JPH06309925A - Dielectric composition, its manufacture, manufacture of its thin film, and thin-film capacitor - Google Patents

Dielectric composition, its manufacture, manufacture of its thin film, and thin-film capacitor

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Publication number
JPH06309925A
JPH06309925A JP5097698A JP9769893A JPH06309925A JP H06309925 A JPH06309925 A JP H06309925A JP 5097698 A JP5097698 A JP 5097698A JP 9769893 A JP9769893 A JP 9769893A JP H06309925 A JPH06309925 A JP H06309925A
Authority
JP
Japan
Prior art keywords
compound
compounds
dielectric
chloride
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5097698A
Other languages
Japanese (ja)
Inventor
Kunio Saegusa
Yutaka Suzuki
邦夫 三枝
豊 鈴木
Original Assignee
Sumitomo Chem Co Ltd
住友化学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chem Co Ltd, 住友化学工業株式会社 filed Critical Sumitomo Chem Co Ltd
Priority to JP5097698A priority Critical patent/JPH06309925A/en
Publication of JPH06309925A publication Critical patent/JPH06309925A/en
Priority claimed from US08/590,680 external-priority patent/US6126743A/en
Pending legal-status Critical Current

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