JPH09261943A - Linear motor driver - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate a signal transmission between a primary side and a secondary side and improve the reliability of an operation. SOLUTION: A pair of rail-type electrode units 7 are provided in the longitudinal direction of a bed 1 of which the primary side of a linear motor consists. A pair of sliders 10 which hold balls as rolling elements are provided on a movable table 2 of which the secondary side of the linear motor consists. An operation power supply is supplied to the pair of the rail-type electrodes 7 and supplied to a linear scale sensor unit, an optical modulation circuit, etc., which are provided on the secondary side. Further, a chargeable battery and/or a chargeable capacitor are connected to the pair of the sliders 10 to eliminate spike noises produced by the rolling balls.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor driving device used in a motion mechanism section of, for example, a machine tool or an industrial robot, and in particular, between a primary side and a secondary side constituting a linear motor. The present invention relates to a linear motor drive device capable of eliminating the signal transmission cable and improving the operation reliability.

[0002]

2. Description of the Related Art Linear motor drives are widely used in linear motion mechanisms such as machine tools and industrial robots to move an object to be moved to a highly accurate position. A linear motor of this type is composed of a primary side and a secondary side. Generally, the primary side is the power feeding side and the fixed side, and the secondary side is the movable side. A linear motor as a drive source is provided with a guide unit and the like as a linear motor drive device.

An armature coil and a drive control circuit for supplying a driving current to the armature coil are provided on the power supply side which constitutes the primary side, and the movable side which constitutes the secondary side is provided. , A field magnet is attached, and by supplying a current to the armature coil, a thrust force based on Fleming's left-hand rule that occurs between the primary side and the secondary side is the secondary side with respect to the primary side. It is configured to move the movable side.

Position detecting means for detecting the relative position are disposed on the primary side and the secondary side.
The position detecting means includes a linear magnetic scale arranged in the longitudinal direction on the primary side and a magnetoelectric conversion element (hole) arranged on the secondary side so as to face the magnetic pole magnetized on the linear magnetic scale. (Effect element) and the like.

With this configuration, a signal proportional to the change in the magnetic flux from the linear magnetic scale detected by the magnetoelectric conversion element is obtained to detect the relative position of the secondary side with respect to the primary side.

A flexible printed circuit board is generally used to transmit a position signal from a position detecting means including a magnetoelectric conversion element arranged on the secondary side to the drive control circuit on the primary side. The flexible printed circuit board is connected from the secondary side to the primary side.

[0007]

By the way, in a linear motor drive device to which a flexible printed circuit board for transmitting a position signal from the secondary side to the primary side is connected, the flexible printed circuit board operates the linear motor. Due to this, there is always a direct mechanical stress between the primary side and the secondary side.

Therefore, there is a concern that the flexible printed circuit board may be fatigued due to long-term use and the flexible printed circuit board may be broken. Therefore, there is a need to improve reliability so that the environment of equipment or the like using this type of linear motor drive device is not hindered.

In particular, the connection point between the primary side and the flexible printed circuit board and the connection point between the secondary side and the flexible printed circuit board are susceptible to mechanical stress, and mechanical stress is applied to the stressed portion. Although various measures that have not been proposed have been proposed, none of them have reached the fundamental solution.

Further, since the flexible printed circuit board connecting the primary side and the secondary side needs to be arranged so as to be always curved due to its own elasticity, the space occupied by this flexible printed circuit board is large and the device There are problems such as difficulty in downsizing.

The present invention has been made in view of these problems, and eliminates the flexible printed circuit board between the primary side and the secondary side of the linear motor driving device, that is, the cable for signal transmission. The present invention provides a linear motor drive device that can be formed in a smaller size while improving the operation reliability.

[0012]

A linear motor drive device according to the present invention is a linear motor drive device comprising a primary side and a secondary side, and the primary side and the secondary side make relative motion with each other by a guide means. There, on the primary side, a long bed, an armature coil group continuously arranged on the bed along the longitudinal direction, and on the bed along the longitudinal direction. A linear scale provided, a pair of rail-shaped electrode portions on the bed, at least one of which is insulated along the longitudinal direction, and a secondary electrode provided on one end in the longitudinal direction on the bed. A wireless reception unit that receives a position signal of the primary side, a movable table that is movable with respect to the primary side on the secondary side, and a movable table that is attached to the movable table and faces the armature coil group on the primary side. And along the moving direction A field magnet arranged as a pole, a rolling element that rolls the pair of rail-shaped electrode portions on the primary side with the movement of the movable table, and at least one of the movable table that holds the rolling element. An insulated slider, and an operating power source from the slider,
It is provided with a linear scale sensor unit that faces a primary-side linear scale and detects a relative position with respect to the primary side, and a wireless transmission unit that transmits a position signal from the linear scale sensor unit as a wireless signal. A linear motor drive device according to the present invention is the linear motor drive device, wherein a bed formed in an elongated shape is provided on the primary side and is continuously arranged on the bed along a longitudinal direction. Armature coil group provided, a linear scale arranged on the bed along the longitudinal direction, and a pair of rail-shaped electrodes arranged on the bed with at least one insulated along the longitudinal direction And a wireless receiver arranged at one end in the longitudinal direction on the bed to receive a position signal on the secondary side, and the secondary side has a movable table movable with respect to the primary side. A field magnet that is attached to the movable table and is arranged opposite to the armature coil group on the primary side in order to have different polarities along the moving direction; and on the primary side as the movable table moves. A pair of rail-shaped electrode parts Receiving rolling elements for moving a slider at least one of which is disposed insulated to the movable table to hold the rolling elements, the operating power from the slider,
A linear scale sensor section that detects a relative position to the primary side facing the linear scale of the primary side, and a wireless transmission section that transmits a position signal from the linear scale sensor section as a wireless signal are provided, and on the secondary side Spike noise prevention means for preventing the generation of spike noise is provided between the pair of sliders.

In this case, it is preferable that the wireless transmission / reception configured by the wireless transmission unit and the wireless reception unit is optical communication.

The spike noise prevention means is
A capacitor or a battery is desirable, and a capacitor is preferably connected in parallel to the battery.

In the position detecting means of the linear motor driving device, operating power is supplied to a pair of rail-shaped electrode portions arranged on an elongated bed constituting the primary side, and the rail-shaped electrode portions are rotated. An operating power source is taken into the secondary side from a pair of sliders holding the rolling element through the moving rolling element.

Then, the linear scale sensor section arranged on the secondary side operates by receiving the operating power source and receives the detection signal from the linear scale to calculate the relative position of the secondary side with respect to the primary side. The position signal of the relative position obtained from the linear scale sensor unit is transmitted from the wireless transmission unit to the primary side by a wireless signal to perform position detection. Therefore, with this configuration, it is possible to remove the signal transmission cable that connects the secondary side and the primary side.

The operating power supplied to the linear scale sensor section and the wireless transmission section is taken in through the rolling elements through a pair of sliders holding the rolling elements, and the rolling power of the rolling elements is used. Since high-level spike noise is likely to be mixed and interfere with the linear scale sensor unit and wireless communication (optical communication), the spike noise is generated due to the action of the capacitor or the battery between the pair of sliders. It is designed to be prevented.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a linear motor drive device according to the present invention will be described below with reference to the drawings.

The embodiments described below relate to a linear motor driving device using a linear DC motor. This linear DC motor is composed of a primary side and a secondary side. In this example, the primary side is the power feeding side and is the fixed side, and the secondary side is the movable side.

First, the guide means for guiding the primary side and the secondary side to each other will be described.

As shown in FIGS. 1 to 3, the guide means comprises a bed 1 formed on the primary side as a whole in a flat plate shape and elongated, and a longitudinal direction of the bed 1 formed on the secondary side. Table 2 to be moved along. As shown in FIGS. 1 and 3, a coil yoke 3 formed in a flat plate shape and having substantially the same length as the bed 1 is provided on the upper surface of the bed 1, and a plurality of bolts (hexagonal holes) are provided. Tsuki (see FIG. 3) 5 is fastened to the bed 1.

2 are provided on both sides of the upper surface of the coil yoke 3.
A rail-shaped electrode portion 7 is arranged along the longitudinal direction of the coil yoke 3 and fastened to the coil yoke 3 by a plurality of flat screws 8 (see FIG. 3).

The two rail-shaped electrode portions 7 forming the track and the electrode portion are arranged on the coil yoke 3 with the insulator 25 interposed therebetween, and the rail-shaped electrode portions 7 are fastened. The flat screw 8 is also made of, for example, ceramics, or the ceramics is embedded in the screw holes to ensure electrical insulation. Further, the rail-shaped electrode portion 7 may be fixed by adhesion or the like via the insulator 25. And, the rail-shaped electrode portion 7 is
One is a positive electrode (+) and the other is a negative electrode (-).

The rail-shaped electrode portion 7 may be insulated only on one rail-shaped electrode portion, for example, the positive electrode (+) side.

As shown in FIG. 4, the rail-shaped electrode portion 7
As a track, one track groove 7a having a substantially semicircular cross section is formed on the outer side of the track. As is apparent from FIGS. 1 and 3, a slider 10 is provided outside the rail-shaped electrode portion 7 as a slide table that is movable relative to the rail-shaped electrode portion 7. It is fastened to the lower surface of the table 2, which is the secondary side, by means of, for example, two insulated bolts 12 via an insulator 26. A plurality of sliders 10 of this embodiment are arranged in the rail-shaped electrode portion 7, two in this case, and a pair of four sliders, two in total, are arranged on the lower surface of the table 2.

Although all the sliders 10 are electrically insulated from the table 2, at least one of them, for example, the positive electrode (+) side may be insulated.

A rolling element circulation path (not shown) is formed in the slider 10, and a plurality of balls 13 as rolling elements are arranged and housed in the rolling element circulation path. These balls 13 circulate while rolling on the track grooves 7a of the rail-shaped electrode portion 7 as the slider 10 moves with respect to the rail-shaped electrode portion 7, and load between the rail-shaped electrode portion 7 and the slider 10. Receive.

As shown in FIG. 4, the slider 10 is
The casing 14 and end caps 16a, 16 connected to both ends of the casing 14 with countersunk screws 15
b, and seals 17a and 17b that are fastened together on the outer surfaces of the end caps 16a and 16b. In the rolling element circulation path, a load track groove is formed in the longitudinal direction of the casing 14 so as to face the track groove 7a of the rail-shaped electrode portion 7,
The load trackway consisting of these track grooves and the casing 14
And a return path formed through the end caps 16a and 16b so that both ends of the load track path and the return path communicate with each other. Made of. Therefore, the guide means rolls and guides the secondary table 2 that relatively moves in the longitudinal direction with respect to the primary elongated bed 1.

The guide means having the above-described structure is fastened by a plurality of bolts (not shown) to a flat mounting surface equipped on, for example, a machine tool (not shown). Therefore, as shown in FIG. 3, the bed 1 has a flat mounting bottom surface 1a for fixing to the mounting surface. As shown in FIGS. 1 to 3, a counterbore 1b and an insertion hole 1c are formed on both sides of the bed 1 for inserting the head and the screw of the bolt for fastening the bed, respectively. The bolt is buried in the counterbore 1b and the insertion hole 1c, and the bed 1
Does not project to the upper surface of. Further, as shown in FIGS. 1 and 2, for example, four screw holes 2a are formed at the four corners on the upper surface side of the table 2 which is movable with respect to the bed 1, and the work to be equipped with the drive device. A table (not shown) provided in a device such as a machine is provided with these screw holes 2a.
It is fastened to the table 2 by a bolt (not shown) that is screwed into.

Next, the primary side and the secondary side of the linear DC motor, which constitutes the drive device by being mutually added with the guide means having the above-mentioned structure, will be described in detail.

First, as shown in FIGS. 1 to 3 and 5, on the primary side, the coil yoke 3 mounted on the bed 1 and the length of the coil yoke 3 on the upper surface side of the coil yoke 3. Coil board 20 arranged along the direction
And, on the lower surface side of the coil substrate 20, that is, the coil yoke 3 side, for example, 14 armature coils 22 that are attached and carried in a line along the direction in which the table 2 should move, and the respective electric machines. It has a circuit board 30 for supplying power to the child coil 22. Each armature coil 22 is wound in a substantially rectangular ring shape. Further, as shown in FIGS. 3 and 5, the coil substrate 20 is provided with Hall effect elements 43 corresponding to the respective armature coils 22.

Each armature coil 22 and coil substrate 2
0 is a countersunk screw 24 as a fastening member that is inserted into each of the armature coils 22 by two, for example.
It is fastened together with the coil yoke 3 with the coil substrate 20 facing outward.

Further, as shown in FIGS. 1, 3 and 5,
The circuit board 30 is disposed in parallel with the coil board 20 in the recess of the lower surface of the bed 1 with the coil yoke 3 as the upper surface side, and is fastened to the bed 1 by a plurality of bolts (with hexagonal holes) 5. ing. The bolts 5 also serve to fasten the coil yoke 3 to the bed 1.

As shown in FIG. 5, the circuit board 30 is
A plurality of division parts 35 each provided with a drive circuit composed of electronic components 33, 34 and the like are connected. These divisions 35
Are provided corresponding to two armature coils of each of the 14 armature coils 22 provided side by side, and the number is 7 in this case.
It is made.

The drive circuit provided in each division section 35 includes one set of circuit portions for supplying an exciting current to one armature coil, that is, a circuit corresponding to two armature coils.

As shown in FIGS. 3 and 5, the coil substrate 20 and the circuit substrate 30 which are arranged apart from each other with the bed 1 and the coil yoke 3 interposed therebetween are provided on the mutually opposing surface sides of the both substrates. They are connected by a plurality of male and female connectors 63 and 64 as connecting means, in this case, seven each.

On the other hand, regarding the secondary side of the linear DC motor, as shown in FIGS. 1 and 3, a magnet yoke 68 fixed to the lower surface side of the table 2 and each of the armature coils 22 on the primary side are provided. The magnet yoke 68 facing each other
And a field magnet 69 fixed to the lower surface of the. As shown in FIG. 6, the field magnet 69 is formed in a rectangular plate shape as a whole, and has N and S along the direction A of relative movement between the primary side and the secondary side, that is, along the longitudinal direction of the bed 1.
Are arranged and magnetized so that a plurality of magnetic poles, for example, five poles are alternately arranged.

Further, in the drive device, the position detecting means for detecting the relative position between the primary side and the secondary side, that is, the relative position between the bed 1 and the table 2 has the following structure. It is provided.

The position detecting means is a linear magnetic scale 71 as a detected portion provided on the bed 1 on the primary side shown in FIGS. 1 to 3, and a secondary magnetic scale corresponding to the linear magnetic scale 71 on the secondary side. It comprises a linear scale sensor unit 72 arranged on the table 2 and a wireless transmission / reception unit as a signal transmission unit for transmitting the position signal of which the position is detected.

In the linear magnetic scale 71, N and S magnetic poles are alternately magnetized in multiple pitches along the longitudinal direction of the bed 1 at a fine pitch, and an origin signal magnetizing portion is formed at one end. . Then, in the linear scale sensor unit 72,
A magnetic resistance element (MR element: not shown) for origin detection is arranged, and two magnetoelectric conversion elements (not shown) composed of A-phase and B-phase Hall effect elements are arranged with respect to each other with respect to the pitch. It is arranged to be offset by one half. With this configuration, position signals of the A phase and the B phase are obtained, and the movement direction is determined together with the detection of the relative position.

Then, the linear scale sensor unit 72
The position signal composed of the A phase and the B phase obtained by the above is transmitted to the power supply voltage supply device (not shown) arranged on the primary side by the wireless transmission / reception means including the wireless transmission unit and the wireless reception unit described later. . The power supply voltage supply device receives the position signal from the secondary side and supplies a predetermined current to the armature coil 22. By supplying this current, thrust based on Fleming's left-hand rule is generated between both the armature coil 22 on the primary side and the field magnet 69 on the secondary side. At this time, for example, if the bed 1 on the primary side is the fixed side, the table 2 on the secondary side moves by this thrust. Further, the position of the table 2 with respect to the bed 1 where it has moved is detected, and the position signal is fed back to the power supply voltage supply device by the wireless transmission / reception means, so that the driving direction and the stop position of the table 2 are controlled.

The wireless transmission / reception means is composed of a wireless transmission section arranged on the table 2 on the secondary side and a wireless reception section arranged on the bed 1 on the primary side. First, as shown in FIGS. 1 and 2, the wireless transmission unit 81 is fitted into a rectangular notch 2b formed on the end face of the table 2 in the moving direction and fixed by an adhesive or the like. On the other hand, the wireless receiving portion 82 is fitted into a rectangular notch 11a formed in the stopper member 11 at the end of the bed 1 in the longitudinal direction and fixed by an adhesive material or the like.

The wireless transmission unit 81 and the wireless reception unit 82 are always arranged at positions facing each other no matter which position the secondary table 2 moves relative to the primary bed 1. Therefore, optical communication is performed by a wireless signal, and the position signal of the table 2 with respect to the bed 1 is transmitted from the secondary side to the primary side by this optical communication. In addition,
The wireless transmission unit 81 and the wireless reception unit 82 are arranged at positions facing each other, but transmission / reception may be performed by changing the transmission path via a mirror or the like. In this case, the wireless transmission unit 81 and the wireless reception unit 82 do not have to be at the positions facing each other.

FIG. 7 shows the structure of the linear scale sensor section.

As shown in FIG. 7, the A-phase and B-phase output from the magnetoelectric conversion elements (Hall effect elements) 43a and 43b.
The output waveform of the phase is input to the amplifier circuits 101a and 101b. The amplifier circuits 101a and 101b have A /
D conversion circuits 102a and 102b, latch circuit 103a
And 103b and a multiplexer (MPX) 104 are sequentially connected, and the output of the multiplexer 104 is the CPU.
(Control circuit) 105 is input. A memory (ROM) 107, a memory (RAM) 110, an up / down counter 108 as a counting unit, and a D / A conversion circuit 109 are connected to the CPU 105.

The A / D conversion circuits 102a and 102b
Converts the analog waveform level-amplified by the amplifier circuits 101a and 101b at the preceding stage into binarized data and inputs the respective data to the latch circuits 103a and 103b. The latch circuits 103a and 103b are
The A / D conversion circuit 10 for synchronously processing the data converted by the A / D conversion circuits 102a and 102b.
The data of 2a and 102b are latched and held.
The held data is input to the multiplexer 104. The multiplexer 104 includes a latch circuit 1
Since the data latched by 03a and 103b cannot be output at the same time, time division processing is performed and C
Output to the PU 105.

As the initial operation, the CPU 105 drives the table 2 to move to the reference position and moves to the magnetic resistance element (M
The R element) resets the scale position data stored in the memory (RAM) 110 in response to a signal generated by detecting the magnetized portion as the origin, and the table 2 is moved to a desired position by this reset command. Then, continuous waveforms of A phase and B phase having different phases of 90 degrees are obtained from the magnetoelectric conversion elements 43a and 43b. By comparing the different data, the moving direction and distance of the table 2 are calculated.

The data calculated by the CPU 105 is analog-converted in the D / A conversion circuit 109,
The signal is transmitted to the wireless transmission unit 81 via an optical modulation circuit (not shown), and is optically transmitted as a wireless signal from the wireless transmission unit 81. The modulated light thus optically transmitted is received by the wireless reception unit 82 and converted into an analog signal in the wireless reception unit 82. This analog signal is demodulated into a position signal through a decoding circuit (not shown), and given to a power supply voltage supply device (not shown) that supplies a drive current to the armature coil 22.

Here, the pair of rail-shaped electrode portions 7 in FIGS. 1 to 4 are supplied with operating power from the power supply voltage supply device to the linear scale sensor portion 72 and the like. For example, the positive power source is supplied to one rail-shaped electrode portion 7 which is insulated and attached to the coil yoke 3 via the insulator 25, and the negative power source is supplied to the other rail-shaped electrode portion 7.

The supplied operating power is supplied to the plurality of balls 1 as rolling elements housed in the rolling element circulation path (not shown) formed in the slider 10 constituting the secondary side.
A positive power source is supplied to the one slider 10 and a negative power source is supplied to the other slider 10 through 3. As shown in FIG. 3, each of the sliders 10 has an insulator 2
Although it is insulated by 6, it suffices that at least one is insulated and attached to the table 2 via the insulator 26. Therefore, the operating power supplied to the slider 10 is taken into the linear scale sensor unit and the like.

FIG. 8 shows a connection configuration on the secondary side from the positive power source and the negative power source supplied to the pair of sliders 10.

A battery 91 such as a rechargeable storage battery or nickel-cadmium battery as spike noise preventing means is connected between the pair of sliders 10, and a capacitor 92 is connected in parallel with the battery 91. ing. An optical modulation circuit 94 that supplies a modulation signal is connected to the linear scale sensor unit 72 and the wireless transmission unit 81 described above. That is, the linear scale sensor unit 72 and the light modulation circuit 94 obtain the operation power source from the pair of sliders 10.

By the way, the operating power supply for the pair of sliders 10 is in high-level spike noise because the slider 10 circulates in a conductive contact with the rail-shaped electrode portion 7 on the primary side through a plurality of balls 13. Is mixed in. Therefore, the battery 91 is connected to remove such high level spike noise and to perform power source compensation for momentary power source interruption. Since the battery 91 is charged by receiving power from the pair of sliders 10 during normal operation, it is desirable to use, for example, a storage battery or a nickel-cadmium battery.

Furthermore, by connecting a capacitor 92 in parallel with the battery 91 as shown in FIG. 8, the effect of removing the spike noise can be further increased.

[0055]

EXAMPLE In the above example, the battery 91 and the capacitor 92 are used.
Although the spike noise is removed by means of, the spike noise may be removed only by the capacitor 92.

Although the linear magnetic scale is used in the above embodiment, it is also applied to a linear scale for detecting a position signal using an optical signal and a linear scale for detecting a position by a method other than light. can do.

[0057]

As is apparent from the above description, in the linear motor drive device according to the present invention, the operating power supply is provided to the pair of rail-shaped electrode portions arranged on the elongated bed constituting the primary side. The operation power is supplied to the secondary side from the pair of sliders that hold the rolling elements, which are supplied and roll on the rail-shaped electrode portions. Then, the linear scale sensor unit arranged on the secondary side operates by receiving the operating power source,
Receiving the signal from the linear scale, the relative position of the secondary side with respect to the primary side is calculated. Further, the position signal obtained from the linear scale sensor unit is transmitted to the primary side as a wireless signal by the wireless transmission unit. Therefore, with this configuration, it is possible to remove the signal transmission cable connecting the secondary side and the primary side,
Compared with the conventional device equipped with a cable for signal transmission,
It is possible to eliminate a failure such as a disconnection due to mechanical stress of the cable and a factor for generating dust, and to provide a highly reliable linear motor drive device. Also,
The size of the device can be reduced. Further, since the linear motor drive device according to the present invention is constituted by connecting, for example, a storage battery or a nickel-cadmium battery between a pair of sliders, and in some cases further connecting a capacitor in parallel, it is caused by rolling of the ball. It is possible to effectively suppress spike noise and prevent malfunction of the linear scale sensor unit or the optical modulation circuit.

[Brief description of drawings]

FIG. 1 is a partially cutaway perspective view showing an embodiment of a linear motor drive device according to the present invention.

FIG. 2 is a plan view of the linear motor driving device shown in FIG.

FIG. 3 is a cross-sectional view taken along line BB in FIG. 2 in the direction of the arrow.

FIG. 4 is a perspective view showing a rail electrode portion and a slider portion included in the linear motor driving device shown in FIGS.

FIG. 5 is a circuit block diagram showing an embodiment of a linear motor drive device according to the present invention.

FIG. 6 is a perspective view of a field magnet, which is a constituent member on the secondary side.

7 is a block diagram showing a circuit configuration of a linear scale sensor unit as a position detecting means used in the linear motor drive device shown in FIG.

8 is a block diagram showing a secondary side power supply system of the linear motor drive device shown in FIG. 1.

[Explanation of symbols]

 1 bed 2 table 3 coil yoke 7 rail-shaped electrode part 10 slider 13 ball (rolling element) 20 coil substrate 22 armature coil 30 circuit board 43 magnetoelectric conversion element (Hall effect element) 54 basic board K (for circuit board) 59 basic Board C (for coil board) 68 Magnet yoke 69 Field magnet 71 Linear scale 72 Linear scale sensor section 81 Wireless transmission section 82 Wireless reception section 91 Battery 92 Capacitor

Claims (7)

[Claims] 1. A linear motor drive device comprising a primary side and a secondary side, the primary side and the secondary side performing relative movements relative to each other by guide means, wherein the primary side is formed in an elongated shape. A bed, an armature coil group continuously arranged on the bed along the longitudinal direction, a linear scale arranged on the bed along the longitudinal direction, and a longitudinal direction on the bed. A pair of rail-shaped electrode portions are provided along at least one of which is insulated, and a wireless receiving portion which is disposed at one end portion in the longitudinal direction on the bed and receives a position signal on the secondary side. A movable table that is movable with respect to the primary side on the secondary side; and a movable table that is attached to the movable table and that faces the primary side armature coil group and sequentially has different poles along the moving direction. A field magnet installed, A rolling element that rolls a pair of rail-shaped electrode portions on the primary side as the table moves, a slider that holds the rolling element and at least one of which is arranged on the movable table so as to be insulated, and an operation from the slider A linear scale sensor unit that receives a power source and detects a relative position to the primary side facing the linear scale on the primary side, and a wireless transmission unit that transmits a position signal from the linear scale sensor unit as a wireless signal are provided. A linear motor drive device characterized by. 2. A linear motor drive device comprising a primary side and a secondary side, wherein the primary side and the secondary side make relative movement with each other by a guide means, and the primary side has a long shape. A bed, an armature coil group continuously arranged on the bed along the longitudinal direction, a linear scale arranged on the bed along the longitudinal direction, and a longitudinal direction on the bed. A pair of rail-shaped electrode portions are provided along at least one of which is insulated, and a wireless receiving portion which is disposed at one end portion in the longitudinal direction on the bed and receives a position signal on the secondary side. A movable table that is movable with respect to the primary side on the secondary side; and a movable table that is attached to the movable table and that faces the primary side armature coil group and sequentially has different poles along the moving direction. A field magnet installed, A rolling element that rolls a pair of rail-shaped electrode portions on the primary side as the table moves, a slider that holds the rolling element and at least one of which is arranged on the movable table so as to be insulated, and an operation from the slider A linear scale sensor unit that receives a power source and detects a relative position with respect to the primary side facing the linear scale on the primary side; and a wireless transmission unit that transmits a position signal from the linear scale sensor unit as a wireless signal, A linear motor drive device characterized in that spike noise prevention means for preventing generation of spike noise is provided between the pair of sliders on the secondary side. 3. The linear motor drive device according to claim 1, wherein the wireless transmission / reception configured by the wireless transmission unit and the wireless reception unit is optical communication. 4. The linear motor drive device according to claim 2, wherein the spike noise prevention unit is a capacitor. 5. The linear motor driving device according to claim 2, wherein the spike noise prevention unit is a battery. 6. The linear motor driving device according to claim 5, wherein the battery is a rechargeable storage battery or a nickel-cadmium battery. 7. The linear motor drive device according to claim 2, wherein the spike noise prevention means connects the battery and a capacitor in parallel.