JPH09138410A - Forming method of oriented film for liquid crystal display element - Google Patents

Forming method of oriented film for liquid crystal display element

Info

Publication number
JPH09138410A
JPH09138410A JP29445695A JP29445695A JPH09138410A JP H09138410 A JPH09138410 A JP H09138410A JP 29445695 A JP29445695 A JP 29445695A JP 29445695 A JP29445695 A JP 29445695A JP H09138410 A JPH09138410 A JP H09138410A
Authority
JP
Japan
Prior art keywords
alignment film
liquid crystal
ink jet
crystal display
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29445695A
Other languages
Japanese (ja)
Inventor
Takeshi Yamamoto
本 武 志 山
Hitoshi Tomii
井 等 富
Makoto Hasegawa
誠 長谷川
Muneharu Akiyoshi
吉 宗 治 秋
Akiko Ueno
埜 亜希子 上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP29445695A priority Critical patent/JPH09138410A/en
Publication of JPH09138410A publication Critical patent/JPH09138410A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a forming method of an oriented film for a liquid crystal display element so that an oriented film having uniform film thickness can be formed by arranging injection holes in such a manner that one line of injection holes is dislocated by a half pitch of nozzles from the adjacent line of injection holes. SOLUTION: The ink jet nozzle 2 used is an area-type one to inject a soln. to form an oriented film. The diameter of the injection hole 4 is, for example, 50μm and the pitch (p) of injection holes 4 in one line is, for example, 100μm. One line of injection holes is arranged as dislocated by a half pitch (p/2) to the adjacent line. By this method, a problem of irregular thickness due to variation in overlap amt. of liquid drops is prevented compared to a conventional method in which a line-type ink jet nozzle is used and a coating liquid is applied by controlling the relative velocity between an ink jet nozzle and a substrate or the timing of coating.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は液晶表示素子の配向
膜形成方法に関する。
TECHNICAL FIELD The present invention relates to a method for forming an alignment film of a liquid crystal display device.

【0002】[0002]

【従来の技術】近年、薄型軽量、低消費電力という大き
な利点をもつ液晶表示素子は、日本語ワードプロセッサ
やデスクトップパーソナルコンピュータ等のパーソナル
OA機器の表示装置として積極的に用いられている。液
晶表示素子(以下LCDともいう)のほとんどは、捩れ
ネマティック液晶を用いており、表示方式としては、こ
の中でも旋光モードと複屈折モードとの2つの方式に大
別できる。
2. Description of the Related Art In recent years, liquid crystal display elements, which have the great advantages of thinness, light weight, and low power consumption, have been actively used as display devices for personal OA equipment such as Japanese word processors and desktop personal computers. Most of liquid crystal display elements (hereinafter, also referred to as LCDs) use twisted nematic liquid crystal, and the display method can be roughly classified into two methods of an optical rotation mode and a birefringence mode.

【0003】旋光モードのLCDは、例えば90度捩れ
た分子配列をもつツイステッドネマティック(TN)形
液晶であり、原理的に白黒表示で、高いコントラスト比
と良好な階調表示性を示す。また応答速度が速い(数十
ミリ秒)ことから、時計や電卓、単純マトリクス駆動
や、スイッチング素子を各画素毎に具備したアクティブ
マトリクス駆動で、また、カラーフィルタと組み合わせ
たフルカラーの表示の液晶テレビなど(TFT(Thin F
ilm Transistor)−LCDやMIM(Metal Insulator
Metal)−LCD)に応用されている。
The LCD of the optical rotation mode is, for example, a twisted nematic (TN) type liquid crystal having a molecular arrangement twisted by 90 degrees, and in principle, displays in black and white, and exhibits a high contrast ratio and a good gradation display property. In addition, since the response speed is fast (several tens of milliseconds), it is a liquid crystal television with a clock, a calculator, a simple matrix drive, an active matrix drive equipped with a switching element for each pixel, and a full-color display combined with a color filter. Etc. (TFT (Thin F
ilm Transistor-LCD and MIM (Metal Insulator)
Metal) -LCD).

【0004】一方、複屈折モードの表示方式のLCD
は、一般に90度以上捩れた分子配列をもつスーパーツ
イスト(ST)形液晶で、急唆な電気光学特性をもつた
め、各画素ごとにスイッチング素子(薄膜トランジスタ
やダイオード)がなくても単純なマトリクス状の電極構
造でも時分割駆動により容易に大容量表示が得られる。
これらの液晶表示素子の表示を均一に行うためには基板
表面全面に液晶分子を均一に配向させることが必要であ
る。
On the other hand, a birefringence mode display type LCD
Is a super-twist (ST) type liquid crystal having a molecular arrangement twisted by 90 degrees or more, and has abrupt electro-optical characteristics. Therefore, each pixel does not have a switching element (thin film transistor or diode) and has a simple matrix shape. Even with this electrode structure, a large capacity display can be easily obtained by time-division driving.
In order to uniformly display these liquid crystal display elements, it is necessary to uniformly align liquid crystal molecules on the entire surface of the substrate.

【0005】液晶表示素子は、2枚の基板の電極の間に
液晶組成物を挟持し、2枚の基板の電極から液晶組成物
に電圧を印加し表示を行うものであり、電圧を印加した
時に均一な表示を行うためには、液晶分子にプレチルト
角(液晶分子の分子軸と配向膜表面とのなす角)を予め
与えることが必要である。このように、配向膜はプレチ
ルト角を与えることも重要な役割として担っている。
The liquid crystal display element is a device for sandwiching a liquid crystal composition between electrodes of two substrates and applying a voltage from the electrodes of the two substrates to the liquid crystal composition for display. At times, in order to perform uniform display, it is necessary to give a pretilt angle (angle between the molecular axis of the liquid crystal molecule and the surface of the alignment film) to the liquid crystal molecule in advance. Thus, the alignment film also plays an important role in giving a pretilt angle.

【0006】従来、これらの液晶表示素子の配向膜の形
成は、電極等が形成された基板上に例えばポリイミド等
の有機高分子化合物からなる薄膜をオフセット印刷によ
り形成した後、布などで軽く摩擦すること(ラビング処
理)によって行うのが一般的である。
Conventionally, the alignment film of these liquid crystal display elements is formed by forming a thin film of an organic polymer compound such as polyimide by offset printing on a substrate on which electrodes and the like are formed, and then lightly rubbing with a cloth or the like. It is generally performed by doing (rubbing process).

【0007】オフセット印刷によって配向膜を形成する
方法は、図8に示すように、まずアニロックスローラ5
2上にノズル50を介して配向膜材料、例えばポリイミ
ドを滴下し、ドクターローラ51をアニロックスローラ
52に押付けることによって上記滴下されたポリイミド
の厚さが均一となるように伸ばす。そしてこの均一とな
るように伸ばされたポリイミド膜を、版胴53上に設け
られた印刷版54上に転写し、印刷版54上に転写され
たポリイミド膜を基板60の表面に更に転写し、配向膜
62を形成する。
A method for forming an alignment film by offset printing is, as shown in FIG.
An alignment film material, for example, polyimide is dropped onto the nozzle 2 through the nozzle 50, and the doctor roller 51 is pressed against the anilox roller 52 to stretch the dropped polyimide so that the thickness of the polyimide becomes uniform. Then, this uniformly stretched polyimide film is transferred onto the printing plate 54 provided on the plate cylinder 53, and the polyimide film transferred onto the printing plate 54 is further transferred onto the surface of the substrate 60, The alignment film 62 is formed.

【0008】また、電極等が形成された基板表面に例え
ばポリイミド等の高分子化合物を直接に散布することに
よって配向膜を形成する方法も考えられている(特開昭
54−21862号公報、特開昭63−106727号
公報参照)。
Further, a method of forming an alignment film by directly spraying a high molecular compound such as polyimide on the surface of a substrate on which electrodes and the like are formed has been considered (Japanese Patent Laid-Open No. 54-21862). (See Japanese Laid-Open Patent Publication No. 63-106727).

【0009】[0009]

【発明が解決しようとする課題】オフセット印刷によっ
て配向膜を形成する方法は、印刷版54上に平坦化され
た配向膜材料の膜を基板表面に転写することにより配向
膜を形成するため、膜厚の均一性は良い。しかし、ドク
ターローラ51とアニックスローラ52に配向膜材料を
塗布する必要があるため、配向膜材料の使用効率が低い
という問題があった。
In the method of forming an alignment film by offset printing, the alignment film is formed by transferring the film of the alignment film material flattened on the printing plate 54 to the substrate surface. Thickness uniformity is good. However, there is a problem that the use efficiency of the alignment film material is low because it is necessary to apply the alignment film material to the doctor roller 51 and the anix roller 52.

【0010】一方、配向膜材料を基板表面に散布するこ
とによって配向膜を形成する方法は、配向膜材料の使用
効率が良いが、オフセット印刷のように間接部材上で平
坦化させる工程がないため、均一な膜厚分布を得ること
が困難である。
On the other hand, the method of forming the alignment film by spraying the alignment film material on the substrate surface has good use efficiency of the alignment film material, but there is no step of flattening on the indirect member like offset printing. However, it is difficult to obtain a uniform film thickness distribution.

【0011】このように上述の方式では配向膜材料の使
用効率と膜厚の均一性がトレードオフの関係にあるとい
う問題がある。
As described above, the above-mentioned method has a problem that there is a trade-off relationship between the use efficiency of the alignment film material and the uniformity of the film thickness.

【0012】この問題を解決するために、図6に示すよ
うにライン型インクジェットノズル12を用いて配向膜
を形成することが考えられている。このライン型インク
ジェットノズル12はインク噴出孔14が1列に配列さ
れているインクジェットノズルであって、供給口13か
ら注入された配向膜材料の溶液(以下、配向膜溶液とも
いう)を噴射指令信号に基づいて基板40に対して相対
的に移動しながら基板40に噴射塗布するものである。
In order to solve this problem, it has been considered to form an alignment film by using a line type ink jet nozzle 12 as shown in FIG. The line-type inkjet nozzle 12 is an inkjet nozzle in which the ink ejection holes 14 are arranged in one row, and a solution of an alignment film material injected from the supply port 13 (hereinafter, also referred to as an alignment film solution) is an injection command signal. Based on the above, the spray coating is performed on the substrate 40 while moving relative to the substrate 40.

【0013】このライン型インクジェットノズルを用い
て配向膜を形成する方法においては、配向膜材料の使用
効率が高いが配向膜溶液の液滴は常に基板40に対して
相対運動しているインクジェットノズル12より噴出さ
れるため、インクジェットノズル12の相対移動速度が
規定値よりずれた場合、または噴出のタイミングにずれ
が生じた場合に液滴の着弾点間に膜厚差が生じるという
問題がある。例えば、インクジェットノズル12に対す
る基板40の移動速度が規定値より遅い場合は、図7
(a)に示すように塗布された液滴35のオーバーラッ
プ量が大きくなり、配向膜の膜厚が所望の値よりも大き
くなる。また配向膜の塗布された領域も所望の形状でな
くなり、印刷位置精度の悪化とともに配向不良領域が発
生する可能性がある。一方、インクジェットノズル12
に対する基板40の移動速度が規定値より速い場合は、
図7(b)に示すように塗布された液滴35のオーバー
ラップ量が小さくなり(場合によって液滴同士が離
れ)、配向膜の膜厚が小さくなる。また、インクジェッ
トノズル12に対する基板40の速度が小さいときと同
様に、印刷領域も所望の形状とは異なり、上述のような
配向不良などの表示欠陥が発生するおそれがある。
In the method of forming an alignment film using this line type ink jet nozzle, the use efficiency of the alignment film material is high, but the droplets of the alignment film solution are always moving relative to the substrate 40. Since the ink is ejected more, there is a problem that a film thickness difference occurs between the landing points of the droplets when the relative movement speed of the inkjet nozzle 12 deviates from a specified value or when the ejection timing deviates. For example, when the moving speed of the substrate 40 with respect to the inkjet nozzle 12 is slower than a specified value,
As shown in (a), the overlap amount of the applied droplets 35 becomes large, and the film thickness of the alignment film becomes larger than a desired value. Further, the area where the alignment film is applied is not in a desired shape, and there is a possibility that the printing position accuracy is deteriorated and an alignment failure area is generated. On the other hand, the inkjet nozzle 12
When the moving speed of the substrate 40 with respect to is faster than the specified value,
As shown in FIG. 7B, the overlap amount of the applied droplets 35 becomes small (droplets are separated from each other in some cases), and the thickness of the alignment film becomes small. Further, as in the case where the speed of the substrate 40 with respect to the inkjet nozzle 12 is small, the print area also has a different shape from the desired shape, and the display defect such as the above-described alignment defect may occur.

【0014】本発明は上記事情を考慮してなされたもの
であって、膜厚分布が均一な配向膜を形成することので
きる液晶表示素子の配向膜形成方法を提供することを目
的とする。
The present invention has been made in view of the above circumstances, and an object thereof is to provide a method for forming an alignment film of a liquid crystal display device, which can form an alignment film having a uniform film thickness distribution.

【0015】[0015]

【課題を解決するための手段】本発明による液晶表示素
子の配向膜形成方法の第1の態様は、所定のピッチで各
行に配列される複数の噴出孔を有し、任意の行の噴出孔
は隣接する行の噴出孔の配列に対して前記ピッチの半分
だけずれるように配置されているエリア型のインクジェ
ットノズルを用いて配向膜溶液を基板に噴射塗布する工
程を備えていることを特徴とする。
A first aspect of the method for forming an alignment film of a liquid crystal display device according to the present invention has a plurality of ejection holes arranged in each row at a predetermined pitch, and the ejection holes of any row are provided. Includes spraying the alignment film solution onto the substrate by using an area type ink jet nozzle arranged so as to be displaced by half the pitch with respect to the arrangement of the ejection holes in adjacent rows. To do.

【0016】また本発明による液晶表示素子の配向膜形
成方法の第2の態様は、所定のピッチで一列に配列され
る複数の噴出孔を有するライン型のインクジェットノズ
ルを用い、このインクジェットノズルからの配向膜溶液
の次回の噴射は前回の噴射位置よりも基板の進行方向と
ほぼ直交する方向に前記ピッチの半分だけずらした位置
で行うようにしたことを特徴とする。
A second aspect of the method for forming an alignment film of a liquid crystal display device according to the present invention uses a line type ink jet nozzle having a plurality of ejection holes arranged in a line at a predetermined pitch. The next injection of the alignment film solution is performed at a position shifted from the previous injection position by a half of the pitch in a direction substantially orthogonal to the traveling direction of the substrate.

【0017】[0017]

【発明の実施の形態】本発明による液晶表示素子の配向
膜形成方法の第1の実施の形態を図1を参照して説明す
る。図1は本実施の形態の配向膜形成方法に用いられる
インクジェットノズル2の構成図である。このインクジ
ェットノズル2はエリア型のインクジェットノズルであ
って、配向膜溶液を噴出する噴出孔4が図示しない基板
に対向する面に例えば2500×2500個設けられて
いる(図1(b)参照)。噴出孔4の径は例えば50μ
mであり、各行の噴出孔4のピッチpは例えば100μ
mである。そして、任意の行の噴出孔4は上記行に隣接
する行の噴出孔4の配列に対して半ピッチ(=p/2)
だけずれて配置される(図1(b)参照)。
BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of a method for forming an alignment film of a liquid crystal display device according to the present invention will be described with reference to FIG. FIG. 1 is a configuration diagram of an inkjet nozzle 2 used in the alignment film forming method of the present embodiment. The inkjet nozzle 2 is an area type inkjet nozzle, and for example, 2500 × 2500 ejection holes 4 for ejecting the alignment film solution are provided on the surface facing the substrate (not shown) (see FIG. 1B). The diameter of the ejection hole 4 is, for example, 50 μ
m, and the pitch p of the ejection holes 4 in each row is 100 μ, for example.
m. Then, the ejection holes 4 in any row have a half pitch (= p / 2) with respect to the arrangement of the ejection holes 4 in the row adjacent to the above row.
They are arranged with a shift (see FIG. 1 (b)).

【0018】配向膜溶液は供給口3を介してインクジェ
ットノズル2に外部から送出され、噴射指令信号に基づ
いてインクジェットノズル2が動作することにより上記
噴出孔4から配向膜溶液が噴射される。なお、上記イン
クジェットノズル2は各噴出孔4からの噴射を独立に制
御することが可能な構成となっている。
The alignment film solution is sent from the outside to the ink jet nozzle 2 through the supply port 3, and the ink jet nozzle 2 is operated based on the jet command signal to jet the alignment film solution from the jet holes 4. The inkjet nozzle 2 is configured to be able to independently control the ejection from each ejection hole 4.

【0019】上述のインクジェットノズル2を用いて以
下のように配向膜を形成する。この実施の形態に使用さ
れるインクジェットノズル2は基板の配向膜形成領域を
全て網羅する大きさであるため、基板をインクジェット
ノズル2に対向配置した後は、図2に示すようにインク
ジェットノズル2と基板40のいずれも移動させずに噴
射塗布を行う。このとき配向膜形成領域からはみ出てい
る噴出孔から配向膜溶液を噴射させないようにする。使
用した配向膜溶液は配向膜材料例えばAL−1051
(商品名)の2.0重量%溶液である。配向膜溶液を基
板40に噴射塗布した後は、基板40を100℃で15
秒間乾燥させ、更に180℃で30分間の加熱焼成を行
うことにより、塗布された配向膜溶液中の溶媒(例えば
γ−ブチルラクトン)を除去し、配向膜を形成する。
An alignment film is formed by using the above-mentioned ink jet nozzle 2 as follows. Since the inkjet nozzle 2 used in this embodiment has a size that covers the entire alignment film forming region of the substrate, after the substrate is placed facing the inkjet nozzle 2, the inkjet nozzle 2 is replaced with the inkjet nozzle 2 as shown in FIG. Spray coating is performed without moving any of the substrates 40. At this time, the alignment film solution is not ejected from the ejection holes protruding from the alignment film formation region. The alignment film solution used is an alignment film material such as AL-1051.
It is a 2.0% by weight solution of (trade name). After spraying the alignment film solution onto the substrate 40, the substrate 40 is heated at 100 ° C. for 15
By drying for 2 seconds and heating and baking at 180 ° C. for 30 minutes, the solvent (eg, γ-butyl lactone) in the applied alignment film solution is removed to form an alignment film.

【0020】このように第1の実施の形態の形成方法に
おいては、任意の行の噴出孔4が隣接する行の噴出孔4
の配列に対して半ピッチだけずれて配置されているエリ
ア型のインクジェットノズルを用いて行うので、従来の
ようにライン型のインクジェットノズルを用いてインク
ジェットノズルと基板の相対速度や塗布のタイミングを
取りながら塗布した場合に比べて液滴のオーバーラップ
量のばらつきによる膜厚むらが発生することがない。
As described above, in the forming method of the first embodiment, the ejection holes 4 of an arbitrary row are adjacent to the ejection holes 4 of an adjacent row.
Since it is performed using the area type ink jet nozzles that are displaced by a half pitch with respect to the arrangement, the relative speed between the ink jet nozzles and the substrate and the timing of coating are controlled using the line type ink jet nozzle as in the past. However, unevenness in film thickness due to variations in the overlapping amount of droplets does not occur as compared with the case of coating.

【0021】なお、エリア型のインクジェットノズル2
の大きさが配向膜形成領域より小さい場合、例えば、噴
出孔4の個数が500×500個、噴出孔4の径が50
μm、噴出孔4のピッチpが100μmであるような場
合は、図3に示すようにインクジェットノズル2を基板
に対して複数回相対的に移動させ、所定の領域に配向膜
溶液を噴射塗布することになる。この場合も第1の実施
の形態の形成方法と同様に膜厚分布が均一な配向膜を形
成することができる。
The area type ink jet nozzle 2
Is smaller than the alignment film formation region, for example, the number of ejection holes 4 is 500 × 500, and the diameter of ejection holes 4 is 50.
When the pitch p is 100 μm and the ejection holes 4 have a pitch p of 100 μm, the inkjet nozzle 2 is relatively moved a plurality of times with respect to the substrate as shown in FIG. It will be. Also in this case, an alignment film having a uniform film thickness distribution can be formed as in the case of the forming method according to the first embodiment.

【0022】また、上記第1の実施の形態の形成方法に
おいては、任意の行の噴出孔4が隣接する行の噴出孔4
の配列に対して半ピッチ(p/2)だけずれて配置され
たエリア型のインクジェットノズル2を用いたが、図4
に示すように噴出孔4がマトリクス状に配列されたエリ
ア型のインクジェットノズルを用いても、従来の場合よ
りも均一な膜厚分布を有する配向膜を形成することがで
きる。
Further, in the forming method of the first embodiment, the ejection holes 4 in any row are adjacent to the ejection holes 4 in any row.
The area type ink jet nozzles 2 are arranged so as to be displaced by a half pitch (p / 2) with respect to the arrangement of FIG.
Even if an area type ink jet nozzle in which the ejection holes 4 are arranged in a matrix as shown in FIG. 4 is used, an alignment film having a more uniform film thickness distribution than in the conventional case can be formed.

【0023】次に本発明による液晶表示素子の配向膜形
成方法の第2の実施の形態を図5を参照して説明する。
この実施の形態の形成方法は、図5に示すようにライン
型のインクジェットノズル12を用いるものであって、
インクジェットノズル12の次回の噴射位置を前回の噴
射位置よりも、基板(図示せず)の進行方向とほぼ直交
する方向に、噴出孔14の配列ピッチpの半分だけずら
し、上記次回の次の噴射位置を、上記次回の噴射位置か
ら半ピッチだけ逆方向に移動して噴射塗布を行うもので
ある。したがってインクジェットノズル12の動きは図
5に示すようにジグザグに進むことになる。この場合、
基板とインクジェットノズル12の相対速度を適切に選
択することにより第1の実施の形態と同様の効果を得る
ことが可能となる。
Next, a second embodiment of the method for forming an alignment film of a liquid crystal display device according to the present invention will be described with reference to FIG.
The forming method of this embodiment uses a line type ink jet nozzle 12 as shown in FIG.
The next jetting position of the inkjet nozzle 12 is shifted from the previous jetting position by a half of the arrangement pitch p of the jet holes 14 in a direction substantially orthogonal to the traveling direction of the substrate (not shown), and the next jetting next time. The spray coating is performed by moving the position in the opposite direction by a half pitch from the next spray position. Therefore, the movement of the inkjet nozzle 12 proceeds in a zigzag manner as shown in FIG. in this case,
By appropriately selecting the relative speed between the substrate and the inkjet nozzle 12, it is possible to obtain the same effect as that of the first embodiment.

【0024】[0024]

【発明の効果】以上述べたように、本発明によれば膜厚
分布が均一な配向膜を形成することができる。
As described above, according to the present invention, an alignment film having a uniform film thickness distribution can be formed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による液晶表示素子の配向膜形成方法の
第1の実施の形態に使用されるインクジェットノズルの
構成図。
FIG. 1 is a configuration diagram of an inkjet nozzle used in a first embodiment of a method for forming an alignment film of a liquid crystal display element according to the present invention.

【図2】第1の実施の形態の形成方法を説明する説明
図。
FIG. 2 is an explanatory diagram illustrating a forming method according to the first embodiment.

【図3】第1の実施の形態の形成方法の変形例を説明す
る説明図。
FIG. 3 is an explanatory diagram illustrating a modified example of the forming method according to the first embodiment.

【図4】第1の実施の形態の形成方法の他の変形例に使
用されるインクジェットノズルの噴出孔の配置の模式
図。
FIG. 4 is a schematic diagram of an arrangement of ejection holes of an inkjet nozzle used in another modification of the forming method according to the first embodiment.

【図5】本発明による液晶表示素子の配向膜形成方法の
第2の実施の形態を説明する説明図。
FIG. 5 is an explanatory diagram illustrating a second embodiment of a method for forming an alignment film of a liquid crystal display element according to the present invention.

【図6】従来の配向膜形成方法を説明する説明図。FIG. 6 is an explanatory view illustrating a conventional alignment film forming method.

【図7】従来の配向膜形成方法の問題点を説明する説明
図。
FIG. 7 is an explanatory view illustrating a problem of a conventional alignment film forming method.

【図8】オフセット印刷方式による配向膜の形成を説明
する説明図。
FIG. 8 is an explanatory diagram illustrating formation of an alignment film by an offset printing method.

【符号の説明】[Explanation of symbols]

2 エリア型のインクジェットノズル 3 配向膜溶液供給口 4,14 噴出孔 12 ライン型のインクジェットノズル 35 配向膜溶液 40 基板 2 Area type inkjet nozzle 3 Alignment film solution supply port 4, 14 Jet hole 12 Line type inkjet nozzle 35 Alignment film solution 40 Substrate

───────────────────────────────────────────────────── フロントページの続き (72)発明者 秋 吉 宗 治 神奈川県横浜市磯子区新杉田町8番地 株 式会社東芝横浜事業所内 (72)発明者 上 埜 亜希子 神奈川県横浜市磯子区新杉田町8番地 株 式会社東芝横浜事業所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Muneharu Akiyoshi 8 Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa, Ltd., Toshiba Corporation Yokohama Works (72) Inventor Akiko Kamino, Shinsita-cho, Isogo-ku, Yokohama, Kanagawa Address Stock Company Toshiba Yokohama Office

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】所定のピッチで各行に配列される複数の噴
出孔を有し、任意の行の噴出孔は隣接する行の噴出孔の
配列に対して前記ピッチの半分だけずれるように配置さ
れているエリア型のインクジェットノズルを用いて配向
膜溶液を基板に噴射塗布する工程を備えていることを特
徴とする液晶表示素子の配向膜形成方法。
1. A plurality of ejection holes are arranged in each row at a predetermined pitch, and the ejection holes of any row are arranged so as to be offset from the arrangement of the ejection holes of an adjacent row by half the pitch. A method for forming an alignment film for a liquid crystal display device, comprising a step of spraying and applying an alignment film solution onto a substrate using an area type inkjet nozzle.
【請求項2】所定のピッチで一列に配列される複数の噴
出孔を有するライン型のインクジェットノズルを用い、
このインクジェットノズルからの配向膜溶液の次回の噴
射は前回の噴射位置よりも基板の進行方向とほぼ直交す
る方向に前記ピッチの半分だけずらした位置で行うよう
にしたことを特徴とする液晶表示素子の配向膜形成方
法。
2. A line type ink jet nozzle having a plurality of ejection holes arranged in a line at a predetermined pitch is used.
The liquid crystal display device characterized in that the next jetting of the alignment film solution from this ink jet nozzle is carried out at a position shifted by half the pitch in a direction substantially orthogonal to the traveling direction of the substrate from the previous jetting position. Alignment film forming method.
JP29445695A 1995-11-13 1995-11-13 Forming method of oriented film for liquid crystal display element Pending JPH09138410A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29445695A JPH09138410A (en) 1995-11-13 1995-11-13 Forming method of oriented film for liquid crystal display element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29445695A JPH09138410A (en) 1995-11-13 1995-11-13 Forming method of oriented film for liquid crystal display element

Publications (1)

Publication Number Publication Date
JPH09138410A true JPH09138410A (en) 1997-05-27

Family

ID=17808023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29445695A Pending JPH09138410A (en) 1995-11-13 1995-11-13 Forming method of oriented film for liquid crystal display element

Country Status (1)

Country Link
JP (1) JPH09138410A (en)

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KR20000055924A (en) * 1999-02-11 2000-09-15 구본준 A method of manufacturing an ink-jet color filter for alignment of liquid crystal
US7098988B2 (en) 2002-12-27 2006-08-29 Lg.Philips Lcd Co., Ltd. Method of fabricating liquid crystal display device
US7215406B2 (en) 2003-05-20 2007-05-08 Seiko Epson Corporation Device for arranging liquid drops, electro-optical panel, electro-optical device, electronic apparatus, method of arranging liquid drops, method of manufacturing electro-optical panel, and method of manufacturing electronic apparatus
JP2007241245A (en) * 2006-02-13 2007-09-20 Seiko Epson Corp Droplet ejection apparatus, method for forming functional film, apparatus for forming liquid crystal alignment film, method for forming liquid crystal alignment film of liquid crystal display, and liquid crystal display
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US7499143B2 (en) 2003-03-12 2009-03-03 Seiko Epson Corporation Liquid crystal discharging method, and liquid crystal discharging device
US7535544B2 (en) 2003-05-20 2009-05-19 Seiko Epson Corporation Various methods of manufacture of electro-optical panels, etc. involving a device and method of discharging liquid drops of an alignment film in a single pass from plural nozzles of a drop discharge head
US7751007B2 (en) 2003-06-04 2010-07-06 Hitachi Displays, Ltd. Display device and manufacturing method thereof
US8388079B2 (en) 2005-08-24 2013-03-05 Kabushiki Kaisha Ishii Hyoki Inkjet head, method of detecting ejection abnormality of the inkjet head, and method of forming film
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000055924A (en) * 1999-02-11 2000-09-15 구본준 A method of manufacturing an ink-jet color filter for alignment of liquid crystal
US7098988B2 (en) 2002-12-27 2006-08-29 Lg.Philips Lcd Co., Ltd. Method of fabricating liquid crystal display device
US7362405B2 (en) 2002-12-27 2008-04-22 Lg.Philips Lcd Co., Ltd. Method of fabricating liquid crystal display device
US7499143B2 (en) 2003-03-12 2009-03-03 Seiko Epson Corporation Liquid crystal discharging method, and liquid crystal discharging device
US8780317B2 (en) 2003-03-12 2014-07-15 Seiko Epson Corporation Film forming method, film forming device, liquid crystal arrangement method, liquid crystal arrangement device, liquid crystal device, liquid crystal device production method and electronic equipment
US7215406B2 (en) 2003-05-20 2007-05-08 Seiko Epson Corporation Device for arranging liquid drops, electro-optical panel, electro-optical device, electronic apparatus, method of arranging liquid drops, method of manufacturing electro-optical panel, and method of manufacturing electronic apparatus
US7535544B2 (en) 2003-05-20 2009-05-19 Seiko Epson Corporation Various methods of manufacture of electro-optical panels, etc. involving a device and method of discharging liquid drops of an alignment film in a single pass from plural nozzles of a drop discharge head
US7751007B2 (en) 2003-06-04 2010-07-06 Hitachi Displays, Ltd. Display device and manufacturing method thereof
US8388079B2 (en) 2005-08-24 2013-03-05 Kabushiki Kaisha Ishii Hyoki Inkjet head, method of detecting ejection abnormality of the inkjet head, and method of forming film
US8974037B2 (en) 2005-08-24 2015-03-10 Kabushiki Kaisha Ishii Hyoki Film coating device having an inkjet head, and a method of forming a film
JP2007241245A (en) * 2006-02-13 2007-09-20 Seiko Epson Corp Droplet ejection apparatus, method for forming functional film, apparatus for forming liquid crystal alignment film, method for forming liquid crystal alignment film of liquid crystal display, and liquid crystal display
JP4702287B2 (en) * 2006-02-13 2011-06-15 セイコーエプソン株式会社 Droplet ejection device, functional film forming method, liquid crystal alignment film forming device, and liquid crystal alignment film forming method for liquid crystal display device
JP2008225487A (en) * 2008-04-02 2008-09-25 Seiko Epson Corp Color filter substrate, manufacturing method and manufacturing device for color filter substrate, liquid crystal device, and manufacturing method for liquid crystal device
JP2015103754A (en) * 2013-11-27 2015-06-04 株式会社リコー Electronic device, electronic device manufacturing method

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