JPH07146253A - Tester for adhesive polarizing film - Google Patents

Tester for adhesive polarizing film

Info

Publication number
JPH07146253A
JPH07146253A JP29555893A JP29555893A JPH07146253A JP H07146253 A JPH07146253 A JP H07146253A JP 29555893 A JP29555893 A JP 29555893A JP 29555893 A JP29555893 A JP 29555893A JP H07146253 A JPH07146253 A JP H07146253A
Authority
JP
Japan
Prior art keywords
polarizing film
light
adhesive
adhesive layer
polarization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29555893A
Other languages
Japanese (ja)
Inventor
Yoichi Sato
洋一 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP29555893A priority Critical patent/JPH07146253A/en
Publication of JPH07146253A publication Critical patent/JPH07146253A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a tester which achieves highly accurate detection of defects of an adhesive layer in an adhesive polarizing film with a simple processing. CONSTITUTION:A ring-type emission port 8 is arranged surrounding a camera 10 for photographing a subject. The ring type emission port 8 is connected to a light source 6 through an optical fiber 7 and light from the light source 6 is emitted from the ring type emission port 8 through an optical fiber 7. An image processing section 11 made up of a binary coding part 12 and a judging part 13 is connected to the camera 10. A polarization filter 9 is set on the front of the ring type emission port 8 to perform a polarization in the direction differing from the direction of polarization of a polarizing film 3 contained in the subject. On the other hand, the subject has an adhesive polarizing film comprising the adhesive layer 2 and the polarizing film 3 applied on at least a glass substrate 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、粘着偏光フィルムの粘
着剤層の発泡欠陥を画像処理を用いて自動的に検出する
欠陥検査装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a defect inspection apparatus for automatically detecting a foaming defect of an adhesive layer of an adhesive polarizing film by using image processing.

【0002】[0002]

【従来の技術】従来、画像処理を用いた欠陥検査装置に
関しては、回路パターンの欠陥検査装置として特開平2
─133883号公報のものが知られている。この欠陥
検査装置では、2つの閾値を設定し、被検査物に対し
て、斜向する方向から投光して濃淡画像を得た後、その
濃度分布に基づいて明るい方の閾値を越える部分の最大
値と、暗い方の閾値より小さい部分の最小値を求め、両
者が隣接している場合に、最大値と最小値の差を所定値
と比較して凹凸欠陥を検出している。
2. Description of the Related Art Conventionally, a defect inspection device using image processing is disclosed as a circuit pattern defect inspection device.
The one disclosed in Japanese Patent No. 133883 is known. In this defect inspection apparatus, two thresholds are set, a light and shade image is obtained by projecting light from an oblique direction to an object to be inspected, and then, based on the density distribution, a portion exceeding the brighter threshold is detected. The maximum value and the minimum value of a portion smaller than the darker threshold value are obtained, and when the two are adjacent to each other, the difference between the maximum value and the minimum value is compared with a predetermined value to detect an uneven defect.

【0003】[0003]

【発明が解決しようとする課題】しかし、かかる従来の
欠陥検査装置では、画像処理に多値の濃度分布を用いる
必要があるため、演算量が膨大であり、検査に長時間を
要するという問題点を有する。また、粘着偏光フィルム
にアルミ膜等を貼着した所謂反射型の粘着偏光フィルム
の欠陥検査に利用しようとすると、反射板であるアルミ
膜等の凹凸が地合として検出されてしまい、発泡欠陥と
区別ができないという問題点も有している。本発明は、
上記問題点に鑑みてなされたもので、粘着偏光フィルム
における粘着剤層の欠陥を簡単な処理で精度良く検出す
る欠陥検査装置を提供することを目的とする。
However, in such a conventional defect inspection apparatus, since it is necessary to use a multivalued density distribution for image processing, the amount of calculation is enormous and the inspection takes a long time. Have. In addition, when trying to use for a defect inspection of a so-called reflection type adhesive polarizing film in which an aluminum film or the like is attached to an adhesive polarizing film, irregularities of the aluminum film or the like that is a reflection plate are detected as a formation, and a foaming defect occurs. It also has the problem that it cannot be distinguished. The present invention is
The present invention has been made in view of the above problems, and an object of the present invention is to provide a defect inspection apparatus that accurately detects defects in the pressure-sensitive adhesive layer of the pressure-sensitive adhesive polarizing film with a simple process.

【0004】[0004]

【課題を解決するための手段】そのため本発明は、透光
性を有する基板と該基板に貼着される粘着偏光フィルム
を含んだ被検査物の基板面に向けて光を照射する照明手
段と、前記被検査物と前記照明手段の間に配置され、照
明手段の照射する光を被検査物の粘着偏光フィルムの偏
光方向と異なる方向に偏光する偏光部材と、前記被検査
物からの反射光を撮像する撮像手段と、該撮像手段によ
って撮像された画像から前記粘着偏光フィルムの粘着剤
層の発泡欠陥を検出する画像処理手段とをもって構成し
た。
Therefore, the present invention provides an illuminating means for irradiating light onto a substrate surface of an object to be inspected, which includes a substrate having a light transmitting property and an adhesive polarizing film attached to the substrate. A polarizing member which is disposed between the inspection object and the illuminating means and which polarizes the light emitted by the illuminating means in a direction different from the polarization direction of the adhesive polarizing film of the inspection object; and the reflected light from the inspection object And image processing means for detecting a foaming defect of the adhesive layer of the adhesive polarizing film from the image taken by the imaging means.

【0005】[0005]

【作用】以上の構成により、照明手段からの光を、被検
査物中の粘着偏光フィルムの偏光方向とは異なる方向に
偏光してから当該被検査物に照射するので、その反射光
を撮像すれば、粘着剤層中の発泡の有無により光量差が
明確に生じ、発泡欠陥を検出することができる。
With the above configuration, the light from the illumination means is polarized in a direction different from the polarization direction of the adhesive polarizing film in the object to be inspected and then radiated to the object to be inspected. For example, a difference in the amount of light is clearly generated depending on the presence or absence of foaming in the adhesive layer, and the foaming defect can be detected.

【0006】[0006]

【実施例】以下、本発明を実施例に基づいて詳細に説明
する。図1は本発明に係る粘着偏光フィルムの欠陥検査
装置の一実施例を示すブロック図である。同図におい
て、被検査物Aの上方にはカメラ10が設置され、この
カメラ10を囲むようにリング型出射口8が配置され
る。リング型出射口8は光ファイバ7を介して光源6に
接続されていて、光源6の発する光は光ファイバ7を通
じてこのリング型出射口8から照射される。また、カメ
ラ10には、画像処理部11が接続され、この画像処理
部11は、2値化部12と判定部13から構成されてい
る。そして、カメラ10およびリング型出射口8の前面
には、偏光フィルタ9が、被検査物Aに含まれる偏光フ
ィルム3の偏光方向と異なる方向に偏光するように設置
される。図3は、この偏光フィルム3と偏光フィルタ9
の関係を説明する図であり、この場合は偏光方向をそれ
ぞれ直交させて配置している。なお、このように直交さ
せたときが、カメラ10で撮像した画像において最も明
暗が強調されることになる。
EXAMPLES The present invention will be described in detail below based on examples. FIG. 1 is a block diagram showing an embodiment of a defect inspection apparatus for an adhesive polarizing film according to the present invention. In the figure, a camera 10 is installed above the object A to be inspected, and a ring-shaped emission port 8 is arranged so as to surround the camera 10. The ring type emission port 8 is connected to the light source 6 via the optical fiber 7, and the light emitted from the light source 6 is emitted from the ring type emission port 8 through the optical fiber 7. An image processing unit 11 is connected to the camera 10, and the image processing unit 11 includes a binarization unit 12 and a determination unit 13. A polarizing filter 9 is installed on the front surface of the camera 10 and the ring-shaped exit 8 so as to polarize in a direction different from the polarization direction of the polarizing film 3 included in the inspection object A. FIG. 3 shows the polarizing film 3 and the polarizing filter 9.
FIG. 4 is a diagram for explaining the relationship of the above, and in this case, the polarization directions are arranged orthogonal to each other. It should be noted that the lightness and darkness are most emphasized in the image captured by the camera 10 when they are orthogonalized in this manner.

【0007】次に、このように構成された装置における
欠陥検査時の動作を説明する。本実施例では、粘着偏光
フィルムにアルミ膜等を貼着した所謂反射型の粘着偏光
フィルムの欠陥検査を行うものとする。この場合には、
被検査物Aは、ガラス基板1に、粘着剤層2と偏光フィ
ルム3からなる粘着偏光フィルムが貼着され、さらにそ
の偏光フィルム3に粘着剤層4を介してアルミ膜5が貼
着されるという構造になる。光源6の発した光は、光フ
ァイバ7を通ってリング型出射口8から被検査物Aのガ
ラス基板1に対して照射される。その際、照射された光
は偏光フィルタ9を通過することにより一定方向に偏光
されてから被検査物Aに到達する。そして、ガラス基板
1を透過した光は、粘着剤層2に達し、この粘着剤層2
の中の発泡の有無により、その後の作用が異なるものに
なる。図4を用いて、この光の作用について具体的に説
明する。光は粘着剤層2の中に存在する発泡14に当た
ると、大部分がその表面で反射するため、光路Xをとる
反射光が得られる。一方、発泡14に当たらない場合に
は、光路Yの如く、粘着剤層2および偏光フィルム3を
透過するため、その後にアルミ膜5で反射したとして
も、偏光フィルム3で遮断されることになり、反射光は
ほとんど得られない。
Next, the operation at the time of defect inspection in the device thus constructed will be described. In this embodiment, a so-called reflective adhesive polarizing film in which an aluminum film or the like is attached to the adhesive polarizing film is subjected to defect inspection. In this case,
In the inspection object A, an adhesive polarizing film including an adhesive layer 2 and a polarizing film 3 is attached to a glass substrate 1, and an aluminum film 5 is attached to the polarizing film 3 via an adhesive layer 4. It becomes the structure. The light emitted from the light source 6 passes through the optical fiber 7 and is emitted from the ring-shaped emission port 8 to the glass substrate 1 of the inspection object A. At this time, the irradiated light passes through the polarization filter 9 and is polarized in a certain direction before reaching the inspection object A. Then, the light transmitted through the glass substrate 1 reaches the adhesive layer 2, and the adhesive layer 2
The subsequent action depends on the presence or absence of foaming. The action of this light will be specifically described with reference to FIG. When the light hits the foam 14 present in the pressure-sensitive adhesive layer 2, most of the light is reflected on the surface, so that the reflected light taking the optical path X is obtained. On the other hand, when it does not hit the foam 14, it passes through the pressure-sensitive adhesive layer 2 and the polarizing film 3 as in the optical path Y, so that even if it is reflected by the aluminum film 5 after that, it will be blocked by the polarizing film 3. , Almost no reflected light is obtained.

【0008】被検査物Aからの反射光は、偏光フィルタ
9を透過してカメラ10で撮像される。カメラ10で撮
像された画像は、反射光が得られた部分は明るく、得ら
れなかった部分は暗くなる。画像処理部11はカメラ1
0からの画像信号を、2値化部12において所定の閾値
で2値化し、明るい方を「1」(黒画素)、暗い方を
「0」(白画素)に割り当てる。その結果、背景部分が
白画素で、発泡の存在する部分が黒画素群で表された画
像が得られる。判定部13においては、2値化された画
像に含まれる黒画素群の大きさが検出され、所定値以上
の大きさを有するものがいくつあるかによって粘着偏光
フィルムの粘着剤層の発泡欠陥の有無を判定する。
The reflected light from the inspection object A passes through the polarization filter 9 and is imaged by the camera 10. In the image captured by the camera 10, a portion where the reflected light is obtained is bright and a portion where the reflected light is not obtained is dark. The image processing unit 11 is the camera 1.
The image signal from 0 is binarized by a predetermined threshold value in the binarization unit 12, and the brighter one is assigned to “1” (black pixel) and the darker one is assigned to “0” (white pixel). As a result, an image is obtained in which the background portion is white pixels and the portion where foaming is present is represented by black pixel groups. The determination unit 13 detects the size of the black pixel group included in the binarized image, and determines the foaming defect of the pressure-sensitive adhesive layer of the pressure-sensitive adhesive polarizing film depending on how many black pixels have a size equal to or larger than a predetermined value. Determine the presence or absence.

【0009】図2は、本発明の他の実施例を示す構成図
である。図1に示した実施例とは、偏光フィルタ9の構
成を異にする。すなわち、リング型出射口8の前面にの
み偏光フィルタ9を配置するようにした。このように構
成すれば、被検査物Aからの反射光は直接カメラ10で
撮像されることになり、明暗の差が強調された画像が得
られることになる。
FIG. 2 is a block diagram showing another embodiment of the present invention. The configuration of the polarization filter 9 is different from that of the embodiment shown in FIG. That is, the polarization filter 9 is arranged only on the front surface of the ring-shaped exit 8. According to this structure, the reflected light from the inspection object A is directly captured by the camera 10, and an image in which the difference between light and dark is emphasized can be obtained.

【0010】[0010]

【発明の効果】以上、詳述したように本発明によれば、
被検査物中に偏光フィルムが含まれることを利用し、照
明手段の照射する光を所定方向に偏光する偏光部材を設
けただけで、極めて簡単な処理をもって精度良く粘着偏
光フィルムの粘着剤層の発泡欠陥を検出できる。
As described above in detail, according to the present invention,
Utilizing the fact that a polarizing film is contained in the object to be inspected, and only by providing a polarizing member that polarizes the light emitted by the illuminating means in a predetermined direction, the adhesive layer of the adhesive polarizing film can be accurately processed with extremely simple processing. Foaming defects can be detected.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of the present invention.

【図2】 本発明の他の実施例を示す構成図である。FIG. 2 is a configuration diagram showing another embodiment of the present invention.

【図3】 偏光フィルムと偏光フィルタの関係を説明す
る図である。
FIG. 3 is a diagram illustrating a relationship between a polarizing film and a polarizing filter.

【図4】 被検査物における光の作用を説明する図であ
る。
FIG. 4 is a diagram for explaining the action of light on the inspection object.

【符号の説明】[Explanation of symbols]

1 ガラス 2 粘着剤層 3 偏光フィルム 5 アルミ膜 6 光源 7 光ファイバ 8 リング型出射口 9 偏光フィルタ 10 カメラ 11 画像処理部 1 Glass 2 Adhesive Layer 3 Polarizing Film 5 Aluminum Film 6 Light Source 7 Optical Fiber 8 Ring Type Emitting Port 9 Polarizing Filter 10 Camera 11 Image Processing Section

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 透光性を有する基板と該基板に貼着され
る粘着偏光フィルムを含んだ被検査物の基板面に向けて
光を照射する照明手段と、 前記被検査物と前記照明手段の間に配置され、照明手段
の照射する光を被検査物の粘着偏光フィルムの偏光方向
と異なる方向に偏光する偏光部材と、 前記被検査物からの反射光を撮像する撮像手段と、 該撮像手段によって撮像された画像から前記粘着偏光フ
ィルムの粘着剤層の発泡欠陥を検出する画像処理手段と
を具備することを特徴とする粘着偏光フィルムの欠陥検
査装置。
1. An illuminating means for irradiating light onto a substrate surface of an object to be inspected, the substrate including a light-transmitting substrate and an adhesive polarizing film attached to the substrate, and the object to be inspected and the illuminating means. A polarizing member that is disposed between the two, and that polarizes the light emitted by the illumination unit in a direction different from the polarization direction of the adhesive polarization film of the inspection object; and an imaging unit that images reflected light from the inspection object; An image processing means for detecting a foaming defect of the pressure-sensitive adhesive layer of the pressure-sensitive adhesive polarizing film from an image picked up by the means, and a defect inspection device for the pressure-sensitive adhesive polarizing film.
JP29555893A 1993-11-25 1993-11-25 Tester for adhesive polarizing film Pending JPH07146253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29555893A JPH07146253A (en) 1993-11-25 1993-11-25 Tester for adhesive polarizing film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29555893A JPH07146253A (en) 1993-11-25 1993-11-25 Tester for adhesive polarizing film

Publications (1)

Publication Number Publication Date
JPH07146253A true JPH07146253A (en) 1995-06-06

Family

ID=17822201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29555893A Pending JPH07146253A (en) 1993-11-25 1993-11-25 Tester for adhesive polarizing film

Country Status (1)

Country Link
JP (1) JPH07146253A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09113460A (en) * 1995-10-19 1997-05-02 Sekisui Chem Co Ltd Method and apparatus for detecting defect of reflective polarization object
KR20040044071A (en) * 2002-11-18 2004-05-27 가부시키가이샤 니혼 마이크로닉스 Method and Apparatus for Inspection Display Panel
KR101396456B1 (en) * 2014-01-13 2014-05-22 세광테크 주식회사 Apparatus for inspection of ito film pattern and inspection method thereof
KR20190134103A (en) * 2018-05-24 2019-12-04 (주)쎄미시스코 Defect inspection system and method in chamber
KR20190134102A (en) * 2018-05-24 2019-12-04 (주)쎄미시스코 Target edge defect inspection system and method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09113460A (en) * 1995-10-19 1997-05-02 Sekisui Chem Co Ltd Method and apparatus for detecting defect of reflective polarization object
KR20040044071A (en) * 2002-11-18 2004-05-27 가부시키가이샤 니혼 마이크로닉스 Method and Apparatus for Inspection Display Panel
KR101396456B1 (en) * 2014-01-13 2014-05-22 세광테크 주식회사 Apparatus for inspection of ito film pattern and inspection method thereof
KR20190134103A (en) * 2018-05-24 2019-12-04 (주)쎄미시스코 Defect inspection system and method in chamber
KR20190134102A (en) * 2018-05-24 2019-12-04 (주)쎄미시스코 Target edge defect inspection system and method

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