JPH09251834A - Electrostatic relay - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a smaller electrostatic relay with its small number of parts and assembling processes and its high productivity. SOLUTION: An electrostatic relay is constituted by a frame shaped base 10, a movable contact electrode 20, and a fixed electrode 30. A movable electrode piece 22 protruded in the side direction of the movable contact electrode 20 and a fixed electrode piece 32 of the fixed electrode 30 are combined to fit in a non-contact state. In addition, the movable electrode 20 is slid in a horizontal direction by means of static electricity generated by applying a voltage between the movable electrode piece 22 and the fixed electrode piece 32, and the tip end face of a movable contact 23 is brought into contact with or is departed from the tip end face of fixed contacts 40 and 41.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an electrostatic relay.

[0002]

2. Description of the Related Art Heretofore, as an electrostatic relay, for example, as disclosed in Japanese Patent Laid-Open No. 312032/1991, there is one in which a movable electrode block 1 and a fixed electrode block 2 are superposed and integrated. In the movable electrode block 1, a movable electrode plate 3 is provided on a support spring portion 5 spanning a frame portion 1a via a narrow base portion 3d, and the movable electrode plate 3 is supported rotatably in the plate thickness direction. The movable electrode plate 3 is formed by cutting out the contact plates 3a, 3a by cutting out the periphery of the tip end thereof in a substantially U-shape. On the other hand, the fixed electrode block 2 has a fixed electrode portion 6 on a base material 2a made of a non-dielectric material such as flat glass.
And a pair of fixed contact layers 7, 7. In addition,
One end 6b of the fixed electrode 6 extends to one side of the base material 2a.

When a high DC voltage (for example, DC 100V) is applied between one end of the frame portion 1a and one end 6b of the fixed electrode portion 6 of the fixed electrode block 2, the movable electrode plate 3
Positive and negative charges are charged between the fixed electrode portion 6 and the fixed electrode portion 6, and the movable electrode plate 3 swings around the support spring portion 5 due to the electrostatic attraction generated between the two, and the contact plates 3a, 3a are fixed contact points. 7,
It contacts 7 and becomes conductive.

[0004]

However, since the electrostatic relay described above is composed of the movable electrode block 1 and the fixed electrode block 2 which are separate bodies, the number of parts and the number of assembling steps are large, and the productivity is high. Low. Further, when a predetermined driving force is required, the movable electrode plate 3 and the fixed electrode portion 6 having a plane area corresponding to the driving force are required. For this reason, there is a problem that the device becomes large in size in order to obtain a large driving force.

In view of the above problems, the present invention is based on the number of parts,
It is an object of the present invention to provide a smaller electrostatic relay that has a small number of assembly steps and high productivity.

[0006]

In order to achieve the above-mentioned object, an electrostatic relay according to the present invention comprises a frame-shaped base and a movable electrode main body spanning the frame-shaped base, and at least the movable electrode main body. Between a movable contact electrode having a movable contact protruding laterally on one side and a movable electrode piece protruding laterally in a comb shape on at least one side of the movable electrode body, and between the movable electrode pieces of the movable contact electrode. The movable electrode piece and the fixed electrode are composed of a fixed electrode in which a fixed electrode piece is projected in a comb shape so as to mesh with each other in a non-contact state, and a fixed contact that can be abutted on the tip surface of the movable contact of the movable contact electrode. The movable contact electrode is slid in the horizontal direction by an electrostatic force generated by applying a voltage between the pieces, and the tip surface of the movable contact is brought into contact with and separated from the tip surface of the fixed contact.

[0007] Further, the frame-shaped base and the movable electrode main body are bridged in parallel to the frame-shaped base, and the movable contact is provided so as to be able to abut on the central portion of the opposite side surface of the movable electrode main body. It is composed of a pair of movable contact electrodes in which movable electrode pieces protruding in a comb shape on both sides of are combined so as to mesh with each other in a non-contact state.A voltage is applied between the movable electrode pieces of the movable contact electrodes. The movable contact electrodes may be slid to each other by the electrostatic force generated as a result, and the leading end surfaces of the movable contacts may be abutted against each other so as to be brought into contact with and separated from each other.

Further, a frame-shaped base and a pair of movable electrode bodies are bridged in parallel with each other on the frame-shaped base, and movable contacts are provided so as to be able to abut on the central portions of the opposite side surfaces of the movable electrode body. A movable contact electrode having a comb-shaped protruding movable electrode piece on the side opposite to the side having the movable contact protrudingly engages with the movable electrode piece protruding comb-shaped in a non-contact state. A fixed electrode piece provided with a fixed electrode piece projecting, and the movable contact electrode is slid horizontally by an electrostatic force generated by applying a voltage between the movable electrode piece and the fixed electrode piece. The surfaces may be abutted against each other and separated from each other.

The tip of the frame-shaped base and the movable electrode body having a substantially L-shaped plane which is cantilevered by the frame-shaped base is used as a movable contact, and the movable electrode piece is formed in a comb-teeth shape on the movable electrode body. The movable contact electrode is provided so as to protrude, and the fixed electrode is formed by protruding the fixed electrode piece in a comb-teeth shape so as to mesh with the movable electrode piece of the movable contact electrode in a non-contact state. The movable contact electrode may be horizontally rotated by an electrostatic force generated by applying a voltage between the movable contact electrode and the one end, and the contact may be opened / closed via the tip surface of the movable contact.

Alternatively, the base of the movable contact electrode extending from the frame-shaped base may be thin.

Further, among the upper and lower surfaces of the frame-shaped base,
An insulating protective cover may be laminated and integrated on at least one surface.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment according to the present invention will be described with reference to the accompanying drawings shown in FIGS. First
In the electrostatic relay according to the embodiment, as shown in FIGS. 1 to 3, a movable contact electrode 20 is bridged over the center of a substantially square frame-shaped base 10. And this movable contact electrode 2
Fixed electrodes 30 and fixed contacts 40 and 41 are provided on both sides of 0, respectively.

The frame-shaped base 10 is made of a semiconductor substrate such as silicon, and can be manufactured by using an existing method such as dry etching or wet etching.

The movable contact electrode 20 supports the movable electrode body 21 at both ends so as to be bridged over the center of the frame-shaped base 10, and a plurality of protrusions are laterally provided on one side of the movable electrode body 21. A movable electrode piece 22 is provided by projecting, and a pair of projecting portions is laterally projected on the remaining one side to be a movable contact 23. The movable electrode body 21 has a thin portion 2 at both ends thereof.
By forming 4, 24, the sliding movement in the length direction is facilitated. The movable electrode piece 22
As shown in FIG. 1B, the movable contact 23 has an insulating thin film layer shown by a thick solid line on the upper surface of the base 10,
It is formed by providing a conductive layer on its surface. However, if sufficient insulation can be ensured only by the base 10 made of a semiconductor, it is not necessary to provide the insulating thin film layer.

The fixed electrode 30 is constructed by bridging a fixed electrode body 31 on the frame-shaped base 10 so as to be parallel to the electrode body 21 and supporting both ends thereof.
In this case, a plurality of protrusions are provided on one side so as to protrude laterally in a comb-teeth shape to form a fixed electrode piece 32. Furthermore, this fixed electrode piece 3
2 are combined so as to mesh with each other between the movable electrode pieces 22 in a non-contact state.

The fixed contacts 40, 41 are the frame-shaped base 1
It is formed by providing a conductive layer on a pair of protrusions protruding from one side of 0, and faces the tip end surface of the movable contact 26 so as to be able to abut.

In the case of forming the electrostatic relay having the above-described structure, for example, as shown in FIG. 3A, the front and back surfaces of the base 10 made of a silicon substrate having a near intrinsic property can endure wet etching. Insulating films 11 and 12 (for example, SiN) are formed (FIG.3 (b)). Then, after performing vapor deposition or sputtering on the surface of the insulating film 11,
After the photolithography process, the resist is removed by electrode etching to form the electrode 13 (FIG. 3C). Next, a mask pattern is formed around the insulating film 12, and the central portion is removed by wet etching (FIG. 3D).
Further, the central portion of the base 10 is wet-etched to a predetermined thickness (FIG. 3 (e)). Then, the movable portion 20 and the like are formed by dry etching (FIG. 3F). Finally, a contact (not shown) is formed at a predetermined position of the electrode 13 by vapor deposition, sputtering or the like, thereby completing the manufacturing. Note that, for convenience of description, a cross-sectional view showing a manufacturing process of the electrostatic relay is partially omitted.

The operation of the electrostatic relay having the above structure will be described. First, the movable electrode piece 22 and the fixed electrode piece 32
When a voltage is not applied between and, the movable contact 23 is separated from the fixed contacts 40 and 41 because no electrostatic force is generated between them. When a voltage is applied to the movable electrode piece 22 and the fixed electrode piece 32, a repulsive electrostatic deposition force is generated between them. Therefore, the movable contact electrode 20 slides in the horizontal direction, and the tip surfaces of the movable contact 23 abut against the tip surfaces of the fixed contacts 40 and 41 to come into contact therewith. Then, when the application of the above-mentioned voltage is released, the movable contact 23 is moved to the fixed contact 40, by the spring force of the thin portion 24 of the movable contact electrode 20.
It separates from 41 and returns to the original state.

In the second embodiment, as shown in FIG. 4, in the above-described first embodiment, the movable electrode piece 22 is formed only on one side of the movable electrode body 21, whereas the remaining one side is also formed. This is the case where the movable electrode piece 25 is formed. The fixed electrode 33 corresponding to the added movable electrode piece 25 is provided. The fixed electrode 33 is formed by protruding a fixed electrode piece 35 from a fixed electrode body 34 in a comb-teeth shape, and the fixed electrode piece 35 is assembled so as to mesh with the movable electrode pieces 25 in a non-contact state. Further, in order to avoid a malfunction due to the provision of the movable electrode piece 25, a substantially Π-shaped movable contact 26 projects and opposes the fixed contacts 40 and 41 so as to be able to abut. The rest is almost the same as the above-described first embodiment, and the description is omitted.

According to this embodiment, the movable electrode piece 25 of the movable contact electrode 20 and the fixed electrode 3 are different from those of the first embodiment.
Since the electrostatic force generated between the fixed electrode piece 35 of No. 3 and the fixed electrode piece 35 can also be used, a larger driving force and a longer contact distance can be obtained.

In the third embodiment, as shown in FIG. 5, two sets of movable contacts are provided, while one of them is a movable contact electrode 20 and the other is a fixed electrode 30 in the above-described embodiment. This is the case where the electrodes 20 and 50 are used. That is, the one movable contact electrode 20 has a substantially Π-shaped movable contact 26 protruding from the center of one side of the movable electrode body 21 bridged on the frame-shaped base 10, and a plurality of protruding portions on both sides thereof. The movable electrode piece 22 is formed by protruding in a tooth shape. The other movable contact electrode 50 extends over the movable electrode main body 51 on the frame-shaped base 10 so as to be parallel to the electrode main body 21, and a pair of protrusions are provided at the center of one side of the electrode main body 21 to project the movable contact. 52 and 53, a plurality of protrusions are provided on both sides of the movable contacts 52 and 53 in a comb-like shape to form a movable electrode piece 54. The movable electrode piece 54 is assembled so as to mesh with the movable electrode pieces 22 in a non-contact state, and the movable contact 26 opposes the movable contacts 52 and 53 so as to be contactable and separable.

When a voltage is applied between the movable electrode pieces 22 and 54, an electrostatic attractive force is generated between them, and the movable contact 26 and the movable contacts 52 and 53 come into contact with each other to close the circuit. . Then, when the application of the above voltage is released, the spring force of the movable electrode bodies 21 and 51 restores both to the original state.

According to this embodiment, since both movable contact blocks are driven, there is an advantage that a large distance between contacts can be secured.

As shown in FIG. 6, the fourth embodiment is a case where the electrostatic attraction generated between the two movable contact electrodes 20 and 50 is used in the third embodiment described above, but This is the case where the electrostatic repulsive force, which is the repulsive force generated between the two movable contact electrodes 20, is used. That is, the frame-shaped base 10
A pair of movable contact electrodes 20, 20 are bridged in the center of, and fixed electrodes 30 are arranged in parallel on the outside thereof.
The movable electrode pieces 22 of the movable contact electrode 20 protruding in a comb shape are combined with the fixed electrode pieces 32 protruding in a comb shape so as to mesh with each other in a non-contact state.

Therefore, the movable contact electrodes 20, 20 slide relative to each other by the electrostatic deposition force generated by applying a voltage between the movable electrode piece 22 and the fixed electrode piece 32, and the movable contacts 23, 27 are moved. Hit and touch. Then, when the application of the above-mentioned voltage is released, the movable contact electrode is returned to the original state by the spring force of the movable electrode body 21.

In the fifth embodiment, as shown in FIG. 7, the above-described fourth embodiment is a case where the two movable contact electrodes 20, 20 are slid to open and close the contacts.
This is a case of rotating the pair of movable contact electrodes 20, 20 to open and close the contacts. That is, the substantially L-shaped movable contact electrodes 20, 20 extend from the vicinity of the corners of the frame-shaped base 10 so as to be point-symmetrical, and the front end surfaces of the two are opposed to each other so that they can be contacted and separated. The movable contact electrodes 20 and 20 have a movable electrode body 21.
The movable electrode piece 22 is provided in the shape of a comb. On the other hand, on the frame-shaped base 10, the movable electrode piece 2 of the movable contact electrode 20 is provided.
The fixed electrode piece 32 of the fixed electrode 30 is projected in a comb-teeth shape so as to mesh with each other in a non-contact state.

Therefore, when a voltage is applied between the movable electrode piece 22 and the fixed electrode piece 32, an electrostatic attractive force is generated, so that the movable contact electrodes 23, 23 rotate in the horizontal direction and the movable contact electrodes 23, 23 move. The tip surfaces abut against each other and make contact. Then, when the application of the above voltage is released, the movable contact electrodes 20, 20 are restored to their original state by the spring force of the movable electrode body 21. According to the present embodiment, since the movable contact electrode 20 has a cantilever structure, there is an advantage that it can be displaced by a small electrostatic force and drive power can be saved.

As shown in FIG. 8, the sixth embodiment is a case where the above-described embodiment has one normally open contact, whereas the sixth embodiment has a normally open contact and a normally closed contact. That is, the movable electrode body 21 of the movable contact electrode 20 is bridged over the central portion of the frame-shaped base 10, and the fixed electrodes 33 are provided on both sides of the movable electrode body 21.
Is arranged. In the movable contact electrode 20, substantially Π-shaped movable contacts 26 and 27 project from the central portion of the movable electrode body 21 in opposite directions, and movable electrode pieces 22 and 22 are formed in a comb shape on both sides thereof. It is projected. on the other hand,
The fixed electrode 33 is formed in a substantially F-shape by providing a fixed electrode piece 35 protruding in a comb shape on a movable electrode body 34 extending from the inner edge of the frame-shaped base 10. The fixed electrode piece 35 is combined with the movable electrode piece 22 so as to mesh with each other in a non-contact state. Further, the frame-shaped base 10
Has fixed contacts 40, 41 and 42, 43 which can be brought into contact with and separated from the movable contacts 26 and 27, respectively.

Therefore, when no voltage is applied between the movable electrode piece 22 of the movable contact electrode 20 and the fixed electrode piece 35 of the fixed electrode 33, the movable contact 26 is separated from the fixed contacts 40 and 41. On the other hand, the movable contact 27 is in contact with the fixed contacts 42 and 43. Then, the movable electrode piece 22 of the movable contact electrode 20 and the fixed electrode piece 3 of the fixed electrode 33.
When a voltage is appropriately applied between the movable contact electrode 20 and the movable contact electrode 5, the movable contact electrode 20 slides in the horizontal direction by the electrostatic attractive force and the electrostatic deposition force generated thereby, and the movable contact 27 causes the fixed contact 4 to move.
After separating from 2, 43, the movable contact 26 is fixed contact 4
Contact 0,41. Then, when the application of the above-mentioned voltage is released, the movable contact electrode 20 returns to its original state by the spring force of the movable electrode body 21. According to this embodiment, a large driving force and a long distance between contacts can be obtained, and an electrostatic relay capable of simultaneously opening and closing two circuits can be obtained.

The seventh embodiment is an electrostatic relay having two normally open contacts, as shown in FIG. That is, the fixed electrode body 31 of the fixed electrode 30 is bridged in the center of the frame-shaped base 10, and the movable contact electrodes 20, 20 are bridged in parallel on both sides thereof. The fixed electrode 30 has fixed electrode pieces 32 laterally protruding from both sides of the fixed electrode body 31 in a comb shape. On the other hand, the movable contact electrode 20 is the fixed electrode body 3
A movable electrode piece 22 is provided on one side of the fixed electrode piece 32 so as to project in a comb-teeth shape, and the fixed electrode pieces 32 are combined so as to mesh with each other in a non-contact state. Further, the movable contact electrode 20 is provided with a movable contact 23 on the side opposite to the movable electrode piece 22. The movable contact 2 is formed on the inner surface of the frame-shaped base 10.
A pair of fixed contacts 40, 4 that can be abutted against the tip surface of
1 is formed.

Therefore, when a voltage is appropriately applied between the fixed electrode piece 32 of the fixed electrode 30 and the movable electrode piece 22 of the movable contact electrode 20, the movable contact electrode 20 is moved by the electrostatic deposition force generated between them. The movable contact 23 slides in the horizontal direction, the movable contact 23 contacts the fixed contacts 40 and 41, and the circuit is closed. Then, when the application of the voltage is released, the movable contact electrode 20 returns to the original state by the spring force of the electrode body 21. The two circuits may be opened and closed at the same time, or only one circuit may be opened and closed, by selecting the method of applying the voltage. According to the present embodiment, since the fixed electrode 30 can be shared, there is an advantage that a space can be saved and an even smaller electrostatic relay can be obtained.

In the eighth embodiment, as shown in FIG. 10, the fixed electrode 30 is bridged over the central portion of the frame-shaped base 10, and the constituent elements are arranged on both sides of the fixed electrode 30 as in the fourth embodiment shown in FIG. This is the case where the electrostatic relay has two normally open contacts. The operation is the same as that of the above-described fourth embodiment, and the description thereof will be omitted. According to the present embodiment, as in the above-described seventh embodiment, there is an advantage that the fixed electrode 30 is shared and the space can be saved, and an even smaller electrostatic relay can be obtained.

As shown in FIG. 11, the ninth embodiment has the same basic structure as that of the second embodiment shown in FIG. 4, except that the movable contact electrode in the peripheral portion of the frame-shaped base 10 is different. The point is that through holes 14, 14 are provided in the vicinity of the thin portion 24 of 20. This is because the through hole 14 is provided to facilitate deformation of the base 10 and to prevent stress concentration on the thin portion 24 of the movable contact electrode 20. This has the advantage that the thin portion 24 is less likely to break and the life of the product is extended. Others are the same as in the second embodiment described above,
Description is omitted.

In the above embodiment, the electrostatic relay whose upper and lower surfaces are opened has been described. However, if necessary, the protective covers 60 and 62 shown in FIGS. May be assembled and covered. A notch 61 for electrode extraction is provided at the peripheral edge of the protective cover 60.

In the above-mentioned embodiment, the frame-shaped base 1
Although the upper surface of 0 is flush, the present invention is not limited to this, and the lower surface of the frame-shaped base 10 may be flush. Further, the central portion of the frame-shaped base 10 may be lower than the peripheral edge portion by one step, and the movable contact electrode, the fixed electrode, the fixed contact, etc. may be formed therein.

[0036]

As is apparent from the above description, according to the electrostatic relay according to claim 1 of the present invention, according to the present invention, all the constituent parts are cut out from one board, so that the number of parts is increased. ， The assembly man-hour is reduced, and the electrostatic relay with high productivity can be obtained. Further, the movable electrode piece and the fixed electrode piece are each provided in a comb-teeth shape so as to be engaged with each other so as to mesh with each other in a non-contact state, whereby the creeping distance between the two is increased. For this reason, a desired electrostatic force can be secured without widening the facing area significantly as in the conventional example. As a result, an electrostatic relay that is much smaller than the conventional example can be obtained. According to the second aspect, a pair of movable contact electrodes are combined, and the electrostatic force generated between the two is used to slide the two to open and close the contacts. Therefore, the distance between the contacts can be increased, and an electrostatic relay having desired insulation characteristics can be obtained. According to the third aspect, since the movable contact is located on the side opposite to the movable electrode piece, an electrostatic relay having high insulation characteristics can be obtained. According to the fourth aspect, since the movable contact electrode is supported in a cantilever manner, the movable contact electrode is more easily bent than in the case where both ends are supported. Therefore, power consumption for driving the movable contact electrode can be saved. According to claim 5,
Since the base of the movable contact electrode is thin, it is easily bent. For this reason, the entire movable contact electrode is easily slid, the power consumption can be saved, stress concentration can be avoided, and the life can be extended. According to the sixth aspect, an electrostatic relay in which the insulating protective covers are laminated and covered on the upper and lower surfaces of the frame-shaped base can be obtained. Therefore, not only the mechanical strength can be improved, but also the degree of freedom in the mounting direction is increased and the usability is improved.

[Brief description of drawings]

1A and 1B show a first embodiment of an electrostatic relay according to the present invention, wherein FIG. 1A is a perspective view and FIG. 1B is A- in FIG. 1A.
It is an A line end view.

FIG. 2 is a plan view of the electrostatic relay shown in FIG.

FIG. 3 is a process drawing showing the method of manufacturing the electrostatic relay.

FIG. 4 is a perspective view showing a second embodiment of an electrostatic relay according to the present invention.

FIG. 5 is a perspective view showing a third embodiment of an electrostatic relay according to the present invention.

FIG. 6 is a perspective view showing a fourth embodiment of an electrostatic relay according to the present invention.

FIG. 7 is a perspective view showing a fifth embodiment of an electrostatic relay according to the present invention.

FIG. 8 is a perspective view showing a sixth embodiment of the electrostatic relay according to the present invention.

FIG. 9 is a perspective view showing a seventh embodiment of an electrostatic relay according to the present invention.

FIG. 10 is a perspective view showing an eighth embodiment of the electrostatic relay according to the present invention.

FIG. 11 is a perspective view showing a ninth embodiment of the electrostatic relay according to the present invention.

FIG. 12 is a perspective view showing a protective cover that covers the upper surface of the electrostatic relay according to the present invention.

FIG. 13 is a perspective view showing a protective cover that covers the lower surface of the electrostatic relay according to the present invention.

FIG. 14 is an exploded perspective view of an electrostatic relay according to a conventional example.

[Explanation of symbols]

10 ... Frame-shaped base, 11, 12 ... Insulating thin film, 13 ... Electrode, 14 ... Through hole, 20, 50 ... Movable contact electrode 21, 21
51 ... Movable electrode body, 30 ... Fixed electrode, 31 ... Fixed electrode body, 22, 25, 54 ... Movable electrode piece, 23, 26, 2
7, 52, 53 ... Movable contact, 40, 41 ... Fixed contact, 6
0,62 ... Protective cover.

Claims (6)

[Claims] 1. A frame-shaped base and a movable electrode body spanning the frame-shaped base. A movable contact is laterally provided on at least one side of the movable electrode body, and at least one side of the movable electrode body. A movable contact electrode having a movable electrode piece protruding sideways in a comb shape, and a fixed electrode piece protruding in a comb shape so as to mesh with the movable electrode piece of the movable contact electrode in a non-contact state. An electrode and a fixed contact capable of abutting against the tip surface of the movable contact of the movable contact electrode, and the movable contact electrode is horizontally moved by an electrostatic force generated by applying a voltage between the movable electrode piece and the fixed electrode piece. An electrostatic relay characterized by slidingly moving and bringing the tip surface of the movable contact into contact with and away from the tip surface of the fixed contact. 2. A frame-shaped base, and a movable electrode body is bridged in parallel to the frame-shaped base, and a movable contact is provided so as to be able to abut on the central portion of the side surface of the movable electrode body facing the movable electrode body. It is composed of a pair of movable contact electrodes, which are formed by combing the movable electrode pieces projecting in a comb shape on both sides of the movable contact electrode so as to mesh with each other in a non-contact state, and a voltage is applied between the movable electrode pieces of the movable contact electrodes. An electrostatic relay characterized in that the movable contact electrodes are slid with each other by the electrostatic force generated by the above, and the tip surfaces of the movable contacts are brought into contact with each other to come into contact with and separate from each other. 3. A frame-shaped base, and a pair of movable electrode main bodies are laid across the frame-shaped base in parallel, and a movable contact is provided so as to be able to abut on the central portion of the side surface of the movable electrode main body that is buttable. The movable contact electrode having a comb-shaped protruding movable electrode piece on the side opposite to the side having the protruding movable contact is engaged with the movable contact electrode protruding comb-shaped in a non-contact state. A fixed electrode piece provided with a fixed electrode piece projecting, and the movable contact electrode is slid horizontally by an electrostatic force generated by applying a voltage between the movable electrode piece and the fixed electrode piece. An electrostatic relay characterized in that surfaces are brought into contact with each other and are brought into contact with and separated from each other. 4. A frame-shaped base and a tip of a movable electrode body having a substantially L-shaped plane that is cantilevered and supported by the frame-shaped base are used as movable contacts, and the movable electrode body is provided with comb-shaped teeth. The movable contact electrode is provided in a protruding manner, and the fixed electrode is formed by protruding a fixed electrode piece in a comb shape so as to mesh with the movable electrode piece of the movable contact electrode in a non-contact state. An electrostatic relay characterized in that a movable contact electrode is horizontally rotated by an electrostatic force generated by applying a voltage between the movable contact electrode and the one end, and the contact is opened and closed through a tip surface of the movable contact. 5. The electrostatic relay according to claim 1, wherein a base portion of the movable contact electrode extending from the frame-shaped base has a thin wall. 6. The electrostatic relay according to claim 1, wherein an insulating protective cover is laminated and integrated on at least one surface of the upper and lower surfaces of the frame-shaped base.