JPH08327230A - Spin dryer - Google Patents

Abstract

PURPOSE: To be able to exhaust and recover air stream without discharging at the outside of a spin cup by separating a spin table in the cup to a rotary chamber and an exhaust chamber via an inner wall provided with an air flow inlet, and so mounting an introducing plate at the inner wall as to be able to regulate the angle. CONSTITUTION: An inner wall 6 perpendicular to the inside of a spin cup 3 provided with a spin table 1 therein is provided to be separated to a rotary chamber 7 and an exhaust chamber 8, many air flow inlets 9 are opened at the wall 6, and an exhaust port 5 is opened at the floor of the chamber 8. Further, an introducing plate 10 for introducing the air flow from the inlet 9 is so mounted at the wall 6 as to be able to regulate the angle. When a material 2 to be dried is placed on the table 1 and the table 1 is rotated, it is dehydrated by a centrifugal force, air flow is simultaneously generated, the moisture dehydrated together with the air flow is fed from the inlets 9 into the chamber 8, and exhausted from the port 5. In this case, the angle of the plate 10 is regulated in response to the change of the air flow amount.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a spin dryer.

[0002]

2. Description of the Related Art A conventional spin dryer is shown in FIGS.
As shown in FIG. 3, the article to be dried 2 (not shown) is placed on the spin table 1 and the spin table 1 is rotated. In order to prevent airflow and solvent (water) splash caused by the rotation of the spin table 1, a spin cup 3 is provided on the outer periphery, and a floor surface 4 is provided inside the lower end of the spin cup 3, and exhaust is provided on the floor surface 4. A port 5 is provided to exhaust the air.

[0003]

The above-mentioned conventional device has a drawback in that the air flow generated by the spin table 1 comes out of the spin cup 3 as shown in FIG. This air flow contains a large amount of water and fills the inside of the device as a mist, which deteriorates the drying property and causes the material to be dried 2
Was a cause of poor cleanliness after drying. Therefore, in the present invention, it is an object to recover the exhaust gas without letting the airflow out of the spin cup.

[0004]

In order to solve the above problems, the present invention provides a vertical inner wall inside a spin cup having a spin table inside to separate a rotary chamber and an exhaust chamber from each other. A large number of airflow inlets are opened in, and an introduction plate for introducing the airflow is provided on the airflow direction side of each airflow inlet,
The spin dryer according to claim 1, wherein an exhaust port is opened on the floor surface of the exhaust chamber, and the angle of the introduction plate is adjustable so as to be attached to the inner wall.

[0005]

The present invention is configured as described above, and when an object to be dried is placed on the spin table and the spin table is rotated, dehydration is performed by centrifugal force, and at the same time, an air flow is generated and The dehydrated water flows into the exhaust chamber through the airflow inlet and is discharged through the exhaust outlet. Further, the air flow rate changes due to the size change of the dried product and the change of the rotation speed. The angle of the introduction plate is adjusted according to the change.

[0006]

Embodiments of the present invention will be described in detail with reference to FIGS. An inner wall 6 is provided from the apex of the spin cup 3 to the floor surface 4 to separate the rotation chamber 7 and the exhaust chamber 8.
It should be noted that the floor surface 4 of the exhaust chamber 8 is inclined in a mountain shape as shown in FIG. 4 to facilitate the discharge of airflow from the exhaust port 5.

A large number of airflow inlets 9 and 9 are provided on the inner wall 6.
Are opened, and the introduction plates 10, 10, ... Are attached to the air flow inlets 9, 9 ... That is, as shown in FIG.
Cutouts 1 provided on the introduction plate 10 by fixing 1, 1 vertically
2, 12 are fitted into the female screw cylinders 11 and 11, and the introduction plate 10
The screws 14 and 14 are passed through the mounting pieces 13 and 13 provided above and below, and after adjusting the angle of the introduction plate 10, the screws 14 and 14 are tightened and fixed. The rest is the same as the conventional one, and the description is omitted. Reference numeral 15 in the figure denotes a support member for the spin table 1.

This embodiment is constructed as described above,
When the article to be dried 2 is placed on the spin table 1 and the spin table 1 is rotated, dehydration is performed by centrifugal force. At this time, the water shaken off or the generated airflow flows outward from the center of rotation as shown by the arrows in FIGS. 2 and 3, and bends in the same direction as the direction of rotation. This air flow has an angled introduction plate 1
0, 10, ... Are introduced into the exhaust chamber 8 through the airflow inlets 9, 9, ... And are discharged to the outside through the respective exhaust ports 5, 5.

[0009]

As described above, the present invention has the above-described structure and action. Since the inner wall separates the rotation chamber and the exhaust chamber, the air flow from the spin cup to the outside and turbulence is prevented. be able to. Further, since the air flow due to the rotation is used to exhaust the gas, the gas can be sufficiently exhausted even if the capacity of the exhaust port is small. Further, by changing the angle of the introducing plate, it is possible to cope with the change in the size of the material to be dried and the change in the rotation speed of the spin table. Further, it can be applied to a spin coater for attaching glass or semiconductor film.

[0010]

[Brief description of drawings]

FIG. 1 is a perspective view of a spin dryer according to the present invention.

FIG. 2 is a vertical sectional front view thereof.

FIG. 3 is a cross-sectional plan view.

FIG. 4 is a perspective view showing an angle adjusting portion of an introduction plate.

FIG. 5 is a perspective view of a conventional device.

FIG. 6 is a plan view thereof.

FIG. 7 is a vertical sectional front view thereof.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Spin table 2 Dried matter 3 Spin cup 4 Floor surface 5 Exhaust port 6 Inner wall 7 Rotating chamber 8 Exhaust chamber 9 Airflow inlet 10 Introducing plate 11 Female screw cylinder 12 Notch 13 Mounting piece 14 Screw 15 Supporting member

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[Procedure amendment]

[Submission date] June 30, 1995

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction content]

[0009]

As described above, the present invention has the above-described structure and action. Since the inner wall separates the rotation chamber and the exhaust chamber, the air flow from the spin cup to the outside and turbulence is prevented. be able to. Further, since the airflow due to the rotation is used to exhaust the gas, the gas can be sufficiently exhausted even if the capacity of the exhaust port is small . Further, by changing the angle of the introducing plate, it is possible to cope with the change in the size of the material to be dried and the change in the rotation speed of the spin table. Further, it can be applied to a spin coater for attaching glass or semiconductor film.

Claims (2)

[Claims] 1. A spin cup having a spin table inside thereof is provided with an inner wall in the vertical direction so as to be separated into a rotation chamber and an exhaust chamber, and a large number of air flow inlets are opened in the inner wall, and each of the air flow inlets A spin dryer characterized in that an introduction plate for introducing the airflow is provided on the side of the airflow direction, and an exhaust port is opened on the floor surface of the exhaust chamber. 2. The spin dryer according to claim 1, wherein the introducing plate is attached to the inner wall so that the angle of the introducing plate can be adjusted.