JPH08125200A - 半導体装置及びその製造方法 - Google Patents

半導体装置及びその製造方法

Info

Publication number
JPH08125200A
JPH08125200A JP6260541A JP26054194A JPH08125200A JP H08125200 A JPH08125200 A JP H08125200A JP 6260541 A JP6260541 A JP 6260541A JP 26054194 A JP26054194 A JP 26054194A JP H08125200 A JPH08125200 A JP H08125200A
Authority
JP
Japan
Prior art keywords
semiconductor layer
layer
region
semiconductor
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6260541A
Other languages
English (en)
Japanese (ja)
Inventor
Akiyuki Soejima
顕幸 副島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6260541A priority Critical patent/JPH08125200A/ja
Priority to US08/533,753 priority patent/US5717244A/en
Priority to DE69508885T priority patent/DE69508885T2/de
Priority to EP95116283A priority patent/EP0709898B1/en
Priority to KR1019950036064A priority patent/KR0173498B1/ko
Publication of JPH08125200A publication Critical patent/JPH08125200A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00—Thyristors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/01—Manufacture or treatment
    • H10D8/045—Manufacture or treatment of PN junction diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/50—Physical imperfections
    • H10D62/53—Physical imperfections the imperfections being within the semiconductor body 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes

Landscapes

  • Thyristors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP6260541A 1994-10-25 1994-10-25 半導体装置及びその製造方法 Pending JPH08125200A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP6260541A JPH08125200A (ja) 1994-10-25 1994-10-25 半導体装置及びその製造方法
US08/533,753 US5717244A (en) 1994-10-25 1995-09-26 Semiconductor device having layers with varying lifetime characteristics
DE69508885T DE69508885T2 (de) 1994-10-25 1995-10-16 Halbleiterdiode und Verfahren zur Herstellung
EP95116283A EP0709898B1 (en) 1994-10-25 1995-10-16 Semiconductor diode and method of fabricating the same
KR1019950036064A KR0173498B1 (ko) 1994-10-25 1995-10-18 반도체 장치 및 그 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6260541A JPH08125200A (ja) 1994-10-25 1994-10-25 半導体装置及びその製造方法

Publications (1)

Publication Number Publication Date
JPH08125200A true JPH08125200A (ja) 1996-05-17

Family

ID=17349401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6260541A Pending JPH08125200A (ja) 1994-10-25 1994-10-25 半導体装置及びその製造方法

Country Status (5)

Country Link
US (1) US5717244A (forum.php)
EP (1) EP0709898B1 (forum.php)
JP (1) JPH08125200A (forum.php)
KR (1) KR0173498B1 (forum.php)
DE (1) DE69508885T2 (forum.php)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999009600A1 (en) * 1997-08-14 1999-02-25 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and method for manufacturing the same
JP2000106368A (ja) * 1998-08-21 2000-04-11 Asea Brown Boveri Ag 半導体素子及びその製造方法
JP2007019518A (ja) * 2005-07-08 2007-01-25 Infineon Technologies Austria Ag フィールドストップを有する半導体部品
JP2009224794A (ja) * 2002-02-20 2009-10-01 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法
WO2011052787A1 (ja) * 2009-11-02 2011-05-05 富士電機システムズ株式会社 半導体装置および半導体装置の製造方法
JP2012199577A (ja) * 2012-06-04 2012-10-18 Fuji Electric Co Ltd 半導体装置および半導体装置の製造方法
JP2013084828A (ja) * 2011-10-12 2013-05-09 Mitsubishi Electric Corp 半導体装置
JP2014053451A (ja) * 2012-09-07 2014-03-20 Hitachi Power Semiconductor Device Ltd ダイオード及び電力変換システム

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713962C1 (de) * 1997-04-04 1998-07-02 Siemens Ag Leistungsdiode (FCI-Diode)
DE69842207D1 (en) * 1998-06-01 2011-05-12 Mitsubishi Electric Corp Diode
JP4080659B2 (ja) * 2000-01-28 2008-04-23 三菱電機株式会社 半導体装置
US7485920B2 (en) * 2000-06-14 2009-02-03 International Rectifier Corporation Process to create buried heavy metal at selected depth
DE10048345A1 (de) * 2000-09-29 2002-05-16 Eupec Gmbh & Co Kg Körper aus Halbleitermaterial mit reduzierter mittlerer freier Weglänge
DE10065525B4 (de) * 2000-12-28 2006-07-20 Robert Bosch Gmbh Verfahren zur Herstellung einer Halbleiteranordnung mit einem PN-Übergang
US7405465B2 (en) 2004-09-29 2008-07-29 Sandisk 3D Llc Deposited semiconductor structure to minimize n-type dopant diffusion and method of making
DE112015000206T5 (de) 2014-10-03 2016-08-25 Fuji Electric Co., Ltd. Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung
DE112017000064T5 (de) 2016-02-23 2018-03-29 Fuji Electric Co., Ltd. Halbleitervorrichtung
JP6846119B2 (ja) * 2016-05-02 2021-03-24 株式会社 日立パワーデバイス ダイオード、およびそれを用いた電力変換装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4259683A (en) * 1977-02-07 1981-03-31 General Electric Company High switching speed P-N junction devices with recombination means centrally located in high resistivity layer
JPS59189679A (ja) * 1983-04-13 1984-10-27 Hitachi Ltd ダイオ−ド
JPH0640581B2 (ja) * 1984-03-23 1994-05-25 株式会社東芝 スイツチング素子
US4752818A (en) * 1985-09-28 1988-06-21 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor device with multiple recombination center layers
JPS63205958A (ja) * 1987-02-21 1988-08-25 Matsushita Electric Works Ltd 静電誘導サイリスタ
JPH0193167A (ja) * 1987-10-05 1989-04-12 Toyota Autom Loom Works Ltd 高耐圧トランジスタ
JPH03171777A (ja) * 1989-11-30 1991-07-25 Toshiba Corp 半導体装置
JPH0650738B2 (ja) * 1990-01-11 1994-06-29 株式会社東芝 半導体装置及びその製造方法
JPH04348527A (ja) * 1991-05-27 1992-12-03 Fuji Electric Co Ltd 半導体装置の製造方法
US5710437A (en) * 1993-03-05 1998-01-20 Nippon Steel Corporation Radiation detecting device using superconducting tunnel junction and method of fabricating the same
DE4310444C2 (de) * 1993-03-31 1995-05-11 Semikron Elektronik Gmbh Schnelle Leistungsdiode

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999009600A1 (en) * 1997-08-14 1999-02-25 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and method for manufacturing the same
US6603189B2 (en) 1997-08-14 2003-08-05 Mitsubishi Denki Kabushiki Kaisha Semiconductor device with deliberately damaged layer having a shorter carrier lifetime therein
KR100418007B1 (ko) * 1997-08-14 2004-02-11 미쓰비시덴키 가부시키가이샤 반도체 장치 및 그의 제조방법
JP2000106368A (ja) * 1998-08-21 2000-04-11 Asea Brown Boveri Ag 半導体素子及びその製造方法
JP2009224794A (ja) * 2002-02-20 2009-10-01 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法
JP2007019518A (ja) * 2005-07-08 2007-01-25 Infineon Technologies Austria Ag フィールドストップを有する半導体部品
JP2014099643A (ja) * 2009-11-02 2014-05-29 Fuji Electric Co Ltd 半導体装置
US9070658B2 (en) 2009-11-02 2015-06-30 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US10998398B2 (en) 2009-11-02 2021-05-04 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US10868111B2 (en) 2009-11-02 2020-12-15 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
WO2011052787A1 (ja) * 2009-11-02 2011-05-05 富士電機システムズ株式会社 半導体装置および半導体装置の製造方法
US8766413B2 (en) 2009-11-02 2014-07-01 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
JP5569532B2 (ja) * 2009-11-02 2014-08-13 富士電機株式会社 半導体装置および半導体装置の製造方法
US10847608B2 (en) 2009-11-02 2020-11-24 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US9252209B2 (en) 2009-11-02 2016-02-02 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US10043865B2 (en) 2009-11-02 2018-08-07 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US20180350902A1 (en) 2009-11-02 2018-12-06 Fuji Electric Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
JP2013084828A (ja) * 2011-10-12 2013-05-09 Mitsubishi Electric Corp 半導体装置
JP2012199577A (ja) * 2012-06-04 2012-10-18 Fuji Electric Co Ltd 半導体装置および半導体装置の製造方法
JP2014053451A (ja) * 2012-09-07 2014-03-20 Hitachi Power Semiconductor Device Ltd ダイオード及び電力変換システム

Also Published As

Publication number Publication date
EP0709898B1 (en) 1999-04-07
EP0709898A3 (forum.php) 1996-06-12
DE69508885D1 (de) 1999-05-12
KR960015948A (ko) 1996-05-22
US5717244A (en) 1998-02-10
EP0709898A2 (en) 1996-05-01
DE69508885T2 (de) 1999-12-09
KR0173498B1 (ko) 1999-02-01

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