JPH0696844A - Graphite heating element and manufacture thereof - Google Patents

Graphite heating element and manufacture thereof

Info

Publication number
JPH0696844A
JPH0696844A JP41793090A JP41793090A JPH0696844A JP H0696844 A JPH0696844 A JP H0696844A JP 41793090 A JP41793090 A JP 41793090A JP 41793090 A JP41793090 A JP 41793090A JP H0696844 A JPH0696844 A JP H0696844A
Authority
JP
Japan
Prior art keywords
heating
graphite heating
heat
resistant insulator
slits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP41793090A
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Japanese (ja)
Other versions
JP3050925B2 (en
Inventor
Hiroyuki Hirano
Masaaki Kawakami
雅昭 川上
博之 平野
Original Assignee
Hiroyuki Hirano
Toyo Tanso Kk
博之 平野
東洋炭素株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hiroyuki Hirano, Toyo Tanso Kk, 博之 平野, 東洋炭素株式会社 filed Critical Hiroyuki Hirano
Priority to JP2417930A priority Critical patent/JP3050925B2/en
Publication of JPH0696844A publication Critical patent/JPH0696844A/en
Application granted granted Critical
Publication of JP3050925B2 publication Critical patent/JP3050925B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

(57) [Summary] (Correction) [Purpose] To provide a reinforced structure of a heating element that enhances the uniformity of temperature distribution by strengthening a slit-type graphite heating element and prevents damage and electric leakage accidents. [Structure] In a slit type graphite heating element 1, a heat resistant insulator 3 is fitted to the upper end or the lower end between the slits 2.

Description

The present invention relates to a slit type graphite heating element and a method for manufacturing the same, and an object thereof is to provide a reinforced structure for preventing the heating element from bending. It is in. [Prior Art] Most of the graphite heating elements, for example, for a single crystal pulling furnace, a high temperature vacuum furnace, a high temperature pressurizing furnace and the like are used in a slit shape. The slit type heating element includes not only a slit type heating element which is usually used but also a shape in which individual graphite heating elements are assembled in a lattice shape or a spiral shape. In this slit type graphite heating element, there is a big problem that the slit type graphite heating element is bent due to its own weight and contacts between the slits in an extreme case. In addition, problems such as non-uniform temperature distribution and contact with internal furnace structures also occur. In a remarkable case, it may cause mechanical damage due to excessive bending or an electric leakage accident. This difficulty occurs remarkably when the size of the heating element that is supported by two terminals is increased due to the restriction of the shape of the furnace, when the number of slit divisions is large and the element is thin, and particularly when a large heater is used. Tend. [Problems to be solved by the invention] Therefore, the problem to be solved by the present invention is to overcome the above problems, measure the strengthening of the graphite heating element, enhance the uniformity of the temperature distribution, and prevent damage and leakage accidents. It is to provide a reinforced structure of a heating element to prevent. [Means for Solving the Problem] This problem is solved by fitting a heat resistant insulator to the upper ends or / and the lower ends between the slits of the slit type graphite heating element. [Operation and Configuration of the Invention] The basic feature of the present invention is to apply a heat-resistant insulator as a reinforcing material to the upper and / or lower ends between the slits of the graphite heating element. This prevents the slit type graphite heating element from bending due to its own weight,
It is possible to greatly reduce the contact between the slits. In addition, the temperature distribution becomes uniform, and problems such as contact with internal furnace structures are effectively prevented. As a result, mechanical damage and electric leakage accidents are naturally prevented. In the present invention, the slit type heating element means a heating element having a slit, and includes not only an ordinary slit processed and applied but also an assembly type and a helical heating element. These substantially have slits. In the present invention, the means for applying the heat resistant insulator to the slit type graphite heating element is not particularly limited as long as it is a method capable of fitting the heat resistant insulator between the slits of the heating element,
Typical examples are as follows. For example, the heat-resistant insulator (3) shown in FIG.
It is fitted to the upper end between the slits (2) of the graphite heating element (1) shown in FIG. At this time, the graphite heating element is processed (cut) in advance as shown in FIG. 1C so that the insulator (3) can be fitted therein. An example of the shape of the heat resistant insulator (3) is shown in FIG. 1 (a), but other shapes such as those shown in FIGS. 2 (a) and 2 (b) can be mentioned. Also in this case, the heating element (1) is previously processed as shown in (c) and (d) of FIG. In the present invention, the shape is not limited as long as the heat resistant insulator can be fitted to the upper end or the lower end between the slits. In the present invention, the heat resistant insulator (3) may be fitted only in the slits (2), but may be fixed by an appropriate means if necessary. This example is shown in FIG. 3, and is fixed by a fixing screw or bolt (4). Further, particularly when the heat resistant insulator (3) is fitted to the lower end of the graphite heating element (1),
As shown in FIGS. 3 and 4, it is preferable to use bolts or screws to prevent it from falling. When this fitting means is adopted, the upper end of the graphite heating element or (and)
The lower end and the insulator may be flush with each other (as shown in FIGS. 1-2), or the insulator may be fitted into the heating element (see FIGS. 3-4). It may be in a state of slightly protruding from the heating element. The place where the heat-resistant insulator (3) is applied to the graphite heating element (1) may be the upper end or / and the lower end of the heating element (1). Further, it may be applied to the slits one by one, or two or more slits may be put together and reinforced with one heat resistant insulator. In an extreme case, the upper end or the lower end may be reinforced with one insulator. Further, either the upper end or the lower end of the graphite heating element may be used, and both may be reinforced at the same time. The number of heat-resistant insulators to be reinforced is not limited in any way, and in essence, at least one is acceptable as long as it can prevent bending,
It is preferable to fit all the slits. The heat-resistant insulator used in the present invention has sufficient heat resistance at the temperature at which the graphite heating element is used, has insulation properties, and does not lead to destruction due to the difference in thermal expansion from graphite. A wide variety of materials are appropriately selected and used. As the heat resistance in this case, those having a heat resistance of 1000 ° C. or higher, which do not cause a chemical reaction with a carbon material or a silicon carbide material, and which are poor conductors of electricity are preferably used. Typical specific examples are silicon carbide and boron nitride, and as the silicon carbide, there are ordinary silicon carbide, sintered silicon carbide, CVD silicon carbide, and CVR silicon carbide (carbon material coated with silicon carbide). Etc. can be illustrated as a specific example. The graphite heating element used in the present invention is usually a slit heating element, and any heating element can be used as long as it is such a heating element. Also, as the shape thereof, all those having an appropriate shape such as a flat plate shape and a ring shape are included. The heating element can be used for all the applications that have been conventionally used, for example, silicon single crystal pulling, metal melting, metallurgical use, etc. can be exemplified as representative examples, and various other uses such as ceramic sintering, hot pressing, etc. It can be used for all kinds of electric furnaces. [Examples] The present invention will be described in detail below with reference to Examples. Example 1 The graphite heating element (1) shown in FIG. 1 (b) was reinforced. The heating element (1) shown in FIG. 1 is an example of a vertically meandering flat plate heating element, and is an isotropic high-density graphite material (Toyo Tanso Co., Ltd.).
The product "IG-11") was used as the heating element (1), and the heat resistant insulator (3) was fitted to the upper end of the slit (2) of this heating element. However, as the heat resistant insulator, a silicon carbide molded body (“SOLIX” CVR method SiC manufactured by Toyo Tanso Co., Ltd.) was processed into a shape as shown in FIG. At this time, the total resistance was 0.17Ω at room temperature depending on the presence or absence of the heat resistant insulator, and no change in the total resistance was observed even when the heat resistant insulator was applied. Further, the effect on the flexure when the heat resistant insulating material was applied was 0.18 mm as compared with the flexure of 1.19 mm when the heat resistant insulating material was not used, which was a decrease of about 1.0 mm. Example 2 This example is an example in which a heat resistant insulator is applied to both the upper end and the lower end as shown in FIG. However, as the heating element and the heat resistant insulator, the same materials as in Example 1 were used. As for the fitting of the insulator between the slits, the upper end is shown in Fig. 3 and the lower end is shown in Fig. 4.
The procedure was as shown. The bending prevention effect was almost the same as in Example 1. Example 3 This is applied to a heating element for pulling up semiconductor silicon as shown in FIG. Also in this example, the heating element and the heat-resistant insulator used were the same materials as in Example 1. However, in this example, the upper end was made of the insulating material shown in FIG. 2 (a), and the lower end was fixed by using screws as shown in FIG. The bending prevention effect was almost the same as in Example 1. Example 4 This example is an example in which a heat resistant insulator is applied between slits in the case where individual graphite heating elements are assembled in a lattice shape as shown in FIG. However, the heating element was made of the same material as in Example 1, and boron nitride was cut and used as the heat resistant insulator. Fitting the insulator between the slits
The upper end was as shown in FIG. 3 and the lower end was as shown in FIG. The bending prevention effect was almost the same as in Example 1. Example 5 An example in which a heat resistant insulator is applied to the spiral slit type heating element shown in FIG. 8 is shown. However, the heating element was made of the same material as in Example 1, boron nitride was used as the heat-resistant insulating material, and the one having the shape shown in FIG. 8 was used. The upper end was as shown in FIG. 3 and the lower end was as shown in FIG. Results similar to those in Example 1 were obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows an example of a graphite heating element and a heat-resistant insulating material used when fitting a heat-resistant insulating material to a graphite heating element. The figure (b) shows the heating element, and the figure (c).
FIG. 4 is an explanatory view showing a state where the heating element is processed. FIGS. 2 (a) and 2 (b) show another example of the heat-resistant insulator used in the present invention, and FIG. 2 (c) shows the same when the insulator of FIG. 2 (a) is fitted to the heating element. It is explanatory drawing which shows the processed state of a heat generating body. 3 to 4 are explanatory views showing a state in which an insulator is fitted to a heating element. 5 to 8 are explanatory views showing another example in which an insulator is fitted to a heating element. 1 ... Graphite heating element 2 ... Slit 3 ... Heat-resistant insulator 4 ... Fixing screw or bolt (above)

Claims (1)

  1. Claims: (1) A graphite heating element of the slit type, wherein a heat-resistant insulator is fitted to the upper end and / or the lower end between the slits. (2) The heating element according to claim (1), wherein the heat-resistant insulator is silicon carbide or boron nitride. (3) A method for producing a graphite heating element, characterized in that a heat resistant insulator is fitted to the upper end and / or the lower end between the slits of the slit type graphite heating element.
JP2417930A 1990-12-17 1990-12-17 Graphite heating element and method for producing the same Expired - Fee Related JP3050925B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2417930A JP3050925B2 (en) 1990-12-17 1990-12-17 Graphite heating element and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2417930A JP3050925B2 (en) 1990-12-17 1990-12-17 Graphite heating element and method for producing the same

Publications (2)

Publication Number Publication Date
JPH0696844A true JPH0696844A (en) 1994-04-08
JP3050925B2 JP3050925B2 (en) 2000-06-12

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JP2417930A Expired - Fee Related JP3050925B2 (en) 1990-12-17 1990-12-17 Graphite heating element and method for producing the same

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JP (1) JP3050925B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000032906A1 (en) * 1998-11-27 2000-06-08 Shigeki Nagatomo Sardine-bone construction method for large-section tunnel
WO2001008450A1 (en) * 1999-07-22 2001-02-01 Toyo Tanso Co., Ltd. Heating element
KR100856802B1 (en) * 2006-10-19 2008-09-05 (주) 이노쎄라 Silicon carbide heater and semiconductor diffusion device having the heater
JP2013118088A (en) * 2011-12-02 2013-06-13 Momentive Performance Materials Inc Cylindrical heater and manufacturing method therefor
JP2014523388A (en) * 2011-06-21 2014-09-11 ジーティーエイティー・コーポレーション Apparatus and method for the conversion of silicon tetrachloride to silane trichloride
JP2017521824A (en) * 2014-06-13 2017-08-03 モーメンティブ・パフォーマンス・マテリアルズ・インク One-coat encapsulated graphite heater and process

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000032906A1 (en) * 1998-11-27 2000-06-08 Shigeki Nagatomo Sardine-bone construction method for large-section tunnel
US6520718B1 (en) 1998-11-27 2003-02-18 Shigeki Nagatomo, Et Al. Sardine-bone construction method for large-section tunnel
WO2001008450A1 (en) * 1999-07-22 2001-02-01 Toyo Tanso Co., Ltd. Heating element
EP1209950A1 (en) * 1999-07-22 2002-05-29 Toyo Tanso Co., Ltd. Heating element
EP1209950A4 (en) * 1999-07-22 2005-04-20 Toyo Tanso Co Heating element
KR100856802B1 (en) * 2006-10-19 2008-09-05 (주) 이노쎄라 Silicon carbide heater and semiconductor diffusion device having the heater
JP2014523388A (en) * 2011-06-21 2014-09-11 ジーティーエイティー・コーポレーション Apparatus and method for the conversion of silicon tetrachloride to silane trichloride
JP2013118088A (en) * 2011-12-02 2013-06-13 Momentive Performance Materials Inc Cylindrical heater and manufacturing method therefor
JP2017521824A (en) * 2014-06-13 2017-08-03 モーメンティブ・パフォーマンス・マテリアルズ・インク One-coat encapsulated graphite heater and process
CN107079532A (en) * 2014-06-13 2017-08-18 莫门蒂夫性能材料股份有限公司 The graphite heater and technique of single coating encapsulation
EP3155870A4 (en) * 2014-06-13 2018-02-28 Momentive Performance Materials Inc. One-coat encapsulated graphite heater and process
US10687393B2 (en) 2014-06-13 2020-06-16 Momentive Performance Materials Inc. One-coat encapsulated graphite heater and process

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Publication number Publication date
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