JPH087809A - Image forming device - Google Patents

Image forming device

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Publication number
JPH087809A
JPH087809A JP14166394A JP14166394A JPH087809A JP H087809 A JPH087809 A JP H087809A JP 14166394 A JP14166394 A JP 14166394A JP 14166394 A JP14166394 A JP 14166394A JP H087809 A JPH087809 A JP H087809A
Authority
JP
Japan
Prior art keywords
electron
image forming
forming apparatus
fluorescent screen
plurality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14166394A
Other languages
Japanese (ja)
Inventor
Tomokazu Ando
Tadashi Kaneko
Hideaki Mitsutake
Toshihiko Miyazaki
Naohito Nakamura
Yoshiyuki Osada
Masahiro Tagawa
尚人 中村
英明 光武
昌宏 多川
友和 安藤
俊彦 宮▲崎▼
正 金子
芳幸 長田
Original Assignee
Canon Inc
キヤノン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, キヤノン株式会社 filed Critical Canon Inc
Priority to JP14166394A priority Critical patent/JPH087809A/en
Publication of JPH087809A publication Critical patent/JPH087809A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain an image of high resolution and high definition by an image forming device without impeding the flight of electron beams by establishing a relation having elements of mutual inversion or rotation between a relative position between electron emission elements and a relative position between the spots of the beams arriving on a member being irradiated therewith. CONSTITUTION:Voltages are applied between element electrodes 4, 5 or 4',5' in respective electron emission elements via terminals Dr1 to Drm and D11 to D1m outside an envelope, so that electrons can be emitted from electron emission portions. The emitted electron beams are accelerated via a high-tension terminal 31 respectively by high voltages applied to metal backing 23 or transparent electrodes and subsequently collide with a fluorescent screen 22 forming a member irradiated with the beams, so that the fluorescent screen 22 can be excited to cause light emission. When at this time voltages corresponding respectively to information signals are applied to respective modulating electrodes 6 via terminals G1 to Gn outside the envelope, the electron beams arriving on the fluorescent screen 22 are then controlled to display an image on the fluorescent screen 22. At this point, a relative position between the electron emission elements and a relative position between the spots of the be arriving on the fluorescent screen 22 are mutually inverted in relation. Whereupon two luminous spots in the form of emitting light on the fluorescent screen 22 are generated between atmospheric pressure resistant spacers 12 on both sides of the fluorescent screen 22.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image forming apparatus such as a display device and a recording device using an electron-emitting device, and more particularly to an image forming apparatus in which a supporting member called a spacer is arranged. is there.

[0002]

2. Description of the Related Art Conventionally, two types of electron emitters, a thermoelectron source and a cold cathode electron source, are known. The cold cathode electron source includes a field emission type (hereinafter abbreviated as FE type), a metal / insulating layer / metal type (hereinafter abbreviated as MIM type), a surface conduction type electron emitting device, and the like.

As an example of the FE type, W. P. Dyk
e & W. W. Dolsn, "Field emissi"
on ”, Advance in Electricon
Physics, 8, 89 (1956) or C.I.
A. Spindt, "PHYSIACL Proper
ties of thin-film fielddem
ision cathodes with molly
bdenum cones ", J. Appl. Phy
s. , 47, 5248 (1976) and the like are known.

As an example of the MIM type, C.I. A. Me
ad, "The tunnel-emission a
mplifer, J.M. Appl. Phys. , 32,
646 (1961) and the like are known.

Further, as an example of the surface conduction electron-emitting device, M. I. Elinson, Radio Eng.
Electroron Pys. 10 (1965) and so on.

The surface conduction electron-emitting device utilizes a phenomenon in which electron emission occurs when a current is passed through a thin film having a small area formed on a substrate in parallel with the film surface.
As the surface conduction electron-emitting device, one using a SnO 2 thin film by the above-mentioned Elinson (MI. Elinson), one using an Au thin film [G. Dittme
r: "Thin Solid Films", 9, 31
7 (1972)], by In 2 O 3 / SnO 2 thin film [M. Hartwell and C.I. G. Fons
tad: "IEEE Trans. ED Con
f. 519 (1975)], by a carbon thin film [Hiraki Araki et al .: Vacuum, Vol. 26, No. 1, p. 22 (1)
983)] and the like have been reported.

As a typical device structure of these surface conduction electron-emitting devices, the above-mentioned M. Hartwell (M.Ha
FIG. 16 shows the device configuration of rtwell).

In FIG. 16, 221 is a substrate, 222 is a conductive film, which is made of a metal oxide thin film or the like formed by sputtering in an H-shaped pattern, and is subjected to an electric current treatment called an electric current forming, which will be described later. Ejector 223
Is formed. The element electrode spacing L in FIG. 16 is 0.5.
.About.1.0 mm and W'is set to 0.1 mm.
Further, since the position and shape of the electron emitting portion 223 are unknown, it is shown as a schematic diagram.

Conventionally, in these surface conduction electron-emitting devices, the electron-emitting portion 223 is generally formed on the conductive film 222 in advance by energization processing called energization forming before the electron emission as described above. Met.

That is, the energization forming means that a direct current voltage or a very slow rising voltage, for example, about 1 V / min is applied to both ends of the conductive film 222 to energize the conductive film 222 to locally break, deform or deform the conductive film. That is, the electron-emitting portion 223 is formed by being altered so as to be in an electrically high-resistance state. Note that, for example, the electron emitting portion 223 is provided with the conductive film 222.
Has a crack generated in a part of it, and electrons are emitted from the vicinity of the crack. In the surface conduction electron-emitting device that has been subjected to the energization forming process, a voltage is applied to the conductive film 222, and a current is passed through the device, so that the electron-emitting portion 2 is formed.
The electron is emitted from 23.

Among the electron-emitting devices described above, in particular,
The surface conduction electron-emitting device has an advantage that a large number of the devices can be formed in an array over a large area because of its simple structure and easy manufacture. Therefore, various applications that can make use of such advantages are being studied. Examples thereof include a charged beam source and a self-luminous display device.

As an example in which a large number of surface-conduction type electron-emitting devices are formed in an array, which is called a ladder-type arrangement as described later, surface-conduction type electron-emitting devices are arranged in parallel, and both ends of each device are wired ( An electron source in which a large number of rows, each of which is connected by a common wiring) is arranged (for example, JP-A-64-31332, JP-A-1-283).
749, JP-A-1-257552, etc.).

As an example of the self-luminous display device, a display device in which a large number of surface conduction electron-emitting devices are arranged in an electron source and a phosphor which emits visible light by the electrons emitted from the electron source are combined. The image forming apparatus is as follows (US Pat. No. 5,066,883).

In particular, in image forming apparatuses such as display devices, in recent years, flat panel display devices using liquid crystal have become widespread in place of CRTs. Flat panel display devices using this liquid crystal are self-luminous. Therefore, there is a problem that a backlight must be provided, and it has been desired to develop a self-luminous display device using the electron-emitting device as in the above-mentioned example.

[0015]

However, the above-mentioned display device has the following problems.

Since the electron-emitting device as described above is operated in a vacuum, it is necessary to have an atmospheric pressure resistant structure when a display device is constructed using the electron-emitting device.

In particular, in a display device having a large area image display surface, the thickness of the member forming the envelope (vacuum container) of the device becomes very large, and the weight of the entire device Feasibility becomes poor in terms of cost.

As a method for avoiding the above problems,
There is a method of arranging a spacer inside the envelope that supports atmospheric pressure from the inside of the envelope.

There are various possible methods for positioning the spacer in the envelope. However, in order to provide the envelope with a support structure that is sufficiently strong against atmospheric pressure, the electron beam emitted from the electron-emitting device can fly. It is arranged so as not to interfere.

However, among the electron-emitting devices, there is an electron-emitting device of the type in which the emitted electron beam is deflected in a specific direction to fly.

For example, in the surface conduction electron-emitting device described above, as shown in FIG. 14, a voltage is applied between the device electrodes 114 and 115 by a power supply 131 to cause electrons to be emitted from the electron-emitting portion 113, and the anode electrode 122. When a voltage of several hundred to several thousand V is applied to the surface of the substrate 111, the emitted electrons fly while deviating from the normal line (chain line) from the electron emitting portion 113 to the surface of the substrate 111 toward the element electrode 115 on the positive electrode side. However, the center of the light emitting portion on the fluorescent film 123 is deviated from the normal line. The dotted line with an arrow in FIG. 14 indicates the trajectory of the electron beam, and Δx indicates the above-mentioned deviation width.

Radiation characteristics of the above electron beam (deflection flight property)
Is considered to be due to the potential distribution in the plane parallel to the substrate 111 being asymmetric with respect to the electron emitting portion, and is a characteristic peculiar to the surface conduction electron-emitting device. However, even in the above-mentioned FE type and MIM type, the potential distribution in the plane parallel to the substrate may be asymmetric as described above depending on the element configuration, and the electron orbit may deviate from the normal line.

As described above, in the case of using the electron-emitting device of the type in which the electron beam is deflected and fly, for example, as shown in FIG. 15, the spacers arranged so that the spacers do not hinder the flight of the electron beam. In some cases, the arrangement interval G of the electron-emitting devices must be wide, which hinders high-definition image formation due to high-density pixel (picture element) and electron-emitting device arrangement.

In FIG. 15, 144 is a fluorescent film, and 14 is a fluorescent film.
2 is an electron-emitting device, 143 is a spacer, 141 is a substrate, and the dotted line with an arrow indicates the trajectory of an electron beam.

The present invention has been made in view of the above problems, and mainly has a supporting structure that is sufficiently strong against atmospheric pressure and does not hinder the flight of electron beams in the apparatus, and An object is to provide an image forming apparatus capable of forming a high-definition image with high resolution.

[0026]

SUMMARY OF THE INVENTION To achieve the above object, the present invention provides an element group having a plurality of electron-emitting devices, a member to be irradiated which is irradiated with an electron beam emitted from the element group, and the element group. In the image forming apparatus having a connecting member that connects the first surface on which the element is arranged and the second surface on which the member to be irradiated is arranged, the relative position between a plurality of electron-emitting devices forming the element group. And the relative position between the arrival points on the irradiated member of each of the plurality of electron beams emitted from the plurality of electron-emitting devices have a relationship including elements of reversal or rotation. A characteristic image forming apparatus.

That is, the relative position between the plurality of electron beam emitting elements and the relative position between the arrival points of each of the plurality of electron beams on the irradiated member should be in a relationship that includes mutually inverted or rotated elements. Therefore, the shift width (Δ
x) can be effectively used as a space for disposing the connecting member, and therefore, even in a device in which the connecting member such as a spacer is arranged, the density of elements and pixels can be increased.

[0028]

The present invention will be described in more detail with reference to the following examples.

(Embodiment 1) FIG. 1 is a schematic configuration diagram of an image display apparatus of this embodiment. FIG. 2 is a view showing a substrate on which the electron-emitting devices of FIG. 1 are arranged. Further, FIG. 3 shows A- in FIG.
FIG. 4 is a top view of a short region consisting of a range including A ′ and BB ′, and FIG. 4 is a view in the vertical direction of AA ′ in FIG.
5 is a sectional view of the image display device shown in FIG. 5, and FIG. 5 is an enlarged top view of the vicinity of the electron emitting portion. In the figure, 1 is an insulating substrate on which electron-emitting devices are arranged, 2 is an electron-emitting portion, 3 is a thin film including the electron-emitting portion, 4 (4 '), and 5 (5') apply a voltage to the device. Is a device electrode, 6 is a modulation electrode, 7 is a device wiring electrode for driving a plurality of electron-emitting devices at the same time, 8 is an electrical insulation between the device wiring electrode 7 and the modulation wiring electrode 9 which intersect each other at right angles. An insulating film is provided for the purpose, 9 is a modulation wiring electrode, and 10 is a contact hole for obtaining an electrical connection between the modulation electrode 6 and the modulation wiring electrode 9. Also, 11
Is a rear plate, 12 is an atmospheric pressure resistant spacer, 13 is a support frame, and 14 is a face plate. However, in the above drawings, the atmospheric pressure resistant spacer 12 is omitted for simplifying the drawings except FIG.

First, a method of manufacturing the electron-emitting device of this embodiment shown in FIG. 2 will be described with reference to FIG.

A quartz substrate is used as the insulating substrate 1, which is thoroughly washed with an organic solvent.
The device electrodes 4 (4 ') and 5 (5') and the modulation electrode 6 were formed (FIG. 6A). Next, the element wiring electrode 7 was formed of a material mainly containing copper (not shown). Here, the element electrode spacing is 3 microns, and the element electrodes 4 (4 '), 5
The thickness of (5 ') was 1000 angstrom. The pitch formed by one picture element is 40 in the X direction Px in FIG.
0 micron and Y direction Py was 800 micron.

After forming the insulating film 8 made of SiO 2 , a contact hole 10 was formed in the insulating film 8 (FIG. 6B).

A modulation wiring electrode 9 made of Ni was formed on the insulator film 8. At this time, the connection with the modulation electrode 6 is made through the contact hole 10 (FIG. 6C).
The modulation wiring electrode 9 is wired so that the same voltage is applied to the two modulation electrodes sandwiching the electron emitting portion 2 (see FIG. 1).

Organopalladium (Okuno Pharmaceutical Co., Ltd., c
cp-4230) containing solution, and then 1
A heat treatment for 0 minutes was performed to form a fine particle film mainly containing palladium oxide (PdO) fine particles (average particle diameter: 70 angstrom), and used as an electron emission portion forming thin film 3 (FIG. 6D). Here, the electron emission portion forming thin film 3 has a width (element width) of 300 μm,
(4 ') and 5 (5') are arranged substantially in the center of the opposing parts. The thickness of the electron emission portion forming thin film 3 is 1
00 angstrom, sheet resistance 5 × 10 4 Ω / □
Met. The fine particle film described here is a film in which a plurality of fine particles are aggregated, and its fine structure is not only a state in which fine particles are individually dispersed and arranged but also a state in which fine particles are adjacent to each other or overlap each other (also in an island shape). (Including), and the particle diameter thereof means the diameter of fine particles whose particle shape can be recognized in the above state.

Next, the electron emitting portion 2 (see FIG. 5) is
A voltage was applied between the device electrodes 4 (4 ′) and 5 (5 ′), and the thin film 3 for forming the electron emission portion was energized (forming treatment) to be formed. FIG. 7 shows the voltage waveform of the forming process.

In FIG. 7, T1 and T2 are the pulse width and pulse interval of the voltage waveform. In this embodiment, T1 is 1 millisecond,
T2 is 10 milliseconds, the peak value of the triangular wave (peak voltage during forming) is 5V, and the forming process is about 1
It was performed for 60 seconds in a vacuum atmosphere of × 10 -6 torr. In the electron-emitting portion thus produced, fine particles containing a paaradium element as a main component were dispersed and arranged, and the average particle diameter of the fine particles was 30 Å.

The electron-emitting device was formed by the above procedure. However, this forming process is performed in a vacuum atmosphere after forming the glass container as described later. Next, the procedure for manufacturing the entire device will be described below.

After fixing the insulating substrate 1 on which the electron-emitting device is formed on the rear plate 11, 5 mm of the insulating substrate 1
A face plate 14 (which is formed by forming a fluorescent film 22 and a metal back 23 on the inner surface of a glass substrate 21) is arranged above the atmospheric pressure resistant spacer 12 and a support frame 13, and the rear plate 11 Frit glass is applied to the joint portion of the atmospheric pressure spacer 12, the support frame 13, and the face plate 14, and 400
It was sealed by baking at 10 to 500 ° C. for 10 minutes or more. The atmospheric pressure resistant spacer 12 was produced by cutting and polishing glass to a thickness of 0.1 mm and cutting it into an appropriate size. The end portion of the atmospheric pressure resistant spacer 12 was also fixed to the support frame 13 by frit glass. The insulating substrate 1 was also fixed to the rare plate 11 with frit glass.

The atmosphere in the glass container completed as described above is exhausted by a vacuum pump through an exhaust pipe (not shown), and after reaching a sufficient degree of vacuum, the external terminals Drl to Drm and Dll to Dlm. A voltage was applied between the device electrodes 4 (4 ′) 5 (5 ′) through (i = 1 to m) and the above-mentioned forming was performed to form the electron emitting portion 2 to fabricate an electron emitting device. Finally, the exhaust pipe (not shown) was heated by a gas burner at a vacuum degree of about 10 −6 torr to weld and seal the envelope.

Finally, in order to maintain the degree of vacuum after sealing,
Getter processing was performed. Immediately before or after sealing, a getter arranged at a predetermined position (not shown) in the image display device is heated by a heating method such as resistance heating or high frequency heating to form a vapor deposition film. Processing.
The getter usually has Ba or the like as a main component, and maintains the degree of vacuum by the adsorption action of the vapor deposition film.

In the image display device shown in FIG. 1 of the present embodiment completed as described above, each electron-emitting device has terminals Drl to Drm and Dll to Dlm (i =
1 to m), a voltage is applied between the device electrodes 4 (4 ′) and 5 (5 ′) to cause electrons to be emitted from the electron emitting portion 2, and the emitted electrons pass through the high voltage terminal 31 (Hv) and pass through the metal. Several k applied to the back 23 or transparent electrode (not shown)
It is accelerated by a high voltage of V or more, collides with the fluorescent film 22, and is excited and emits light. At that time, a voltage corresponding to an information signal is applied to the modulation electrode 6 through the external terminals G1 to Gn (j = 1 to n) to control the electron beam reaching the fluorescent film 22 and display an image. . Here, of the terminals outside the container, the Dr component is on the negative electrode side, and the Dl component is on the positive electrode side.

The features of the image display device will be described below with reference to FIGS. 1 to 5. Of the elements for two picture elements shown in FIGS. 3 and 4, the electrode 4 of the element on the left side is connected to the terminal Dri on the negative electrode side, and the electrode 5 is connected to the terminal Dli on the positive electrode side. The electrode 4'of the right element is connected to the positive terminal Dli, and the electrode 5'is the negative terminal Dri.
It is connected to the. Therefore, the electrons emitted from the electron emission portion of each element fly along the electron trajectories shown in FIG. 4 and deviate to the positive electrode side of each element electrode, and the electrons on the other picture element side of the fluorescent film 22. It almost reaches the normal of the emission part. That is, in the two picture elements, the relative positional relationship between the two electron emitting portions and the relative positional relationship between the two light emitting portions are opposite to each other.
On the other hand, since the atmospheric pressure resistant spacer 12 is arranged outside the elements for the two picture elements, it does not block the electron trajectories. Actually, when the light emission shape on the phosphor film 22 was observed under the conditions of an applied voltage of 14 V between the device electrodes and an acceleration applied voltage of 6 kV to the high voltage terminal 31, two emission spots showed that the atmospheric pressure resistant spacers on both sides were formed. Observed between 12. Therefore, it is determined that no electrons have collided with the atmospheric pressure resistant spacer 12.

The image display device of this embodiment is one in which unit units consisting of the elements for the two picture elements and the atmospheric pressure resistant spacer 12 are two-dimensionally arranged on the insulating substrate 1. Therefore, as in the above description, the portion where the electron trajectory is blocked by the atmospheric pressure resistant spacer 12 does not occur. With the above-described structure, in the present embodiment, a high-definition image display device can be realized without roughening the pixel pitch even in the case of an electron-emitting device having an electron trajectory deviated from the normal direction.

In the present embodiment, when 6 kV is applied as an acceleration applied voltage to the high voltage terminal 31 by the modulation electrode 6 arranged on the insulating substrate 1, the electrons reaching the face plate 14 are turned on and off by 100 V. It could be controlled by the modulation voltage within.

The structure described above is a schematic structure necessary for manufacturing the image display device, and, for example, the material of each member, etc.
The detailed portion is not limited to the above contents, and is appropriately selected so as to be suitable for the application of the image display device.

In particular, in this embodiment, as described above, a plate-shaped one is used as the atmospheric pressure resistant spacer 12, but the shape is not limited, and a cross-shaped one, a columnar one, or the like having a shape arrangement that does not block the electron orbit. If Further, although the spacers are provided at intervals of two picture elements, it is not necessary to provide all the spacers for every two picture elements, and it may be provided at intervals of an integral multiple of 2 depending on required support strength and the like. Further, the installation interval does not have to be uniform over the entire area.

In this embodiment, the face plate 14, the support frame 13, and the rear plate 11 constitute the envelope 15 as described above, but the rear plate 11 mainly aims to reinforce the strength of the insulating substrate 1. Therefore, if the substrate 1 itself has sufficient strength, the separate rear plate 11 is not necessary, and the support frame 13 is directly sealed to the substrate 1, and the face plate 14, the support frame 13, and the substrate 1 are attached to the rear plate 11. The envelope 15 may be configured as a unit.

In the case of monochrome, the fluorescent film 22 is composed of only a fluorescent material, but in the case of a fluorescent film of a color corresponding to a color image display device, a black conductive material called a black stripe or a black matrix depending on the arrangement of the fluorescent materials. 31 and a phosphor 32 (see FIG. 8).
The purpose of providing the black stripe and the black matrix is to use the three primary color phosphors required for color display.
The purpose is to make the color mixture between the phosphors 32 black so as to make the color mixture inconspicuous, and to control the decrease in contrast due to external light reflection on the phosphor film 22. In this embodiment, the fluorescent material has a stripe shape, a black stripe is first formed, and the fluorescent material of each color is applied to the gaps to form the fluorescent film 22. Also, the atmospheric pressure resistant spacer 1
No. 2 was placed on the black stripe on the face plate side. As the material for the black stripe, a material containing graphite as a main component, which is often used, is used. However, the material is not limited to this as long as it is conductive and has little light transmission and reflection.

As a method of applying the phosphor to the glass substrate, a precipitation method or a printing method is used in the case of monochrome, but a slurry method is used in the present embodiment of color. Even in the case of color, the same coating film can be obtained by using the printing method. A metal back 23 is usually provided on the inner surface side of the fluorescent film 22. The purpose of the metal back is to improve the brightness by specularly reflecting the light to the inner surface side of the light emission of the phosphor to the face plate 14 side, to act as an electrode for applying an electron beam acceleration voltage, and This is to protect the phosphor from damage due to collision of negative ions generated in the enclosure.

The metal back was produced by producing a fluorescent film, smoothing the inner surface of the fluorescent film (usually called filming), and then vacuum-depositing Al. The face plate 14 may be provided with a transparent electrode (not shown) on the outer surface side of the fluorescent film 22 in order to further enhance the conductivity of the fluorescent film 22, but in the present embodiment, a metal back alone is sufficient for conductivity. Since it was obtained, I omitted it.

In the case of the above-mentioned sealing, in the case of color, the phosphors of the respective colors and the electron-emitting devices have to correspond to each other, so that sufficient alignment is performed.

(Embodiment 2) FIG. 9 is a partial vertical sectional view of an image display device showing a second embodiment of the present invention, and FIG. 10 is a partial top view of the same. This embodiment is different from the first embodiment in that
The amount of deviation of the electron orbit from the substrate normal direction is equivalent to two picture elements. Corresponding to this, between the atmospheric pressure resistant spacers 12, two electrons whose electron orbits are displaced to the right Two electron-emitting devices (device electrodes 4 ', 5') whose electron orbits are displaced are arranged on the left side of the electron-emitting devices (device electrodes 4, 5). A face plate was placed 7 mm above the insulating substrate 1. Actually, the applied voltage 1 between the device electrodes
When the light emission shape on the phosphor film 22 was observed under the conditions of 4 V and 3 kV of acceleration applied voltage to the high voltage terminal 31, four light emission spots were observed between the atmospheric pressure resistant spacers 12 on both sides at substantially equal intervals. Therefore, it is determined that no electrons have collided with the atmospheric pressure resistant spacer 12.

As a modification of the first embodiment and the present embodiment, a unit unit consisting of a plurality of electron-emitting devices forming the intersecting orbits and the atmospheric pressure resistant spacer 12 is appropriately selected according to the shift amount of the electron orbits. This includes cases such as when configured. Of course, as described in the first embodiment, it is possible to modify the arrangement intervals, shapes, etc. of the spacers.

(Embodiment 3) Another embodiment will be described below.
The difference between this embodiment and Embodiments 1 and 2 is that the positions of the electron emitting portion 2 or the thin film 3 including the electron emitting portion are not equidistant (Px1 ≠ Px2). As shown in FIG. 11, in the present embodiment, when the deviation amount of the electron orbit from the substrate normal direction deviates from an integer multiple of the pitch of the picture element, the position of the electron emitting portion 2 is set to the left and right direction in the drawing. It was possible to match the intervals of the light emission spots on the fluorescent film 22 with the pixel pitch by forming the light emitting spots with an appropriate shift. At this time, the shape, size, arrangement, etc. of the device electrodes, the modulation electrodes, or the respective wiring electrodes can be changed according to the distance between the electron-emitting portions.

(Embodiment 4) The above embodiment is limited to a two-dimensional case where electron orbit crossings occur in one plane, but this embodiment develops the idea of the present invention in three dimensions. It shows that you can do it. FIG. 11 shows the arrangement of picture elements and spacers in the image display device of this embodiment and the electron trajectories seen from the top of the device. As can be seen from the figure, the pixel arrangement of this embodiment is a so-called delta arrangement. The starting point of each arrow in the figure represents the position of the electron emitting portion, and the ending point represents the arrival point of the electron on the fluorescent film provided on the face plate. Each arrow forms a triangle with three picture elements as a unit, and the electrons from each electron emission portion reach the fluorescent film portion on the normal line of the other electron emission portion. That is, this corresponds to the case where the electron orbit is rotated in units of 3 picture elements. On the other hand, the hatched portion indicates a region relatively distant from the trajectory of the electron beam, and the atmospheric pressure resistant spacer 12 can be arranged in a part or the whole of the region. With the above configuration, also in the present embodiment, it is possible to realize an image display device in which the electron orbit is secured without sacrificing the high definition of the displayed image. Particularly, in the configuration of this embodiment, the resolution in the vertical direction can be improved on the screen.

(Embodiment 5) FIG. 12 shows a modification of the embodiment shown in FIG. 11, and (a) to (d) show combinations of picture elements and electron orbits as units. It has been changed. The definitions of the arrow and the shaded area are the same as in the previous embodiment. (A) shows electron orbits of 3 in units of 2 picture elements.
This is a case where they are dimensionally intersected, and is an example in which the vertical and horizontal resolutions are both improved. (B) is a case where electron trajectories are three-dimensionally intersected with three picture elements as a unit, and the left and right resolution can be improved on the drawing. (C)
Indicates a case where electron trajectories are made to intersect in units of four picture elements, and it is possible to improve both vertical and horizontal resolution. (D) is a case where the electron orbit is rotated in units of four picture elements.

In any of the configurations, it is possible to realize the image display device in which the electron orbit is secured without sacrificing the high definition of the displayed image.

In the above embodiments, the number of formed picture elements is an integral multiple of a certain value, but it is not always necessary to use all of them for display, and an effective picture element is selected according to the actually used form. I do not care.

The atmospheric pressure resistant spacer is not limited to the above embodiment, and the spacing, shape and arrangement can be modified within the scope of the present invention. Further, the idea of the present invention can be applied to the case where the spacer is installed for other purposes such as the function of maintaining the space between the upper and lower plates, in addition to the function of supporting the atmospheric pressure resistance.

In the above embodiment, the modulation electrode 6 arranged on the insulating substrate 1 controls the on / off of electrons.
The modulation electrode may be formed on a surface other than the insulating substrate. For example, a separate modulation electrode may be arranged between the insulating substrate and the face plate, and a hole for ensuring an electron orbit may be formed at the electron orbit position. At this time, the position of the hole may be shifted from the normal line of the electron emitting portion according to the deviation of the electron orbit. Further, the modulation electrode may be fixed by joining it to the support frame 11, the atmospheric pressure resistant spacer 12 or another additional member.

Further, the turning on / off of electrons using the modulation electrodes included in the above embodiments is not essential for realizing the idea of the present invention, and when turning on / off the electrons by other means. The present invention can also be applied to.

Further, in the above embodiments, each picture element corresponds to one electron emitting portion, but the number of electron emitting portions corresponding to one picture element need not be limited to one, and a plurality of electron emitting portions may be provided. .

In the above embodiments, the present invention is applied to an image display device. However, the present invention is not limited to this range, and is applicable to a recording device such as an image forming light emitting unit of an optical printer. The application of is also possible. In this case, as a normal form, an image forming unit arranged in one dimension is often used.

Further, it can be applied as an electron beam generator using a multi-plane electron source. At this time, the electron beam is output from the electron source to the outside, so that both sides of the portion corresponding to the face plate are kept in vacuum. Therefore, the spacer does not need to have a function of supporting atmospheric pressure, and keeps a constant distance from another member (for example, a lattice-shaped member from which electrons are output from the lattice gap) at a position corresponding to the face plate. Alternatively, it plays a role of holding the substrate on which the electron-emitting device is formed on the other member.

[0065]

According to the present invention described above, it is possible to realize an image forming apparatus having a panel structure which does not hinder the orbits of the electrons emitted from the electron-emitting device, and (1) the fluorescent film is formed. It is possible to obtain stable light emission without a loss of the amount of reaching electrons and without a decrease in luminous efficiency. (2) Changes in electron trajectories due to changes in potential distribution due to charge-up of the atmospheric pressure resistant spacer and element breakdown due to creeping discharge due to reduction in creeping breakdown voltage do not occur. (3) Since the acceleration voltage can be increased by increasing the creeping breakdown voltage, a light emitting portion with higher efficiency and higher brightness can be obtained. (4) Since the electron-emitting devices and the atmospheric pressure resistant spacers can be arranged at high density, a high-definition image forming apparatus can be realized.

[Brief description of drawings]

FIG. 1 is a diagram showing an image display device according to an embodiment of the present invention.

FIG. 2 is a diagram showing an electron-emitting device substrate of the image display device shown in FIG.

FIG. 3 is a top view in the AA ′ and BB ′ regions of FIG.

FIG. 4 is a vertical cross-sectional view taken along the line AA ′ in FIG.

FIG. 5 is an enlarged view of the vicinity of the electron emitting portion of FIG.

FIG. 6 is a diagram showing a procedure for manufacturing an electron-emitting device according to an example.

FIG. 7 is a voltage waveform diagram of the forming process of the embodiment.

FIG. 8 is a diagram showing a configuration example on the face plate of the embodiment.

FIG. 9 is a sectional view for explaining the second embodiment of the present invention.

FIG. 10 is a top view illustrating a second embodiment of the present invention.

FIG. 11 is a sectional view illustrating a third embodiment of the present invention.

FIG. 12 is a diagram for explaining the fourth embodiment of the present invention.

FIG. 13 is a diagram for explaining a modification of the fourth embodiment of the present invention.

FIG. 14 is a diagram for explaining emission characteristics of electron beams of a surface conduction electron-emitting device.

FIG. 15 is a diagram for explaining an arrangement example when a spacer is arranged in an apparatus using a surface conduction electron-emitting device.

FIG. 16 is a schematic plan view of a conventional surface conduction electron-emitting device.

[Explanation of symbols]

 1, 111, 141, 221 Insulating substrate 2, 113, 223 Electron emission part 3, 112, 222 Thin film including electron emission part 4, 4 ', 5, 5', 115, 114 Element electrode 6 Modulation electrode 7 Element wiring Electrode 8 Insulator film 9 Modulation wiring electrode 10 Contact hole 11 Rear plate 12, 143 Atmospheric pressure resistant spacer 13 Support frame 14 Face plate 15 Envelope 21 Glass substrate 22, 144 Fluorescent film 23 Metal back

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tadashi Kaneko 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Masahiro Tagawa 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon (72) Inventor Tomokazu Ando 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Yoshiyuki Nagata 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (8)

[Claims]
1. A device group having a plurality of electron-emitting devices, a member to be irradiated which is irradiated with an electron beam emitted from the device group, a first surface on which the device group is arranged, and the member to be irradiated. An image forming apparatus having a connecting member that connects the second surface on which is arranged, a plurality of electron-emitting devices that form the device group, and a plurality of electron-emitting devices that emit the plurality of electron-emitting devices. The image forming apparatus is characterized in that the relative position between the arrival points of the respective electron beams on the irradiation target member includes elements that are inverted or rotated with respect to each other.
2. The image forming apparatus according to claim 1, wherein the connecting member is arranged outside the trajectory of the electron beam.
3. The image forming apparatus according to claim 3, wherein a plurality of the element groups are arranged in parallel.
4. The image forming apparatus according to claim 1, wherein the plurality of electron-emitting devices are divided into a plurality of device groups, and each of the device groups includes a driving unit capable of independently driving the device group.
5. The image forming apparatus according to claim 4, wherein the plurality of element groups are arranged on one line.
6. The image forming apparatus according to claim 4, wherein the plurality of element groups are arranged on one surface.
7. The image forming apparatus according to claim 1, wherein the connecting member is an atmospheric pressure resistant spacer.
8. The image forming apparatus according to claim 1, wherein the electron-emitting device is a surface conduction electron-emitting device.
JP14166394A 1994-06-23 1994-06-23 Image forming device Pending JPH087809A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14166394A JPH087809A (en) 1994-06-23 1994-06-23 Image forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14166394A JPH087809A (en) 1994-06-23 1994-06-23 Image forming device

Publications (1)

Publication Number Publication Date
JPH087809A true JPH087809A (en) 1996-01-12

Family

ID=15297287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14166394A Pending JPH087809A (en) 1994-06-23 1994-06-23 Image forming device

Country Status (1)

Country Link
JP (1) JPH087809A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6144154A (en) * 1997-03-31 2000-11-07 Canon Kabushiki Kaisha Image forming apparatus for forming image by electron irradiation
US6288485B1 (en) 1997-04-28 2001-09-11 Canon Kabushiki Kaisha Electron apparatus using electron-emitting device and image forming apparatus
US6472813B2 (en) 1996-01-11 2002-10-29 Canon Kabushiki Kaisha Image forming apparatus for forming image by electron irradiation from electron-emitting device
KR100711706B1 (en) * 2004-06-01 2007-04-30 캐논 가부시끼가이샤 Image display apparatus
WO2008018608A2 (en) * 2006-08-08 2008-02-14 Canon Kabushiki Kaisha Image display apparatus
KR100833262B1 (en) * 2004-12-27 2008-05-28 캐논 가부시끼가이샤 Image display apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6472813B2 (en) 1996-01-11 2002-10-29 Canon Kabushiki Kaisha Image forming apparatus for forming image by electron irradiation from electron-emitting device
US6144154A (en) * 1997-03-31 2000-11-07 Canon Kabushiki Kaisha Image forming apparatus for forming image by electron irradiation
US6288485B1 (en) 1997-04-28 2001-09-11 Canon Kabushiki Kaisha Electron apparatus using electron-emitting device and image forming apparatus
KR100711706B1 (en) * 2004-06-01 2007-04-30 캐논 가부시끼가이샤 Image display apparatus
US7429821B2 (en) 2004-06-01 2008-09-30 Canon Kabushiki Kaisha Image display apparatus
KR100833262B1 (en) * 2004-12-27 2008-05-28 캐논 가부시끼가이샤 Image display apparatus
WO2008018608A2 (en) * 2006-08-08 2008-02-14 Canon Kabushiki Kaisha Image display apparatus
WO2008018608A3 (en) * 2006-08-08 2008-04-03 Canon Kk Image display apparatus
US7923913B2 (en) 2006-08-08 2011-04-12 Canon Kabushiki Kaisha Image display apparatus

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