JPH0733364Y2 - ウエハー保持機構 - Google Patents

ウエハー保持機構

Info

Publication number
JPH0733364Y2
JPH0733364Y2 JP1989030764U JP3076489U JPH0733364Y2 JP H0733364 Y2 JPH0733364 Y2 JP H0733364Y2 JP 1989030764 U JP1989030764 U JP 1989030764U JP 3076489 U JP3076489 U JP 3076489U JP H0733364 Y2 JPH0733364 Y2 JP H0733364Y2
Authority
JP
Japan
Prior art keywords
wafer
holding mechanism
split ring
spring
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989030764U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02120746U (enrdf_load_stackoverflow
Inventor
智司 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1989030764U priority Critical patent/JPH0733364Y2/ja
Publication of JPH02120746U publication Critical patent/JPH02120746U/ja
Application granted granted Critical
Publication of JPH0733364Y2 publication Critical patent/JPH0733364Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989030764U 1989-03-17 1989-03-17 ウエハー保持機構 Expired - Lifetime JPH0733364Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989030764U JPH0733364Y2 (ja) 1989-03-17 1989-03-17 ウエハー保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989030764U JPH0733364Y2 (ja) 1989-03-17 1989-03-17 ウエハー保持機構

Publications (2)

Publication Number Publication Date
JPH02120746U JPH02120746U (enrdf_load_stackoverflow) 1990-09-28
JPH0733364Y2 true JPH0733364Y2 (ja) 1995-07-31

Family

ID=31256117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989030764U Expired - Lifetime JPH0733364Y2 (ja) 1989-03-17 1989-03-17 ウエハー保持機構

Country Status (1)

Country Link
JP (1) JPH0733364Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118747U (ja) * 1982-02-08 1983-08-13 日本電気株式会社 基板支持具
JPS63191634U (enrdf_load_stackoverflow) * 1987-05-29 1988-12-09

Also Published As

Publication number Publication date
JPH02120746U (enrdf_load_stackoverflow) 1990-09-28

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Legal Events

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