JPH0681717B2 - Piezoelectric element motion converter and method of manufacturing the same - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motion converting device for a piezoelectric element mainly used in a print head and a method for manufacturing the same.

(Prior Art) A motion converting device for a piezoelectric element is disclosed, for example, in Japanese Patent Application No. 62-165955, Japanese Patent Application No. 62-286896, etc., which have already been developed by the same applicant.

In addition, in such a motion converting device for a piezoelectric element, as shown in FIG. 9, the movable element 5 is displaced based on the expansion and contraction of the piezoelectric element 1, and one ends of the frame 2 and the movable element 5 are fixed to each other. By bending the pair of leaf springs 6 and 7 thus formed, the tilting body 8 coupled to the other ends of the leaf springs 6 and 7 is tilted. Further, in order to guide the mover 5 in parallel with the expansion and contraction of the piezoelectric element 1, an elastically deformable coupling member 12 is arranged between the mover 5 and the base 3 of the frame 2. It is set up. However, it is difficult to set the spring force of the connecting member 12 in balance with the spring force of the leaf springs 6 and 7, and the spring force of the connecting member 12 becomes excessive or insufficient. Then, the movable member 5 may be displaced in an inclined state with respect to the expansion / contraction direction of the piezoelectric element 1 due to the excess or deficiency of the spring force of the connecting member 12. Then, the amount of bending of the leaf springs 6 and 7 becomes insufficient, which causes the tilting body 8 to move.
However, there is a problem that the tilt angle cannot be tilted to a desired tilt angle.

Therefore, the same applicant has proposed the following.

That is, as shown in FIG. 9, a pair of link plates 17 forming a four-link parallel link mechanism is formed, and one of the vertical link portions 18 and 19 of each of these link plates 17 is connected to the vertical link portion 18 of each one. Is fixed to both sides of the extending portion of the frame 2, and the other vertical link portion 19 is fixed to both sides of the movable element 5 to guide the movable element 5 in parallel with the expansion and contraction direction of the piezoelectric element 1.

(Problems to be Solved by the Invention) By the way, the respective one end portions of the pair of leaf springs 6 and 7 are fixed to the facing surfaces of the frame 2 and the mover 5 by brazing. Further, in order to increase the fixing force of the leaf springs 6 and 7 by the brazing, both side edges of the leaf springs 6 and 7 in the width direction protrude from the plate thickness surfaces of the frame 2 and the movable element 5 by a predetermined amount. Brazed in.

Therefore, when the vertical link portions 18 and 19 of each link plate 17 are fixed to the extended end portion of the frame 2 and the mover 5, the horizontal link portions 20 and 21 of the link plate 17 are connected to the leaf springs 6 respectively. , 7 interferes with the side edge in the width direction.

Lateral link portions 20 and 21 of each link plate 17 and both leaf springs
In order to avoid interference with both side edges in the width direction of 6,7, both side edges in the width direction of the pair of leaf springs 6,7 (portions indicated by diagonal lines in FIG. 9) must be cut. It is difficult to cut both leaf springs 6 and 7, and not only requires a lot of time and labor for the cutting, but also the leaf springs 6 and 7 are cut by the both side edges in the width direction. There arises a problem that the fixing force between the one end of 7 and the frame 2 and the mover 5 decreases.

In view of the above-mentioned problems, an object of the present invention is to eliminate the need for cutting both side edges in the width direction of both leaf springs, and to stabilize the mover in parallel with the expansion and contraction direction of the piezoelectric element based on expansion and contraction of the piezoelectric element. It is an object of the present invention to provide a motion conversion device for a piezoelectric element that can be displaced well and a manufacturing method that can manufacture the motion conversion device for the piezoelectric element easily and with high accuracy.

(Means for Solving the Problems) In order to achieve the above object, the invention of claim 1 of the present invention comprises a base portion supporting one end of the piezoelectric element in the expansion and contraction direction, and extends along one side of the piezoelectric element. Existing mainframe,
With the mover arranged at the other end in the expansion and contraction direction of the piezoelectric element,
A motion conversion device in which one ends of a pair of leaf springs are fixed to each other, and a tilting body coupled to the other ends of the leaf springs is tilted by the bending of the leaf springs due to expansion and contraction of the piezoelectric element. At the base of the main frame, a sub-frame is continuously provided at one end thereof, and the sub-frame extends along the other side of the piezoelectric element to a position facing the mover. A link mechanism for displacing the movable element in parallel with the expansion and contraction direction of the piezoelectric element is arranged between the extended end of the movable element and the movable element.

Further, according to the invention of claim 2 of the present invention, a main frame extending along one side of the piezoelectric element, a base portion supporting one end of the piezoelectric element in the expansion / contraction direction, and the other end of the piezoelectric element arranged in the expansion / contraction direction. A movable body and a sub-frame that extends along the other side of the piezoelectric element are integrally formed, and the other end of the main frame and the movable body is connected to the tilting body. And a step of fixing one end of each of the pair of leaf springs, and dividing grooves are formed between the main frame and the mover and between the mover and the sub-frame, and the main frame is formed in each of the dividing grooves. A step of separating the mover and the sub-frame, a step of assembling a link plate forming a link mechanism between the mover and the sub-frame, and a step of assembling a piezoelectric element between the base and the mover. Equipped with It is obtained by the configuration.

(Operation) In the motion converting device for a piezoelectric element configured as described above, the link mechanism is arranged between the extension end of the sub-frame, one end of which is connected to the base of the main frame, and the mover. Thus, it is possible to prevent the pair of leaf springs and the link mechanism from interfering with each other. Further, when the mover is displaced based on the expansion and contraction of the piezoelectric element, the mover can be stably displaced by the link mechanism in parallel with the expansion and contraction direction of the piezoelectric element.

Further, in the method for manufacturing a motion converting device for a piezoelectric element configured as described above, a frame main body integrally having a main frame, a base, a mover and a sub-frame is formed, and a pair of main frame and mover are provided. After fixing one end of each leaf spring, the main frame mover,
In addition, dividing grooves are respectively formed between the mover and the subframe, and the main frame, the mover, and the subframe are separated from each other in the dividing grooves, so that the members of the main frame, the mover, and the subframe are separated from each other. It is possible to save the labor of separately forming and assembling each of them, and it is possible to maintain the positional relationship of the respective members with high accuracy.

(Embodiment) An embodiment of the present invention will be described below with reference to FIGS.

In this embodiment, a print head is used as an example. In FIGS. 1 and 2, the piezoelectric element 1 which expands and contracts when a voltage is applied is composed of laminated piezoelectric ceramics.

The main frame 2 for supporting the piezoelectric element 1 is
The piezoelectric element 1 is a vertically long quadrangle extending substantially parallel to the expansion / contraction direction and is made of a metal plate having a predetermined plate thickness. A base 3 for supporting one end (lower end) of the piezoelectric element 1 in the expansion / contraction direction in the lateral direction is provided at one end of the main frame 2 via a temperature compensating material 12 and a preloading member 13 which will be described later. Further, guide grooves 2a for guiding the lead wires 14 of the piezoelectric element 1 and recesses 2b for reducing the weight are formed on both side surfaces of the main frame 2.

A mover 5 is arranged at the other end (upper end) of the piezoelectric element 1 in the expansion / contraction direction so as to face the upper end of the rising portion of the main frame 2. A pair of leaf springs 6 and 7 are fixed to the facing surfaces of the mover 5 and the main frame 2 by brazing at one end thereof. The plate widths of the both leaf springs 6 and 7 are formed wider than the plate thicknesses of the main frame 2 and the mover 5 by a predetermined amount, and both side edges of the leaf springs 6 and 7 in the width direction are the main frame 2 and the mover 5. By being brazed in such a state that it projects from the plate thickness surface, the fixing force of each plate spring 6, 7 to the main frame 2 and the movable element 5 is increased. Furthermore, the both leaf springs 6 and 7 are
They oppose each other with a predetermined gap therebetween, and extend from the upper end surfaces of the main frame 2 and the mover 5 for a predetermined length in the expansion / contraction direction of the piezoelectric element 1. A tilting body 8 is formed at the other end (extended end) of both leaf springs 6 and 7 in a state of being integrally connected to both leaf springs 6 and 7. In addition, the both leaf springs
Recesses 6a, 7a are formed on the opposite sides of the facing surfaces of 6, 7 in the range from the upper end surfaces of the main frame 2 and the mover 5 to the lower end portion of the tilting body 8, thereby forming a thin portion. Are elastically deformable portions 6b and 7b, respectively. Further, the plate thickness t2 of the elastically deforming portion 7b of the plate spring 7 fixed to the mover 5 side is set to be thicker than the plate thickness t1 of the elastic deforming portion 6b of the plate spring 6 fixed to the main frame 2 side. Therefore, the elastic strength of the leaf spring 7 on the mover 5 side is increased. As a result, buckling or breakage of the leaf spring 7 on the mover 5 side is positively prevented, and durability is improved.

The tilting body 8 is provided with an arm mounting groove 8a parallel to the arrangement direction of the leaf springs 6 and 7, and the tilting arm 10 is inserted into the arm mounting groove 8a at its base. It is fixed by attachment. A notch-shaped wire mounting groove 10a is formed at the tip of the tilting arm 10, and a proximal end portion of the printing wire 11 is inserted into the wire mounting groove 10a and fixed by brazing. As shown in FIG. 1, the tilting body 8 has a notch-shaped cutout at both side portions of the leaf springs 6 and 7 in the width direction, thereby achieving weight reduction. Further, the tilting arm 10 is appropriately provided with large and small through holes 9 for weight reduction.

A subframe 4 is integrally formed at one end of the base 3 of the main frame 2. The sub-frame 4 extends along the other side of the piezoelectric element 1 (the side opposite to the main frame 2) and to a position facing the mover 5.

A four-node parallel link mechanism 16 for guiding the mover 5 in parallel with the extension and contraction direction of the piezoelectric element 1 is arranged between the extension end of the sub-frame 4 and the mover 5. It is set up. As shown in FIG. 4, the parallel link mechanism 16 includes a pair of link plates 17 formed by punching and bending a single elastically deformable leaf spring material, and a pair of these link plates 17. The connecting portion 26 that integrally connects the plates 17 is mainly configured.

The pair of link plates 17 are installed with vertical link portions 18, 19 parallel to the expansion and contraction direction of the piezoelectric element 1 and with elastically deformable hinge portions 22, 23, 24, 25 between these vertical link portions 18, 19. The horizontal links 20 and 21 are provided to form a four-bar parallel link. Each one of the vertical link portions 18 of the two link plates 17 is fixed to both side surfaces of the sub-frame 4 by spot welding or the like, and each of the other vertical link portions 19 is fixed.
Are fixed to both side surfaces of the mover 5 by spot welding or the like. Further, a joint portion 26 is integrally formed over the tips of the vertical link portions 19 fixed to both side surfaces of the mover 5, and the joint portion 26 is arranged on the upper end surface of the mover 5 with a predetermined gap. It

Further, in this embodiment, each of the vertical link portions 18
A connecting plate 30 is integrally formed at the lower part of the one end thereof. Each of the connection plates 30 extends to the side surface of the main frame 2. Further, both ends of each connecting plate 30 are fixed to the side surfaces of the main frame 2 and the sub frame 4 by spot welding or the like. As a result, the sub-frame 4 is kept parallel to the May frame 2, and the rigidity of each frame 2, 4 is enhanced.

Further, in this embodiment, the plate thicknesses of the main frame 2, the sub-frame 4 and the mover 5 are reduced by the amount corresponding to the thickness of the plate where the link plate 17 and the connecting plate 30 are arranged. As a result, the link plate 17 and the connecting plate 30 are assembled within the plate thickness of the main frame 2 and the sub frame 4, and the size of the device is reduced. Further, at the portion where the hinge portions 22 to 25 and the horizontal link portions 20 and 21 of the link plate 17 are arranged, the hinge portions and the horizontal link portions are prevented from coming into contact with the side surface of the subframe 4. An extended end thin portion 4a of the sub-frame 4 is formed in this.

After the link plate 17 and the connecting plate 30 are assembled between the sub-frame 4 and the mover 5, the piezoelectric element 1 and the temperature compensating material 12 are provided between the base 3 of the main frame 2 and the mover 5. Is assembled in a state of being preloaded by the preload member 13 by a predetermined pressure. The preload member 13 has an upper plate 13a and both side plates 13b, is formed in an inverted U shape, and is vertically movably fitted over the upper surface of the base portion 3. On the other hand, the piezoelectric element 1
A temperature compensating material 12 is preliminarily fixed to one end (lower end) surface in the expansion / contraction direction by an adhesive. Then, the lower surface of the temperature compensation member 12 is brought into contact with the upper surface of the upper plate 13a of the preload member 13,
While pushing up the preload member 13, while pressing the other end surface of the piezoelectric element 1 against the lower surface of the mover 5 with a predetermined load, both side plates 13b of the preload member 13 are spot welded to both side surfaces of the base portion 3. The piezoelectric element 1 is assembled by being fixed by.

The temperature compensating material 12 is made of a material having a positive coefficient of linear thermal expansion coefficient opposite to the negative coefficient of linear thermal expansion of the piezoelectric element 1, for example, a zinc material or an aluminum material. Then, the expansion and contraction of the piezoelectric element 1 due to the periodic temperature change is corrected by the expansion and contraction of the temperature compensating material 12 in the vertical direction so that the upper surface height of the piezoelectric element 1 is always kept constant.

The lower surface of the movable element 5 and the other end surface of the piezoelectric element 1 in the expansion / contraction direction, the lower surface of the temperature compensating member 12, and the preload member 13 are in contact with each other.
The mutual contact surface with the upper surface of the upper plate 13a is adhered with an adhesive as needed.

In addition, in this embodiment, notched recesses 5a are formed on both widthwise edges of the lower part of the mover 5, and the portion whose width is narrowed by this is used as the elastic expansion / contraction part 5b.
Further, the elastic expansion / contraction part 5b of the mover 5 has higher rigidity than the elastic deformation part 7b of the leaf spring 7 and is elastically expandable / contractible in a small amount in the expansion / contraction direction of the piezoelectric element 1. Then, a predetermined amount of displacement of the mover 5 based on the expansion and contraction of the piezoelectric element 1 is secured, and when the piezoelectric element 1 contracts due to the interruption of the voltage application to the piezoelectric element 1, the elastic expansion / contraction portion 5b of the mover 5 is reduced. The tensile force acting on the piezoelectric element 1 is reduced due to the small amount of the extension. Even when the piezoelectric element 1 is made of a piezoelectric ceramic having a brittle characteristic, the piezoelectric element 1 is prevented from being damaged.

In this embodiment configured as described above, when a voltage is applied between both electrodes of the piezoelectric element 1, the piezoelectric element 1
It extends in the stacking direction, that is, in the direction of arrow X in FIG. 2 by a predetermined length, and the mover 5 is displaced based on this. Then, the leaf spring 7 on the side of the mover 5 is pushed up along the leaf spring 6 on the side of the main frame 2 by receiving the displacement force of the mover 5, and both the leaf springs 6 and 7 bend in a curved shape. The leaf spring 7 on the mover 5 side largely bends toward the leaf spring 6 on the main frame 2 side, so that a rotational moment is generated in the direction of arrow P in FIG. 2, whereby the tilting body 8 is tilted.

When the mover 5 is displaced based on the extension of the piezoelectric element 1, the mover 5 is guided in parallel with the expansion and contraction direction of the piezoelectric element 1 by each link plate 17 that constitutes the four-bar parallel link mechanism 16. It Therefore, it is possible to prevent the bending amount of both leaf springs 6 and 7 from being insufficient due to the inclination of the mover 5, so that the tilting body 8 can be tilted to a predetermined tilting angle position. Then, with the print wire 11 at the tip of the tilting body 8 being guided by the predetermined number of guide members 15, the tip thereof is advanced to the printing position. In this manner, the leaf spring 7 on the mover 5 side is larger than the leaf spring 6 on the main frame 2 side and is flexed without a shortage, so that the tilting body 8 can be reliably tilted to the predetermined angular position, and The expansion of the piezoelectric element 1 is remarkably enlarged and transmitted to the print wire 11, which prevents printing defects.

When the voltage application to the piezoelectric element 1 is cut off, the piezoelectric element 1 is shortened to its original state. Then, the mover 5, the leaf springs 6 and 7, and the tilting body 8 are returned to their original states, and the printing wire 1
1 is set back.

Since the link plate 17 for guiding the mover 5 parallel to the expansion and contraction direction of the piezoelectric element 1 is arranged between the mover 5 and the sub-frame 4 located on the side opposite to the main frame 2, Since mutual interference with both leaf springs 6 and 7 can be avoided, it is possible to eliminate the trouble of cutting both side edges in the width direction of both leaf springs 6 and 7.

Next, a method for manufacturing the motion converting device for a piezoelectric element according to the above-described embodiment will be described with reference to FIGS.

First, as shown in FIG. 5, a frame main body 31 integrally including the main frame 2, the base 3, the mover 5, and the sub-frame 4 is formed. In this embodiment, the frame body 31 is molded by injection sintering. That is, a kneaded mixture of metal powder such as Invar alloy / Superinvar alloy and a binder of thermoplastic resin is injected into a molding die for injection molding to form a molded product. This molded product is heated to the specified temperature (10
(0 to 300 ° C) to remove the binder component. Then, the binder-removed molded product is placed in an atmosphere gas (melting point 80
% Of the ambient temperature) to produce the frame body 31.

The frame body 31 made as described above has a pair of leaf springs 6, 7 between the main frame 2 and the mover 5.
A mounting groove 32 into which the lead wire of the piezoelectric element 1 is guided is formed in the main frame 2 in addition to being simultaneously formed with a mounting groove 32.
Also, the recess 2b for reducing the weight is simultaneously molded. Further, at the portion where the link plate 17 and the connecting plate 30 are arranged at the same time when the brace body 31 is molded, the plate thicknesses of the main frame 2, the sub frame 4, and the mover 5 are reduced by an amount corresponding to the plate thickness. This is reduced, and the thin portion 4a is formed in the sub-frame 4 at a portion where the hinge portions 22 to 25 of the link plate 17 and the lateral link portions 20 and 21 are arranged. After the frame body 31 is molded by injection sintering as described above, the mounting groove 32 and the lower surface of the movable element 5 are finished by cutting if necessary.

On the other hand, a pair of leaf springs 6, 7 and the tilting body 8 are integrally formed by cutting a metal spring material having a predetermined plate thickness. And
The base of the tilting arm 10 is inserted into the arm mounting groove 8a of the tilting body 8 and fixed by brazing. In addition, tilting arm 10
The base portion of the printing wire 11 is inserted into the wire mounting groove 10a and fixed by brazing.

Next, as shown in FIG. 6, the tilting body 8 and tilting arm 10 are shown.
Also, one end portions of both leaf springs 6 and 7 integrally having the printing wire 11 are inserted into the mounting groove 32 of the frame body 31. Then, the surfaces of the leaf springs 6 and 7 opposite to the facing surfaces are fixed to the facing surfaces of the main frame 2 and the mover 5 forming the both sides of the mounting groove 32 by brazing.

After brazing the both leaf springs 6 and 7 on the facing surfaces of the main frame 2 and the mover 5, respectively, as shown in FIG. 7, dividing grooves 33 and 34 are formed by laser cutting, wire cutting, discharge cutting or the like. Are formed, and the main frame 2, the mover 5, and the sub-frame 4 are separated in the respective dividing grooves 33, 34.

Next, a pair of link plates 17 integrally connected by the connecting portion 26 are put on both side surfaces of both of these members while straddling between the mover 5 and the sub-frame 4, and the vertical link of the link plate 17 is also provided. The connecting plate 30 integrally extended from the portion 18 is provided along the both side surfaces of both members straddling the main frame and the sub frame 4. Then, in a state where the link plate 17 and the connecting plate 30 are positioned and adjusted at predetermined positions with respect to respective members by using a positioning jig or the like, one of the vertical link portions 18 of the link plate 17 is attached to both side surfaces of the sub-frame 4. The other vertical link portion 19 is fixed to both side surfaces of the mover 5 by spot welding, laser welding, or the like. Further, both ends of each connecting plate 30 are fixed to both side surfaces of the main frame 2 and the sub frame 4 by spot welding, laser welding or the like.

Next, the precompression member 13 is vertically movably fitted over the upper surface of the base portion 3 of the main frame 2, while the temperature compensating material 12 is fixed to one end surface of the piezoelectric element 1 in the expansion and contraction direction with an adhesive.

The upper surface of the upper plate 13a of the preload member 13 or the temperature compensation agent 12
An adhesive is applied to the lower surface of the movable element 5, the lower surface of the movable element 5, or the other end surface of the piezoelectric element 1 in the expansion / contraction direction as needed. Then, the lower surface of the temperature compensating member 12 is brought into contact with the upper surface of the upper plate 13a of the preload member 13, and the other end surface of the piezoelectric element 1 in the expansion / contraction direction is applied to the lower surface of the mover 5 by a predetermined load while pushing up the preload member 13. Press with. At this time, the push-up force of the preload member 13 is measured while being measured by a load measuring device.

Then, under the condition that a predetermined compressive load is applied to the piezoelectric element 1, the both side plates 13b of the preload member 13 are connected to the base portion 3.
The motion conversion device for the piezoelectric element is manufactured by spot welding on the side surface of the plate and fixing by laser welding.

In the method of manufacturing the motion conversion device for a piezoelectric element configured as described above, by molding the frame body 31 integrally including the main frame 2, the substrate portion 3, the mover 5 and the sub frame 4 by injection sintering, The frame body 31 can be mass-produced easily and inexpensively.

Further, the frame body 31 is manufactured, and one end portion of the pair of leaf springs 6 and 7 is fixed to the facing surface of the main frame 2 and the mover 5, and then the dividing grooves 33 and 34 are formed. By separating the main frame 2, the mover 5, and the sub-frame 4 in each of the dividing grooves 33, 34, the positional relationship between the main frame 2, the mover 5 and the sub-frame 4 can be maintained with high accuracy, and the accuracy can be improved. A motion conversion device with high efficiency can be obtained.

Further, when the piezoelectric element 1 is assembled between the base 3 of the main frame 2 and the mover 5, the pushing force of the preload member 13 is measured by a load measuring method, and the temperature compensation at one end of the piezoelectric element 1 in the expansion / contraction direction is performed. The lower surface of the material 12 is pushed up by the preload member 13, and the other end surface of the piezoelectric element 1 in the expansion and contraction direction is pressed against the lower surface of the mover 5, and the preload member 13 is fixed to the base portion 3 so that the piezoelectric A predetermined load can be applied to the element 1 in the compression direction. As a result, the mover 5 can be reliably and reliably displaced based on the expansion of the piezoelectric element 1 due to the application of the voltage.

In the manufacturing method of the above embodiment, the frame main body
31 was manufactured by injection sintering, but it is not limited to this. For example, the frame body 31 can be manufactured by casting press processing, wire cutting processing, laser processing, cutting processing, or a combination of these processings.

As described above, according to the present invention, when the mover is displaced based on the expansion / contraction of the piezoelectric element, the link mechanism stably moves the mover parallel to the expansion / contraction direction of the piezoelectric element. Since the movable body 5 can be displaced, it is possible to prevent the bending failure of the leaf spring caused by the inclination of the mover 5 and accurately tilt the tilting body to a predetermined tilting angle.

In particular, by disposing a link mechanism between the movable end and the extended end of the sub-frame, one end of which is connected to the base of the main frame, the pair of leaf springs and the link mechanism interfere with each other. Since this can be avoided, there is an effect that it is possible to eliminate the need for cutting both side edges of the pair of leaf springs in the width direction, and the cost can be reduced accordingly.

According to the manufacturing method of the present invention, the mainframe,
A frame body integrally having a base, a mover and a sub-frame is formed, and one end of a pair of leaf springs is fixed to the main frame and the mover, respectively, and then the main frame and the mover, and the mover and the sub-frame. By forming a dividing groove between the frame and each of the dividing grooves, the main frame, the mover, and the subframe are separated, so that the main frame, the mover, and the subframe are separately formed. As a result, it is possible to save the labor of assembling and to maintain the positional relationship of the respective members with high accuracy. As a result, it is possible to easily and inexpensively obtain a highly accurate motion converting device for a piezoelectric element.

[Brief description of drawings]

1 to 8 of the drawings show an embodiment of the present invention. FIG. 1 is a perspective view showing a motion converting device for a piezoelectric element which acts on a print head, and FIG. 2 is a side view of the same. 3 is a sectional view taken along line III-III of FIG. 2, FIG. 4 is a perspective view showing a parallel link mechanism of four joints, FIG. 5 is a side view showing a frame body, and FIG. 6 is a mounting groove of the frame body. FIG. 7 is a side view showing a state in which a pair of leaf springs are assembled to each other, FIG. 7 is a side view showing a state in which a dividing groove is formed in the frame body to separate the main frame, the mover and the sub frame, and FIG. It is a side view showing the state where a link plate was assembled between a child and a subframe. FIG. 9 is a perspective view showing a prior art. 1 ... Piezoelectric element 2 ... Main frame 3 ... Base part 4 ... Sub-frame 5 ... Mover 6,7 ... Leaf spring 8 ... Tilt body 16 ... Parallel link mechanism 31 ... Frame body 33, 34 ...... Dividing groove

Claims (2)

[Claims] 1. A main frame having a base portion for supporting one end of the piezoelectric element in the expansion / contraction direction and extending along one side of the piezoelectric element, and a mover arranged at the other end of the piezoelectric element in the expansion / contraction direction. , A pair of leaf springs are fixed at one end, and the tilting body coupled to the other ends of the leaf springs is tilted by the deflection of the leaf springs due to expansion and contraction of the piezoelectric element. In the device, a sub-frame is continuously provided at one end of the base of the main frame, and the sub-frame is extended to a position facing the mover along the other side of the piezoelectric element, A motion converting device for a piezoelectric element, characterized in that a link mechanism for displacing the movable element in parallel with the expansion / contraction direction of the piezoelectric element is provided between the extending end of the sub-frame and the movable element. 2. A main frame extending along one side of the piezoelectric element, and a base portion supporting one end of the piezoelectric element in the expansion / contraction direction,
A step of manufacturing a frame main body integrally having a mover disposed at the other end of the piezoelectric element in the expansion / contraction direction and a sub-frame extending along the other side of the piezoelectric element; and the main frame and the mover. The step of fixing one end of each of the pair of leaf springs, the other end of which is coupled to the tilting body, and dividing grooves between the main frame and the mover and between the mover and the sub-frame. Forming and separating the main frame, the mover, and the sub-frame in each of these dividing grooves; assembling a link plate that forms a link mechanism between the mover and the sub-frame; and the base and the mover. And a step of assembling the piezoelectric element between and, and a method for manufacturing a motion converting device for a piezoelectric element, comprising: