JPH07129943A - Magnetic head slider and its production - Google Patents

Abstract

PURPOSE:To prevent the peeling of a protective film by subjecting the surface of the head slider to an ion implantation treatment, thereby optimizing the surface hardness and surface roughness of the magnetic head slider and improving the adhesion property of the protective film. CONSTITUTION:ZrO2 is used as the material of the slider 1 and a magnetic head element 2 for recording and reproducing data is mounted at the rear end of the slider 1. A reforming treatment layer 3 implanted with Ar ions at a prescribed acceleration voltage is formed on the front surface of the slider 1, i.e., the front surface part facing a magnetic disk. The surface roughness of the slider 1 is controlled by the ion implantation after lapping; for example, the center line average height Ra is set at 9nm and the max. height Rmax of the surface roughness is set at 17nm. The slider 3 is finished by lapping to Ra of about 4nm and Rmax of about 30nm, by which the surface is mirror finished. As a result, the surface hardness and surface roughness of the magnetic head slider are optimized and the peeling of the protective film is prevented by applying a lubricant on the protective film.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk device, a floppy disk device, a magnetic tape device (MT) and a VT.
In R, etc., the present invention relates to the improvement of the surface structure of a magnetic head slider for magnetic recording conversion.

[0002]

2. Description of the Related Art In a data recording device such as a magnetic disk, a floppy disk, a magnetic tape or the like, as the recording capacity increases, increasing the data transfer speed becomes an even more important issue. In order to realize this high speed, it is necessary to increase the relative speed between the recording medium and the magnetic head. However, as the speed increases, the wear of the magnetic head easily progresses, and the reliability of the recording conversion unit may be impaired. Also, from the viewpoint of tribology, it is an important issue to consider the slidability between the recording medium and the magnetic head and optimize each of them.

In the prior art, in order to optimize the material and shape of the slider surface in consideration of the magnetic characteristics, as disclosed in Japanese Patent Laid-Open No. 3-120610, the surface of the slider is protected from carbon or the like. There is known a method using a film, or a method of forming a surface protection film of a slider by using CVD, ion beam deposition or plasma vapor deposition as disclosed in Japanese Patent Laid-Open No. 4-364217.

[0004]

However, the recording spacing between the magnetic disk, which is a recording medium in recent years, and the slider is 0.2 to 0.1 micron, and it is necessary to suppress the peeling damage of the magnetic disk. The material and shape of the slider surface have become important factors. In order to deal with these problems, it is an important subject to develop a surface coating film for a slider or to solve its shape forming method.

The property required on the head slider side is to control the surface roughness rather than the hardness. That is, if the hardness is too high, sliding damage given to the disk medium becomes large, so that it is important to control the head slider shape so as to lower the surface pressure at the time of contact. With respect to this point, in the above-mentioned prior art, only increasing the hardness of the slider surface precedes, and consideration of the shape control of the head slider, that is, the control of the surface roughness is not sufficient.

An object of the present invention is to provide a magnetic head slider and a method of manufacturing the same in which the hardness and the surface roughness of the slider surface are improved in a well-balanced manner, thereby improving the sliding performance of the slider.

[0007]

In order to achieve the above object, the present invention provides a magnetic head slider having a magnetic head element attached to one side of the slider, wherein the surface of the slider facing the recording medium is It is characterized in that a modified treatment layer that has been subjected to ion implantation treatment is formed.

Further, according to the present invention, in a magnetic head slider having a magnetic head element attached to one side of the slider, a protective film is adhered to a surface of the slider surface facing the recording medium, and the entire protective film and the protective film are attached. It is characterized in that a modification treatment layer subjected to an ion implantation treatment is formed on the slider surface in the vicinity of the protective film adhesion surface.

Further, according to the present invention, each of the above magnetic head sliders is mounted on a magnetic recording device.

Further, according to the method of manufacturing a magnetic head slider of the present invention, the slider having the magnetic head element mounted on one side is heated to 100 to 500 ° C., and one of the slider surfaces facing the recording medium is heated. × 10 ¹⁵ ~
The modification treatment layer is formed on the surface of the slider on the recording medium side by ion implantation with an atomic weight in the range of 1 × 10 ¹⁹ ions / cm ² .

According to the method of manufacturing a magnetic head slider of the present invention, a protective film is adhered to a surface of the slider having a magnetic head element attached to one side thereof, the surface facing the recording medium. The slider to 100
While heating to ~ 500 ℃, 1 × on the surface of the protective film
An atomic weight in the range of 10 ¹⁵ to 1 × 10 ¹⁹ ions / cm ² is ion-implanted to form a modification treatment layer on the entire protective film and the slider surface near the protective film contact surface.

[0012]

If the surface of the magnetic head slider is too smooth, the frictional force will increase due to the adhesive force between the head and the disk, and if it is too rough, it will hinder the flying of the head. Therefore,
An ideal slider surface is one in which the tops of the protrusions are even and the appropriate roughness is introduced. That is, it has become more important to form the surface of the magnetic head slider to have a controlled surface roughness.

In the lapping plane polishing process that is usually performed, mechanical polishing results in random surface roughness, whereas the surface shape formed by ion bombardment with very high energy causes collision at the atomic level. Since the shape is changed due to, the surface shape is uniformly controlled. This makes it possible to improve the sliding characteristics of the slider.

That is, when the modification treatment layer which is subjected to the ion implantation treatment is formed on the side of the slider surface facing the recording medium as in the above structure, the slider surface or the protective film surface has an appropriate surface roughness. In addition, as a feature of the formed surface roughness, the protrusion can be reduced to a level of several nm. This makes it possible to reduce the surface pressure generated when the head portion of the local protrusion on the disk side comes into contact with the head slider, and reduce the degree of damage such as peeling of the protective film on the slider side. It will be possible.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIGS. 1 to 4 show a first embodiment of the present invention. FIG. 1 is a sectional view showing a film structure of a magnetic head slider, and FIG. 2 is an acceleration voltage at the time of ion implantation and a head surface. FIG. 3 is a diagram showing a relation of roughness, FIG. 3 is a diagram showing a sliding test result of the magnetic head slider, and FIG. 4 is a diagram showing a result of elemental analysis in a depth direction inside the slider.

In FIG. 1, ZrO ₂ is used as the material of the slider 1, and a magnetic head element 2 for recording / reproducing data is attached to the rear end portion (right side in the figure) of the slider 1. There is. On the surface of the slider 1, that is, the surface portion facing the magnetic disk as a recording medium, a modification treatment layer 3 in which Ar ions are implanted at an acceleration voltage of 10 kV is formed. The modified layer 3 is also formed on the surface layer of the magnetic head 2 on the recording medium side. The modification treatment layer 3 may be formed only on the surface of the slider 1 and not on the magnetic head 2. The ion implantation amount is 1 × 10 ¹⁵ ions / cm ² per sample area.

The surface roughness of the slider 1 is controlled by ion implantation after lapping, the center line average roughness Ra is 9 nm, and the maximum surface roughness height Rmax is 17 nm.
is set to nm. Here, the centerline average roughness Ra is a roughness display parameter that means an average of absolute values of deviations from the centerline of the sectional curve to the measurement curve, and the maximum height R
max is a value that means the height from the highest peak to the lowest valley bottom of the sectional curve.

Next, a method of manufacturing the magnetic head slider having the modified layer 3 will be described. The slider 1 is machined in advance and formed into a predetermined shape. Ra of the slider 1 to about 4 nm by lapping Rmax
Is about 30 nm, and the surface is mirror-finished. Although Ra is reduced by such mechanical polishing, Rmax, which is important for improving sliding performance, cannot be reduced because the surface roughness is random. Therefore, by implanting ions into the surface of the slider 1 facing the recording medium, shape control on the level of several atoms is performed.

Here, in order to clarify the effect of this embodiment, the following experiment was conducted. Ion implantation amount is 1 × 1 per sample area for lapping surface
Under a constant condition of 0 ¹⁷ ions / cm ² , the surface roughness of the slider surface subjected to the ion implantation treatment was measured by changing the acceleration voltage. The result is shown in FIG. In the figure, the horizontal axis represents the acceleration voltage, and the vertical axis represents the surface roughness (maximum surface roughness Rmax, center line average roughness Ra). From this result, it is not only possible to reduce Rmax by implanting ions, but Ra becomes larger by implantation. Ra has a maximum at an accelerating voltage of 10 to 20 kV, and tends to decrease before and after that. Observation of this state with a scanning tunneling microscope showed almost no change in the initial state or at an acceleration voltage of 5 kV, but the acceleration voltage was 10, 15,
It was found that the roughness increased at around 20 kv.

In the case of this embodiment, the maximum height Rmax is reduced to about 17 nm by the ion implantation process, whereas
On the contrary, Ra is slightly increased to 9 nm. this is,
Even though the average roughness was increased, the sizes of the peaks and valleys were the same, which means that the uniformity was greatly improved.

Next, a sliding drag test was conducted to evaluate the sliding resistance of the head slider having this treated surface layer. Using a magnetic disk disk coated with a perfluoropolyether lubricant on the sputtered carbon protective film and rotating at a rotation speed of 5 m / sec, the head is pressed with a load of 80 mN using a Winchester type magnetic head slider, and friction at that time The force change was measured. The result is shown in FIG. The horizontal axis represents the total number of rotations, and the vertical axis represents the frictional force.
In the case of a head not implanted with ions, the frictional force increases with the number of slides, and the head frictional force after the number of drag slides 10,000 times reaches 130 mN. On the other hand, acceleration voltage 5, 2
In the case of 0,50 kV, there was a slight increase up to 2000 rpm, but after that it remained constant and the number of sliding times was 1
The head frictional force after 0000 times is as small as 50 mN or less,
It can be seen that the effect of ion implantation is remarkable. However, when the accelerating voltage is set higher than 50 kV to 60 kV or 70 kV, the frictional force tends to increase with the number of times of sliding, and the ion implantation effect is not obtained.

From the above results, the fact that the frictional force is small in the region of accelerating voltage of 5 to 50 kV is directly related to the surface roughness of FIG. 2, and corresponds to the roughness region of roughness 4.5 nm or more. There is. From this, it can be seen that the acceleration voltage is 5 to 50 kV, which shows good sliding characteristics, and this region has a correlation with the surface roughness Ra. This frictional force is caused by damage mainly due to peeling of the slider surface.

Next, in order to clarify the internal distribution of the element injected into the head slider, it was measured by Auger electron spectroscopy. The result is shown in FIG. The injected Ar had a maximum concentration of 13 nm from the surface. Although Ar is used as the implantation ions in this embodiment, H, N, Ne,
When any one of O, B, Si, Cr, Ti, Hf, Mo, and W is used, the depth showing the maximum concentration is 2 to 40 n.
Although different from m, it has the same effect on sliding characteristics.

As described above, according to this embodiment, by optimizing the surface shape of the magnetic head slider, the magnetic head slider is less likely to be damaged, and the sliding performance is improved.

(Second Embodiment) FIG. 5 shows a second embodiment of the present invention. In this embodiment, a SiO ₂ protective film 5 having a thickness of 10 nm is formed on the surface layer of the MnZn slider 4 by RF sputtering, and N ions are applied to the SiO ₂ protective film 5 at an acceleration voltage of 5 k.
Injected at V. The cross-sectional shape at this time is shown in FIG. That is, the protective film 5 and the surface layer of the slider 4 on the recording medium side are the modified layer 6.

The sliding characteristics of the magnetic head slider of this example were evaluated. According to this, it was found that the head frictional force after drag rotation of 10,000 times was as small as 45 mN, and the effect of ion implantation was remarkable. As another effect of the present embodiment, since the SiO ₂ protective film 5 is used, it has a low hygroscopicity of water and an effect of improving the corrosion resistance reliability. The material of the slider is MnZn, but ZrO ₂ ,
Similar effects were observed in the case of NiZn, Al ₂ O ₃ —TiC, and CaTiO ₃ .

(Third Embodiment) FIG. 6 shows a third embodiment of the present invention. The magnetic head slider of the present embodiment is A
A slider 7 made of l ₂ O ₃ —TiC bulk material and a magnetic head (MR type magnetic head) 12 by a magnetoresistive effect are attached to the rear end portion. And slider 7
A protective film having a three-layer structure in which a SiO ₂ protective film 8, a C protective film 9, and a Si protective film 10 are laminated in this order is formed on the surface of the surface facing the recording medium. SiO ₂ protective film 8, C
The thickness of each of the protective film 9 and the Si protective film 10 is 10 nm,
20 nm and 10 nm.

On the surface of the slider on which the three-layer protective film is formed, N ions are implanted at an acceleration voltage of 40 kV and an implantation amount of 1 × 10.
Implanted at ¹⁹ ions / cm ² . Further, the magnetic head slider was heated to about 200 ° C. in the charging chamber and treated with an ion implantation amount of 1 × 10 ¹⁹ ions / cm ² . As a result, it was found that the head frictional force after drag rotation of 10,000 times was 35 mN, which was very small, and the effect of ion implantation was remarkable. Further, in the case of these plural thin films, there is also an effect that the adhesiveness is significantly improved as compared with the atom collision diffusion by the injected atoms. Further, in the case of the MR type magnetic head, the breakdown of the head element may be a problem due to the discharge between the head and the disk. It also has an effect on the discharge breakdown of the magnetic head.

(Fourth Embodiment) FIG. 4 shows a fourth embodiment of the present invention, and shows a magnetic disk device equipped with the magnetic head slider shown in each of the above embodiments. A disk-shaped magnetic disk 13 for magnetic recording is rotated at a high speed by a spindle, and a magnetic head 14 for recording data thereon is attached to the tip of a support spring body 16 and can be positioned on an arbitrary radius. It is configured so that it can be driven by the coil motor 15. The surface layer of the magnetic head slider modified by ion implantation is formed on the lower surface of the magnetic head 14 facing the magnetic disk, and this surface exhibits very good sliding characteristics with respect to the magnetic disk 13. Not only is the reliability of the magnetic disk device improved, but the flying height of the head can be made extremely low, so that there is an effect that a high recording density can be realized.

The magnetic head slider shown in each of the above embodiments can be mounted not only on the magnetic disk device but also on a floppy disk device, a magnetic tape device, a VTR and the like.

[0031]

As described above, according to the present invention,
Since the surface of the magnetic head slider was ion-implanted,
The hardness and surface roughness of the magnetic head slider surface can be optimized, and the sliding performance with respect to the recording medium can be improved.

Also, the hardness and surface roughness of the protective film can be optimized by ion implantation, whereby the adhesion of the protective film can be improved and the protective film can be prevented from peeling.

Further, if the magnetic head slider of the present invention is mounted on a magnetic recording device, the reliability of the magnetic recording device can be improved and a higher recording density of the magnetic recording device can be realized.

[Brief description of drawings]

FIG. 1 is a sectional view of a magnetic head slider according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a relationship between an acceleration voltage at the time of ion implantation and head surface roughness.

FIG. 3 is a diagram showing a sliding test result of a magnetic head slider.

FIG. 4 is a composition distribution diagram inside a magnetic head slider.

FIG. 5 is a sectional view of a magnetic head slider according to a second embodiment of the present invention.

FIG. 6 is a sectional view of a magnetic head slider according to a third embodiment of the present invention.

FIG. 7 is a perspective view of a magnetic disk device equipped with a magnetic head slider of the present invention.

[Explanation of symbols]

1, 4, 7 Slider 2 Magnetic head element 3, 6, 11 Modification treatment layer 5 Protective film 8 SiO ₂ protective film 9 C protective film 10 Si protective film 12 MR type magnetic head 13 Magnetic disk 14 Magnetic head 15 Voice coil motor 16 Support spring

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Iwa Matsuyama 2880 Kokufu, Odawara, Kanagawa Stock Company Hitachi Storage Systems Division (72) Inventor Shuichi Kojima 2880, Kokuzu, Odawara, Kanagawa Hitachi Storage Co., Ltd. System Division

Claims (11)

[Claims] 1. A magnetic head slider having a magnetic head element attached to one side of the slider, wherein a surface of the slider facing the recording medium is provided with an ion-implanted modification layer. A magnetic head slider characterized by. 2. A magnetic head slider having a magnetic head element attached to one side of a slider, wherein a protective film is adhered to a surface of the slider surface facing a recording medium, and the entire protective film and the protective film adhered surface. A magnetic head slider, characterized in that a modified treatment layer subjected to an ion implantation treatment is formed on a surface of the slider in the vicinity thereof. 3. The magnetic head slider according to claim 1, wherein the modification treatment layer is also formed on a surface layer portion of the magnetic head element on the recording medium side. 4. The magnetic head slider according to claim 1, wherein the modification treatment layer has an acceleration voltage of 5 to 50 kV.
A magnetic head slider, which is a layer ion-implanted under the conditions. 5. The magnetic head slider according to claim 1, wherein the elements to be ion-implanted into the modified layer are N, H, Ar, Ne, O, B, Si, Cr, Ti,
A magnetic head slider characterized by being one of Hf, Mo, and W. 6. The magnetic head slider according to claim 1 or 2, wherein the depth distribution of the element introduced by the ion implantation is 2 from the slider surface or the protective film surface.
A magnetic head slider having a distribution having a maximum value in a deep layer of nm to 40 nm. 7. The magnetic head slider according to claim 1, wherein the slider is MnZn, NiZn, A.
A magnetic head slider comprising any one of 1 ₂ O ₃ —TiC, CaTiO ₃ , and ZrO ₂ . 8. The magnetic head slider according to claim 1 or 2, wherein the protective film is SiO ₂ , C, Si, BN.
1-layer structure composed of either or SiO _2,,
A magnetic head slider having a laminated structure in which a plurality of types of C, Si and BN are laminated. 9. A magnetic recording device equipped with the magnetic head slider according to claim 1. 10. A slider having a magnetic head element attached to one side is heated to 100 to 500 ° C., and 1 × 1 is formed on the surface of the slider facing the recording medium.
A method of manufacturing a magnetic head slider, which comprises implanting an atomic weight in the range of 0 ¹⁵ to 1 × 10 ¹⁹ ions / cm ² to form a modified treatment layer on the recording medium side surface of the slider. 11. A slider having a magnetic head element attached to one side thereof, a protective film is adhered to a surface of the slider facing the recording medium, and then the slider is heated to 100 to 500.degree. At the same time, an atomic weight of 1 × 10 ¹⁵ to 1 × 10 ¹⁹ ions / cm ² is ion-implanted into the surface of the protective film, and a modification treatment layer is formed on the entire surface of the protective film and the slider surface near the protective film adhesion surface. Of manufacturing a magnetic head slider for forming a magnetic field.