JPH091067A - Oscillator for tightening bolt - Google Patents
Oscillator for tightening boltInfo
- Publication number
- JPH091067A JPH091067A JP7178073A JP17807395A JPH091067A JP H091067 A JPH091067 A JP H091067A JP 7178073 A JP7178073 A JP 7178073A JP 17807395 A JP17807395 A JP 17807395A JP H091067 A JPH091067 A JP H091067A
- Authority
- JP
- Japan
- Prior art keywords
- oscillator
- backing plate
- front plate
- bolt
- resonance frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 12
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超音波振動を利用した
超音波加工機、超音波洗浄機等に用いられるボルト締め
振動子に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bolt tightening vibrator used in ultrasonic processing machines, ultrasonic cleaning machines and the like which utilize ultrasonic vibration.
【０００２】[0002]
【従来の技術】従来のボルト締め振動子は、図５に示す
ように、裏打板２２と前面板２６とナット２１とボルト
２５と電極板２４および圧電セラミックス２３から構成
される。前記裏打板２２と前記前面板２６には、アルミ
ニウム、ステンレス、チタン等の金属または金属合金材
料が用いられ、特に、加工しやすさや値段等を考慮し
て、アルミニウムが用いられていた。また、振動の連続
性と安定性を保つために、各部品の接合する表面のラッ
ピング処理が行われ、約１μｍから２μｍの面粗さで仕
上げ、接合して、組み立てられていた。2. Description of the Related Art As shown in FIG. 5, a conventional bolting oscillator is composed of a backing plate 22, a front plate 26, nuts 21, bolts 25, electrode plates 24 and piezoelectric ceramics 23. The backing plate 22 and the front plate 26 are made of metal or metal alloy material such as aluminum, stainless steel, titanium, etc. In particular, aluminum is used in consideration of workability and price. Further, in order to maintain continuity and stability of vibration, the surfaces to be joined of the respective parts are lapped, and finished by a surface roughness of about 1 μm to 2 μm, joined and assembled.
【０００３】[0003]
【発明が解決しようとする課題】従来のボルト締め振動
子を製作する際、振動子の直径がφ１０ｍｍ〜φ５０ｍ
ｍと決定されると、製作可能な共振周波数が、３０ｋＨ
ｚ以上１５０ｋＨｚ以下の範囲となり、この範囲を越え
るものについては、振動方向が縦方向だけではなく、径
方向、即ち、横方向にも現れ、超音波洗浄機等に用いた
場合、エロージョンの発生が促進される。また、加工機
等に用いられた場合、縦方向の振幅減少による加工不良
等の問題が発生するため、実用上、使用できない欠点が
あった。When manufacturing a conventional bolted vibrator, the diameter of the vibrator is φ10 mm to φ50 m.
If m is determined, the manufacturable resonance frequency is 30 kHz.
A range of z or more and 150 kHz or less, and for those exceeding this range, the vibration direction appears not only in the longitudinal direction but also in the radial direction, that is, in the lateral direction, and when used in an ultrasonic cleaning machine or the like, erosion occurs. Be promoted. Further, when it is used in a processing machine or the like, there is a problem such as a processing defect due to a decrease in the vertical amplitude, which is a drawback that it cannot be used in practice.
【０００４】本発明の目的は、前記裏打板と前面板の両
方、あるいは片方に音波伝搬速度が大きい窒化アルミニ
ウムを使用することにより、従来品と同一全長で、従来
品より共振周波数を高めると共に、同一直径の圧電セラ
ミックスを使用した場合に製造可能な周波数範囲を高周
波側へ拡大することができるボルト締め振動子を提供す
ることにある。An object of the present invention is to use aluminum nitride having a large sound wave propagation velocity in both or one of the backing plate and the front plate to increase the resonance frequency as compared with the conventional product with the same overall length as the conventional product. An object of the present invention is to provide a bolt tightening vibrator capable of expanding a manufacturable frequency range to a high frequency side when piezoelectric ceramics having the same diameter are used.
【０００５】[0005]
【課題を解決するための手段】本発明は、裏打板と前面
板とボルトとナットおよび一対の圧電セラミックスと電
極板から構成されるボルト締め振動子において、前記裏
打板または前記前面板を窒化アルミニウム材料で構成す
ることにより、高周波の共振周波数であるボルト締め振
動子が得られる。DISCLOSURE OF THE INVENTION The present invention relates to a bolting oscillator comprising a backing plate, a front plate, bolts and nuts, and a pair of piezoelectric ceramics and an electrode plate, wherein the backing plate or the front plate is made of aluminum nitride. By using a material, a bolted oscillator having a high resonance frequency can be obtained.
【０００６】即ち、本発明は、裏打板と前面板とボルト
とナットおよび一対の圧電セラミックスと電極板から構
成されるボルト締め振動子において、前記裏打板または
前記前面板に窒化アルミニウム材料を用いることを特徴
とするボルト締め振動子である。That is, according to the present invention, in a bolting oscillator composed of a backing plate, a front plate, bolts and nuts, and a pair of piezoelectric ceramics and an electrode plate, an aluminum nitride material is used for the backing plate or the front plate. It is a bolt tightening oscillator characterized by.
【０００７】[0007]
【作用】裏打板または前面板に、音波伝搬速度が約５０
７０ｍ／ｓのアルミニウム、約４９５０ｍ／ｓのステン
レス、約４８７５ｍ／ｓのチタン等の金属または金属合
金系材料を使用せず、約１０,０００ｍ／ｓと大きい窒
化アルミニウムを使用することにより、従来品のアルミ
ニウムと比べ、同一全長で共振周波数を１.５倍に高め
ることができ、また、同一直径で、製造可能な周波数範
囲も高周波側へ拡大することができるボルト締め振動子
が得られる。Function: The sound wave velocity is about 50 on the backing plate or front plate.
By using aluminum nitride of 70 m / s, stainless steel of about 4950 m / s, titanium of about 4875 m / s, or metal alloy based materials such as titanium, large aluminum nitride of about 10,000 m / s is used. As compared with the aluminum of (1), it is possible to obtain a bolted oscillator that can increase the resonance frequency by 1.5 times with the same overall length, and that has the same diameter and can expand the manufacturable frequency range to the high frequency side.
【０００８】[0008]
【実施例】本発明の実施例について図面を用いて説明す
る。図１は、本発明の一実施例のボルト締め振動子の構
成を示した正面図である。図１に示すように、本発明の
ボルト締め振動子は、窒化アルミニウムの裏打板２と、
窒化アルミニウムの前面板６と、ボルト３と、ナット１
と一対の圧電セラミックス４、及び電極板５から構成さ
れている。ボルト３を除いた全ての部品が、縦方向に積
み上げられた面接合による構成で組み立てられており、
これにより、該ボルト締め振動子の両端面に縦方向の振
動が得られる構造である。Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a front view showing a configuration of a bolt tightening vibrator according to an embodiment of the present invention. As shown in FIG. 1, the bolted oscillator of the present invention comprises an aluminum nitride backing plate 2,
Aluminum nitride front plate 6, bolt 3, nut 1
And a pair of piezoelectric ceramics 4 and an electrode plate 5. All parts except the bolt 3 are assembled in a vertically stacked surface-bonded configuration.
As a result, the structure is such that longitudinal vibration is obtained on both end faces of the bolted vibrator.
【０００９】本発明のボルト締め振動子においては、各
々の裏打板２と前面板６のどちらか一方の板（本例では
前面板６）の圧電セラミックス４と接合する面の表面
を、該表面の任意の１０箇所での平均面粗さが１〜２μ
ｍになる精度に加工を施している。また、比較例とし
て、図５に示すように、面粗さが約１μｍから２μｍの
精度で加工したアルミニウムからなる裏打板２２と前面
板２６を用いて、従来のボルト締め振動子を作製した。In the bolted oscillator of the present invention, the surface of one of the backing plate 2 and the front plate 6 (the front plate 6 in this example) to be joined to the piezoelectric ceramics 4 is the surface. The average surface roughness at 10 arbitrary points is 1-2 μ
It is processed to an accuracy of m. Further, as a comparative example, as shown in FIG. 5, a conventional bolting oscillator was manufactured using a backing plate 22 and a front plate 26 made of aluminum processed with an accuracy of surface roughness of about 1 μm to 2 μm.
【００１０】前記ボルト締め振動子において、これらの
材料の定数の一つである音波伝搬速度から、下記に示す
式により、共振周波数が求められる。In the bolt tightening oscillator, the resonance frequency is obtained from the sound wave propagation velocity, which is one of the constants of these materials, by the following formula.
【００１１】ｆｒ＝ｖ／２ｌ・・・・・・・・・・（１） ｌ：ボルト締め振動子の全長、ｖ：音波伝搬速度、ｆ
ｒ：共振周波数Fr = v / 2l (1) l: total length of bolted oscillator, v: sound wave propagation velocity, f
r: resonance frequency
【００１２】図１及び図５において、Ｄ／ｌ＜０.６、
Ｄ＝２０φｍｍの時に、本発明品、及び従来品の各々の
全長ｌｍｍを、４０ｍｍ，５０ｍｍ，８０ｍｍ，９０ｍ
ｍ，１００ｍｍと可変した場合の共振周波数の変化を求
めた結果を表１に示した。In FIGS. 1 and 5, D / l <0.6,
When D = 20 mm, the total length 1 mm of each of the product of the present invention and the conventional product is 40 mm, 50 mm, 80 mm, 90 m.
Table 1 shows the results of the change in the resonance frequency when the value was varied from m to 100 mm.
【００１３】 [0013]
【００１４】表１をグラフ化して図２に示した。図２に
おいて、Ａは本発明品、Ｂは従来品である。音波伝搬速
度が、従来品のアルミニウムでは、約５０７０ｍ／ｓで
あるのに対して、本発明品の窒化アルミニウムでは１
０,０００ｍ／ｓである。このように、約２倍の材料の
窒化アルミニウムを使用することで、Ａに示すように、
従来品と同一全長で、共振周波数を１.５倍に高めるこ
とができた。A graph of Table 1 is shown in FIG. In FIG. 2, A is the product of the present invention and B is the conventional product. The sound wave propagation speed is about 5070 m / s in the conventional aluminum, whereas it is 1 in the aluminum nitride of the present invention.
It is 0000 m / s. In this way, by using about twice the amount of aluminum nitride, as shown in A,
With the same overall length as the conventional product, the resonance frequency could be increased 1.5 times.
【００１５】ところで、前記ボルト締め振動子は、縦振
動のみであれば、共振周波数特性がよい。しかしなが
ら、Ｄ／ｌの比が大きくなると、縦振動に径方向の横振
動が入ってきて、周波数特性を劣化させる。そこで、Ｄ
／ｌの比により径方向成分／縦方向成分×１００％をＭ
とし、Ｍの値を求める。例えば、Ｄ／ｌ＝０.４の場合
には、Ｍ＝５％となるが、Ｄ／ｌ＝０.７の場合には、
Ｍ＝１５％程度となり、径方向の振動が発生する。以上
のようにして、Ｄ／ｌの比の値に対して、Ｍの値を求め
てグラフ化すると、図４のようになる。By the way, the bolted oscillator has good resonance frequency characteristics as long as it has only longitudinal vibration. However, when the D / l ratio becomes large, radial transverse vibration is introduced into the longitudinal vibration, and the frequency characteristic is deteriorated. So D
The ratio of radial component / longitudinal component x 100% is M
Then, the value of M is obtained. For example, when D / l = 0.4, M = 5%, but when D / l = 0.7,
M = about 15%, and radial vibration occurs. As described above, when the value of M is obtained for the value of the ratio of D / l and is graphed, it becomes as shown in FIG.
【００１６】図４より、Ｍは、Ｄ／ｌ＜０.６以内で、
直線を示しているが、それ以上では、曲線となって、急
激に増加する。従って、Ｄ／ｌ＞０.６では劣化が大き
くなるため、Ｄ／ｌ＜０.６以内でしか適用できないこ
とがわかる。このため、直径Ｄを変化させず共振周波数
を高くすることは、困難となる。From FIG. 4, M is within D / l <0.6,
It shows a straight line, but beyond that, it becomes a curve and increases sharply. Therefore, it can be seen that the deterioration becomes large when D / l> 0.6, so that it can be applied only when D / l <0.6. Therefore, it is difficult to increase the resonance frequency without changing the diameter D.
【００１７】また、図１及び図５において、Ｄ／ｌ＜
０.６の時に、本発明品及び従来品の各々の直径Ｄφｍ
ｍを、１０ｍｍ，２０ｍｍ，３０ｍｍ，４０ｍｍ，５０
ｍｍと可変した場合の共振周波数の変化を求めた結果を
表２に示した。なお、表２中の（）内には、最大全長ｌ
max＝Ｄ／０.６の値を示した。Further, in FIGS. 1 and 5, D / l <
When 0.6, the diameter Dφm of each of the product of the present invention and the conventional product
m is 10 mm, 20 mm, 30 mm, 40 mm, 50
Table 2 shows the results of the change in the resonance frequency when the value was changed to mm. The maximum total length l is shown in () in Table 2.
A value of max = D / 0.6 was shown.
【００１８】 [0018]
【００１９】表２をグラフ化して図３に示した。図３に
おいて、Ｃは本発明品、Ｅは従来品である。同一直径の
セラミックを使用した場合、本発明品では、従来品に比
べて、製造可能な周波数範囲も高周波側へ拡大すること
がわかる。Table 2 is shown in graph form in FIG. In FIG. 3, C is the product of the present invention and E is the conventional product. It can be seen that, when ceramics having the same diameter are used, the product range of the present invention is expanded to the high frequency side as compared with the conventional product.
【００２０】[0020]
【発明の効果】以上、述べたように、本発明品では、音
波伝搬速度が、アルミニウム、ステンレス（ＳＵＳ）に
比べて、約２倍以上１０,０００ｍ／ｓの窒化アルミニ
ウムを使用することで、従来品と同一全長で、共振周波
数を１.５倍に高めることができると共に、同一直径の
セラミックを使用した場合にも製造可能な、周波数範囲
も高周波側へ拡大することができるボルト締め振動子を
提供できる。As described above, in the product of the present invention, the use of aluminum nitride having a sound wave velocity of about twice or more, 10,000 m / s as compared with aluminum and stainless steel (SUS), With the same overall length as the conventional product, the resonance frequency can be increased by 1.5 times, and the frequency range can be expanded to the high frequency side, which can be manufactured even when using ceramics with the same diameter. Can be provided.
【図１】本発明の実施例のボルト締め振動子を示す正面
図。FIG. 1 is a front view showing a bolt tightening vibrator according to an embodiment of the invention.
【図２】本発明と従来のボルト締め振動子の全長に対す
る共振周波数の関係を示す図。FIG. 2 is a diagram showing the relationship between the resonance frequency and the total length of a conventional bolted oscillator according to the invention.
【図３】本発明と従来のボルト締め振動子の直径に対す
る共振周波数の関係を示す図。FIG. 3 is a diagram showing a relationship between a resonance frequency and a diameter of a bolted oscillator according to the invention and a conventional bolted oscillator.
【図４】本発明のボルト締め振動子のＤ／ｌに対する径
方向成分／縦方向成分の関係を示す図。FIG. 4 is a diagram showing a relationship of radial direction component / longitudinal direction component with respect to D / l of the bolted oscillator of the present invention.
【図５】従来のボルト締め振動子の正面図。FIG. 5 is a front view of a conventional bolted vibrator.
１，２１ ナット ２，２２ 裏打板 ３，２５ ボルト ４，２３ 圧電セラミックス ５，２４ 電極板 ６，２６ 前面板 Ａ，Ｃ 本発明品 Ｂ，Ｅ 従来品 Ｄ 直径 ｌ 全長 1,21 Nut 2,22 Backing plate 3,25 Bolt 4,23 Piezoelectric ceramics 5,24 Electrode plate 6,26 Front plate A, C Inventive product B, E Conventional product D Diameter l Total length
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 // Ｂ０８Ｂ 3/12 Ｈ０１Ｌ 41/08 Ｃ ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location // B08B 3/12 H01L 41/08 C
Claims (1)
一対の圧電セラミックスと電極板から構成されるボルト
締め振動子において、前記裏打板または前記前面板に窒
化アルミニウム材料を用いることを特徴とするボルト締
め振動子。1. A bolting oscillator comprising a backing plate, a front plate, bolts and nuts, and a pair of piezoelectric ceramics and an electrode plate, wherein an aluminum nitride material is used for the backing plate or the front plate. Bolt tightening oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7178073A JPH091067A (en) | 1995-06-20 | 1995-06-20 | Oscillator for tightening bolt |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7178073A JPH091067A (en) | 1995-06-20 | 1995-06-20 | Oscillator for tightening bolt |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH091067A true JPH091067A (en) | 1997-01-07 |
Family
ID=16042153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7178073A Pending JPH091067A (en) | 1995-06-20 | 1995-06-20 | Oscillator for tightening bolt |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH091067A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001104328A (en) * | 1999-08-12 | 2001-04-17 | Ethicon Endo Surgery Inc | Apparatus and method for tuning ultrasonic transducer using trim mass |
| JP2008264773A (en) * | 2007-03-29 | 2008-11-06 | Ngk Spark Plug Co Ltd | Ultrasonic transducer and ultrasonic apparatus having the same |
| JP4491511B1 (en) * | 2009-11-30 | 2010-06-30 | 日本アレックス株式会社 | Ultrasonic transducer unit |
-
1995
- 1995-06-20 JP JP7178073A patent/JPH091067A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001104328A (en) * | 1999-08-12 | 2001-04-17 | Ethicon Endo Surgery Inc | Apparatus and method for tuning ultrasonic transducer using trim mass |
| JP4675463B2 (en) * | 1999-08-12 | 2011-04-20 | エシコン・エンド−サージェリィ・インコーポレイテッド | Apparatus and method for tuning an ultrasonic transducer using a trim mass |
| JP2008264773A (en) * | 2007-03-29 | 2008-11-06 | Ngk Spark Plug Co Ltd | Ultrasonic transducer and ultrasonic apparatus having the same |
| JP4491511B1 (en) * | 2009-11-30 | 2010-06-30 | 日本アレックス株式会社 | Ultrasonic transducer unit |
| JP2011114776A (en) * | 2009-11-30 | 2011-06-09 | Nippon Alex Kk | Ultrasonic transducer unit |
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