JPH0756442B2 - 容量性距離測定用センサ装置 - Google Patents

容量性距離測定用センサ装置

Info

Publication number
JPH0756442B2
JPH0756442B2 JP3291310A JP29131091A JPH0756442B2 JP H0756442 B2 JPH0756442 B2 JP H0756442B2 JP 3291310 A JP3291310 A JP 3291310A JP 29131091 A JP29131091 A JP 29131091A JP H0756442 B2 JPH0756442 B2 JP H0756442B2
Authority
JP
Japan
Prior art keywords
resistor
sensor
sensor device
resistance value
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3291310A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518791A (ja
Inventor
ヤギーラ マンフレッド
バルス キリアン
Original Assignee
ヴァイトミュラー インテルファーセ ゲーエムベーハー ウント ツェーオー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヴァイトミュラー インテルファーセ ゲーエムベーハー ウント ツェーオー filed Critical ヴァイトミュラー インテルファーセ ゲーエムベーハー ウント ツェーオー
Publication of JPH0518791A publication Critical patent/JPH0518791A/ja
Publication of JPH0756442B2 publication Critical patent/JPH0756442B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/08—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for safeguarding the apparatus, e.g. against abnormal operation, against breakdown

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
JP3291310A 1990-11-07 1991-11-07 容量性距離測定用センサ装置 Expired - Lifetime JPH0756442B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4035403A DE4035403A1 (de) 1990-11-07 1990-11-07 Sensorsystem zur beruehrungslosen abstandsmessung
DE40354032 1990-11-07
DE4035403:2 1991-10-07

Publications (2)

Publication Number Publication Date
JPH0518791A JPH0518791A (ja) 1993-01-26
JPH0756442B2 true JPH0756442B2 (ja) 1995-06-14

Family

ID=6417814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3291310A Expired - Lifetime JPH0756442B2 (ja) 1990-11-07 1991-11-07 容量性距離測定用センサ装置

Country Status (2)

Country Link
JP (1) JPH0756442B2 (enrdf_load_stackoverflow)
DE (1) DE4035403A1 (enrdf_load_stackoverflow)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4109567C3 (de) * 1991-03-22 1997-03-13 Precitec Gmbh Einrichtung zur Bearbeitung eines Werkstücks mit Hilfe eines Laserstrahls
DE10018051B4 (de) * 2000-04-12 2005-03-24 Balluff Gmbh Näherungssensor
JP2002157671A (ja) * 2000-11-16 2002-05-31 Sumitomo Metal Ind Ltd センシングシステム
DE50112193D1 (de) 2001-10-12 2007-04-26 Kistler Holding Ag Sensor
DE10244619A1 (de) * 2002-09-25 2004-04-08 Olympus Biosystems Gmbh Einrichtung und Verfahren zur optischen Objektuntersuchung
EP1793207B1 (en) * 2005-12-02 2008-09-10 Vibro-Meter Sa Eddy current sensor and sensor coil for the same
DE102006017497B4 (de) * 2006-04-13 2008-04-17 Alfing Montagetechnik Gmbh Positionsbestimmungsvorrichtung und Winkelpositionsbestimmungsvorrichtung
DE102007010980B4 (de) 2007-03-05 2023-08-31 Rechner Industrie-Elektronik Gmbh Kapazitiver Sensorkopf in Halbkugelform
DE102007024288B3 (de) * 2007-05-23 2008-10-16 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Anordnung zur Erkennung einer Laserbearbeitungsdüse beim Einsetzen der Laserbearbeitungsdüse in einen Laserbearbeitungskopf
JP5049056B2 (ja) * 2007-06-05 2012-10-17 三菱電機株式会社 状態検出装置およびレーザ加工装置
AT506091B1 (de) * 2008-02-21 2009-06-15 Piezocryst Advanced Sensorics Messanordnung mit zumindest einem piezoelektrischen sensor
DE102008053306A1 (de) * 2008-10-27 2010-05-27 Priamus System Technologies Ag Vorrichtung zum Ermitteln von Messgrössen in einem Spritzgiesswerkzeug
GB201308397D0 (en) 2013-05-10 2013-06-19 Rolls Royce Plc Equipment monitoring system
JP5887375B2 (ja) 2014-03-24 2016-03-16 ファナック株式会社 停電検出時に加工ノズルを退避するレーザ加工装置
DE102016115415B4 (de) 2016-08-19 2018-04-12 Precitec Gmbh & Co. Kg Isolationsteil zur isolierten Halterung einer elektrisch leitenden Düse und Laserbearbeitungskopf mit einem Sensor zur Erkennung eines derartigen Isolationsteils
JPWO2018216275A1 (ja) * 2017-05-24 2020-04-02 パナソニックＩｐマネジメント株式会社 静電容量式ハイトセンサ及びそれを用いたレーザ加工ノズル、レーザ加工装置
AT522127B1 (de) * 2019-01-24 2023-07-15 Piezocryst Advanced Sensorics Kabelanordnung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759312U (enrdf_load_stackoverflow) * 1980-09-25 1982-04-08
JPS57190219A (en) * 1981-05-20 1982-11-22 Nissan Motor Co Ltd Checker for meter device of vehicle
JPH0720618Y2 (ja) * 1987-07-30 1995-05-15 株式会社島津製作所 ブリッジ回路の温度較正回路
DE3812013C2 (de) * 1988-04-11 1995-08-03 Tensometric Mestechnik Stroehm Elektronische Meßeinrichtung
DE3910297A1 (de) * 1989-03-30 1990-10-04 Micro Epsilon Messtechnik Beruehrungslos arbeitendes wegmesssystem

Also Published As

Publication number Publication date
JPH0518791A (ja) 1993-01-26
DE4035403A1 (de) 1992-05-14
DE4035403C2 (enrdf_load_stackoverflow) 1993-06-03

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