JPH09319305A - Sheet sticking device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a sheet to be stuck on a sheet sticking surface in a state in which dust is not stuck on the sheet sticking surface of a subject to be worked by grasping the sticking surface of the subject to be worked while making it to be downward and sticking the sheet on the sheet sticking surface and cutting an unwanted part in the sheet stuck on the sticking surface. SOLUTION: The protective sheet sticking device 13 is constituted of a sheet sticking mechanism 50, a cutting device 51 and a third arm mechanism 18 as a grasping part. The third arm mechanism 18 elevates and lowers a stamper 1 by the action of a cylinder device in a state in which the surface of the stamper 1 as the sheet sticking surface is made to be downward. The sheet sticking mechanism 50 sticks a protective sheet 9 on the surface of the stamper 1 suckingly held by the third arm mechanism 18. Then, the cutting device 51 cuts of an unwanted part in the protective sheet 9 stuck on the surface of the stamper 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet sticking device for sticking a protective sheet onto a sheet sticking surface of a workpiece.

[0002]

2. Description of the Related Art A stamper formed for manufacturing an object to be processed, for example, an optical disk such as a CD-ROM is provided with a recording surface on its surface. Need to be protected.

[0003]

However, in the conventional sheet sticking apparatus, the surface of the stamper, which is the workpiece, is arranged above and the sheet is stuck to this surface. Therefore, the sheet is stuck to the surface of the stamper. Dust may adhere to the recording surface of the stamper surface during the sticking process. Therefore, the CD-RO manufactured from this stamper
There is a possibility that the quality of the optical disc such as M will be deteriorated.

The object of the present invention has been made in view of the above circumstances, and a sheet which can be stuck to the above-mentioned sheet sticking surface in a state in which dust is not attached to the sheet sticking surface of a workpiece. To provide a sticking device.

[0005]

According to a first aspect of the present invention, there is provided a gripping part capable of lifting and lowering a sheet sticking surface of a workpiece, and a workpiece which is gripped by the gripping portion. Of the sheet pasting mechanism for pasting a sheet to the above sheet pasting surface, and the above sheet pasted to the pasting surface,
The unnecessary parts are cut off.

According to a second aspect of the present invention, in the first aspect of the present invention, the sheet attaching mechanism is installed on the slide base that reciprocates with respect to the frame along the path line of the sheet. A sheet unwinding unit that unwinds the sheet, and the sheet unwound from the sheet unwinding unit installed on the slide base,
A sticking roller that is pressed and stuck to the sheet sticking surface of the workpiece held by the gripping part, and is installed in the frame,
A sheet winding unit that winds up an unnecessary portion of the sheet, and the cutting device is installed on the slide line in the path line of the sheet on the downstream side of the sticking roller, By the forward movement of the slide base, the sheet is unwound by a predetermined unwinding amount from the sheet unwinding portion, and the cutting device is positioned at a predetermined position with respect to the gripping portion.

According to a third aspect of the invention, in the invention according to the second aspect, the frame has an entire nip portion for holding the entire width of the sheet on the upstream side of the winding portion in the sheet pass line. This entire nip portion holds the entire width of the sheet when the slide base is moved forward and when the sheet is stuck by the sticking roller, and when the gripping part is raised to the sheet sticking mechanism. In the pass line, a both-end nip portion that holds both ends in the width direction of the sheet is installed between the pasting roller and the cutting device, and the both-end nip portion is formed by the backward movement of the slide base and the sheet winding portion. Both ends of the sheet in the width direction are held at the time of winding the sheet and at the time of raising the gripping part with respect to the sheet attaching mechanism.

According to a fourth aspect of the present invention, in the first, second or third aspect of the present invention, the workpiece is a stamper for manufacturing an optical disc, and the sheet attaching surface has the recording surface of the stamper. It is made to be the surface.

The invention according to claim 1 or 4 has the following effects. Since the sheet pasting mechanism attaches the sheet to the sheet pasting surface with the gripping portion with the sheet pasting surface of the workpiece facing downward, the sheet can be pasted without dust on the sheet pasting surface. .

The invention according to claim 2 has the following operation. Since the sheet is unwound by a predetermined amount of unwinding from the sheet unwinding portion by the forward movement of the slide base, the unwinding amount of the sheet can be controlled by the forward movement amount of the slide base. Further, since the cutting device is positioned at a predetermined position with respect to the grip portion by the forward movement of the slide base, the cutting device can be positioned by the forward movement of the slide base. In this way, the amount of the sheet unwound from the sheet unwinding portion and the positioning of the cutting device can be realized with high accuracy with a simple structure.

The third aspect of the invention has the following operation. During the forward movement of the slide base and when the sheet is pasted by the pasting roller, the entire nip portion operates to hold the entire width of the sheet, so that the tension acting on the sheet at this time can be prevented from acting on the sheet winding portion. Further, at the time of the backward movement of the slide base and the winding of the sheet winding portion, the both end nip portions operate to hold the both ends in the width direction of the sheet, so that the sheet can be prevented from wrinkling at this time. Furthermore,
When the gripping part moves up with respect to the sheet pasting mechanism, the whole nip part and both end nip parts operate, so the sheet pasted on the sheet pasting surface of the work piece and the unnecessary part of the sheet cut by the cutting device are separated. Can be implemented satisfactorily. Thus, with a simple structure, complicated seat tension control can be realized.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an overall perspective view showing processing equipment such as cleaning of an optical disk stamper to which a protective sheet sticking apparatus which is one embodiment of a sheet sticking apparatus according to the present invention is applied. FIG. 2 is a sectional view showing the stamper cleaning / drying apparatus of FIG. 3A is a partial plan view showing the support member of FIG. 2, and FIG. 3B is a plan view of FIG.
It is sectional drawing which follows the IIIB-IIIB line of (A). FIG. 4 shows the lower nozzle of FIG. 2, (A) being a plan view and (B) being a longitudinal sectional view. FIG. 5 is a side view of the protective sheet sticking apparatus of FIG. 1 before sheet sticking. FIG. 6 is a side view of the protective sheet sticking apparatus of FIG. 1 after the sheet is stuck. FIG. 7 is a view taken in the direction of the arrow VII in FIG. FIG. 8 is a view on arrow VIII of FIG. FIG. 9 is a view from the arrow IX showing the back surface polishing apparatus of FIG. FIG. 10 is a partial cross-sectional view showing the holding table of FIG. 11 (A) is a front view showing the first arm mechanism of FIG. 1, and FIG. 11 (B) is XI of FIG. 11 (A).
FIG. FIG. 12 is a side view showing the second arm mechanism of FIG. 13 (A) is a front view showing the third arm mechanism of FIG. 1, and FIG. 13 (B) is FIG. 13 (A).
FIG. 13 is an XIIIB arrow view of FIG. FIG. 14 (A) is a front view showing the fourth arm mechanism of FIG. 1, and FIG. 14 (B), (C)
14A and 14B are a XIVB arrow view and a XIVC arrow view, respectively, of FIG. 15A is a plan view showing the stamper of FIG. 1, and FIG. 15B is a sectional view taken along line XVB-XVB of FIG. 15A.

[A] Overall Structure (FIGS. 1 and 11 to 15) As shown in FIG. 1, a processing facility 10 for cleaning an optical disk stamper is a mold for injection molding an optical disk such as a CD-ROM. The stamper 1 is processed.
The processing equipment 10 for cleaning the optical disk stamper includes a resist cleaning device 11 for cleaning the photoresist remaining on the stamper 1 and the resist cleaning device 11.
A stamper cleaning / drying device 12 for cleaning the stamper 1 cleaned with pure water and drying it, and a surface 4 of the stamper 1 cleaned and dried by the stamper cleaning / drying device 12
A protective sheet sticking device 13 for sticking a protective sheet 9 to (described later), a back surface polishing device 14 for polishing a back surface 5 (described later) of the stamper 1 to which the protective sheet 9 is stuck by the protective sheet sticking device 13, The stack device 15 for storing the stamper 1 whose back surface 5 is polished, and the first arm mechanism 1
6, second arm mechanism 17, third arm mechanism 18 and fourth
A stamper transfer device 20 that includes an arm mechanism 19 and transfers the stamper 1.

As shown in FIG. 15, the stamper 1 has a ring-shaped contact ring 3 on the outside of the stamper body 2.
And the contact ring 3 is made of SUS.
3042B (JIS standard), the stamper body 2 is made of nickel. The stamper 1 has an outer diameter of about 170 mm, and the stamper body 2 has a plate thickness of about 0.3 mm. A recording surface 6 is provided on the stamper body 2 on the front surface 4 of the stamper 1, and the reference numeral 5 is the back surface of the stamper 1.

First arm mechanism 1 of stamper transfer device 20
As shown in FIGS. 1 and 11, in FIG. 6, a supporting column 22 is erected horizontally on a moving table 21 and an arm section 23 is arranged on the supporting column 22 so as to be movable up and down. A chuck is provided at the tip of the arm section 23. 24 is installed. The chuck 24 contacts the front surface 4 and the back surface 5 of the stamper 1 and holds the stamper 1 from both sides. The stamper 1 is transferred in the resist cleaning apparatus 11 by the first arm mechanism 16.

As shown in FIGS. 1 and 12, the second arm mechanism 17 is a processing facility 1 for cleaning optical disk stampers.
It is configured to have an arm portion 26 movable along a rail 25 laid over the entire length of 0 and a chuck 28 arranged on the arm portion 26 via a cylinder device 27. . The chuck 28 is a cylinder device 27.
It is installed so that it can be moved up and down and can be rotated 90 degrees. Further, the chuck 28 holds the stamper 1 by sandwiching the outer peripheral end of the contact ring 3 in the stamper 1. Also, the arm portion 26 of the second arm mechanism 17 is moved along the rail 25 by a cylinder device (not shown) along with the resist cleaning device 11 and the stamper cleaning.
The stamper 1 is transferred to and from the drying device 12.

As shown in FIGS. 1 and 13, the third arm mechanism 18 has a vacuum chuck 31 which can be moved up and down by a cylinder device 30 on an arm portion 29 movable along the rail 25. is there. The vacuum chuck 31 holds the stamper 1 by adsorbing the entire back surface 5 of the stamper 1. Further, the arm portion 29 of the third arm mechanism 18 includes the rodless cylinder device 18A in the range from the stamper cleaning / drying device 12 to the protective sheet attaching device 13 to the back surface polishing device 14.
Is transported.

As shown in FIGS. 1 and 14, the fourth arm mechanism 19 includes a suction cup 3 which can be moved up and down by a cylinder device 33 on an arm portion 32 movable along the rail 25.
4 is installed. The suction cup 34 sucks the back surface 5 of the stamper 1 and holds the stamper 1. Further, the arm portion 32 of the fourth arm mechanism 19 is moved along the rail 25 by the cylinder device (not shown) along with the back surface polishing device 14
The stamper 1 is transferred between the stacker 15 and the stacking device 15.

The second arm mechanism 17, the third arm mechanism 18, and the fourth arm mechanism 19 are the stamper 1 including a stamper cleaning / drying device 12, a protective sheet attaching device 13, a back surface polishing device 14, and a stacking device 15, which will be described later. In the same manner as the processing of (1), the front surface 4 of the stamper 1 having the recording surface 6 is held downward and the back surface 5 is held upward, and the stamper 1 is transferred.

[B] Resist Cleaning Device (FIG. 1) As shown in FIG. 1, the resist cleaning device 11 comprises a first remover tank 35 and a second remover tank 36 which are connected in series. In the tank 35 and the second remover tank 36,
A remover liquid for removing the photoresist is filled from the stamper 1.

A stirrer (not shown) for stirring the remover liquid is installed in the first remover tank 35 and the second remover tank 36, and a temperature controller is installed in the second remover tank 36. The temperature of the remover liquid is adjusted. Furthermore,
The first remover tank 35 is provided with a guide portion (not shown) for holding a plurality of (for example, 10) stampers 1 in an upright state (vertical state), and a sensor such as a photoelectric tube (not shown). Is installed, the stamper 1 is the first remover tank 3
It is detected that it is set within 5.

The stamper 1 set in the first remover tank 35 is soaked and washed for a predetermined time (about 10 minutes), and then one of the stamper 1 is gripped by the chuck 24 of the first arm mechanism 16 and then the second stamper 1 is used. It is transferred into the remover tank 36. The stamper 1 is dipped and washed in the second remover tank 36 for a predetermined time (about 10 minutes) while being held by the chuck 24 of the first arm mechanism 16, and then, in the chuck 28 of the second arm mechanism 17. The outer peripheral end of the contact ring 3 is nipped and gripped, and is transferred to the stamper cleaning / drying device 12 by the second arm mechanism 17. For all the stampers 1 set in the first remover tank 35, the above-mentioned first
Soaking and cleaning in the remover tank 35 and the second remover tank 36 are performed.

Here, the first arm mechanism 16 uses the stamper 1
In the second remover tank 36, the cleaning is performed by dipping it in the gripping state. The time required to polish one stamper 1 in the back surface polishing device 14 in the subsequent step is the cleaning time in the second remover tank 36. This is because it is longer than (about 10 minutes).

[C] Stamper Cleaning / Drying Device (FIGS. 1 to 4) As shown in FIGS. 1 and 2, the stamper cleaning / drying device 1
2 is a support member 37 for mounting and supporting the stamper 1;
An upper nozzle 38 and a lower nozzle 39, which are disposed above and below the support member 37 to inject a cleaning liquid (pure water), a rotation drive motor (not shown) that rotationally drives the support member 37 via a support shaft 40, and a support. And a cylindrical shatterproof pan 41 that covers the member 37.

The support member 37, as shown in FIG.
A plurality of (for example, six) rod-shaped support frames 42 are radially arranged and connected to the support shaft 40. A ring-shaped base surface 42A is formed at the tip of each support frame 42, and a support wall 43 is erected perpendicularly to the base surface 42A. A tapered surface 44 is formed on the inner circumference of the upper end of the support wall 43, and the stamper 1 transferred from above the support frame 42 is centered and arranged between the support walls 43 of each support frame 42.

A ball plunger 45 is embedded in the tip of each support frame 42, and a ball 45A as a support projection of the ball plunger 45 is arranged in a protruding state from the base surface 42A. The stamper 1 transferred from above the support frame 42 is placed and supported on the balls 45A of the ball plunger 45 in a point contact state. At this time, the stamper 1 is transferred with the surface 4 having the recording surface 6 facing downward,
In this state, it is placed and supported on the ball 45A of the ball plunger 45.

A magnet 46 is embedded below the base surface 42A of each support frame 42, and a ball 45 of a ball plunger 45 is provided.
The stamper 1 placed on A is attached to the base surface 4 by the action of magnetic force.
Pull to 2A side. Further, the distance L between the outer peripheral end of the contact ring 3 of the stamper 1 mounted on the ball 45A of the ball plunger 45 and the inner peripheral surface of the support wall 43.
Is set to a very small value (for example, 0.5 mm). By setting the magnetic force of the magnet 46 and the distance L, the supporting member 3
Even if 7 rotates as described later, the stamper 1 mounted on the ball 45A of the ball plunger 45 is prevented from jumping out.

As shown in FIG. 2, the upper nozzle 38 and the lower nozzle 39 spray pure water as a cleaning liquid toward the stamper 1 supported by each supporting frame 42 of the supporting member 37. Among them, the lower nozzle 39 is arranged below the supporting member 37, and as shown in FIG. 4, a plurality of lower nozzles 39 are arranged along a plane A including the axis and a plane B having an angle θ ₁ on both sides of this plane. _No. 47 is formed, and a plurality of nozzle holes 47 are formed on one side of the plane A along a plane C having an angle θ ₂ (> θ ₁ ). With these nozzle holes 47, as shown in FIG.
On the surface 4 of the stamper 1, uniform pure water is sprayed from the nozzle hole 47 over the range from the central portion of the stamper 1 to the outer peripheral end.

The upper nozzle 38 is arranged above the support member 37 and sprays pure water onto the back surface 5 of the stamper 1. The nozzle holes 47 of the upper nozzle 38 may also be formed by being arrayed similarly to the lower nozzle 39.

A rotary drive motor (not shown) for rotating the support member 37 via the support shaft 40 rotates the support member 37 at a low speed or at a high speed with the center line of the stamper 1 supported by the support member 37 as the rotation center 48. About 1000 rpm). This rotary drive motor rotates the support member 37 at a low speed setting rotation speed when cleaning the stamper 1, and rotates the support member 37 at a high speed setting rotation speed when the stamper 1 is shaken off and dried.

The stamper 1 is carried into the stamper cleaning / drying device 12 having the above-mentioned structure by using the above-mentioned second arm mechanism 17, and the stamper cleaning / drying device 12 is loaded.
After the stamper 1 is washed with pure water and dried by shaking off, the stamper 1 is unloaded using the third arm mechanism 18 described above.

That is, the second arm mechanism 17 (FIG. 12)
Grips the stamper 1 held by the first arm mechanism 16 in a vertical state, transfers it to above the stamper cleaning / drying device 12, and then rotates 90 ° so that the surface 4 of this stamper 1 is below. Then, the stamper 1 is further lowered and placed on the support member 37 of the stamper cleaning / drying device 12. At this time, the chuck 28 of the second arm mechanism 17 and the support member 37.
The second arm mechanism 1 so as not to interfere with the support frame 42 of
7 lowers the stamper 1, and the stamper 1 placed on the support member 37 is centered by the tapered surface 44 of each support frame 42 and is arranged between the support walls 43 of the plurality of support frames 42. .

When the stamper 1 is transferred to the support member 37, the chuck 28 of the second arm mechanism 17 is released,
The second arm mechanism 17 moves up and then rotates 90 °,
Wait at that position.

After the second arm mechanism 17 is on standby, the rotary drive motor rotates the support member 37 at the low speed setting rotation speed, and the upper nozzle 38 and the lower nozzle 39 support the pure water through the nozzle holes 47 for 40 seconds. It is jetted toward the stamper 1 on 37 to wash away the remover liquid adhering to this stamper 1.

After the injection of pure water from the upper nozzle 38 and the lower nozzle 39 is completed, the rotary drive motor is operated by the support member 37.
At a high speed of about 1000 rpm. This high-speed rotation is performed for about 40 seconds, and the pure water and the like adhering to the stamper 1 is scattered and shaken off to be dried.

After the shake-off and drying, the third arm mechanism 1
8 moves from the protective sheet sticking device 13 to the stamper cleaning / drying device 12 side, lowers the vacuum chuck 31 from above the stamper cleaning / drying device 12, and sucks the stamper 1 on the stamper cleaning / drying device 12 by vacuum suction. To do. The third arm mechanism 18 vacuum-sucks the stamper 1 and then ascends to move to the protection sheet sticking device 13 described above.
Transfer the stamper.

[D] Protective sheet pasting device (including cutting device) (FIG. 1, FIG. 5 to FIG. 8, FIG. 13) The protective sheet pasting device 13 as a sheet pasting device, as shown in FIG. Mechanism 50, cutting device 51,
And a third arm mechanism 18 as a grip portion.

As shown in FIG. 13, in the third arm mechanism 18, as described above, the vacuum chuck 31 sucks the back surface 5 of the stamper 1 as a workpiece by vacuum suction, and the front surface of the stamper 1 as a sheet attaching surface. The cylinder device 30 moves the stamper 1 up and down in a state where the stamper 4 is in the downward direction.

The sheet attaching mechanism 50 attaches the protective sheet 9 to the surface 4 of the stamper 1 sucked and held by the third arm mechanism 18, as shown in FIGS. The cutting device 51 cuts unnecessary portions of the protective sheet 9 attached to the surface 4 of the stamper 1.

Of these, the sheet attaching mechanism 50 includes a frame 52 and a slide base member 5 as a slide base.
3, a winding roller 54 as a sheet winding portion, a sticking roller 55, a winding roll 56 as a sheet winding portion, a whole nip mechanism 57 as a whole nip portion, and a both end nip mechanism 58 as both end nip portions are provided. Configured.

A rail 59 is laid along the pass line of the protective sheet 9 and a cylinder device 60 is installed on the frame 52. The slide base member 53
Is fitted to the rail 59, and the cylinder device 6
When the cylinder device 60 is extended and contracted, the cylinder device 60 can be moved forward and backward along the pass line of the protective sheet 9, respectively.

The unwinding roll 54 comprises the slide base member 5
It is arranged on the front side of 3 and allows the protective sheet 9 to be unwound. The unwinding roll 54 is a free roll having a brake mechanism and is not equipped with a unwinding drive mechanism. During the forward movement of the slide base member 53, the entire width of the protective sheet 9 is gripped by the entire nip mechanism 57 as described later. Therefore, during the forward movement of the slide base member 53, the protective sheet 9 is unwound from the unwinding roll 54. Will be issued.

The sticking roller 55 is the slide base member 5
3 is disposed adjacent to the unwinding roll 54, and is supported by the cylinder device 61 via a link mechanism 62. This sticking roller 55 is provided with a third roller before the protection sheet 9 is stuck.
The protective sheet 9 is pressed against the end of the surface 4 of the stamper 1 held by the arm mechanism 18 (FIG. 5), and when the slide base member 53 is moved forward, the entire surface 4 of the stamper 1 is
The protection sheet 9 unwound from the unwinding roll 54 is pressed and attached (FIG. 6). The sticking pressure of the sticking roller 55 is controlled by adjusting the air supply pressure to the cylinder device 61.

The cutting device 51 comprises a table 63, a cylinder device 64 as advancing and retracting means, a cutter holder 65 and a cutter blade 66. Furthermore, this cutting device 51
On the rear side of the slide base member 53, the protective sheet 9
It is arranged on the downstream side of the sticking roller 55 in the path line of. At the end of the forward movement of the slide base member 53,
The cutting device 51 is positioned at an appropriate position with respect to the vacuum chuck 31 of the third arm mechanism 18 which sucks and holds the stamper 1 to which the protective sheet 9 is stuck by the sticking roller 55.

The table 63 is configured to be rotatable by a rotary actuator 67 in both forward and reverse directions by 360 °. Further, the cylinder device 64 is installed on the table 63, and a cutter holder 65 is provided at the tip of the piston rod 68, and the cutter blade 65 is attached to the cutter holder 65.
6 is retained. The cutter blade 66 is a circular cutter blade having a blade all around.

The cylinder device 64 is attracted and held by the vacuum chuck 31 of the third arm mechanism 18 by the extension operation, and the cutter blade 6 is attached to the contact ring 3 of the stamper 1 to which the protective sheet 9 is attached by the attaching roller 55.
6 can be contacted. Further, in this abutting state, the table 63 rotates in either one of the forward direction and the reverse direction, whereby the cutter blade 66 rolls and the protective sheet 9 attached to the front surface 4 of the stamper 1 is removed. Be disconnected.

The winding roll 56 includes the frame 52.
The protective sheet 9 can be wound up by rotating the winding motor 69. The protective sheet 9 wound by the winding roll 56 is a remaining unnecessary portion obtained by cutting the portion (disk shape) attached to the surface 4 of the stamper 1 by the cutting device 51. In addition, the winding roll 56
Simultaneously operates when the slide base member 53 is returned,
At this time, the protective sheet 9 is wound up faster than the moving speed of the slide base member 53 to prevent the rolled-up protective sheet 9 from slackening.

The whole nip mechanism 57 is composed of a frame 52.
In the above, in the pass line of the protective sheet 9, it is arranged on the upstream side of the winding roll 56 and on the downstream side of the third arm mechanism 18. The whole nip mechanism 57 is a cylinder device 70.
The whole nip main bar 71 is installed in the main nip main bar 71 and the whole nip sub bar 72,
The entire width of the protective sheet 9 can be held. Here, the cylinder device 70 and the entire nip sub-bar 72 are fixed to the frame 52.

In the entire nip mechanism 57, the slide base member 53 moves forward and the sticking roller 55 causes the stamper 1 to move.
When the protective sheet 9 is attached to the front surface 4 of the sheet, and when the third arm mechanism 18 moves up with respect to the sheet attaching mechanism 50 after the protective sheet 9 attached to the stamper 1 is cut by the cutting device 51, Hold the entire width of the protective sheet 9.

The both end nip mechanism 58 is installed in the slide base member 53 between the sticking roller 55 and the cutting device 51 on the pass line of the protective sheet 9.
In the both-end nip mechanism 58, a pair of cylinder devices 73 facing the slide base member 53 are connected with a nip roll 74 via a link mechanism.
The nip roll 74 and the nip bar 75 can grip both ends of the protective sheet 9 in the width direction. Here, similarly to the cylinder device 73, the nip bar 75 is also arranged on the pair of slide base members 53 so as to face each other.

The both-end nip mechanism 58 is provided when the third arm mechanism 18 moves up with respect to the sheet attaching mechanism 50 after the protective sheet 9 attached to the stamper 1 is cut by the cutting device 51, and when the slide base member 53. Returned,
In addition, when the take-up roll 56 winds up an unnecessary portion of the protective sheet 9, both end portions in the width direction of the protective sheet 9 are gripped.

The protective sheet sticking device 13 configured as described above operates as follows. First, the third arm mechanism 18 lowers the stamper 1 toward the sheet attaching mechanism 50 with the back surface 5 of the stamper 1 being vacuum-adsorbed by the vacuum chuck 31 and the front surface 4 being downward (FIG. 5). At this time, in the sheet attaching mechanism 50, the slide base member 53 is in the backward movement end position, and the entire nip mechanism 57 is in a state of gripping the entire width of the protective sheet 9. This lowered stamper 1
The end thereof abuts on the sticking roller 55 which is already in the raised position.

When the end portion of the stamper 1 sucked and held by the third arm mechanism 18 comes into contact with the sticking roller 55, the slide base member 53 moves forward, and the sticking roller 55 rolls to move the protective sheet 9 onto the stamper 1. Affix to the surface 4 of the.
At this time, since the entire nip mechanism 57 grips the entire protection sheet 9, no tension acts on the winding roll 56, and the protection sheet 9 is unwound from the unwinding roll 54.

At the end of the forward movement of the slide base member 53, the cutting device 51 is positioned at an appropriate position with respect to the stamper 1 sucked and held by the third arm mechanism 18. At this point, the both-end nip mechanism 58 grips both ends of the protective sheet 9, and the cutter blade 66 of the cutting device 51 rises to come into contact with the contact ring 3 of the stamper 1 suction-held by the third arm mechanism 18. In this state, the table 53 rotates 360 ° in either the forward direction or the reverse direction, and the cutter blade 66 rolls to cut the protective sheet 9 attached to the stamper 1 into a circular shape.

When the cutting of the protective sheet 9 is completed,
The third arm mechanism 18 ascends while holding the stamper 1 by suction. After that, the whole nip mechanism 57 releases the grip of the protective sheet 9 and the slide base member 53 moves back, and at the same time, the winding roll 56 starts winding the protective sheet 9. When the return movement of the slide base member 53 is completed,
The whole nip mechanism 57 grips the protective sheet 9, the both-end nip mechanism 58 releases the both ends of the protective sheet 9, the winding roll 56 stops the winding operation of the protective sheet 9, and the sheet attaching mechanism 50 Preparation for attaching the protective sheet 9 to the next stamper 1 is completed.

When the protective sheet 9 is attached to the stamper 1 next time, the table 63 of the cutting device 51 is rotated 360 ° in the direction opposite to the previous rotation direction, and the cutter blade 66 is attached to the stamper 1. The protective sheet 9 is cut.

[E] Back surface polishing apparatus (FIG. 1, FIG. 9, FIG.
(FIGS. 13 and 14) As shown in FIG. 9, the back surface polishing apparatus 14 as a thin plate polishing apparatus includes a holding table 76 for holding the stamper 1 as a thin plate, a first polishing unit 77 and a second polishing unit as polishing means. A unit 78, a vacuum source (not shown) as negative pressure applying means, a cooling water nozzle 79 for injecting cooling water,
And a scattering prevention pan 85 for preventing scattering of the cooling water attached to the stamper 1, and the first polishing unit 77.
And the second polishing unit 78 polishes the back surface 5 of the stamper 1.

As shown in FIG. 10, the holding table 76
The seal portion 81 is erected and welded to the body portion 80 made of, for example, an aluminum material, and the suction plate 82 is accommodated in the area surrounded by the seal portion 81, and is mounted on the mounting surface 83 of the body portion 80. It was done. Suction plate 82
Is made of a porous material, for example, made of trifluoroethylene chloride resin, and has pores with a diameter of 0.1 mm of 1 cm.
There are about 5,100 in ² . Others, this adsorption plate 8
The specifications of No. 2 are shown in Table 1. The stamper 1 is placed on the surface of the suction plate 82 in contact with the surface 4 having the recording surface 6 as another flat surface.

[0059]

[Table 1]

The body portion 80 has a mounting surface 83 on which the suction plate 82 is mounted, which is subjected to precision grinding and subjected to, for example, alumite treatment. In this body part 80,
The negative pressure communication passage 84 connected to the vacuum source is mounted on the mounting surface 83.
Is formed by opening. The negative pressure from the vacuum source acts on a large number of pores of the suction plate 82 through the negative pressure communication passage 84, and sucks and holds almost the entire surface 4 of the stamper 1.

The holding table 76 configured as described above.
Is rotated at a low speed or at a high speed (for example, 1000 rpm) by a rotary drive motor (not shown). The low speed rotation is performed during the polishing of the stamper 1, and the high speed rotation is performed during the cleaning of the stamper 1 and the dry-off.

The first polishing unit 77 and the second polishing unit 78 are arranged on both sides of the holding table 76 as shown in FIG. 1, and can be moved toward and away from the holding table 76 along the rail 86. It The first polishing unit 77 is provided with a polishing tape 87 for rough polishing, and the second polishing unit 78 is provided with a polishing tape 88 for finish polishing and has the same structure.

That is, in the first polishing unit 77 and the second polishing unit 78, as shown in FIG. 9, an unwinding roll 90, a guide roll 91, a pressure roll 92, a feed roll 93, a nip roll 94, and a winding roll are provided on the substrate 89. The take-up roll 95 is arranged. The polishing tapes 87 and 88 unwound from the unwinding roll 90 are wound around the guide roll 91, the pressure roll 92, and the feed roll 93, and are wound up by the winding roll 95.

The unwinding roll 90 is a free roll having a braking function. The nip roll 94 holds the polishing tapes 87 and 88 together with the feed roll 93. By rotating the nip roll 94 and the take-up roll 95, the polishing tapes 87 and 88 are fed by a predetermined amount. Further, the pressure roll 92 is installed on the polishing head 96, and when the polishing head 96 moves up and down, the pressure roll 92 approaches the stamper 1 on the holding table 76 and the polishing tape 87, 88 is pressed, or the processing roll 92 is separated from the stamper 1. The pressing force applied by the pressure roll 92 is adjustable.

The cooling water nozzle 79 corresponds to the holding table 7.
When the back surface 5 of the stamper 1 adsorbed and held by 6 is roughly polished by the first polishing unit 77 and finish-polished by the second polishing unit 78, cooling water is brought to a contact position between the polishing tapes 87 and 88 and the stamper 1. Inject. Further, the cooling water nozzle 79 is also sprayed when cleaning the polishing powder on the stamper 1 after the polishing by the first polishing units 77, 78 is completed.

The scattering prevention pan 85 is provided on the holding table 7
6 is arranged so as to cover the outer side of 6, and is being polished by the first polishing unit 77 and the second polishing unit 78, cleaning of polishing powder by cooling water, or the holding table 76.
Is rotated at a high speed to prevent the cooling water attached to the stamper 1 from being scattered during the shake-off drying.

The stamper 1 is carried in by the third arm mechanism 18 and the stamper 1 is carried out by the fourth arm mechanism 19 in the back surface polishing apparatus 14 configured as described above.

That is, the third arm mechanism 18 shown in FIGS. 1 and 13 moves to a position above the back surface polishing device 14 with the back surface 5 of the stamper 1 vacuum-sucked, and lowers the stamper 1 to move the back surface polishing device. 14 holding table 76
Put on. At this point, the third arm mechanism 18 moves the stamper 1
At the same time as releasing the vacuum suction of the holding table 7
The suction plate 82 of 6 suctions almost the entire surface 4 of the stamper 1 by vacuum. After that, the third arm mechanism 18 rises, moves to a position above the protective sheet sticking device 13, and stands by.

After the movement of the third arm mechanism 18, the first polishing unit 77 moves along the rail 86 and approaches the holding table 76. Next, as shown in FIG. 9, the pressure roll 92 of the holding table 76 is lowered to move the holding table 7
The polishing tape 87 is pressed against the back surface 5 of the stamper 1 on 6. In this state, the holding table 76 rotates at low speed, cooling water is sprayed from the cooling water nozzle 79, the polishing tape 87 is fed, and the back surface 5 of the stamper 1 is roughly polished by the first polishing unit 77.

After the rough polishing is performed for a predetermined time, the feeding of the polishing tape 87 is stopped, the pressure roll 92 is lifted and separated from the stamper 1, and the first polishing unit 77 is moved to the current position along the rail 86. Return. During this time, cooling water continues to be ejected from the cooling water nozzle 79, and the holding table 76 continues to rotate at a low speed.

Next, the second polishing unit 78 moves the rail 8
6, the pressing roll 92 of the second polishing unit 78 descends to press the polishing tape 88 against the back surface 5 of the stamper 1 on the holding table 76. In this state, the polishing tape 88 feeds,
The back surface 5 of the stamper 1 is finish-polished.

After this polishing is carried out for a predetermined time, the feed of the polishing tape 88 is stopped, the pressure roll 92 is raised and the polishing tape 88 is separated from the stamper 1, and then the second polishing unit 78 is moved to the rail 86. Return to the current position.

After finishing polishing as described above, the cooling water nozzle 7
The holding table 76 is rotated at a high speed (1000 rpm) while the cooling water is being sprayed from 9, and the polishing powder on the stamper 1 is cleaned for about 15 seconds.

Thereafter, the injection of the cooling water from the cooling water nozzle 79 is stopped, the high speed rotation of the holding table 76 is continued, and the stamper 1 on the holding table 76 is shaken off and dried.

After the rotation of the holding table 76 is stopped and the drying by shaking off is completed, the vacuum holding of the stamper 1 by the suction plate 82 of the holding table 76 is released.
After that, the fourth arm mechanism 19 shown in FIGS. 1 and 4 moves above the back surface polishing device 14, lowers the suction cup 34 to adsorb the stamper 1, and moves up to transfer the stamper 1 to the stacking device 15. .

[F] Stacking Device (FIGS. 1 and 14) The stacking device 15 is a stacking device in which a support plate 97 and a plurality of stack poles 98 are erected in a horizontal direction and can move up and down with respect to the support plate 97. And a section 99. One stamper 1 is locked to the horizontally arranged stack pole 98 with the surface 4 facing downward.
Are stored in the stack section 99. The stack portion 99 can accommodate, for example, 10 stampers 1.

The back surface polishing device 14 is operated by the fourth arm mechanism 19.
The stamper 1 transferred from is moved between the stack poles 98 of the stack portion 99 by the lateral movement of the fourth arm mechanism 19. In this state, the fourth arm mechanism 19 releases the suction of the stamper 1 by the suction cup 34, locks the stamper 1 on the stack pole 98, and stores the stamper 1 in the stack portion 99. After storing the stamper 1, the fourth arm mechanism 19 separates from the stacking device 15, and the stacking part 99 descends by one pitch and stops. In this way, a predetermined number, for example, 10 stampers 1 are stored in the stack portion 99.

[G] Effects in Processing Device for Cleaning Optical Disk Stamper (1) According to the processing device 10 for cleaning optical disk stamper, the stamper cleaning / drying device 12, the protective sheet attaching device 13, the back surface polishing device 14, Since each of the stacking device 15 and the stamper transfer device 20 holds the recording surface 6 of the stamper 1 downward to process the stamper 1, recording of the stamper 1 is performed in each of the devices 12, 13, 14, 15 and 20. It is possible to prevent dust from adhering to the surface 6. Therefore, the stamper 1 can manufacture an optical disk of good quality, such as a CD-ROM.

(2) According to the stamper cleaning / drying device 12, the stamper 1 is supported by the ball 45A of the ball plunger 45 of the support member 37 in a point contact state,
Further, at the time of high speed rotation during drying, the outer peripheral end surface of the contact ring 3 of the stamper 1 partially abuts the support wall 43 to prevent the stamper 1 from protruding, so that the support member 37 directly grips or holds the stamper 1. There is no member to do. Therefore, the stamper 1 has no trace of the cleaning liquid (pure water) attached to the gripping or holding member after the cleaning and drying.

(3) According to the stamper cleaning / drying device 12, since the stamper 1 is supported by the support member 37 with the recording surface 6 arranged below, the recording surface 6 of the stamper 1 is dried during and after drying. It is possible to prevent dust and the like from adhering.

(4) According to the protective sheet attaching device 13, the sheet attaching mechanism 50 attaches the protective sheet to the surface 4 of the stamper 1 with the vacuum chuck 31 of the third arm mechanism 18 with the surface 4 of the stamper 1 facing downward. Since the adhesive sheet 9 is attached, the protective sheet 9 can be attached without dust on the surface 4 of the stamper 1.

(5) According to the protective sheet sticking device 13, the forward movement of the slide base member 53 causes the protective sheet 9 to be unwound by the predetermined unrolling amount from the unwinding roll 54. The amount of protrusion can be controlled by the amount of forward movement of the slide base member 53. Further, the cutting device 51 causes the third arm mechanism 18 to move by the forward movement of the slide base member 53.
Since it is positioned at a predetermined position with respect to the vacuum chuck 31, the positioning of the cutting device 51 can be performed by the forward movement of the slide base member 53. Thus, the unwinding amount of the protective sheet 9 from the unwinding roll 54 and the cutting device 51.
Positioning can be achieved with high accuracy with a simple structure.

(6) According to the protection sheet sticking device 13, when the slide base member 53 moves forward and the sticking roller 55 sticks the protection sheet 9 to the surface 4 of the stamper 1, the whole nip mechanism 57 operates. Since the entire width of the protective sheet 9 is gripped by this, it is possible to prevent the tension acting on the protective sheet 9 from acting on the winding roll 56 at this time. Also,
The slide base member 53 moves back and the winding roll 56
When the protective sheet 9 is wound up, the both-end nip mechanism 58
Operates to hold both ends of the protective sheet 9 in the width direction,
At this time, it is possible to prevent the protection sheet 9 from wrinkling. Further, the sheet attaching mechanism 50 of the third arm mechanism 18
Since the entire nip mechanism 57 and the both-end nip mechanism 58 are activated during the ascent, the protective sheet 9 attached to the surface 4 of the stamper 1 and the unnecessary portion of the protective sheet 9 cut by the cutting device 51 are separated. It can be implemented well. In this way, with a simple structure, complicated tension control of the protective sheet 9 can be realized.

(7) According to the cutting device 51, the table 63
Is rotated in either one of the forward and reverse directions to cut the protective sheet 9 attached to one stamper 1, and then,
Rotate the table 63 in the other direction to move the other stamper 1
Since the protective sheet 9 attached to is cut, the twisting phenomenon of the piping (not shown) connected to the cylinder device 64 and the wiring (not shown) from the sensor 100 (FIG. 5) for detecting the up / down state of the cutter holder 65. Can be prevented.
Moreover, since the third arm mechanism 18 that supports the stamper 1 may be in a fixed state, it is not necessary to devise a means for rotating the third arm mechanism 18.

(8) According to the cutting device 51, the cutter blade 66
Is a circular cutter blade and cuts the protective sheet 9 attached to the surface 4 of the stamper 1 while rolling, so that the position where the cutter blade 66 contacts the protective sheet 9 of the stamper 1 is not biased to a specific position. It becomes the entire circumference. Therefore, the life of the cutter blade 66 can be extended.

(9) According to the back surface polishing apparatus 14, almost the entire surface 4 of the stamper 1 is sucked by the negative pressure from the large number of pores of the porous body forming the suction plate 82 of the holding table 76. Since it is sucked and held by the plate 82, the stamper 1 is not partially elastically deformed even by this sucking and holding. As a result, the first polishing unit 77 and the second polishing unit 78 can uniformly polish the back surface 5 of the stamper 1.

(10) According to the back surface polishing apparatus 14, since the suction plate 82 of the holding table 76 sucks and holds almost the entire surface 4 of the stamper 1 having the recording surface 6, the back surface 5 of the stamper 1 is held. The polishing can be performed uniformly, and no suction mark as a defective polishing portion remains on the back surface 5 of the stamper 1. Therefore, the defective polishing portion (suction mark) on the back surface 5 of the stamper 1 is C
It is not transferred to an optical disc such as a D-ROM and the appearance of this optical disc can be improved.

In the above embodiment, the stamper cleaning /
In the drying device 12, as shown in FIG.
Although the magnet 46 is installed in each of the support frames 42 of No. 7, the magnet 46 may be omitted. Further, in the stamper cleaning / drying device 12, the case where the support protrusion is the ball 45A of the ball plunger 45 has been described.
The protrusion may be integrally provided on the base surface 42A.

Further, as shown in FIG. 8, in the cutting device 51 of the protective sheet sticking device 13, the cutter blade 66 has a circular shape, but the cutting edge has a curved surface and the table 63 has a curved surface.
The protective sheet 9 may be cut by rotating in both the forward and reverse directions.

Further, in the back surface polishing apparatus 14, as shown in FIG.
Although the first polishing unit 77 and the second polishing unit 78 are provided with the polishing tape as shown in FIG. 3, they may be provided with a grindstone.

Further, although the resist cleaning device 11, the stamper cleaning / drying device 12, the protective sheet attaching device 13, the back surface polishing device 14 and the cutting device 51 have been described as being applied to the stamper 1 for CD-ROM manufacturing, It may be applied to other members.

[0092]

As described above, according to the sheet sticking apparatus of the present invention, it is possible to stick a sheet to the sheet sticking surface of the work piece in a state where dust is not attached to the sheet sticking surface.

[Brief description of drawings]

FIG. 1 is an overall perspective view showing a treatment facility for cleaning an optical disk stamper to which a protective sheet sticking apparatus, which is one embodiment of a sheet sticking apparatus according to the present invention, is applied.

FIG. 2 is a cross-sectional view showing the stamper cleaning / drying device of FIG.

3 (A) is a partial plan view showing the support member of FIG. 2, and FIG. 3 (B) is a sectional view taken along line IIIB-IIIB of FIG. 3 (A).

FIG. 4 shows the lower nozzle of FIG. 2, (A) being a plan view and (B) being a longitudinal sectional view.

5 is a side view of the protective sheet sticking apparatus of FIG. 1 before a sheet is stuck.

FIG. 6 is a side view of the protective sheet sticking apparatus of FIG. 1 after the sheets are stuck.

FIG. 7 is a view on arrow VII of FIG. 5;

FIG. 8 is a view on arrow VIII in FIG.

FIG. 9 is a view taken along arrow IX showing the back surface polishing apparatus of FIG.

FIG. 10 is a partial cross-sectional view showing the holding table of FIG.

11 (A) is a front view showing the first arm mechanism of FIG. 1, and FIG. 11 (B) is an XIB of FIG. 11 (A).
It is an arrow view.

FIG. 12 is a side view showing the second arm mechanism of FIG. 1.

13 (A) is a front view showing the third arm mechanism of FIG. 1, and FIG. 13 (B) is XIII of FIG. 13 (A).
FIG.

14 (A) is a front view showing the fourth arm mechanism of FIG. 1, and FIGS. 14 (B) and 14 (C) are FIG.
It is a XIVB arrow line view and a XIVC arrow line view of (A), respectively.

15 (A) is a plan view showing the stamper of FIG. 1, and FIG. 15 (B) is a sectional view taken along the line XVB-XVB of FIG. 15 (A).

[Explanation of symbols]

 1 Stamper 4 Front Side of Stamper 5 Back Side of Stamper 6 Recording Side of Stamper 9 Protective Sheet 10 Processing Equipment for Cleaning Stamper for Optical Disk 12 Stamper Cleaning / Drying Device 13 Protective Sheet Sticking Device 14 Backside Polishing Device 17 Second Arm Mechanism 18 3rd Arm mechanism 19 Fourth arm mechanism 20 Stamper transfer device 31 Vacuum chuck 37 Support member 38 Upper nozzle 39 Lower nozzle 42 Support frame 43 Support wall 45 Ball plunger 45A Ball 50 Sheet attaching mechanism 51 Cutting device 52 Frame 53 Slide base member 54 Unwinding Roll 55 Sticking roller 56 Winding roll 57 Overall nip mechanism 58 Both end nip mechanism 63 Table 64 Cylinder device 66 Cutter blade 67 Rotary actuator 71 Overall nip main bar 74 Nip roll 76 Holding table 77 First polishing unit 78 Second polishing unit 82 Suction plate 84 Negative pressure communication passage

Claims (4)

[Claims] 1. A gripping part that grips a sheet sticking surface of a work piece downward and can be raised and lowered, and a sheet sticking mechanism that sticks a sheet to the sheet sticking surface of the work piece gripped by the gripping portion. And a cutting device that cuts unnecessary portions of the sheet attached to the attachment surface. 2. The sheet attaching mechanism includes a slide base that reciprocates with respect to a frame along a path line of the sheet, a sheet unwinding portion that is installed on the slide base, and that unwinds the sheet, and the slide base. Installed, the sheet unwound from the sheet unwinding unit,
A sticking roller that is pressed and stuck to the sheet sticking surface of the workpiece held by the gripping part, and is installed in the frame,
A sheet winding unit configured to wind an unnecessary portion of the sheet, and the cutting device is installed on a downstream side of the sticking roller in a path line of the sheet among the slide bases, The sheet sticking according to claim 1, wherein the forward movement of the slide base causes the sheet to be unwound by a predetermined unwinding amount from the sheet unwinding section, and the cutting device is positioned at a predetermined position with respect to the grip section. apparatus. 3. The frame is provided with an entire nip portion that holds the entire width of the sheet on the upstream side of the winding portion in the sheet pass line, and the entire nip portion is moved forward and pasted by the slide base. At the time of sticking the sheet by the roller, and holding the full width of the sheet at the time of raising the gripping portion with respect to the sheet sticking mechanism, the slide base, in the path line of the sheet, between the sticking roller and the cutting device, Both-end nip portions for holding both ends in the width direction of the sheet are installed. The both-end nip portions are moved back and forth of the slide base and at the time of winding the sheet by the sheet winding portion, and the grip portion is raised with respect to the sheet attaching mechanism. The sheet sticking apparatus according to claim 2, wherein both ends of the sheet in the width direction are held at times. 4. The sheet sticking apparatus according to claim 1, wherein the workpiece is a stamper for manufacturing an optical disc, and the sheet sticking surface is a surface having a recording surface of the stamper.