JPH069498Y2 - スピンドライヤ - Google Patents
スピンドライヤInfo
- Publication number
- JPH069498Y2 JPH069498Y2 JP1987043605U JP4360587U JPH069498Y2 JP H069498 Y2 JPH069498 Y2 JP H069498Y2 JP 1987043605 U JP1987043605 U JP 1987043605U JP 4360587 U JP4360587 U JP 4360587U JP H069498 Y2 JPH069498 Y2 JP H069498Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- liquid
- drive shaft
- liquid container
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 63
- 238000005192 partition Methods 0.000 claims description 29
- 238000007789 sealing Methods 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000000428 dust Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987043605U JPH069498Y2 (ja) | 1987-03-24 | 1987-03-24 | スピンドライヤ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987043605U JPH069498Y2 (ja) | 1987-03-24 | 1987-03-24 | スピンドライヤ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63152654U JPS63152654U (enrdf_load_stackoverflow) | 1988-10-06 |
| JPH069498Y2 true JPH069498Y2 (ja) | 1994-03-09 |
Family
ID=30860620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987043605U Expired - Lifetime JPH069498Y2 (ja) | 1987-03-24 | 1987-03-24 | スピンドライヤ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069498Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586963A (en) * | 1978-12-22 | 1980-07-01 | Hitachi Ltd | Sealing device |
| DE3527516A1 (de) * | 1984-08-01 | 1986-02-13 | FSI Corp., Chaska, Minn. | Vorrichtung zum bespruehen von substratflaechen oder plaettchen, insbesondere fuer elektronische schaltungen oder bauteile |
-
1987
- 1987-03-24 JP JP1987043605U patent/JPH069498Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63152654U (enrdf_load_stackoverflow) | 1988-10-06 |
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