JPH09123206A - Resin sealing molding machine electronic component - Google Patents

Resin sealing molding machine electronic component

Info

Publication number
JPH09123206A
JPH09123206A JP7306911A JP30691195A JPH09123206A JP H09123206 A JPH09123206 A JP H09123206A JP 7306911 A JP7306911 A JP 7306911A JP 30691195 A JP30691195 A JP 30691195A JP H09123206 A JPH09123206 A JP H09123206A
Authority
JP
Japan
Prior art keywords
resin
mold surface
mold
molding
resin encapsulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7306911A
Other languages
Japanese (ja)
Inventor
Michio Osada
道男 長田
Keiji Maeda
啓司 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOWA KK
Original Assignee
TOWA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOWA KK filed Critical TOWA KK
Priority to JP7306911A priority Critical patent/JPH09123206A/en
Priority to TW085108202A priority patent/TW317532B/zh
Priority to MYPI96004416A priority patent/MY123756A/en
Priority to US08/738,095 priority patent/US5783220A/en
Priority to SG9610974A priority patent/SG96163A1/en
Priority to KR1019960049365A priority patent/KR100187537B1/en
Priority to EP96307794A priority patent/EP0771638A3/en
Publication of JPH09123206A publication Critical patent/JPH09123206A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/70Maintenance
    • B29C33/72Cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3425Printed circuits

Abstract

PROBLEM TO BE SOLVED: To efficiently and effectively remove the mold surface contaminant such as a mold release agent included in resin a material adhered and stored on the mold surface of each resin sealing molding unit and a volatile gas produced by heating in a resin sealing molding machine of the form that a molding machine body is detachably coupled to a plurality of couplers (resin sealing molding units). SOLUTION: A cleaning UV emitting mechanism 17 for removing the mold surface contaminant adhered to and stored on a mold surface 16 is reciprocatively mounted at the retreated position for inhibiting to disturb the supplying operation of a lead frame 3 before sealing and a resin tablet 6 to each resin sealing molding unit 8 and the removing operation of a sealed lead frame 9 and at the near position of the surface 16 of the each resin sealing molding unit 8.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、例えば、リードフレ
ームに装着したIC、LSI、ダイオード、コンデンサ
ー等の電子部品を樹脂材料にて封止成形するための成形
装置の改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a molding apparatus for sealing and molding electronic parts such as ICs, LSIs, diodes and capacitors mounted on a lead frame with a resin material.

【0002】[0002]

【従来の技術】従来より、トランスファモールド法によ
って電子部品を樹脂封止成形することが行われている
が、この方法を実施するための樹脂封止成形装置には、
通常、次のような基本的構成を備えている。即ち、樹脂
封止成形装置には、成形前のリードフレームと樹脂タブ
レットを装填する材料装填部、該成形前リードフレーム
に装着された電子部品を樹脂材料にて封止成形する樹脂
封止成形部(樹脂封止成形用金型)、該樹脂封止成形部
にて成形された封止済リードフレームを収納する成形品
収納部、上記両材料装填部の成形前リードフレームと樹
脂タブレットを上記樹脂封止成形部に移送する材料供給
機構、上記樹脂封止成形部にて成形された封止済リード
フレームを上記成形品収納部に移送する成形品移送機
構、上記封止済リードフレームに連結された製品として
は不要となる樹脂成形体を切断除去するための不要樹脂
成形体切断除去部と、上記樹脂封止成形部における金型
の型面(P.L 面)に付着した樹脂バリを除去するための
型面クリーニング機構、及び、これらの各部を自動制御
するための制御機構等が備えられている。
2. Description of the Related Art Conventionally, electronic parts have been molded by resin molding by a transfer molding method, and a resin molding apparatus for carrying out this method includes:
Usually, it has the following basic configuration. That is, the resin encapsulation molding apparatus includes a material loading section for loading a pre-molding lead frame and a resin tablet, and a resin encapsulation molding section for encapsulating an electronic component mounted on the pre-molding lead frame with a resin material. (Mold for resin encapsulation molding), molded product accommodating section for accommodating the encapsulated lead frame molded by the resin encapsulation molding section, pre-molding lead frame of both material loading sections and resin tablet A material supply mechanism for transferring to the encapsulation molding unit, a molded product transfer mechanism for transferring the encapsulated lead frame molded by the resin encapsulation molding unit to the molded product storage unit, connected to the encapsulated lead frame In order to remove unnecessary resin molded product cutting and removing part for cutting and removing resin molded product which is not required as a product, and resin burrs adhering to the mold surface (PL surface) of the mold in the resin sealing molding part. The mold surface cree Ring mechanism, and the control mechanism or the like for automatically controlling these units are provided.

【0003】そして、このような樹脂封止成形装置を用
いて電子部品を樹脂封止成形する場合は、例えば、次の
ように行われている。即ち、予め、樹脂封止成形部にお
ける金型(上下両型)を加熱手段にて樹脂成形温度にま
で加熱すると共に、該上下両型を型開きする。次に、材
料供給機構を介して、材料装填部の成形前リードフレー
ムを下型の型面における所定位置に供給してセットする
と共に、樹脂タブレットを下型ポット内に供給する。次
に、上記下型を上動して、該上下両型を型締めする。こ
のとき、電子部品とその周辺のリードフレームは、該上
下両型の型面に対設した上下両キャビティ内に嵌装セッ
トされることになり、また、上記ポット内の樹脂タブレ
ットは加熱されて順次に溶融化されることになる。次
に、上記ポット内の樹脂タブレットをプランジャにより
加圧して溶融化された樹脂材料をその通路部を通して上
下両キャビティ内に注入充填させると、該両キャビティ
内の電子部品とその周辺のリードフレームは、該両キャ
ビティの形状に対応して成形される樹脂成形体(モール
ドパッケージ)内に封止されることになる。次に、溶融
樹脂材料の硬化に必要な所要時間の経過後において、上
下両型を型開きして、封止済リードフレーム(即ち、上
下両キャビティ内の樹脂成形体とリードフレーム)及び
これに連結一体化された状態にある上記した不要樹脂成
形体を該両型間に突き出して離型する。次に、封止済リ
ードフレームと不要樹脂成形体を、上記した離型作用と
同時的に、成形品移送機構を介して、不要樹脂成形体切
断除去部に移送すると共に、その不要樹脂成形体部分を
切断除去する。次に、不要樹脂成形体部分を切断除去し
た封止済リードフレームを、成形品移送機構を介して、
成形品収納部に移送して収納する。更に、上記した成形
サイクルの終了毎に、型面クリーニング機構を介して、
樹脂封止成形部の樹脂成形用金型の型面に付着した樹脂
バリを除去する。
[0005] The resin sealing molding of an electronic component using such a resin sealing molding apparatus is performed, for example, as follows. That is, the molds (both upper and lower molds) in the resin encapsulation molding unit are heated in advance to the resin molding temperature by the heating means, and the upper and lower molds are opened. Next, the pre-molding lead frame of the material loading section is supplied and set at a predetermined position on the mold surface of the lower mold via the material supply mechanism, and the resin tablet is supplied into the lower mold pot. Next, the lower mold is moved upward to clamp the upper and lower molds. At this time, the electronic component and its surrounding lead frame are fitted and set in the upper and lower cavities facing the mold surfaces of the upper and lower molds, and the resin tablet in the pot is heated. It will be melted sequentially. Next, when the resin material in the pot is pressed by the plunger and the melted resin material is injected and filled into both upper and lower cavities through the passage portion, the electronic components in the both cavities and the lead frame in the periphery thereof are separated. The resin is molded in a resin molded body (mold package) molded according to the shapes of the cavities. Next, after the time required for curing the molten resin material has elapsed, the upper and lower molds are opened, and the sealed lead frame (that is, the resin molded body and the lead frame in the upper and lower cavities) and The above-mentioned unnecessary resin molded body in the connected and integrated state is projected between the two molds and released. Next, the sealed lead frame and the unnecessary resin molded body are simultaneously transferred to the unnecessary resin molded body cutting / removal section through the molded product transfer mechanism at the same time as the above-mentioned releasing action, and the unnecessary resin molded body is also removed. Cut off the part. Next, the sealed lead frame from which the unnecessary resin molded body is cut and removed is passed through the molded product transfer mechanism,
Transfer to the molded product storage section for storage. Furthermore, each time the molding cycle described above is completed, a mold surface cleaning mechanism is used to
The resin burr adhering to the mold surface of the resin molding die of the resin sealing molding part is removed.

【0004】リードフレーム上の電子部品を自動的に樹
脂封止成形するためには、上記したような材料装填部、
樹脂封止成形部、成形品収納部、材料供給機構、成形品
移送機構、不要樹脂成形体切断除去部、型面クリーニン
グ機構、及び、これら各部の自動制御機構等が必要であ
り、従って、電子部品の樹脂封止成形装置には、その基
本的な構成として、上記したような各部・各機構の一式
が備えられているのが通例である。
In order to automatically resin-mold the electronic parts on the lead frame, the material loading section as described above,
A resin sealing molding section, molded article storage section, material supply mechanism, molded article transfer mechanism, unnecessary resin molded article cutting and removing section, a mold surface cleaning mechanism, and an automatic control mechanism for each of these sections are required. As a basic configuration, the resin encapsulation / molding apparatus for a component is generally provided with a set of each part and each mechanism as described above.

【0005】ところで、一つの樹脂封止成形装置を用い
て、例えば、同種の製品を同時に且つ多量に生産するこ
とを目的として、また、少量の異種製品を同時に生産す
ることを目的として、更に、全体的な成形コストの低減
化を図ることを目的として、樹脂封止成形装置を、樹脂
封止成形装置本体と該装置本体に着脱自在に連結させた
複数の少なくとも樹脂封止成形部を備えた樹脂封止成形
装置から成る連結体とから構成する新規な構成・形態の
ものが開発されている。そして、上記した型面クリーニ
ング機構を成形品移送機構に一体化させることにより、
該成形品移送機構による成形品の移送工程時に該型面ク
リーニング機構を作動させて、該成形品移送工程と型面
クリーニング工程とを略同時に行うようにしている。更
に、この樹脂封止成形装置においては、自動制御機構を
介して、装置本体に連結した各樹脂封止成形部の全部を
稼働させ、或は、その一部のみを稼働させることが可能
であるから、例えば、製品の品種変更や生産量の増減変
更等に迅速に即応できる成形装置の態様を構成すること
ができると云った利点がある。
[0005] By the way, using one resin encapsulation molding apparatus, for example, to produce the same kind of products simultaneously and in large quantities, and to produce small quantities of different kinds of products simultaneously, For the purpose of reducing the overall molding cost, the resin sealing molding apparatus is provided with a resin sealing molding apparatus main body and at least a plurality of resin sealing molding sections detachably connected to the apparatus main body. A new structure / form composed of a connected body composed of a resin sealing molding device has been developed. Then, by integrating the mold surface cleaning mechanism described above with the molded product transfer mechanism,
The mold surface cleaning mechanism is operated at the time of transferring the molded product by the molded product transfer mechanism, so that the molded product transfer step and the mold surface cleaning step are performed substantially at the same time. Furthermore, in this resin encapsulation molding apparatus, it is possible to operate all of the resin encapsulation molding sections connected to the apparatus main body, or to operate only a part thereof, through the automatic control mechanism. Therefore, there is an advantage that, for example, it is possible to configure a mode of the molding apparatus capable of promptly responding to a product type change, a production amount increase / decrease change, and the like.

【0006】[0006]

【発明が解決しようとする課題】装置本体と該装置本体
に複数の樹脂封止成形部を着脱自在に連結させる形態の
樹脂封止成形装置にあっては、上記したような利点を備
えているが、成形作業の効率化の面から、次のような問
題点がある。即ち、上記した型面クリーニング機構は成
形品移送機構に一体化されているため、上記したよう
に、成形品の移送工程と型面クリーニング工程とを略同
時に行うことができると云った利点がある。上記型面ク
リーニング機構による型面クリーニングは、ブラシ部材
の先端を型面に押圧させた状態で、上記成形品移送機構
の移動に伴って、型面上を移動させることにより、該型
面に付着した樹脂バリを剥離除去するようにされてい
る。しかしながら、長時間の樹脂成形作業を行うと、例
えば、上記金型の型面や樹脂充填部(成形用キャビテ
ィ)及び溶融樹脂材料の通路部(ランナやゲート)の内
面等には、樹脂材料中に含まれる離型剤や加熱により発
生した揮発ガス等の型面汚染物が付着蓄積して、所謂、
金型くもり等と称される状態となる。上記した型面汚染
物を放置しておくと、成形品の外観不良や離型不良の原
因となるため、所定の成形ショット数毎に該型面汚染物
を除去する必要がある。更に、上記型面汚染物は、型面
に強固に付着しているため、ブラシ部材の先端を型面に
押圧させた状態で移動させると云った上記のような型面
クリーニング手段によってはこれを確実に除去すること
ができない。また、上記型面汚染物を除去するために
は、該金型を取り外してその型面を、例えば、サンドブ
ラスト等を用いる物理的手段や硫酸液等を用いる化学的
手段、或は、燃焼ガス炎を吹き付ける手段等によってク
リーニングすることが考えられるが、これらの手段によ
るときは、例えば、型面を傷付けたり、型面の隅角部の
クリーニングが不充分であったり、或は、クリーニング
作業に長時間を要する等の問題があった。
A resin encapsulation molding apparatus having a configuration in which a plurality of resin encapsulation molding sections are detachably connected to the apparatus body and the apparatus body has the above advantages. However, there are the following problems in terms of efficiency of molding work. That is, since the above-described mold surface cleaning mechanism is integrated with the molded product transfer mechanism, as described above, there is an advantage that the molded product transfer step and the mold surface cleaning step can be performed substantially at the same time. . The mold surface cleaning by the mold surface cleaning mechanism adheres to the mold surface by moving on the mold surface with the movement of the molded product transfer mechanism while the tip of the brush member is pressed against the mold surface. The removed resin burr is peeled off. However, if the resin molding operation is performed for a long time, for example, the mold surface of the mold, the resin filling portion (molding cavity), the inner surface of the passage portion (runner or gate) of the molten resin material, and the like are filled with the resin material. Mold surface contaminants such as a mold release agent and volatile gas generated by heating are deposited and accumulated,
It will be in a state called mold clouding. Leaving the above-mentioned mold surface contaminants causes poor appearance of the molded product and poor mold release, so it is necessary to remove the mold surface contaminants every predetermined number of molding shots. Further, since the mold surface contaminants are firmly attached to the mold surface, the mold surface contaminants are removed by the mold surface cleaning means described above, which moves the brush member while pressing the tip of the brush member against the mold surface. It cannot be removed reliably. In order to remove the mold surface contaminants, the mold is removed, and the mold surface is removed by physical means such as sandblasting, chemical means such as sulfuric acid solution, or combustion gas flame. It is conceivable to clean the mold surface by means such as spraying the mold surface. However, when these means are used, for example, the mold surface is scratched, the corners of the mold surface are not sufficiently cleaned, or the cleaning operation is long. There was a problem that it took time.

【0007】そこで、本発明は、装置本体と該装置本体
に複数の樹脂封止成形部を着脱自在に連結させる形態の
樹脂封止成形装置において、材料供給機構及び成形品移
送機構の兼用による成形コストの低減化と云った作用効
果と、樹脂バリの除去と云うクリーニング作用効果を維
持するのみならず、各樹脂封止成形部における型面に付
着蓄積した上記型面汚染物を効率良く且つ確実に除去す
ることができる型面汚染物のクリーニング機構を併設
し、該型面汚染物のクリーニング機構を含む全作業工程
を自動制御することができる電子部品の樹脂封止成形装
置を提供することを目的とするものである。
Therefore, the present invention is a resin encapsulation molding apparatus in which a plurality of resin encapsulation molding sections are detachably connected to the apparatus body and the apparatus body is molded by using both a material supply mechanism and a molded product transfer mechanism. Not only maintaining the effect of cost reduction and cleaning effect of removing resin burrs, but also efficiently and reliably removing the above-mentioned mold surface contaminants adhering and accumulated on the mold surface in each resin sealing molding part. To provide a resin encapsulation molding apparatus for electronic parts, which is provided with a cleaning mechanism for a mold surface contaminant that can be removed, and which can automatically control all working processes including the cleaning mechanism for the mold surface contaminant. It is intended.

【0008】[0008]

【課題を解決するための手段】上記した技術的課題を解
決するための本発明に係る電子部品の樹脂封止成形装置
は、半導体チップ等の電子部品を樹脂材料にて封止成形
する樹脂封止成形部を備えた電子部品の樹脂封止成形装
置の本体と、該本体に対して少なくとも樹脂封止成形部
を備えた樹脂封止成形装置から成る連結体を着脱自在に
装設するように構成した電子部品の樹脂封止成形装置で
あって、上記各樹脂封止成形部における金型の型面クリ
ーニング用のUV(紫外線)照射機構を備えると共に、
該クリーニング用UV照射機構を上記各樹脂封止成形部
への材料供給作業及び成形品取出作業を阻害しない退避
位置と該各樹脂封止成形部における金型の型面近接位置
へ夫々往復動自在に装設して構成したことを特徴とする
ものである。
SUMMARY OF THE INVENTION A resin encapsulation molding apparatus for electronic parts according to the present invention for solving the above technical problems is a resin encapsulation for encapsulating and molding electronic parts such as semiconductor chips with a resin material. A main body of a resin encapsulation molding apparatus for an electronic component having a stopper molding section, and a connection body composed of a resin encapsulation molding apparatus having at least a resin encapsulation molding section are detachably attached to the main body. A resin encapsulation molding apparatus for configured electronic parts, comprising a UV (ultraviolet) irradiation mechanism for cleaning a mold surface of a mold in each of the resin encapsulation molding sections,
The cleaning UV irradiation mechanism can be reciprocally moved to a retracted position that does not hinder the material supply work and the molded product take-out work to each of the resin sealing molding parts, and the mold surface proximity position of each resin sealing molding part. It is characterized by being installed in the.

【0009】また、本発明に係る電子部品の樹脂封止成
形装置は、上記した樹脂封止成形部に、該樹脂封止成形
部における金型の型面から分離飛散した型面汚染物を捕
捉すると共に、該型面汚染物を外部へ強制的に吸引排出
する型面汚染物の吸引排出機構を併設して構成したこと
を特徴とするものである。
Further, in the resin encapsulation molding apparatus for electronic parts according to the present invention, the resin encapsulation molding section captures mold surface contaminants separated and scattered from the mold surface of the mold in the resin encapsulation molding section. In addition, a suction and discharge mechanism for the mold surface contaminants for forcibly sucking and discharging the mold surface contaminants is also provided.

【0010】また、本発明に係る電子部品の樹脂封止成
形装置は、上記したクリーニング用UV照射機構に、樹
脂封止成形部における金型の型面から分離飛散した型面
汚染物を捕捉すると共に、該型面汚染物を外部へ強制的
に吸引排出する型面汚染物の吸引排出機構を併設して構
成したことを特徴とするものである。
In the resin encapsulation molding apparatus for electronic parts according to the present invention, the cleaning UV irradiation mechanism captures the mold surface contaminant separated and scattered from the mold surface of the mold in the resin encapsulation molding section. At the same time, a suction and discharge mechanism for the mold surface contaminants for forcibly sucking and discharging the mold surface contaminants is also provided.

【0011】また、本発明に係る電子部品の樹脂封止成
形装置は、上記した樹脂封止成形部とクリーニング用U
V照射機構との夫々に、該樹脂封止成形部における金型
の型面から分離飛散した型面汚染物を捕捉すると共に、
該型面汚染物を外部へ強制的に吸引排出する型面汚染物
の吸引排出機構を併設して構成したことを特徴とするも
のである。
Further, the resin encapsulation molding apparatus for electronic parts according to the present invention is provided with the resin encapsulation molding section and the cleaning U described above.
Each of the V irradiation mechanism captures mold surface contaminants separated and scattered from the mold surface of the mold in the resin sealing molding part, and
The present invention is characterized in that a structure for sucking and discharging the mold surface contaminants for forcibly sucking and discharging the mold surface contaminants is additionally provided.

【0012】[0012]

【作用】本発明によれば、各樹脂封止成形部における金
型の型面にUVを照射して、該型面に付着蓄積した型面
汚染物を分解し分離飛散させることにより、該型面汚染
物を確実に除去することができる。
According to the present invention, the mold surface of each mold for molding resin is irradiated with UV to decompose and separate the mold surface contaminants adhering and accumulated on the mold surface to separate and scatter the mold surface contaminants. Surface contaminants can be reliably removed.

【0013】また、本発明によれば、吸引排出機構を用
いることにより、UV照射によって分解され、金型の型
面から分離飛散する型面汚染物を捕捉すると共に、該型
面汚染物を外部へ強制的に吸引排出することができる。
Further, according to the present invention, by using the suction and discharge mechanism, the mold surface contaminants which are decomposed by UV irradiation and separated and scattered from the mold surface of the mold are captured, and the mold surface contaminants are externally exposed. Can be forcibly sucked and discharged.

【0014】[0014]

【実施例】以下、本発明を、実施例図に基づいて詳細に
説明する。なお、図1は本発明に係る電子部品の樹脂封
止成形装置の概略平面図、図2はその概略横断平面図、
図3及び図4は図1のA−A線における概略縦断面図、
図5はその樹脂封止成形部の要部を示す拡大側面図、図
6は樹脂封止成形部の要部を示す拡大縦断面図、図7は
本発明に係る他の樹脂封止成形部の要部を示す縦断面
図、図8はUV照射機構によるクリーニング作用の説明
図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. 1 is a schematic plan view of a resin encapsulation molding apparatus for electronic parts according to the present invention, and FIG. 2 is a schematic transverse plan view thereof.
3 and 4 are schematic vertical sectional views taken along the line AA of FIG.
5 is an enlarged side view showing an essential part of the resin encapsulation molding part, FIG. 6 is an enlarged vertical sectional view showing an essential part of the resin encapsulation molding part, and FIG. 7 is another resin encapsulation molding part according to the present invention. FIG. 8 is a vertical cross-sectional view showing the main part of FIG. 8, and FIG. 8 is an explanatory view of the cleaning action by the UV irradiation mechanism.

【0015】本発明に係る電子部品の樹脂封止成形装置
は、図1〜6に示すように、樹脂封止成形装置の本体1
に対して樹脂封止成形部を備えた樹脂封止成形装置から
成る複数の連結体2を直列的に且つ着脱自在に装設して
構成した場合(図例においては、本体1に三つの連結体
2を連結させた場合)を示している。
The resin encapsulation molding apparatus for electronic parts according to the present invention, as shown in FIGS.
On the other hand, in the case where a plurality of connecting bodies 2 made of a resin encapsulation molding device having a resin encapsulation molding part are installed in series and detachably (in the example shown, three connections are made to the main body 1). (When the body 2 is connected).

【0016】また、上記装置本体1には、成形前のリー
ドフレーム3を装填する材料装填部4と、該成形前リー
ドフレームの整列部5と、樹脂タブレット6の整列部7
と、上記成形前リードフレーム3に装着された電子部品
を樹脂材料にて封止成形する樹脂封止成形部8と、該樹
脂封止成形部8にて成形された成形品(封止済リードフ
レーム9)を収納する成形品収納部10と、上記両整列部
(5・7) の成形前リードフレーム3と樹脂タブレット6を
上記樹脂封止成形部8の所定位置に移送する材料供給機
構11と、上記樹脂封止成形部8にて成形された成形品を
上記成形品収納部10に移送する成形品移送機構12と、該
成形品移送機構12に一体化されてこれと同時に往復移動
するように設けられた型面クリーニング機構13と、上記
成形品に連結された製品としては不要となる樹脂成形体
14を切断除去するための不要樹脂成形体切断除去部15
と、上記樹脂封止成形部8における樹脂成形用金型の型
面16に付着蓄積した型面汚染物を除去するためのクリー
ニング用UV照射機構17と、該UV照射機構17によるU
V照射によって分解され、金型の型面から分離飛散する
型面汚染物を外部へ強制的に吸引排出する吸引排出機構
18と、これらの各部を自動制御するための制御機構19等
が備えられている。
Further, in the apparatus body 1, a material loading portion 4 for loading the lead frame 3 before molding, an alignment portion 5 of the pre-molding lead frame 5, and an alignment portion 7 of the resin tablet 6.
A resin-sealed molded portion 8 for sealing-molding an electronic component mounted on the pre-molded lead frame 3 with a resin material; and a molded product molded by the resin-sealed molded portion 8 (sealed leads). Molded product storage unit 10 for storing the frame 9) and the above-mentioned both alignment units
The material supply mechanism 11 for transferring the pre-molding lead frame 3 and the resin tablet 6 of (5 · 7) to a predetermined position of the resin sealing molding portion 8 and the molded product molded by the resin sealing molding portion 8. A molded product transfer mechanism 12 for transferring to the molded product storage section 10, a mold surface cleaning mechanism 13 integrated with the molded product transfer mechanism 12 so as to reciprocate at the same time, and connected to the molded product. Molded products that are no longer needed as a finished product
Unnecessary resin molded body cutting and removing part 15 for cutting and removing 14
And a cleaning UV irradiation mechanism 17 for removing mold surface contaminants adhering to and accumulated on the mold surface 16 of the resin molding die in the resin sealing molding portion 8, and a U by the UV irradiation mechanism 17.
Suction and discharge mechanism that forcibly sucks and discharges mold surface contaminants that are decomposed by V irradiation and separated and scattered from the mold surface of the mold to the outside.
18 and a control mechanism 19 for automatically controlling each of these parts are provided.

【0017】また、上記した樹脂封止成形部8には、樹
脂成形用の固定上型20及び可動下型21とが対向配置され
ている。
In addition, a fixed upper die 20 and a movable lower die 21 for resin molding are arranged opposite to each other in the resin sealing molding portion 8 described above.

【0018】また、上記下型21には、樹脂タブレット6
を供給するためのポット22と、樹脂成形用のキャビティ
23が設けられている。また、上記ポット22には、該ポッ
ト22内に供給した樹脂タブレット6を加圧するためのプ
ランジャが嵌装され、更に、上記下型キャビティ23部に
おける型面16側には、成形前リードフレーム3の嵌合セ
ット用凹所等が設けられている(図示なし)。
The lower mold 21 has a resin tablet 6
22 for supplying resin and cavity for resin molding
23 are provided. A plunger for pressurizing the resin tablet 6 supplied into the pot 22 is fitted in the pot 22, and a lead frame 3 before molding is provided on the mold surface 16 side of the lower mold cavity 23. Are provided (not shown).

【0019】また、上記上型20における下型ポット22と
の対向位置にはカル部25が設けられると共に、該上型20
における下型キャビティ23との対向位置には上型キャビ
ティ26が対設されている。また、上記カル部25と上型キ
ャビティ26とはゲート部27を介して連通接続されてお
り、従って、該カル部25とゲート部27とは溶融樹脂材料
を移送するための通路部24を構成している。また、上記
上型キャビティ26と外部とは適宜なエアベント28を介し
て連通接続されている。なお、上記したエアベント28
は、後述するように、上下両キャビティ(23・26)の外方
周辺部に設けた吸気孔(29)や吸気通路(30)を介して、外
部に配設した真空ポンプ等の真空源側と連通接続されて
いる。従って、上下両型(20・21) を型締めして樹脂成形
を行う際に該真空源を作動させると、樹脂充填部及び溶
融樹脂材料の通路部内に残溜する水分や空気及び成形時
の発生ガス類等を外部へ強制的に吸引排出することがで
きる吸引排出機構を構成している。
A cull portion 25 is provided at a position facing the lower mold pot 22 in the upper mold 20 and the upper mold 20
An upper die cavity 26 is provided opposite to the lower die cavity 23 at the position. Further, the cull portion 25 and the upper mold cavity 26 are communicatively connected to each other through the gate portion 27, and thus the cull portion 25 and the gate portion 27 constitute a passage portion 24 for transferring the molten resin material. doing. The upper mold cavity 26 and the outside are connected to each other via an appropriate air vent 28. The air vent 28 described above
As will be described later, the vacuum source side such as a vacuum pump installed outside through the intake holes (29) and the intake passages (30) provided in the outer peripheral portions of the upper and lower cavities (23, 26). It is connected with. Therefore, when the vacuum source is activated during resin molding by clamping both upper and lower molds (20, 21), moisture and air remaining in the resin filling part and the passage part of the molten resin material and It constitutes a suction / discharge mechanism capable of forcibly sucking and discharging generated gases and the like to the outside.

【0020】また、上記した成形前リードフレームの整
列部5は、材料装填部4から移送された複数の成形前リ
ードフレーム3(図例では、二枚)を所定の方向に整列
させることができるように設けられている。
Further, the pre-molding lead frame alignment section 5 described above can align a plurality of pre-molding lead frames 3 (two sheets in the illustrated example) transferred from the material loading section 4 in a predetermined direction. Is provided.

【0021】また、上記した樹脂タブレット6の整列部
7は、樹脂タブレット6を、上記樹脂封止成形部8にお
ける各ポット22の数とその間隔位置に対応する個数(図
例では、三個)と間隔位置に整列させることができるよ
うに設けられている。
Further, the alignment portion 7 of the resin tablet 6 described above has the number of resin tablets 6 corresponding to the number of each pot 22 in the resin sealing molding portion 8 and the interval position (three in the illustrated example). And are provided so that they can be aligned in the spacing position.

【0022】また、上記した材料供給機構11は、上記両
整列部(5・7) に整列させた複数の成形前リードフレーム
3及び樹脂タブレット6を夫々係着すると共に、この状
態でこれらを上記樹脂封止成形部8に同時に移送し、且
つ、該成形前リードフレーム3はその下型キャビティ23
部の凹所に夫々嵌合セットし、該樹脂タブレット6はそ
の各ポット22内に夫々投入・供給するように設けられて
いる。なお、上記ポット22内に供給した樹脂タブレット
6は成形温度に加熱された上下両型(20・21) によって順
次に加熱溶融化されることになる。また、各樹脂封止成
形部8に対する両者の供給作用は、供給位置・距離が相
違するのみであって、その他の供給作用は上記した場合
と実質的に同じである。
Further, the above-mentioned material supply mechanism 11 attaches the plurality of pre-molding lead frames 3 and the resin tablets 6 aligned in the both aligning portions (5, 7), respectively, and, in this state, these The pre-molded lead frame 3 is simultaneously transferred to the resin encapsulation molding section 8 and the lower mold cavity 23
The resin tablets 6 are provided so as to be fitted and set in the recesses of the respective portions, and to be inserted and supplied into the respective pots 22. The resin tablets 6 supplied into the pot 22 are sequentially heated and melted by the upper and lower molds (20, 21) heated to the molding temperature. Further, the supply action of both to the resin sealing molding portion 8 is different only in the supply position / distance, and the other supply action is substantially the same as the above case.

【0023】また、上記した成形品移送機構12は、上記
樹脂封止成形部8にて成形された成形品(封止済リード
フレーム9とこれに一体成形された不要樹脂成形体14)
を係着すると共に、これを不要樹脂成形体切断除去部15
に移送するように設けられている。更に、該不要樹脂成
形体切断除去部15にてその不要樹脂成形体14部分を切断
除去した封止済リードフレーム9のみを上記成形品収納
部10に移送して収納することができるように設けられて
いる。
Further, the above-mentioned molded product transfer mechanism 12 is a molded product molded by the above-mentioned resin sealing molding section 8 (sealed lead frame 9 and unnecessary resin molded body 14 integrally molded with this).
The unnecessary resin molded body cutting and removing unit 15
It is provided to be transferred to. Further, only the sealed lead frame 9 in which the unnecessary resin molded body 14 is cut and removed by the unnecessary resin molded body cutting / removing unit 15 can be transferred to and housed in the molded product storage unit 10. Has been.

【0024】また、上記した型面クリーニング機構13
は、上記上下両型(20・21) の型面16にブラシ部材(図示
なし)の先端を押圧させた状態で、上記成形品移送機構
12の移動に伴って該型面16上を移動させることにより、
該型面16に付着した樹脂バリを剥離すると共に、適宜な
真空引き機構(樹脂バリの吸引排出機構)を介して、剥
離した樹脂バリを外部へ吸引除去することができるよう
に設けられている。この型面クリーニング作用は、通
常、成形品移送機構12が樹脂封止成形部8の成形品を係
着してこれを不要樹脂成形体切断除去部15に移送する際
に行われる。従って、通常の樹脂バリはこの型面クリー
ニング機構13によるクリーニング作用によって除去され
ると共に、該クリーニング作用は上記した成形品移送機
構12による成形品の移送作用時に同時に行われることに
なる。
The mold surface cleaning mechanism 13 described above is also used.
Is a state where the tip of a brush member (not shown) is pressed against the mold surfaces 16 of the upper and lower molds (20, 21), and
By moving on the mold surface 16 with the movement of 12,
It is provided so that the resin burr adhering to the mold surface 16 can be peeled off and the peeled resin burr can be sucked and removed to the outside through an appropriate vacuuming mechanism (resin burr suction / discharge mechanism). . This mold surface cleaning action is usually performed when the molded product transfer mechanism 12 engages the molded product of the resin sealing molding part 8 and transfers it to the unnecessary resin molded product cutting and removing part 15. Therefore, the normal resin burr is removed by the cleaning action of the mold surface cleaning mechanism 13, and the cleaning action is performed simultaneously with the above-described action of transferring the molded product by the molded product transport mechanism 12.

【0025】また、上記したクリーニング用UV照射機
構17は、上記材料供給機構11による各樹脂封止成形部8
への材料供給作業、及び、成形品移送機構12による成形
品取出作業を阻害しない退避位置(図3において実線に
て示す位置)と、該各樹脂封止成形部8における上下両
型(20・21) の型面16に近接する位置(図4において鎖線
にて示す位置)との間を夫々往復動自在となるように設
けられている。即ち、該クリーニング用UV照射機構17
は、樹脂封止成形作業を休止しているいずれかの樹脂封
止成形部における上下両型の型面をクリーニングする場
合に用いられるものであって、全ての樹脂封止成形部に
おいて通常の樹脂封止成形作業が行われている場合は、
その作業を阻害しない上記退避位置に移動・退避されて
いる。そして、定期的に、例えば、成形サイクル毎等や
作業交替時間、或は、成形装置の停止時間等を利用し
て、または、その必要時において、図4〜5に示すよう
に、樹脂封止成形部における上下両型(20・21) の型面16
間に嵌入させて用いるものである。
Further, the cleaning UV irradiation mechanism 17 described above includes the resin encapsulation molding section 8 by the material supply mechanism 11.
The retracted position (the position shown by the solid line in FIG. 3) that does not hinder the material supply work to the molded product and the molded product unloading work by the molded product transfer mechanism 12, and the upper and lower molds (20. 21) is provided so as to be reciprocally movable between a position close to the mold surface 16 (position shown by a chain line in FIG. 4). That is, the cleaning UV irradiation mechanism 17
Is used when cleaning the mold surfaces of the upper and lower molds in any of the resin encapsulation molding sections that have stopped the resin encapsulation molding operation. If encapsulation is being performed,
It has been moved / retracted to the retreat position that does not hinder the work. Then, on a regular basis, for example, by utilizing the molding cycle or the like, the work change time, the stop time of the molding apparatus, or the like, or when necessary, as shown in FIGS. Mold surface 16 of both upper and lower molds (20 ・ 21) in molding section
It is used by inserting it between them.

【0026】また、上記クリーニング用UV照射機構17
は、制御機構19を介して、上記した材料供給機構11及び
成形品移送機構12に対する自動制御と同様に、上記退避
位置と各樹脂封止成形部8における上下両型(20・21) の
型面16に近接する位置との間を往復動自在となるように
設けられており、従って、該UV照射機構17による型面
クリーニング作用を自動的に行うことができる。
The cleaning UV irradiation mechanism 17 is also provided.
Is the same as the automatic control for the material supply mechanism 11 and the molded product transfer mechanism 12 via the control mechanism 19, and the upper and lower molds (20, 21) of the retreat position and each resin sealing molding part 8 are formed. It is provided so as to be capable of reciprocating between a position close to the surface 16 and, therefore, the mold surface cleaning action by the UV irradiation mechanism 17 can be automatically performed.

【0027】該クリーニング用UV照射機構の本体17a
には、図5〜6に示すように、UV照射用のランプ(水
銀ランプ)17bが備えられており、該UV照射用ランプ
17bによって上記した上下両型(20・21) の型面16に近接
する位置から該型面16にUV照射を行うことができる。
The main body 17a of the cleaning UV irradiation mechanism
5 to 6, a UV irradiation lamp (mercury lamp) 17b is provided, and the UV irradiation lamp is provided.
With 17b, UV irradiation can be performed on the mold surface 16 from a position close to the mold surface 16 of the upper and lower molds (20, 21).

【0028】なお、図6に示したUV照射機構の本体17
aには、上下両型(20・21) の型面16を同時にUV照射す
ることができるように、UV照射用ランプ17bを上下両
面に配設している。また、図7に示したUV照射機構の
本体17aには、上記図6に示した構造に加えて、後述す
る型面16から分離飛散した型面汚染物を捕捉してこれを
外部へ強制的に吸引排出する型面汚染物の吸引排出機構
18aを併設した構成を示している。
The main body 17 of the UV irradiation mechanism shown in FIG.
In a, UV irradiation lamps 17b are arranged on both upper and lower surfaces so that the mold surfaces 16 of both upper and lower molds (20, 21) can be simultaneously irradiated with UV. Further, in addition to the structure shown in FIG. 6, the main body 17a of the UV irradiation mechanism shown in FIG. 7 captures mold surface contaminants separated and scattered from the mold surface 16 to be described later, and forces this to the outside. Suction and discharge mechanism for mold surface contaminants
It shows a configuration in which 18a is installed side by side.

【0029】また、上記した型面汚染物の吸引排出機構
(18・18a)は、次のように構成されている。即ち、図6〜
7に示すように、上下両型(20・21) に設けられる型面汚
染物の吸引排出機構18は、上下両キャビティ(23・26) の
外方周辺部に設けた吸気孔29と、外部に配設した真空ポ
ンプ等の真空源(図示なし)と、該吸気孔29と真空源と
を連通接続させる適宜な吸気通路30等から構成されてい
る。従って、上記した真空源を作動させると、上下両型
(20・21) の型面16付近の空気を上記吸気孔29及び吸気通
路30を通して外部へ真空引き(吸引排気)することがで
きるよう設けられている。また、図7に示すように、U
V照射機構の本体17aに設けられる型面汚染物の吸引排
出機構18aは、UV照射用ランプ17bの外方周辺部であ
って、上記した上下両型(20・21) における吸気孔29の位
置と略対応する位置に配置した吸気孔29aと、外部に配
設した真空ポンプ等の真空源(図示なし)と、該吸気孔
29aと真空源とを連通接続させる適宜な吸気通路30a等
から構成されている。従って、上記した真空源を作動さ
せると、上下両型(20・21) の型面16付近の空気を上記吸
気孔29a及び吸気通路30aを通して外部へ真空引きする
ことができるよう設けられている。
Further, a mechanism for sucking and discharging the mold surface contaminants described above.
(18 ・ 18a) has the following structure. That is, FIG.
As shown in FIG. 7, the suction and discharge mechanism 18 for the mold surface contaminants provided in both the upper and lower molds (20, 21) has an intake hole 29 provided in the outer peripheral portion of both the upper and lower cavities (23, 26) and A vacuum source such as a vacuum pump (not shown), and an appropriate intake passage 30 for connecting the intake hole 29 and the vacuum source. Therefore, when the above-mentioned vacuum source is activated, both upper and lower molds are
It is provided so that the air near the mold surface 16 of (20 · 21) can be evacuated (sucked and exhausted) to the outside through the suction hole 29 and the suction passage 30. Also, as shown in FIG.
The suction and discharge mechanism 18a for the mold surface contaminants provided in the main body 17a of the V irradiation mechanism is the outer peripheral portion of the UV irradiation lamp 17b, and the position of the air intake hole 29 in both the upper and lower molds (20, 21) described above. An intake hole 29a arranged at a position substantially corresponding to, a vacuum source (not shown) such as a vacuum pump arranged outside, and the intake hole
29a and a vacuum source are communicatively connected to each other. Therefore, when the above-mentioned vacuum source is operated, the air around the mold surfaces 16 of the upper and lower molds (20, 21) can be evacuated to the outside through the intake holes 29a and the intake passages 30a.

【0030】なお、後述するように、型面汚染物の吸引
排出機構(18・18a)は、型面汚染物の処理をより確実に且
つ迅速に行うような場合に併設すればよく、従って、必
ずしも必要な構成ではない。また、上記型面汚染物の吸
引排出機構(18・18a)は、少なくともその一方を備える構
成、或は、その両方を備える構成のいずれを採用しても
よい。また、各樹脂封止成形部8に、型面16から剥離し
た樹脂バリを外部へ吸引除去するための適宜な真空引き
機構が併設されている場合は、この真空引き機構を上記
した型面汚染物の吸引排出機として兼用することができ
る。
As will be described later, the suction / discharging mechanism (18, 18a) for the mold surface contaminants may be installed together when the treatment of the mold surface contaminants can be performed more reliably and quickly. It is not always necessary. Further, the suction / discharging mechanism (18, 18a) for the mold surface contaminants may be configured to have at least one of them or to have both of them. Further, in the case where each resin encapsulation molding part 8 is provided with an appropriate vacuum evacuation mechanism for sucking and removing the resin burr peeled from the mold surface 16 to the outside, this vacuum evacuation mechanism is used for the above-mentioned mold surface contamination. It can also be used as a suction and discharge machine for objects.

【0031】以下、上記装置を用いて電子部品を樹脂封
止成形する場合について説明する。まず、上下両型(20・
21) を型開きする。次に、材料供給機構11を介して、両
整列部(5・7) の成形前リードフレーム3及び樹脂タブレ
ット6を樹脂封止成形部8に同時に移送し、且つ、該成
形前リードフレーム3を下型キャビティ23部の凹所に嵌
合セットし、該樹脂タブレット6を各ポット22内に夫々
投入・供給する。このとき、各ポット22内の樹脂タブレ
ット6は順次に加熱溶融化されることになる。次に、下
型21を上動させて上下両型(20・21) を型締めする。次
に、各プランジャによって各ポット22内の樹脂タブレッ
ト6を加圧することにより、該樹脂タブレット6を加熱
溶融化すると共に、該溶融樹脂材料を通路部24を通して
上下両キャビティ(23・26) 内に注入充填させて、該上下
両キャビティ(23・26) 内にセットしたリードフレーム3
上の電子部品を樹脂封止成形する。上記した電子部品の
樹脂封止成形後において、下型21を再び下動させて上下
両型(20・21) を型開きする。次に、上記型開工程と同時
的に、封止済リードフレーム9及び不要樹脂成形体14を
同時に離型する。次に、成形品移送機構12を介して、封
止済リードフレーム9と不要樹脂成形体14を不要樹脂成
形体切断除去部15に移送して、その不要樹脂成形体14部
分を切断除去する。このとき、成形品移送機構12には型
面クリーニング機構13が一体化されているので、前述し
たように、該成形品移送機構12が不要樹脂成形体切断除
去部15側へ移動する際に、該型面クリーニング機構13に
よる型面16のクリーニング作用が行われる。従って、型
面16に付着している樹脂バリはこのクリーニング作用と
前述した真空引き機構(図6〜7参照)を介して外部へ
吸引除去される。次に、該不要樹脂成形体14を切断除去
した成形品(封止済リードフレーム9)を、上記成形品
移送機構12を介して、成形品収納部10に移送して収納す
る。
Hereinafter, a case where an electronic component is resin-molded by using the above apparatus will be described. First, both upper and lower types (20
21) Open the mold. Next, the pre-molding lead frame 3 and the resin tablet 6 of both alignment parts (5, 7) are simultaneously transferred to the resin sealing molding part 8 via the material supply mechanism 11, and the pre-molding lead frame 3 is moved. The resin tablets 6 are fitted and set in the recesses of the lower mold cavity 23, and the resin tablets 6 are respectively charged and supplied into the pots 22. At this time, the resin tablets 6 in each pot 22 are sequentially heated and melted. Next, the lower mold 21 is moved upward and the upper and lower molds (20, 21) are clamped. Next, by pressing the resin tablet 6 in each pot 22 with each plunger, the resin tablet 6 is heated and melted, and the molten resin material is passed through the passage portion 24 into the upper and lower cavities (23, 26). Lead frame 3 which is filled by injection and set in the upper and lower cavities (23, 26)
The above electronic component is molded with resin. After the resin sealing molding of the electronic component described above, the lower mold 21 is moved downward again to open the upper and lower molds (20, 21). Next, the sealed lead frame 9 and the unnecessary resin molded body 14 are simultaneously released from the mold at the same time as the mold opening step. Next, the sealed lead frame 9 and the unnecessary resin molded body 14 are transferred to the unnecessary resin molded body cutting and removing section 15 via the molded product transfer mechanism 12, and the unnecessary resin molded body 14 portion is cut and removed. At this time, since the mold surface cleaning mechanism 13 is integrated with the molded product transfer mechanism 12, as described above, when the molded product transfer mechanism 12 moves to the unnecessary resin molded body cutting and removing section 15 side, The cleaning operation of the mold surface 16 by the mold surface cleaning mechanism 13 is performed. Therefore, the resin burr adhering to the mold surface 16 is sucked and removed to the outside through this cleaning action and the aforementioned vacuuming mechanism (see FIGS. 6 to 7). Next, the molded product (sealed lead frame 9) obtained by cutting and removing the unnecessary resin molded body 14 is transferred to the molded product storage unit 10 via the molded product transfer mechanism 12 and stored therein.

【0032】以下、型面16に付着蓄積した上記型面汚染
物32をクリーニング用UV照射機構17を用いて除去する
型面クリーニング作用について説明する。上記UV照射
機構17を用いる型面クリーニング作業は、前述したよう
に、定期的に、または、成形装置の停止時間を利用し
て、或は、その必要時に、制御機構19介して、UV照射
機構17の本体17aを樹脂封止成形部8における上下両型
(20・21) の型面16間に嵌入させて行うものである。該U
V照射機構17の本体17aに備えたUV照射用ランプ17b
によって上下両型(20・21) の型面16に近接する位置から
該型面16にUV照射31を行うと、図8に示すように、該
型面16に付着蓄積した、樹脂材料中に含まれる離型剤や
加熱により発生した揮発ガス等から成る型面汚染物32
は、分解されて該型面16から分離飛散することになる。
即ち、型面16にUV照射31を行うことによって、該型面
16に付着蓄積した型面汚染物32を分解して該型面16から
分離飛散させることができるので、型面16に所要時間
(例えば、30分間)のUV照射31を行うことによって、
該型面16を効率良く且つ確実にクリーニングすることが
できる。
The mold surface cleaning action of removing the mold surface contaminants 32 adhered and accumulated on the mold surface 16 by using the cleaning UV irradiation mechanism 17 will be described below. As described above, the mold surface cleaning operation using the UV irradiation mechanism 17 is performed regularly or by utilizing the down time of the molding apparatus, or when necessary, through the control mechanism 19 through the UV irradiation mechanism. The main body 17a of 17 is the upper and lower molds in the resin molding part 8.
It is carried out by fitting it between the mold surfaces 16 of (20 ・ 21). The U
UV irradiation lamp 17b provided on the main body 17a of the V irradiation mechanism 17
When UV irradiation 31 is performed on the mold surface 16 from a position close to the mold surfaces 16 of the upper and lower molds (20, 21) by the method, as shown in FIG. Mold surface contaminants 32 consisting of release agent contained and volatile gas generated by heating 32
Will be decomposed and separated and scattered from the mold surface 16.
That is, by performing UV irradiation 31 on the mold surface 16,
Since the mold surface contaminant 32 adhered and accumulated on the mold surface 16 can be decomposed and separated and scattered from the mold surface 16, by performing UV irradiation 31 for the required time (for example, 30 minutes) on the mold surface 16,
The mold surface 16 can be cleaned efficiently and surely.

【0033】なお、各樹脂封止成形部8に設けた樹脂バ
リを外部へ吸引除去するための適宜な真空引き機構や、
上記した型面汚染物の吸引排出機構(18・18a)を併用する
ことにより、型面16から分離飛散した型面汚染物32を確
実に捕捉すると共に、該型面汚染物32を外部へ強制的に
吸引排出することができる。従って、型面汚染物32の処
理を確実に行うことができると云った利点がある。
An appropriate vacuuming mechanism for sucking and removing the resin burr provided on each resin sealing molding portion 8 to the outside,
By using the above-mentioned mold surface contaminant suction / discharge mechanism (18, 18a) together, the mold surface contaminants 32 separated and scattered from the mold surface 16 are reliably captured, and the mold surface contaminants 32 are forced to the outside. Can be sucked and discharged. Therefore, there is an advantage that the mold surface contaminant 32 can be surely treated.

【0034】また、上記した構成においては、型面汚染
物32を除去すると云うクリーニング作業の目的で金型を
装置本体等からいちいち取り外す必要がないから、例え
ば、樹脂成形直後等の加熱された状態にある金型の型面
に対して直ぐにUV照射31を行うことができる。従っ
て、この場合は、加熱状態にある金型の型面汚染物32に
対する分解作用を促進させることができるため、該型面
汚染物32を除去するためのクリーニング作業をより効率
良く且つ迅速に行うことができると云った利点がある。
Further, in the above-mentioned structure, since it is not necessary to remove the mold from the apparatus main body or the like for the purpose of cleaning work for removing the mold surface contaminants 32, for example, in a heated state immediately after resin molding. The UV irradiation 31 can be immediately performed on the mold surface of the mold. Therefore, in this case, the decomposition action of the mold surface contaminants 32 of the heated mold can be promoted, so that the cleaning operation for removing the mold surface contaminants 32 can be performed more efficiently and quickly. There is an advantage that can be done.

【0035】本発明は、上述した実施例のものに限定さ
れるものではなく、本発明の趣旨を逸脱しない範囲内
で、必要に応じて、任意に且つ適宜に変更・選択して採
用できるものである。
The present invention is not limited to the above-mentioned embodiments, but can be arbitrarily and appropriately modified / selected as necessary within the scope of the gist of the present invention. Is.

【0036】例えば、上記した成形品移送機構12とは別
に、不要樹脂成形体14部分を切断除去した封止済リード
フレーム9のみを上記成形品収納部10に移送して収納す
る専用の移送機構(図示なし)を併設するようにしても
よい。
For example, in addition to the molded product transfer mechanism 12 described above, a dedicated transfer mechanism for transferring only the sealed lead frame 9 obtained by cutting and removing the unnecessary resin molded body 14 to the molded product storage section 10 for storage. (Not shown) may be installed side by side.

【0037】また、上記した型面汚染物32の吸引排出機
構18は上記樹脂封止成形部8に一体に設けられている場
合を図示しているが、該吸引排出機構18を樹脂封止成形
部8とは別体に構成するようにしてもよい。
Further, the suction / discharge mechanism 18 for the mold surface contaminants 32 described above is shown as being integrally provided in the resin sealing molding portion 8. However, the suction / discharge mechanism 18 is molded by resin sealing. It may be configured separately from the unit 8.

【0038】[0038]

【発明の効果】本発明によれば、成形装置本体と該本体
に複数の樹脂封止成形部を着脱自在に連結させる形態の
樹脂封止成形装置において、材料供給機構及び成形品移
送機構の兼用による成形コストの低減化と云った作用・
効果、及び、樹脂バリの除去と云う型面クリーニング作
用・効果を維持することができるのみならず、各樹脂封
止成形部における型面に付着蓄積した型面汚染物を分解
して該型面から分離飛散させる型面クリーニング作業を
効率良く且つ確実に行うことができる。更に、該型面汚
染物のクリーニング作業を含む全作業工程を自動制御で
きる電子部品の樹脂封止成形装置を提供することができ
ると云った優れた実用的な効果を奏するものである。
According to the present invention, in the resin encapsulation molding apparatus in which a molding apparatus main body and a plurality of resin encapsulation molding portions are detachably connected to the main body, the material supply mechanism and the molded product transfer mechanism are combined. The effect of reducing the molding cost by
Not only the effect and the mold surface cleaning action and effect of removing resin burrs can be maintained, but also the mold surface contaminants accumulated and accumulated on the mold surface in each resin encapsulation molding portion are decomposed to decompose the mold surface. It is possible to efficiently and surely perform the mold surface cleaning work for separating and scattering from the mold. Further, it has an excellent practical effect that it is possible to provide a resin encapsulation molding apparatus for electronic parts capable of automatically controlling all the work steps including the work of cleaning the mold surface contaminants.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る電子部品の樹脂封止成形装置の一
部切欠概略平面図であり、樹脂封止成形装置の本体に対
して樹脂封止成形部を備えた樹脂封止成形装置から成る
複数の連結体を連結させて構成した状態を示している。
FIG. 1 is a partially cut-away schematic plan view of a resin encapsulation / molding apparatus for an electronic component according to the present invention, showing a resin encapsulation apparatus having a resin encapsulation section with respect to a main body of the encapsulation apparatus FIG. 2 shows a state in which a plurality of connected bodies are connected to each other.

【図2】図1に対応する成形装置であって、その一部切
欠概略横断平面図である。
FIG. 2 is a partially cut-away schematic cross-sectional plan view of the forming apparatus corresponding to FIG. 1;

【図3】図1に対応する成形装置であって、図1のA−
A線における一部切欠概略縦断面図である。
FIG. 3 is a molding apparatus corresponding to FIG.
It is a partial notch schematic longitudinal cross-sectional view in the A line.

【図4】図3に対応する成形装置の一部切欠概略縦断面
図である。
FIG. 4 is a schematic vertical sectional view of a part of the molding apparatus corresponding to FIG. 3;

【図5】図1に対応する成形装置であって、その樹脂封
止成形部の要部を拡大して示す一部切欠側面図であり、
型開きした金型間にクリーニング用UV照射機構を嵌入
した状態を示している。
FIG. 5 is a partially cut-away side view showing a molding device corresponding to FIG. 1 and showing an enlarged main part of a resin-sealed molding portion;
It shows a state in which a cleaning UV irradiation mechanism is fitted between the opened molds.

【図6】図5に対応する樹脂封止成形部であって、その
要部を拡大して示す一部切欠縦断面図である。
FIG. 6 is a partially cutaway longitudinal sectional view showing a resin sealing molded portion corresponding to FIG. 5 and showing a main portion thereof in an enlarged manner.

【図7】本発明に係る他の樹脂封止成形部の要部を示す
一部切欠縦断面図である。
FIG. 7 is a partially cutaway vertical sectional view showing a main part of another resin sealing molding portion according to the present invention.

【図8】クリーニング用UV照射機構によるクリーニン
グ作用の説明図である。
FIG. 8 is an explanatory diagram of a cleaning action by a cleaning UV irradiation mechanism.

【符号の説明】[Explanation of symbols]

1 成形装置本体 2 連結体 3 成形前リードフレーム 4 材料装填部 5 成形前リードフレームの整列部 6 樹脂タブレット 7 整列部 8 樹脂封止成形部 9 封止済リードフレーム 10 成形品収納部 11 材料供給機構 12 成形品移送機構 13 型面クリーニング機構 14 不要樹脂成形体 15 不要樹脂成形体切断除去部 16 型 面 17 UV照射機構 17a 本 体 17b UV照射用ランプ 18 吸引排出機構 18a 吸引排出機構 19 制御機構 20 固定上型 21 可動下型 22 ポット 23 キャビティ 24 通路部 25 カル部 26 キャビティ 27 ゲート部 28 エアベント 29 吸気孔 29a 吸気孔 30 吸気通路 30a 吸気通路 31 UV照射 32 型面汚染物 1 Molding Device Main Body 2 Connected Body 3 Pre-Molding Lead Frame 4 Material Loading Section 5 Pre-Molding Lead Frame Alignment Section 6 Resin Tablet 7 Alignment Section 8 Resin Sealing Molding Section 9 Sealed Lead Frame 10 Molded Product Storage Section 11 Material Supply Mechanism 12 Molded product transfer mechanism 13 Mold surface cleaning mechanism 14 Unnecessary resin molding 15 Unnecessary resin molding cutting and removing section 16 Mold surface 17 UV irradiation mechanism 17a Main body 17b UV irradiation lamp 18 Suction and discharge mechanism 18a Suction and discharge mechanism 19 Control mechanism 20 Fixed upper mold 21 Movable lower mold 22 Pot 23 Cavity 24 Passage 25 Cull 26 Cavity 27 Gate 28 Air vent 29 Air intake 29a Air intake 30 Air intake 30a Air intake 31 UV irradiation 32 Surface contaminants

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 半導体チップ等の電子部品を樹脂材料に
て封止成形する樹脂封止成形部を備えた電子部品の樹脂
封止成形装置の本体と、該本体に対して少なくとも樹脂
封止成形部を備えた樹脂封止成形装置から成る連結体を
着脱自在に装設するように構成した電子部品の樹脂封止
成形装置であって、 上記各樹脂封止成形部における金型の型面クリーニング
用のUV照射機構を備えると共に、 該クリーニング用UV照射機構を、上記各樹脂封止成形
部への材料供給作業及び成形品取出作業を阻害しない退
避位置と、該各樹脂封止成形部における金型の型面近接
位置へ夫々往復動自在に装設して構成したことを特徴と
する電子部品の樹脂封止成形装置。
1. A body of a resin encapsulation molding apparatus for an electronic component, comprising a resin encapsulation molding unit for encapsulating an electronic component such as a semiconductor chip with a resin material, and at least resin encapsulation molding for the body. A resin encapsulation molding apparatus for electronic parts, which is configured to detachably mount a connected body composed of a resin encapsulation molding apparatus including a mold, wherein the mold surface cleaning of the mold in each resin encapsulation molding section is performed. A UV irradiating mechanism for cleaning the UV irradiating mechanism for cleaning, and the cleaning UV irradiating mechanism is provided at a retreat position that does not hinder the material supply work to the resin sealing molding part and the molding product unloading work and the gold in the resin sealing molding part. A resin encapsulation molding apparatus for electronic parts, wherein the resin encapsulation molding apparatus is configured so as to be reciprocally movable at positions close to a mold surface.
【請求項2】 樹脂封止成形部に、該樹脂封止成形部に
おける金型の型面から分離飛散した型面汚染物を捕捉す
ると共に、該型面汚染物を外部へ強制的に吸引排出する
型面汚染物の吸引排出機構を併設して構成したことを特
徴とする請求項1に記載の電子部品の樹脂封止成形装
置。
2. The resin encapsulation molding part captures mold surface contaminants separated and scattered from the mold surface of the mold in the resin encapsulation molding part, and forcibly sucks and discharges the mold surface contaminants to the outside. The resin encapsulation molding apparatus for an electronic component according to claim 1, further comprising a suction and discharge mechanism for the mold surface contaminants.
【請求項3】 クリーニング用UV照射機構に、樹脂封
止成形部における金型の型面から分離飛散した型面汚染
物を捕捉すると共に、該型面汚染物を外部へ強制的に吸
引排出する型面汚染物の吸引排出機構を併設して構成し
たことを特徴とする請求項1に記載の電子部品の樹脂封
止成形装置。
3. The cleaning UV irradiation mechanism captures mold surface contaminants separated and scattered from the mold surface of the mold in the resin encapsulation molding portion, and forcibly sucks and discharges the mold surface contaminants to the outside. The resin encapsulation molding apparatus for an electronic component according to claim 1, further comprising a suction and discharge mechanism for the mold surface contaminants.
【請求項4】 樹脂封止成形部とクリーニング用UV照
射機構との夫々に、該樹脂封止成形部における金型の型
面から分離飛散した型面汚染物を捕捉すると共に、該型
面汚染物を外部へ強制的に吸引排出する型面汚染物の吸
引排出機構を併設して構成したことを特徴とする請求項
1に記載の電子部品の樹脂封止成形装置。
4. The mold sealing material separated and scattered from the mold surface of the mold in the resin sealing molding portion and the UV irradiation mechanism for cleaning is trapped in each of the resin sealing molding portion and the mold surface contamination. The resin encapsulation molding apparatus for an electronic component according to claim 1, further comprising a suction and discharge mechanism of a mold surface contaminant for forcibly sucking and discharging an object to the outside.
JP7306911A 1995-10-30 1995-10-30 Resin sealing molding machine electronic component Pending JPH09123206A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP7306911A JPH09123206A (en) 1995-10-30 1995-10-30 Resin sealing molding machine electronic component
TW085108202A TW317532B (en) 1995-10-30 1996-07-06
MYPI96004416A MY123756A (en) 1995-10-30 1996-10-24 Resin sealing and molding apparatus for sealing electronic parts
US08/738,095 US5783220A (en) 1995-10-30 1996-10-25 Resin sealing and molding apparatus for sealing electronic parts
SG9610974A SG96163A1 (en) 1995-10-30 1996-10-28 Resin sealing/molding apparatus sealing electronic parts
KR1019960049365A KR100187537B1 (en) 1995-10-30 1996-10-29 Mold cleaning mechanism for resin sealing/molding apparatus
EP96307794A EP0771638A3 (en) 1995-10-30 1996-10-29 Mold cleaning mechanism for resin sealing/molding apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7306911A JPH09123206A (en) 1995-10-30 1995-10-30 Resin sealing molding machine electronic component

Publications (1)

Publication Number Publication Date
JPH09123206A true JPH09123206A (en) 1997-05-13

Family

ID=17962764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7306911A Pending JPH09123206A (en) 1995-10-30 1995-10-30 Resin sealing molding machine electronic component

Country Status (7)

Country Link
US (1) US5783220A (en)
EP (1) EP0771638A3 (en)
JP (1) JPH09123206A (en)
KR (1) KR100187537B1 (en)
MY (1) MY123756A (en)
SG (1) SG96163A1 (en)
TW (1) TW317532B (en)

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KR100446111B1 (en) * 1997-10-27 2004-10-14 삼성전자주식회사 Semiconductor package molding press apparatus having loading/unloading/cleaning assembly and semiconductor package molding press method thereof
KR100780453B1 (en) * 2006-11-21 2007-11-28 세크론 주식회사 Tray transfer device and method for transferring tray using the same
JP2008227456A (en) * 2007-03-13 2008-09-25 Samsung Electro Mech Co Ltd High-power led package and manufacturing method therefor

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JP3631848B2 (en) * 1996-06-28 2005-03-23 富士通株式会社 Image display system
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EP0771638A3 (en) 1999-03-17
KR970020382A (en) 1997-05-28

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