JPH0845806A - Switching display of monitor screen in single wafer processing device - Google Patents

Switching display of monitor screen in single wafer processing device

Info

Publication number
JPH0845806A
JPH0845806A JP18210894A JP18210894A JPH0845806A JP H0845806 A JPH0845806 A JP H0845806A JP 18210894 A JP18210894 A JP 18210894A JP 18210894 A JP18210894 A JP 18210894A JP H0845806 A JPH0845806 A JP H0845806A
Authority
JP
Japan
Prior art keywords
screen
displayed
level
monitor
selecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18210894A
Other languages
Japanese (ja)
Inventor
Shigeru Ebina
Fumie Kotake
Chikako Tsuritani
Koji Yuya
文絵 小竹
広治 油谷
繁 蛯名
千佳子 釣谷
Original Assignee
Kokusai Electric Co Ltd
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd, 国際電気株式会社 filed Critical Kokusai Electric Co Ltd
Priority to JP18210894A priority Critical patent/JPH0845806A/en
Publication of JPH0845806A publication Critical patent/JPH0845806A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve operability and work efficiency, by switching a screen of level 1 of higher viewing frequency by one operation without reducing an amount of information to be displayed on one screen even when the number of screens increases, and switching a screen of level 2 of lower viewing frequency by two operations. CONSTITUTION:Screens are classified into screens of level 1 of higher viewing frequency by an operator and screens of level 2. Plural first screen selection keys 4 for selecting the screen of level 1 are constantly displayed on a monitor display. Plural second screen selection keys 5 for selecting the screen of level 2 are displayed, if necessary, on the monitor display. By selecting a desired screen selection key of the first and second screen selection keys 4 and 5, a desired monitor data screen is displayed on the monitor display.

Description

【発明の詳細な説明】Detailed Description of the Invention
【0001】[0001]
【産業上の利用分野】本発明は、LCD(Liquid Cryst
al Display)素子(液晶表示素子)等の半導体素子の製
造装置、特に1枚ずつ処理を行う枚葉処理装置における
モニタ画面切替え表示方法に関する。
BACKGROUND OF THE INVENTION The present invention relates to an LCD (Liquid Cryst
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a monitor screen switching display method in a semiconductor device manufacturing apparatus such as an al Display) element (liquid crystal display element), and particularly in a single-wafer processing apparatus that performs processing one by one.
【0002】[0002]
【従来の技術】枚葉処理装置の1つである枚葉CVD装
置では、装置のマンマシンインタフェースにパーソナル
コンピュータを用い、装置の稼働状況をパーソナルコン
ピュータのCRT画面によって、作業者が把握できるも
のとなっている。これら画面の切替えは、まず図10に
示すように全画面共通キー表示エリア1に常時表示され
ているキー2を押し、一度モニタ選択画面(図11)を
表示させ、そこに表示されている♯1〜♯28のキー3
を選択し、押すことによって行う。
2. Description of the Related Art In a single-wafer CVD apparatus, which is one of the single-wafer processing apparatuses, a personal computer is used as a man-machine interface of the apparatus, and an operating condition of the apparatus can be grasped by a worker by a CRT screen of the personal computer. Has become. To switch between these screens, first, as shown in FIG. 10, the key 2 which is constantly displayed in the all-screen common key display area 1 is pressed to display the monitor selection screen (FIG. 11) once, and the # displayed on the monitor selection screen is displayed. Key # 1 to # 28
Select and press.
【0003】[0003]
【発明が解決しようとする課題】上記従来のモニタ画面
切替え方法では画面切替えに多くの操作が必要となり、
見たい画面に瞬時に切替えることができず操作性が低下
するという課題がある。
In the above-mentioned conventional monitor screen switching method, many operations are required for screen switching,
There is a problem that the operability deteriorates because the screen you want to see cannot be switched instantly.
【0004】[0004]
【課題を解決するための手段】本発明方法は、上記の課
題を解決するため、作業者が見る頻度の高いレベル1の
画面とそれ以外のレベル2の画面に分類し、モニタ画面
に、レベル1の画面を選択する複数の第1の画面選択キ
ー4を常時表示し、モニタ画面に、レベル2の画面を選
択する複数の第2の画面選択キー5を必要時にのみ表示
し、これらの第1,第2の画面選択キー4,5の中から
該当する画面選択キーを選択することによりモニタ表示
面に所望のモニタデータ画面を表示することを特徴とす
る。
In order to solve the above-mentioned problems, the method of the present invention classifies screens of level 1 which an operator frequently sees into level 1 screens and other level 2 screens, and displays them on a monitor screen. A plurality of first screen selection keys 4 for selecting the first screen are constantly displayed, and a plurality of second screen selection keys 5 for selecting the level 2 screen are displayed on the monitor screen only when necessary. It is characterized in that a desired monitor data screen is displayed on the monitor display surface by selecting a corresponding screen selection key from the first and second screen selection keys 4 and 5.
【0005】[0005]
【作 用】このような構成であるので、見る頻度の高い
レベル1の画面を見る場合には、モニタ表示面に、常
時,画面に表示されている複数の第1の画面選択キー4
の中から該当する画面選択キーを選択することにより所
望のモニタデータ画面が表示されることになる。又、見
る頻度の低いレベル2の画面を見る場合は、モニタ表示
面に、レベル2の画面を選択する複数の第2の画面選択
キー5を表示させ、その中から該当する画面選択キーを
選択することによりモニタ表示面に所望のモニタデータ
画面が表示されることになる。
[Operation] With such a configuration, when viewing a level 1 screen that is frequently viewed, a plurality of first screen selection keys 4 that are constantly displayed on the screen are displayed on the monitor display surface.
A desired monitor data screen is displayed by selecting the corresponding screen selection key from among the above. Further, when viewing a level 2 screen that is rarely viewed, a plurality of second screen selection keys 5 for selecting the level 2 screen are displayed on the monitor display surface, and the corresponding screen selection key is selected from them. By doing so, a desired monitor data screen is displayed on the monitor display surface.
【0006】[0006]
【実施例】図1は、本発明方法に係るLCD製造用枚葉
プラズマCVD装置のステータス画面を示す図、図2は
同じくステータス画面にレベル2の画面選択キーを表示
した状態を示す図である。本発明に係るLCD製造用枚
葉プラズマCVD装置は、複数の成膜室でそれぞれ被処
理物を1枚ずつ成膜処理し、各成膜室の状況を伝えるモ
ニタデータを1つのパーソナルコンピュータのCRT表
示面に切替え表示し、作業者が各成膜室の稼働状況を把
握できるものとなっている。画面の切替えを1回で行え
るようモニタ表示面に、常時,画面に表示されている複
数の画面選択キーの中から該当する画面選択キーをマウ
スにて選択することにより所望のモニタデータ画面を切
替え表示する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a view showing a status screen of a single-wafer plasma CVD apparatus for LCD manufacturing according to the method of the present invention, and FIG. 2 is a view showing a state where a screen selection key of level 2 is also displayed on the status screen. . The single-wafer plasma CVD apparatus for LCD manufacturing according to the present invention performs a film-forming process on a single object to be processed in each of a plurality of film-forming chambers, and outputs monitor data indicating the status of each film-forming chamber to a CRT of one personal computer. By switching the display on the display surface, the operator can grasp the operating status of each film forming chamber. The desired monitor data screen is switched on the monitor display surface by selecting the relevant screen selection key from the multiple screen selection keys displayed on the screen with the mouse so that the screen can be switched once. indicate.
【0007】しかし成膜室が多数あり、一画面に表示す
るモニタ項目も多く、あらゆる方向から装置状態を監視
するためモニタ画面も増加する。それに伴い画面切替え
用の画面選択キーも増加するので、操作性を低下させな
いために全ての画面選択キーを常時,画面に表示し、選
択可能な状態にしておこうとすると、画面選択キーを表
示するスペースが増加し、一画面に表示できる情報量が
少なくなってしまう。一画面に表示するデータ量を減ら
すことなく、画面上に表示可能な画面選択キーは最大1
0個である。そこで、本発明の実施方法は、モニタ画面
を作業者が見る頻度の高いレベル1の画面とそれ以外の
レベル2の画面に分類し、レベル1の画面を選択する複
数の第1の画面選択キー4を常時表示し、レベル2の画
面を選択する複数、例えば4個の第2の画面選択キー5
を必要な時にのみ表示するようにする。レベル1,2の
画面群を選択する第1,第2の画面選択キー4,5と該
キーによって選択表示される画面の概要を表1に示す。
However, since there are many film forming chambers and many monitor items are displayed on one screen, the number of monitor screens is increased in order to monitor the apparatus state from all directions. Along with that, the number of screen selection keys for switching screens also increases, so if you try to keep all screen selection keys on the screen at all times and keep them selectable in order not to reduce operability, the screen selection keys will be displayed. The amount of information that can be displayed on one screen is reduced. Up to 1 screen selection key can be displayed on the screen without reducing the amount of data displayed on one screen.
It is 0. Therefore, according to the implementation method of the present invention, a plurality of first screen selection keys for classifying the monitor screen into a level 1 screen that is frequently viewed by an operator and a level 2 screen other than that, and selecting the level 1 screen are provided. 4 is always displayed and a plurality of, for example, four second screen selection keys 5 for selecting the level 2 screen are displayed.
Should be displayed only when needed. Table 1 shows the outline of the first and second screen selection keys 4 and 5 for selecting the screen groups of levels 1 and 2 and the screens selectively displayed by the keys.
【0008】[0008]
【表1】 [Table 1]
【0009】上記の構成において見る頻度の高いレベル
1の画面を見る場合には、モニタ表示面に、常時,画面
に表示されている複数の第1の画面選択キー4の中から
該当する画面選択キーを選択することにより所望のモニ
タデータ画面が表示されることになる。例えばStat
usキーを選択することにより図1のステータス画面が
表示され、Reac1キーを選択することにより図3に
示すReac1画面が、又Reac2キーの操作で同様
のReac2画面が表示され、Reac3キーを選択す
ることにより図4に示すReac3画面が表示される。
又Chamberキー,R1キーを選択することにより
図5,図6に示すチャンバ画面,R1画面がそれぞれ表
示され、又R2,R3キーの操作で、同様のR2,R3
画面が表示される。更にSysRキーを選択することに
より図7に示すSysR画面が表示される。
When viewing a level 1 screen that is frequently viewed in the above configuration, a corresponding screen selection is always made on the monitor display surface from the plurality of first screen selection keys 4 displayed on the screen. By selecting the key, the desired monitor data screen is displayed. For example, Stat
1 is displayed by selecting the us key, the Reac1 screen shown in FIG. 3 is displayed by selecting the Reac1 key, and the same Reac2 screen is displayed by operating the Reac2 key, and the Reac3 key is selected. As a result, the Reac3 screen shown in FIG. 4 is displayed.
Further, by selecting the Chamber key or the R1 key, the chamber screen or the R1 screen shown in FIGS. 5 and 6 is displayed, and the same R2 or R3 key is operated by operating the R2 or R3 key.
The screen is displayed. By further selecting the SysR key, the SysR screen shown in FIG. 7 is displayed.
【0010】又、見る頻度の低いレベル2の画面を見る
場合は、モニタ表示面の右端のOthersキーを選択
して図2に示すStatus画面に移行し、その中央に
表示されるレベル2の画面を選択する4個の第2の画面
選択キー5の中から該当する画面選択キーを選択するこ
とにより、モニタ表示面に所望のモニタデータ画面が表
示されることになる。例えばSys−Chmキーを選択
することにより図8に示すSys−Chm画面が表示さ
れ、L1L2キーを選択することにより図9に示すL1
L2画面が表示され、T3T4,T2Hの各キーを選択
することにより同様のT3T4,T2H画面が表示され
る。更に又、画面7のプライオリティーに自由度を持た
せるため、レベル1の画面とレベル2の画面の入れ替え
も作業者が行えるようになっている。
When a Level 2 screen that is rarely viewed is to be viewed, the Others key at the right end of the monitor display surface is selected to shift to the Status screen shown in FIG. 2, and the Level 2 screen displayed in the center of the screen. By selecting the corresponding screen selection key from the four second screen selection keys 5 for selecting, a desired monitor data screen is displayed on the monitor display surface. For example, when the Sys-Chm key is selected, the Sys-Chm screen shown in FIG. 8 is displayed, and when the L1L2 key is selected, the L1 shown in FIG. 9 is displayed.
The L2 screen is displayed, and the same T3T4, T2H screen is displayed by selecting each key of T3T4, T2H. Further, in order to give the screen 7 a degree of freedom in its priority, the operator can switch the level 1 screen and the level 2 screen.
【0011】[0011]
【発明の効果】以上の説明より明らかなように本発明に
よれば、作業者が見る頻度の高いレベル1の画面とそれ
以外のレベル2の画面に分類し、モニタ画面に、レベル
1の画面を選択する複数の第1の画面選択キー4を常時
表示し、モニタ画面に、レベル2の画面を選択する複数
の第2の画面選択キー5を必要時にのみ表示し、これら
の第1,第2の画面選択キー4,5の中から該当する画
面選択キーを選択することによりモニタ表示面に所望の
モニタデータ画面を表示することを特徴とするので、顧
客要求によって画面数が増加しても、1画面に表示する
情報量を減らすことなく、見る頻度の高いレベル1の画
面を1回の操作で切替え表示することができ、また、見
る頻度の低いレベル2の画面の切替えも2回の操作で行
え、操作性を低下させることはない。例えば異なる2画
面を交互に参照する場合、画面切替え操作の回数が減っ
たことにより、操作性、作業効率を向上することができ
る。
As is apparent from the above description, according to the present invention, the screen is classified into a level 1 screen that is frequently viewed by an operator and a level 2 screen other than that, and a level 1 screen is displayed on the monitor screen. A plurality of first screen selection keys 4 for selecting are always displayed, and a plurality of second screen selection keys 5 for selecting a level 2 screen are displayed on the monitor screen only when necessary. Since the desired monitor data screen is displayed on the monitor display surface by selecting the corresponding screen selection key from the 2 screen selection keys 4 and 5, even if the number of screens is increased by customer request. Level 1 screens that are frequently viewed can be switched and displayed by one operation without reducing the amount of information displayed on one screen, and level 2 screens that are frequently viewed can be switched twice. Can be done by operation, reducing operability Do not be. For example, when two different screens are referred to alternately, the number of screen switching operations is reduced, so that operability and work efficiency can be improved.
【図面の簡単な説明】[Brief description of drawings]
【図1】本発明方法に係るLCD製造用枚葉プラズマC
VD装置のステータス画面を示す図である。
FIG. 1 is a single-wafer plasma C for manufacturing an LCD according to the method of the present invention.
It is a figure which shows the status screen of a VD apparatus.
【図2】同じくステータス画面にレベル2の画面選択キ
ーを表示した状態を示す図である。
FIG. 2 is a diagram showing a state in which a level 2 screen selection key is also displayed on the status screen.
【図3】本発明の表示される画面の第1例を示す図であ
る。
FIG. 3 is a diagram showing a first example of a screen displayed according to the present invention.
【図4】同じく第2例を示す図である。FIG. 4 is a diagram showing a second example of the same.
【図5】同じく第3例を示す図である。FIG. 5 is a diagram similarly showing a third example.
【図6】同じく第4例を示す図である。FIG. 6 is a diagram showing a fourth example of the same.
【図7】同じく第5例を示す図である。FIG. 7 is a diagram showing a fifth example of the same.
【図8】同じく第6例を示す図である。FIG. 8 is a diagram showing a sixth example of the same.
【図9】同じく第7例を示す図である。FIG. 9 is a diagram similarly showing a seventh example.
【図10】枚葉CVD装置のガスパターン画面を示す図
である。
FIG. 10 is a diagram showing a gas pattern screen of a single-wafer CVD apparatus.
【図11】同じくモニタ選択画面を示す図である。FIG. 11 is a diagram similarly showing a monitor selection screen.
【符号の説明】[Explanation of symbols]
4 第1の画面選択キー 5 第2の画面選択キー 4 First screen selection key 5 Second screen selection key
───────────────────────────────────────────────────── フロントページの続き (72)発明者 蛯名 繁 東京都千代田区飯田橋4−7−11 アルフ ァ電子株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigeru Ebina 4-7-11 Iidabashi, Chiyoda-ku, Tokyo Alpha Electronics Co., Ltd.

Claims (1)

    【特許請求の範囲】[Claims]
  1. 【請求項1】 複数の反応室でそれぞれ被処理物を1枚
    ずつ処理し、各反応室の状況を伝えるモニタデータを1
    つのモニタ表示面に切替え表示する枚葉処理装置におけ
    るモニタ画面切替え表示方法において、作業者が見る頻
    度の高いレベル1の画面とそれ以外のレベル2の画面に
    分類し、モニタ画面に、レベル1の画面を選択する複数
    の第1の画面選択キーを常時表示し、モニタ画面に、レ
    ベル2の画面を選択する複数の第2の画面選択キーを必
    要時にのみ表示し、これらの第1,第2の画面選択キー
    の中から該当する画面選択キーを選択することにより所
    望のモニタデータ画面を切替え表示することを特徴とす
    る枚葉処理装置におけるモニタ画面切替え表示方法。
    1. A monitor data for processing the condition of each reaction chamber by treating one object in each of a plurality of reaction chambers.
    In the monitor screen switching display method in the single-wafer processing apparatus for switching and displaying on one monitor display surface, it is classified into a level 1 screen that is frequently viewed by an operator and a level 2 screen other than that, and the monitor screen displays the level 1 screen. A plurality of first screen selection keys for selecting a screen are constantly displayed, and a plurality of second screen selection keys for selecting a level 2 screen are displayed on the monitor screen only when necessary. A monitor screen switching display method in a single-wafer processing apparatus, characterized in that a desired monitor data screen is switched and displayed by selecting a corresponding screen selection key from among the screen selection keys.
JP18210894A 1994-08-03 1994-08-03 Switching display of monitor screen in single wafer processing device Pending JPH0845806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18210894A JPH0845806A (en) 1994-08-03 1994-08-03 Switching display of monitor screen in single wafer processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18210894A JPH0845806A (en) 1994-08-03 1994-08-03 Switching display of monitor screen in single wafer processing device

Publications (1)

Publication Number Publication Date
JPH0845806A true JPH0845806A (en) 1996-02-16

Family

ID=16112480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18210894A Pending JPH0845806A (en) 1994-08-03 1994-08-03 Switching display of monitor screen in single wafer processing device

Country Status (1)

Country Link
JP (1) JPH0845806A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173305A (en) * 2005-12-19 2007-07-05 Nitto Denko Corp Restoration assisting system
JP2007194461A (en) * 2006-01-20 2007-08-02 Hitachi Kokusai Electric Inc Substrate processing apparatus
WO2007108370A1 (en) * 2006-03-22 2007-09-27 Hitachi Kokusai Electric Inc. Substrate processor and method of manufacturing semiconductor device
WO2012176727A1 (en) * 2011-06-24 2012-12-27 株式会社日立国際電気 Substrate processing device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173305A (en) * 2005-12-19 2007-07-05 Nitto Denko Corp Restoration assisting system
JP4606319B2 (en) * 2005-12-19 2011-01-05 日東精機株式会社 Recovery support device
JP2007194461A (en) * 2006-01-20 2007-08-02 Hitachi Kokusai Electric Inc Substrate processing apparatus
WO2007108370A1 (en) * 2006-03-22 2007-09-27 Hitachi Kokusai Electric Inc. Substrate processor and method of manufacturing semiconductor device
US8014887B2 (en) 2006-03-22 2011-09-06 Hitachi Kokusai Electric Inc. Substrate processing apparatus
US8321046B2 (en) 2006-03-22 2012-11-27 Hitachi Kokusai Electric Inc. Substrate processing apparatus
JP5312019B2 (en) * 2006-03-22 2013-10-09 株式会社日立国際電気 Substrate processing apparatus, display method for substrate processing apparatus, and method for manufacturing semiconductor device
JP2013211584A (en) * 2006-03-22 2013-10-10 Hitachi Kokusai Electric Inc Substrate processing device and method for displaying the same, and method for manufacturing semiconductor device
WO2012176727A1 (en) * 2011-06-24 2012-12-27 株式会社日立国際電気 Substrate processing device
US10132757B2 (en) 2011-06-24 2018-11-20 Hitachi Kokusai Electric Inc. Substrate processing device

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