JPH07209093A - Thermometer - Google Patents

Thermometer

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Publication number
JPH07209093A
JPH07209093A JP1995994A JP1995994A JPH07209093A JP H07209093 A JPH07209093 A JP H07209093A JP 1995994 A JP1995994 A JP 1995994A JP 1995994 A JP1995994 A JP 1995994A JP H07209093 A JPH07209093 A JP H07209093A
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JP
Japan
Prior art keywords
thermocouple
thermometer
insulating bar
member
body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1995994A
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Japanese (ja)
Inventor
Shunji Kawakami
Mitsumasa Matsumoto
俊二 川上
光正 松本
Original Assignee
Tokyo Electron Ltd
Tokyo Electron Tohoku Ltd
Yamari Sangyo Kk
山里産業株式会社
東京エレクトロン東北株式会社
東京エレクトロン株式会社
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Publication date
Application filed by Tokyo Electron Ltd, Tokyo Electron Tohoku Ltd, Yamari Sangyo Kk, 山里産業株式会社, 東京エレクトロン東北株式会社, 東京エレクトロン株式会社 filed Critical Tokyo Electron Ltd
Priority to JP1995994A priority Critical patent/JPH07209093A/en
Publication of JPH07209093A publication Critical patent/JPH07209093A/en
Application status is Pending legal-status Critical

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Abstract

PURPOSE:To prevent the disconnection due to a contact of an expanded thermocouple with a protecting tube, and to improve the durability of a thermometer by forming a housing hole part for housing a thermocouple freely to be moved by the thermal expansion thereof in the longitudinal direction at the tip of an insulating bar-like body. CONSTITUTION:Since the thermometer is heated at a high temperature inside a semi-conductor wafer processing device or the like, an insulating bar-like body 18 and thermocouple 20a, 20b forming a thermocouple are expanded in the longitudinal direction. The thermocouple 20 is moved upward along the element wire insertion hole 21 by a difference of coefficient of thermal expansion. A housing hole 2 at a depth (n) is formed in the tip of the insulating bar-like body 18, then, expansion movement of the thermocouple 20 is restricted within this range to prevent contact with a protecting tube covering outside thereof. Consequently, disconnection due to the contact of the thermocouple 20 with the protecting tube can be prevented to improve the durability.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は、例えば熱処理炉の炉内温度を測定する温度計に関する。 The present invention relates to relates to, for example, a thermometer for measuring temperature in the furnace of the heat treatment furnace.

【0002】 [0002]

【従来の技術】例えば、半導体ウエハの製造においては、酸化、拡散、アニールなどの処理を行うために、各種の熱処理装置が使用されている。 BACKGROUND ART For example, in the production of semiconductor wafers, oxide, diffusion, in order to perform processing such as annealing, various heat treatment device is used. その一般的な熱処理装置は、処理炉内に被処理体である半導体ウエハを収容する反応管(プロセスチューブともいう)を設け、この反応管の周囲に反応管内を加熱する加熱部を設けて構成されている。 The general heat treatment apparatus, a reaction tube for accommodating the semiconductor wafer as an object to be processed into the processing furnace (also referred to as process tube) is provided, constituted by providing a heating section for heating the reaction tube around the reaction tube It is.

【0003】また、前記半導体ウエハの処理に必要となる温度を管理するために、前記加熱部には温度センサが設けられている。 [0003] In order to manage the temperature required for the processing of the semiconductor wafer, said the heating section is provided with a temperature sensor. そして、この温度センサの性能を維持するために、例えば反応管の洗浄等が行われて処理炉内の条件が変った時などに、処理を開始する前に反応管内に温度計を挿入して実際の処理と同じように反応管内を加熱して温度を計り、温度センサが正常に機能しているか否かの検査及び較正が適宜行われている。 Then, this in order to maintain the performance of the temperature sensor, for example, when the cleaning of the reaction tube has changed the conditions of the performed processing furnace, the reaction tube prior to starting the process by inserting a thermometer just as scales the reaction tube was heated temperature and the actual processing, testing and calibration of whether the temperature sensor is functioning properly is being performed properly.

【0004】この場合に使用される前記温度計は、図6 [0004] The thermometer to be used in this case, FIG. 6
に示すように一対の熱電対素線20a,20bを長手方向に挿通する素線挿通孔21,21を有する長尺の絶縁棒状体18と、この絶縁棒状体18の先端部(上端部) An insulating bar-like member 18 elongated with a wire insertion hole 21 for inserting the pair of thermocouple wires 20a, and 20b in the longitudinal direction as shown in, the distal end portion of the insulating bar-like member 18 (upper part)
より延出された一対の熱電対素線20a,20bを互に接合してなる熱電対20と、この熱電対20を先端部に有する絶縁棒状体18を収容する保護管17とから主に構成されている。 Mainly constituted more extended out a pair of thermocouple wires 20a, 20b and the thermocouple 20 to each other formed by joining, from the protection tube 17 for accommodating the insulating bar-like member 18 having the thermocouple 20 at the tip portion It is. なお、前記熱電対素線20a,20b Incidentally, the thermocouple element 20a, 20b
は絶縁棒状体18の基端部(下端部)に固定されている。 It is fixed to the base end portion of the insulator rod-shaped body 18 (lower end). 熱電対20は例えば白金と白金ロジウムの組合せからなり、保護管17は耐熱性の高い材料例えば炭化ケイ素(SiC)により形成されている。 Thermocouple 20 is a combination of, for example, platinum and platinum-rhodium, protective tube 17 is formed of a material having high such as silicon carbide heat resistance (SiC).

【0005】 [0005]

【発明が解決しようとする課題】しかしながら、前記温度計においては、熱電対20が絶縁棒状体18の先端部に延出した状態で設けられていること及び絶縁棒状体1 [SUMMARY OF THE INVENTION However, in the above thermometers, thermocouples 20 are insulating bar-like member that is provided in a state extending to the distal end portion 18 and the insulating rod-shaped body 1
8の熱膨張率(8.0×10 -6 )に対して熱電対素線2 Thermal expansion coefficient of 8 thermocouple element 2 with respect to (8.0 × 10 -6)
0a,20bの熱膨張率(11.1×10 -6 )の方が大きいことから、熱電線素線20a,20bの熱膨張により熱電対20が絶縁棒状体18の先端部から更に延出して保護管17の内壁に接触する場合がある。 0a, the thermal expansion coefficient of 20b since the larger of (11.1 × 10 -6), the heat wire strands 20a, the thermocouple 20 by thermal expansion of 20b is out further extending from the distal end of the insulator rod-shaped body 18 sometimes contact with the inner wall of the protective tube 17. この場合、 in this case,
熱電対20を構成する高融点(1770℃)の白金が保護管17を構成する炭化ケイ素のケイ素(Si)と反応して低融点(830℃)の合金となり、熱電対20が断線し易くなるという問題があった。 Thermocouple 20 platinum refractory (1770 ° C.) constituting reacts with silicon carbide constituting the protective tube 17 (Si) to be an alloy of low melting point (830 ° C.), the thermocouple 20 is easily broken there is a problem in that.

【0006】本発明は、前記問題点を解決すべくなされたもので、保護管との接触による熱電対の断線を防止することができ、耐久性の向上を図った温度計を提供することを目的とする。 [0006] The present invention has been made to solve the above problems, the protective tube and contact by can be prevented from being broken thermocouple, providing a thermometer with improved durability for the purpose.

【0007】 [0007]

【課題を解決するための手段】上記目的を達成するために本発明は、一対の熱電対素線を長手方向に挿通する素線挿通孔を有する長尺の絶縁棒状体と、この絶縁棒状体の先端部より延出された一対の熱電対素線を互に接合してなる熱電対と、この熱電対を先端部に有する絶縁棒状体を収容する耐熱性保護管とを備えた温度計において、 Means for Solving the Problems The present invention to achieve the above object, an insulating bar-like member elongated having a wire insertion hole for inserting the pair of thermocouple wires in the longitudinal direction, the insulating rod-like body a thermocouple mutually formed by joining a pair of thermocouple wires that extends from the distal end portion of the thermometer that includes a heat-resistant protective tube for accommodating the insulating bar-like member having the thermocouple tip ,
前記絶縁棒状体の先端部に前記熱電対を長手方向に熱膨張移動可能に収容する所定深さの収容穴部を形成してなることを特徴とする。 Characterized by comprising forming a housing hole of a predetermined depth of the thermocouple tip to accommodate possible thermal expansion movement in the longitudinal direction of the insulating bar-like member.

【0008】 [0008]

【作用】このように構成された本発明の温度計によれば、熱電対が絶縁棒状体先端の収容穴部内で熱膨張移動するようになるため、熱電対が保護管と接触するようなことがない。 SUMMARY OF] According to the thermometer of the present invention configured as described above, since the thermocouple comes to thermal expansion moves within bore accommodating the insulator rod-shaped body tip, that as the thermocouple is in contact with the protective tube there is no. 従って、保護管との接触による熱電対の断線を防止することが可能となり、耐久性の向上が図れる。 Therefore, it is possible to prevent disconnection of the thermocouple due to contact between the protective tube and will, thereby improving the durability.

【0009】 [0009]

【実施例】以下に、本発明の一実施例を添付図面に基づいて詳述する。 EXAMPLES Hereinafter, will be described in detail with reference to an embodiment of the present invention in the accompanying drawings.

【0010】本発明を熱処理装置の温度計に適用した実施例を示す図3において、1は被処理体である半導体ウエハWを高温下で処理する縦型の処理炉で、この処理炉1は中央部に円形の開口部2aを有する水平のベースプレート2を備えている。 [0010] In FIG. 3 showing an embodiment applied to a thermometer of the heat treatment apparatus of the present invention, 1 is a vertical type processing furnace for processing semiconductor wafers W as an object to be processed at a high temperature, the processing furnace 1 is and a horizontal base plate 2 having a circular opening 2a in the central portion. このベースプレート2の開口部2aには下端が開口し且つその開口端にフランジ部3a Flange portion 3a on and its open end opened at the lower end in the opening 2a of the base plate 2
を有する縦長円筒状の石英製の処理管3が挿通され、この処理管3のフランジ部3aの周縁部がベースプレート2にマニホールド4を介して取外可能に取付けられている。 Vertically long cylindrical quartz process tube 3 is inserted with the peripheral portion of the flange portion 3a of the process tube 3 is mounted for removable through the manifold 4 to the base plate 2. また、処理管3の下側部には処理ガスを導入する導入管部3bや処理ガスを排出する図示しない排出管部が一体に形成されている。 Further, the lower portion of the process tube 3 discharge pipe section (not shown) for discharging the inlet tube portion 3b and the processing gas introduced processing gas is formed integrally.

【0011】前記処理管3の周縁部には処理管3内を加熱する加熱部5が設けられ、この加熱部5と処理管3との間には加熱部5による加熱を均一にするための均熱管6が処理管3を覆うようにして処理管3と同心円状に設けられている。 [0011] The at the peripheral portion of the process tube 3 is provided a heating unit 5 for heating the inside of the process tube 3, to a uniform heating by the heating unit 5 is provided between the process tube 3 and the heating unit 5 liner tube 6 is provided in the process tube 3 concentrically so as to cover the process tube 3. 前記加熱部5は例えば二ケイ化モリブデン(MoSi 2 )又はカンタル(商品名)等の抵抗発熱線5aをコイル状に巻いてなり、その外側及び上方にはこれを覆うように断熱材7が設けられ、この断熱材7の外側は図示しないアウターシェルで覆われている。 The heating unit 5 comprises by winding a resistance heating wire 5a, such as, for example, molybdenum disilicide (MoSi 2) or Kanthal (trade name) in a coil shape, heat insulating material 7 so as to cover the provided on its outer and upper It is, outside of the heat insulating material 7 is covered with an outer shell (not shown). 加熱部5は高さ方向に複数(例えば3〜5)のゾーンに分割されると共に、各ゾーンに温度センサ8が配設され、それぞれのゾーンが独立して温度制御されるようになっている。 The height direction heating unit 5 while being divided into zones of a plurality (e.g. 3-5), the temperature sensor 8 in each zone is provided, and is temperature controlled each zone is independently .

【0012】前記加熱部5、断熱材7及びアウターシェルは前記ベースプレート2上に支持されている。 [0012] The heating unit 5, the heat insulating material 7 and the outer shell are supported on the base plate 2. 前記均熱管6は耐熱性を有する材料、例えば炭化ケイ素(Si Material wherein the soaking tube 6 having heat resistance, such as silicon carbide (Si
C)により下端が開口した縦長円筒状に形成され、その下端部が前記ベースプレー2上に円環状の断熱支持体9 Lower by C) is formed in a vertically long cylindrical shape having an opening, the lower end the baseplate 2 on annularly heat-insulating support 9
を介して支持されている。 It is supported through the.

【0013】前記処理管3の下方にはその下端開口を開閉する蓋体10が配置され、この蓋体10上には多数枚の半導体ウエハWを水平状態で上下方向に間隔をおいて多段に支持するウエハボート11が保温筒12を介して載置されている。 [0013] below the process tube 3 is arranged lid 10 for opening and closing the lower end opening, a multistage multiple sheets of semiconductor wafers W is on the lid 10 at intervals in the vertical direction in a horizontal state the wafer boat 11 supporting is placed through the heat insulating tube 12. 前記蓋体10は昇降機構13の昇降台13a上に取付けられ、この昇降機構13により処理管3内への前記ウエハボート11の搬入及び搬出及び蓋体10の開閉が行われるようになっている。 The lid 10 is mounted on the lifting table 13a of the elevating mechanism 13, the opening and closing of the loading and unloading and the lid 10 of the wafer boat 11 into the processing tube 3 is to be carried out by the lifting mechanism 13 .

【0014】そして、このように構成された熱処理装置の反応管3内には、例えば反応管3の洗浄等が行われて処理炉1内の条件が変った時などに、処理を開始する前に温度計14が挿入され、実際の処理と同じように反応管3内を加熱して温度を計ることにより、温度センサ8 [0014] Then, the reaction tube 3 of the thus constructed heat treatment apparatus, for example, when the cleaning of the reaction tube 3 has changed the conditions of the performed processing furnace 1, before beginning the process by measuring the temperature thermometer 14 is inserted, it is heated just as the reaction tube 3 from the actual process, the temperature sensor 8
の検査及び較正が行われる。 Inspection and calibration of is carried out. この温度計14は蓋体10 The thermometer 14 is the lid 10
に設けられた挿入孔15から保温筒12及びウエハボート11と干渉しないように反応管3内に垂直に挿入され、温度計14の下端部が昇降機構13の昇降台13a It is inserted vertically from the insertion hole 15 provided in the heat insulating cylinder 12 and the reaction tube 3 so as not to interfere with the wafer boat 11, the lower end of the thermometer 14 is lifting table 13a of the lifting mechanism 13
にブラケット16を介して固定される。 It is fixed through a bracket 16 to.

【0015】なお、この検査は、実際の処理と同じ条件すなわち反応管3内に保温筒12及びウエハボート11 [0015] In this test, heat-insulating cylinder 12 to the actual same conditions as the process that is, within the reaction tube 3 and the wafer boat 11
が存在する状態(但し、ウエハボート11に半導体ウエハWがセットされていない状態)で行われる。 There exists state (however, the semiconductor wafer W to the wafer boat 11 is a state that has not been set) are performed in. また、検査終了後には、前記温度計14は蓋体10の挿入孔15 Further, after completion of the inspection, insertion holes 15 of the thermometer 14 is the lid 10
から引抜かれ、蓋体10の挿入孔15に図示しない盲蓋が取付けられる。 Withdrawn from, the blind cover is attached (not shown) into the insertion hole 15 of the lid 10.

【0016】前記温度計14は、図4ないし図5に示すように下端が開放された長尺の保護管17を有し、この保護管17内には前記加熱部5の各ゾーンに対応して長さを違えた長尺の複数本(図示例では5本)の絶縁棒状体(碍子)18が下端開口部17aから挿入されている。 [0016] The thermometer 14 has a long protective tube 17 the lower end is opened as shown in FIGS. 4 to 5, corresponding to each zone of the heating section 5 is within this protective tube 17 insulating rod-like body long plurality of which Chigae length Te (five in the illustrated example) (insulator) 18 is inserted from the lower end opening 17a. また、保護管17の開口部17aには、これより前記絶縁棒状体18の下端部を少し延出させた状態で例えば保護管17と同質のセラミック接着材からなる充填材19が充填され、これにより保護管17内が密封されると共に絶縁棒状体18が固定されている。 Furthermore, the opening 17a of the protective tube 17, from the insulating bar-like member 18 filler 19 made of a state in which the lower end was slightly extended example protective tube 17 the same quality of the ceramic adhesive of this is filled, this insulating rod-like body 18 is fixed with the protective tube 17 is sealed by.

【0017】前記保護管17は、耐熱性の高い材料例えば炭化ケイ素により、反応管3内の深さ以上の長さ例えば1m程度以上の長さ及び所定の径例えば直径が10m [0017] The protective tube 17, the high heat resistant material such as silicon carbide, the depth or length e.g. 1m approximately over the length and predetermined diameter for example the diameter of the reaction tube 3 10 m
m程度、内径が7mm程度の細管状に形成されている。 About m, inner diameter is formed to 7mm approximately tubular shape.
また、前記絶縁棒状体18は、図1ないし図2に示すように絶縁材料である例えば高純度のアルミナ(Al Further, the insulating bar-like member 18 is an insulating material, as shown in FIG. 1 to FIG. 2, for example high purity alumina (Al
23 )により例えば長径d1が2.4mm程度、短径d2 2 O 3) by, for example, the major axis d1 is 2.4mm approximately, minor diameter d2
が1.7mm程度の断面楕円形の棒状に形成され、内部にはその長手方向に一対の例えば直径が0.5mm程度の熱電対素線20a,20bを挿通するための例えば内径d3が0.7mm程度の素線挿通孔21,21が所定の間隔p例えば1mm程度で形成されている。 There is formed into a rod of elliptical cross-section of about 1.7 mm, the thermocouple element 20a of about 0.5mm pair of a diameter in the longitudinal direction therein, for example, the inner diameter d3 for inserting the 20b 0. wire insertion holes 21, 21 of about 7mm is formed at about a predetermined interval p example 1 mm.

【0018】これら素線挿通孔21,21に例えば白金からなる素線20aと白金ロジウムからなる素線20b [0018] The wire 20b consisting of a wire 20a and the platinum-rhodium consisting in these wire insertion holes 21 and 21, for example, platinum
を別々に挿通し、素線挿通孔21,21の上端部から延出された両素線20a,20bの上端部を互に所定の曲率例えば半径が0.5mm程度で湾曲させて端部同士をプラズマ溶接で接合することによりいわゆるR型の熱電対20が形成される。 The inserted separately, wire insertion Ryomotosen 20a extending from the upper end of the hole 21, 21, 20b mutually curved so with ends predetermined curvature for example a radius of about 0.5mm an upper end portion of the thermocouple 20 of so-called R-type is formed by joining a plasma welding. そして、この熱電対20が熱電対素線20a,20bの熱膨張により絶縁棒状体18の上端部から延出して保護管17の内壁に接触することを防止するために、絶縁棒状体17の上端部には熱電対20 Then, in order to prevent the thermocouple 20 contacts the inner wall of the thermocouple element 20a, extending therefrom in the protective tube 17 from the upper end portion of the insulator rod-like body 18 due to thermal expansion of the 20b, the upper end of the insulating rod member 17 thermocouple in section 20
を熱膨張移動可能に収容する収容穴部22が形成されている。 Accommodating hole 22 for accommodating the possible thermal expansion movement is forming.

【0019】この収容穴部22は、前記一対の素線挿通孔21,21が内接する例えば長径d4が1.7mm程度、短径d5が0.7mm程度の断面長円形に形成されると共に、熱電対素線20a,20b及び絶縁棒状体1 [0019] The housing opening portion 22, the pair of wires through holes 21, 21 are inscribed e.g. diameter d4 of about 1.7 mm, with minor d5 is formed oval cross section of about 0.7 mm, thermocouple elements 20a, 20b and the insulating rod-shaped body 1
8の長さ、熱膨張率並びに受ける熱を考慮して所定の深さhに形成されている。 8 the length of, in consideration of the thermal expansion coefficient and receives heat and is formed to a predetermined depth h. 例えば、熱電対素線20a,2 For example, the thermocouple element 20a, 2
0b及び絶縁棒状体18の長さが1m程度、熱膨張率が11.1×10 -6と8.0×10 -6 、受ける温度が10 The length of 0b and insulating bar-like member 18 is about 1 m, the thermal expansion coefficient of 11.1 × 10 -6 and 8.0 × 10 -6, the temperature experienced by 10
00℃程度とした場合、熱電対素線20a,20bの方が絶縁棒状体18よりも3.1mm余計に伸びるので、 If a 00 ° C. approximately, the thermocouple element 20a, since who 20b is 3.1mm extra stretch than the insulating bar-like member 18,
前記収容穴部22の深さhは余裕をとって6〜7mm程度に形成されている。 The depth h of the accommodation hole 22 is formed in about 6~7mm taking margin.

【0020】そして、前記熱電対20は収容穴部22の底部に配置され、この状態で熱電対素線20a,20b [0020] Then, the thermocouple 20 is located at the bottom of the accommodation hole 22, the thermocouple element 20a in this state, 20b
は絶縁棒状体18の下端部から延出されており、且つ絶縁棒状体18の素線挿通孔21,21の下端部に例えば絶縁棒状体18と同質のセラミック接着材からなる充填材を充填することにより固定されている(図示省略)。 Filling is extended from the lower end portion of the insulator rod-shaped body 18, and the lower end portion of the wire insertion hole 21 of the insulating rod member 18 such as filler made of an insulating bar-like member 18 and the same quality of the ceramic adhesive It is fixed by (not shown).

【0021】なお、前記絶縁棒状体18は素線挿通孔2 [0021] Incidentally, the insulating bar-like member 18 is wire insertion hole 2
1が形成された状態で焼成されており、この絶縁棒状体18の上端部に収容穴部22をフライスカッターなどの加工機械により加工することになる。 It is fired in a state in which 1 is formed, the accommodation hole 22 on the upper end of the insulating rod-like body 18 to be processed by the processing machine such as a milling cutter. この場合、加工機械の関係で現状では加工物である絶縁棒状体18の長さが制限されるため、例えば長さが30cm程度の絶縁棒状体に収容穴部22を加工してから、この絶縁棒状体を例えば長さが70cm程度の絶縁棒状体に接合することにより所望長さの絶縁棒状体18を得る。 From this case, since the length of the insulating rod member 18 is a workpiece is limited at present in relation to the processing machine, for example, length and processing the accommodation hole 22 in the insulating bar-like member of approximately 30 cm, the insulation obtaining an insulating bar-like member 18 of a desired length by the rod-like body for example length is bonded to the insulator rod-like body of about 70cm. なお、この加工方法を用いずに、例えば焼成前の絶縁棒状体18に素線挿通孔21と共に収容穴部22を形成してから焼成するようにしてもよく、この方法によれば収容穴部22を有する所望長さの絶縁棒状体18が容易に得られる。 Incidentally, without using the processing method, for example it may be fired after forming the accommodation hole 22 with the wire insertion hole 21 in the pre-fired dielectric rod-like body 18, the accommodation hole according to this method desired length of insulating bar-like member 18 having a 22 is easily obtained.

【0022】次に、実施例の作用を述べる。 Next, describing the operation of the embodiment. 先ず、図3 First, as shown in FIG. 3
に示すように温度計14を熱処理装置における蓋体10 Lid 10 in the heat treatment apparatus the thermometer 14 as shown in
の挿入孔15に挿入して昇降機構13の昇降台13aにブラケット16を介して取付けたなら、昇降機構13によりウエハボート11、保温筒12及び温度計14を反応管3内に挿入すると共に蓋体10を閉める。 The lid along with if mounted via a bracket 16 to the lifting table 13a of the insert and the insertion hole 15 lift mechanism 13, the elevating mechanism 13 wafer boat 11, inserting the heat insulating tube 12 and the thermometer 14 into the reaction tube 3 close the body 10. 次いで、 Then,
温度センサ8を介して制御される加熱部5により反応管3内を所定の温度例えば1000℃程度に加熱し、この時の反応管3内の温度を温度計14の熱電対20により検知して測定する。 The temperature sensor 8 inside the reaction tube 3 by the heating unit 5 which is controlled via the heating to approximately a predetermined temperature, for example 1000 ° C., the temperature in the reaction tube 3 at this time is detected by the temperature gauge 14 thermocouple 20 taking measurement. そして、この温度計14により測定される温度に基づいて温度センサ8の較正を行ったり、 Then, or perform calibration of the temperature sensor 8 on the basis of the temperature measured by the thermometer 14,
温度センサ8が正常に機能しているか否かの検査を行う。 Temperature sensor 8 is inspected whether functioning properly.

【0023】このような検査状態において、温度計14 [0023] In such an inspection state, the thermometer 14
が高温に加熱されているので、温度計14を構成している熱電対素線20a,20bや絶縁棒状体18などが熱膨張し、これら熱電対素線20a,20b及び絶縁棒状体18の熱膨張差により熱電対20が絶縁棒状体18に対して相対的に移動するようになる。 Since There has been heated to a high temperature, the thermocouple element 20a constituting the thermometer 14, 20b or insulator such as rod-like body 18 is thermally expanded, these thermocouple element 20a, 20b and the heat insulating bar-like member 18 thermocouple 20 is for relative movement with respect to the insulating bar-like member 18 by expansion differences.

【0024】しかしながら、前記温度計14においては、絶縁棒状体18の先端部に熱電対20を長手方向に熱膨張移動可能に収容する所定深さhの収容穴部22を形成してあるため、熱電対20が前記収容穴部22内で熱膨張移動するようになり、熱電対20が保護管17の内壁と接触するようなことがない。 [0024] However, since the at thermometer 14, which is formed with accommodation hole 22 having a predetermined depth h to accommodate to be thermal expansion move a thermocouple 20 in the longitudinal direction to the distal end portion of the insulator rod-shaped body 18, come to thermal expansion movement thermocouple 20 within the accommodation hole 22, the thermocouple 20 is not such as to contact with the inner wall of the protective tube 17. 従って、保護管17 Accordingly, the protection tube 17
との接触による熱電対20の断線を防止することが可能となり、温度計14の耐久性の向上が図れる。 Possible to prevent disconnection of the thermocouple 20 due to contact with the result, thereby improving the durability of the thermometer 14.

【0025】なお、本発明は、前記実施例に限定されるものではなく、本発明の要旨の範囲内で種々の変形実施が可能である。 [0025] The present invention is the not intended to be limited to the embodiments, and various modifications are possible within the spirit and scope of the present invention. 例えば、実施例では縦型の処理炉1が例示されているが、処理炉1としては横型のものであってもよい。 For example, in the embodiment the processing furnace 1 in the vertical type is illustrated, it may be of a horizontal type as the processing furnace 1. また、実施例では熱処理装置の反応管3内に温度計14を挿入するようにしたが、反応管3と均熱管6 Further, in the example it was to insert a thermometer 14 into the reaction tube 3 of the heat treatment apparatus, the reaction tube 3 and the soaking tube 6
との間に温度計14を常設するようにしてもよい。 The thermometer 14 may be permanently installed between. 更に、本発明の温度計は熱処理装置以外にも適用可能である。 Furthermore, the thermometer of the present invention is also applicable to other heat treatment apparatus.

【0026】また、実施例では細管の保護管17内に収容される絶縁棒状体18の収容本数を多くするため、すなわち収容効率を上げるために絶縁棒状体18が断面楕円形に形成されているが、絶縁棒状体18の断面形状は楕円形以外の例えば円形、方形、多角形等であってもよく、この絶縁棒状体18の断面形状に対応して収容穴部22の断面形状も長円形以外の円形、方形、多角形等であってもよい。 Further, in the embodiment in order to increase the accommodation number of insulating bar-like member 18 which is accommodated in the protective tube 17 of the capillary, i.e., an insulating bar-like member 18 in order to increase the accommodation efficiency is formed into an elliptical section but the cross-sectional shape of the insulating bar-like member 18, for example circular than oval, square, multi a square or the like may be, cross-sectional shape oval of the insulating bar-like member 18 of the cross-sectional shape corresponding accommodation hole 22 circular than, rectangular, it may be polygonal or the like. 更に、収容穴部22の上端部を例えば絶縁棒状体18と同質のセラミック接着材からなる充填材で閉塞して収容穴部22を密封するようにしてもよい。 Further, an upper end, for example, insulating bar-like member 18 and the accommodation hole 22 and closes with a filler made of homogeneous ceramic adhesive of the accommodation hole 22 may be sealed.
これによれば、保護管17から拡散等してくる重金属による熱電対20を構成する白金の合金化を防止することができ、更に耐久性の向上が図れる。 According to this, the protective tube 17 can be prevented alloying of platinum constituting the thermocouple 20 by heavy metals that diffuse the like, thereby further improving the durability.

【0027】 [0027]

【発明の効果】以上要するに本発明によれば、絶縁棒状体の先端部に熱電対を長手方向に熱膨張移動可能に収容する所定深さの収容穴部を形成したので、熱電対が前記収容穴部内で熱膨張移動するようになり、熱電対が保護管と接触することがなくなり、保護管との接触による熱電対の断線を防止することができ、耐久性の向上が図れる。 According to the above summary the present invention, since the form accommodation hole of a predetermined depth to accommodate the possible thermal expansion move thermocouple longitudinally distal end of the insulator rod-shaped body, the thermocouple is the accommodation come to thermal expansion move in the bore, prevents the thermocouple is in contact with the protective tube, it is possible to prevent disconnection of the thermocouple due to contact with the protective tube, thereby improving the durability.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の一実施例を示す温度計の要部の一部切欠拡大斜視図である。 1 is a partially cutaway enlarged perspective view of a main part of a thermometer showing an embodiment of the present invention.

【図2】図1の温度計の熱電対を取付けない状態の拡大斜視図である。 2 is an enlarged perspective view of a state in which no mounting a thermocouple thermometer of FIG.

【図3】熱処理装置の縦断面図である。 3 is a longitudinal sectional view of a heat treatment apparatus.

【図4】温度計の拡大縦断面図である。 4 is an enlarged longitudinal sectional view of the thermometer.

【図5】図4のA−A線拡大断面図である。 5 is an A-A line enlarged sectional view of FIG.

【図6】従来の温度計の概略斜視図である。 6 is a schematic perspective view of a conventional thermometer.

【符号の説明】 DESCRIPTION OF SYMBOLS

14 温度計 17 保護管 18 絶縁棒状体 20 熱電対 20a,20b 熱電対素線 21 素線挿通孔 22 収容穴部 14 thermometer 17 the protective tube 18 insulating bar-like member 20 thermocouples 20a, 20b thermocouple element 21 strands insertion hole 22 accommodating hole

───────────────────────────────────────────────────── フロントページの続き (72)発明者 川上 俊二 神奈川県津久井群城山町町屋1丁目2番41 号 東京エレクトロン東北株式会社相模事 業所内 ────────────────────────────────────────────────── ─── front page of the continuation (72) inventor Shunji Kawakami Kanagawa Prefecture Tsukui group Shiroyama-cho Machiya 1-chome No. 2 No. 41 Tokyo Electron Tohoku Co., Ltd. Sagami business premises

Claims (1)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 一対の熱電対素線を長手方向に挿通する素線挿通孔を有する長尺の絶縁棒状体と、この絶縁棒状体の先端部より延出された一対の熱電対素線を互に接合してなる熱電対と、この熱電対を先端部に有する絶縁棒状体を収容する耐熱性保護管とを備えた温度計において、前記絶縁棒状体の先端部に前記熱電対を長手方向に熱膨張移動可能に収容する所定深さの収容穴部を形成してなることを特徴とする温度計。 And 1. A dielectric rod-like body elongated having a wire insertion hole for inserting the pair of thermocouple wires in the longitudinal direction, a pair of thermocouple wires that extends from the distal end portion of the insulating bar-like member a thermocouple comprising mutually joined, at a temperature meter and a heat-resistant protective tube for accommodating the insulating bar-like member having the thermocouple at the tip, the thermocouple longitudinal direction end portion of the insulator rod-shaped body thermometer characterized by comprising forming a housing hole of a predetermined depth of thermal expansion movably accommodated.
JP1995994A 1994-01-20 1994-01-20 Thermometer Pending JPH07209093A (en)

Priority Applications (1)

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