JPH0740065U - Electrolytic compound polishing tool - Google Patents

Electrolytic compound polishing tool

Info

Publication number
JPH0740065U
JPH0740065U JP7414893U JP7414893U JPH0740065U JP H0740065 U JPH0740065 U JP H0740065U JP 7414893 U JP7414893 U JP 7414893U JP 7414893 U JP7414893 U JP 7414893U JP H0740065 U JPH0740065 U JP H0740065U
Authority
JP
Japan
Prior art keywords
grindstone
electrode
electrolytic
polishing
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7414893U
Other languages
Japanese (ja)
Inventor
光興 畑本
泉 滝口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP7414893U priority Critical patent/JPH0740065U/en
Publication of JPH0740065U publication Critical patent/JPH0740065U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】 【目的】 平面度加工の為の成形を主とした加工にも適
用でき、又砥石と電極との距離の変化が少なく、変化し
ても調整が容易な電解複合研磨用工具を提供する。 【構成】 非導電性の円筒状の砥石と、砥石の外部に同
心状に間挿した電極と、砥石の下端面に対向する被加工
物の研磨面と電極下端面との位置を可変に調整すると共
に砥石と電極を締結する結合部材と、砥石と電極に連結
しこれを回転させる回転軸と、被加工物の研磨面と回転
軸に電圧を付与する電源とから成り、また回転軸に締結
した基台と、締結して一体化した砥石と電極とを基台に
対し同期可能に嵌着する嵌着部材と、基台の軸方向に設
けた貫通穴内に設けられ基台に対し電極を付勢するバネ
状体と、回転軸とで構成される回転部材を有し、回転軸
にロータリージョイントを設け軸心に開孔した穴より砥
石の中心部に向け電解液を供給するようにしたことを特
徴とする電解複合研磨用工具とした。
(57) [Summary] [Purpose] For electrolytic composite polishing, which can be applied mainly to forming for flatness processing, and the distance between the grindstone and the electrode does not change much, and adjustment is easy even if it changes. Providing tools. [Structure] Non-conductive cylindrical grindstone, electrodes concentrically inserted outside the grindstone, and the positions of the polishing surface of the workpiece facing the lower end surface of the grindstone and the electrode lower end surface are variably adjusted. In addition, it consists of a coupling member that fastens the grindstone and the electrode, a rotary shaft that connects the grindstone and the electrode to rotate it, a polishing surface of the work piece, and a power supply that applies a voltage to the rotary shaft. The base, the fitting member for synchronously fitting the grindstone and the electrode that are fastened and integrated to the base, and the electrode for the base provided in the through hole provided in the axial direction of the base. It has a rotating member composed of a biasing spring-like body and a rotating shaft, and a rotary joint is provided on the rotating shaft so that the electrolytic solution is supplied from the hole formed in the shaft center toward the center of the grindstone. The electrolytic composite polishing tool is characterized by the following.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

本考案は砥石による機械研磨と電解加工とを複合させた電解複合研磨に関する ものである。 The present invention relates to electrolytic composite polishing that combines mechanical polishing with a grindstone and electrolytic processing.

【0002】[0002]

【従来技術】[Prior art]

複合電解研磨は機械研磨の後、電流による溶出作用で導電体を電解加工するも のであるが、その方法には使用する電解液により導体タイプ(例えば塩化ナトリ ウム)と不導体タイプ(例えば硝酸ナトリウム)とが有り、前者は被加工物の多 量の溶出を図れるが、溶出量を制御するのは困難であり、加工形状精度が悪いと いう欠点を有している。後者は機械研磨後、電解溶出が始まると共にその表面に 不導体膜を作り電流による溶出を押さえてゆく傾向が強いため加工物の加工軌跡 を保持し易く、高い形状精度が得られる。 In complex electropolishing, a conductor is electrolytically processed by elution by an electric current after mechanical polishing.In this method, depending on the electrolytic solution used, a conductor type (for example, sodium chloride) and a nonconductor type (for example, sodium nitrate) are used. ), It is possible to elute a large amount of the workpiece, but it is difficult to control the elution amount and the processed shape accuracy is poor. In the latter case, electrolytic elution starts after mechanical polishing, and a strong tendency to form a non-conductive film on the surface and suppress elution due to electric current makes it easy to maintain the machining locus of the workpiece and obtain high shape accuracy.

【0003】 この為精密加工には不導体タイプの電解液が一般に用いられている。この際、 砥石を電解複合研磨に用いることは電極との関係から、例えば砥石の被加工物の 反対側に電極を設けても、砥石が非導電性の為電流が流れず、この為砥石に多孔 性をもたせてその中に電解液を流して導電性をもたせたもの、例えばナイロン繊 維の不織布に砥粒を付着させたもの、或いは電解液に砥粒を分散させた遊離砥粒 方式では特開61ー219525号のようにウレタンフォームの様なスポンジ状 多孔体を用い、その中に砥粒含有電解液を通すようにしたもの、また特開昭52 ー149697号の電解バフ研磨加工法の様に円柱周に長手方向に短冊状に複数 の砥石を形成し、各砥石間を電極としたものが用いられている。Therefore, a non-conductive type electrolytic solution is generally used for precision machining. At this time, because the grindstone is used for electrolytic composite polishing, because of the relationship with the electrode, for example, even if an electrode is provided on the opposite side of the work piece of the grindstone, the grindstone is non-conductive and no current flows. A porous material that has conductivity by pouring an electrolytic solution into it, for example, a non-woven fabric made of nylon fiber with abrasive grains attached, or a free abrasive method in which abrasive particles are dispersed in the electrolytic solution is used. As in JP 61-219525 A, a sponge-like porous body such as urethane foam is used, and an electrolytic solution containing abrasive grains is passed through the porous body, and the electrolytic buff polishing method of JP-A 52-149697. As described above, a plurality of grindstones are formed in a strip shape in the longitudinal direction on the circumference of the cylinder and electrodes are used between the grindstones.

【0004】[0004]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかしながら、ナイロン繊維の不織布に砥粒を付着させたもの、或いはスポン ジ状多孔体を用い、その中に砥粒含有電解液を通すようにしたものは、いずれも 粘弾性で剛性は非常に弱く、従って被加工物の曲面に添った面粗さ向上の加工は できても、平面度加工の為の成形を主とした加工には不適であり、また円柱周に 長手方向に短冊状に複数の砥石を形成し、各砥石間を電極としたものは、平面研 磨はできるが研磨或いはドレッシングによる砥粒の脱落で、砥石と電極との高低 差が刻刻変化し、これも安定した加工には不適である。 However, the non-woven fabric of nylon fiber with abrasive grains attached, or the sponge-like porous body in which the electrolytic solution containing abrasive grains is passed through, has both viscoelasticity and extremely weak rigidity. Therefore, although it is possible to improve the surface roughness along the curved surface of the work piece, it is unsuitable for processing mainly for forming flatness, and there are multiple strips in the longitudinal direction around the cylinder. If a grindstone is formed with electrodes between the grindstones, it can be surface-polished, but the height difference between the grindstone and the electrode changes in increments due to the removal of abrasive grains due to polishing or dressing. Is not suitable for.

【0005】 本考案は上記の課題に鑑みてなされたものであって、平面度加工の為の成形を 主とした加工にも適用でき、又砥石と電極との距離の変化が少なく、変化しても 調整が容易な電解複合用研磨工具を提供することを目的とする。The present invention has been made in view of the above problems, and can be applied to processing mainly for forming for flatness processing, and the distance between the grindstone and the electrode does not change so much. Even so, it is an object of the present invention to provide an electrolytic composite polishing tool that can be easily adjusted.

【0006】[0006]

【課題を解決するための手段】[Means for Solving the Problems]

前述の目的を解決するために本考案は非導電性の円筒状の砥石と、砥石の外部 に同心状に間挿した電極と、砥石の下端面に対向する被加工物の研磨面と電極下 端面との位置を可変に調整すると共に砥石と電極を締結する結合部材と、砥石と 電極に連結しこれを回転させる回転軸と、被加工物の研磨面と回転軸に電圧を付 与する電源とから成り、また締結して一体化した砥石と電極とを回転軸に対し同 期可能に嵌着する嵌着部材と、軸方向に設けた貫通穴内に設けられ電極を付勢す るバネ状体と、回転本体で構成される回転部材を有し、回転軸にロータリージョ イントを設け軸心に開孔した穴より砥石の中心部に向け電解液を供給するように したことを特徴とする電解複合研磨用工具とした。 In order to solve the above-mentioned object, the present invention provides a non-conductive cylindrical grindstone, an electrode concentrically inserted outside the grindstone, a polishing surface of a workpiece facing the lower end surface of the grindstone, and an electrode lower electrode. A coupling member that variably adjusts the position of the end face and that fastens the grindstone to the electrode, a rotating shaft that connects the grindstone and the electrode and rotates this, and a power supply that applies a voltage to the polishing surface of the workpiece and the rotating shaft. And a fitting member that fits the grindstone and the electrode, which are fastened and integrated, to the rotating shaft at the same time, and a spring-like member that is provided in the through hole provided in the axial direction and urges the electrode. It has a rotating member composed of a body and a rotating body, and a rotary joint is provided on the rotating shaft to supply the electrolytic solution toward the center of the grindstone through a hole opened in the shaft center. A tool for electrolytic composite polishing was used.

【0007】[0007]

【作用】[Action]

砥石を被加工物の研磨面の表面に当て、回転軸と被加工物の研磨面との間に電 圧をかけておく。この状態で、回転軸と共に、電極及び砥石を回転させるととも に、ロータリージョイントから電解液を供給する。 A grindstone is applied to the polished surface of the work piece, and an electric voltage is applied between the rotary shaft and the polished surface of the work piece. In this state, the electrode and the grindstone are rotated together with the rotating shaft, and the electrolytic solution is supplied from the rotary joint.

【0008】 回転される砥石により、研磨面は機械研磨され、その後電解加工が行われ、機 械研磨で得られた加工軌跡を保持しながら、研磨面の高い精度と高加工効率を得 る。A polishing surface is mechanically polished by a rotating grindstone, and then electrolytic processing is performed to obtain high accuracy and high processing efficiency of the polishing surface while maintaining the processing locus obtained by mechanical polishing.

【0009】[0009]

【実施例】【Example】

以下、本考案の実施例を図面に基づいて説明する。 図1に断面図で示す第一実施例の電解複合用工具10は、下面に複数の液排出溝 30を有する円筒状の一体物の砥石1を有し、この砥石1は下面にて図中下側の 被加工物5と接し、上面にて砥石1全体を覆うカップ状の電極2と平行な隙間3 1を有し、側面にて電極2と接している。 砥石1及び電極2はその中心を同一とし、砥石1の中心部を貫通する連通穴9は 電極2の隙間31に続いている。 Embodiments of the present invention will be described below with reference to the drawings. The electrolytic composite tool 10 of the first embodiment shown in the cross-sectional view in FIG. 1 has a cylindrical integral grindstone 1 having a plurality of liquid discharge grooves 30 on the lower surface, and this grindstone 1 is on the lower surface in the drawing. It has a gap 31 that is in contact with the work piece 5 on the lower side, is parallel to the cup-shaped electrode 2 that covers the entire grindstone 1 on the upper surface, and is in contact with the electrode 2 on the side surface. The grindstone 1 and the electrode 2 have the same center, and the communication hole 9 penetrating the central portion of the grindstone 1 continues to the gap 31 of the electrode 2.

【0010】 隙間31は電極2の上面に結合し、電極2及び砥石1を回転させる為の軸4の 内部に穿設された連通穴6と通じ、この連通穴6は電解液を外部から供給するた めのロータリージョイント7に通じている。 なお電極2には、軸4を通して別置の可変電圧電源8よりマイナス電圧が加えら れ、プラス電圧極が加えられる被加工物5との間で電解が形成されるようになっ ている。The gap 31 is connected to the upper surface of the electrode 2 and communicates with a communication hole 6 formed inside the shaft 4 for rotating the electrode 2 and the grindstone 1. The communication hole 6 supplies the electrolytic solution from the outside. It is connected to the rotary joint 7 for working. A negative voltage is applied to the electrode 2 from a separately arranged variable voltage power source 8 through the shaft 4, and an electrolysis is formed between the electrode 2 and the workpiece 5 to which a positive voltage electrode is applied.

【0011】 このように構成された本実施例においては、被加工物5と電極2との隙間が図 にしめすtとなるように調整し、砥石1と電極2を固定する止めネジ3を締結す ると、以下に述べる電解複合研磨が可能となる。 砥石1を被加工物5の表面に当て、軸4と被加工物5との間に電圧をかけておく 。この状態で、軸4と共に、電極2及び砥石1を回転させるとともに、ロータリ ージョイント7、連通穴6から不導体タイプの電解液(硝酸ナトリウム)を供給 する。In this embodiment having such a configuration, the clearance between the work piece 5 and the electrode 2 is adjusted to be t as shown in the figure, and the set screw 3 for fixing the grindstone 1 and the electrode 2 is fastened. Then, the electrolytic composite polishing described below becomes possible. The grindstone 1 is applied to the surface of the workpiece 5, and a voltage is applied between the shaft 4 and the workpiece 5. In this state, the electrode 2 and the grindstone 1 are rotated together with the shaft 4, and the non-conductive type electrolytic solution (sodium nitrate) is supplied from the rotary joint 7 and the communication hole 6.

【0012】 回転される砥石1により、被加工物5は機械研磨され、その表面の不導体膜が 除去され電解により電解液中に電解溶出が始まるが、時間と共に不導体膜が出来 、電解流出が押さえられる。この為機械研磨で得られた加工軌跡を保持しながら 、被加工物の高い形状精度と高加工効率を得ることができる。尚電解液は、放射 状に設けた複数の通路30を経て排出されるが、この場合隙間tを満たすにほぼ 十分な液流量が必要であり、被加工物5と電極2との隙間tで電解溶出が行われ る。The workpiece 5 is mechanically polished by the rotating grindstone 1, the non-conductive film on the surface thereof is removed, and electrolysis begins to elute into the electrolytic solution by electrolysis, but a non-conductive film is formed with time, and electrolytic outflow occurs. Is suppressed. Therefore, it is possible to obtain high shape accuracy and high processing efficiency of the work piece while maintaining the processing locus obtained by mechanical polishing. The electrolytic solution is discharged through a plurality of radially arranged passages 30. In this case, a sufficient liquid flow rate is required to fill the gap t, and the gap t between the workpiece 5 and the electrode 2 is required. Electrolytic elution is performed.

【0013】 図2は本考案の電解複合用工具22の第二実施例を示し、電解複合用工具22 は第一実施例と異なり、下面に通路30を有しない円筒状の砥石11を有し、こ の砥石11は下面にて図中下側の被加工物15と接し、側面にて電極12と接し ている。 電極12にはその下部にフランジ部21が設けてあり、このフランジ部21には ピン17がきつく嵌合し、ピン17は砥石11及び電極12の上面を覆うカップ 状の回転本体としての基台16の下端部に設けた穴と緩く嵌合している為、基台 16の上面に結合している軸14を回転することにより、電極12、砥石11及 び基台16が同時に回転することが可能である。FIG. 2 shows a second embodiment of the electrolytic composite tool 22 of the present invention. Unlike the first embodiment, the electrolytic composite tool 22 has a cylindrical grindstone 11 having no passage 30 on its lower surface. The grindstone 11 is in contact with the work piece 15 on the lower side in the drawing on the lower surface and is in contact with the electrode 12 on the side surface. A flange portion 21 is provided on the lower portion of the electrode 12, and a pin 17 is tightly fitted to the flange portion 21. The pin 17 covers the upper surface of the grindstone 11 and the electrode 12 and is a base as a cup-shaped rotating body. Since it loosely fits into the hole provided at the lower end of 16, the electrode 12, grindstone 11, and base 16 rotate simultaneously by rotating the shaft 14 coupled to the upper surface of the base 16. Is possible.

【0014】 また基台16の上端部からは基台16を貫通する複数のタップ穴23が開孔し ており、タップ穴23にはプランジャ18が螺じ込まれ、プランジャ18内のバ ネで電極12のフランジ部21を付勢するようになっている。この為軸14が被 加工物15の面と必ずしも垂直でなくともプランジャ18のストロークで被加工 物の面にならって加工することができる。A plurality of tap holes 23 that penetrate the base 16 are opened from the upper end of the base 16, and the plunger 18 is screwed into the tap holes 23. The flange portion 21 of the electrode 12 is biased. Therefore, even if the shaft 14 is not necessarily perpendicular to the surface of the work piece 15, the stroke of the plunger 18 allows the work piece to be machined following the surface of the work piece.

【0015】 このプランジャ18はその内蔵バネにより、砥石11が被加工物15と接触す る時の緩衝用としても有効である。 又基台16の上端を貫通し、その下部に位置する電極12にねじ込まれた複数の ネジ19は基台16とは隙間をもって結合し、基台16から電極12が外れない ようになっている。The built-in spring of the plunger 18 is also effective as a buffer when the grindstone 11 comes into contact with the workpiece 15. Further, a plurality of screws 19 penetrating the upper end of the base 16 and screwed into the electrode 12 located therebelow are coupled to the base 16 with a gap so that the electrode 12 does not come off from the base 16. .

【0016】 基台16の上端に設けたネジ20は電源24より供給された電流を軸14を介 して基台16からネジ19を介して電極12に伝える為のものである。 尚図2の構成においても、供給電解液は電極外部から供給しても良いし、又図1 のようにロータリージョイントから、砥石11の連通穴29に流しても良いが、 後者の場合、砥石11の被加工物の研磨面側は図1のような通路が必要である。The screw 20 provided on the upper end of the base 16 is for transmitting the current supplied from the power source 24 from the base 16 to the electrode 12 via the screw 19 via the shaft 14. Also in the configuration of FIG. 2, the electrolytic solution may be supplied from the outside of the electrode, or may be supplied from the rotary joint to the communication hole 29 of the grindstone 11 as shown in FIG. 1, but in the latter case, the grindstone is used. A passage as shown in FIG. 1 is required on the polished surface side of the work piece 11 to be processed.

【0017】 このように構成された第二実施例においては、被加工物15と電極12との隙 間が図にしめすtとなるように調整し、砥石1と電極2を固定する止めネジ13 を締結すると、以下に述べる電解複合研磨が可能となる。 砥石11を被加工物15の表面に当て、軸14と被加工物15との間に電圧をか けておく。In the second embodiment configured as described above, the set screw 13 for fixing the grindstone 1 and the electrode 2 is adjusted by adjusting the gap between the workpiece 15 and the electrode 12 to be t as shown in the figure. By fastening, the electrolytic composite polishing described below becomes possible. The grindstone 11 is applied to the surface of the workpiece 15, and a voltage is applied between the shaft 14 and the workpiece 15.

【0018】 この状態で軸14と共に、基台16、電極12及び砥石11を回転させるとと もに、電解用複合用工具22の外部から被加工物15と電極12との隙間に不導 体タイプの電解液(硝酸ナトリウム)を供給する。 回転される砥石11により、被加工物15は機械研磨され、その表面の不導体膜 が除去され電解により電解液中に電解溶出が始まるが、時間と共に不導体膜が出 来、電解流出が押さえられる。この為機械研磨で得られた加工軌跡を保持しなが ら、被加工物の高い形状精度と高加工効率を得ることができる。 電解加工を終えた電解液は、図示せぬ通路を経て外部へ排出される。In this state, the base 16, the electrode 12 and the grindstone 11 are rotated together with the shaft 14, and at the same time, the non-conductor is placed in the gap between the workpiece 15 and the electrode 12 from the outside of the electrolysis compound tool 22. Supply type electrolyte (sodium nitrate). The workpiece 15 is mechanically polished by the rotating grindstone 11, the non-conductive film on the surface is removed, and electrolysis starts electrolytic elution into the electrolytic solution, but with time, the non-conductive film comes out and electrolytic outflow is suppressed. To be For this reason, it is possible to obtain high shape accuracy and high processing efficiency of the workpiece while maintaining the processing locus obtained by mechanical polishing. The electrolytic solution that has undergone electrolytic processing is discharged to the outside through a passage (not shown).

【0019】 なお本実施例ではタップ穴23にはプランジャ18内のバネで電極12のフラ ンジ部21を付勢するようになっている為、軸14が被加工物15の面と必ずし も垂直でなくともプランジャ18のストロークで被加工物の面にならって加工す ることができ、またプランジャ18内のバネは、砥石11が被加工物15と接触 する時の緩衝用としても有効である。In this embodiment, since the spring in the plunger 18 urges the flange portion 21 of the electrode 12 into the tap hole 23, the shaft 14 is always in contact with the surface of the workpiece 15. Even if it is not vertical, it can be processed by the stroke of the plunger 18 following the surface of the work piece, and the spring in the plunger 18 is also effective as a buffer when the grindstone 11 contacts the work piece 15. is there.

【0020】 第一及び第二実施例では砥石と電極とを分離したので構成しやすくなったと共 に、電流により溶出作用が重畳できる為、例えばクロムの研磨では砥石だけの時 には3〜4キログラム力位の押付力が必要であったものが、砥石では1キログラ ム力,電流1A程度で同様の加工効果があり、更にクロムのような堅くてもろい ものでは荷重が低減した分だけ、エッジ部のような欠け易い部分の欠けが減少す るという効果まである。In the first and second embodiments, since the grindstone and the electrode are separated from each other, it is easy to configure, and since the elution action can be superposed by the electric current, for example, in the case of polishing chromium, when only the grindstone is used, 3 to 4 is used. Although a pressing force of the kilogram force level was required, the grindstone had the same processing effect with a 1 kilogram force and a current of 1A, and a hard and brittle object such as chrome has a reduced load, resulting in an edge effect. There is even the effect of reducing the number of chips that are easily broken, such as parts.

【0021】[0021]

【考案の効果】[Effect of device]

本考案は、砥石と電極とを分離したことにより、機械研磨と電解加工を別々に 行うことができ、平面度加工の為の成形を主とした加工にも適用でき、更に砥石 を一体物にしたことにより、砥石が微少研磨材に分割されず、砥粒の脱落が極め て少なくなり、砥石と電極との距離の変化を伴わない電解複合用研磨工具を提供 することができた。 The present invention can separate mechanical grinding and electrolytic processing by separating the grindstone and the electrode, and can be applied to machining mainly for flatness machining, and the grindstone can be integrated into one piece. As a result, the grindstone was not divided into minute abrasives, and the falling of the abrasive grains was extremely small, and it was possible to provide a polishing tool for electrolytic compounding that did not change the distance between the grindstone and the electrode.

【提出日】平成6年12月16日[Submission date] December 16, 1994

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0002[Name of item to be corrected] 0002

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0002】[0002]

【従来技術】[Prior art]

複合電解研磨は機械研磨の後、電流による溶出作用で導電体を電解加工するも のであるが、その方法には使用する電解液により働態タイプ(例えば塩化ナトリ ウム)と不働態タイプ(例えば硝酸ナトリウム)とが有り、前者は被加工物の多 量の溶出を図れるが、溶出量を制御するのは困難であり、加工形状精度が悪いと いう欠点を有している。後者は機械研磨後、電解溶出が始まると共にその表面に 不働態膜を作り電流による溶出を押さえてゆく傾向が強いため加工物の加工軌跡 を保持し易く、高い形状精度が得られる。In complex electropolishing, a conductor is electrolytically machined by an elution action by an electric current after mechanical polishing.In this method, depending on the electrolytic solution used, a passive type (eg sodium chloride) and a passive type (eg sodium nitrate) are used. ), It is possible to elute a large amount of the workpiece, but it is difficult to control the elution amount and the processed shape accuracy is poor. In the latter case, electrolytic elution begins after mechanical polishing, and a passive film is formed on the surface of the latter, which tends to suppress elution due to electric current, so that the machining locus of the workpiece can be easily maintained and high shape accuracy can be obtained.

【手続補正3】[Procedure 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0003[Name of item to be corrected] 0003

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0003】 この為精密加工には不働態タイプの電解液が一般に用いられている。この際、 砥石を電解複合研磨に用いることは電極との関係から、例えば砥石の被加工物の 反対側に電極を設けても、砥石が非導電性の為電流が流れず、この為砥石に多孔 性をもたせてその中に電解液を流して導電性をもたせたもの、例えばナイロン繊 維の不織布に砥粒を付着させたもの、或いは電解液に砥粒を分散させた遊離砥粒 方式では特開61ー219525号のようにウレタンフォームの様なスポンジ状 多孔体を用い、その中に砥粒含有電解液を通すようにしたもの、また特開昭52 ー149697号の電解バフ研磨加工法の様に円柱周に長手方向に短冊状に複数 の砥石を形成し、各砥石間を電極としたものが用いられている。For this reason, a passive type electrolytic solution is generally used for precision machining. At this time, because the grindstone is used for electrolytic composite polishing, because of the relationship with the electrode, for example, even if an electrode is provided on the opposite side of the work piece of the grindstone, the grindstone is non-conductive and no current flows. A porous material that has conductivity by pouring an electrolytic solution into it, for example, a non-woven fabric made of nylon fiber with abrasive grains attached, or a free abrasive method in which abrasive particles are dispersed in the electrolytic solution is used. As in JP 61-219525 A, a sponge-like porous body such as urethane foam is used, and an electrolytic solution containing abrasive grains is passed through the porous body, and the electrolytic buff polishing method of JP-A 52-149697. As described above, a plurality of grindstones are formed in a strip shape in the longitudinal direction on the circumference of the cylinder and electrodes are used between the grindstones.

【手続補正4】[Procedure amendment 4]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0006[Correction target item name] 0006

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0006】[0006]

【課題を解決するための手段】[Means for Solving the Problems]

前述の目的を解決するために本考案は非導電性の円筒状の砥石と、砥石の外部 に同心状に間挿した電極と、砥石の下端面に対向する被加工物の研磨面と電極下 端面との位置を可変に調整すると共に砥石と電極を締結する結合部材と、砥石と 電極に連結しこれを回転させる回転軸と、被加工物の研磨面と回転軸に電圧を付 与する電源とから成り、また回転軸に締結した基台と、締結して一体化した砥石 と電極とを基台に対し同期可能に嵌着する嵌着部材と、基台の軸方向に設けた貫 通穴内に設けられ基台に対し電極を付勢するバネ状体と、回転軸とで構成される 回転部材を有し、回転軸にロータリージョイントを設け軸心に開孔した穴より砥 石の中心部に向け電解液を供給するようにしたことを特徴とする電解複合研磨用 工具とした。In order to solve the above-mentioned object, the present invention provides a non-conductive cylindrical grindstone, an electrode concentrically inserted outside the grindstone, a polishing surface of a workpiece facing the lower end surface of the grindstone, and an electrode lower electrode. A coupling member that variably adjusts the position of the end face and that fastens the grindstone to the electrode, a rotating shaft that connects the grindstone and the electrode and rotates this, and a power supply that applies a voltage to the polishing surface of the workpiece and the rotating shaft. consists of a and a base that is fastened to the rotary shaft, and a fitting member relative to the base and the grinding wheel and the electrode integrally fastened to be capable of fitting synchronization, penetrations provided in the axial direction of the base It has a rotating member that is composed of a rotating shaft and a spring-like body that is installed in the hole and biases the electrode against the base , and the rotary joint is provided on the rotating shaft. The electrolytic composite polishing tool is characterized in that the electrolytic solution is supplied to the portion.

【手続補正5】[Procedure Amendment 5]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0009[Correction target item name] 0009

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0009】[0009]

【実施例】【Example】

以下、本考案の実施例を図面に基づいて説明する。 図1に断面図で示す第一実施例の電解複合研磨用工具10は、下面に複数の液排 出溝30を有する円筒状の一体物の砥石1を有し、この砥石1は下面にて図中下 側の被加工物5と接し、上面にて砥石1全体を覆うカップ状の電極2と平行な隙 間31を有し、側面にて電極2と接している。 砥石1及び電極2はその中心を同一とし、砥石1の中心部を貫通する連通穴9は 電極2の隙間31に続いている。Embodiments of the present invention will be described below with reference to the drawings. The electrolytic composite polishing tool 10 of the first embodiment shown in the cross-sectional view in FIG. 1 has a cylindrical monolithic grindstone 1 having a plurality of liquid discharge grooves 30 on its lower surface. It has a gap 31 parallel to the cup-shaped electrode 2 that covers the entire grindstone 1 on the upper surface in contact with the workpiece 5 on the lower side in the figure, and contacts the electrode 2 on the side surface. The grindstone 1 and the electrode 2 have the same center, and the communication hole 9 penetrating the central portion of the grindstone 1 continues to the gap 31 of the electrode 2.

【手続補正6】[Procedure correction 6]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0011[Correction target item name] 0011

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0011】 このように構成された本実施例においては、被加工物5と電極2との隙間が図 にしめすtとなるように調整し、砥石1と電極2を固定する止めネジ3を締結す ると、以下に述べる電解複合研磨が可能となる。 砥石1を被加工物5の表面に当て、軸4と被加工物5との間に電圧をかけておく 。この状態で、軸4と共に、電極2及び砥石1を回転させるとともに、ロータリ ージョイント7、連通穴6から不働態タイプの電解液(硝酸ナトリウム)を供給 する。In this embodiment having the above-described structure, the gap between the workpiece 5 and the electrode 2 is adjusted to be t as shown in the figure, and the set screw 3 for fixing the grindstone 1 and the electrode 2 is fastened. Then, the electrolytic composite polishing described below becomes possible. The grindstone 1 is applied to the surface of the workpiece 5, and a voltage is applied between the shaft 4 and the workpiece 5. In this state, the electrode 2 and the grindstone 1 are rotated together with the shaft 4, and a passive type electrolytic solution (sodium nitrate) is supplied from the rotary joint 7 and the communication hole 6.

【手続補正7】[Procedure Amendment 7]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0012[Correction target item name] 0012

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0012】 回転される砥石1により、被加工物5は機械研磨され、その表面の不働態膜が 除去され電解により電解液中に電解溶出が始まるが、時間と共に不働態膜が出来 、電解流出が押さえられる。この為機械研磨で得られた加工軌跡を保持しながら 、被加工物の高い形状精度と高加工効率を得ることができる。尚電解液は、放射 状に設けた複数の通路30を経て排出されるが、この場合隙間tを満たすにほぼ 十分な液流量が必要であり、被加工物5と電極2との隙間tで電解溶出が行われ る。[0012] The grinding wheel 1 is rotated, the workpiece 5 is mechanically polished, but the passive film on the surface is removed electrolytic dissolution begins in the electrolyte solution by electrolysis, passivation film can over time, electrolyte outflow Is suppressed. Therefore, it is possible to obtain high shape accuracy and high processing efficiency of the work piece while maintaining the processing locus obtained by mechanical polishing. The electrolytic solution is discharged through a plurality of radially arranged passages 30. In this case, a sufficient liquid flow rate is required to fill the gap t, and the gap t between the workpiece 5 and the electrode 2 is required. Electrolytic elution is performed.

【手続補正8】[Procedure Amendment 8]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0013[Correction target item name] 0013

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0013】 図2は本考案の電解複合研磨用工具22の第二実施例を示し、電解複合研磨用 工具22は第一実施例と異なり、下面に通路30を有しない円筒状の砥石11を 有し、この砥石11は下面にて図中下側の被加工物15と接し、側面にて電極1 2と接している。 電極12にはその下部にフランジ部21が設けてあり、このフランジ部21には ピン17がきつく嵌合し、ピン17は砥石11及び電極12の上面を覆うカップ 状の回転本体としての基台16の下端部に設けた穴と緩く嵌合している為、基台 16の上面に結合している軸14を回転することにより、電極12、砥石11及 び基台16が同時に回転することが可能である。[0013] Figure 2 shows a second embodiment of a composite electrolytic polishing tool 22 of the present invention, electrolytic composite polishing tool 22 is different from the first embodiment, the cylindrical grinding wheel 11 having no passage 30 to the lower surface This grindstone 11 has a lower surface in contact with the workpiece 15 on the lower side in the drawing and a side surface in contact with the electrode 12. A flange portion 21 is provided on the lower portion of the electrode 12, and a pin 17 is tightly fitted to the flange portion 21. The pin 17 covers the upper surface of the grindstone 11 and the electrode 12 and is a base as a cup-shaped rotating body. Since it loosely fits into the hole provided at the lower end of 16, the electrode 12, grindstone 11, and base 16 rotate simultaneously by rotating the shaft 14 coupled to the upper surface of the base 16. Is possible.

【手続補正9】[Procedure Amendment 9]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0018[Correction target item name] 0018

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0018】 この状態で軸14と共に、基台16、電極12及び砥石11を回転させるとと もに、電解用複合研磨用工具22の外部から被加工物15と電極12との隙間に 不働態タイプの電解液(硝酸ナトリウム)を供給する。 回転される砥石11により、被加工物15は機械研磨され、その表面の不働態膜 が除去され電解により電解液中に電解溶出が始まるが、時間と共に不働態膜が出 来、電解流出が押さえられる。この為機械研磨で得られた加工軌跡を保持しなが ら、被加工物の高い形状精度と高加工効率を得ることができる。 電解加工を終えた電解液は、図示せぬ通路を経て外部へ排出される。In this state, the base 16, the electrode 12 and the grindstone 11 are rotated together with the shaft 14, and at the same time, the passive state is maintained in the gap between the workpiece 15 and the electrode 12 from the outside of the electrolytic polishing tool 22. Supply type electrolyte (sodium nitrate). The grinding wheel 11 is rotated, the workpiece 15 is mechanically polished, but electrolytic dissolution in the electrolyte solution by the passivation film is removed electrolysis of the surface begins, passivation film come out with time, pressing the electrolyte outflow To be For this reason, it is possible to obtain high shape accuracy and high processing efficiency of the workpiece while maintaining the processing locus obtained by mechanical polishing. The electrolytic solution that has undergone electrolytic processing is discharged to the outside through a passage (not shown).

【手続補正10】[Procedure Amendment 10]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0021[Correction target item name] 0021

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0021】[0021]

【考案の効果】[Effect of device]

本考案は、砥石と電極とを分離したことにより、機械研磨と電解加工を別々に 行うことができ、平面度加工の為の成形を主とした加工にも適用でき、更に砥石 を一体物にしたことにより、砥石が微少研磨材に分割されず、砥粒の脱落が極め て少なくなり、砥石と電極との距離の変化を伴わない電解複合研磨用研磨工具を 提供することができた。The present invention can separate mechanical grinding and electrolytic processing by separating the grindstone and the electrode, and can be applied to machining mainly for flatness machining, and the grindstone can be integrated into one piece. As a result, the grindstone was not divided into minute abrasives, and the falling of the abrasive grains was extremely reduced, and it was possible to provide a polishing tool for electrolytic composite polishing that did not change the distance between the grindstone and the electrode.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の第一実施例を示す図。FIG. 1 is a diagram showing a first embodiment of the present invention.

【図2】本考案の第二実施例を示す図。FIG. 2 is a diagram showing a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 砥石 2 電極 4 軸 5 被加工物 7 ロータリージョイント 8 可変電圧電源 10 電解複合用工具 11 砥石 12 電極 15 被加工物 16 基台 17 ピン 18 プランジャ 1 Grindstone 2 Electrode 4 Axis 5 Workpiece 7 Rotary Joint 8 Variable Voltage Power Supply 10 Electrolytic Compound Tool 11 Grindstone 12 Electrode 15 Workpiece 16 Base 17 Pin 18 Plunger

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成6年12月16日[Submission date] December 16, 1994

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】実用新案登録請求の範囲[Name of item to be amended] Scope of utility model registration request

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【実用新案登録請求の範囲】[Scope of utility model registration request]

【手続補正11】[Procedure Amendment 11]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief description of the drawing

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の第一実施例を示す図。FIG. 1 is a diagram showing a first embodiment of the present invention.

【図2】本考案の第二実施例を示す図。FIG. 2 is a diagram showing a second embodiment of the present invention.

【符号の説明】 1 砥石 2 電極 4 軸 5 被加工物 7 ロータリージョイント 8 可変電圧電源 10 電解複合研磨用工具 11 砥石 12 電極 15 被加工物 16 基台 17 ピン 18 プランジャ[Explanation of symbols] 1 grindstone 2 electrode 4 axis 5 work piece 7 rotary joint 8 variable voltage power supply 10 electrolytic composite polishing tool 11 grindstone 12 electrode 15 work piece 16 base 17 pin 18 plunger

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 非導電性の円筒状の砥石と、砥石の外部
に同心状に間挿した電極と、砥石の下端面に対向する被
加工物の研磨面と電極下端面との位置を可変に調整する
と共に砥石と電極を締結する結合部材と、砥石と電極に
連結しこれを回転させる回転軸と、被加工物の研磨面と
回転軸に電圧を付与する電源とから成る電解複合研磨用
工具。
1. A non-conductive cylindrical grindstone, an electrode concentrically provided outside the grindstone, and a position of a polishing surface of a workpiece facing the lower end surface of the grindstone and an electrode lower end surface are variable. For electro-composite polishing, which consists of a coupling member that adjusts the whetstone and the electrode and fastens the electrode, a rotating shaft that connects the whetstone and the electrode and rotates this, a polishing surface of the workpiece and a power supply that applies a voltage to the rotating shaft. tool.
【請求項2】 請求範囲第1項において、締結して一体
化した砥石と電極とを回転軸に対し同期可能に嵌着する
嵌着部材と、軸方向に設けた貫通穴内に設けられ電極を
付勢するバネ状体と、回転本体で構成される回転部材を
有する電解複合研磨用工具。
2. A fitting member for fitting a whetstone and an electrode, which are fastened and integrated together, to a rotating shaft in a synchronous manner, and an electrode provided in a through hole provided in an axial direction according to claim 1. An electrolytic composite polishing tool having a rotating member configured by a spring body for urging and a rotating body.
【請求項3】 請求範囲第1項及び第2項に用いられる
回転軸にロータリージョイントを設け軸心に開孔した穴
より砥石の中心部に向け電解液を供給するようにしたこ
とを特徴とする電解複合研磨用工具。
3. A rotary joint used in claims 1 and 2 is provided with a rotary joint so that an electrolytic solution is supplied toward a central portion of a grindstone through a hole formed in the shaft center. A tool for electrolytic composite polishing.
JP7414893U 1993-12-27 1993-12-27 Electrolytic compound polishing tool Pending JPH0740065U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7414893U JPH0740065U (en) 1993-12-27 1993-12-27 Electrolytic compound polishing tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7414893U JPH0740065U (en) 1993-12-27 1993-12-27 Electrolytic compound polishing tool

Publications (1)

Publication Number Publication Date
JPH0740065U true JPH0740065U (en) 1995-07-18

Family

ID=13538794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7414893U Pending JPH0740065U (en) 1993-12-27 1993-12-27 Electrolytic compound polishing tool

Country Status (1)

Country Link
JP (1) JPH0740065U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009269109A (en) * 2008-05-02 2009-11-19 Nikon Corp Polishing device
JP4644954B2 (en) * 2000-03-09 2011-03-09 ソニー株式会社 Polishing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4644954B2 (en) * 2000-03-09 2011-03-09 ソニー株式会社 Polishing equipment
JP2009269109A (en) * 2008-05-02 2009-11-19 Nikon Corp Polishing device

Similar Documents

Publication Publication Date Title
EP1072357B1 (en) Elid centerless grinding apparatus
US5071525A (en) Method of grinding lenses and apparatus therefor
EP1877216B1 (en) Method of electrolytically microfinishing a metallic workpiece
JP4104199B2 (en) Molded mirror grinding machine
US6447376B1 (en) Plasma discharge truing apparatus and fine-machining methods using the apparatus
JPH0740065U (en) Electrolytic compound polishing tool
KR20010113488A (en) Apparatus and method for elid grinding a large-diameter workpiece to produce a mirror surface finish
US6074288A (en) Modified carrier films to produce more uniformly polished substrate surfaces
JP3295896B2 (en) Electrolytic dressing method using adjustable total grinding wheel
JPH08197425A (en) Grinding method and grinding device
JPH03251353A (en) Grinding for cylindrical workpiece
JP2000246613A (en) Spherical lens grinding device
KR20010089212A (en) Removable electrode
JPH0655347A (en) Electrochemical composite machine
JPH0133287B2 (en)
JPH01121172A (en) Grinding attachment equipped with electric discharge forming area for blade edge
KR940006010Y1 (en) Grinding device
JPS5835410Y2 (en) Honing Kakoyou Toishi
JPS5822626A (en) Method of compound super finishing of electrolysis and grinding
JPH06720A (en) Electrolytic composite polishing method for outer surface of cylinder work
JPS63109979A (en) Polishing machine
KR930005036Y1 (en) Method of grinding lens and apparatus therefor
JPH06328358A (en) Grinding method and its device
JPS61111886A (en) Electro grinding stone
JPS6242735B2 (en)