JPH09159616A - External view inspection apparatus for substrate - Google Patents

External view inspection apparatus for substrate

Info

Publication number
JPH09159616A
JPH09159616A JP31545495A JP31545495A JPH09159616A JP H09159616 A JPH09159616 A JP H09159616A JP 31545495 A JP31545495 A JP 31545495A JP 31545495 A JP31545495 A JP 31545495A JP H09159616 A JPH09159616 A JP H09159616A
Authority
JP
Japan
Prior art keywords
substrate
carrier
substrates
holding
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31545495A
Other languages
Japanese (ja)
Other versions
JP3590170B2 (en
Inventor
Masataka Maeda
真孝 前田
Original Assignee
Olympus Optical Co Ltd
オリンパス光学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd, オリンパス光学工業株式会社 filed Critical Olympus Optical Co Ltd
Priority to JP31545495A priority Critical patent/JP3590170B2/en
Publication of JPH09159616A publication Critical patent/JPH09159616A/en
Application granted granted Critical
Publication of JP3590170B2 publication Critical patent/JP3590170B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

(57) Abstract: Provided is a substrate appearance inspection device that steadily holds a substrate to be inspected and makes inspection in a short time even if the substrate to be inspected becomes large and thin. SOLUTION: A carrier 17 for accommodating a plurality of substrates 12 inclined from a horizontal state by a certain angle, and the accommodating device 13 for selectively retaining the substrates 12 accommodated in the carrier 17.
The storage device 1 is moved toward or away from the storage device 1
3, and a substrate holding device 15 including a guide mechanism for inserting or removing the substrate 3 into or from the substrate 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate visual inspection apparatus used for visual inspection of large substrates such as semiconductor wafers and liquid crystal glass plates.

[0002]

2. Description of the Related Art Conventionally, an apparatus having a structure as shown in JP-A-5-109849 has been used as an apparatus for inspecting the appearance of a large substrate (hereinafter simply referred to as a substrate) such as a semiconductor wafer or a liquid crystal glass plate. Was there. FIG. 4 is a perspective view thereof. The board appearance inspection apparatus 1 is arranged behind the inspection apparatus body 2 and includes a storage device 4 capable of storing a plurality of substrates 3 such as liquid crystal glass plates and semiconductor wafers. An inspection device 5 for visually inspecting the substrate 3 and an operation unit 6 arranged in front of the inspection device body 2 for operating the inspection device body 2 are provided.

The storage device 4 is provided with a carrier 7 in which a plurality of substrates 3 can be arranged side by side in a horizontal direction at a predetermined interval, and a space between the plurality of substrates 3 arranged in the carrier 7 can be arranged. The suction holding arm 8 is inserted into the substrate, the suction holding arm 8 holds the substrate 3 by suction, and the substrate 3 is pulled out from the carrier 7 in a horizontal state and moved to the observation position.

The suction holding arm 8 tilts the substrate 3 while the substrate 3 is held and the tip side is lifted at the observation position. When the substrate 3 is tilted to a prescribed angle, the suction holding arm 8 is held. Is stopped, and light is emitted from the light sources 9, 9 arranged on the upper portion of the inspection apparatus body 2. The light emitted from the light sources 9, 9 is applied to the substrate 3 at the observation position via the reflecting mirrors 10, 10. In this state, the substrate 3
The suction-holding arm 8 holding is rotated and rocked. An observer located on the side of the operation unit 6 can visually recognize the damaged portion of the substrate 3 by the change in the reflected light reflected from the upper surface of the substrate 3.

[0005]

In the board appearance inspection apparatus 1 of FIG. 4 described above, the board 3 is horizontally arranged on the carrier 7. Therefore, as the substrate 3 becomes larger and thinner, the substrate 3 is bent in the direction of gravity in the carrier 7, and when the suction holding arm 8 is inserted into the space between the substrates 3, the substrate 3 and the suction holding arm 8 are inserted. There is a risk that the substrate 3 will be damaged due to interference with the. Therefore, in consideration of the bending of the substrate 3, in order to make the arrangement interval between the substrates 3 the same as the conventional size,
It is necessary to make the suction holding arm 8 thinner.

However, when the suction-holding arm 8 is made thin, the strength of the suction-holding arm 8 decreases, and the carrier 7
There is a possibility that the arm surface is bent when it is inserted into the substrate, and the substrate 3 cannot be surely sucked and held.

Further, since the substrate 3 is swung by the cantilever which lifts the tip side of the suction holding arm 8 during observation, when the suction holding arm 8 is made thin, the suction holding arm 8 itself vibrates during swinging. Will end up. Then, in order to suppress the vibration of the suction holding arm 8, it is necessary to reduce the speed of swinging the substrate 3 and reduce the moment of inertia, but this directly deteriorates the takt time for observing the substrate. Will be lost.

The present invention has been made in view of the above circumstances, and an object of the present invention is to hold a substrate steadily even if the substrate to be inspected is large and thin, and perform the inspection in a short time. It is to provide a board appearance inspection device that can perform the inspection.

[0009]

According to the first aspect of the present invention,
A housing means for housing a plurality of substrates at a certain angle from the horizontal state, a holding means capable of selectively holding the substrates housed in the housing means, and a direction in which the holding means approaches or separates from the housing means. And a guide mechanism for movably supporting and for inserting or removing the holding means with respect to the storage means.

As a result of such a construction, by operating the guide mechanism, the holding means is slanted by a certain angle in the accommodating means to move parallel to the accommodated substrate and is inserted into the accommodating means. . When the holding means inserted into the storage means selectively holds a predetermined substrate, the guide mechanism is actuated again to move the substrate in a direction away from the storage means. By this movement, the substrate held by the holding means is taken out from the storing means and moved to the inspection position. The appearance of the substrate is inspected by appropriately rotating the holding device by a rotating mechanism or the like while the substrate is held by the holding device.

Therefore, by storing the substrate at a certain angle with respect to the horizontal state, even if the substrate to be inspected becomes large or thin, the amount of bending due to gravity load can be made extremely small. The space between the substrates to be accommodated is sufficiently secured, and the holding means is not restricted in thickness and the like, so that the substrates can be reliably held.

According to a second aspect of the present invention, in the first aspect, the accommodating means arranges a carrier for accommodating a plurality of substrates in a horizontal state at a certain angle from the horizontal state.

According to a third aspect of the present invention, in the first aspect, the accommodating means arranges a carrier for accommodating a plurality of substrates in a vertical state, and inclines each substrate from the horizontal state by a predetermined angle. To be stored.

In any of the above configurations, when the substrate is taken out of the storage means, the substrate is already tilted in the direction in which the inspection is performed, so that the time for rotating the substrate is shortened. be able to.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION A substrate appearance inspection apparatus according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows the overall appearance configuration of a board appearance inspection apparatus 1
Reference numeral 1 denotes a storage device 13 that can store a plurality of substrates 12 in parallel from each other at a certain angle from a horizontal state, an operation device 14 that operates the substrate appearance inspection device 11, and a substrate stored in the storage device 13. A substrate holding device 15 for sucking and holding 12 and a lighting device 16 for illuminating the substrate 12 held by the substrate holding device 15 are provided.

FIG. 2 shows a more detailed structure of the storage device 13. The storage device 13 has a carrier 17 in which a plurality of substrates 12 are arranged in parallel at a predetermined interval, and the carrier 17 is mounted. A holding table 18 for placing and holding the table 18 and a lifting mechanism 19 for lifting the holding table 18 are provided.

The elevating mechanism 19 comprises a servo motor 20 for generating power and a transmission belt 21 for transmitting the driving force of the servo motor 20 to the elevating force transmission rod 22.

When the servomotor 20 is rotated in the forward and reverse directions, its driving force is transmitted to the lifting force transmission rod 22 via the transmission belt 21, and the lifting force transmission rod 22 rotates about its axis. With the rotation of the lifting force transmission rod 22, the holding table 18 moves up and down in parallel with the axial direction of the lifting force transmission rod 22.

Next, a detailed structure mainly around the substrate holding device 15 will be described with reference to FIG. In the figure, the substrate holding device 15 includes a suction holding arm 23 having a thickness that can be inserted into a space between a plurality of substrates 12 housed in a carrier 17, and a servo motor 24 for rotating the suction holding arm 23. An arm holding table 25 that holds the servo motor 24 and the suction holding arm 23 is provided.

A servo motor 26 as a power source for inserting / removing the suction holding arm 23 from / into the substrate 12 in the carrier 17 via the arm holding base 25.
And a transmission belt 28 for transmitting the driving force of the servo motor 26 to the pair of arm moving force transmission rods 27, 27.
28.

When the servomotor 26 is rotated in the forward and reverse directions, its driving force is transmitted to the arm moving force transmitting rods 27, 27 via the transmitting belts 28, 28, and the arm moving force transmitting rods 27, 27 both have their axes. Rotate around. As the arm moving force transmitting rods 27, 27 rotate, the arm holding base 25 moves back and forth in parallel with the axial direction of the arm moving force transmitting rods 27, 27, whereby the suction holding arm 2
3 is inserted into and removed from the space between the substrates 12 housed in the carrier 17.

At least three suction pads 29 are provided on the upper surface side of the suction holding arm 23, and these suction pads 29 are connected to a suction pump (not shown) via a suction passage.

The suction holding arm 23 is inserted into the space between the substrates 12 housed in the carrier 17, and the suction pad 29 is inserted.
When one substrate 12 is suction-held from the back surface thereof by the suction suction arm 23 by the suction force of the suction pump.
Even if the suction holding arm 23 is rotated, the substrate 12 is stably and surely sucked and held on the substrate 12 even if it is rotated.
Does not slide off the suction holding arm 23.

The operation of the above arrangement will be described. First, the servo motor 20 is rotationally driven in the forward direction so that the back surface of the plurality of substrates 12 housed in the carrier 17 to be inspected is at a position slightly higher than the upper surface of the suction holding arm 23. Then, the carrier 17 is moved down by a predetermined amount. The rotation of the servo motor 20 is stopped when the carrier 17 is set at a predetermined position.

Next, when the servo motor 26 is rotationally driven, the arm holding base 25 moves in the direction of approaching the carrier 17, and the suction holding arm 23 supported by the arm holding base 25 moves inside the carrier 17 accordingly. While being kept parallel to the substrate 12 of, a prescribed amount is inserted into the carrier 17,
At that time, the rotation of the servo motor 26 is stopped.

Then, the servo motor 20 is driven to rotate in the forward direction again, so that the upper surface of the suction holding arm 23 raises the substrate 12 to be inspected in the carrier 17 to a predetermined position, and the servo motor 20 is stopped. To be done.

At the same time, the suction pump described above operates to suck and hold the back surface of the substrate 12 by the suction pads 29 provided on the upper surface of the suction holding arm 23. In this way, the servo motor 26 is rotationally driven in a direction opposite to the above with the suction holding arm 23 sucking and holding the substrate 12, and the arm holding base 25 and the suction holding arm 23 are separated from the carrier 17. The substrate 12 is pulled out from the carrier 17. When the substrate 12 reaches the inspection position, the movement due to the rotation of the servo motor 26 is stopped.

Next, the servo motor 24 is driven to rotate, whereby the suction holding arm 23 is rotated to increase or decrease the tilt angle of the substrate 12 held by a specified amount. For example, the substrate 12
When the angle becomes a prescribed inclination angle, light is emitted from the illuminating device 16 arranged above the substrate visual inspection device 11 and is irradiated onto the substrate 12.

An observer located on the side of the operation device 14 can confirm the presence or absence of the damaged portion by the change of the reflected light from the substrate 12. The carrier 17 for accommodating the substrate 12 is arranged in a tilted state from the horizontal state in advance, and when the substrate 12 is pulled out from the carrier 17, the set angle of the carrier 17 is set so that the inspection surface can be observed already. Angle) is made to substantially match the tilt angle of the substrate 12 at the time of inspection.

With such a structure, the suction holding arm 23 is further rotated by the rotation drive of the servo motor 24.
Since it is possible to save the time required to rotate the substrate 12 held by, it is possible to shorten the takt time required for the inspection.

Further, since the carrier 17 for accommodating the substrate 12 is arranged so as to be inclined from the horizontal state by a certain angle, the size of the substrate 12 becomes large, or the substrate 12 becomes thin and easily bends due to its own weight. Even one
Since the vertical and horizontal vector components of the gravity weight of the substrate are dispersed in the state of being housed in the carrier 17, the amount of bending is significantly smaller than that in the state of being housed horizontally.

Therefore, it becomes possible to secure a sufficient space between the substrates 12 housed in the carrier 17,
When the suction-holding arm 23 is inserted into the carrier 17, the suction-holding arm 23 and the substrate 12 do not physically interfere with each other, and the suction-holding arm 23 does not need to be thinned and its mechanical strength is restricted. Never receive.

However, when the visual inspection is completed, the servo motors 24, 26 and 20 are processed in the reverse process of the case where the substrate 12 is pulled out from the carrier 17 and tilted to the inspection state.
Is driven to rotate, and the substrate 12 after the inspection is returned to the inside of the carrier 17 by the suction holding arm 23.

By repeating the above steps in sequence, the visual inspection of the plurality of substrates 12 housed in the carrier 17 is sequentially performed. Needless to say, it is possible to inspect by rotating or swinging the board according to the board inspection item.

The present invention is not limited to the above-described embodiment, but can be variously modified without departing from the scope of the invention. For example, if the angle at which the carrier 17 is inclined is arranged to match the angle at which the substrate 12 is inclined at the time of inspection, the rotation mechanism including the servo motor 24 is omitted and the substrate appearance inspection device 11 is made more compact. In addition, since it is not necessary to rotate the substrate 12 pulled out from the carrier 17 at the inspection position to further change the tilt angle at the time of the inspection, the takt time required for the inspection can be significantly reduced.

It is also possible to arrange the carrier 17 vertically and accommodate a large substrate in the carrier 17 with a certain angle from the horizontal state. In this case, since the carrier 17 can be vertically moved up and down, Since the center of gravity does not move and it does not largely project in the lateral direction, stable operation can be ensured and downsizing can be achieved.

[0037]

As described above, according to the present invention, there is provided a substrate visual inspection apparatus capable of securely holding a substrate and inspecting it in a short time even if the substrate to be inspected becomes large and thin. Can be provided.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an outer appearance configuration of an entire board appearance inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a storage device according to the embodiment.

FIG. 3 relates to the same embodiment

FIG. 4 is a perspective view illustrating the configuration of a conventional board appearance inspection device.

[Explanation of symbols]

 1, 11 ... Substrate appearance inspection device 2 ... Inspection device main body 3, 12 ... Substrate 4,13 ... Storage device 5 ... Inspection device 6 ... Operation part 7, 17 ... Carrier 8, 23 ... Adsorption holding arm 9 ... Light source 10 ... Reflection Mirror 14 ... Operating device 15 ... Substrate holding device 16 ... Illumination device 18 ... Holding table 19 ... Lifting mechanism 20 ... Servo motors 21, 28 ... Transmission belt 22 ... Lifting force transmission rod 23 ... Adsorption holding arm 24, 26 ... Servo motor 25 ... Arm support 27 ... Arm moving force transmission rod 29 ... Adsorption pad

Claims (3)

[Claims]
1. A storage means for storing a plurality of substrates tilted at a certain angle from a horizontal state, a holding means capable of selectively holding the substrates stored in the storage means, and the holding means approaching the storage means. Alternatively, there is provided a board appearance inspection device comprising a guide mechanism that is movably supported in a separating direction and that inserts or removes the holding means into or from the storage means.
2. The substrate visual inspection apparatus according to claim 1, wherein the storage means arranges a carrier for storing a plurality of substrates in a horizontal state with a certain angle of inclination from the horizontal state.
3. The storage means arranges a carrier for accommodating a plurality of substrates in a vertical state, and accommodates each of the substrates in the carrier at a certain angle from a horizontal state. Board visual inspection device.
JP31545495A 1995-12-04 1995-12-04 Substrate transfer device and substrate appearance inspection device using the same Expired - Fee Related JP3590170B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31545495A JP3590170B2 (en) 1995-12-04 1995-12-04 Substrate transfer device and substrate appearance inspection device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31545495A JP3590170B2 (en) 1995-12-04 1995-12-04 Substrate transfer device and substrate appearance inspection device using the same

Publications (2)

Publication Number Publication Date
JPH09159616A true JPH09159616A (en) 1997-06-20
JP3590170B2 JP3590170B2 (en) 2004-11-17

Family

ID=18065565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31545495A Expired - Fee Related JP3590170B2 (en) 1995-12-04 1995-12-04 Substrate transfer device and substrate appearance inspection device using the same

Country Status (1)

Country Link
JP (1) JP3590170B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003102561A1 (en) * 2002-05-30 2003-12-11 Olympus Corporation Substrate holding device and substrate inspection device
US7092067B2 (en) 2002-02-26 2006-08-15 Lg. Philips Lcd Co., Ltd. Liquid crystal panel, apparatus for inspecting the same, and method of fabricating liquid crystal display thereof
CN100354734C (en) * 2003-03-10 2007-12-12 飞而康公司 Automatic controller of liquid-crystal panel for panel crade of automatic detector and method thereof
KR100978262B1 (en) * 2005-12-29 2010-08-26 엘지디스플레이 주식회사 Apparatus for testing liquid crystal dispaly devce
CN102236197A (en) * 2010-04-23 2011-11-09 旺宏电子股份有限公司 Alignment fixture
JP2012084715A (en) * 2010-10-13 2012-04-26 Lapis Semiconductor Co Ltd Deflection correction device of substrate and extraction method of substrate
JP2016114784A (en) * 2014-12-15 2016-06-23 東京応化工業株式会社 Ultraviolet ray radiation device, ultraviolet ray radiation method, substrate processing device, and production method of substrate processing device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7092067B2 (en) 2002-02-26 2006-08-15 Lg. Philips Lcd Co., Ltd. Liquid crystal panel, apparatus for inspecting the same, and method of fabricating liquid crystal display thereof
US7259802B2 (en) 2002-02-26 2007-08-21 Lg.Philips Lcd Co., Ltd. Liquid crystal panel, apparatus for inspecting the same, and method of fabricating liquid crystal display thereof
WO2003102561A1 (en) * 2002-05-30 2003-12-11 Olympus Corporation Substrate holding device and substrate inspection device
CN100354734C (en) * 2003-03-10 2007-12-12 飞而康公司 Automatic controller of liquid-crystal panel for panel crade of automatic detector and method thereof
KR100978262B1 (en) * 2005-12-29 2010-08-26 엘지디스플레이 주식회사 Apparatus for testing liquid crystal dispaly devce
CN102236197A (en) * 2010-04-23 2011-11-09 旺宏电子股份有限公司 Alignment fixture
JP2012084715A (en) * 2010-10-13 2012-04-26 Lapis Semiconductor Co Ltd Deflection correction device of substrate and extraction method of substrate
JP2016114784A (en) * 2014-12-15 2016-06-23 東京応化工業株式会社 Ultraviolet ray radiation device, ultraviolet ray radiation method, substrate processing device, and production method of substrate processing device

Also Published As

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