JPH07109495A - Cleaning of element sealed with epoxy resin - Google Patents
Cleaning of element sealed with epoxy resinInfo
- Publication number
- JPH07109495A JPH07109495A JP25835693A JP25835693A JPH07109495A JP H07109495 A JPH07109495 A JP H07109495A JP 25835693 A JP25835693 A JP 25835693A JP 25835693 A JP25835693 A JP 25835693A JP H07109495 A JPH07109495 A JP H07109495A
- Authority
- JP
- Japan
- Prior art keywords
- epoxy resin
- cleaning
- sealed
- weight
- element sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、主に電子材料の分野で
使用されるエポキシ樹脂封止素子の洗浄方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning an epoxy resin-sealed element mainly used in the field of electronic materials.
【0002】[0002]
【従来の技術】封止素子は、例えば銅または銀などの導
体基盤をエポキシ樹脂、フェノール樹脂、ケイ素樹脂な
どの封止剤で封じたものを成形することにより製造され
る。かかる封止素子を製造する場合、樹脂由来のバリが
封止素子の表面に残存するため、従来、フロン系あるい
は塩素系の洗浄溶剤が主に使用されてきた。2. Description of the Related Art A sealing element is manufactured by molding a conductor base made of, for example, copper or silver, which is sealed with a sealant such as epoxy resin, phenol resin or silicon resin. When manufacturing such a sealing element, burr derived from resin remains on the surface of the sealing element, so that a fluorocarbon-based or chlorine-based cleaning solvent has been mainly used.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、これら
の溶剤は安全性、環境への影響などが大きな問題とな
り、その使用が規制されつつある。そこで、これらの代
用洗浄剤あるいはそれを用いた洗浄方法の開発が急務と
なってきている。現在、代用洗浄剤としては万能のもの
はなく、封止素子の樹脂の種類によっても、洗浄剤ある
いは洗浄方法を都度検討していかなければならないとい
う状況にある。However, these solvents pose major problems in terms of safety and environmental impact, and their use is being regulated. Therefore, there is an urgent need to develop these substitute cleaning agents or cleaning methods using them. Currently, there is no universal cleaning agent as a substitute, and there is a situation in which a cleaning agent or a cleaning method must be considered each time depending on the type of resin of the sealing element.
【0004】例えば、米国特許第3551204号明細
書には、ポリウレタン及びエポキシ樹脂の系を溶解する
ための洗浄組成物が提案されている.この洗浄組成物は
0.1〜3重量部の水と、3〜7重量部の水酸化金属
と、90〜96.9重量部のエチレングリコールモノア
ルキルエーテルからなる。これをエポキシ樹脂封止素子
に適用することも考えられるが、封止素子の表面に金属
イオンが残留するなど、製品としての信頼性を著しく損
ねる恐れがある。For example, US Pat. No. 3,551,204 proposes a cleaning composition for dissolving polyurethane and epoxy resin systems. The cleaning composition comprises 0.1 to 3 parts by weight water, 3 to 7 parts by weight metal hydroxide, and 90 to 96.9 parts by weight ethylene glycol monoalkyl ether. It may be possible to apply this to an epoxy resin encapsulation element, but there is a possibility that reliability as a product may be significantly impaired, for example, metal ions may remain on the surface of the encapsulation element.
【0005】[0005]
【課題を解決するための手段】本発明者等は、より厳格
な洗浄が要求される主に電子材料の分野で使用されるエ
ポキシ樹脂封止素子の洗浄方法について鋭意検討した結
果、以下の発明を完成した。即ち、本発明はエポキシ樹
脂封止素子を、N−メチル−2−ピロリドン70〜90
重量%と脂肪族アミン10〜30重量%を含有する洗浄
液に50〜100℃で浸漬処理し、次いで、水洗するこ
とを特徴とするエポキシ樹脂封止素子の洗浄方法に関す
る。Means for Solving the Problems The inventors of the present invention have earnestly studied a method for cleaning an epoxy resin-sealed element mainly used in the field of electronic materials, which requires more rigorous cleaning, and as a result, Was completed. That is, the present invention provides an epoxy resin-sealed element with N-methyl-2-pyrrolidone 70-90.
The present invention relates to a method for cleaning an epoxy resin-sealed element, which comprises immersing in a cleaning liquid containing 10% by weight of an aliphatic amine and 50% by weight of an aliphatic amine at 50 to 100 ° C., and then washing with water.
【0006】以下本発明につき更に詳細に説明する。本
発明の洗浄対象である封止素子はエポキシ樹脂からなる
ものである。エポキシ樹脂としては、最も代表的なもの
はビスフェノールAとエピクロロヒドリンとの縮合物で
あり、この樹脂に、通常、脂肪族アミン、無水フタル
酸、フェノール樹脂等を硬化剤として加えたものが例示
される。特に、ビスフェノールAの両側水酸基をグリシ
ジルエーテルにしたタイプのものが封止剤として多く使
用されている。その他、脂肪酸エポキシ樹脂、脂環式エ
ポキシ樹脂、グリシジルエステル樹脂等がある。The present invention will be described in more detail below. The sealing element to be cleaned in the present invention is made of epoxy resin. The most representative epoxy resin is a condensate of bisphenol A and epichlorohydrin, and a resin obtained by adding an aliphatic amine, phthalic anhydride, a phenol resin or the like as a curing agent to this resin is usually used. It is illustrated. In particular, a type in which both side hydroxyl groups of bisphenol A are glycidyl ether is often used as a sealant. In addition, there are fatty acid epoxy resin, alicyclic epoxy resin, glycidyl ester resin and the like.
【0007】本発明の洗浄液で使用される脂肪族アミン
としては、メチルアミン、エチルアミン、イソプロピル
アミン、ジエチルアミン、トリエチルアミン、エチレン
ジアミン、テトラメチルエチレンジアミン、シクロヘキ
シルアミン等のアルキルアミン、また、エタノールアミ
ン、ジエタノールアミン、トリエタノールアミン、N−
メチルジエタノールアミン、2−メチルアミノエタノー
ル等のアルカノールアミンが例示され、通常1〜10、
好ましくは2〜6程度の炭素数を有し、N−メチル−2
−ピロリドン及び水に相溶性である必要がある。これら
の脂肪族アミンは複数の種類のものを併用してもよい。Examples of the aliphatic amine used in the cleaning solution of the present invention include alkylamines such as methylamine, ethylamine, isopropylamine, diethylamine, triethylamine, ethylenediamine, tetramethylethylenediamine and cyclohexylamine, as well as ethanolamine, diethanolamine and triamine. Ethanolamine, N-
Alkanolamines such as methyldiethanolamine and 2-methylaminoethanol are exemplified, and usually 1 to 10,
Preferably, it has about 2 to 6 carbon atoms and N-methyl-2
Must be compatible with pyrrolidone and water. These aliphatic amines may be used in combination of a plurality of types.
【0008】洗浄液の組成としては、N−メチル−2−
ピロリドンを70〜90重量%、好ましくは75〜85
重量%含有し、また、脂肪族アミンを10〜30重量
%、好ましくは15〜25重量%含有するものである。
脂肪族アミンの含有量が10重量%未満ではエポキシ樹
脂表面の表面の軟化が著しく封止素子が変形する恐れが
あるので好ましくない。一方、脂肪族アミンの含有量が
30重量%を越えるとバリ取り洗浄効果が著しく低下す
るので好ましくない。The composition of the cleaning liquid is N-methyl-2-
70-90% by weight of pyrrolidone, preferably 75-85
% By weight, and 10 to 30% by weight, preferably 15 to 25% by weight, of an aliphatic amine.
When the content of the aliphatic amine is less than 10% by weight, the surface of the epoxy resin is significantly softened and the sealing element may be deformed, which is not preferable. On the other hand, when the content of the aliphatic amine exceeds 30% by weight, the deburring and cleaning effect is significantly reduced, which is not preferable.
【0009】また、上記洗浄液においては、他の溶媒
も、それらが悪影響を与えない範囲で含有させることが
できる。他の溶媒としては、アルコール類、エーテル
類、エステル類、芳香族炭化水素類、脂環式炭化水素類
などである。なお、洗浄液中にアルカリ金属又はアルカ
リ土類金属化合物を少量添加することによりバリ取り洗
浄自体の効果を高めることは可能であるが、封止素子の
表面に金属イオンが残留しやすく、製品としての信頼性
を著しく損ねる場合があるので、通常はこれらを洗浄液
に添加すべきでない。Further, in the above-mentioned cleaning liquid, other solvents can be contained within the range where they do not adversely affect. Other solvents include alcohols, ethers, esters, aromatic hydrocarbons and alicyclic hydrocarbons. It is possible to enhance the effect of deburring and cleaning itself by adding a small amount of an alkali metal or alkaline earth metal compound to the cleaning liquid, but metal ions are likely to remain on the surface of the sealing element, and the product is They should not normally be added to the wash liquor as they can significantly impair reliability.
【0010】本発明の洗浄方法は、エポキシ樹脂封止素
子を上記洗浄液に浸漬させることにより達成される。浸
漬によりエポキシ樹脂封止素子全体に渡って洗浄がなさ
れることが好ましく、更に、洗浄効果を高めるために洗
浄液の撹拌、ガスバブリング、超音波をかけるなどを実
施してもよい。また、洗浄温度は50〜100℃、好ま
しくは60〜90℃である。100℃を越えると封止素
子が変形する恐れがなるので好ましくなく、一方、50
℃未満ではバリ取り洗浄効果が著しく低下するので好ま
しくない。洗浄時間は洗浄温度との関係で適時設定すれ
ばよいが、通常1〜60分、好ましくは5〜30分の範
囲で実施される。The cleaning method of the present invention is achieved by immersing the epoxy resin-sealed element in the cleaning liquid. It is preferable that the entire epoxy resin-sealed element is washed by immersion, and further, in order to enhance the washing effect, stirring of the washing liquid, gas bubbling, application of ultrasonic waves, or the like may be performed. The washing temperature is 50 to 100 ° C, preferably 60 to 90 ° C. If the temperature exceeds 100 ° C, the sealing element may be deformed, which is not preferable.
If the temperature is lower than 0 ° C, the deburring and cleaning effect is significantly reduced, which is not preferable. The washing time may be appropriately set in relation to the washing temperature, but is usually 1 to 60 minutes, preferably 5 to 30 minutes.
【0011】次に、上記洗浄を行った後は、水洗により
洗浄液を洗い落とし、その後、通常は乾燥して製品とす
る。Next, after the above washing, the washing liquid is washed off with water and then dried to obtain a product.
【0012】[0012]
【実施例】以下、実施例により本発明を更に詳細に説明
するが、本発明はその要旨を越えない限り以下の実施例
に限定されるものではない。 実施例1〜4、比較例1〜3 表−1に示す組成の洗浄液を80℃に加温し、これにエ
ポキシ樹脂を用いて製造された封止素子を浸漬し、20
分間浸漬処理を行った。洗浄後、水洗、乾燥を行った。
洗浄処理前後の封止素子バリの除去の程度及び表面の変
形の有無について、光学顕微鏡を用いて観察した。以上
の結果を表−1に示す。The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to the following examples unless it exceeds the gist. Examples 1 to 4 and Comparative Examples 1 to 3 A cleaning liquid having the composition shown in Table 1 was heated to 80 ° C., and a sealing element manufactured using an epoxy resin was immersed in the cleaning liquid, and 20
Immersion treatment was performed for a minute. After washing, it was washed with water and dried.
The degree of removal of the sealing element burr before and after the cleaning process and the presence or absence of surface deformation were observed using an optical microscope. The above results are shown in Table-1.
【0013】表−1において、NMPはN−メチル−2
−ピロリドンを表し、また、洗浄後のIC封止素子表面
の観察結果を以下の記号で示した。 ○…バリが完全に除去されている。 △…バリがわずかに残存している。 ×…バリの大部分が残存している。In Table 1, NMP is N-methyl-2.
Represents pyrrolidone, and the observation result of the surface of the IC sealing element after washing is shown by the following symbols. ○: Burrs are completely removed. Δ: A slight amount of burr remained. X: Most of the burr remains.
【0014】[0014]
【表1】 [Table 1]
【0015】[0015]
【発明の効果】本発明の洗浄方法により、エポキシ樹脂
封止素子の表面を損ねることなく効率よく洗浄すること
ができるので、電子部品などとして使用されるような信
頼性の高いエポキシ樹脂封止素子製品を供給することが
可能となる。According to the cleaning method of the present invention, the epoxy resin-sealed element can be efficiently cleaned without damaging the surface of the epoxy resin-sealed element, and thus the highly reliable epoxy resin-sealed element used as an electronic component or the like. It becomes possible to supply products.
Claims (1)
2−ピロリドン70〜90重量%と脂肪族アミン10〜
30重量%を含有する洗浄液に50〜100℃で浸漬処
理し、次いで、水洗することを特徴とするエポキシ樹脂
封止素子の洗浄方法。1. An epoxy resin-sealed element is formed of N-methyl-
2-pyrrolidone 70-90% by weight and aliphatic amine 10-
A method for cleaning an epoxy resin-sealed element, comprising immersing in a cleaning liquid containing 30% by weight at 50 to 100 ° C., and then rinsing with water.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25835693A JPH07109495A (en) | 1993-10-15 | 1993-10-15 | Cleaning of element sealed with epoxy resin |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25835693A JPH07109495A (en) | 1993-10-15 | 1993-10-15 | Cleaning of element sealed with epoxy resin |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07109495A true JPH07109495A (en) | 1995-04-25 |
Family
ID=17319099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25835693A Pending JPH07109495A (en) | 1993-10-15 | 1993-10-15 | Cleaning of element sealed with epoxy resin |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07109495A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003027196A1 (en) * | 2001-08-31 | 2003-04-03 | Stripp Chemicals Ab | Means for removing of paint from objects |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS565899A (en) * | 1979-06-26 | 1981-01-21 | Ibm | Claning composition |
JPH0425597A (en) * | 1990-05-22 | 1992-01-29 | Rasa Kogyo Kk | Detergent for removing soldering flux |
JPH04283240A (en) * | 1991-03-11 | 1992-10-08 | Nishiyama Stainless Chem Kk | Solvent for epoxy resin |
-
1993
- 1993-10-15 JP JP25835693A patent/JPH07109495A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS565899A (en) * | 1979-06-26 | 1981-01-21 | Ibm | Claning composition |
JPH0425597A (en) * | 1990-05-22 | 1992-01-29 | Rasa Kogyo Kk | Detergent for removing soldering flux |
JPH04283240A (en) * | 1991-03-11 | 1992-10-08 | Nishiyama Stainless Chem Kk | Solvent for epoxy resin |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003027196A1 (en) * | 2001-08-31 | 2003-04-03 | Stripp Chemicals Ab | Means for removing of paint from objects |
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