JPH08220454A - Optical control element and optical spatial transmission device - Google Patents

Abstract

PURPOSE: To obtain an optical control element which is not influenced by an electrified substance near a mirror by using a piezoelectric element as an actuator for the mirror. CONSTITUTION: This optical control element is constituted of the mirror 23 reflecting incident light, flexible pivots 24 and 25 supporting the mirror 23 so that it can rotate with respect to one shaft, constituted of two thin plates bonded perpendicularly to each other and having low torsional rigidity, a beam 26 fixing the pivots 24 and 25, the piezoelectric elements 71 and 72 fixed on the mirror 23 and rotating the mirror 23, an electrode 75 driving the piezoelectric elements 71 and 72, and weights 13 and 74 fixed on the piezoelectric elements 71 and 72.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical control element having a function as a spatial light modulator useful in the field of mobile robots and the like, and an optical space transmission apparatus having a data transmitting / receiving function using the optical control element. Is.

[0002]

2. Description of the Related Art FIG. 10 is a diagram showing a configuration example of a conventional light control element having one degree of freedom (see Japanese Patent Laid-Open No. 175050/1994). FIG. 10 showing the configuration of the reflected light control mirror 15.
In (a), 21 is a light control element that constitutes the reflected light control mirror 15 by arranging a plurality of them in a matrix and arranged in a plane, and 22 is a surface formed by the light control element 21. In FIG. 10B showing the configuration of the light control element 21, 23 is a mirror and 24 and 25 support the mirror 23 so as to be rotatable about one axis. A first flexible pivot 26 having a low torsional rigidity and composed of two thin plates joined perpendicularly to each other is a beam for fixing the first flexible pivots 24, 25.

FIG. 11 is a diagram showing the operation of the light control element. The mirror 23 is movable with respect to the vertical surface 31 about a shaft 34 from a position shown by a broken line 32 to a position shown by a broken line 33. In the "on" position, the mirror 2
The edge 35 of the third contact the landing electrode 36. The mirror 23 is moved to the "on" position by applying the appropriate voltage to the control electrode 37. This control electrode 37
The voltage above is applied to the positive electrode 38, and the inverter 3
9 to the negative electrode 40. A differential bias is applied to the mirror 23 via the electrode 41.

In the "off" state, the mirror 23 applies a negative voltage to the control electrode 37 and rotates it to the position indicated by the dashed line 33.

The reflected light control mirror 15 has a plurality of the light control elements 21 arranged in a matrix and arranged in a plane, and each mirror 23 can be controlled individually or simultaneously.

FIG. 12 is a diagram showing a configuration example of a conventional light control element having two degrees of freedom. (See JP-A-6-175050). In FIG. 12, which shows the configuration of the reflected light control mirror 15, 23 to 26 are the same as those in the conventional example of FIG. 27 is a frame that supports the first flexible pivots 24 and 25, and 28 and 29 are second flexible pivots that support the frame 27 and that are composed of two thin plates that are vertically joined to each other and that have low torsional rigidity. The axis connecting the first flexible pivot 24 and the first flexible pivot 25 and the axis connecting the second flexible pivot 28 and the second flexible pivot 29 are orthogonal to each other.

By the same driving method as the conventional example shown in FIG.
Each mirror 23 can be controlled individually or simultaneously with respect to two axes that are orthogonal to each other.

FIG. 13 is a diagram showing a configuration example of a conventional space optical transmission apparatus for transmitting and receiving data. In the figure, 1 is a light emitting element, 2 is a light emitting section for converting an electric signal into an optical signal using the built-in light emitting element 1, 3 is a transmission control device for generating the electric signal, 4 is a light receiving element, and 5 is a built-in device. A light receiving section for converting an optical signal into an electric signal using the received light receiving element 4, 6 is a base frame to which the light receiving section 5 is fixed, 7 is a moving body to which the base frame 6 is fixed, and 8 is fixed to the base frame 6. Gyro, 9 is a bearing supported by the base frame 6, 10 is a movable mirror supported by the bearing 9 in a rotatable state about one axis perpendicular to the optical axis of the light receiving section 5, and 11 is a base frame. Movable mirror 10 supported by 6
, 12 is a motor control device that controls the motor 11 based on a signal from the gyro 8, 13 is an angle sensor that detects an angle of the movable mirror 10 with respect to the base frame 6, and 14 is fixed to the base frame 6. It is a fixed mirror.

FIG. 14 is a block diagram showing the operation of the above-described space optical transmission apparatus. The attitude angle of the moving body 7 is detected by the gyro 8, and the motor controller 12 controls the motor 11 so that the movable mirror 10 reflects the optical signal from the light emitting section 2 to the light receiving section 5 based on the gyro signal. The movable mirror 10 is driven. Detecting the pointing error of the movable mirror 10 with respect to the command value of the motor control device 12 from the measurement values of the gyro 8 and the angle sensor 13, feeding it back to the motor control device 12, and driving the motor 11 so that the error becomes zero. As a result, the optical signal transmitted from the light emitting unit 2 can be reflected by the movable mirror 10 and received by the light receiving unit 5.

[0010]

In the conventional light control element, the charged mirror is rotated by the electric attraction force. However, if there is a charged object near the mirror, the relationship between the rotation angle of the mirror and the voltage changes. In order to simplify the structure, there is a problem that the mirror rotation angle cannot be open-controlled by the voltage without using the rotation angle detector.

Further, in the conventional space optical transmission apparatus, since the mechanism for making the light signal transmitted from the light emitting section to the space incident on the light receiving section is only one of the motor drive type, the bearing which hinders the improvement of the pointing accuracy. Since the influence of the friction torque of the optical space transmission device remains, the optical signal accompanying the sway of the optical space transmission device will reach the level required to stably receive the optical signal at the light receiving section in the optical space transmission device mounted on the moving body. There is a problem that the shake of the light cannot be corrected and the light cannot be incident on the light receiving portion.

Further, when the optical signals transmitted from one light emitting section are received by a plurality of light receiving sections, the optical signal cannot be changed for each individual light receiving section, so that the plurality of light receiving sections must receive the same optical signal. There was the problem of not getting.

The present invention has been made in order to solve the above-mentioned problems, and by using a piezoelectric element as an actuator, a light control element which is not affected by a charged material near the mirror, and an optical control element By using the control element,
It is an object of the present invention to obtain an optical space transmission device having reduced friction torque and improved pointing accuracy, and further to obtain an optical space transmission device capable of transmitting an optical signal changed from one light emitting unit to each individual light receiving unit. .

[0014]

In order to achieve the above object, the light control element according to Embodiment 1 of the present invention uses a piezoelectric element as an actuator of a mirror.

The light control element of the second embodiment of the present invention uses piezoelectric elements for the actuators of the mirror and the frame.

An optical space transmission device according to a third embodiment of the present invention is
A reflected light control mirror composed of a light control element having a known degree of freedom of 1 is arranged between a movable mirror that reflects an optical signal and a light receiving section that receives the optical signal.

An optical space transmission device according to a fourth embodiment of the present invention is
A reflected light control mirror composed of a known light control element with two degrees of freedom is arranged between a movable mirror that reflects an optical signal and a light receiving section that receives the optical signal.

The optical space transmission apparatus according to the fifth embodiment of the present invention is
In the optical space transmission device configured in the third embodiment,
A reflected light control mirror composed of a known light control element with one degree of freedom is arranged before transmitting an optical signal separated into multiple systems by a half mirror to the space.

An optical space transmission device according to a sixth embodiment of the present invention is
In the optical control element using the optical control element described in the first embodiment as the optical control element configured in the third embodiment, or in the optical space transmission apparatus configured in the third embodiment, the optical signal separated into multiple systems by the half mirror is spatially transmitted. Example 1 before sending to
A reflected light control mirror composed of the described light control element is arranged.

An optical space transmission device according to a seventh embodiment of the present invention is
In the optical space transmission device configured in the fourth embodiment,
A reflected light control mirror composed of a light control element having a known degree of freedom 2 is arranged before transmitting an optical signal separated into two systems by a half mirror to the space.

An optical space transmission apparatus according to Example 8 of the present invention is
In the optical control element configured in the fourth embodiment, the optical control element described in the second embodiment is used, or in the optical space transmission apparatus configured in the fourth embodiment, optical signals separated into multiple systems by a half mirror are spatially separated. Example 2 before sending to
A reflected light control mirror composed of the described light control element is arranged.

[0022]

In the first embodiment of the present invention, since the piezoelectric element is used for the actuator of the mirror, there is an effect of rotating the mirror without being affected by the charged material near the mirror.

In the second embodiment of the present invention, since the piezoelectric elements are used for the actuators of the mirror and the frame, there is an effect of rotating the mirror without being affected by the charged substances near the mirror and the frame.

An optical space transmission device according to a third embodiment of the present invention is
Reflected light composed of an optical control element with a known degree of freedom of 1 controlled by a movable mirror driven by a motor based on a gyro signal and controlled on the basis of a gyro signal and an angle sensor signal. The secondary stabilization by the control mirror has an effect of correcting the shake of the optical signal due to the fluctuation in one axial direction and allowing the light receiving section to receive the light stably without interruption.

In the fourth embodiment of the present invention, an optical signal which is primarily stabilized by a movable mirror driven by a motor based on a gyro signal, and a known degree of freedom controlled based on a gyro signal and an angle sensor signal are used. By secondarily stabilizing the reflected light control mirror composed of two light control elements, it has a function of correcting the shake of the optical signal due to the fluctuation in the two axial directions and allowing the light receiving section to receive the light stably without interruption. .

The fifth embodiment of the present invention corresponds to the first embodiment described in the third embodiment.
Using the optical control element with a known degree of freedom 1 to correct the fluctuation of the optical signal due to the fluctuation in one axial direction and to receive it stably at the light receiving part without interruption By changing and transmitting to the space, there is an effect that each light receiving unit can receive a dedicated optical signal.

The sixth embodiment of the present invention corresponds to the first embodiment described in the third embodiment.
An optical control element having a degree of freedom of 1 described in the first embodiment, which has a function of correcting the shake of an optical signal due to fluctuations in one axial direction and causing the light receiving unit to receive the light stably without interruption, or an optical signal separated into multiple systems by a half mirror. By changing the value with the use of and transmitting to the space, there is an effect that each light receiving section can receive a dedicated optical signal.

The seventh embodiment of the present invention is the same as the second embodiment described in the second embodiment.
Using the optical control element with a known degree of freedom 2 to correct the shake of the optical signal due to the fluctuation in one axial direction and to receive it stably in the light receiving section without interruption By changing and transmitting to the space, there is an effect that each light receiving unit can receive a dedicated optical signal.

The eighth embodiment of the present invention is the same as the second embodiment described in the second embodiment.
The function of correcting the shake of the optical signal due to the fluctuations in the two axial directions so that the light receiving section receives the light stably and intermittently, or the optical control with two degrees of freedom described in the second embodiment for the optical signal separated into multiple systems by the half mirror. By changing using an element and transmitting to the space, there is an effect that each light receiving section can receive a dedicated optical signal.

[0030]

【Example】

Example 1. FIG. 1 is a diagram showing the principle of operation of the light control element in the embodiment of the present invention. In the figure, 23 to 25 are the same as the above-mentioned conventional device. Reference numerals 71 and 72 denote piezoelectric elements fixed to the mirror 23, and 73 and 74 denote piezoelectric elements 71 and 72.
It is a weight fixed to.

The mirror 23 is a flexible pivot 24,
It is rotatable about an axis constituted by 25. The mirror 23 is rotated clockwise by the inertial force of the weight 73 fixed to the piezoelectric element 71 that is rapidly deformed by applying a voltage. Similarly, the mirror 23 is rotated counterclockwise by the inertial force of the weight 74 fixed to the piezoelectric element 72 that is rapidly deformed by applying a voltage. The mirror rotation angle can be determined by controlling the deformation acceleration of the piezoelectric element 71 using the voltage height and the rise time as parameters.

FIG. 2 is a block diagram of the light control element in the embodiment of the present invention. In FIGS. 2A and 2B, 21
26 are the same as the conventional light control element. 2C is a view of the mirror 23 of FIG.
Is a control electrode, 76 is a negative electrode, and 77 is an inverter.

The mirror 23 is a flexible pivot 24,
It is rotatable about an axis determined by connecting 25. When a positive voltage is applied to the control electrode 75, the piezoelectric element 7
2 is deformed, and the weight 74 follows the operating principle shown in FIG.
Has an action of rotating the mirror 23. On the other hand, when a negative voltage is applied to the control electrode 75, only the piezoelectric element 71 is deformed, and the inertia force of the weight 73 causes the mirror 23 to rotate in the direction opposite to that when a positive voltage is applied, according to the operating principle shown in FIG. There is.

Further, in this embodiment, since the piezoelectric elements 71 and 72 are used for the actuator of the mirror 23, the mirror 23 can be rotated without being affected by the charged material near the mirror 23. Therefore, in order to simplify the structure, there is an effect that the mirror rotation angle can be open-controlled by the height of the voltage and the rising time without using the rotation angle detector.

Example 2. FIG. 3 is a configuration diagram of the light control element in the embodiment of the present invention. In FIG. 3A, 2
7 to 29 are the same as the conventional light control element. FIG. 3 (b)
FIG. 7 is a view of the mirror 23 of FIG.
1 to 77 are the same as those in the first embodiment. 78 and 79 are second piezoelectric elements fixed to the frame 27, and 80 and 81.
Is a second weight fixed to the second piezoelectric elements 78 and 79,
Reference numeral 82 is a second control electrode, 83 is a second negative electrode, and 84 is a second inverter.

The mirror 23 is rotatable about an axis determined by connecting the first flexible pivots 24,25. When a positive voltage is applied to the first control electrode 75, only the piezoelectric element 72 is deformed, and the mirror 23 is rotated by the inertial force of the weight 74 according to the operation principle shown in FIG. On the other hand, when a negative voltage is applied to the control electrode 75, only the piezoelectric element 71 is deformed, and the weight 7 is moved according to the operating principle shown in FIG.
The inertial force of 3 causes the mirror 23 to rotate in the direction opposite to that when a positive voltage is applied.

Also, the first flexible pivot 24,
The frame 27 that supports the mirror 23 via the
Is rotatable about an axis determined by connecting the flexible pivots 28, 29 of the. When a positive voltage is applied to the second control electrode 82, only the piezoelectric element 78 is deformed,
According to the operation principle shown in FIG. 1, due to the inertial force of the weight 80,
The mirror 23 has a function of rotating simultaneously with the frame 27. On the other hand, when a negative voltage is applied to the second control electrode 82, only the piezoelectric element 79 is deformed, and the inertial force of the weight 81 applies a positive voltage to the mirror 23 at the same time as the frame 27 according to the operation principle shown in FIG. Has the effect of rotating in the opposite direction.

Further, in this embodiment, the actuators of the mirror 23 are provided with the first piezoelectric elements 71, 72 and the frame 2
Since the second piezoelectric elements 78 and 79 are used for the actuator of No. 7, the mirror 23 can be rotated without being affected by the charged material near the mirror 23. Therefore, in order to simplify the structure, there is an effect that the mirror rotation angle can be open-controlled by the height of the voltage and the rising time without using the rotation angle detector.

Example 3. FIG. 4 is a block diagram of an optical space transmission device according to an embodiment of the present invention. In the figure, 1-1
3 is the same as the conventional device. Reference numeral 15 denotes a reflected light control mirror composed of a light control element having a known degree of freedom of 1 for making an optical signal from the movable mirror 10 incident on the light receiving portion 5, and 1
A light control element control device 6 controls the reflected light control mirror 15.

FIG. 5 is a block diagram showing the operation of the optical free space transmission apparatus in this embodiment. The gyro 8 for detecting the attitude angle of the moving body detects the gyro signal, and based on the gyro signal, the motor control device 12 controls the motor 11 so that the reflected light of the movable mirror 10 is directed toward the light receiving unit 5, and the movable mirror 10 is controlled. Drive. It is the same as the above conventional device until the pointing error of the movable mirror 10 with respect to the command value of the motor control device 12 is detected by the difference between the measured values of the gyro 8 and the angle sensor 13. Further, in this embodiment, the movable mirror 10
Is input to the light control element control device 16, and the light control element control device 16 sets the reflected light control mirror 15 including the light control element 21 having a known degree of freedom 1 so that the direction error becomes zero. As shown in FIG. 6, the mirror 23, which is a component of the light control element 21, is rotationally controlled. That is, the movable mirror 1 driven by the motor 11 based on the gyro signal
Secondly stabilizing an optical signal primary stabilized by 0 by a reflected light control mirror 15 composed of an optical control element 21 having a known degree of freedom 1 and controlled based on a gyro signal and an angle sensor signal. Thus, there is an action of correcting the shake of the optical signal due to the fluctuation in one axial direction so that the light receiving unit receives the light stably without interruption.

Example 4. FIG. 7 is a block diagram of an optical space transmission device according to an embodiment of the present invention. In the figure, 1-1
3 is the same as the conventional device. Reference numeral 51 denotes a second frame that supports the first bearing 9, 52 denotes a base frame 6 that supports the second frame 51 so as to be rotatable about an axis orthogonal to the rotation axis of the first bearing 9. Second bearing, 53 is a second motor for driving the second frame 51 around the rotation axis of the second bearing 52, and 54 is a second
Second angle sensor for detecting the angle of the frame 51 with respect to the base frame 6, and 55 is a reflected light control including a light control element having a known degree of freedom 2 for causing the light signal from the movable mirror 10 to enter the light receiving unit 5. A mirror 56 is a light control element control device for controlling the reflected light control mirror 55.

In the optical free space transmission apparatus of this embodiment, the same operation as that of the third embodiment can be obtained with respect to two axes which are orthogonal to each other. That is, first, the two-dimensional shake of the optical signal due to the shaking of the moving body is also the third embodiment with respect to the rotation axes of the first bearing 9 and the second bearing 52 which are orthogonal to each other as the first stage.
It is suppressed by the first motor 11 and the second motor 53 by the control method shown in FIG. Next, as the second stage, the first orthogonal to each other
Similarly, regarding the axis connecting the flexible pivots 24 and 25 and the axis connecting the second flexible pivots 28 and 29, the mirror 23, which is a constituent element of the light control element 21 having a known degree of freedom 2 by the control method shown in the third embodiment. By suppressing with, there is an effect that the shake of the optical signal due to the shaking in the two axial directions is corrected and the light receiving section receives the light stably without interruption.

Example 5. FIG. 8 is a block diagram of an optical free space transmission apparatus according to an embodiment of the present invention. 1 to 1 in the figure
3, 15 and 16 are the same as those in the third embodiment. Reference numeral 61 is a half mirror that reflects and transmits an optical signal emitted from the light emitting section 2, and 62 is a matrix of a plurality of light control elements having a known degree of freedom 1 that can arbitrarily select and reflect the optical signal reflected by the half mirror 61. First reflection light control mirror configured by being arranged in a plane and arranged in a plane, 6
3 is a first for controlling the light control element of the reflected light control mirror 62
Is a light control element control device.

In the optical space transmission apparatus in this embodiment,
An optical signal transmitted from one light emitting section 2 and separated into multiple systems by the half mirror 61 is a known element which is a constituent element of the first reflected light control mirror 62 controlled by the first light control element control device 63. By changing using the light control element having one degree of freedom and transmitting to the space, there is an effect that each light receiving section 5 can receive a dedicated optical signal. Further, similarly to the third embodiment, an optical signal primary-stabilized by the movable mirror 10 driven by the motor 11 based on the gyro signal is optically controlled with a known degree of freedom 1 based on the gyro signal and the angle sensor signal. Secondary reflection is performed by the reflected light control mirror 15 composed of the element 21, which has a function of correcting the shake of the optical signal due to the fluctuation in one axial direction and allowing the light receiving unit to receive the light stably without interruption.

Example 6. In the third or fifth embodiment, the reflected light control mirror configured of the light control element having the known degree of freedom 1 is described, but the reflected light control mirror configured of the light control element described in the first embodiment is used. You can also

Example 7. FIG. 9 is a block diagram of the optical free space transmission apparatus in the embodiment of the present invention. In the figure, 1-1
3, 51 to 56 are the same as those in the fourth embodiment, and 61 is the same as those in the fifth embodiment. 64 is a half mirror 61
A first reflected light control mirror, which is constituted by arranging a plurality of light control elements having a known degree of freedom 2 and capable of arbitrarily selecting and reflecting the light signal reflected by Is a first light control element control device for controlling the light control element of the reflected light control mirror 64.

In the optical space transmission apparatus in this embodiment,
Similarly to the fifth embodiment, an optical signal emitted from one light emitting unit 2 and separated into multiple systems by the half mirror 61 is output from the first reflected light control mirror 64 controlled by the first light control element control device 65. There is an effect that each light receiving section 5 can receive a dedicated optical signal by changing the light control element having a known degree of freedom of 2 as a constituent element and transmitting the light to the space. Further, as in the case of the fourth embodiment, first, the two-dimensional shake of the optical signal due to the shaking of the moving body is set as the first stage with respect to the rotating shafts of the first bearing 9 and the second bearing 52 which are orthogonal to each other. It is suppressed by the first motor 11 and the second motor 53 by the control method shown in FIG. Next, regarding the axis connecting the first flexible pivots 24 and 25 orthogonal to each other as the second stage and the axis connecting the second flexible pivots 28 and 29, similarly, the degree of freedom known by the control method shown in the practical example 4 is known. By using the mirror 23, which is a component of the light control element 21 of No. 2,
It has a function of correcting the shake of the optical signal due to the fluctuation in the two axial directions and allowing the light receiving section to receive the light stably without interruption.

Example 8. Although the reflected light control mirror composed of the light control element having the known degree of freedom 2 is described in the fourth or seventh embodiment, the reflected light control mirror composed of the light control element described in the second embodiment is used. You can also

[0049]

Since the present invention is constructed as described above, it has the following effects.

By using the piezoelectric element for the actuator of the mirror of the light control element having one degree of freedom, the mirror can be rotated without being affected by the charged material near the mirror. Therefore, there is an effect that the mirror rotation angle can be open-controlled by the height of the voltage and the rising time without using the rotation angle detector in order to simplify the structure.

By using the piezoelectric element for the frame of the light control element having two degrees of freedom and the actuator of the mirror, the mirror can be rotated without being affected by the charged material near the mirror. Therefore, there is an effect that the mirror rotation angle can be open-controlled by the height of the voltage and the rising time without using the rotation angle detector in order to simplify the structure.

By disposing the light control element having one degree of freedom between the movable mirror that reflects the optical signal and the light receiving portion that receives the optical signal, the movable mirror driven by the motor based on the gyro signal is used as the primary mirror. The stabilized optical signal is secondarily stabilized by a reflected light control mirror composed of an optical control element with one degree of freedom controlled based on a gyro signal and an angle sensor signal, so that the oscillation in one axial direction is caused. This has the effect of correcting the shake of the optical signal caused by the above and causing it to stably enter the light receiving portion without interruption.

By disposing the optical control element having two degrees of freedom between the movable mirror that reflects the optical signal and the light receiving portion that receives the optical signal, the movable mirror driven by the motor based on the gyro signal is used as the primary mirror. The stabilized optical signal is secondarily stabilized by a reflection term control mirror composed of an optical control element having two degrees of freedom controlled based on a gyro signal and an angle sensor signal, so that oscillation in two axial directions is caused. There is an effect that the shake of the optical signal due to the correction is corrected and the light receiving section receives the light stably without any interruption.

By arranging an optical control element having one degree of freedom or two degrees of freedom before transmitting an optical signal separated into multiple systems by a half mirror to the space, the optical signal can be changed and transmitted to the space. There is an effect that the section can receive a dedicated optical signal.

[Brief description of drawings]

FIG. 1 is an operation principle diagram of a light control element according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram of a light control element in Example 1 of the present invention.

FIG. 3 is a configuration diagram of a light control element in Example 2 of the present invention.

FIG. 4 is a configuration diagram of an optical space transmission device according to a third embodiment of the present invention.

FIG. 5 is a block diagram showing an operation of the optical free space transmission apparatus according to the third embodiment of the present invention.

FIG. 6 is a diagram showing an operation of a reflected light control mirror in Example 3 of the present invention.

FIG. 7 is a configuration diagram of an optical space transmission device according to a fourth embodiment of the present invention.

FIG. 8 is a configuration diagram of an optical space transmission device according to a fifth embodiment of the present invention.

FIG. 9 is a configuration diagram of an optical space transmission device according to a seventh embodiment of the present invention.

FIG. 10 is a diagram showing a configuration example of a conventional light control element having one degree of freedom.

FIG. 11 is a diagram showing an operation of a conventional light control element.

FIG. 12 is a diagram showing a configuration example of a conventional light control element having two degrees of freedom.

FIG. 13 is a diagram showing a configuration example of a conventional space optical transmission apparatus.

FIG. 14 is a block diagram showing an operation of a conventional optical space transmission device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 light emitting element, 2 light emitting section, 3 emission control device, 4 light receiving element, 5 light receiving section, 6 base frame, 7 moving body, 8 gyro, 9 bearing, 10 movable mirror, 1
1 motor, 12 motor control device, 13 angle sensor, 14 fixed mirror, 15 reflected light control mirror, 16
Light control element control device, 21 light control element, 22 surface,
23 mirror, 24 first flexible pivot, 2
5 first flexible pivot, 26 beam, 27
Frame, 28 second flexible pivot, 29
Second flexible pivot, 31 vertical plane, 32
Broken line, 33 broken line, 34 axis, 35 edge, 36 landing electrode, 37 control electrode, 38 positive electrode, 39 inverter, 40 negative electrode, 41 electrode, 51 second frame, 52 second bearing, 53 second motor 5,
4 Second angle sensor, 55 Reflected light control mirror, 56
Light control element control device, 61 Half mirror, 62 First reflected light control mirror, 63 First light control element control device, 64 First reflected light control mirror, 65 First light control element control device, 71st 1 piezoelectric element, 72 1st piezoelectric element, 73 1st weight, 74 1st weight, 75
1st control electrode, 76 1st negative electrode, 77 1st inverter, 78 2nd piezoelectric element, 79 2nd piezoelectric element, 80 2nd weight, 81 2nd weight, 82 2nd control Electrode, 83 second negative electrode, 84 second inverter.

Claims (8)

[Claims] 1. A flexible pivot having low torsional rigidity, comprising a mirror for reflecting incident light, two thin plates vertically joined to each other for supporting the mirror so as to be rotatable about one axis, and fixing the flexible pivot. Beam, a piezoelectric element that is fixed to the mirror and rotates the mirror, an electrode that drives the piezoelectric element, and a weight that is fixed to the piezoelectric element are arranged in a planar and matrisk pattern to form a reflected light control mirror. An optical control element characterized by: 2. A first flexible pivot having low torsional rigidity, which comprises a mirror for reflecting incident light, two thin plates vertically joined to each other for rotatably supporting the mirror, and the first flexible pivot. A frame for fixing one flexible pivot, and a low torsional rigidity composed of two thin plates vertically joined to each other for supporting the frame so that the frame can be rotated about an axis perpendicular to the rotation axis of the mirror A second flexible pivot, a beam that fixes the second flexible pivot, a first piezoelectric element that is fixed to the mirror and rotates the mirror, and a first piezoelectric element that is fixed to the first piezoelectric element.
Weight, a second piezoelectric element fixed to the frame and rotating the mirror together with the frame, a second weight fixed to the second piezoelectric element, an electrode for driving the first and second piezoelectric elements. 1. A light control element comprising a reflective light control mirror configured by arranging and in a plane shape and a matrisk shape. 3. A light emitting section for converting an electric signal into an optical signal using a built-in light emitting element, a transmission control device for generating the electric signal, and an optical signal for converting into an electric signal using a built-in light receiving element. A light receiving part, a base frame to which the light receiving part is fixed, a moving body to which the base frame is fixed, a gyro that detects an attitude angle of the moving body, a bearing fixed to the base frame, an optical axis of the light receiving part On the other hand, a movable mirror supported by the bearing so as to be rotatable about one axis perpendicular thereto, a motor supported by the base frame to drive the movable mirror, and reflected light of the movable mirror based on a signal from the gyro. A motor control device for controlling the motor so that the light is directed toward the light receiving section,
An angle sensor fixed to the base frame to detect an angle of the movable mirror with respect to the base frame, and an optical control element having a degree of freedom of 1 fixed to the base frame at a position where an optical signal from the movable mirror is reflected to the light receiving portion. Of the gyro signal and the measurement value of the angle sensor so that the pointing error of the movable mirror with respect to the command value of the motor control device becomes zero. An optical space transmission device comprising: a light control element control device that controls the light control element based on a difference. 4. A light emitting section for converting an electric signal into an optical signal by using a built-in light emitting element, a transmission control device for generating the electric signal, and an optical signal for converting into an electric signal using a built-in light receiving element. A light receiving portion, a base frame to which the light receiving portion is fixed, a moving body to which the base frame is fixed, a gyro that detects the attitude angle of the moving body, a first bearing fixed to the base frame, and a light receiving portion of the light receiving portion. A second frame supported by the first bearing in a state of being rotatable about one axis perpendicular to the optical axis, a second bearing fixed to the second frame, and a first bearing. A movable mirror supported by the second bearing in a state of being rotatable about an axis orthogonal to a rotation axis, a first motor fixed to the base frame to drive the second frame, the first motor A second motor fixed to the second frame for driving the movable mirror, and the first motor and the second motor for directing the reflected light of the movable mirror toward the light receiving portion based on the signal from the gyro. A motor control device for controlling a motor, a first angle sensor fixed to the base frame to detect an angle of the second frame with respect to the base frame, and a second angle sensor of the movable mirror fixed to the second frame. A second angle sensor for detecting an angle with respect to the frame, light control elements having two degrees of freedom and fixed to the base frame at a position where the light signal from the movable mirror is reflected by the light receiving portion are arranged in a plane and in a matrix. And the gyro signal so that the pointing error of the movable mirror with respect to the command value of the second control device becomes zero. Space optical transmission apparatus characterized by comprising a light control element controller for controlling the light control element on the basis of the difference between the first angle sensor and the measurement value of the second angle sensor. 5. A light emitting section for converting an electric signal into an optical signal by using a built-in light emitting element, a transmission control device for generating the electric signal, a half mirror for reflecting and transmitting the optical signal, and a transmission by the half mirror. First reflected light control mirror configured by arranging light control elements having one degree of freedom capable of arbitrarily selecting and reflecting the reflected optical signal in a plane and a matrix, and an optical signal using a built-in light receiving element A plurality of light receiving units for converting the electric signals into electric signals, a base frame to which the light receiving units are fixed, a moving body to which the base frame is fixed, a gyro that detects the attitude angle of the moving body, and a bearing fixed to the base frame. A plurality of movable mirrors supported by the bearings in a state of being rotatable about one axis perpendicular to the optical axis of each of the light receiving portions, and the plurality of movable mirrors supported by the base frame. A motor for driving each movable mirror, a motor control device for controlling the motor so as to direct the reflected light of the individual movable mirror toward the respective light receiving portions based on the signal from the gyro, and the base frame. An angle sensor that detects the angle of the fixed movable mirror with respect to the base frame, and a light beam having a degree of freedom of 1 that is fixed to the base frame and can individually reflect the optical signals from the movable mirror to the light receiving portions. A plurality of second reflected light control mirrors configured by arranging control elements in a plane and in a matrix, and the above-mentioned so that the pointing error of each of the movable mirrors with respect to the command value of the motor control device becomes zero. An optical space comprising a light control element control device for controlling the light control element based on a difference between a gyro signal and a measurement value of the angle sensor. Feeding apparatus. 6. The light control element according to claim 1 is used as the light control element.
The optical space transmission device described. 7. A light emitting section for converting an electric signal into an optical signal using a built-in light emitting element, a transmission control device for generating the electric signal, a half mirror for reflecting and transmitting the optical signal, and a transmission by the half mirror. Using a built-in light receiving element, a first reflected light control mirror configured by arranging a plurality of light control elements having two degrees of freedom capable of arbitrarily selecting and reflecting a selected optical signal in a planar shape A plurality of light receiving units for converting optical signals into electric signals, a base frame to which the light receiving units are fixed, a moving body to which the base frame is fixed, a gyro to detect the attitude angle of the moving body, and a fixed to the base frame. A first bearing, a second frame supported by the first bearing in a rotatable state about one axis perpendicular to the optical axis of the light receiving section, and a second frame fixed to the second frame. A fixed second bearing, a movable mirror supported by the second bearing in a rotatable state about an axis orthogonal to the rotation axis of the first bearing,
A first motor fixed to the base frame to drive the second frame, a second motor fixed to the second frame to drive the movable mirror, and a second motor of the movable mirror based on a signal from the gyro. A motor control device for controlling the first motor and the second motor so as to direct reflected light toward the light receiving portion; and a motor control device fixed to the base frame for detecting an angle of the second frame with respect to the base frame. No. 1 angle sensor, a second angle sensor fixed to the second frame for detecting the angle of the movable mirror with respect to the second frame, and a position where the optical signal from the movable mirror is reflected to the light receiving unit. A reflection light control mirror which is fixed to a base frame and is formed by arranging light control elements having two degrees of freedom in a plane shape and in a matrix shape. Light control element for controlling the light control element based on the difference between the gyro signal and the measured values of the first angle sensor and the second angle sensor so that the pointing error of the movable mirror with respect to the threshold value becomes zero. An optical space transmission device comprising a control device. 8. The optical space transmission device according to claim 4, wherein the optical control element according to claim 2 is used as the optical control element.