と接合部材(21)の固定方法としては、接着剤を使用する方法、接合部材(21)に凸部を設けてこの凸部を接続部材(4)と係合させる方法、接続部材(4)に脱気エレメント固定ネジ部(11)を設け接合部材(21)にフェルール(13)を嵌め込んでナットにより締め込む方法が例示できるが、接続部材(4)に脱気エレメント固定ネジ部(11)を設け接合部材(2 Note as a fixing method of the connecting member (4) and the joining member (21), a method of using an adhesive, a method of the convex portion provided on the joint member (21) engaged with the convex portion connecting member (4) connecting member (4) is degassed element fixing screw portion (11) is provided a method can be exemplified tightening a nut fitted to the ferrule (13) to the junction member (21), degassed to the connecting member (4) element fixing screw portion (11) provided joint member (2
1)にフェルール(13)を嵌め込んでナットにより締め込む方法が最も好ましい。 How tightened by a nut is most preferably fitted ferrule (13) to 1). この様にすると脱気エレメント(3)は接続部材(4)と強固に接続され、液漏れ等が起きることがない。 Degassing element With this way (3) is rigidly connected to the connecting member (4), never leakage or the like occurs. さらに接続部材(4)と真空チャンバー(2)の固定方法としては、接着剤を使用する方法、熱融着による方法、接続部材(4)の略中央部(6)の終端部(5)側に固定ネジ部(8)を有し且つ始端部(7)側に気密手段(18)の挿入空間(17) Still connecting member (4) and the fixing method of the vacuum chamber (2), a method using an adhesive, the method according to thermal fusion, the terminating portion (5) side of the substantially central portion (6) of the connecting member (4) and beginning (7) hermetically side unit has a fixing screw portion (8) to (18) insertion space (17)
を有するとともにこの空間に気密手段(18)を介在させ固定手段(10)により締めつけて固定する方法が例示できるが、接続部材(4)の略中央部(6)の終端部(5)側に固定ネジ部(8)を有し且つ始端部(7)側に気密手段(18)の挿入空間(17)を有するとともにこの空間に気密手段(18)を介在させ固定手段(1 Although this space hermetically means (18) is interposed a method of fixing can be exemplified by tightening the fixing means (10) and having a, the end portion of the substantially central portion (6) (5) side of the connecting member (4) insertion space (17) this space airtight means (18) is interposed fixing means together with the and beginning a fixing screw portion (8) (7) hermetically side means (18) (1
0)により締めつけて固定する方法が最も好ましい。 Is most preferred method of fixing by tightening by 0). この様にすると真空チャンバー(2)と脱気エレメント(3)が強固に固定される。 With this way a vacuum chamber (2) and degassing element (3) is firmly fixed. またこの固定の際使用できる気密手段(18)としてはパッキン、Oリング等が例示できるが、Oリングが最も好ましい。 The packing as airtight means (18) that can be used during the fixing, but an O-ring or the like can be exemplified, O-ring is most preferred. この様にすると接続部材(4)と真空チャンバー(2)の接続部から真空チャンバー(2)内に空気が入り込むことがない。 Does not enter air into the vacuum chamber (2) in the connection portion between the connecting member in this way (4) and a vacuum chamber (2). また接続部材(4)の略中央部(6)と真空チャンバー(2)の接続口(19)は互いに係合する凹凸状の回転防止手段(20)を2箇所以上設けるのが好ましい。 The connecting member (4) substantially central portion (6) and a vacuum chamber (2) of the connection port (19) that is provided together uneven rotation preventing means for engaging (20) the two or more positions preferred. この様にすると接続部材(4)と真空チャンバー(2)とを固定する際接続部材(4)が空回りせず強固に固定される。 Thus in a connecting member (4) and a vacuum chamber (2) and the connecting member when fixing the (4) it is firmly fixed without idling. さらに、接続部材(4)の終端部(5)はその内面にメネジ部(15)を有しこの外面にカバー(16) Further, the end portion of the connecting member (4) (5) covers this outer surface has a female screw portion (15) on its inner surface (16)
を有すると好ましい。 Preferably with a. この様にするとこの接続部材(4)の終端部(5)は送液用のパイプと連通連結しやすく且つカバー(16)が補強及び緩衝作用を有するのでメネジ部(15)が変形しにくい。 With this manner end portion of the connecting member (4) (5) is internally threaded portion so pipe communicating with connected easily and covers for feeding (16) has a reinforcing and cushioning (15) is hardly deformed.

【0013】 [0013]

【実施例】以下この発明に係る脱気装置の効果を具体的に説明する。 EXAMPLES The following detailed explanation of the effect of the degassing device according to the present invention. 内径0.5mm、外径0.8mm、長さ2 Inner diameter 0.5 mm, outer diameter 0.8 mm, length 2
8cmのPTFE気体透過性チューブを150本結束して得られた気体透過性チューブ束の両端部に金型を外挿すると共に、各気体透過性チューブの端部外周面上にP P mold at both ends of the gas permeable tube bundle obtained was 8 cm PTFE gas-permeable tubes by bundling 150 present with extrapolating on the end outer peripheral surface of each gas permeable tube
FA粉末を塗布して370℃で10分間加熱加圧し、気体透過性チューブ相互を融着一体化することにより、断面円形の気体透過性チューブ束を得た。 FA powder coating to 10 minutes of heat and pressure at 370 ° C., by fusing integrated gas permeable tubes mutually to obtain a gas permeable tube bundle of circular cross-section. この気体透過性チューブ束の端部に、熱収縮性を有する円筒状のフッ素樹脂製の接合部材の内部にPFA粉末を塗布したものを嵌合し、気体透過性チューブ束と接合部材を融着一体化して有効長さ20cmの脱気エレメントを得た。 The end of the gas permeable tube bundle, fitted one coated with PFA powder inside a cylindrical fluororesin joining member having a heat shrinkability, fusion gas permeable tube bundle and the joint member to obtain a degassing element of the effective length of 20cm and integrated. この脱気エレメントの接合部材の一部を図4に示すような接続部材にフェルールを介して脱気エレメント固定手段(ナット)で固定し、接続部材を金属製の固定手段(ナット)で真空チャンバーに固定した。 The part of the bonding member of the degassing element through the ferrule to the connecting member shown in FIG. 4 and fixed with degassing element fixing means (nuts), a vacuum chamber a connecting member with a metal fixing means (nuts) It was fixed to. さらに、終端部の外面にカバーを取りつけて脱気装置とした。 Furthermore, the deaerator is attached to cover the outer surface of the terminal portion. この脱気装置を使用して水を脱気処理したところ、水は良好に脱気処理され且つ金属イオンの溶出はなかった。 Was deaerated water with this deaerator, water was not eluted good degassed treated and metal ions.

【0014】 [0014]

【発明の効果】この発明は、1本のフッ素樹脂製の気体透過性チューブの両端部、または2本以上のフッ素樹脂製の気体透過性チューブを束ねた気体透過性チューブ束の両端部、に非金属製の接合部材を設けた脱気エレメントが真空チャンバー内に配置された脱気装置であって、 Effects of the Invention The present invention, both end portions of one of the fluorine resin of the gas permeable tubes, or both ends of the gas permeable tube bundle obtained by bundling two or more fluororesin gas permeable tube, the degassing element having a non-metallic joining member is a deaerator placed in a vacuum chamber,
この脱気エレメントはその両端の接合部材を介して真空チャンバーに固定されている接合部材の始端部に連通連結され、この接続部材はフッ素樹脂製とされるとともに、接続部材の略中央部は真空チャンバーと接続されており且つ終端部は送液用のパイプと連通連結可能であることを特徴とする脱気装置、及び前記接続部材の略中央部の終端部側に固定ネジ部を有し且つ始端部側に気密手段の挿入空間を有するとともにこの空間に気密手段を介在させ、前記固定ネジ部の外周に螺合する固定手段が設けられていることを特徴とする請求項1に記載の脱気装置、及び前記接続部材の始端部の外面に脱気エレメント固定ネジ部を有し、内面にフェルール受け部を有し、脱気エレメントはフェルールを介して脱気エレメント固定手段により固定され The degassing element communicating is connected to the starting end of the joining member which is fixed to the vacuum chamber via a joint member at both ends, together with the connecting member is made of fluorine resin, a substantially central portion of the connecting member vacuo degassing device, characterized in that the and the terminal end is connected to the chamber is connectable pipe and communicating for the liquid feed, and and has a fixing screw portion to the end portion side of the substantially central portion of said connecting member the airtight means is interposed in the space and having an insertion space of the airtight unit in the starting end side, de-according to claim 1, characterized in that the fixing means screwed on the outer periphery of the fixing screw portion is provided degasifier, and has a degassing element fixing screw portion on an outer surface of the starting end of the connecting member has a ferrule receiving portion on the inner surface, degassing element is fixed by degassing element fixing means through the ferrule ことを特徴とする請求項1又は請求項2に記載の脱気装置、及び気体透過性チューブの両端部外面と接合部材の内面とに熱融着性フッ素樹脂粉末が面状に介在され、気体透過性チューブは両端部を揃えられて束ねられその両端が接合部材に嵌入されているとともに気体透過性チューブの端部と接合部材が加熱加圧手段により接合一体化されてなることを特徴とする請求項1乃至請求項3に記載の脱気装置、及び真空チャンバーの接続口と接続部材の略中央部は回転防止手段を2箇所以上有することを特徴とする請求項1乃至請求項4に記載の脱気装置、及び接続部材の送液用のパイプ側の接続部の内面にメネジ部を有し且つこの外面にカバーを設けたことを特徴とする請求項1乃至請求項5に記載の脱気装置であるから以下のような効果を Degassing device according to claim 1 or claim 2, characterized in that, and heat-fusible fluororesin powder is interposed surface to the inner surface of both end portions the outer surface and the bonding member of the gas permeable tubes, gas permeable tubes is characterized by comprising the joining member and the ends of the gas permeable tubes together its two ends are bundled and aligned at both ends is fitted to the joint member are joined together by heating and pressing means degassing apparatus according to claims 1 to 3, and a substantially central portion of the connection port and the connection member of the vacuum chamber according to claims 1 to 4, characterized in that it has a rotation prevention means two or more locations disengagement of the deaerator, and and has a female screw portion on the inner surface of the pipe-side connection for liquid delivery of the connecting member according to claim 1 to claim 5, characterized in that a cover on the outer surface the following effects because it is exhaust device する。 To.

【0015】請求項1記載の発明は、この発明の接続部材は非金属製であるから、処理液中に金属イオンが溶出せず、また錆が発生することもないという効果を奏する。 [0015] The invention of claim 1, wherein the connecting member of the present invention because it is non-metallic, no metal ions are eluted into the treatment liquid, also an effect that is not generated rust. 請求項2記載の発明は、この発明の接続部材の略中央部は終端部側に固定ネジ部を有しているため、この固定ネジ部と嵌合するメネジ部を有する接続部材の固定手段をこの固定ネジ部に嵌合することにより、真空チャンバーと接続部材は強固に固定されるという効果を奏する。 According to a second aspect of the invention, since it has a substantially central portion fixing screw portion to the end portion side of the connecting member of the present invention, the fixing means of the connecting member having a female screw portion to be fitted with the fixing screw portion by fitting to the fixing screw portion, an effect that the connecting member is firmly fixed to the vacuum chamber. また、この発明の接続部材の略中央部の始端部側に気密手段の挿入空間を有するとともにこの空間に気密手段を介在させ前記固定ネジ部の外周に螺合する固定手段が設けられているため、接続部材と略中央部の間から真空チャンバー内に外気が侵入することがないという効果を奏する。 Further, since the fixing means is provided to be screwed to the outer periphery of the fixing screw portion an airtight means is interposed in the space and having an insertion space of the airtight unit in the starting end side of the substantially central portion of the connecting member of the present invention an effect that ambient air from between the connecting member and the substantially central portion in the vacuum chamber is prevented from entering. 請求項3記載の発明は、この発明の接続部材の始端部の外面に脱気エレメント固定ネジ部を有し、内面にフェルール受け部を有しているため、この発明の脱気エレメントは接続部材と強固に接続され、液もれ等を起こすことがないという効果を奏する。 The invention according to claim 3, comprising a degassing element fixing screw portion on an outer surface of the starting end of the connecting member of the present invention, since it has a ferrule receiving portion on the inner surface, degassing element of the present invention connecting member and it is rigidly connected, an effect that does not cause liquid leakage and the like. 請求項4記載の発明は、気体透過性チューブと接合部材とは熱融着性フッ素樹脂粉末を介して接合一体化されているので接続部材に脱気エレメントを挿入する作業が容易になり、しかもこれらの挿入の際気体透過性チューブと接合部材がズレを起こすことがないという効果を奏する。 Fourth aspect of the present invention, since they are integrally joined becomes easy operation of inserting the degassing element to the connecting member via the heat-fusible fluororesin powder is a gas-permeable tube and the joining member, moreover gas permeable tubes and the joining member when these inserts are an effect that does not cause deviation. 請求項5記載の発明は、この発明の接続部材の略中央部と真空チャンバーの接続口は互いに係合する凹凸状の回転防止手段を2箇所以上有するため、接続部材と真空チャンバーとを固定する際接続部材が空回りせず強固に固定されるという効果を奏する。 According to a fifth aspect of the invention, an uneven rotation preventing means for engaging each other substantially central portion and the vacuum chamber of the connection port of the connection member of the present invention to have two or more positions, to fix the connecting member and the vacuum chamber an effect that when the connecting member is firmly fixed without idling. 請求項6記載の発明は、この発明の接続部材の終端部はその内面にメネジ部を有するため、 Since the invention of claim 6, wherein the end portion of the connecting member of the invention having an internal thread portion on its inner surface,
送液用のパイプと接続し易い。 Easy connected to the pipe for the liquid feed. またこの外面にカバーを有するため、このカバーにより真空チャンバーの外側に出ている端部は補強あるいは緩衝されメネジ部が変形することが防がれるという効果を奏する。 Since having a cover on the outer surface, an end portion that is outside the vacuum chamber by the cover there is an effect that the internal thread portion is reinforced or buffer is prevented from being deformed.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図 1】この発明に係る脱気装置の一実施例を示す断面図である。 1 is a sectional view showing an embodiment of a degassing device according to the present invention.

【図 2】この発明に係る脱気装置の一実施例における脱気エレメントと真空チャンバーの接合部分を示す部分拡大断面図である。 2 is a partially enlarged sectional view showing a joining portion of the degassing element and the vacuum chamber in an embodiment of the degassing device according to the present invention.

【図 3】この発明に係る脱気装置の一実施例を接続部材の終端部側からみた平面図である。 3 is a plan view of the embodiment from the terminal end side of the connecting member of the deaerator according to the present invention.

【図 4】この発明に係る脱気装置の接続部材の一例を示す断面図である。 4 is a sectional view showing an example of a connection member of the deaerator according to the present invention.

【図 5】この発明で使用する脱気エレメントの一例を示す模式図である。 5 is a schematic diagram showing an example of a degassing element used in this invention.

【図 6】従来の脱気エレメントの一例を示す模式図である。 6 is a schematic diagram showing an example of a conventional deaeration element.

【図 7】従来の脱気エレメントを用いた脱気装置の一例を示す模式図である。 7 is a schematic diagram showing an example of a degassing device using a conventional deaeration element.

【図 8】従来の脱気装置の一例を示す断面図である。 8 is a sectional view showing an example of a conventional deaerator.

【図 9】従来の脱気装置の一例における脱気エレメントと真空チャンバーの接合部分を示す部分拡大断面図である。 9 is a partial enlarged sectional view showing a joining portion of the degassing element and the vacuum chamber in an example of a conventional deaerator.

【符号の説明】 DESCRIPTION OF SYMBOLS

1・・・・脱気装置 2・・・・真空チャンバー 3・・・・脱気エレメント 4・・・・接続部材 5・・・・終端部 6・・・・略中央部 7・・・・始端部 8・・・・固定ネジ部 10・・・固定手段 11・・・脱気エレメント固定ネジ部 12・・・フェルール受け部 13・・・フェルール 14・・・脱気エレメント固定手段 15・・・メネジ部 16・・・カバー 17・・・挿入空間 18・・・気密手段 19・・・接続口 20・・・回転防止手段 21・・・接合部材 22・・・気体透過性チューブ 23・・・気体透過性チューブ束 1 .... deaerator 2 .... vacuum chamber 3 .... degassing element 4 ... connecting member 5 .... end portion 6 ... substantially central portion 7 ... starting end 8 .... fixing screw portion 10 ... fixing means 11 ... degassing element fixing screw portion 12 ... ferrule receiving portion 13 ... ferrule 14 ... degassing element fixing means 15 .. - internal thread portion 16 ... cover 17 ... insertion space 18 ... airtight means 19 ... connecting port 20 ... anti-rotation units 21 ... bonding member 22 ... gas permeable tubes 23 .. · gas-permeable tube bundle

Claims (6)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 1本のフッ素樹脂製の気体透過性チューブの両端部、または2本以上のフッ素樹脂製の気体透過性チューブを束ねた気体透過性チューブ束の両端部、に非金属製の接合部材を設けた脱気エレメントが真空チャンバー内に配置された脱気装置であって、この脱気エレメントはその両端の接合部材を介して真空チャンバーに固定されている接合部材の始端部に連通連結され、この接続部材はフッ素樹脂製とされるとともに、接続部材の略中央部は真空チャンバーと接続されており且つ終端部は送液用のパイプと連通連結可能であることを特徴とする脱気装置。 1. A one of the ends of the fluorocarbon resin of the gas permeable tubes, or both ends of the gas permeable tube bundle obtained by bundling two or more fluororesin gas permeable tube, the non-metallic degassing element provided with a joining member is a deaerator placed in a vacuum chamber, the degassing element communicating with the starting end of the joining member which is fixed to the vacuum chamber via a joint member at both ends connected, together with the connecting member is made of a fluororesin, wherein the substantially central portion of the connecting member and the end portion is connected to the vacuum chamber is connectable pipe and communicating for feeding liquid removal exhaust device.
  2. 【請求項2】 前記接続部材の略中央部の終端部側に固定ネジ部を有し且つ始端部側に気密手段の挿入空間を有するとともにこの空間に気密手段を介在させ、前記固定ネジ部の外周に螺合する固定手段が設けられていることを特徴とする請求項1に記載の脱気装置。 Wherein interposed airtightness means the space which has an insertion space of the airtight means and start end side has a fixing screw portion to the end portion side of the substantially central portion of said connecting member, said fixing screw portion degassing device according to claim 1, characterized in that fixing means screwed on the outer periphery are provided.
  3. 【請求項3】 前記接続部材の始端部の外面に脱気エレメント固定ネジ部を有し、内面にフェルール受け部を有し、脱気エレメントはフェルールを介して脱気エレメント固定手段により固定されることを特徴とする請求項1 3. A having an outer surface in the degassing element fixing screw portion of the starting end of the connecting member has a ferrule receiving portion on an inner surface is fixed by degassing element fixing means degassing element through the ferrule claim 1, characterized in that
    又は請求項2に記載の脱気装置。 Or deaerator as claimed in claim 2.
  4. 【請求項4】 気体透過性チューブの両端部外面と接合部材の内面とに熱融着性フッ素樹脂粉末が面状に介在され、気体透過性チューブは両端部を揃えられて束ねられその両端が接合部材に嵌入されているとともに気体透過性チューブの端部と接合部材が加熱加圧手段により接合一体化されてなることを特徴とする請求項1乃至請求項3に記載の脱気装置。 4. A heat-fusible fluororesin powder and the inner surface of both end portions the outer surface and the bonding member of the gas permeable tubes is interposed planar, gas-permeable tube whose both ends are bundled and aligned at both ends degassing device according to claim 1 to claim 3 ends and the joining member of the gas permeable tubes together is fitted to the joint member is characterized by comprising integrally joined by heating and pressing means.
  5. 【請求項5】 真空チャンバーの接続口と接続部材の略中央部は回転防止手段を2箇所以上有することを特徴とする請求項1乃至請求項4に記載の脱気装置。 5. A degassing apparatus as claimed in claims 1 to 4 substantially central portion of the vacuum chamber of the connection port and the connection member is characterized by having a rotation preventing means at two or more locations.
  6. 【請求項6】 接続部材の終端部の内面にメネジ部を有し且つこの外面にカバーを設けたことを特徴とする請求項1乃至請求項5に記載の脱気装置。 6. A degassing device according to claim 1 to claim 5, characterized in that a cover and the outer surface has a female screw portion on the inner surface of the end portion of the connecting member.
JP24666995A 1995-08-30 1995-08-30 Degassing device Expired - Lifetime JP3521368B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24666995A JP3521368B2 (en) 1995-08-30 1995-08-30 Degassing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24666995A JP3521368B2 (en) 1995-08-30 1995-08-30 Degassing device

Publications (2)

Publication Number Publication Date
JPH0957009A true JPH0957009A (en) 1997-03-04
JP3521368B2 JP3521368B2 (en) 2004-04-19

Family

ID=17151860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24666995A Expired - Lifetime JP3521368B2 (en) 1995-08-30 1995-08-30 Degassing device

Country Status (1)

Country Link
JP (1) JP3521368B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1852169A2 (en) * 2006-05-01 2007-11-07 Nitto Denko Corporation Degassing apparatus with gas-permeable tubes
JP2007319854A (en) * 2006-05-01 2007-12-13 Nitto Denko Corp Degassing apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1852169A2 (en) * 2006-05-01 2007-11-07 Nitto Denko Corporation Degassing apparatus with gas-permeable tubes
JP2007319854A (en) * 2006-05-01 2007-12-13 Nitto Denko Corp Degassing apparatus
US7708811B2 (en) 2006-05-01 2010-05-04 Nitto Denko Corporation Degassing apparatus
EP1852169A3 (en) * 2006-05-01 2010-06-30 Nitto Denko Corporation Degassing apparatus with gas-permeable tubes
JP2011050964A (en) * 2006-05-01 2011-03-17 Nitto Denko Corp Degassing apparatus
JP2011088146A (en) * 2006-05-01 2011-05-06 Nitto Denko Corp Deaerator

Also Published As

Publication number Publication date
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