JPH063203A - Temperature measuring device using micro raman spectrophotometer - Google Patents

Temperature measuring device using micro raman spectrophotometer

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Publication number
JPH063203A
JPH063203A JP4337407A JP33740792A JPH063203A JP H063203 A JPH063203 A JP H063203A JP 4337407 A JP4337407 A JP 4337407A JP 33740792 A JP33740792 A JP 33740792A JP H063203 A JPH063203 A JP H063203A
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Japan
Prior art keywords
light
raman
sample
measuring device
stokes
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JP4337407A
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Japanese (ja)
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JP3316012B2 (en
Inventor
Kinya Eguchi
Masayoshi Ezawa
Toshiki Ito
Kazuichi Nagashiro
Yumi Sakamoto
Masakazu Sakimoto
Hirokatsu Yamaguchi
俊樹 伊東
由美 坂本
裕功 山口
正教 崎元
欣也 江口
正義 江澤
和一 長城
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Hitachi Ltd
株式会社日立製作所
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Priority to JP10290392 priority
Application filed by Hitachi Ltd, 株式会社日立製作所 filed Critical Hitachi Ltd
Priority to JP33740792A priority patent/JP3316012B2/en
Publication of JPH063203A publication Critical patent/JPH063203A/en
Application granted granted Critical
Publication of JP3316012B2 publication Critical patent/JP3316012B2/en
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Abstract

PURPOSE:To provide a temperature measuring device provided with a micro Raman spectrophotometer which can accurately acquire temperature of a sample through simultaneous measurement of strength of Stokes Raman light and anti-Stokes Raman light and two-dimensionally display the measurement result. CONSTITUTION:An optical system of a Raman spectrophotometer is constituted by an optical means having a lens system 3 for irradiating a sample 6 with a laser beam 2 from a laser beam source 1, a half mirror 4 and an objective lens 5, a dynamic mirror 40 with such optical characteristics that either one of Raman lights of a Stokes light and an anti-Stokes light transmitting through a notch filter 41 with a light eliminated is reflected and the other is transmitted, and a one-dimensional or two-dimensional detector arranged on each optical path of the transmitted light and the reflected light. Moreover, a band-pass filter 42 is arranged on the light paths for selectively transmitting each Raman light peak so as to further improve spectroscopic performance.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature measuring device using a microscopic Raman spectrophotometer, and particularly to irradiating a sample with laser light to simultaneously measure the intensity of Stokes Raman light and anti-Stokes Raman light. The present invention relates to a temperature measuring device using a microscopic Raman spectrophotometer suitable for accurately measuring temperature from an intensity ratio.

[0002]

2. Description of the Related Art In order to measure the temperature of a sample by using this type of Raman spectrophotometer, it is necessary to detect Stokes Raman light and anti-Stokes Raman light at the same time and obtain the intensity ratio between them. However, there is Rayleigh light having a high intensity between the Stokes Raman light and the anti-Stokes Raman light, and when this enters the detector, saturation occurs, and further the element of the detector is destroyed. Therefore, in order to remove Rayleigh light and perform measurement, for example, Japanese Patent Laid-Open No.
A structure in which a mask for removing Rayleigh light is formed in the light receiving portion of the detector to prevent the Rayleigh light from entering the detector as described in Japanese Patent Application Laid-Open No. 2-112322;
55, a structure for removing in a spectroscope,
That is, when the Stokes Raman light and the anti-Stokes Raman light are split by the diffraction grating and condensed by the corresponding reflecting mirrors to enter the respective detectors, the layout of both reflecting mirrors can eliminate Rayleigh light. There is known a structure having a positional relationship.

[0003]

The temperature measurement of a minute area of a sample is a very important issue in the temperature control of the manufacturing process of electronic devices, the reliability test of electronic devices, and other quality control. It is required to improve the accuracy of a temperature measuring device using a spectrophotometer. Especially in circuit elements such as semiconductors, the wiring width is very thin, 1 μm or less, and it is very important to accurately measure the temperature distribution of the minute part and analyze the temperature for the life prediction and quality control of the wiring. Has been done.

In the above prior art, when detecting the Stokes Raman light and the anti-Stokes Raman light at the same time,
Since all the Rayleigh light is removed after being dispersed by a spectroscope, a removing structure suitable for the material of the sample to be measured is required, which is not versatile. That is, the intensity of Raman light emitted from the sample is weaker than that of Rayleigh light, and since the wavenumber of Raman light depends on the material of the sample, a removal structure dedicated to the measurement sample is required, and the sample is prepared or changed every time the sample is changed. Replacement is required. In addition, these conventional structures are also inferior in the Rayleigh light removing ability. For example, in the structure in which the detector is provided with a mask for removing Rayleigh light, there is a restriction on the material of the sample that can be measured with the mask of the same shape,
There is the complexity of having to replace the optimum mask for each sample, and in the case of a sample that emits Raman light with a small wave number or a sample such as amorphous (generally, the Raman intensity is very weak), S / due to poor removal capacity
Since N is low, it becomes difficult to measure the temperature distribution accurately. In the above-mentioned conventional example, only the case where the sample is silicon is shown, and no consideration is given to the measurement of other samples.

Further, in the above-mentioned prior art, when measuring the two-dimensional temperature distribution, it is necessary to move the sample or scan the laser beam many times, and the sample should be measured within the time required for each measurement. When the temperature changes abruptly, the amount of change causes an unavoidable error and the measurement accuracy is significantly reduced.

Further, in the above-mentioned prior art, no consideration is given to changing the irradiation diameter of the laser light on the sample. Therefore, when the temperature of the area smaller than the irradiation diameter of the laser light is measured, the surrounding Raman light is changed. The temperature cannot be measured correctly due to mixing. Further, when trying to measure the temperature of a region larger than the irradiation diameter of laser light, there is a problem that only a fixed irradiation portion can be measured. If a lens is placed on the laser beam path, the irradiation diameter of the laser light can be enlarged, but in order to make the irradiation diameter variable, it is necessary to prepare various lenses with different focal lengths and replace them frequently. There was

Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art. The Stokes Raman light and the anti-Stokes Raman light are simultaneously or at a time interval (substantially not affected by a change in temperature over time). SUMMARY OF THE INVENTION It is an object of the present invention to provide an improved temperature measuring device using a Raman spectrophotometer for microscopic measurement which can be accurately and easily measured simultaneously.

Specifically, a two-dimensional temperature distribution in a minute area can be easily measured with a single measurement with high accuracy, and a temperature measuring device that can shorten the measuring time is also provided. Further, by providing an optical system capable of easily changing the diameter of the irradiation laser light according to the size, a temperature measuring device that enables temperature analysis of an arbitrary measurement diameter,
An object of the present invention is to provide a temperature measuring device which can easily cope with temperature measurement of samples of different materials.

[0009]

The above-mentioned object is to provide a laser light source, an optical means for irradiating a sample with a laser to collect scattered light from the sample, and a scattered light for Stokes Raman light and anti-Stokes Raman light. A spectroscope for spectrally splitting, a photodetector for detecting the intensity of each of the spectrally separated Raman lights, and an arithmetic means for obtaining the detection output ratio of the optical intensity, and the temperature of the laser irradiation region of the sample In a temperature measuring device using a Raman spectrophotometer for measuring, a notch filter for blocking Rayleigh light is arranged on the optical path between the optical means and the spectroscope, and the optical path is preliminarily analyzed before the Raman light is dispersed. It is achieved by a temperature measuring device using a Raman spectrophotometer for removing Rayleigh light.

And, more preferably, the spectrometer is
Is it configured with a dichroic mirror that reflects one of the Stokes Raman light and the anti-Stokes Raman light and transmits the other, and is a one-dimensional or two-dimensional photodetector provided on each of the reflected light path and the transmitted light path? Further, any one of the Stokes Raman light and the anti-Stokes Raman light arranged on one of the divided transmission optical paths, and an optical element for dividing the spectroscope into Raman light of two optical paths of transmission and reflection. One-dimensional or two-dimensional photodetector is provided on each optical path, which is composed of a filter that allows only one of them to pass through and a filter that is arranged on the other optical path and has optical characteristics opposite to those of the filter. It is also achieved by providing.

Further, the optical element for splitting the Raman light into two optical paths is constituted by a dichroic mirror or a half mirror, and the filter arranged on the transmission optical path transmits the Stokes Raman light and blocks the anti-Stokes Raman light. The optical characteristics of a long-wavelength transmission filter having the optical characteristics that enable the Stokes Raman light or a bandpass filter that transmits only the Stokes Raman light are used. It may be configured by a short-wavelength transmission filter provided or a bandpass filter that transmits only anti-Stokes Raman light.

Further, the above-mentioned spectroscope is constituted by a prism or a diffraction grating, and a one-dimensional or two-dimensional photodetector is arranged on each optical path of the Stokes Raman light and the anti-Stokes Raman light which are dispersed. Can also be

Further, the spectroscope is configured so as to alternately disperse the Stokes Raman light and the anti-Stokes Raman light on the same optical axis at predetermined intervals through filters corresponding to the Stokes Raman light and the Raman spectrum, respectively. A circuit that detects light with the same photodetector in synchronism with the spectral cycle and that reads out the intensity of each Raman optical signal from the detector,
It is also possible to provide a signal processing device comprising a storage device for accumulating the signal intensities of both of them and an arithmetic circuit for obtaining the intensity ratio from the accumulated signals of both. And, preferably, the spectroscope for alternately spectrally dividing every predetermined period on the same optical axis, a bandpass filter or a long wavelength transmission filter which transmits only Stokes Raman light, and a bandpass filter which transmits only anti-Stokes Raman light. Alternatively, the short-wavelength transmission filter and the short-wavelength transmission filter may be arranged separately from each other on the same disc, and the Stokes Raman light and the anti-Stokes Raman light may be alternately transmitted at a predetermined cycle by the rotation of the disc to perform spectral separation. In this case, only one photodetector is required, and the switching between the Stokes Raman light and the anti-Stokes Raman light is performed at a high speed by setting both measurements at time intervals that are not affected by the change over time.

Further, when the spectroscope is constituted by a diffraction grating, a light-shielding plate for blocking Rayleigh light and a double slit having two parallel slits on both sides thereof are arranged at an image-forming position of the spectroscope. Is desirable. It is desirable that the interval between the two parallel slits in the double slit and the width of each slit be variable independently of each other. Specifically, the double slit is configured by a combination of a leaf spring bent at the center and two slit plates, and the slit variable mechanism is provided with a bending angle of the leaf spring and a gap between the two slit plates. It is composed of a mechanism that can independently change and. Further, the double slit may have a plate-like structure that is formed in a symmetrical trapezoidal shape or a staircase, and the slit spacing variable mechanism may be a mechanism that translates the plate-like structure in the axis of symmetry.

Further, the lens system of the optical means for irradiating the sample with the laser is an optical system composed of two convex lenses or a combination of a convex lens and a concave lens, and one of these lenses is moved on the optical axis. By setting the lens at a predetermined position according to the lens moving mechanism, it is possible to easily change the diameter of the laser beam with which the sample is irradiated. In this case, the distance E between the two lenses, the focal lengths f 1 and f 2 of the convex lens on the laser light source side and the microscope side, the focal length f 4 of the slit imaging lens of the spectroscope, and the entrance slit of the spectroscope It is preferable to dispose the lens moving mechanism so that the relationship between the width w and the laser beam diameter r L emitted from the laser light source satisfies the following expression (1).

[0016]

[Equation 2] f 1 + f 2 ≦ E ≦ f 1 + f 2 + wf 1 f 2 / r L f 4 (1) If the scale for indicating the laser beam diameter on the sample is provided in the lens moving mechanism, the operation is easy. Becomes Further, the lens moving mechanism can be composed of a pipe surrounding the laser optical path and a holding jig for the lens that slides inside the pipe. Further, the lens moving mechanism may be composed of a rail installed parallel to the laser optical path and a holding jig for the lens that slides on the rail. The above two convex lenses,
Alternatively, the optical system including a combination of a convex lens and a concave lens can be configured by using an incident optical system of observation illumination light.

In any of the above devices, means for inputting the temperature signal output obtained from the calculating means for obtaining the detection output ratio to the display device is provided, and the temperature distribution of the laser irradiation region of the sample is displayed on the display device. The mechanism can be one-dimensional or two-dimensional display.

Further, according to the present invention, the sample is irradiated with laser light, and the light intensity ratio of the Stokes Raman light and the anti-Stokes Raman light from the sample is obtained by using a microscopic Raman spectrophotometer to obtain the sample. Means for measuring the temperature distribution,
Comparing the measured temperature distribution signal of the sample and the reference value of the temperature distribution of the reference sample, the quality control device is configured with means for displaying the normality or abnormality of the sample from the magnitude relationship between the two.
By using any one of the above temperature measuring devices as a means for measuring the temperature distribution of the sample, a highly reliable quality control device can be realized.

Further, according to the present invention, the sample is irradiated with laser light, and a light intensity ratio of the Stokes Raman light and the anti-Stokes Raman light from the sample is obtained by using a microscopic Raman spectrophotometer to obtain the sample. In the method for measuring the temperature distribution, the Raman light from the sample is separated into Stokes Raman light and anti-Stokes Raman light before the Rayleigh light is removed from the Raman light, and a new temperature is obtained. A distribution measurement method can be realized. And specifically, the sample is an electronic circuit device composed of a semiconductor wafer or an LSI chip on which an electronic circuit is formed, and the temperature measuring device for measuring the temperature distribution on the wiring of the electronic circuit device is a micro Raman according to any one of the above. If the temperature is measured by a temperature measuring device using a spectrophotometer, a new temperature distribution measuring method on the wiring in the electronic circuit device can be realized.

[0020]

The operation of the present invention will be described with reference to FIG. 1 is a laser light source, 2 is laser light, 3 is an optical system including a movable lens, 4 is a half mirror, 5 is an objective lens, 6 is a sample,
7 is Raman light, 8 is a mirror, 41 is a notch filter, 40 is a dichroic mirror, 42a is a long wavelength transmission filter,
42b is a short wavelength transmission filter, 23a and 23b are lenses, 24a and 24b are two-dimensional detectors, 43 is a data processing device, and 44 is a display device. The Raman light 7 generated from the sample 6 by the irradiation of the laser light 2 is the dichroic mirror 4
By 0, it is separated into Stokes Raman light 18 and anti-Stokes Raman light 19. Of the Stokes Raman light 18 and the anti-Stokes Raman light 19, Raman peaks used for temperature measurement are bandpass filters 42a and 42a, respectively.
Select at 42b. These Raman lights are condensed by the lenses 23a and 23b, respectively, and focused on the detectors 24a and 24b to be detected. The temperature is obtained by the data processing device 43 from these intensities.

According to the present invention, the notch filter 41, the dichroic mirror 40 and the bandpass filter 42 constitute a spectroscope. That is, the Raman light 7 (including the Rayleigh light at this stage) emitted from the sample 6 is selectively blocked by the notch filter 41 and enters the dichroic mirror 40. Since the dichroic mirror 40 in this case has an optical characteristic of transmitting the Stokes Raman light 18 and reflecting the anti-Stokes Raman light 19, they are separated from each other. Further, the Raman light thus separated is increased in wavelength component accuracy by the bandpass filter 42 that selectively transmits the respective Raman peaks and condensed by the lens, and simultaneously detected by the detector 24. In the detector 24, the optical signal is converted into an electrical signal and detected, and the data processing device 43 calculates the light intensity ratio between the two based on the detected output to obtain the temperature of the sample. Further, according to the output from the data processing device 43, the two-dimensional display of the sample temperature is performed on the display device 44.

In principle, when the dichroic mirror 40 is used as the spectroscope, the bandpass filter 42 may be omitted, but here, the accuracy of the wavelength component of the separated Raman light is increased, and fluorescence etc. It is provided in order to prevent the overlapping of and to obtain a more accurate temperature. Further, when the bandpass filter 42 is used, a half mirror can be used instead of the dichroic mirror 40, and in principle, it has only to have a function of dividing the optical path into two.

The calculation of the temperature by the data processing device 43 is given by the following equation (2) when the detected output intensities of the Stokes light 18 and the anti-Stokes light 19 measured by the detector 24 are I S and I AS. Calculated according to the relational expression between temperature and Raman light derived from known quantum mechanics,
The temperature T of the sample can be easily obtained. In the equation, h is Planck's constant, c is the speed of light, ν is the frequency, and k is the wave number of Raman light obtained from the setting conditions of the spectroscope and the detector.

[0024]

[Equation 3]

According to the present invention, the intensities of I S and I AS are simultaneously or at a time sufficiently smaller than the change with time of the temperature T (this will be specifically described in the section of Examples below). Since the temperature T can be measured, the temperature T can be accurately obtained.

Further, according to the present invention, since the spectroscope having a low wave number resolution using a bandpass filter or the like is used, the sensitivity of Raman light is improved and the measurement time can be shortened. Therefore, the temperature T can be accurately determined. There is an action that can.

Further, according to the present invention, a Raman image of the sample is measured by using a two-dimensional type detector as the detectors 24a and 24b. By obtaining the temperature T by using the signal intensities of the same element addresses of the two detectors as I S and I AS of the equation (2) and outputting the temperature T to the display device 44, the temperature distribution image can be quickly measured.

Next, referring to FIGS. 2 and 3, the irradiation light diameter of the laser irradiated on the sample can be arbitrarily changed by the lens system of the present invention, and the temperature measurement region of the sample can be arbitrarily enlarged or reduced based on the variable diameter. The action that can be performed will be described. Figure 2
Is a lens system 3 for irradiating the sample 6 with the laser light 2 and an optical system 3A mainly for collecting the Raman light 7 emitted from the sample 6 and allowing the Raman light 7 to enter the spectroscope 13. FIG. 3 is a schematic diagram, and FIG. 3 shows details of an optical diagram in which light rays are traced by the lens system 3 and the objective lens 5 shown in FIG.

First, the outline of the entire optical system will be described with reference to FIG. 2. 1 is a laser light source, 2 is laser light, 3 is a lens system, 4 is a half mirror, 5 is an objective lens, 6 is a sample, and 7 is Raman. Light, 8 mirror, 41 notch filter, 9
Is a slit imaging lens, 10 is an entrance slit, 11 is an image, 12 is an optical axis, 13 is a spectroscope (including a detector (not shown)), f 3 is a focal length of the objective lens 5, and f 4 is a slit. The focal length of the imaging lens 9 and w are the width of the entrance slit 10. The laser light 2 emitted from the laser light source 1 is irradiated onto the sample 6 by the lens system 3 and the objective lens 5. The Raman light 7 emitted from the sample 6 is imaged on the entrance slit 10 of the spectroscope 13 by the objective lens 5 and the slit imaging lens 9. This is measured by the spectroscope 13.

Next, the principle that the irradiation area of the laser beam irradiated on the sample 6 can be arbitrarily enlarged or reduced by operating the lens system 3 will be described with reference to FIG. The lens system 3 is composed of a combination of two convex lenses 3a and 3b. The focal lengths of the convex lenses 3a and 3b are f 1 and f 2 (not shown because they are complicated), and the focal length of the objective lens 5 is f 3 . In this figure, the laser beam 2 is projected to the point A by the convex lens 3a.
Is focused on. Here, the distance between the convex lens 3b and the point A is s
2 , point B from the convex lens 3b (imaginary point inside sample 6)
The distance to is set to s 2 '. Similarly, the distances from the objective lens 5 to the points B and C are set as s 3 and s 3 ′. Also,
When an infinite focusing lens is used as the objective lens 5, the distance between the sample 6 and the objective lens 5 is equal to the focal length f 3 . Here, the relationships of f 2 , s 2 , s 2 ′, f 3 , s 3 , and s 3 ′ are represented by the following equations (3) and (4).

[0031]

[Equation 4]

[0032]

[Equation 5]

On the other hand, if the diameter of the incident laser beam 2 is r L , the diameters of the laser beams passing through the convex lenses 3a and 3b are r 2 and r 3 , and the laser beam diameter on the sample is r S , the relationship between these values is given. Is expressed by the following equations (5), (6) and (7).

[0034]

[Equation 6]

[0035]

[Equation 7]

[0036]

[Equation 8]

The following expression (8) is derived from the expressions (3) to (7).

[0038]

[Equation 9]

Since f 1 , f 2 , f 3 , and r L are constant, s
By changing 2 it is possible to change r S. That is,
By moving the convex lens 3a or 3b to change the distance E = f 1 + s 2 between the two lenses, the laser light diameter r S on the sample can be freely changed, and the laser beam diameter r S on the sample can be changed according to the size of the measurement region on the sample. The diameter of the irradiation laser beam can be changed.
Further, the distance between the convex lens 3a and the objective lens 5 does not affect the laser beam diameter r S on the sample.

The variable range of the lens interval E was determined as follows. Assuming that the focal length of the slit imaging lens (9 in FIG. 2) is f 4 and the width of the entrance slit is w, the maximum measurable width on the sample is wf 3 / f 4 . That is, the variable range of r S is expressed by the following equation (9).

[0041]

[Equation 10]

From equation (8),

[0043]

[Equation 11]

That is, in the present invention, the variable range of the distance E between the lenses 3a and 3b in the lens system 3 is defined by the following equation (1)
By setting 1), the irradiation diameter of the laser on the sample can be arbitrarily changed.

[0045]

[Equation 12]

Further, in the Raman spectrophotometer for microscopic observation, the observation illumination light of the sample is normally irradiated by enlarging the irradiation diameter on the sample by the convex lens system, so that the laser light is emitted from the entrance of the observation illumination light. If incident, the laser beam diameter on the sample can be easily enlarged.

[0047]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. <Example 1> In this example, the spectroscope is a three-stage differential dispersion type, and the temperature distribution obtained by simultaneously measuring the Stokes Raman light and the anti-Stokes Raman light can be displayed on the display device in a two-dimensional display. It is related to the configuration of the temperature measuring device,
The main features are the structure of the double slit that removes Rayleigh light and the configuration of the variable mechanism that can arbitrarily adjust the optical diameter of laser light that irradiates the sample (target area for temperature measurement). An example of actually measuring the temperature distribution on the wiring of the LSI chip will be described.

An outline of the entire apparatus will be described below with reference to FIG. 4. Reference numeral 13 surrounded by a dashed line indicates a spectroscope including a detector, 1 is a laser light source, 2 is laser light, and 3 is laser light.
Is a lens system, 4 is a half mirror, 5 is an objective lens, 6 is a sample, 7 is Raman light, 8 is a mirror, 9 is a slit imaging lens, 10 is an entrance slit, 12 is an optical axis, and 14a to f are concave mirrors. 15a-c are diffraction gratings, 16a-d are plane mirrors, 1
7 is a double slit, 18 is Stokes light, 19 is anti-Stokes light, 20 is a slit, 22a and b are mirrors, 23
a, b is a convex lens, 24a, 24b a detector, 43 is a data processing device, 44 display device, f 3 is the focal length of the objective lens 5, f 4 is the focal length of the slit imaging lens 9, w
Is the width of the entrance slit 10.

In the above device, the focal length 64 of the spectroscope is used.
The width of the entrance slit 10 was 2 mm, and the height of the entrance slit 10 was 15 mm. Also, the detector 2
CCD (Charge Couple) as 4a and 24b
ed Device, charge transfer type solid-state imaging device) was used. Here, the spectral center wavelength of the diffraction grating 15 is set to the wavelength of Rayleigh light so as to match the optical axis 12. The Raman image on the entrance slit 10 was split into the Stokes Raman light 18 and the anti-Stokes Raman light 19 by the diffraction grating 15a, and was imaged on the double slit 17. The Rayleigh light passes on the optical axis 12 and is focused on the center of the double slit 17. The double slit 17 is provided with slits 17a and 17b which are parallel to the image forming positions of the Stokes Raman light 18 and the anti-Stokes Raman light 19, respectively. A detailed structure example of the double slit 17 will be described later with reference to FIG.

Here, the wavelength of the laser beam 2 is 514.5 nm.
Then, the wave number line dispersion is (1 / 514.5 × 10 ~ 9 ) 2
× 0.7 × 10 ~ 9 = 2600m ~ 1 / mm = 26cm ~ 1 /
mm. Therefore, in this embodiment, -100 to 100c
In order to block light in the region of m ~ 1 , the distance between the two parallel slits 17a and 17b of the double slit 17 is 7.7 m.
It is set to m.

Further, the second and third diffraction gratings 15b and 15
Further, the light is further separated via c and finally the Stokes Raman light 18 and the anti-Stokes Raman light 19 are reflected by the mirror 2 respectively.
The light is reflected by 2a and 22b, and imaged on the detectors 24a and 24b by the convex lenses 23a and 23b. Convex lens 23
a and 23b having a focal length of 50 mm are used, and the distance from the convex lens to the image forming position of the spectroscope and the detector 24a,
The distances up to 24b were both 100 mm. Also, mirror 2
By opening the joint portion of 2a and 22b, Rayleigh light was prevented from entering the detector. By this method, Stokes Raman light and anti-Stokes Raman light were detected simultaneously while blocking Rayleigh light.

Further, from the intensity of these Stokes Raman light and anti-Stokes Raman light, the data processor 43
Then, the temperature T was calculated by performing the calculation of the equation (1). This calculation was performed for each element of the detectors 24a and 24b, and the temperature distribution was output to the display device 44. In this apparatus, two detectors, one for Stokes Raman light and one for anti-Stokes Raman light, are used, and both detectors can be detected simultaneously.

The structure of the double slit 17 is shown in FIG.
171 is a leaf spring, 172a and 172b are slit plates, 1
73 is a pull rod, 174a to 174f are shafts, 1
Reference numeral 8 is Stokes light, 19 is anti-Stokes light, and R is Rayleigh light. In this figure, light is incident from the lower left. The gap between the leaf spring 171 and the slit plate 172a and the gap between the leaf spring 171 and the slit plate 172b are slits through which the Stokes light 18 and the anti-Stokes light 19 pass. Further, the Rayleigh light R is blocked by the leaf spring 171. This can prevent the Rayleigh light R from entering the detector. Further, the leaf spring 171 is attached with a pull bar 173 having a female thread, and the shaft 174a to 174d having a male thread is screwed into this. By rotating these shafts at the same time and rotating the shafts 174a, 174b and the shafts 174c, 174d in opposite directions, it is possible to change the opening angle of the leaf springs and change the slit spacing. Further, the shafts 174e and 174f for moving the slit plates 172a and 172b are the shafts 174a.
Since it is driven separately from ~ 174d, the slit interval and slit width can be individually changed.

The result of measuring the temperature distribution on the LSI wiring by the device of the present invention is shown in FIG. That is, this figure shows the surface of the main part of the LSI, 35 is an insulator, 36 is a wiring conductor, and temperature measurement was performed on the shaded area of the wiring conductor 36. As described above, according to the present invention, the temperature distribution of the sample can be accurately measured.

FIG. 3 shows the details of the lens system 3. As the laser light source 1, the wavelength of the Ar laser is 514.
An objective lens 5 having a laser beam diameter r L of 5 nm and a laser beam diameter r L of 5 mm is an infinite focusing type and has a magnification of 50 times.
If the focal length f 3 is 5 mm, the slit imaging lens 9
The focal length f 4 is 225 mm, and the width w of the entrance slit 10 is set to 2 mm. The focal lengths f 1 and f 2 (not shown) of the convex lenses 3a and 3b are 150 mm and 120 mm, respectively, and s 2 is 120 to 2
It was made variable within the range of 40 mm. According to the equation (8) shown above, the laser beam diameter r S on the sample 6 is 0 to 50 μm.
It can be changed in the range of m. Here again, the entrance slit 1
Since the size of the image formed on 0 is f 4 / f 3 times the laser beam diameter r S on the sample, it changed in the range of 0 to 2.25 mm.

FIGS. 7A and 7B are perspective views of the lens moving mechanism 3B for varying s 2 in the lens system 3. In the figure, 3a is a convex lens, and 2 is
7 is a lens holder, 28 is a lens mount, 29 is a rail,
Reference numeral 30 is a knob, and 31 is a scale plate. By disposing the rail 29 parallel to the optical axis of the laser beam and sliding the lens while holding the knob 30, the position of the lens can be changed. Further, by grading s 2 on the scale plate 31 according to the equation (7), the lens position can be easily set in accordance with the target laser beam diameter on the sample. As a result, the effect that the irradiation diameter of the laser light can be changed according to the size of the measurement region on the sample was obtained.

Example 2 FIG. 8 shows a modification in which concave mirrors 25a and 25b are used instead of the mirrors 22a and 22b and the convex lenses 23a and 23b shown in FIG. 4 of Example 1. As the concave mirrors 25a and 25b, those having a focal length of 50 mm are used, and the double slit 2 is formed from the concave mirrors 25a and 25b.
The distance to 1 and the distance to the detectors 24a and 24b were both 100 mm. Thereby, the detectors 24a, 2
A Raman image could be formed on 4b, and the same effect as in Example 1 was obtained.

<Third Embodiment> FIG. 9 shows a modification in which the Raman light splitting means and the detector at the latter stage of FIG. 4 shown in the first embodiment are improved as in the second embodiment. . The feature of this example is that the mirrors 22c, 22d, 22e, 22f and the prism 26 are added, and instead of the two detectors 24a, 24b, Stokes light is generated in the upper half and the lower half of the one two-dimensional type detector 24c. It is designed to detect anti-Stokes light at the same time. A light blocking plate 34 is provided on the back surface of the prism 26 to block Rayleigh light. Since this configuration has one two-dimensional detector as compared with the first embodiment, it can be realized cheaply.

<Embodiment 4> FIG. 10 is basically the same as FIG. 4 of Embodiment 1 except that the slit 17 is a normal single slit 17 '. The means for removing Rayleigh light is such that the mirror 22a, 22b is opened at least for the spectral region of the Rayleigh light so that the Rayleigh light is substantially incident on the detector 24 without using a double slit. It is configured to prevent

<Embodiment 5> In FIG. 11, the slit 17 is an ordinary single slit 17 'as in Embodiment 4, and a mirror 22a is used.
And one end of 22b were brought into close contact with each other. A notch filter 41 was used instead of the double slit 17 as a means for removing Rayleigh light. This had a simpler structure than Examples 1 to 4. Moreover, the Rayleigh light could be reliably removed. With this device, the same effects as in Example 1 were obtained.

<Sixth Embodiment> FIG. 12 shows a single-stage spectroscope instead of the three-stage spectroscope shown in FIG. 4 of the first embodiment, and has a notch filter 41 and a double slit 17 as Rayleigh light removing means. A configuration in which and are used together is shown. A knife edge mirror 22f was used to separate the Stokes Raman light and the anti-Stokes Raman light. The focal length of the spectrograph is 320 mm,
The diffraction grating had a score of 1800 lines / mm, wavelength line dispersion was 1.4 nm / mm, the width of the entrance slit 10 was 2 mm, and the height of the entrance slit 10 was 15 mm. Further, CCDs were used as the detectors 24a and 24b. If the wavelength of the laser light is 514.5 nm, the wave number line dispersion is (1/51
4.5 × 10 ~ 9) 2 × 1.4 × 10 ~ 9 = 5200m ~ 1 /
mm = 52 cm- 1 / mm. Therefore, in this embodiment, in order to block light in the region of −100 to 100 cm− 1 ,
The distance between the two slits of the double slit 17 is 3.9 mm
I chose

In this embodiment, the number of reflections of Raman light by the diffraction grating and the mirror is smaller than in Embodiments 1 to 5, so that the intensity of Raman light incident on the detectors 24a and 24b is about 10.
Since it is doubled and the measurement time can be shortened, the effect of more accurate temperature measurement was obtained.

<Embodiment 7> In FIG. 13, a prism 26b is used as a spectroscopic means instead of a diffraction grating, and a notch filter 41 is used as a means for removing Rayleigh light, and the notch filter 41 is directed to separate Stokes Raman light and anti-Stokes Raman light. It shows an example of the configuration of an apparatus using two different mirrors 22a and 22b. As a result, the same effect as in Example 6 was obtained.

<Embodiment 8> FIG. 1 shows an example of the structure described in the section of the operation. In this embodiment, a dispersion type spectroscope such as a diffraction grating or a prism is used as a spectral means for Stokes and anti-Stokes Raman light. Bandpass filter 42 instead of
Was used. The filter 42a is a long wavelength transmission filter that selectively transmits the Stokes Raman light 18, and 42b is a short wavelength transmission filter that selectively transmits the anti-Stokes Raman light 19. A notch filter 41 is used as means for removing Rayleigh light, and a dichroic mirror 40 is used as means for separating Stokes Raman light and anti-Stokes Raman light.
Was used. In the figure, 43 is a data processing device,
Reference numerals 44 denote display devices, respectively. This embodiment is a first to a first embodiment.
As compared with 7, the Raman light could be received by the element of the detector 24 with greater intensity. Therefore, the S / N was also improved. Also,
A sample image without blur could be formed on the detector 24.
This is because the Raman light generated on the detector is not decomposed into spectra. Therefore, a two-dimensional temperature distribution could be obtained quickly. Although a half mirror can be used instead of the dichroic mirror 40 in this device configuration, the dichroic mirror 40 is preferable in order to further improve the spectral characteristics.

<Embodiment 9> FIG. 14A shows that the band pass filters 42a and 42b of Embodiment 8 are attached to a disk 42c, and the disk 42c is rotated by a motor 45, whereby Stokes Raman light and anti-Stokes Raman light are emitted. This is a configuration example in which light and light are periodically switched alternately and made to enter the same detector 24. By the signal from the synchronization signal generator 46, the rotation of the motor 45 and the signal reading cycle of the detector 24 are made to coincide with each other, and the Stokes Raman light and the anti-Stokes Raman light are made incident on the detector 24 and are synchronized with each other. The intensity is stored in a separate area of the memory 47. Further, the temperature was calculated from the data in the memory 47 by the data processing device 43 having an arithmetic circuit, and the temperature distribution was displayed on the display device 44. Disk 42
By rotating c at 1 to several Hz, it was possible to measure the temperature with substantially the same accuracy as when detecting the Stokes Raman light and the anti-Stokes Raman light at the same time.

<Embodiment 10> FIG. 14B shows a ninth embodiment.
This is a modified example in which a memory 47 accumulating the temperature distribution reference value of the sample and a comparator 48 are connected between the data processing device 43 and the display device 44, and is indicated by a broken line. If the wiring temperature distribution of a normal LSI chip is stored in the memory 47 and this apparatus is applied to the LSL inspection process, the temperature of the reference value from the memory 47 and the measured value from the sample 6 can be measured by the comparator 48. Comparisons can be made and sample temperature control can always be easily performed. When a defective product is generated, the defective portion can be easily displayed by two-dimensional display, which is effective as a quality control device.

<Embodiment 11> FIG. 15 shows the Stokes Raman light 18 and the anti-Stokes Raman light 19 separated by the dichroic mirror 40 by removing the bandpass filters 42a and 42b of the embodiment 8 directly from the detectors 24a and 24b.
Was incident on. As a result of applying this to the sample a-Si 3 N 4 having a plurality of Raman peaks, it was possible to detect them all at once and the detection intensity was improved. As a result, the temperature could be measured with high accuracy.

<Embodiment 12> FIG. 16 shows the structure of FIG.
In the modification of the lens system 3 shown in FIG.
The lens a is replaced by a concave lens 3c. Therefore, the value of f 1 in equations (7) and (8) is negative. A laser beam having a diameter r L of 1.5 mm, an objective lens 5 of infinite focusing type having a magnification of 50 times and a focal length f 3 of 5 mm, and a slit imaging lens 9 having a focal length f 4 of 2
Using a 25 mm one, the width w of the entrance slit 10 is 2 m
set to m. The focal length f 1 of the concave lens 3c is −
150 mm, the focal length f 2 of the convex lens 3b is 120 mm
S 2 was used in the range of 120 to 240 mm. According to the equation (8), the laser beam diameter r S on the sample could be varied within the range of 0 to 50 μm. Here, since the size of the image formed on the entrance slit 10 is f 4 / f 3 times the laser light diameter r S on the sample, it changes in the range of 0 to 2.25 mm. As a result, the effect that the irradiation diameter of the laser light can be changed according to the size of the measurement region on the sample was obtained.

<Embodiment 13> FIG. 17 is also the same as FIG.
In the modification of the lens system 3 shown in FIG.
The lens b is replaced with a concave lens 3f. Therefore, the sign of f 2 in equations (3) and (8) is negative. A laser beam having a laser beam diameter r L of 1.5 mm is used as the objective lens 5 having an infinity focusing type and a magnification of 50 times, and a focal length f 3
Was used as the slit imaging lens 9 having a focal length f 4 of 225 mm, and the width w of the entrance slit 10 was set to 2 mm. The convex lens 3a has a focal length f 1 of 150 mm, the concave lens 3f has a focal length f 2 (not shown) of 120 mm, and s 2 is 12 to 120.
It was made variable in the range of mm. According to the equation (8), the laser beam diameter r S on the sample could be varied within the range of 0 to 50 μm. Since the size of the image formed on the entrance slit 10 is f 4 / f 3 times the laser light diameter r S on the sample,
It changed in the range of 2.25 mm. As a result, the effect that the irradiation diameter of the laser light can be changed according to the size of the measurement region on the sample was obtained.

<Embodiment 14> FIG. 18 shows a modification of the lens moving mechanism 3B of the first embodiment. In the same drawing, (a) is a perspective view, (b) is a front view of the lens holder 27, (c) is a side view of the lens holder 27, (d) is a front view of the pipe 32, and (e) is a pipe 32. Side views are shown respectively. 3a is a convex lens, 27 is a lens holder, 3
Reference numeral 0 is a knob, 32 is a pipe, and 33 is a slit. By disposing the pipe 32 parallel to the optical axis of the laser beam 2 and sliding the lens holder 27 in the pipe 32, the position of the lens could be changed. Further, by mounting the s 2 scale on the scale plate 31 according to the formula (7), the position of the lens could be changed in accordance with the target laser beam diameter on the sample. As a result, the effect that the irradiation diameter of the laser light can be changed according to the size of the measurement region on the sample was obtained.

<Embodiment 15> FIGS. 19 and 20 show another structural example of the double slit. FIG. 19
20A is a front view, FIG. 19B and FIG.
(B) is a side view. 176 is an outer slit plate and 177
Is an inner slit plate, 178 is a holding plate, and 179 is a hole. The outer slit plate 176 and the inner slit plate 177 slide independently while being sandwiched by a pressing plate 178. Further, a rectangular hole 179 is formed in the pressing plate 178. The outer slit plate 176, the inner slit plate 177 and the hole 179 form a slit through which the Stokes light S and the anti-Stokes light AS pass. Since the inner slit plate 177 closes between these slits, Rayleigh light can be blocked. Further, since the outer slit plate 176 and the inner slit plate 177 are independently moved, the slit spacing and the slit width can be individually changed. As a result, even if the Raman peak wave number to be detected by changing the sample is changed, the effect of simultaneous detection of Stokes Raman light and anti-Stokes Raman light can be obtained by adjusting the slit spacing and slit width accordingly. Was given.

Example 16 Stokes light 18 and anti-Stokes light 19 of polyvinyl chloride were produced by the apparatus of the present invention.
The results of measurement are shown in FIGS. 15 (a) and 15 (b), respectively. Raman light was observed around ± 630 and 700 cm ~ 1 . The mark * indicates a plasma line generated from the laser light source. Thus, according to the present invention, Stokes light and anti-Stokes light can be measured simultaneously.

[0073]

As described above in detail, according to the present invention, the intended purpose can be achieved. That is, there is an effect that the temperature of the sample can be accurately measured by simultaneously measuring the intensities of the Stokes Raman light and the anti-Stokes Raman light or alternately at short time intervals that do not affect the temperature measurement. Further, by lowering the wave number resolution of the spectroscope to improve the sensitivity, there is an effect that the measurement time can be shortened and the temperature can be accurately measured without being affected by the temperature change. Further, by using the two-dimensional detector, there is an effect that the two-dimensional distribution of the temperature on the sample can be accurately measured without being affected by the change with time. Further, by varying the diameter of the irradiation laser beam according to the size of the measurement point on the sample, there is an effect that temperature analysis of an arbitrary measurement type is possible.

[Brief description of drawings]

FIG. 1 is a schematic view of a temperature measuring device for explaining the principle and one embodiment of the present invention.

FIG. 2 is a schematic diagram of an optical system that similarly illustrates the principle.

FIG. 3 is an optical diagram of a lens system that similarly describes the principle and one embodiment.

FIG. 4 is a schematic view of a temperature measuring device that similarly describes an embodiment.

FIG. 5 is an explanatory view showing an example of a double slit structure.

FIG. 6 is a plan view of the sample showing the measurement example of the temperature distribution.

FIG. 7 is a perspective view showing an example of a lens moving mechanism.

FIG. 8 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 9 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 10 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 11 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 12 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 13 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 14 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 15 is a schematic view of a temperature measuring device according to another embodiment.

FIG. 16 is an optical diagram of another lens system.

FIG. 17 is an optical diagram of another lens system.

FIG. 18 is an exploded view showing an example of another lens moving mechanism.

FIG. 19 is an explanatory view showing an example of another double slit structure.

FIG. 20 is an explanatory view showing an example of another double slit structure.

FIG. 21 is a spectrum curve diagram when Stokes light and anti-Stokes light are measured at the same time.

[Explanation of symbols]

1 ... Laser light source, 2 ... Laser light, 3 ... Lens system, 4 ... Half mirror, 5 ... Objective lens, 6
… Sample, 7… Raman light, 9…
Slit imaging lens, 10 ... Incident slit,
12 ... Optical axis, 13 ... Spectroscope, 1
7, 21 ... Double slit, 18 ... Stokes light,
19 ... Anti-Stokes light, 17 ', 20 ...
Single slit, 24 ... Detector, 26 ... Prism, 27 ... Lens holder, 28 ...
Lens mount, 29 ... Rails, 30 ...
Knobs, 31 ... Scale plate, 32 ...
Pipe, 33 ... Slit, 34
... Shading plate, 35 ... Insulator, 36
… Wiring conductor, 40… Dichroic mirror or half mirror,
41 ... Notch filter, 42a, 42b ... Filter, 42c ... Disk, 43 ... Data processing device,
44 ... Display device, 45 ... Motor,
46 ... Sync signal generator, 47 ... Memory,
48 ... Comparator, 171 ... Leaf spring, 172 ... Slit plate, 173 ...
Drawbar, 174 ... Shaft, 176
... outer slit plate, 177 ... inner slit plate, 178 ... pressing plate, 179 ... hole.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Masanori Sakimoto Inventor Masanori Sakimoto 5-20-1 Kamimizumoto-cho, Kodaira-shi, Tokyo Inside Musashi Plant, Hitachi, Ltd. (72) Masayoshi Ezawa 3300 Hayano, Mobara, Chiba Prefecture Hitachi Ltd. Mobara Plant (72) Inventor Kazukazu Great Wall 2880 Kokuzu, Odawara, Kanagawa Stock Company Hitachi Ltd. Odawara Plant (72) Inventor Yumi Sakamoto 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Hitachi, Ltd., Production Engineering Laboratory

Claims (23)

[Claims]
1. A laser light source, a microscopic optical means for irradiating a sample with a laser to derive scattered light from the sample, and a spectroscope for separating the scattered light into Stokes Raman light and anti-Stokes Raman light. A Raman spectrophotometer for measuring the temperature of the laser irradiation region of the sample, which has a photodetector for detecting the intensity of each of the spectrally separated Raman lights, and a calculation unit for obtaining a detection output ratio of the light intensity. In the temperature measuring device used, a notch filter for blocking Rayleigh light is arranged on the optical path between the optical means and the spectroscope,
A temperature measuring device using a microscopic Raman spectrophotometer, which is designed to remove Rayleigh light from the optical path before the Raman light is dispersed.
2. The spectroscope is constituted by a dichroic mirror that reflects one of the Stokes Raman light and the anti-Stokes Raman light and transmits the other, and one-dimensional or two-dimensional on the reflection optical path and the transmission optical path, respectively. 2. A temperature measuring device using a micro Raman spectrophotometer according to claim 1, wherein a photodetector of the type is provided.
3. An optical element for splitting the spectroscope into Raman light of two optical paths of transmission and reflection, and among Stokes Raman light and anti-Stokes Raman light arranged on one of the divided transmission optical paths. A filter that passes only one of
2. A filter having an optical characteristic opposite to that of the filter disposed on the other reflected optical path, and a one-dimensional or two-dimensional photodetector disposed on each optical path. A temperature measuring device using the described Raman spectrophotometer.
4. An optical element for splitting the Raman light into two optical paths is constituted by a dichroic mirror or a half mirror, and a filter arranged on the transmission optical path transmits the Stokes Raman light and blocks the anti-Stokes Raman light. The optical characteristics of a long-wavelength transmission filter having the optical characteristics that enable the Stokes Raman light or a bandpass filter that transmits only the Stokes Raman light are used. The temperature measuring device using a micro Raman spectrophotometer according to claim 3, wherein the temperature measuring device comprises a short wavelength transmission filter or a bandpass filter that transmits only anti-Stokes Raman light.
5. The one-dimensional or two-dimensional photodetector is arranged on the optical path of each of the Stokes Raman light and the anti-Stokes Raman light, which are separated by a prism. A temperature measuring device using the described Raman spectrophotometer.
6. The one-dimensional or two-dimensional type photodetector is arranged on each optical path of the Stokes Raman light and the anti-Stokes Raman light, which are constituted by a diffraction grating. A temperature measuring device using the microscopic Raman spectrophotometer described in 1.
7. The spectroscope is configured to alternately disperse Stokes Raman light and anti-Stokes Raman light on a same optical axis at predetermined intervals through filters corresponding to the Stokes Raman light and the Raman spectrum, respectively. A circuit that detects light with the same photodetector in synchronism with the spectral cycle and reads out the respective Raman optical signal intensities from the detector, a storage device that accumulates the signal intensities of both, and both of these accumulated signals. The temperature measuring device using the microscopic Raman spectrophotometer according to claim 1, further comprising a signal processing device having an arithmetic circuit for obtaining the intensity ratio from the signal of 1.
8. A bandpass filter or a long-wavelength transmission filter that transmits only Stokes Raman light, and a spectroscope that alternately disperses light at predetermined intervals on the same optical axis,
A band-pass filter or a short-wavelength transmission filter that transmits only anti-Stokes Raman light is placed separately on the same disk, and the rotation of the disk alternately transmits the Stokes Raman light and the anti-Stokes Raman light at a predetermined cycle. The temperature measuring device using the microscopic Raman spectrophotometer according to claim 7, wherein the temperature measuring device is configured to perform spectroscopy.
9. A laser light source, an optical means for irradiating a sample with a laser to collect scattered light from the sample, a spectroscope for separating the scattered light into Stokes Raman light and anti-Stokes Raman light, and Using a Raman spectrophotometer for measuring the temperature of the laser irradiation region of the sample, which has a photodetector for detecting the intensity of each of the separated Raman lights, and a calculation unit for obtaining the detection output ratio of the light intensity. In the temperature measuring device, the spectroscope is composed of a diffraction grating, and a light blocking plate for blocking Rayleigh light and a double slit having two parallel slits on both sides thereof are arranged at an image forming position of the spectroscope. A temperature measuring device using a Raman spectrophotometer.
10. A temperature measuring apparatus using a microscopic Raman spectrophotometer according to claim 9, further comprising a mechanism for independently varying the interval between two parallel slits in the double slit and each slit width. .
11. The double slit comprises a combination of a leaf spring bent at the center and two slit plates, and a variable mechanism of the slit has a bending angle of the leaf spring and two slit plates. The temperature measuring device using a microscopic Raman spectrophotometer according to claim 9 or 10, wherein the temperature measuring device comprises a mechanism for independently changing the interval.
12. The double slit is a symmetrical trapezoid,
Alternatively, the temperature measurement using the microscopic Raman spectrophotometer according to claim 9 or 10, wherein the plate-like structure is formed on a staircase, and the mechanism for varying the slit spacing is a mechanism for moving the plate-like structure in parallel in the symmetric axis direction. apparatus.
13. A laser light source and a sample are irradiated with a laser,
Optical means for collecting scattered light from the sample, a spectroscope for separating the scattered light into Stokes Raman light and anti-Stokes Raman light, and a photodetector for detecting the intensity of each of the separated Raman lights. A temperature measuring device using a Raman spectrophotometer for measuring the temperature of the laser irradiation region of the sample, the optical means for irradiating the sample with laser, To
A lens system including two convex lenses, or a combination of a convex lens and a concave lens, and a lens moving mechanism that moves one of these lenses on the optical axis is provided, and the lens is moved to a predetermined position according to the lens moving mechanism. 13. The temperature measuring device using the microscopic Raman spectrophotometer according to claim 1, wherein the laser beam diameter irradiated onto the sample is made variable by setting to.
14. A distance E between the two lenses and a focal length f 1 of the convex lens on the laser light source side and the microscope side,
The relationship between f 2 , the focal length f 4 of the slit imaging lens of the spectroscope, the entrance slit width w of the spectroscope, and the laser beam diameter r L emitted from the laser light source is expressed by the following equation (1) f 1 The micro Raman spectrophotometer according to claim 13, wherein the lens moving mechanism is arranged so as to satisfy + f 2 ≦ E ≦ f 1 + f 2 + wf 1 f 2 / r L f 4 (1). Temperature measuring device.
15. A temperature measuring device using a microscopic Raman spectrophotometer according to claim 13 or 14, wherein the lens moving mechanism is provided with a scale indicating the laser beam diameter on the sample.
16. The microscopic Raman spectrophotometer according to claim 13, wherein the lens moving mechanism includes a pipe surrounding a laser optical path and a holding jig for the lens that slides inside the pipe. There was a temperature measuring device.
17. The micro Raman according to claim 13, wherein the lens moving mechanism comprises a rail installed parallel to the laser optical path and a holding jig for the lens that slides on the rail. Temperature measuring device using a spectrophotometer.
18. The lens system comprising the two convex lenses or the combination of the convex lens and the concave lens is configured by using an incident optical system of observation illumination light.
A temperature measuring device using a microscopic Raman spectrophotometer.
19. A means for inputting a temperature signal output obtained from a calculating means for obtaining the detection output ratio to a display device is provided, and the temperature distribution of a laser irradiation region of the sample is one-dimensionally or two-dimensionally displayed on the display device. A temperature measuring device using a micro Raman spectrophotometer according to any one of claims 1 to 12, which serves as a display mechanism.
20. Means for inputting a temperature signal output obtained from the calculating means for obtaining the detection output ratio to a comparator, and a temperature signal output inputted to the comparator to a predetermined temperature stored in a storage device in advance. 3. A means for comparing with a reference value of distribution and a means for inputting this comparison result to a display device and displaying the result of comparison with the reference value of the temperature distribution in the laser irradiation region of the sample. 12. A temperature measuring device using the microscopic Raman spectrophotometer described in any one of 12.
21. A means for irradiating a sample with a laser beam and measuring a temperature distribution of the sample by obtaining a light intensity ratio between the Stokes Raman light and the anti-Stokes Raman light from the sample using a microscopic Raman spectrophotometer. And a means for comparing the actually measured temperature distribution signal of the sample with the reference value of the temperature distribution of the reference sample and displaying the normality or abnormality of the sample based on the magnitude relation between the two. hand,
A quality control device comprising the temperature measuring device as a temperature measuring device using the microscopic Raman spectrophotometer according to claim 20.
22. A method of irradiating a sample with laser light, and using a microscopic Raman spectrophotometer to obtain a light intensity ratio between Stokes Raman light and anti-Stokes Raman light from the sample to measure the temperature distribution of the sample. 2. A method for measuring a temperature distribution of a sample, wherein the Raman light is removed from the Raman light in advance before the Raman light from the sample is split into Stokes Raman light and anti-Stokes Raman light.
23. A method of irradiating a sample with a laser beam, and using a microscopic Raman spectrophotometer to obtain a light intensity ratio of Stokes Raman light and anti-Stokes Raman light from the sample to measure a temperature distribution of the sample. 21. The temperature measuring device according to claim 1, wherein the sample is an electronic circuit device formed of a semiconductor wafer or an LSI chip on which an electronic circuit is formed, and the temperature distribution on the wiring of the electronic circuit device is measured.
A method for measuring a temperature distribution on a wiring, which is configured to be measured by a temperature measuring device using any one of the Raman spectrophotometers for microscopic observation.
JP33740792A 1992-04-22 1992-12-17 Temperature measuring device using a micro-Raman spectrophotometer Expired - Fee Related JP3316012B2 (en)

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JP4-102903 1992-04-22
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JP2002303550A (en) * 2001-04-03 2002-10-18 Mitsui Mining & Smelting Co Ltd Method and device for measuring temperature
KR100788822B1 (en) * 2005-11-25 2007-12-27 한국원자력연구원 Optical system for measuring temperature of air molecular by splitting rotational raman-scattered signals
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