JPH0638111Y2 - 成膜装置の試料台保持機構 - Google Patents

成膜装置の試料台保持機構

Info

Publication number
JPH0638111Y2
JPH0638111Y2 JP16939688U JP16939688U JPH0638111Y2 JP H0638111 Y2 JPH0638111 Y2 JP H0638111Y2 JP 16939688 U JP16939688 U JP 16939688U JP 16939688 U JP16939688 U JP 16939688U JP H0638111 Y2 JPH0638111 Y2 JP H0638111Y2
Authority
JP
Japan
Prior art keywords
sample table
sample
sample stage
vacuum chamber
holding mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16939688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0290667U (cs
Inventor
直一郎 淡野
博 高宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP16939688U priority Critical patent/JPH0638111Y2/ja
Publication of JPH0290667U publication Critical patent/JPH0290667U/ja
Application granted granted Critical
Publication of JPH0638111Y2 publication Critical patent/JPH0638111Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16939688U 1988-12-29 1988-12-29 成膜装置の試料台保持機構 Expired - Lifetime JPH0638111Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16939688U JPH0638111Y2 (ja) 1988-12-29 1988-12-29 成膜装置の試料台保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16939688U JPH0638111Y2 (ja) 1988-12-29 1988-12-29 成膜装置の試料台保持機構

Publications (2)

Publication Number Publication Date
JPH0290667U JPH0290667U (cs) 1990-07-18
JPH0638111Y2 true JPH0638111Y2 (ja) 1994-10-05

Family

ID=31459415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16939688U Expired - Lifetime JPH0638111Y2 (ja) 1988-12-29 1988-12-29 成膜装置の試料台保持機構

Country Status (1)

Country Link
JP (1) JPH0638111Y2 (cs)

Also Published As

Publication number Publication date
JPH0290667U (cs) 1990-07-18

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