JPH0645344U - Precision cutting equipment - Google Patents

Abstract

(57) [Abstract] [Purpose] By adopting a configuration in which the wiring of the blade detection means is not exposed in the cutting area, it is possible to prevent leakage and disconnection of the wiring, obstruction of movement of the spindle housing, etc. before dicing. Provide a precision cutting device such as a device. In a precision cutting device such as a dicing device equipped with blade detection means for detecting damage and wear of the blade, wiring of the blade detection means is provided in a spindle housing that holds the blade.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a precision cutting device such as a dicing device equipped with a blade detecting means for detecting damage or wear of a blade.

[0002]

[Prior art]

 In a precision cutting device such as a dicing device, conventionally, as shown in FIG. 3, for example, a blade detecting means 2 for detecting damage or wear of the blade 1 is attached to the tip of a spindle housing 3 inside a blade cover 4. And is connected to the CPU 5 of the dicing device via the wiring 6. In this case, since the spindle housing 3 is moved in the Y-axis direction and the Z-axis direction indicated by the arrows during dicing, the portion 6a of the wiring 6 between the protective case 7 and the blade cover 4 is made to follow the movement. It is moderately slack.

[0003]

[Problems to be solved by the device]

 However, since the slack portion 6a of the wiring 6 is exposed in the cutting area, splashes of the cutting fluid 9 sprayed from the cutting fluid supply pipe 8 may adhere, or the slack portion of the wiring may touch the spindle housing 3. However, there are inconveniences such as other objects coming into contact with each other and causing electric leakage or disconnection, and hindering the movement of the spindle housing 3 in the Y-axis direction and the Z-axis direction. The present invention has been made in order to solve such a conventional inconvenience, and by adopting a configuration in which the wiring of the blade detecting means is not exposed in the cutting area, it is possible to prevent electric leakage, disconnection, and obstruction of movement of the spindle housing. It is an object of the present invention to provide a precision cutting device such as a dicing device that is made possible.

[0004]

[Means for Solving the Problems]

 As a means for technically solving this problem, the present invention provides a wiring for the blade detecting means in a precision cutting device such as a dicing device equipped with the blade detecting means for detecting damage and wear of the blade. The gist of the invention is that it is provided in a spindle housing that holds the blade.

[0005]

[Work]

 Since the wiring of the blade detecting means is not exposed in the cutting area, the cutting fluid does not adhere to the cutting area, and it does not come into contact with the spindle housing or collide with other objects.

[0006]

【Example】

 Hereinafter, the present invention will be described in more detail (the same members as those in the conventional example are designated by the same reference numerals) based on the illustrated embodiments. In FIG. 1, reference numeral 1 denotes a blade in a precision cutting device such as a dicing device, which is detachably attached to the tip of a spindle 3a held by a spindle housing 3.

Reference numeral 2 denotes a blade detecting means, which is provided in a blade cover 4 attached to the tip of the spindle housing 3 so as to detect breakage or wear of the blade 1 by electromagnetic waves or the like. .

Reference numeral 5 denotes a CPU provided in the precision cutting device, which is connected to the blade detecting means 2 by a wiring 6, and in this case, a part of the wiring 6 is not exposed in the cutting area unlike the conventional case. Is done.

That is, as shown in FIG. 2A, a through hole 10 is provided in the cylindrical wall of the spindle housing 3 along the axial direction, and one of the through holes 10 extends from the front portion of the spindle housing 3 to An opening 10a communicating with the blade cover 4 is formed, and the other of the through holes 10 is formed with an opening 10b communicating with the protective case 7 from the rear portion of the spindle housing 3, and the wiring 6 is inserted into the through hole 10. I am doing it.

In this case, instead of providing the through hole 10 in the cylindrical wall of the spindle housing 3, as shown in FIG. 2B, the wiring passage portion 10 ′ is formed on the outer peripheral surface of the spindle housing 3 along the axial direction. May be provided, and the tip of the wire passing portion 10 ′ may be positioned inside the blade cover 4. The wiring passage portion 10 'can be formed of, for example, a pipe member or an inverted U-shaped section member.

The spindle housing 3 slides in the Y axis direction in the waterproof plate 7'and is moved in the Z axis direction together with the waterproof plate 7 '. The portion 6b in the protective case 7 is appropriately sagged to prevent disconnection. Since the portion of the wiring 6 inside the blade cover 4 moves together with the spindle housing 3, there is no need to sag.

Reference numeral 11 is a Y-axis drive mechanism for moving the spindle housing 3 in the Y-axis direction, and 12 is a Z-axis drive mechanism for moving the spindle housing 3 in the Z-axis direction, both of which are ball screws. It can be moved through.

The precision cutting device for dicing or the like according to the present invention is configured as described above, and is fixed on the chuck table 13 moving in the X-axis direction (perpendicular to the paper surface) by the rotary blade 1 as in the conventional case. The wafer 14 is precisely cut while supplying the cutting fluid 9 from the cutting fluid supply pipe 8. However, since the wiring 6 is not exposed in this cutting area, the splash of the cutting fluid 9 does not adhere to the wiring 6. Moreover, since there is no contact with the spindle housing 3 or collision with other objects, it is possible to prevent electric leakage and disconnection of the wiring 6, obstruction of movement of the spindle housing 3, and the like.

In this case, the slack portion 6b of the wiring 6 is located in the relatively wide protective case 7, and the wiring drawn out from the spindle housing 3 is lifted and fixed to the top plate of the protective case 7. Therefore, the slack portion 6b is unlikely to come into contact with the spindle housing 3 and does not collide with other objects.

[0015]

[Effect of device]

 As described above, according to the present invention, the wiring of the blade detecting means is provided in the spindle housing which holds the blade in the precision cutting device such as the dicing equipped with the blade detecting means. Since the part is not exposed in the cutting area, it is possible to prevent electric leakage, disconnection, obstruction of movement of the spindle housing, etc., and it is possible to reliably detect the blade.

[Brief description of drawings]

FIG. 1 is a schematic sectional view showing an embodiment of the present invention.

[Fig. 2] (a) is a sectional view of the spindle housing, (b)
FIG. 6 is a cross-sectional view showing an example in which a wiring passage portion is provided in the spindle housing.

FIG. 3 is a schematic sectional view of a conventional example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Blade 2 ... Blade detection means 3 ... Spindle housing 3a ... Spindle 4 ... Blade cover 5 ... CPU 6 ... Wiring 6a, 6b ... Slack part 7 ... Protective case 7 '... Waterproof plate
8 ... Cutting fluid supply pipe 9 ... Cutting fluid 10 ... Through hole
10a, 10b ... opening 10 '... wiring through portion 11
… Y-axis drive mechanism 12… Z-axis drive mechanism

Claims (1)

[Scope of utility model registration request] 1. In a precision cutting device such as a dicing device equipped with a blade detecting means for detecting damage or wear of the blade, the wiring of the blade detecting means is provided in a spindle housing holding the blade. Characteristic precision cutting device.