JPH0938481A - Inspection window for vacuum chamber - Google Patents

Inspection window for vacuum chamber

Info

Publication number
JPH0938481A
JPH0938481A JP19171195A JP19171195A JPH0938481A JP H0938481 A JPH0938481 A JP H0938481A JP 19171195 A JP19171195 A JP 19171195A JP 19171195 A JP19171195 A JP 19171195A JP H0938481 A JPH0938481 A JP H0938481A
Authority
JP
Japan
Prior art keywords
vacuum chamber
window
inspection window
window material
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19171195A
Other languages
Japanese (ja)
Inventor
Shinji Nakakuma
信治 中隈
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19171195A priority Critical patent/JPH0938481A/en
Publication of JPH0938481A publication Critical patent/JPH0938481A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an inspection window for vacuum chamber capable of attaching not only to a horizontal wall surface but to a vertical wall surface of a vacuum chamber and setting an optional relief pressure. SOLUTION: A plate spring 7, one end of which is attached to a housing case 3 and another end of which is in contact with the upper surface center part of a inspection window glass 2, is interposed between the inspection window glass 2 and a protective cover 5.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、正圧(大気圧以
上)状態と負圧(真空圧)状態を繰り返す真空室の内部
を点検するための真空室用点検窓に関し、特に、真空室
に垂直に取り付けることが可能な真空室用点検窓に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum chamber inspection window for inspecting the inside of a vacuum chamber in which a positive pressure (above atmospheric pressure) state and a negative pressure (vacuum pressure) state are repeated. The present invention relates to a vacuum chamber inspection window that can be installed vertically.

【0002】[0002]

【従来の技術】図9にリリーフ機能を有した従来の真空
室用点検窓WDの断面図を示す。図9において、真空室
1の壁面の開口部H1の周囲にOリング溝OG1が設け
られ、Oリング溝OG1内に真空シールのためのOリン
グOR1がはめ込まれている。そして、OリングOR1
の上部には開口部H1を覆うように点検窓ガラス2が載
置され、点検窓ガラス2の周囲には点検窓ガラス2を収
容する収容ケース3が設けられている。
2. Description of the Related Art FIG. 9 shows a sectional view of a conventional vacuum chamber inspection window WD having a relief function. In FIG. 9, an O-ring groove OG1 is provided around the opening H1 on the wall surface of the vacuum chamber 1, and an O-ring OR1 for vacuum sealing is fitted in the O-ring groove OG1. And O-ring OR1
An inspection window glass 2 is placed on the upper part of the so as to cover the opening H1, and a housing case 3 for housing the inspection window glass 2 is provided around the inspection window glass 2.

【0003】収容ケース3には真空室1内部が負圧状態
から正圧状態に移行する際に、真空室1内部の圧力を大
気圧に保つためのリリーフポート4を有している。ま
た、収容ケース3の上部には、真空室1内部が負圧状態
から正圧状態に移行する際に、点検窓ガラス2が飛び出
すのを防ぐための樹脂性(透明)の保護カバー5が一定
の隙間を保って配置され、保護カバー5の上には保護カ
バー5を固定するための安全板6が設けられている。な
お、収容ケース3は図示しないボルトによって真空室1
の壁面に固定され、安全板6は図示しないボルトによっ
て収容ケース3に固定されている。
The accommodating case 3 has a relief port 4 for keeping the pressure inside the vacuum chamber 1 at atmospheric pressure when the inside of the vacuum chamber 1 shifts from a negative pressure state to a positive pressure state. Further, a resin (transparent) protective cover 5 for preventing the inspection window glass 2 from popping out when the inside of the vacuum chamber 1 shifts from a negative pressure state to a positive pressure state is fixed on the upper portion of the housing case 3. A safety plate 6 for fixing the protective cover 5 is provided on the protective cover 5 with a gap therebetween. The housing case 3 is attached to the vacuum chamber 1 by a bolt (not shown).
The safety plate 6 is fixed to the housing case 3 by a bolt (not shown).

【0004】従来の真空室用点検窓WDの動作について
説明する。真空室1内部に加圧用ガスを導入して真空室
1内部を負圧状態から正圧状態にする際に、真空室1内
部の圧力が大気圧を越えると、点検窓ガラス2には図9
に示す矢印Aの方向に力が加わることになる。従って、
点検窓ガラス2は矢印Bの方向に持上げられ、加圧用ガ
スは点検窓ガラス2と真空室1の壁面との間に生じた隙
間からリリーフポート4に抜けるため、真空室1内部の
圧力が必要以上に高まることが防止される。
The operation of the conventional vacuum chamber inspection window WD will be described. When the pressure in the vacuum chamber 1 exceeds the atmospheric pressure when introducing the pressurizing gas into the vacuum chamber 1 to change the inside of the vacuum chamber 1 from the negative pressure state to the positive pressure state, the inspection window glass 2 will be shown in FIG.
A force is applied in the direction of arrow A shown in. Therefore,
The inspection window glass 2 is lifted in the direction of the arrow B, and the pressurizing gas escapes into the relief port 4 through the gap created between the inspection window glass 2 and the wall surface of the vacuum chamber 1, so the pressure inside the vacuum chamber 1 is required. It is prevented from increasing above.

【0005】[0005]

【発明が解決しようとする課題】以上説明したようにリ
リーフ機能を有した従来の真空室用点検窓WDは、点検
窓ガラス2が自重のみによってOリングOR1を押し付
ける構成となっており、真空室1が正圧状態から負圧状
態に移行する際、すなわち真空引きの際には点検窓ガラ
ス2が自重でOリングOR1を押し付けるように真空室
用点検窓WDを水平に配置する必要があった。また、矢
印Aの方向に加わる力が自重によってOリングOR1を
押し付ける力よりも大きくなった場合に点検窓ガラス2
が持ち上がり真空室1内部の圧力をリリーフしていた。
In the conventional vacuum chamber inspection window WD having the relief function as described above, the inspection window glass 2 presses the O-ring OR1 only by its own weight. When 1 shifts from the positive pressure state to the negative pressure state, that is, when vacuuming, it is necessary to horizontally arrange the vacuum chamber inspection window WD so that the inspection window glass 2 presses the O-ring OR1 by its own weight. . Further, when the force applied in the direction of the arrow A becomes larger than the force pressing the O-ring OR1 by its own weight, the inspection window glass 2
Lifted up to relieve the pressure inside the vacuum chamber 1.

【0006】従って、従来の真空室用点検窓WDは真空
室1の水平壁面にしか適用できず、またリリーフ圧が点
検窓ガラス2の自重で規定され、リリーフ圧を調節でき
ないという問題点があった。
Therefore, the conventional inspection window WD for a vacuum chamber can be applied only to the horizontal wall surface of the vacuum chamber 1, and the relief pressure is regulated by the weight of the inspection window glass 2 so that the relief pressure cannot be adjusted. It was

【0007】本発明は上記のような問題点を解消するた
めになされたもので、真空室の水平壁面に限らず垂直壁
面にも取付け可能で、任意のリリーフ圧を設定すること
が可能な真空室用点検窓を提供する。
The present invention has been made in order to solve the above problems, and is not limited to a horizontal wall surface of a vacuum chamber but can be attached to a vertical wall surface, and a vacuum which can set an arbitrary relief pressure. Provide inspection windows for rooms.

【0008】[0008]

【課題を解決するための手段】本発明に係る請求項1記
載の真空室用点検窓は、真空室の壁面に設けられた開口
部を外側からシール部を介して覆うように配置された窓
材と、前記窓材の外面との間に所定の隙間を形成するよ
うに前記窓材を覆って配置された窓材収容体とを備え、
前記窓材収容体は、前記窓材が前記真空室内の圧力を受
けて浮き上がった場合に、前記真空室内の気体を外部に
逃がすリリーフポートを有する真空室用点検窓におい
て、前記窓材収容体と前記窓材との間に、前記窓材を所
定の圧力で前記真空室の方向に押付ける窓材押付け手段
を備えている。
A vacuum chamber inspection window according to a first aspect of the present invention is a window arranged so as to cover an opening provided in a wall surface of the vacuum chamber from the outside through a seal portion. Material, and a window material container arranged to cover the window material so as to form a predetermined gap between the outer surface of the window material,
The window material container is a vacuum chamber inspection window having a relief port for allowing gas in the vacuum chamber to escape to the outside when the window material floats under the pressure in the vacuum chamber, and the window material container is Between the window member and the window member, there is provided window member pressing means for pressing the window member toward the vacuum chamber with a predetermined pressure.

【0009】本発明に係る請求項2記載の真空室用点検
窓は、前記窓材押付け手段が板バネを備え、前記板バネ
の少なくとも一端が前記窓材収容体に固定され、前記板
バネの平面部が前記窓材の外面に接触するように配置さ
れ、前記板バネの弾性で前記窓材を前記真空室の方向に
押付ける。
According to a second aspect of the present invention, there is provided a vacuum chamber inspection window, wherein the window material pressing means includes a leaf spring, and at least one end of the leaf spring is fixed to the window material container. The plane portion is arranged so as to contact the outer surface of the window member, and the elasticity of the leaf spring presses the window member toward the vacuum chamber.

【0010】本発明に係る請求項3記載の真空室用点検
窓は、前記窓材押付け手段が、前記窓材収容体の内面に
形成された少なくとも1以上の凹部と、前記凹部内に一
方端が位置し、他方端が前記窓材の外面に接触するよう
に前記凹部内に挿入されたコイルバネと、前記窓材収容
体の外面から前記凹部まで貫通して形成された貫通ねじ
孔と、ねじ端部が前記コイルバネの一方端に接触するよ
うに前記貫通ねじ孔にねじ込まれたボルトとを備え、前
記コイルバネの弾性で前記窓材を前記真空室の方向に押
付ける。
According to a third aspect of the present invention, there is provided an inspection window for a vacuum chamber, wherein the window material pressing means has at least one recess formed in the inner surface of the window material container, and one end in the recess. And a coil spring inserted into the recess so that the other end contacts the outer surface of the window member, a through screw hole formed to penetrate from the outer surface of the window member housing to the recess, and a screw. A bolt screwed into the through screw hole so that an end portion contacts one end of the coil spring, and the elasticity of the coil spring presses the window member toward the vacuum chamber.

【0011】本発明に係る請求項4記載の真空室用点検
窓は、前記窓材押付け手段が、前記窓材収容体に設けら
れ該窓材収容体の外部から内部へ加圧気体を導入する気
体導入手段と、前記窓材収容体の内面と前記窓材の外面
との間に挟まれ、前記気体導入手段を囲むように配置さ
れた弾力性を有するパッキン材とを備え、前記パッキン
材と前記窓材収容体の内面と前記窓材の外面とによって
規定される領域内に前記気体導入手段から導入される前
記加圧気体の圧力で前記窓材を前記真空室の方向に押付
ける。
In the vacuum chamber inspection window according to a fourth aspect of the present invention, the window material pressing means is provided in the window material container and introduces a pressurized gas from the outside to the inside of the window material container. A gas introducing means, and an elastic packing material sandwiched between an inner surface of the window material housing and an outer surface of the window material and arranged to surround the gas introducing means, and the packing material, The window material is pressed toward the vacuum chamber by the pressure of the pressurized gas introduced from the gas introducing means into the region defined by the inner surface of the window material container and the outer surface of the window material.

【0012】本発明に係る請求項5記載の真空室用点検
窓は、前記窓材押付け手段が、前記窓材収容体の外面か
ら内面にかけて形成された少なくとも1以上の貫通ねじ
孔と、先端のボールが前記窓材の外面に接触するように
前記貫通ねじ孔にねじ込まれたボールプランジャとを備
え、前記ボールプランジャの圧力で前記窓材を前記真空
室の方向に押付ける。
In a vacuum chamber inspection window according to a fifth aspect of the present invention, the window material pressing means has at least one or more through screw holes formed from the outer surface to the inner surface of the window material container, and a tip end of the window material pressing means. A ball plunger screwed into the through screw hole so that the ball contacts the outer surface of the window member, and the pressure of the ball plunger presses the window member toward the vacuum chamber.

【0013】本発明に係る請求項6記載の真空室用点検
窓は、前記窓材押付け手段が、前記窓材収容体の外面か
ら内面にかけて形成された少なくとも1以上の貫通ねじ
孔と、可動軸の先端が前記窓材の外面に接触するように
前記貫通ねじ孔にねじ込まれたショックアブソーバーと
を備え、前記ショックアブソーバーの圧力で前記窓材を
前記真空室の方向に押付ける。
In a vacuum chamber inspection window according to a sixth aspect of the present invention, the window material pressing means has at least one or more through screw holes formed from the outer surface to the inner surface of the window material container, and a movable shaft. A shock absorber screwed into the through screw hole so that the tip of the shock absorber comes into contact with the outer surface of the window member, and the pressure of the shock absorber presses the window member toward the vacuum chamber.

【0014】[0014]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

実施の形態1、 図1を用いて本発明に係る真空室用点検窓の実施の形態
1を説明する。
Embodiment 1 Embodiment 1 of a vacuum chamber inspection window according to the present invention will be described with reference to FIG.

【0015】図1は真空室用点検窓WD1の構成を示す
断面図であり、図9を用いて説明した従来の真空室用点
検窓WDと同一の構成については同一の符号を付し、重
複する説明は省略する。
FIG. 1 is a cross-sectional view showing the structure of the vacuum chamber inspection window WD1, and the same components as those of the conventional vacuum chamber inspection window WD described with reference to FIG. The description will be omitted.

【0016】図1において、点検窓ガラス2と保護カバ
ー5との間には、一方端が収容ケース3に取付けられ、
他方端が点検窓ガラス2の上面中央部に接触した板バネ
7が介在している。
In FIG. 1, one end is attached to the housing case 3 between the inspection window glass 2 and the protective cover 5,
A leaf spring 7 whose other end is in contact with the central portion of the upper surface of the inspection window glass 2 is interposed.

【0017】次に真空室用点検窓WD1の動作について
説明する。真空室1内部に加圧用ガスを導入して真空室
1内部を負圧状態から正圧状態にする際には、従来と同
様に矢印A方向に圧力が加わる。A方向に加わる力をF
1とし、板バネ7の押え圧力をF2とし、点検窓ガラス2
の自重をGとすると、F1が大気圧以上になり、G+F2
<F1の関係(式1と呼称)になると、点検窓ガラス2
は、矢印B方向に持ち上げられ、加圧用ガスは点検窓ガ
ラス2と真空室1の壁面との間に生じた隙間からリリー
フポート4に抜けるリリーフ機能により、真空室1内部
の圧力が必要以上に高まることが防止される。
Next, the operation of the vacuum chamber inspection window WD1 will be described. When introducing the pressurizing gas into the vacuum chamber 1 to change the inside of the vacuum chamber 1 from the negative pressure state to the positive pressure state, pressure is applied in the direction of arrow A as in the conventional case. The force applied in the A direction is F
1 , the pressing pressure of the leaf spring 7 is F 2 , and the inspection window glass 2
When the self-weight and G, F 1 becomes higher than the atmospheric pressure, G + F 2
<F 1 relationship (referred to as Formula 1), the inspection window glass 2
Is lifted in the direction of arrow B, and the pressurizing gas escapes to the relief port 4 through the gap created between the inspection window glass 2 and the wall surface of the vacuum chamber 1. It is prevented from rising.

【0018】ここで、F1がいわゆるリリーフ圧とな
り、任意のリリーフ圧F1を設定する場合、式1の関係
にてF2を算出し、F2の力で点検窓ガラス2を付勢でき
るようにバネ定数を選定して板バネ7を構成する。
Here, F 1 becomes a so-called relief pressure, and when an arbitrary relief pressure F 1 is set, F 2 is calculated according to the relation of the formula 1, and the inspection window glass 2 can be biased by the force of F 2. The leaf spring 7 is constructed by selecting the spring constant as described above.

【0019】このような構成にすることにより、点検窓
ガラス2には常時板バネ7による押え圧力が加わるの
で、真空室用点検窓WD1を真空室1の垂直壁面に取り
付けた場合にも点検窓ガラス2が板バネ7による押え圧
力でOリングOR1に押し付けられ、点検窓ガラス2が
OリングOR1からずれることが防止される。従って、
点検窓ガラス2がOリングOR1からずれることで、真
空室1の真空引きが達成できないという不都合は発生し
なくなる。また、板バネ7のバネ定数を変更することで
リリーフ圧を変更することが可能となる。
With this structure, the inspection window glass 2 is constantly pressed by the leaf spring 7, so that the inspection window WD1 for the vacuum chamber is attached to the vertical wall of the vacuum chamber 1 when the inspection window is attached. The glass 2 is pressed against the O-ring OR1 by the pressing force of the leaf spring 7, and the inspection window glass 2 is prevented from being displaced from the O-ring OR1. Therefore,
Since the inspection window glass 2 is displaced from the O-ring OR1, the inconvenience that the vacuuming of the vacuum chamber 1 cannot be achieved does not occur. Also, the relief pressure can be changed by changing the spring constant of the leaf spring 7.

【0020】なお、板バネの形状としては図1に示した
形状以外に、図2に示すような形状で合っても良い。す
なわち、図2において、板バネ7Aの両端部は収容ケー
ス3に取付けられ、平面部中央が点検窓ガラス2の上面
中央部に接触するように撓みを有して配置されている。
The shape of the leaf spring may be the shape shown in FIG. 2 other than the shape shown in FIG. That is, in FIG. 2, both ends of the leaf spring 7A are attached to the housing case 3 and are arranged so that the center of the flat portion contacts the center of the upper surface of the inspection window glass 2.

【0021】また、板バネの形状としてはこれ以外でも
良く、要するに点検窓ガラス2をバランス良く真空室方
向に押し付けることができる形状であれば良い。
Further, the shape of the leaf spring may be other than this, and any shape may be used as long as it can press the inspection window glass 2 in a well-balanced manner toward the vacuum chamber.

【0022】また、板バネ7の変わりに、ゴムパッキ
ン、スパイラルリング等の弾性材料を用いても同様の効
果が得られる。
The same effect can be obtained by using an elastic material such as rubber packing or spiral ring instead of the leaf spring 7.

【0023】実施の形態2、 図3を用いて本発明に係る真空室用点検窓の実施の形態
2を説明する。
Second Embodiment A second embodiment of the vacuum chamber inspection window according to the present invention will be described with reference to FIGS.

【0024】図3は真空室用点検窓WD2の構成を示す
断面図であり、図9を用いて説明した従来の真空室用点
検窓WDと同一の構成については同一の符号を付し、重
複する説明は省略する。
FIG. 3 is a sectional view showing the structure of the vacuum chamber inspection window WD2. The same components as those of the conventional vacuum chamber inspection window WD described with reference to FIG. The description will be omitted.

【0025】図3において、保護カバー5Aの中央部に
は凹部D1が設けられ、凹部D1内には圧縮コイルバネ
8が挿入されている。圧縮コイルバネ8の一方端側は点
検窓ガラス2の上面に接触し、他方端側は凹部D1内を
自在に移動できる押え板9に取付けられている。ここ
で、凹部D1は有底の孔であっても良いし、貫通孔であ
っても良い。
In FIG. 3, a recess D1 is provided in the center of the protective cover 5A, and a compression coil spring 8 is inserted in the recess D1. One end side of the compression coil spring 8 contacts the upper surface of the inspection window glass 2, and the other end side thereof is attached to a holding plate 9 which can freely move in the recess D1. Here, the concave portion D1 may be a bottomed hole or a through hole.

【0026】そして、安全板6Aの中央部には凹部D1
に対応する位置に貫通ネジ孔SH1が設けられ、当該ネ
ジ孔SH1には調節ボルト10がねじ込まれ、先端は押
え板9に達している。
A recess D1 is formed in the center of the safety plate 6A.
A through screw hole SH1 is provided at a position corresponding to, the adjusting bolt 10 is screwed into the screw hole SH1, and the tip reaches the holding plate 9.

【0027】図4に安全板6Aを調節ボルト10側から
見た場合の平面図を示す。図4において、安全板6Aは
金属板で形成され格子状に開口孔OHが設けられた構成
となっている。貫通ネジ孔SH1は安全板6Aの中央に
位置する格子部LTに形成されている。ここで、開口孔
OHは真空室1内部を点検するためのものである。な
お、安全板6Aを収容ケース3に固定するボルト等は図
示を省略している。
FIG. 4 shows a plan view of the safety plate 6A as viewed from the adjusting bolt 10 side. In FIG. 4, the safety plate 6A is made of a metal plate and has openings OH arranged in a grid pattern. The through screw hole SH1 is formed in the lattice portion LT located at the center of the safety plate 6A. Here, the opening hole OH is for inspecting the inside of the vacuum chamber 1. The bolts and the like for fixing the safety plate 6A to the housing case 3 are not shown.

【0028】このような構成にすることにより、点検窓
ガラス2には常時圧縮コイルバネ8による押え圧力が加
わるので、真空室用点検窓WD2を真空室1の垂直壁面
に取り付けることが可能となる。また、調節ボルト10
の安全板5Aへのねじ込み量を調整することで点検窓ガ
ラス2の押え圧力を変更できるので、圧縮コイルバネ8
を交換することなく、リリーフ圧を調節することが可能
となる。
With this structure, the inspection window glass 2 is constantly pressed by the compression coil spring 8, so that the vacuum chamber inspection window WD2 can be attached to the vertical wall surface of the vacuum chamber 1. Also, the adjustment bolt 10
The pressing pressure of the inspection window glass 2 can be changed by adjusting the screwing amount of the safety plate 5A into the compression coil spring 8A.
It is possible to adjust the relief pressure without replacing the.

【0029】なお、凹部D1を設ける位置は保護カバー
5Aの中央部だけに限られず、点検窓ガラス2周辺に沿
って均等に複数個設け、それぞれに圧縮コイルバネ8、
押え板9を挿入し、それぞれが調節ボルト10により点
検窓ガラス2の押え圧力を変更できる構成としても良
い。
The position of the recess D1 is not limited to the central portion of the protective cover 5A, and a plurality of recesses D1 are evenly provided along the periphery of the inspection window glass 2, and the compression coil springs 8,
The pressing plate 9 may be inserted and the pressing pressure of the inspection window glass 2 may be changed by the adjusting bolts 10.

【0030】また、凹部D1に圧縮コイルバネ8だけを
挿入する構成とし、点検窓ガラス2の押え圧力は一定と
しても良い。
Alternatively, the compression coil spring 8 alone may be inserted into the recess D1 so that the pressing pressure of the inspection window glass 2 may be constant.

【0031】また、保護カバー5Aを透明な樹脂製とし
安全板6Aを格子状に開口孔を有した金属製とした例を
示したが、貫通ネジ孔SH1を形成できるのであれば保
護カバーと安全板を一体とし透明な樹脂で形成しても良
い。その場合凹部D1は有底の孔となる。
Also, an example has been shown in which the protective cover 5A is made of a transparent resin and the safety plate 6A is made of a metal having opening holes in a lattice shape. However, if the through screw holes SH1 can be formed, the protective cover and the safety plate are safe. The plate may be integrated and formed of transparent resin. In that case, the concave portion D1 is a bottomed hole.

【0032】実施の形態3、 図5を用いて本発明に係る真空室用点検窓の実施の形態
3を説明する。
Third Embodiment A vacuum chamber inspection window according to a third embodiment of the present invention will be described with reference to FIGS.

【0033】図5は真空室用点検窓WD3の構成を示す
断面図であり、図9を用いて説明した従来の真空室用点
検窓WDと同一の構成については同一の符号を付し、重
複する説明は省略する。
FIG. 5 is a cross-sectional view showing the structure of the vacuum chamber inspection window WD3. The same components as those of the conventional vacuum chamber inspection window WD described with reference to FIG. The description will be omitted.

【0034】図5において、保護カバー5Bの中央部に
は貫通孔TH1が設けられ、安全板6Bの中央部には貫
通孔TH1に対応する位置に、図示しない気体圧縮手段
を介して圧縮された空気、窒素などの気体を導入する気
体導入継手11が、安全板6Bを貫通して貫通孔TH1
に達するように設けられている。なお、安全板6Bの基
本的な構成は図4を用いて説明した安全板6Aと同様で
ある。
In FIG. 5, a through hole TH1 is provided at the center of the protective cover 5B, and the safety plate 6B is compressed at a position corresponding to the through hole TH1 through a gas compression means (not shown). A gas introduction joint 11 for introducing a gas such as air or nitrogen penetrates the safety plate 6B and has a through hole TH1.
Is provided to reach. The basic structure of the safety plate 6B is the same as that of the safety plate 6A described with reference to FIG.

【0035】そして保護カバー5Bと安全板6Bとの間
には気体導入継手11から導入された圧縮空気がリリー
フポート4から抜けるのを防いで、保護カバー5Bと安
全板6Bとの間の圧力を導入された圧縮空気の圧力を保
つためのパッキンリング12が配置されている。
The compressed air introduced from the gas introduction joint 11 is prevented from coming out of the relief port 4 between the protective cover 5B and the safety plate 6B, and the pressure between the protective cover 5B and the safety plate 6B is prevented. A packing ring 12 for maintaining the pressure of the introduced compressed air is arranged.

【0036】ここでパッキンリング12は、真空室1内
部が負圧状態から正圧状態に移行するに伴って、点検窓
ガラス2が矢印B方向に持ち上げられる場合に、その動
作を妨げないように自らはつぶれる必要がある。従っ
て、パッキンリング12は断面形状がC型であるもの
や、X型であるもの、あるいは一般的なOリング、角型
ガスケットなどが使用される。
Here, the packing ring 12 does not hinder the operation when the inspection window glass 2 is lifted in the direction of the arrow B as the inside of the vacuum chamber 1 shifts from the negative pressure state to the positive pressure state. You have to collapse. Therefore, as the packing ring 12, a C-shaped cross section, an X-shaped cross section, a general O ring, a square gasket, or the like is used.

【0037】このような構成にすることにより、点検窓
ガラス2には常時圧縮空気の圧力による押え圧力が加わ
るので、真空室用点検窓WD3を真空室1の垂直壁面に
取り付けることが可能となる。また、気体導入継手11
から導入する気体(空気)の圧力を調整することで点検
窓ガラス2の押え圧力を変更できるので、圧縮コイルバ
ネ8を交換することなく、リリーフ圧を調節することが
可能となる。
With this structure, the inspection window glass 2 is constantly pressed by the pressure of compressed air, so that the inspection window WD3 for the vacuum chamber can be attached to the vertical wall surface of the vacuum chamber 1. . In addition, the gas introduction joint 11
Since the pressing pressure of the inspection window glass 2 can be changed by adjusting the pressure of the gas (air) introduced from, the relief pressure can be adjusted without replacing the compression coil spring 8.

【0038】また、保護カバー5Bを透明な樹脂製とし
安全板6Bを格子状に開口孔を有した金属製とした例を
示したが、貫通ネジ孔を形成できるのであれば保護カバ
ーと安全板を一体とし透明な樹脂で形成しても良い。そ
の場合、保護カバー5Bおよび安全板6Bに相当する部
分を貫通する貫通ネジ孔を形成し、気体導入継手11を
ねじ込んでも良い。
Also, an example has been shown in which the protective cover 5B is made of a transparent resin and the safety plate 6B is made of a metal having opening holes in a lattice shape. However, if the through screw holes can be formed, the protective cover and the safety plate can be formed. May be integrally formed with a transparent resin. In that case, it is possible to form a through screw hole penetrating the portions corresponding to the protective cover 5B and the safety plate 6B and screw the gas introduction joint 11 into the screw hole.

【0039】なお、気体導入継手段11は、ねじ込みの
ためのネジ部を有し、目的物にねじ込みによって取り付
けるものや、ネジ部を有さず溶接やロウ付けによって取
り付けるものがある。
The gas introducing joint means 11 has a threaded portion for screwing in, and may be attached to the target object by screwing it in, or may be attached by welding or brazing without a threaded portion.

【0040】実施の形態4、 図6を用いて本発明に係る真空室用点検窓の実施の形態
4を説明する。
Fourth Embodiment A vacuum chamber inspection window according to a fourth embodiment of the present invention will be described with reference to FIGS.

【0041】図6は真空室用点検窓WD4の構成を示す
断面図であり、図9を用いて説明した従来の真空室用点
検窓WDと同一の構成については同一の符号を付し、重
複する説明は省略する。
FIG. 6 is a cross-sectional view showing the structure of the vacuum chamber inspection window WD4. The same components as those of the conventional vacuum chamber inspection window WD described with reference to FIG. The description will be omitted.

【0042】図6において、保護カバー5Cの中央部に
は貫通孔TH2が設けられ、安全板6Cの中央部には貫
通孔TH2に対応する位置に貫通ネジ孔SH2が設けら
れ、当該貫通ネジ孔SH2にはボールプランジャー13
がねじ込まれ、先端のボール131は点検窓ガラス2に
接触している。なお、安全板6Cの基本的な構成は図4
を用いて説明した安全板6Aと同様である。
In FIG. 6, a through hole TH2 is provided at the center of the protective cover 5C, and a through screw hole SH2 is provided at a position corresponding to the through hole TH2 at the center of the safety plate 6C. Ball Plunger 13 for SH2
Is screwed in, and the ball 131 at the tip is in contact with the inspection window glass 2. The basic structure of the safety plate 6C is shown in FIG.
This is the same as the safety plate 6A described using.

【0043】図7にボールプランジャー13の概略断面
図を示す。図6に示すように、ボールプランジャー13
は、ボール131とボール131を付勢するコイルバネ
132と、ボール131およびコイルバネ132を収容
する本体ケース133とで構成されている。
FIG. 7 shows a schematic sectional view of the ball plunger 13. As shown in FIG. 6, the ball plunger 13
Is composed of a ball 131, a coil spring 132 that biases the ball 131, and a main body case 133 that houses the ball 131 and the coil spring 132.

【0044】このような構成にすることにより、点検窓
ガラス2にはボールプランジャー13のコイルバネ13
2よって付勢されたボール131により常時押え圧力が
加わるので、真空室用点検窓WD4を真空室1の垂直壁
面に取り付けることが可能となる。また、ボールプラン
ジャー13の安全板5Cへのねじ込み量を調整すること
で点検窓ガラス2の押え圧力を変更できるので、リリー
フ圧を調節することが可能となる。ボールプランジャー
13は既製品として市販されており、これを使用するこ
とで真空室用点検窓の製造コストを削減することができ
る。
With such a structure, the coil spring 13 of the ball plunger 13 is attached to the inspection window glass 2.
Since the pressing force is always applied by the ball 131 urged by 2, the vacuum chamber inspection window WD4 can be attached to the vertical wall surface of the vacuum chamber 1. Moreover, since the pressing pressure of the inspection window glass 2 can be changed by adjusting the screwing amount of the ball plunger 13 into the safety plate 5C, the relief pressure can be adjusted. The ball plunger 13 is commercially available as a ready-made product, and by using this, the manufacturing cost of the inspection window for the vacuum chamber can be reduced.

【0045】なお、ボールプランジャー13を設ける位
置は保護カバー5Cの中央部だけに限られず、点検窓ガ
ラス2周辺に沿って均等に複数個設けても良い。
The position where the ball plungers 13 are provided is not limited to the central portion of the protective cover 5C, and a plurality of ball plungers 13 may be provided evenly along the periphery of the inspection window glass 2.

【0046】また、保護カバー5Cを透明な樹脂製とし
安全板6Cを格子状に開口孔を有した金属製とした例を
示したが、貫通ネジ孔を形成できるのであれば保護カバ
ーと安全板を一体とし透明な樹脂で形成しても良い。そ
の場合、保護カバー5Cおよび安全板6Cに相当する部
分を貫通する貫通ネジ孔を形成し、ボールプランジャー
13をねじ込んでも良い。
Although an example in which the protective cover 5C is made of a transparent resin and the safety plate 6C is made of a metal having opening holes in a lattice shape is shown, the protective cover and the safety plate may be formed as long as through screw holes can be formed. May be integrally formed with a transparent resin. In that case, a ball screw 13 may be screwed in by forming a through screw hole penetrating the portions corresponding to the protective cover 5C and the safety plate 6C.

【0047】実施の形態5、 図8を用いて本発明に係る真空室用点検窓の実施の形態
5を説明する。
[Embodiment 5] Embodiment 5 of the vacuum chamber inspection window according to the present invention will be described with reference to FIG.

【0048】図8は真空室用点検窓WD5の構成を示す
断面図であり、図9を用いて説明した従来の真空室用点
検窓WDと同一の構成については同一の符号を付し、重
複する説明は省略する。
FIG. 8 is a cross-sectional view showing the structure of the vacuum chamber inspection window WD5. The same components as those of the conventional vacuum chamber inspection window WD described with reference to FIG. The description will be omitted.

【0049】図8において、保護カバー5Dの中央部に
は貫通孔TH3が設けられ、安全板6Dの中央部には貫
通孔TH3に対応する位置に貫通ネジ孔SH3が設けら
れ、当該貫通ネジ孔SH3にはショックアブソーバー1
4がねじ込まれ、その先端は点検窓ガラス2に接触して
いる。なお、安全板6Dの基本的な構成は図4を用いて
説明した安全板6Aと同様である。
In FIG. 8, a through hole TH3 is provided at the center of the protective cover 5D, and a through screw hole SH3 is provided at a position corresponding to the through hole TH3 at the center of the safety plate 6D. SH3 has a shock absorber 1
4 is screwed in, and its tip is in contact with the inspection window glass 2. The basic structure of the safety plate 6D is the same as that of the safety plate 6A described with reference to FIG.

【0050】ショックアブソーバー14は伸縮自在の可
動ロッド141と、可動ロッド141に加わる圧力を吸
収する緩衝材を収容ケース内に備えた構成を有し、可動
ロッド141に圧力が加わると可動ロッドが縮むことに
なる。緩衝材としてはオイルやバネを使用し、圧力の吸
収能力を調整機構を備えたものもある。
The shock absorber 14 has a structure in which a retractable movable rod 141 and a cushioning material that absorbs the pressure applied to the movable rod 141 are provided in the housing case, and the movable rod 141 contracts when pressure is applied to the movable rod 141. It will be. Some cushioning materials use oil or spring and are equipped with a mechanism for adjusting the pressure absorption capacity.

【0051】このような構成にすることにより、点検窓
ガラス2にはショックアブソーバー14により常時押え
圧力が加わるので、真空室用点検窓WD5を真空室1の
垂直壁面に取り付けることが可能となる。また、圧力の
吸収能力を調整することで点検窓ガラス2の押え圧力を
変更できるので、リリーフ圧を調節することが可能とな
る。ショックアブソーバー14は既製品として市販され
ており、これを使用することで真空室用点検窓の製造コ
ストを削減することができる。
With this structure, the inspection window glass 2 is constantly pressed by the shock absorber 14, so that the inspection window WD5 for the vacuum chamber can be attached to the vertical wall surface of the vacuum chamber 1. Further, since the pressing pressure of the inspection window glass 2 can be changed by adjusting the pressure absorbing ability, it becomes possible to adjust the relief pressure. The shock absorber 14 is commercially available as a ready-made product, and by using this, the manufacturing cost of the vacuum chamber inspection window can be reduced.

【0052】なお、ショックアブソーバー14を設ける
位置は保護カバー5Dの中央部だけに限られず、点検窓
ガラス2周辺に沿って均等に複数個設けても良い。
The position where the shock absorber 14 is provided is not limited to the central portion of the protective cover 5D, and a plurality of shock absorbers 14 may be provided evenly along the periphery of the inspection window glass 2.

【0053】また、保護カバー5Dを透明な樹脂製とし
安全板6Dを格子状に開口孔を有した金属製とした例を
示したが、貫通ネジ孔を形成できるのであれば保護カバ
ーと安全板を一体とし透明な樹脂で形成しても良い。そ
の場合、保護カバー5Dおよび安全板6Dに相当する部
分を貫通する貫通ネジ孔を形成し、ショックアブソーバ
ー14をねじ込んでも良い。
Further, the example in which the protective cover 5D is made of transparent resin and the safety plate 6D is made of metal having opening holes in a lattice shape is shown, but if the through screw holes can be formed, the protective cover and the safety plate are formed. May be integrally formed with a transparent resin. In that case, a through screw hole may be formed through the portions corresponding to the protective cover 5D and the safety plate 6D, and the shock absorber 14 may be screwed in.

【0054】変形例、 以上説明した本発明に係る真空室用点検窓の実施の形態
1〜5では、真空室1内部を点検するために点検窓ガラ
ス2を設けた例を示したが、真空室1内部を点検する必
要がない場合、例えばリリーフ機能だけを活用したい場
合には、点検窓ガラス2の代わり金属板を用いても良
い。その場合、保護カバーと安全板を金属で一体に形成
しても良い。
Modifications In the first to fifth embodiments of the vacuum chamber inspection window according to the present invention described above, the inspection window glass 2 is provided to inspect the inside of the vacuum chamber 1. When it is not necessary to inspect the inside of the chamber 1, for example, when it is desired to utilize only the relief function, a metal plate may be used instead of the inspection window glass 2. In that case, the protective cover and the safety plate may be integrally formed of metal.

【0055】また、以上説明した本発明に係る真空室用
点検窓の実施の形態1〜5では、真空室1の開口部H1
の周囲にOリング溝OG1が設けられ、Oリング溝OG
1内に真空シールのためのOリングOR1がはめ込まれ
た構成を示したが、点検窓ガラス2に開口部H1の周囲
に対応させたOリング溝を設けた構成としても良い。
Further, in the first to fifth embodiments of the vacuum chamber inspection window according to the present invention described above, the opening H1 of the vacuum chamber 1 is formed.
O-ring groove OG1 is provided around the
Although the structure in which the O-ring OR1 for vacuum sealing is fitted in 1 is shown, the inspection window glass 2 may be provided with an O-ring groove corresponding to the periphery of the opening H1.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明に係る真空室用点検窓の実施の形態1
を説明する図である。
FIG. 1 is a first embodiment of a vacuum chamber inspection window according to the present invention.
FIG.

【図2】 本発明に係る真空室用点検窓の実施の形態1
を説明する図である。
FIG. 2 is a first embodiment of a vacuum chamber inspection window according to the present invention.
FIG.

【図3】 本発明に係る真空室用点検窓の実施の形態2
を説明する図である。
FIG. 3 is a second embodiment of a vacuum chamber inspection window according to the present invention.
FIG.

【図4】 本発明に係る真空室用点検窓の実施の形態2
を説明する図である。
FIG. 4 is a second embodiment of a vacuum chamber inspection window according to the present invention.
FIG.

【図5】 本発明に係る真空室用点検窓の実施の形態3
を説明する図である。
FIG. 5 is a third embodiment of a vacuum chamber inspection window according to the present invention.
FIG.

【図6】 本発明に係る真空室用点検窓の実施の形態4
を説明する図である。
FIG. 6 is a fourth embodiment of the vacuum chamber inspection window according to the present invention.
FIG.

【図7】 ボールプランジャの構成を示す断面図であ
る。
FIG. 7 is a cross-sectional view showing the structure of a ball plunger.

【図8】 本発明に係る真空室用点検窓の実施の形態5
を説明する図である。
FIG. 8 is a fifth embodiment of the vacuum chamber inspection window according to the present invention.
FIG.

【図9】 従来の真空室用点検窓を説明する図である。FIG. 9 is a diagram illustrating a conventional vacuum chamber inspection window.

【符号の説明】[Explanation of symbols]

7,7A 板バネ、8 圧縮コイルバネ、9 押え板、
10 調節ボルト、11 気体導入継手、12 パッキ
ンリング、13 ボールプランジャ、14 ショックア
ブソーバー、141 可動ロッド、D1 凹部、SH
1,SH2 貫通ネジ孔、TH1,TH2 貫通孔。
7,7A leaf spring, 8 compression coil spring, 9 holding plate,
10 Adjustment Bolt, 11 Gas Inlet Joint, 12 Packing Ring, 13 Ball Plunger, 14 Shock Absorber, 141 Movable Rod, D1 Recess, SH
1, SH2 through screw holes, TH1, TH2 through holes.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 真空室の壁面に設けられた開口部を外側
からシール部を介して覆うように配置された窓材と、前
記窓材の外面との間に所定の隙間を形成するように前記
窓材を覆って配置された窓材収容体とを備え、前記窓材
収容体は、前記窓材が前記真空室内の圧力を受けて浮き
上がった場合に、前記真空室内の気体を外部に逃がすリ
リーフポートを有する真空室用点検窓において、 前記窓材収容体と前記窓材との間に、前記窓材を所定の
圧力で前記真空室の方向に押付ける窓材押付け手段を備
える真空室用点検窓。
1. A predetermined gap is formed between a window member arranged so as to cover an opening provided in a wall surface of a vacuum chamber from the outside through a seal portion and an outer surface of the window member. A window material container arranged so as to cover the window material, the window material container allowing the gas in the vacuum chamber to escape to the outside when the window material floats under the pressure in the vacuum chamber. In a vacuum chamber inspection window having a relief port, for a vacuum chamber comprising window material pressing means for pressing the window material in the direction of the vacuum chamber with a predetermined pressure between the window material container and the window material. Inspection window.
【請求項2】 前記窓材押付け手段は板バネを備え、前
記板バネの少なくとも一端が前記窓材収容体に固定さ
れ、前記板バネの平面部が前記窓材の外面に接触するよ
うに配置され、前記板バネの弾性で前記窓材を前記真空
室の方向に押付けることを特徴とする請求項1記載の真
空室用点検窓。
2. The window material pressing means includes a leaf spring, at least one end of the leaf spring is fixed to the window material container, and the flat portion of the leaf spring is arranged so as to contact an outer surface of the window material. The inspection window for a vacuum chamber according to claim 1, wherein the elasticity of the leaf spring presses the window member toward the vacuum chamber.
【請求項3】 前記窓材押付け手段は、前記窓材収容体
の内面に形成された少なくとも1以上の凹部と、 前記凹部内に一方端が位置し、他方端が前記窓材の外面
に接触するように前記凹部内に挿入されたコイルバネ
と、 前記窓材収容体の外面から前記凹部まで貫通して形成さ
れた貫通ねじ孔と、 ねじ端部が前記コイルバネの一方端に接触するように前
記貫通ねじ孔にねじ込まれたボルトとを備え、 前記コイルバネの弾性で前記窓材を前記真空室の方向に
押付けることを特徴とする請求項1記載の真空室用点検
窓。
3. The window member pressing means has at least one recess formed on the inner surface of the window member housing, one end located inside the recess, and the other end contacting the outer surface of the window member. So that the coil spring is inserted into the recess, the through-screw hole formed to penetrate from the outer surface of the window material container to the recess, and the screw end portion is in contact with one end of the coil spring. The vacuum chamber inspection window according to claim 1, further comprising: a bolt screwed into the through screw hole, wherein the window member is pressed toward the vacuum chamber by elasticity of the coil spring.
【請求項4】 前記窓材押付け手段は、前記窓材収容体
に設けられ該窓材収容体の外部から内部へ加圧気体を導
入する気体導入手段と、 前記窓材収容体の内面と前記窓材の外面との間に挟ま
れ、前記気体導入手段を囲むように配置された弾力性を
有するパッキン材とを備え、 前記パッキン材と前記窓材収容体の内面と前記窓材の外
面とによって規定される領域内に前記気体導入手段から
導入される前記加圧気体の圧力で前記窓材を前記真空室
の方向に押付けることを特徴とする請求項1記載の真空
室用点検窓。
4. The window material pressing means is provided in the window material container, and introduces a pressurized gas from the outside to the inside of the window material container; an inner surface of the window material container; And an elastic packing material that is sandwiched between the outer surface of the window material and arranged so as to surround the gas introducing means, and the packing material, the inner surface of the window material container, and the outer surface of the window material. 2. The vacuum chamber inspection window according to claim 1, wherein the window member is pressed in the direction of the vacuum chamber by the pressure of the pressurized gas introduced from the gas introducing means in the region defined by the above.
【請求項5】 前記窓材押付け手段は、前記窓材収容体
の外面から内面にかけて形成された少なくとも1以上の
貫通ねじ孔と、 先端のボールが前記窓材の外面に接触するように前記貫
通ねじ孔にねじ込まれたボールプランジャとを備え、 前記ボールプランジャの圧力で前記窓材を前記真空室の
方向に押付けることを特徴とする請求項1記載の真空室
用点検窓。
5. The window member pressing means comprises at least one or more through screw holes formed from the outer surface to the inner surface of the window member container, and the penetrating member such that the ball at the tip contacts the outer surface of the window member. The vacuum chamber inspection window according to claim 1, further comprising a ball plunger screwed into the screw hole, wherein the pressure of the ball plunger presses the window member toward the vacuum chamber.
【請求項6】 前記窓材押付け手段は、前記窓材収容体
の外面から内面にかけて形成された少なくとも1以上の
貫通ねじ孔と、 可動軸の先端が前記窓材の外面に接触するように前記貫
通ねじ孔にねじ込まれたショックアブソーバーとを備
え、 前記ショックアブソーバーの圧力で前記窓材を前記真空
室の方向に押付けることを特徴とする請求項1記載の真
空室用点検窓。
6. The window member pressing means comprises at least one or more through-screw holes formed from the outer surface to the inner surface of the window material container, and the tip of the movable shaft contacts the outer surface of the window material. The inspection window for a vacuum chamber according to claim 1, further comprising a shock absorber screwed into the through screw hole, wherein the window member is pressed toward the vacuum chamber by a pressure of the shock absorber.
JP19171195A 1995-07-27 1995-07-27 Inspection window for vacuum chamber Pending JPH0938481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19171195A JPH0938481A (en) 1995-07-27 1995-07-27 Inspection window for vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19171195A JPH0938481A (en) 1995-07-27 1995-07-27 Inspection window for vacuum chamber

Publications (1)

Publication Number Publication Date
JPH0938481A true JPH0938481A (en) 1997-02-10

Family

ID=16279214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19171195A Pending JPH0938481A (en) 1995-07-27 1995-07-27 Inspection window for vacuum chamber

Country Status (1)

Country Link
JP (1) JPH0938481A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000060653A1 (en) * 1999-03-30 2000-10-12 Tokyo Electron Limited Plasma treatment device, its maintenance method and its installation method
WO2001088971A1 (en) * 2000-05-17 2001-11-22 Tokyo Electron Limited Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
JP2008251960A (en) * 2007-03-30 2008-10-16 Mitsubishi Electric Corp Laser oscillator

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000060653A1 (en) * 1999-03-30 2000-10-12 Tokyo Electron Limited Plasma treatment device, its maintenance method and its installation method
US6700089B1 (en) 1999-03-30 2004-03-02 Tokyo Electron Limited Plasma processing device, its maintenance method, and its installation method
WO2001088971A1 (en) * 2000-05-17 2001-11-22 Tokyo Electron Limited Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
US6899786B2 (en) * 2000-05-17 2005-05-31 Tokyo Electron Limited Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
US7481903B2 (en) 2000-05-17 2009-01-27 Tokyo Electron Limited Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism
JP4896337B2 (en) * 2000-05-17 2012-03-14 東京エレクトロン株式会社 PROCESSING DEVICE AND ITS MAINTENANCE METHOD, PROCESSING DEVICE PARTS ASSEMBLY MECHANISM AND ITS ASSEMBLY METHOD, LOCK MECHANISM AND LOCK METHOD THEREOF
JP2008251960A (en) * 2007-03-30 2008-10-16 Mitsubishi Electric Corp Laser oscillator
JP4643605B2 (en) * 2007-03-30 2011-03-02 三菱電機株式会社 Laser oscillator

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