JPH07246706A - Ink jet head - Google Patents

Ink jet head

Info

Publication number
JPH07246706A
JPH07246706A JP4007494A JP4007494A JPH07246706A JP H07246706 A JPH07246706 A JP H07246706A JP 4007494 A JP4007494 A JP 4007494A JP 4007494 A JP4007494 A JP 4007494A JP H07246706 A JPH07246706 A JP H07246706A
Authority
JP
Japan
Prior art keywords
diaphragm
ink
substrate
electrode
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4007494A
Other languages
Japanese (ja)
Inventor
Masahiro Fujii
Shuji Koeda
Hiroyuki Maruyama
Keiichi Mukoyama
Tadaaki Ukata
博幸 丸山
恵一 向山
周史 小枝
忠明 羽片
正寛 藤井
Original Assignee
Seiko Epson Corp
セイコーエプソン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, セイコーエプソン株式会社 filed Critical Seiko Epson Corp
Priority to JP4007494A priority Critical patent/JPH07246706A/en
Publication of JPH07246706A publication Critical patent/JPH07246706A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14314Structure of ink jet print heads with electrostatically actuated membrane

Abstract

(57) [Abstract] [Purpose] To provide an inkjet head in which a thin diaphragm is provided with sufficient rigidity. [Structure] Nozzle 4 and ink flow path 1 communicating with the nozzle
1, the diaphragm 5 formed in a part of the flow path, and the electrode 21 formed so as to face the diaphragm.
In the ink jet head that applies an electric pulse between the diaphragm 5 and the diaphragm 5, the diaphragm 5 is deformed by an electrostatic force, and ink droplets are ejected from the nozzles 4, a column 35 that partially restricts the deformation of the diaphragm 5 is provided. .

Description

Detailed Description of the Invention

[0001]

The present invention relates to an ink jet head,
In particular, it relates to rigidity reinforcement of the diaphragm.

[0002]

2. Description of the Related Art As an inkjet head, an actuator that uses electrostatic attraction is used for an actuator. For example, Japanese Patent Laid-Open No. 2-289351 discloses such an inkjet head. This inkjet head has a nozzle, an ink flow path communicating with the nozzle, a vibration plate formed in a part of the flow path, and an electrode formed so as to face the vibration plate. An electric pulse in the forward direction is applied between the electrodes to deform the vibrating plate by an electrostatic force, and ink droplets are ejected from the nozzles.

[0003]

By the way, when the diaphragm is thin, the rigidity is insufficient and sufficient ejection force for ejecting ink cannot be obtained. Therefore, it is possible to make the diaphragm thick, but it is difficult to form a thick diaphragm,
There are problems in that the thickness varies and the printing quality and reliability are not good. In particular, when the degree of integration of nozzles is increased to increase the resolution of printing, it is necessary to make the diaphragm thin, and this problem becomes remarkable.

The present invention has been made to solve the above problems, and an object of the present invention is to provide an ink jet head having a thin diaphragm provided with sufficient rigidity.

[0005]

An ink jet head according to the present invention is formed with a nozzle, an ink flow path communicating with the nozzle, a vibration plate formed in a part of the flow path, and a diaphragm facing the vibration plate. In an inkjet head that has an electrode and that applies an electric pulse between the diaphragm and the electrode to deform the diaphragm by electrostatic force and ejects ink droplets from the nozzle, a column that partially restricts the deformation of the diaphragm. Is provided. The support column supports a portion other than the outer periphery of the diaphragm, and is formed on, for example, an electrode glass substrate or a flow path substrate.

[0006]

According to the present invention, the electrode is provided with a column for restricting the deformation of the diaphragm. Even if the diaphragm is thin and the rigidity itself is insufficient, the column does not deform it. Is regulated, so that a sufficient rigidity force sufficient for ink ejection is given as a whole.

[0007]

FIG. 1 is an exploded perspective view of an ink jet head according to an embodiment of the present invention, which is a partial sectional view. 2 is an enlarged view of part A of FIG. 1, FIG. 3 is a sectional side view of the inkjet head of the embodiment of FIG. 1, and FIG. 4 is a perspective view of the inkjet head of the embodiment of FIG. 1 after assembly. This embodiment shows an example of an edge eject type in which ink droplets are ejected from nozzle holes provided at the end of the substrate, but a face ejecting ink droplets from nozzle holes provided at the upper surface of the substrate is used. It may be an eject type.
The inkjet head 10 of the present embodiment has a laminated structure in which three substrates 1, 2 and 3 having a structure described in detail below are stacked and joined.

The intermediate first substrate 1 is a silicon substrate, and a plurality of nozzle grooves 1 are formed on the surface of the substrate 1 in parallel from one end at equal intervals so as to form a plurality of nozzle holes 4.
1 and a recess 12 communicating with each nozzle groove 11 and forming a discharge chamber 6 having a diaphragm 5 as a bottom wall;
2 is a narrow groove 13 for an ink inflow port, which will form an orifice 7 provided at the rear of the nozzle 2, and a recessed part, which will form a common ink cavity 8 for supplying ink to each ejection chamber 6. 14 and. And the recess 1
4, an ink inlet 13a is provided behind the nozzle 4, and the ink inlet 13a has a size smaller than that of the nozzle hole 4.
It also functions as a filter that prevents dust inside the ink from entering the head.

Further, in providing the common electrode 17 to the first substrate 1, it is important that the work function of the metal material of the semiconductor and the electrode is large or small. In this embodiment, titanium is used as the common electrode material. Although platinum is used as an attachment and gold is used as an underlay of chromium, the present invention is not limited to this embodiment, and another combination may be used depending on the characteristics of the semiconductor and the electrode material. The vibrating plate 5 is formed by doping the first substrate 1 with boron and stopping the etching, and a thin and uniform thickness is obtained.

Further, as shown in FIG. 2, an oxide film 24 having a thickness of about 0.1 mm is formed on the entire surface of the first substrate 1 excluding the common electrode 17, and this oxide film 24 is used when the ink jet head is driven. 5 functions as an insulating layer for preventing dielectric breakdown, short circuit, etc., when the individual electrodes 21 described later come into contact with each other.

Borosilicate glass is used for the lower second substrate 2 bonded to the lower surface of the first substrate 1, and a vibration chamber 9 is formed on the upper surface of the second substrate 2. A concave portion 15 having an elongated pillar 35 is provided near the center.
If the diaphragm 5 is formed thick to obtain a predetermined rigidity required for ink ejection, the column 35 may not be provided. In the present embodiment, the facing gap between the diaphragm 5 and the electrode arranged to face the diaphragm 5, that is, the length G of the gap portion 16 (see FIG. 3, hereinafter referred to as “gap length”) is the recess 15. The gap holding means is formed by the concave portion 15 for the vibration chamber formed on the upper surface of the second substrate 2 so that there is a difference between the depth and the thickness of the electrode. Further, as another example, the recess may be formed on the lower surface of the first substrate 1. Here, the depth of the recess 15 is set to 0.3 μm by etching. The pitch of the nozzle grooves 11 is 0.2 mm and the width thereof is 80 μm.

A vibration chamber 9 is formed by bonding the second substrate 2 to the first substrate 1, and gold is added to each position corresponding to the vibration plate 5 on the second substrate 2. 1
μm is sputtered, and a gold pattern is formed in the same shape as that of the vibrating plate 5 so as to surround the pillar 35 to form the individual electrode 21. The individual electrode 21 includes a lead portion 22 and a terminal portion 23. The material of the electrodes 21, 22, 23 may be an oxide conductive film such as ITO instead of gold.

The upper third substrate 3 bonded to the upper surface of the first substrate 1 is made of borosilicate glass as with the second substrate 2. By joining the third substrate 3, the nozzle hole 4, the ejection chamber 6, the orifice 7, and the ink cavity 8 are formed. Then, in the ink cavity 8, the convex portion 3 is provided so as to have strength so that the concave portion is not crushed when the first substrate 1 and the third substrate 3 are joined.
6 is provided.

Next, the first substrate 1 and the second substrate 2 are anodically bonded at a temperature of 270 to 400 ° C. and a voltage of 500 to 800 V, and under the same conditions, the first substrate 1 and the third substrate 3 are joined. And are joined together to assemble the inkjet head as shown in FIG. The gap length G formed between the diaphragm 5 and the individual electrode 21 on the second substrate 2 after the anodic bonding is the difference between the depth of the recess 15 and the thickness of the individual electrode 21, as described above,
In this embodiment, the thickness is 0.2 μm.

After the ink jet head is assembled as described above, the common electrode 1 as shown in FIG. 3 or FIG.
7 and the terminal portion 23 of the individual electrode 21 respectively (wiring (FP
S: Flexible printed circuit) 101 connects the drive circuit 102. Wiring 101 and electrodes 17,
In this embodiment, an anisotropic conductive film is used as a joining means with 23. Then, nitrogen gas is fed into the vibration chamber 9 and is hermetically sealed by the insulating sealant 30.
The ink 103 is supplied from the ink tank (not shown) to the inside of the first substrate 1 from the ink inlet port 13a through the ink supply pipe 33 and the ink supply container 32 fitted to the rear portion of the inkjet head, and the ink cavity 8 and the ejection are formed. Room 6 etc. are filled. Then, as shown in FIG. 3, the ink in the ejection chamber 6 is ejected as ink droplets 104 from the nozzle holes 4 when the inkjet head 10 is driven, and is printed on the recording paper 105.

FIG. 5 is a general explanatory view showing the relationship between the vibration plate 5 (beam) and the strain. The strain of the beam with a fixed equal load with both ends fixed is expressed by the following equation.

[0017]

[Equation 1]

6 and 7 are explanatory views showing the relationship between the arrangement of the columns and the distortion. FIG. 6 shows an example in which the columns are in one row, and FIG. 7 is an example in which the columns are in two rows. The ink ejection amount is determined by the integral value of the strain δ, but in the example (two columns) of FIG. 7, it particularly depends on δ2. Therefore, for example, as shown in FIG. 8, in the case of two columns, even if the bonding of the substrates is shifted by S, the influence on the ink ejection amount is smaller than in the case where the columns are in one row (FIG. 6).

FIG. 9 shows a distorted shape of the diaphragm 5 when one elongated support is provided as shown in the embodiment of FIG. 1, and FIG. 10 shows two supports provided in each column. An example in which a plurality of is separated is shown. By the way, although the above-mentioned embodiment showed the example which formed the support | pillar in the electrode glass substrate 2, on the contrary, you may form it in the flow path substrate 1, FIG. 11 is sectional drawing which shows the example. In the present invention, the shape and the arrangement of the columns are not limited to those shown in the above-mentioned embodiments, and it goes without saying that they can be modified appropriately according to the purpose of the present invention.

[0020]

As described above, according to the present invention, since the column for restricting the deformation of the diaphragm is provided, even if the diaphragm is thin and the rigidity is insufficient, the column can be used. Since the deformation is restricted, a sufficient rigidity force sufficient for ink ejection is given as a whole. Therefore, it is possible to obtain an ink jet head which has little variation in ink ejection amount, speed, etc., and is free from dot omission, and which is excellent in printing quality and reliability.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of an inkjet head according to an embodiment of the present invention.

FIG. 2 is an enlarged view of part A in FIG.

3 is a cross-sectional side view of the inkjet head of FIG.

4 is a perspective view of the inkjet head of the embodiment of FIG. 1 after assembly.

FIG. 5 is a general explanatory diagram showing a relationship between a diaphragm (beam) and strain.

FIG. 6 is an explanatory diagram showing the relationship between the arrangement of columns (one row) and distortion.

FIG. 7 is an explanatory diagram showing the relationship between the arrangement of columns (two rows) and distortion.

FIG. 8 is an explanatory diagram of distortion when the bonding of the substrates is displaced in the arrangement of FIG.

FIG. 9 is an explanatory diagram showing an example (1) of distortion of the diaphragm.

FIG. 10 is an explanatory diagram showing an example (No. 2) of distortion of the diaphragm.

FIG. 11 is a cross-sectional view showing another arrangement example of columns.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification number Reference number within the agency FI Technical display location B41J 2/015 B41J 3/04 103 Z (72) Inventor Tadaaki Hakata 3 Yamato, Suwa City, Nagano Prefecture No. 3-5 Inside Seiko Epson Corporation (72) Inventor Shuji Koeda 3-3-5 Yamato, Suwa City, Nagano Prefecture Inside Seiko Epson Corporation

Claims (4)

[Claims]
1. A vibrating plate having a nozzle, an ink flow path communicating with the nozzle, a vibration plate formed in a part of the flow path, and an electrode formed so as to face the vibration plate. In an inkjet head that applies an electric pulse between a plate and the electrode to deform the vibrating plate by electrostatic force and ejects ink droplets from the nozzles, a column that partially restricts the deformation of the vibrating plate is used. An inkjet head characterized by being provided.
2. The inkjet head according to claim 1, wherein the support column supports a portion other than the outer periphery of the diaphragm.
3. The ink jet head according to claim 1, wherein the pillar is formed of an electrode glass substrate.
4. The ink jet head according to claim 1, wherein the support column is formed on a flow path substrate.
JP4007494A 1994-03-10 1994-03-10 Ink jet head Pending JPH07246706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4007494A JPH07246706A (en) 1994-03-10 1994-03-10 Ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4007494A JPH07246706A (en) 1994-03-10 1994-03-10 Ink jet head

Publications (1)

Publication Number Publication Date
JPH07246706A true JPH07246706A (en) 1995-09-26

Family

ID=12570783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4007494A Pending JPH07246706A (en) 1994-03-10 1994-03-10 Ink jet head

Country Status (1)

Country Link
JP (1) JPH07246706A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6322198B1 (en) 1998-04-07 2001-11-27 Minolta Co., Ltd. Electrostatic inkjet head having spaced electrodes
US6394586B2 (en) 2000-03-24 2002-05-28 Ricoh Company, Ltd. Liquid droplet discharging head and ink jet recording device
EP1226945A1 (en) * 2001-01-24 2002-07-31 Xerox Corporation Electrostatically-actuated device
US7246888B2 (en) 2001-12-27 2007-07-24 Seiko Epson Corporation Liquid jetting head and method of manufacturing the same
JP2009023333A (en) * 2007-06-19 2009-02-05 Ricoh Co Ltd Liquid discharging head, and image forming apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6322198B1 (en) 1998-04-07 2001-11-27 Minolta Co., Ltd. Electrostatic inkjet head having spaced electrodes
US6394586B2 (en) 2000-03-24 2002-05-28 Ricoh Company, Ltd. Liquid droplet discharging head and ink jet recording device
EP1226945A1 (en) * 2001-01-24 2002-07-31 Xerox Corporation Electrostatically-actuated device
US7246888B2 (en) 2001-12-27 2007-07-24 Seiko Epson Corporation Liquid jetting head and method of manufacturing the same
JP2009023333A (en) * 2007-06-19 2009-02-05 Ricoh Co Ltd Liquid discharging head, and image forming apparatus

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