JPH0754960Y2 - Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 - Google Patents
Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置Info
- Publication number
- JPH0754960Y2 JPH0754960Y2 JP10875090U JP10875090U JPH0754960Y2 JP H0754960 Y2 JPH0754960 Y2 JP H0754960Y2 JP 10875090 U JP10875090 U JP 10875090U JP 10875090 U JP10875090 U JP 10875090U JP H0754960 Y2 JPH0754960 Y2 JP H0754960Y2
- Authority
- JP
- Japan
- Prior art keywords
- window
- bellows
- light
- sor
- extraction line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000605 extraction Methods 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 9
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 description 17
- 238000002834 transmittance Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 229910052790 beryllium Inorganic materials 0.000 description 7
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 7
- 238000009304 pastoral farming Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 4
- 229910003465 moissanite Inorganic materials 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007479 molecular analysis Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875090U JPH0754960Y2 (ja) | 1990-10-17 | 1990-10-17 | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875090U JPH0754960Y2 (ja) | 1990-10-17 | 1990-10-17 | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0464800U JPH0464800U (enrdf_load_stackoverflow) | 1992-06-03 |
| JPH0754960Y2 true JPH0754960Y2 (ja) | 1995-12-18 |
Family
ID=31855870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10875090U Expired - Lifetime JPH0754960Y2 (ja) | 1990-10-17 | 1990-10-17 | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754960Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-10-17 JP JP10875090U patent/JPH0754960Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0464800U (enrdf_load_stackoverflow) | 1992-06-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01319298A (ja) | 荷電粒子ビームの加速及び輸送装置 | |
| JP2003332098A (ja) | Ｘ線発生装置 | |
| US4969169A (en) | X-ray lithography system | |
| JPH0754960Y2 (ja) | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 | |
| US4980896A (en) | X-ray lithography system | |
| JP3070085B2 (ja) | Ｓｏｒ光装置の光取り出しライン | |
| JPH04282499A (ja) | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 | |
| WO2020189329A1 (ja) | ホルダおよび荷電粒子線装置 | |
| JPS62272534A (ja) | Ｘ線リソグラフイ装置及び半導体装置の製造方法 | |
| JP5127313B2 (ja) | 検査システム | |
| WO2004077024A1 (ja) | 脱離ガスの検出装置および方法 | |
| JPH04282500A (ja) | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 | |
| JPH0836978A (ja) | Ｘ線発生装置 | |
| JPH04359200A (ja) | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 | |
| JP3371444B2 (ja) | Ｘ線発生方法及びｘ線発生装置及びこれを有するｘ線露光装置 | |
| TW202303653A (zh) | X光產生裝置 | |
| JPH04225199A (ja) | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 | |
| JPH04125500A (ja) | Ｓｏｒ光装置におけるｓｏｒ光出射用窓装置 | |
| CN118824820B (zh) | 一种x射线检测设备 | |
| JP2002267759A (ja) | ビームモニタシステム及びビーム照射システム | |
| JP2584490Y2 (ja) | シンクロトロンにおけるｓｏｒ光出射用窓装置 | |
| JPH05297148A (ja) | 粒子加速器のスクリーンモニタ装置 | |
| JPH04194800A (ja) | Ｘ線リソグラフィにおける露光方法 | |
| KR100322296B1 (ko) | 비파괴 검사장치의 방사선 조사위치 표시장치 | |
| US11041795B2 (en) | Reflective laser-based particle detector |